WO2006134818A1

WO2006134818A1 - Film forming device, thin-film manufacturing apparatus, and film forming method

Info

Publication number: WO2006134818A1
Application number: PCT/JP2006/311498
Authority: WO
Inventors: Toshio Negishi
Original assignee: Ulvac, Inc.
Priority date: 2005-06-15
Filing date: 2006-06-08
Publication date: 2006-12-21
Also published as: TW200712229A; KR100893843B1; CN101068949A; CN100591799C; KR20070070223A; JPWO2006134818A1; TWI393793B; JP4855398B2

Abstract

A film forming device capable of forming multiple layers of film in a short time, a thin-film manufacturing apparatus, and a film forming method. Each of the film forming devices (5R), (5G), and (5B) comprises a moving chamber (45) and a turn table (51). A loading plate (61) for loading a substrate (9) thereon is placed on the window part (52) of the turn table (51). When the turn table (51) is rotated and the window part (52) is moved, the loading plate (61) is moved together with the window part (52) on which the substrate (9) is loaded. By merely rotating the turn table (51) by a prescribed angle, a new substrate (9) can be fed from a carrying-in place (56a), the film-formed substrate (9) can be fed to the other film forming place (57), and the empty loading plate (61) can be returned from a carrying-out place (56b) to the carrying-in place (56a). Since all of these operations can be performed at once, a time required for carrying the substrate (9) to the places (56a), (56b), and (57) and a time required for returning the loading plate (61) can be reduced.

Description

Specification

Film forming apparatus, thin film manufacturing apparatus, and film forming method

Technical field

The present invention provides a film forming apparatus and a film forming method.

Background art

Conventionally, a film forming apparatus in which a plurality of types of films are stacked on one substrate, such as an organic EL element, includes a film forming apparatus in which a plurality of film forming chambers are connected to one moving chamber. The substrate on which one type of film is formed in one film forming chamber is once taken out to the moving chamber by a transfer robot installed in the moving chamber and then transferred to another film forming chamber. A new film is formed.

[0003] However, in the conventional film forming apparatus, since one transfer robot normally carries in and out the substrate between the moving chamber and the plurality of film forming chambers, a plurality of substrates are simultaneously formed on one substrate. When manufacturing with a membrane device, there was a problem that it took time to carry the substrate in and out.

[0004] If multiple transfer robots are installed, the time required for loading and unloading substrates can be shortened. However, in order to secure the installation location of the transfer robot, the size of the moving chamber is increased and the number of transfer robots is increased. There is a problem that the film forming apparatus becomes expensive.

[0005] An in-line type film forming apparatus configured such that a plurality of film forming sources are arranged in a straight line and a plurality of substrates pass in sequence on each film forming source does not require a complicated structure of a transfer robot. In addition, since multiple substrates move at the same time, the time required to send the substrate onto the deposition source can be shortened. The in-line type deposition system has the problem of requiring a large installation space.

[0006] Furthermore, in-line type film forming apparatuses rotate a rotating roller on which a substrate is placed to convey the substrate, and dust may be generated when the rotating roller rotates. When the substrate is moved on the film forming source, it is necessary to install a rotating roller on the film forming source. If the dust falls on the film forming source, the film forming source is contaminated.

Patent Document 1: Japanese Patent Laid-Open No. 2003-27213

Disclosure of the invention

Problems to be solved by the invention [0007] The present invention was created to solve the above-described disadvantages of the prior art. The purpose of the present invention is to shorten the tact time and narrow the installation place when continuously forming a plurality of substrates. The present invention provides a film forming apparatus.

Means for solving the problem

[0008] In order to solve the above problems, the present invention provides a film forming apparatus comprising: a moving chamber; a turntable disposed in the moving chamber; and a plurality of film forming chambers connected to the moving chamber. Each film forming chamber has a film forming source disposed below the turntable, and the film forming source is configured to release film forming material particles, and the turntable includes a plurality of film forming sources. A window portion is formed, and a placement plate on which a processing object can be placed is disposed on each window portion, and when the turntable is rotated in a horizontal plane, each window portion is formed with the film. A film forming apparatus configured to be able to move a film forming place above a source.

The present invention is a film forming apparatus, wherein the window portions are arranged in a line at equal intervals on the same circumference around the rotation center of the turntable, and the window portions are statically placed in one film forming location. The film forming apparatus is configured such that when stopped, the window portion also stops at other film forming locations.

The present invention is a film forming apparatus, wherein a carrying-in chamber is connected to the moving chamber, a carrying robot is arranged in the carrying-in chamber, and a moving robot moves on the moving path along which the window portion moves. Carrying-in chamber force A carrying-in place is provided where the processed object to be carried is placed on the placing plate, and the number of the window portions is larger than the number of film-forming places. The film forming apparatus is configured such that when each of the window portions is stationary, the window portion is also stationary at the loading place.

