Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70691—Handling of masks or workpieces
  • G03F7/70716—Stages
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70691—Handling of masks or workpieces
  • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
  • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
  • H01L21/682—Mask-wafer alignment

Definitions

• the present invention relates to an exposure apparatus such as a semiconductor device, a printed circuit board, or a liquid crystal display element, which moves a table to position an object on a table at a predetermined position and moves the long stroke to the table.
• This invention relates to a translational two-degree-of-freedom stage device capable of directional translation and ⁇ -turning, or a three-degree-of-freedom stage device in which an X-direction translational drive mechanism is added to this translational two-degree-of-freedom stage device.
• a stage apparatus as a first conventional example includes a movable support mechanism that pivotally supports one end of a stage having a movable table and the other end, and a movable table and a movable support mechanism. It is possible to position the stage accurately not only in the straight direction but also in the rotational direction, including the position control unit to be controlled, and to move the stage at high speed with high responsiveness. (See, for example, Patent Document 1).
• the conventional second example of the 2-axis parallel '1-axis turning motion guide mechanism and the 2-axis parallel' 1-axis turning table device using the same can be easily assembled to the table and supported in-house with high accuracy.
• a table device using a 2-axis parallel / single-axis turning motion guide mechanism for example, see Patent Document 2.
• Patent Document 1 Japanese Patent Laid-Open No. 2003-316440 (FIGS. 1, 3, 4, 5, and 7)
• Patent Document 2 Japanese Patent Laid-Open No. 11-245128 (FIGS. 2, 4, and 5)
• FIG. 23 is an external view of the stage apparatus of Patent Document 1.
• FIG. 24 is a perspective view showing an aspect of the shaft support portion of the straight traveling stage 1300 of the stage device of Patent Document 1.
• 1400 and 1500 are axial support members
• 1410 and 1510 are outer cylindrical portions
• 1420 and 1520 are axial support members
• 1530 is a leaf spring portion.
• the leaf spring portion 1530 is provided on the inner cylindrical portion 1520 and is fixed to the lower surface of the base portion 1320 via a support member.
• FIG. 25 is a diagram showing details of the shaft support member 1400 and the shaft support member 1500 of the stage device of Patent Document 1.
• FIG. 25 (a) shows a cross-section of the shaft support member 1400 when viewed from the first end 1350 side of the base portion 1320
• FIG.25 (b) shows the shaft support member 1500 at the second end of the base portion 1320.
• the end 1 360 shows a cross section when the side force is also seen.
• the inner cylindrical portion 1420 shown in FIG. 25 (a) rotates relatively smoothly with respect to the outer cylindrical portion 1410.
• the inner cylindrical portion 1520 shown in FIG. 25 (b) is provided with a leaf spring 1530 along the radial direction of the inner cylindrical portion 1520.
• FIG. 26 is a view of the inner cylindrical portion 1520 of the stage device of Patent Document 1 as viewed from above.
• 1522 is / J
• the inner diameter ⁇ ⁇ 1524 is the large inner diameter 15 ⁇ 1526 is the boundary ⁇ J plane
• 1560 is the screw.
• the leaf spring 1530 has a long shape, and there are oval through holes at both ends of the leaf spring 1530.
• the major axis direction of the oval through hole is substantially the same as the longitudinal direction of the leaf spring 1530. It is.
• Both end portions of the leaf spring 1530 are provided on the boundary side surface 1526 of the inner cylindrical portion 1520 by screws 1560 through the through holes.
• the leaf spring 1530 is configured such that the longitudinal direction of the leaf spring 1530 is substantially the same as the diameter direction of the inner cylindrical portion 1520. When the leaf spring 1530 is pinched in the direction of the white arrow as shown in the figure, both end portions of the leaf spring 1530 can be finely moved along the oval through hole.
• a support member 1570 is fixed to the center portion of the leaf spring 1530 with screws 1580.
• the support member 1570 is T-shaped, and the upper portion of the support member 1570 is a base portion 1 of a straight stage 1300 by a screw 1590. It is fixed to the lower surface of 320. By providing the rotary bearing 1540 and the roller 1550, the inner cylindrical portion 1520 can rotate relatively smoothly with respect to the outer cylindrical portion 1510.
• rectilinear stage 1300 can move relative to the inner cylindrical portion 1520 when the leaf spring 1530 is pinched.
• a straight stage 1300 constitutes a “stage”
• a movable table 1310 constitutes a “movable table”.
• the shaft support member 1400 constitutes a “first movable support mechanism”
• the shaft support member 1500 constitutes a “second movable support mechanism”.
• the first end portion 1350 forms “one end portion”
• the second end portion 1 360 forms “other end portion”.
• the leaf spring portion 1530 constitutes an “elastic member”.
• FIG. 27 shows a specific mode for positioning the table of the stage device of Patent Document 1.
• Rows f shown in FIGS. 27 (a) to 27 (c) are plan views showing the outline of the three linear stages 1100, 1200 and 1300 and the movable tables 1110, 1210 and 1310.
• Fig. 27 (a) the movable table 1110 is located at the center of the linear stage 1100 in the X direction, the movable table 1210 is located at the center of the linear stage 1200 in the X direction, and the linear stage 1 300 is movable in the center of the Y direction.
• Fig. 27 (b) shows that both the movable table 1110 of the linear stage 1100 and the movable table 1210 of the linear stage 1200 are moved in the positive direction by the distance Y1 as the reference position force, and the movable table 1310 of the linear stage 1300 is moved.
• the state when the reference position force is also moved in the positive direction by the distance XI is shown.
• the entire linear stage 1300 can be moved in the Y direction.
• the movable table 1310 can be positioned at a desired position in the XY direction.
• the movable table 1110 of the rectilinear stage 1100 is moved in the negative direction by the distance Y2 from the reference position, and the movable table 1210 of the rectilinear stage 1200 is moved in the positive direction by the distance Y2 as well.
• the entire straight stage 1300 Can be positioned at a position rotated by 0.
• the movable table 1110 and the movable table 1210 at relatively different positions, the entire linear stage 1300 can be positioned at a position rotated by a desired angle, and the movable table 1310 can be It can be positioned at a position rotated by a desired angle.
• the support member 1570 that supports the base portion 1320 of the rectilinear stage 1300 described above moves.
• the leaf spring portion 1530 fixed to the support member 1570 is pinched.
• FIG. 28 is a diagram showing a state when the leaf spring portion 530 of the stage device of Patent Document 1 is squeezed.
• a support member 1570 is shown when moved to the left in the drawing. By the movement of the support member 1570, the leaf spring portion 1530 is pinched at the position indicated by the symbol M.
• the first end 1350 of the base portion 1320 of the linear stage 1300 is configured to only support the linear stage 1300, so that the rotation center at the first end 1350 is used as a reference.
• the position of the movable table 1310 along the longitudinal direction of the rectilinear stage 1300 can be calculated.
• the second end 1360 of the base portion 1320 of the rectilinear stage 1300 is configured to support the rectilinear stage 1300 and move in the longitudinal direction of the rectilinear stage 1300, thereby rotating the rectilinear stage 1300.
• the movement can be smooth.
• FIG. 29 is a partially broken exploded perspective view of the 1-axis turning motion guide mechanism of Patent Document 2.
• FIG. 30 is a 2-axis parallel shown in FIG. 29. • 2-axis parallel using the 1-axis turning motion guide mechanism 1
• FIG. 3A is a plan view showing the shaft turning table device with the table omitted and indicated by a two-dot chain line
• FIG. 3B is a front view
• FIG. 31 is a plan view of the table shown in FIG.
• the 2-axis parallel and 1-axis turning motion guide mechanism is composed of a 2-axis parallel motion guiding portion 270, a turning motion guide portion 280 assembled to the 2-axis parallel motion guiding portion 270, and a force.
• the two-axis parallel / single-spinning motion guide mechanism 201A, 201B, 201C , 201D the table 233 is supported so as to be movable in two axial directions parallel to the base 234 and orthogonal to each other, and can be turned around a turning axis CO located at the center of the table 233. .
• Three of the four two-axis parallel and one-axis swivel motion guide mechanisms 201A, 201B, and 201D are driven to extend and contract in a linear direction, and the rotary motor 238 and the rotary motion of this rotary motor 238 are linearly moved.
• a linear drive mechanism 237 23, 23 7 ⁇ , 237D composed of a feed screw mechanism 239 for converting to 237 is operatively connected.
• 2-axis parallel ⁇ 1-axis turning motion guide mechanism 201C can move freely.
• the conventional two-axis parallel and one-axis turning motion guide mechanism and the two-axis parallel / one-axis turning table device using the same perform the positioning by moving or turning the table in parallel.
• the stage device of Patent Document 1 uses an elastic member and obtains a degree of freedom by the elastic member pinching, it must be positioned in consideration of the flexural displacement of the elastic member. In other words, there is a problem that the positioning cannot be performed accurately due to hysteresis of the elastic characteristics of the leaf spring or the non-linearity of the restoring force and displacement of a coil spring or air spring used for the elastic member.
• the present invention has been made in view of such a problem.
• Both provide a translational rotation two-degree-of-freedom stage device capable of long stroke movement for conveyance applications, and a three-degree-of-freedom stage device capable of ⁇ ⁇ movement including long stroke movement using the translational rotation two-degree-of-freedom stage device.
• the present invention is configured as follows.
• the invention according to claim 1 is a translational turning two-degree-of-freedom stage device in which a table on which an object is mounted is positioned at a predetermined position via a driving mechanism arranged in a machine base unit, wherein the driving mechanism has a degree of freedom of translation.
• a first mechanism part composed of two translational degree of freedom parts having a rotational degree of freedom and one rotational degree of freedom part,