The present invention is a film forming apparatus, wherein a carry-out chamber is connected to the moving chamber, a transfer robot is arranged in the carry-out chamber, and the object to be processed is placed on the moving path by the transfer robot. An unloading place to be carried out from the mounting plate on the part to the unloading chamber is provided, and when the window part is made stationary at the carrying-in place, the window part is also made stationary at the unloading place. Film forming apparatus.

The present invention is a film forming apparatus, wherein the film forming place is arranged between the carrying-in place and the carrying-out place, and between the carrying-in place and the film-forming place adjacent to the carrying-in place. A film forming apparatus in which a distance, a distance between the unloading place and the film forming place adjacent to the unloading position, and a distance between the film forming place and the film forming place are substantially equal to each other. . This invention is a film-forming apparatus, Comprising: The space | interval between the said carrying-out place and the said carrying-in place is a film-forming apparatus made the same as the space | interval between the said film-forming place and the said film-forming place.

The present invention is a film forming apparatus, wherein the placement plate includes a placement portion smaller than the window portion, and a claw portion provided around the placement portion. The claw portion is placed on the edge of the window portion and disposed on the window portion, the window portion has a notch in the periphery, and rotates the mounting plate located above the turntable, and the claw portion When the claw portion is allowed to pass through the notch of the window portion located on the film forming chamber in a state where the portion is aligned with the position of the notch, the mounting plate moves below the turn table. The film forming apparatus is configured as described above.

The present invention is a film forming apparatus having a holding portion capable of holding the mounting plate, and the mounting plate is held by the holding portion and passes through the window portion together with the holding portion. The film forming apparatus is configured to be possible.

The present invention is a film forming apparatus, wherein the holding unit is configured to be rotatable in a horizontal plane together with the mounting plate held by the holding unit.

The present invention is a manufacturing apparatus having a plurality of film forming apparatuses, and each of the film forming apparatuses includes a moving chamber, a turntable disposed in the moving chamber, and a plurality of components connected to the moving chamber. Each film forming chamber has a film forming source disposed below the turntable, and the film forming source is configured to discharge film forming material particles, and the turntable A plurality of windows are formed on each of the windows, and a mounting plate on which a processing object can be placed is disposed on each of the windows, and when the turntable is rotated in a horizontal plane, The unit is configured to be able to move a film forming location above the film forming source, and each moving chamber is connected to a loading chamber and a loading chamber, respectively, and is transported to the inside of the loading chamber and the inside of the unloading chamber. Each robot is arranged on the moving path along which the window moves. A loading place where the processing object carried in from the loading chamber by the transport robot is placed on the mounting plate, and the processing target object from the mounting plate on the window section by the transport robot. Each unloading place to be unloaded to the unloading chamber is set up. The number of the window portions is larger than the number of film formation locations, and when the window portions are stopped at the respective film formation locations, the window portions are also provided at the carry-in location and the carry-out location. Each of the film forming chambers is configured to be stationary, and the carry-in chamber of one film forming chamber is a manufacturing apparatus connected to the carry-out chamber of the other film forming chamber.

In the present invention, the substrate is sequentially transferred onto a plurality of film forming sources, and the film forming material discharged from the film forming source is made to reach the surface of the substrate on each film forming source. A film forming method for forming a plurality of layers of the film forming material on the substrate, placing the substrate on a turntable disposed on the plurality of film forming sources, and rotating the turntable in a horizontal plane. In this film forming method, the substrate is sequentially transferred onto the film forming source.

The present invention is a film forming method, wherein each of the windows provided on the turntable is stationary on the film forming source, the substrate is lowered through the windows on the film forming source, In this film formation method, one substrate is brought close to a film formation source, and film formation is performed on the substrate surface on each film formation source.

The invention's effect

[0009] According to the present invention, the step of sending a substrate from the carry-in location to the first deposition location, the step of sending the substrate from one deposition location to another deposition location, and the delivery from the last deposition location Since the process of sending the substrate to the place and the process of returning the empty placement plate to the unloading place / loading place are performed each time, the time for carrying the substrate to each place is shortened. Since the loading and unloading of the substrate and the movement to the film formation place are all performed on the same turntable, the installation place is smaller than the conventional inline type. Since the substrate is transported by rotating the turntable, no dust is generated on the film forming source and the film forming source is not contaminated.

Brief Description of Drawings

[0010] FIG. 1 is a cross-sectional view illustrating an example of an organic EL element

FIG. 2 is a diagram for explaining an example of the production apparatus of the present invention.

FIG. 3 is a partial sectional view of the film forming apparatus of the present invention.