• An electric motor provided in one of the two translational freedom units of the first mechanism unit, an operation amount detector for detecting an operation amount of the mechanism unit serving as a detection target, and a command signal
• An electric motor control device comprising a controller for controlling the electric motor
• a single-axis drive translational rotation mechanism composed of
• the single-axis drive translational rotation mechanism includes a command device that gives an operation command to the controller and moves the table in one direction by moving the motor in the translation direction. This is a translational turning two-degree-of-freedom stage device.
• the invention according to claim 2 further includes a three-degree-of-freedom mechanism that is the first mechanism portion that does not have the electric motor. It is a stage device.
• the invention according to claim 3 is characterized in that a second drive mechanism comprising the electric motor control device including the electric motor, the operation amount detector, and the controller for driving the translational degree-of-freedom portion to the second mechanical portion.
• the translating and swiveling two-degree-of-freedom stage device characterized by comprising:
• the invention according to claim 4 is characterized in that the first mechanism portion includes a first translational freedom portion provided on the machine base portion and a second translational freedom portion provided on the first translational freedom portion.
• the invention according to claim 5 is characterized in that the first mechanism portion includes a first translational freedom portion provided on the machine base portion and a rotational freedom provided on the first translational freedom portion.
• the invention according to claim 6 is a two-dimensional position sensor for grasping the position of the table or the object on the table, and an image of the object captured by the two-dimensional position sensor, and the object A correction amount calculation unit that calculates a correction amount for correcting the position of the object, and operates the motor based on the correction amount obtained by the correction amount calculation unit, or the target on the table or the table 2.
• the invention described in claim 7 has a plurality of the two-dimensional position sensors.
• the translational turn 2 degree-of-freedom stage device described in 6 is used.
• the invention described in claim 8 is a translational turning two-degree-of-freedom stage device according to any one of claims 1 to 7, wherein a single-axis translational drive mechanism that drives the table with an electric motor in a translational direction is provided above or below the table of the two-degree-of-freedom stage device.
• This is a three-degree-of-freedom stage device using a translational turning two-degree-of-freedom stage device characterized by having
• the invention described in claim 9 has a translational turning two-degree-of-freedom stage structure surrounding the two-degree-of-freedom stage device having a single-axis translational drive mechanism that drives the table with an electric motor in the translational direction. 3 degrees of freedom using a two degree of freedom stage device Device.
• the invention according to claim 10 is a one-axis translation in which the table is driven by a motor in the translation direction in order to drive the translation swivel two-degree-of-freedom stage device according to any one of claims 1 to 7 in the translation direction.
• This is a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device characterized by having a drive mechanism.
• the table can be supported by the three-degree-of-freedom mechanism in addition to the first mechanism portion and the second mechanism portion, and the table can be prevented from stagnation.
• a plurality of points can be supported, and the load on the table or the object can be driven in a balanced manner.
• the rotary drive unit can be placed across the linear motion guides of the two translational drive units and can be supported continuously from the table to the machine base,
• the drive mechanism can be supported while suppressing deformation.
• the table moving operation can be quickly performed by calculating the position correction value using the two-dimensional position sensor for the arrangement state of the table or the object on the table.
• the object can be arranged by dividing a plurality of 2D position sensors and grasping the object. I can grasp it. Moreover, it can be used for a plurality of types of grasping objects. According to the inventions described in claims 8 to 10, since the table can perform a long stroke translational movement in one direction and a turning movement, and further has a single-axis translational drive mechanism, three freedoms of XY translation and ⁇ rotation are possible. Can have a degree.
• FIG. 1 shows a first embodiment of the present invention.
• FIG. 5 is a schematic plan view and a schematic side view showing the arrangement of a rolling mechanism and a second mechanism part.
• FIG. 2 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a first embodiment of the present invention, and an outline of translation / rotation degrees of freedom of a single-axis drive translation / rotation mechanism and a second mechanism section.
• FIG. 3 is a diagram showing the ⁇ rotation movement of the table of the translational swivel two degree of freedom stage apparatus showing the first embodiment of the present invention.