[Fig.4] Diagram explaining the positional relationship between the loading location, deposition location, and unloading location

[Figure 5] Plan view of mounting plate

[Fig. 6] (a): Plan view when placing the placement plate on the edge of the window, (b): Placement plate is the window Plan view when passing through

[FIG. 7] (a), (b): Cross-sectional views explaining the process of lowering the mounting plate

[FIG. 8] (a), (b): Cross-sectional views explaining the process of raising the mounting plate

[FIG. 9] (a) to (c): Cross-sectional views explaining the process of manufacturing an organic EL device

Explanation of symbols

[0011] 1 …… Manufacturing equipment 5R, 5G, 5B …… Deposition equipment 30 …… Deposition chamber 35 …… Deposition source 45 …… Transfer chamber 48 …… Holding part 50 …… Processing object 51 …… Turn table Bull 52 …… Window 53 …… Incision 56a …… Loading place 56b …… Unloading place 57 …… Deposition place 61 …… Mounting plate 62 …… Mounting part 63 …… Claw part C …… Center of rotation

BEST MODE FOR CARRYING OUT THE INVENTION

[0012] Reference numeral 10 in Fig. 1 shows an example of an organic EL element manufactured by using the film forming apparatus of the present invention. The organic EL element 10 has a transparent support plate 11. Convex partition walls 29 are regularly arranged on the surface of the support plate 11, and the lower electrode film 13 is disposed between the partition walls 29.

[0013] On the lower electrode film 13, light emitting dots 20R, 20G, and 20B of three different colors are arranged. Here, the light emitting dots 20R, 20G, and 20B have red, green, or blue light emitting layers 16R, 16G, and 16B, and a voltage is applied between the upper electrode film 19 and the lower electrode film 13 at the top. When it is energized, it emits light in red, green, and blue, respectively.

Here, each of the light emitting dots 20R, 20G, and 20B has the same configuration except that the colors of the light emitting layers 16R, 16G, and 16B are different, and each of the light emitting dots 20R, 20G, and 20B has a hole from the lower layer. The injection layer 14, the hole transport layer 15, the light emitting layers 16 R, 16 G, and 16 B, the electron transport layer 17, the electron injection layer 18, and the upper electrode film 19 are configured.

Reference numeral 1 in FIG. 2 shows an example of the manufacturing apparatus of the present invention for manufacturing the organic EL element 10. The manufacturing apparatus 1 includes a carry-in part A, a film forming part L, and a carry-out part M. The film forming unit L includes one or more film forming apparatuses 5R, 5G, and 5B.

[0016] The film forming apparatuses 5R, 5G, and 5B have the same structure. First, the film forming apparatuses 5R, 5G, and 5B will be described. Each of the film forming apparatuses 5R, 5G, and 5B includes a moving chamber 45, a loading chamber 41, and a loading chamber 42. The carry-in chamber 41 and the carry-out chamber 42 are connected to the moving chamber 45.

A rotating shaft 77 is inserted in an airtight manner into the bottom wall of the moving chamber 45, and a turntable 51 is attached to the upper end thereof (FIG. 3). A first motor 76 is arranged outside the moving chamber 45, and the lower end of the rotating shaft 77 is connected to the first motor 76. When the first motor 76 is operated, the inner space of the moving chamber 45 is Rotating shaft 77 rotates around its rotational axis P while the external atmospheric force is cut off, and turntable 51 rotates around rotational axis P together with rotating shaft 77! /.

Here, since the rotation axis P is oriented vertically and the turntable 51 is attached to the rotation shaft 77 so as to be horizontal, the turntable 51 rotates in a horizontal plane. The symbol C in FIG. 4 is a point on the rotation axis P and indicates the center of rotation of the turntable 51.

[0019] The turntable 51 is formed with four or more substantially circular window portions 52 penetrating the surface force to the back surface. Each window 52 is located on the circumference of the same circle centered on the rotation center C, and when the turntable 51 rotates about the rotation center C, the window 52 moves along the circumference described above. And move along the circumference! /

[0020] If the angle formed by the two line segments connecting the center of the adjacent window 52 and the rotation center C is the center angle between the windows, the center angle between the windows is equal in each window 52. Therefore, the length of the arc connecting the centers of the adjacent window parts 52, that is, the distance between the window parts along the circumference between the centers of the adjacent window parts 52 is equal. They are arranged at regular intervals along the route.

[0021] Inside the carry-in chamber 41 and the carry-out chamber 42, a transfer robot (not shown) is arranged. Reference numeral 50 in FIG. 4 indicates a processing object. On the moving path of the window part 52, the transfer robot 56 in the loading chamber 41 moves to the loading place 56a where the processing object 50 loaded into the moving chamber 45 is placed and the transfer robot in the unloading chamber 42. The unloading place 56b to be loaded and unloaded from the moving chamber 45 to the unloading chamber 42 is set.