• FIG. 4 is a diagram showing Y translation of the table of the translational swivel two-degree-of-freedom stage device showing the first embodiment of the present invention.
• FIG. 6 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a second embodiment of the present invention, and an outline of translation / rotation degrees of freedom of a single-axis drive translation / rotation mechanism and a second mechanism section.
• FIG. 7 is a diagram showing a position correction method of an object by a two-dimensional position sensor of a translational swivel two-degree-of-freedom stage device showing a second embodiment of the present invention.
• FIG. 8 is a diagram illustrating the ⁇ rotation movement of the table of the translational swivel two-degree-of-freedom stage device according to the second embodiment of the present invention.
• FIG. 9 is a schematic plan view showing the arrangement of the single-axis drive translational rotation mechanism and the second mechanism part of the translational swivel two-degree-of-freedom stage device according to the third embodiment of the present invention.
• FIG. 10 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a third embodiment of the present invention, and a diagram showing an outline of translation / rotation degrees of freedom of the single-axis drive translation / rotation mechanism and the second mechanism unit.
• FIG. 11 is a view showing the ⁇ -turn movement of the table of the translation-turning two-degree-of-freedom stage device according to the third embodiment of the present invention.
• FIG. 12 is a schematic plan view showing the arrangement of the single-axis drive translational rotation mechanism and the second mechanism part of the translational swivel two-degree-of-freedom stage device showing the fourth embodiment of the present invention.
• FIG. 6 is a schematic plan view showing an arrangement of a rolling mechanism, a second mechanism part, and a second drive mechanism.
• Translational rotation showing a sixth embodiment of the present invention Three-degree-of-freedom using a two-degree-of-freedom stage device A schematic plan view and a side view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism section using a stage device FIG.
• FIG. 17 Translational swivel showing a sixth embodiment of the present invention Three degrees of freedom using a two degree of freedom stage device Control block diagram of the stage device and a translational rotation of the first mechanism and the second mechanism part.
• FIG. 17 Three degrees of freedom using a two degree of freedom stage device Control block diagram of the stage device and a translational rotation of the first mechanism and the second mechanism part.
• FIG. 20 Translational swivel showing a eighth embodiment of the present invention Three-degree-of-freedom using a two-degree-of-freedom stage device A schematic plan view showing the arrangement of a single-axis drive translation rotation mechanism and a second mechanism section using a stage device; FIG.
• Translation swivel showing 8th embodiment of the present invention 3 degrees of freedom using a 2 degrees of freedom stage device
• FIG. 22 is a schematic view showing an operation example of a three-degree-of-freedom stage device using a translational-turning two-degree-of-freedom stage device showing an eighth embodiment of the present invention.
• FIG. 23 is an external view of the stage device of Patent Document 1.
• FIG. 24 is a perspective view showing an aspect of a shaft support portion of a straight stage 1300 of a stage apparatus according to Patent Document 1.
• FIG. 25 shows details of the shaft support member 1400 and the shaft support member 1500 of the stage device of Patent Document 1. It is a figure.
• FIG. 26 is a view of the inner cylindrical portion 1520 of the stage device of Patent Document 1 with an upward force.
• FIG. 27 is a perspective view showing a specific mode for positioning the table of the stage device of Patent Document 1.
• FIG. 28 is a view showing a state when the leaf spring portion 530 of the stage device of Patent Document 1 is cramped.
• FIG. 29 is a partially broken exploded perspective view of the biaxial parallel / uniaxial turning guide mechanism of Patent Document 2.
• FIG. 30 A two-axis parallel / single-axis turning table device using the two-axis parallel / single-axis turning motion guide mechanism shown in FIG. 27.
• FIG. 30 (a) is indicated by a two-dot chain line with the table omitted.
• a plan view, (b) is a front view.
• FIG. 31 is a plan view of the table shown in FIG. 28.
• FIG. 1 is a schematic plan view, a schematic side view, and a side view showing an arrangement of a single-axis drive translational rotation mechanism and a second mechanism part of a translational swivel two-degree-of-freedom stage device according to a first embodiment of the present invention.
• FIG. 2 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a first embodiment of the present invention, and an outline of translation / rotation degrees of freedom of a single-axis drive translation / rotation mechanism and a second mechanism section.
• 1 is an electric motor (linear motor)
• 2 is an operation amount detector
• 3 is a controller
• 4 is a table
• 5 is an object
• 6 is a single-axis drive translational rotation mechanism
• 7 is a machine base
• 8 is
• 11 is a translation drive unit
• 12 is a translational freedom unit
• 13 is a rotational freedom unit
• 16 is a second mechanism unit
• 25 is a motor control device.
• the single-axis drive translational rotation mechanism 6 includes a translation drive unit 11, a rotation degree of freedom unit 13, and a translation degree of freedom unit 12 in this order from the machine base unit 7 side. From the part 7 side, the translational freedom degree part 12 and the rotational freedom degree part are configured in this order.
• the part where the present invention is different from Patent Document 1 is a part provided with a uniaxial drive translational rotation mechanism 6 and a second mechanism part 16.
• the single-axis drive translational rotation mechanism 6 has a translational drive unit 11 driven by an electric motor 1 and a rotational degree of freedom part 13 as in Patent Document 1, but the rotational degree of freedom part 13 of the present invention is similar to a plate panel.
• the single-axis drive translational rotation mechanism 6 of the present invention without an elastic body is provided with a translational degree-of-freedom portion 12 that is not found in Patent Document 1. You can also rotate table 4 freely
• the second mechanism portion 16 supported by the degree portion 13 and the translational degree of freedom portion 12 is also not disclosed in Patent Document 1.
• the difference between the present invention and Patent Document 2 is that the table 4 operates only in one translational direction.
• the present invention provides a single-axis translational rotation mechanism so that long stroke translational movement is possible.
• the 6 translational drive parts 11 and the second mechanism part 16 have 13 translational degrees of freedom in the same direction.
• the two-axis parallel '1-axis swivel motion guide mechanism 270 in Patent Document 2 and the translational drive unit 11, translational degree of freedom unit 12, and rotational degree of freedom unit 13 of the single-axis drive translational rotation mechanism 6 have similar forces.
• the second mechanical part 16 is not disclosed in Patent Document 2.
• the single-axis drive translational rotation mechanism 6 is arranged so as to be able to move along the linear motion guides 21 on both sides ( ⁇ , ⁇ ) of the machine base unit 7, and the second mechanism unit 16 It is located in the turning center (C).
• Controller 3 receives the operation command from command unit 8 and operates linear motor 1.
• the operation amount detector 2 detects the movement amount of the linear motor 1 or the linear motion guide block 22 driven by the linear motor 1 and other parts, and the movement amount sets the difference from the operation command of the command section 8 to 0.
• the controller 3 controls the operation.
• FIG. 3 is a view showing the ⁇ turning movement of the table of the translation turning 2 degree-of-freedom stage apparatus according to the first embodiment of the present invention.
• the operation is as follows: A, saddle point Two linear motors 1 of translation drive unit 11 of single axis drive translation rotation mechanism 6 Table 4 can be turned around 16 as the center. If the 1-axis drive translational rotation mechanism 6a is operated by ⁇ ⁇ 1 and the 1-axis drive translational rotation mechanism 6b is operated by ⁇ ⁇ 2, the rotational freedom part 13 of the 1-axis drive translational rotation mechanism 6a, 6b operates 0, and the translational freedom degree. Since part 12 moves ⁇ XI and ⁇ ⁇ 2, table 4 rotates ⁇ . That is, the rotational degree of freedom part 13 of the second mechanism part 16 acts, and the table 4 rotates ⁇ .
• the amount of movement of the table rotation, the linear motor 1 of each of the single-axis drive translational rotation mechanism 6 and the second mechanism unit 16, the degree of freedom of rotation 13, and the degree of freedom of translation 12 is determined geometrically. .
• FIG. 4 shows a table of a translational swivel two-degree-of-freedom stage device showing a first embodiment of the present invention. It is a figure which shows translational movement.
• ⁇ ⁇ is the amount of movement of the linear motor 1 attached to the single-axis drive translational rotation mechanism. If both linear motors la and lb are operated by the same amount, table 4 is translated.
• the translational movement may be performed in the posture after the turning ⁇ shown in FIG.
• the first embodiment of the present invention Since the first embodiment of the present invention has the above-described configuration, it becomes a translational swivel two-degree-of-freedom stage device capable of translational Y-direction movement including swirl ⁇ and a long stroke.
• FIG. 5 is a schematic plan view and a schematic side view showing the arrangement of the uniaxially driven translational rotation mechanism and the second mechanism portion of the translational swivel two-degree-of-freedom stage device according to the second embodiment of the present invention.
• FIG. 7 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a second embodiment of the present invention, and an outline of translational degrees of freedom of translation of a single-axis drive translation / rotation mechanism and a second mechanism unit.
• the basic components of the second embodiment are the same as those of the first embodiment.
• the second embodiment differs from the first embodiment in the configuration of a uniaxial drive translational rotation mechanism.
• the single-axis drive translational rotation mechanism 6 includes a translation drive unit 11, a translational freedom unit 12, and a rotational freedom unit 13 in this order from the machine base unit 7 side.
• the arrangement of the single-axis drive translational rotation mechanism 6 and the second mechanism section 16 is the same as that in the first embodiment.