A plurality of through holes 55 are provided on the bottom wall of the moving chamber 45. The centers of the through holes 55 are arranged in a line on the circumference centering on the same rotation axis C with the same radius as the circumference where the window portion 52 is arranged. [0023] The number of through-holes 55 is two fewer than the number of window portions 52. When one window portion 52 is arranged at each of carry-in place 56a and carry-out place 56b, The through holes 55 are arranged so as to be positioned directly below.

[0024] Below each through hole 55, a film forming chamber 30 is disposed. Each film forming chamber 30 has a vacuum chamber 31. A connection port 36 consisting of a through hole is formed in the ceiling of the vacuum chamber 31, and the film forming chamber 30 is hermetically connected to the periphery of the through hole 55 above the edge force of the connection port 36. The internal space and the internal space of the moving chamber 45 are connected via the connection port 36 and the through hole 55.

[0025] The through holes 55 are arranged in a line on the circumference, with the through hole 55 at the position adjacent to the carry-in place 56a as the head, and the through hole 55 at the position adjacent to the carry-out place 56b as the tail. Then, each through hole 55 is arranged in a line along the circumference at the same interval as the interval between the window portions 52 from the first through hole 55 to the last through hole 55.

[0026] When the turntable 51 is stopped with the window 52 positioned on the loading place 56a and the loading place 56b, the window 52 located at the loading place 56a and the window located at the loading place 56b.

Except for 52, a through hole 55 is located directly under each window 52.

[0027] If the upper position of the through hole 55 on the moving path of the window 52 is defined as the film forming place 57, the loading place 5

6a, the unloading place 56b, and the film forming place 57 are arranged in a line on the same circumference around the rotation center C.

[0028] Of the film formation locations 57, if the first film formation location 57 is on the top through-hole 55 and the last film formation location 57 is on the last through-hole 55, the window portion 52 of the carry-in location 56a is shown. When the turntable 51 is rotated in the direction of rotation toward the first film deposition location 57 and the window on one location is moved to an adjacent location, the other windows are also moved to the adjacent location. Has been. Accordingly, when the window 52 of the carry-in place 56a moves to the first film-formation place 57, and the window 52 of the film-formation place 57 moves to the film-formation place 57 or the carry-out place 56b adjacent in the rotation direction, the carry-out place 56 b window 52 returns to entry point 56a.

[0029] A placement plate 61 is placed on each window 52. When the window 52 moves, the placement plate 61 also moves together. The mounting plate 61 will be described with reference to FIG. 5. The mounting plate 61 includes a disc-shaped mounting portion 62 and one or more of the peripheral force of the mounting portion 62 protruding. A claw portion 63 and an opening 64 provided in the placement portion 62 are provided.

[0030] Here, there are a plurality of claw portions 63, and each claw portion 63 is evenly arranged around the placement portion 62, and the distance from the center of the placement portion 62 to the tip of each claw portion 63 This is larger than the distance from the center of the window 52 to the edge of the window 52.

Accordingly, as shown in FIG. 6 (a), when the placement portion 62 is positioned inside the edge of the window portion 52, the tip of each claw portion 63 gets on the edge of the window portion 52. The placement part 62 is formed smaller than the window part 52, and when the tip of each claw part 63 gets on the edge of the window part 52, the placement part 62 is held inside the outer periphery of the window part 52.

[0032] The opening 64 is a through-hole penetrating the mounting portion 62 up to the surface force back surface, and the processing object 50 described above is placed on the edge of the opening 64 in a state where a mask to be described later is faced down. As described above, when the placement plate 61 is disposed on the window portion 52, the processing object 50 is also disposed on the window portion 52.

FIG. 3 shows a state in which the window portion 52 and the processing object 50 arranged on the window portion 52 are stationary at the film forming place 57. As shown in FIG. 3, a second motor 49 is disposed above the through hole 55 outside the moving chamber 45. A lift shaft 47 is inserted into the moving chamber 45 in an airtight and vertical manner. The upper end of the lift shaft 47 is attached to the second motor 49, and the lower end of the lift shaft 47 is located directly above the through hole 55. The holding part 48 is attached as shown.

[0034] The second motor 49 is configured to move the elevating shaft 47 up and down or rotationally. When the elevating shaft 47 is moved up and down, the holding portion 48 moves up and down to rotate the elevating shaft 47. The holding part 48 rotates in a horizontal plane.

The holding unit 48 has a holding device (not shown) and can hold the mounting plate 61. When the mounting plate 61 is made of a material adsorbed by a magnetic force such as metal, the holding device can be made of, for example, an electromagnet, and the mounting plate 61 is provided with a locking member such as a protrusion. In this case, the holding device can be provided with a hook and the hook can be locked to the locking member to hold the mounting plate 61.