• the second embodiment of the present invention differs from the first embodiment in a portion including a two-dimensional position sensor 9 and a correction amount calculation unit 15.
• FIG. 7 is a diagram illustrating a method for correcting the position of an object using a two-dimensional position sensor of a translational swivel two-degree-of-freedom stage device according to a second embodiment of the present invention.
• the two-dimensional position sensor 9 can detect the deviation amount by detecting the table 4 or the object 5 on the table 4 by the correction amount calculation unit 15. Once the amount of deviation is known, the translation Y direction and swivel ⁇ direction can be corrected as shown in Fig. 7.
• FIG. 8 is a diagram showing the ⁇ turning movement of the table of the translational turning two-degree-of-freedom stage device showing the second embodiment of the present invention.
• the linear motor 1 of the translation drive unit 11 of the two single-axis drive translation rotation mechanisms 6 when the linear motor 1 of the translation drive unit 11 of the two single-axis drive translation rotation mechanisms 6 is operated to the opposite side as shown in FIG.
• the table 4 can be swiveled around the mechanical part 16. If the single-axis drive translational rotation mechanism 6a is operated by ⁇ Yl and the single-axis drive translational rotation mechanism 6b is operated by ⁇ 2, the rotational freedom part 13 of the single-axis drive translational rotation mechanism 6a, 6b will operate 0, and the translational freedom part. 12 moves ⁇ XI and ⁇ ⁇ 2, so table 4 turns ⁇ . That is, the rotational degree-of-freedom portion 13 of the second mechanism portion 16 acts to rotate the table 4 force S ⁇ .
• the movement amounts of the linear motors la and lb when the table 4 is turned 0 are as follows: ⁇ ⁇ 1, ⁇ ⁇ 2, Movement amount ⁇ XI, ⁇ ⁇ 2 is different, but table 4 turns, movement amount of linear motor 1 of single axis drive translational rotation mechanism 6 and second mechanism part 16, rotation degree of freedom 13 and translation degree of freedom 12 Are the same in that they can be determined geometrically.
• the translation table 4 can be moved in the same manner as in the first embodiment.
• Example 3
• FIG. 9 is a schematic plan view showing the arrangement of the single-axis drive translation rotation mechanism and the second mechanism portion of the translation swivel two-degree-of-freedom stage device according to the third embodiment of the present invention
• Fig. 10 shows the arrangement of the present invention.
• FIG. 4 is a control block diagram of a translational turn two-degree-of-freedom stage device showing a third embodiment, and an outline of translation / rotation degrees of freedom of a single-axis drive translation / rotation mechanism and a second mechanism unit.
• the basic components of the third embodiment are the same as those of the first and second embodiments.
• the difference from the first and second embodiments is that a three-degree-of-freedom mechanism 18 without the linear motor 1 is further added.
• the arrangement positions of the single-axis drive translational rotation mechanisms 6a and 6b are different from those of the first embodiment.
• the two-dimensional position sensor 9 and the correction amount calculation unit 15 are not shown.
• the structure of the single-axis drive translational rotation mechanism 6 is the same as in the first embodiment.
• the translation drive unit 11, the rotational freedom unit 13, and the translational freedom unit are arranged upward from the machine base unit 7 side.
• the order is 12.
• the configuration of the three-degree-of-freedom mechanism 18 is also the configuration of the translational degree of freedom part 12, the rotational degree of freedom part 13, and the translational degree of freedom part 12 from the machine base part 7 side.
• Patent Document 1 and Patent Document 2 is the same as the first embodiment.
• FIG. 11 shows a table of a translational swivel two-degree-of-freedom stage device showing a third embodiment of the present invention.
• the linear motor 1 of the translation drive unit 11 of the two single-axis drive translation and rotation mechanisms 6 of point A and B when the linear motor 1 of the translation drive unit 11 of the two single-axis drive translation and rotation mechanisms 6 of point A and B is operated to the opposite side, the second point of C point
• the table 4 can be swiveled around the mechanism portion 16. If the 1-axis drive translational rotation mechanism 6a is operated by ⁇ ⁇ 1 and the 1-axis drive translational rotation mechanism 6b is operated by ⁇ ⁇ ⁇ 2, the rotational degree of freedom 13 of the 1-axis drive translational rotation mechanism 6a, 6b operates 0, and the translational freedom degree.
• the part 12 moves by ⁇ XI, ⁇ ⁇ 2, and the translation degree of freedom part 12 of the three-degree-of-freedom mechanism 18 also moves by ⁇ ⁇ 3, ⁇ ⁇ 4, ⁇ ⁇ 3, ⁇ ⁇ 4, and the rotational degree-of-freedom part of the second mechanism part 16 13 acts and Table 4 turns ⁇ .
• the amount of movement of the linear motors la and lb is different, but the turning of the table 4 and the single-axis drive translation / rotation mechanism 6
• the movement amount of each linear motor 1, each rotational degree of freedom 13, and translational degree of freedom 12 of the second mechanism section 16 is the same in that it can be determined geometrically.
• the movement of the table 4 in the translation Y direction can be performed in the same manner as in the first embodiment.