[0036] As shown in Fig. 7 (a), the holding portion 48 is configured to be stationary at a position directly above the mounting plate 61, and the holding portion 48 is lowered and brought into contact with the mounting plate 61 for holding. When the device is composed of an electromagnet, the mounting plate 61 is held by the holding portion 48 when a magnetic force is generated by energization. When the holding part 48 is lifted by being attracted to the surface, the mounting plate 61 is lifted from the turntable 51 (FIG. 7 (b)).

[0037] Around the window portion 52, a number of notches 53 having the same number of forces as the claw portion 63 are provided at positions corresponding to the claw portion 63, and the holding portion 48 is rotated so that one claw portion 63 is rotated. When is stopped at a position directly above the notch 53, the other claw portions 63 are also stopped at positions immediately above the other notches 53 (Fig. 6 (b)).

[0038] The shape of the claw part 63 is smaller than the cut 53, and the outer shape of the holding part 48 is smaller than that of the window part 52. Therefore, when the claw part 63 is positioned right above the notch 53 and lowered vertically, the mounting plate 61 and the holding part 48 pass through without contacting the outer periphery of the window part 52. .

[0039] On the mounting plate 61, the processing object 50 carried from the carry-in chamber 41 is placed. The outer shape of the processing object 50 is also smaller than the window part 52, and the processing object can be positioned above and below the turntable 51 by moving the mounting plate 61 up and down together with the holding part 48. (Fig. 8 (a)).

[0040] Further, the mounting plate 61 held by the holding part 48 rotates the holding part 48 to retract the claw part 63 from the cut 53, and put the claw part 63 on the edge of the window part 52. When the suction force of the holding part 48 is extinguished, the processing object 50 can be placed on the turntable 51 (Fig. 8 (b)

) o

The mounting plate 61 is provided with an opening 64, and the processing object 50 is exposed on the bottom surface of the opening 64. When the mounting plate 61 is moved below the turntable 51 and lowered to the inside of the through hole 55 or to a position below the through hole 55, the processing object 50 on the mounting plate 61 passes through the opening 64. Facing the internal space of the vacuum chamber 31.

As shown in FIG. 3, a film forming source 35 is disposed inside the vacuum chamber 31, and the film forming source 35 includes one or more containers 32 and 33. Vapor deposition materials are arranged in the containers 32 and 33, respectively, and vapor of the vapor deposition material is discharged from one or more containers 32 and 33 in a state where the processing object 50 faces the vacuum chamber 31. Then, the vapor reaches the substrate through the opening of the mask on the bottom surface of the opening 64, and a thin film is formed.

[0043] The vacuum chamber 31 of the film formation location adjacent to the carry-in location 56a starts, and is adjacent to the carry-out location 56b. If the vacuum chamber 31 of the film formation site 57 to be used is the last, a hole injecting substance and a hole transporting organic substance are arranged in the top vacuum chamber 31, and the next vacuum chamber 31 has an electron transport. An organic substance capable of feeding and a coloring organic substance as an additive are arranged.

The next vacuum chamber 31 is provided with an electron injecting substance, and the last vacuum chamber 31 is provided with an electrode material.

[0044] Each of the film forming apparatuses 5R, 5G, and 5B includes a hole injecting substance (for example, CuPC; copper phthalocyanine), a hole transporting substance (for example, α-NPD; bis [N- (1-naphthyl) -N [Fer] benzidine), an electron transporting substance (eg, Alq3; tris (8-quinolinolato) aluminum complex), an electron injecting substance (eg, LiF), and an electrode material (eg, metallic aluminum) are arranged. In addition, the additive is different in each of the film forming apparatuses 5R, 5G, and 5B, and the red, green, and blue coloring organic substances are arranged here as the additive, respectively.

When the vapor of the vapor deposition material is discharged in each vacuum chamber 31, a hole injection layer 14, a hole transport layer 15, a light emitting layer 16R, 16G, 16B, an electron transport layer 17, an electron injection layer 18, and an upper electrode layer 19 is formed. The light emitting layers 16R, 16G, and 16B emit light in red, green, or blue.

Next, a process for manufacturing the organic EL element 10 using the manufacturing apparatus 1 will be described. Reference numeral 9 in FIG. 9A denotes a substrate that is carried into the manufacturing apparatus and forms the organic EL element 10. Here, the substrate 9 has a support plate 11, a lower electrode film 13 formed on the surface of the support plate 11, and a partition wall 29.

The carry-in section A shown in FIG. 2 has replacement chambers 21 and 22, a drying chamber 23, a cleaning chamber 24, a cooling chamber 25, and a standby chamber 26, and the cleaned substrate 9 It is carried into the replacement chambers 21 and 22, an inert gas (for example, N2 gas) is introduced into the replacement chambers 21 and 22, and the atmosphere in the replacement chambers 21 and 22 is replaced with the inert gas. The inside is connected to the inside of the drying chamber 23 and the substrate 9 is carried into the drying chamber 23. A drying gas is introduced into the drying chamber 23, the interior atmosphere is changed to a dry gas atmosphere, moisture on the surface of the substrate 9 is removed, and the substrate 9 is carried into the cleaning chamber 24. Ultraviolet rays are generated inside the cleaning chamber 24, and the ultraviolet rays are irradiated on the surface of the substrate 9 to decompose and remove contaminants, and then are carried into the cooling chamber 25. A cooling device (not shown) is arranged in the cooling chamber 25. Then, after the substrate 9 is cooled, it is carried into the standby chamber 26.

[0048] Each film forming apparatus 5R, 5G, 5B has an evacuation system (not shown), and the film forming apparatuses 5R, 5G, 5B have a moving chamber 45, a loading chamber 41, and a loading chamber 41 in advance. A vacuum atmosphere is formed.

[0049] In the film forming apparatuses 5R, 5G, and 5B, the unloading chamber 42 of the first film forming apparatus 5R is connected to the loading chamber 41 of the next film forming apparatus 5B, and the unloading chamber 42 of the film forming apparatus 5B is the last. Connected to the loading chamber 41 of the tail deposition system 5B. The standby chamber 26 is connected to the carry-in chamber 41 of the first film formation apparatus 5R, and the cooled substrate 9 is first carried into the carry-in chamber 41 of the first film formation apparatus 5R through the standby chamber 26.

[0050] The mask stocker 43 and 44 are connected to the carry-in chamber 41 and the carry-out chamber 42 of each film forming apparatus 5R, 5G, and 5B, and the red mask 70R is moved from the mask stocker 43 to the carry-in chamber 41. The mask 70R and the substrate 9 are overlapped by an alignment apparatus (not shown) and fixed by the fixing member 71 to form the processing object 50.

[0051] An opening is formed in the mask 70R at a position where a red light emitting dot is to be formed, and the processing object 50 passes through each of the film forming locations 57 in succession, and the hole injection layer 14 Then, the hole transport layer 15, the light emitting layer 16R (here red), the electron transport layer 17, the electron injection layer 18, and the upper electrode film 19 are formed in the order described. FIG. 9 (b) shows the substrate 9 in this state, and the substrate 9 on which the red light emitting dots 20R are formed also transfers the loading plate 61 force of the unloading place 56b to the unloading chamber 42.

[0052] After the processing object 50 is removed at the unloading place 56b and the mounting plate 61 that has become empty, the film formation at each film formation place 57 is completed, and from the film formation place 57 to the next film formation place 57 or When the turntable 51 rotates to be sent to the unloading place 56b, the unloading place 56b returns to the loading place 56a. At this time, the mounting plate 61 on which the unprocessed processing object 50 is placed is sent from the carry-in location 56a to the first film-forming location 57.

[0053] In this way, by rotating the turntable 51 so that each window 52 moves to the next place 56a, 56b, 57, the objects to be processed 50 are simultaneously moved to the next place 56a, 56b, 57. The loading plate 61 at the unloading place 56b can be returned to the loading place 56a.

[0054] A separation mechanism (not shown) is arranged in the unloading chamber 42, the processing object 50 moved to the unloading chamber 42 is separated into the mask 70R and the substrate 9, and the mask 70R is returned to the mask stocker 44. Base The plate 9 is sent to the loading chamber 41 of the next film forming apparatus 5G.

[0055] The mask stocker 43 of the second film-forming apparatus 5G and the last film-forming apparatus 5B contains a green mask 70G and a blue mask 70B. When 70G and 70B are superimposed on the substrate, only the position where the green light emitting dot should be formed or the position where the blue light emitting dot should be formed is exposed at the openings of the masks 70G and 70B, and the other positions are masks. Covered with 70G, 70B.

[0056] A green mask 70G is superimposed on the substrate 9 in the loading chamber of the second film forming apparatus 5G, and is already formed by moving in the moving chamber 45 as in the case of the first film forming apparatus 5R. No film is formed at the position of the red light emitting dot 20R and the next light emitting dot to be formed, but the green light emitting dot 20G is formed at the position where the green light emitting dot is to be formed (FIG. 9). (c)) ₀

[0057] The mask G is exchanged with the blue mask 70B in the carry-out chamber 42 of the second film-forming apparatus 5G and the carry-in chamber 42 of the last film-forming apparatus 5B, and the processing object 50 is similarly transferred to the moving chamber. When moving within 45, no film is formed on the already formed light emitting dots 20R, 20G, but blue light emitting dots 20B are formed at positions where blue light emitting dots are to be formed.

The carry-in part M has a discharge standby chamber 28, and the carry-out chamber 42 of the last film forming apparatus 5 B is connected to the discharge standby chamber 28. If the substrate 9 on which the light emitting dots 20B of the above colors are formed is moved from the moving chamber 45 to the unloading chamber 42, the mask 70B is removed, and then the substrate 9 is taken out to the outside atmosphere through the discharge waiting chamber 28, FIG. An organic EL device 10 as shown in Fig. 1 is obtained.