• FIG. 12 is a schematic plan view showing the arrangement of the single-axis drive translation and rotation mechanism and the second mechanism part of the translation and swivel two-degree-of-freedom stage device according to the fourth embodiment of the present invention.
• FIG. FIG. 10 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a fourth embodiment, and an outline of translation / rotation degrees of freedom of a single-axis drive translation / rotation mechanism and a second mechanism unit.
• the basic components of the fourth embodiment are the same as those of the first embodiment.
• the fourth embodiment differs from the first embodiment in that the linear motor 1 is also arranged in the second mechanism section 16 as the second drive mechanism 19 as shown in FIG. The point is that it is equipped with vessel 2.
• the configuration and arrangement of the first mechanism parts 6a and 6b are the same as those in the first embodiment. Further, the description of the two-dimensional position sensor 9 and the correction amount calculation unit 15 is omitted.
• the mechanism 19 is also equipped with a linear motor lc, the propulsive force in the Y direction can be increased, and the capacity of the motor can be selected so that the thrust of each linear motor is distributed. .
• FIG. 14 is a schematic plan view showing the arrangement of a single-axis drive translation / rotation mechanism, a second mechanism section, and a second drive mechanism of a translation / swivel two-degree-of-freedom stage device showing a fifth embodiment of the present invention
• FIG. 15 is a control block diagram of a translational swivel two-degree-of-freedom stage device showing a fifth embodiment of the present invention, and an outline of translation / rotation degrees of freedom of the single-axis drive translational rotation mechanism and the second mechanism part. .
• the basic components of the fifth embodiment are the same as those of the first embodiment.
• the arrangement of the single-axis drive translational rotation mechanism 6 and the second mechanism unit 16 is an arrangement in which the three-degree-of-freedom mechanism 18 of the third embodiment is replaced with the single-axis drive translational rotation mechanism 6.
• the third embodiment is different from the third embodiment in that a linear motor 1 is further added.
• the two-dimensional position sensor 9 and the correction amount calculation unit 15 are omitted.
• the configuration of the single-axis drive translation / rotation mechanism 6 is the same as the first embodiment in the order of translation / rotation and translation. Further, the difference between the present invention and Patent Document 1 and Patent Document 2 is the same as the first embodiment.
• FIG. 16 is a plan view showing the arrangement of a uniaxially driven translational rotation mechanism using a three-degree-of-freedom stage device using a translational-turning two-degree-of-freedom stage device and a second mechanism portion according to the sixth embodiment of the present invention.
• Schematic diagram and side schematic diagram, Fig. 17 is a control block diagram of a three-degree-of-freedom stage device using a translational-turning two-degree-of-freedom stage device showing a sixth embodiment of the present invention, a single-axis drive translational rotation mechanism, and a second It is a figure which shows the outline of the translation and rotation freedom degree of a mechanism part.
• a translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment.
• Translational rotation Two-degree-of-freedom stage unit 30 A single-axis translational drive mechanism 24 is placed on the table 4 to achieve translational X-direction motion.
• the translational swivel 2-degree-of-freedom stage device 30 translates table 4 in the Y direction and swivel ⁇ , as in the first example, and uniaxial translation on table 4 Since the drive mechanism 24 operates in the translational X direction, it becomes a three-degree-of-freedom stage device that operates in three degrees of freedom of XY 0.
• FIG. 18 is a plan view showing the arrangement of a single-axis drive translation rotation mechanism and a second mechanism section using a three-degree-of-freedom stage device using a translational-turning two-degree-of-freedom stage device according to a seventh embodiment of the present invention.
• Schematic diagram and schematic side view, Fig. 19 is a control block diagram of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing a seventh embodiment of the present invention, a single-axis drive translational rotation mechanism, and a second It is a figure which shows the outline of the translation and rotation freedom degree of a mechanism part.
• a translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment.
• the translational swivel two-degree-of-freedom stage device 30 is disposed on a one-axis translational drive mechanism 24 provided with two linear motors.
• the translation swivel two-degree-of-freedom stage device 30 translates the table 4 in the Y-direction and swivel ⁇ , as in the first embodiment, and the translation-turn two-degree-of-freedom stage device.
• the 30 machine base parts 4 are operated in the X direction by the single-axis translation drive mechanism 24, so that a three-degree-of-freedom stage device that performs three degrees of freedom of XY 0 is obtained.