[0059] The above is a description of the case where a new processing target 50 is mounted after the mounting plate 61 after lifting the processing target 50 is moved from the unloading location 56b to the loading location 56a. However, the present invention is not limited to this.

[0060] The processing object 50 is lifted from the placement plate 61 by the transfer robot, and the window 52 on which the placement plate 61 is placed is kept stationary, that is, a new processing object 5 is placed on the same window 52. 0 may be placed on the mounting plate 61. In short, the carry-in place and the carry-out place may be the same place.

[0061] In addition, it is not necessary to separately provide a transfer robot that carries the processing object 50 into the moving chamber 45 and a transfer robot that carries out the processing chamber 45. The physical object 50 may be carried out and carried in.

[0062] The number of window portions 52 is not particularly limited. The number of windows 52 is larger than the sum of the number of carry-in places 56a, the number of carry-out places 56b, and the number of film-formation places 57, so that the windows at the carry-in places 56a, the carry-out places 56b, and the respective film-formation places 57 When the section 52 is stationary, one or more window sections 52 may be stationary in places other than those places 56a, 56b, 57.

[0063] On the other hand, the number of window portions 52 is set to be smaller than the sum of the number of carry-in places 56a, the number of carry-out places 56b, and the number of film-forming places 57, so that the window at the carry-in place 56a When the part 52 is stationary, the window part 52 may not be positioned at one or more film forming places 57 or the unloading place 56b.

[0064] The number of film forming apparatuses 5R, 5G, and 5B is determined according to the type of mask to be replaced, and the number is not particularly limited. When the deposition apparatus 5R to which the substrate 9 is transported first is the first, the deposition apparatus 5B to be transported last is the last, and the intermediate deposition apparatus 5G is between the first and last deposition apparatuses 5R and 5B. In the manufacturing apparatus 1 described above, the number of intermediate film forming apparatuses 5G is one. However, when there are a plurality of intermediate film forming apparatuses 5G, the carry-in chamber 41 of the first intermediate film forming apparatus 5G is the top. The carry-in chamber 41 of the other intermediate film-forming apparatus 5G is connected to the carry-out chamber 42 of the other intermediate film-forming apparatus 5G. The carry-out chamber 42 of the last intermediate film formation apparatus 5G is connected to the carry-in chamber 41 of the last film formation apparatus 5B, and the carry-out chamber 42 of the other intermediate film formation apparatus 5G is another intermediate film formation. Connected to loading room 41 of device 5G.

[0065] Further, when the substrate 9 is sent from the first film forming apparatus 5R to the other film forming apparatuses 5G and 5B, the mask is not changed, and the film formed by the first film forming apparatus 5R is Laminate a new film with other film deposition equipment 5G, 5B.

[0066] When a plurality of film forming apparatuses 5R, 5G, and 5B are provided, the film forming apparatuses 5R, 5G, and 5B are not directly connected to each other, and a cooling chamber or the like is provided between the film forming apparatus 5R and the film forming apparatus 5b. Another processing chamber may be provided, and the substrate 9 subjected to the film forming process by the one film forming apparatus 5R may be transferred to the other film forming apparatus 5G through the processing chamber.

[0067] The case where the film forming source 35 releases the vapor of the film forming material has been described above, but the present invention is not limited to this, and the film forming material force S is sputtered by the film forming source 35 and the sputtered particles are released. Such cases are also included in the present invention. The position where the mounting plate 61 is lowered may be a position above the through hole 55 as long as the film forming material particles (vapor, sputtered particles) can reach the substrate 9.

[0069] The number of film forming chambers 30 is not particularly limited. In addition, the number of films to be deposited in the vacuum chamber 31 of each deposition chamber 30 is not limited to 1 or 2, and three or more layers may be formed in one vacuum chamber 31.

[0070] Although the case where the film forming chamber 30 is connected to the through hole 55 has been described above, the present invention is not limited to this, for example, a processing chamber other than the film forming chamber 30 in the through hole 55. If the window 52 is stationary at a position on the processing chamber and the processing object 50 is lowered together with the mounting plate 61 in the above-described process, the processing object is processed in the processing chamber. 50 can be processed.

[0071] Although the case where the manufacturing apparatus 1 and the manufacturing method of the present invention are used for manufacturing the organic EL element 10 has been described above, the present invention is not limited to this. Any laminate of the above films can be used for various purposes, and various film forming materials can be used.

[0072] The shape of the window 52 and the number and shape of the notches 53 are not particularly limited. In addition, the shape of the mounting plate 61 and the number and shape of the claw parts 63 are determined so that the mounting plate 61 passes through the window part 52 when the claw part 63 and the cut 53 overlap, and the claw part 63 is cut 53. There is no particular limitation as long as the placing plate 61 can be placed on the edge of the window 52 when not overlapping.

Claims

The scope of the claims

[1] A mobile room,

A turntable disposed in the moving chamber;

A plurality of film forming chambers each connected to the moving chamber;

Each film forming chamber has a film forming source disposed below the turntable, and the film forming source is configured to discharge film forming material particles,

A plurality of windows are formed on the turntable,

A placement plate on which a processing object can be placed is disposed on each window, and when the turntable is rotated in a horizontal plane, each window is formed above the film formation source. A film forming apparatus configured to be able to move between places.

[2] The window portions are arranged at equal intervals in a line on the same circumference around the rotation center of the turntable,

2. The film forming apparatus according to claim 1, wherein when the window portion is stationary at one film forming location, the window portion is also stationary at another film forming location.

[3] A loading room is connected to the moving room,

A transfer robot is disposed in the carry-in chamber,

On the moving path along which the window portion moves, a loading place where the processing object loaded from the loading chamber by the transfer robot is placed on the mounting plate is provided,

The number of the window portions is larger than the number of film formation locations, and when the window portions are stationary at the respective film formation locations, the window portions are also configured to be stationary at the loading location. Item 2. The film forming apparatus according to Item 1.

[4] A carry-out chamber is connected to the moving chamber, a transfer robot is disposed in the carry-out chamber, and the object to be processed is placed on the window by the transfer robot on the moving path. An unloading place to be unloaded from the unloading chamber is provided,

4. The film forming apparatus according to claim 3, wherein when the window portion is stationary at the carry-in location, the window portion is also stationary at the carry-out location.

[5] The film formation place is arranged between the carry-in place and the carry-out place, An interval between the carry-in location and the film-forming location adjacent to the carry-in location, an interval between the carry-out location and the film-formation location adjacent to the carry-out location, the film-formation location, and the formation location. 5. The film forming apparatus according to claim 4, wherein the distance between the film locations is substantially equal to each other.

6. The film forming apparatus according to claim 5, wherein an interval between the carry-out place and the carry-in place is the same as an interval between the film-formation place and the film-formation place.

[7] The placement plate has a placement portion smaller than the window portion, and a claw portion provided around the placement portion,

The mounting plate has the claw portion placed on the edge of the window portion and is disposed on the window portion, and the window portion has a notch in the periphery and is positioned above the turntable. When the claw portion is allowed to pass through the cut of the window portion located on the film forming chamber in a state where the claw portion is aligned with the position of the cut, the mounting plate is 2. The film forming apparatus according to claim 1, wherein the film forming apparatus is configured to be moved below the turntable.

[8] having a holding portion capable of holding the mounting plate,

8. The film forming apparatus according to claim 7, wherein the mounting plate is configured to be able to pass through the window portion together with the holding portion while being held by the holding portion.

[9] The film forming apparatus according to [8], wherein the holding unit is configured to be rotatable in a horizontal plane together with the mounting plate held by the holding unit.

[10] A manufacturing apparatus having a plurality of film forming apparatuses,

Each of the film forming apparatuses includes a moving chamber,

A turntable disposed in the moving chamber;

A plurality of film forming chambers each connected to the moving chamber;

A plurality of windows are formed on the turntable,

A placement plate on which a processing object can be placed is disposed on each window, and when the turntable is rotated in a horizontal plane, each window is a film source. It is configured to be able to move the upper film formation place,

A loading chamber and a unloading chamber are connected to each of the moving chambers,

A transfer robot is disposed inside each of the carry-in chamber and the carry-out chamber, and the processing object carried in from the carry-in chamber by the transfer robot is described above on a moving path along which the window portion moves. A carrying-in place for placing on the placing plate and a carrying-out place for carrying out the object to be processed from the placing plate on the window by the carrying robot to the carrying-out chamber, respectively.

The number of the window portions is larger than the number of film formation locations. When the window portions are stationary at the respective film formation locations, the window portions are also stationary at the carry-in location and the carry-out location, respectively. Configured to

A manufacturing apparatus in which the carry-in chamber of one film formation chamber is connected to the carry-out chamber of another film formation chamber.

[11] The substrate is sequentially transferred onto a plurality of film forming sources, and the film forming material released from the film forming source source is made to reach the substrate surface on each film forming source, respectively. A film forming method for forming a film of the film forming material of a plurality of layers,

A film forming method in which the substrate is placed on a turntable disposed on a plurality of film forming sources, the turn table is rotated in a horizontal plane, and the substrates are sequentially transferred onto the film forming source.

[12] The windows provided on the turntable are stationary on the film formation source, the substrates are lowered through the windows on the film formation source, and one sheet is provided for each film formation source. 12. The film forming method according to claim 11, wherein the substrate is brought close to each other and film formation is performed on the substrate surface on each film forming source.