• FIG. 20 is a plan view showing the arrangement of a single-axis drive translational rotation mechanism and a second mechanism section using a three-degree-of-freedom stage device using a translational-turning two-degree-of-freedom stage device showing an eighth embodiment of the present invention.
• Schematic diagram and side schematic diagram, Fig. 21 is a control block diagram of a three-degree-of-freedom stage device using a translational swivel two-degree-of-freedom stage device showing an eighth embodiment of the present invention, a single-axis drive translational rotation mechanism, and a second It is a figure which shows the outline of the translation and rotation freedom degree of a mechanism part.
• the two-dimensional position sensor 9 is provided, and the image force detected by the two-dimensional position sensor 9 is also calculated by the correction amount calculation unit 15. The amount of displacement of the object 5 on the table 4 can be grasped.
• the same two-dimensional position sensor 9 as in the second embodiment is used, and the quantity of the two-dimensional position sensor 9 is different.
• a translational swivel two-degree-of-freedom stage device 30 has the configuration shown in the first embodiment.
• Translational swivel A gate-type structure 28 is formed so as to surround the two-degree-of-freedom stage device 30, and a single-axis translation drive mechanism 24 is arranged thereon, and the X-axis table 29 can be moved in the translational X direction. Since it is configured as described above, as in the first embodiment, the translation swivel two-degree-of-freedom stage device 30 translates the table 4 in the Y direction and swivels ⁇ . The axis translation drive mechanism 24 translates the X axis table 29 in the translation X direction, so that it becomes a three-degree-of-freedom stage device that performs three degrees of freedom of ⁇ .
• FIG. 22 is a schematic diagram showing an operation example of the three-degree-of-freedom stage device using the translational-turning two-degree-of-freedom stage device according to the eighth embodiment of the present invention.
• the line indicated by (1) is the basic trajectory position of the operation required in the process where the 3-DOF stage device performs processing and inspection.
• the line indicated by (2) is the basic trajectory position where the position force is also shifted by ⁇ ⁇ and ⁇ ⁇ .
• the line indicated by (3) is a shifted locus or position when the object 5 is placed on the table 4.
• the line indicated by (4) is the trajectory position obtained by correcting the deviation of the trajectory and position in (3) in the ⁇ and ⁇ directions.
• the object 5 When the object 5 is placed on the table, the object 5 has a displacement amount as shown in (3). Therefore, the translational swivel two-degree-of-freedom stage device 30 is moved in the translational heel direction, and the table 4 is moved so that the mar force on the object 5 is included in the angle of view of the two-dimensional position sensor 9.
• the two-dimensional position sensor 9 detects the marker, and the correction amount calculation unit 15 grasps the deviation amount of ⁇ of the object 5 in the same manner as shown in FIG. 7 of the second embodiment.
• Translational swivel The two-degree-of-freedom stage device 30 is capable of translational ⁇ direction and turning ⁇ , so the deviation as shown in (3) is corrected in the ⁇ direction and ⁇ direction, and the locus is as shown in (4).
• the basic trajectory 'position required for the machining and inspection processes is (1), but the 1-axis translation drive mechanism 24 moves by ⁇ 5 processing and inspection can be performed along the correct trajectory 'position.
• the three-degree-of-freedom stage device can be operated by driving the three-degree-of-freedom of XY 0 by the translation-turning two-degree-of-freedom stage device 30 and the single-axis translation drive mechanism 24.
• the uniaxial drive translational rotation mechanism 6 includes a translational drive unit 11, a rotational freedom unit 13, and a translational degree of freedom.
• the second drive unit is composed of the translational freedom unit 12 and the rotational freedom unit in the order from the machine base unit 7 side.
• the single-axis drive translational rotation mechanism is configured. 6 is constructed in the order of the translational drive unit 11, translational freedom unit 12 and rotational freedom unit 13 in the order of the machine base unit 7 side force, but these may be mixed. The same applies to the three-degree-of-freedom mechanism 18.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Details Of Measuring And Other Instruments (AREA)
• Machine Tool Units (AREA)
• Health & Medical Sciences (AREA)
• Environmental & Geological Engineering (AREA)
• Epidemiology (AREA)
• Public Health (AREA)
• Machine Tool Positioning Apparatuses (AREA)
• Machine Tool Sensing Apparatuses (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Priority Applications (1)

Applications Claiming Priority (2)

Publications (1)

Family

ID=37604286

Family Applications (1)

Country Status (5)

Cited By (2)

Families Citing this family (6)

Citations (8)

Family Cites Families (1)

• 2006
  • 2006-06-19 JP JP2007523400A patent/JP4826584B2/ja not_active Expired - Fee Related
  • 2006-06-19 WO PCT/JP2006/312230 patent/WO2007004413A1/ja not_active Ceased
  • 2006-06-19 CN CNA2006800220414A patent/CN101203354A/zh active Pending
  • 2006-06-19 KR KR1020077024407A patent/KR20080002864A/ko not_active Ceased
  • 2006-06-28 TW TW095123411A patent/TW200707622A/zh not_active IP Right Cessation

Patent Citations (8)

Also Published As

Similar Documents

Legal Events