WO2006106939A1 - 電子材料用Cu-Ni-Si-Co-Cr系銅合金及びその製造方法 - Google Patents
電子材料用Cu-Ni-Si-Co-Cr系銅合金及びその製造方法 Download PDFInfo
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- WO2006106939A1 WO2006106939A1 PCT/JP2006/306876 JP2006306876W WO2006106939A1 WO 2006106939 A1 WO2006106939 A1 WO 2006106939A1 JP 2006306876 W JP2006306876 W JP 2006306876W WO 2006106939 A1 WO2006106939 A1 WO 2006106939A1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
- C22C9/06—Alloys based on copper with nickel or cobalt as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a precipitation-type copper alloy, and more particularly to a Cu—Ni—Si—Co—Cr-based copper alloy suitable for use in various electronic components.
- Copper alloys for electronic materials used in electronic components such as lead frames, connectors, pins, terminals, relays, switches, etc. have high strength and high conductivity as basic properties (or thermal conductivity). ) Is required.
- high integration and miniaturization and thinning of electronic components have been progressing rapidly, and the level of demand for copper alloys used in electronic components has been increasing accordingly.
- an age hardening type copper alloy is used as a copper alloy for electronic materials.
- Usage is increasing.
- an age-hardening type copper alloy by aging the supersaturated solid solution that has been subjected to solution treatment, fine precipitates are uniformly dispersed to increase the strength of the alloy.
- the amount of solid solution elements in the copper increases. Decrease and improve conductivity. For this reason, a material excellent in mechanical properties such as strength and spring property and having good conductivity and thermal conductivity can be obtained.
- Cu-Ni-S copper alloy is a representative copper alloy that has relatively high electrical conductivity and strength, good stress relaxation properties and bending workability. It is one of the alloys that is currently being actively developed. In this copper alloy, the strength and electrical conductivity are increased by the precipitation of fine Ni-Si intermetallic particles in the copper matrix.
- Patent Document 2 Co forms a compound with Si in the same way as Ni, improves strength, and Cu-Co-S is stronger than Cu-Ni-Si alloys when subjected to aging treatment. It is described that the conductivity is slightly improved. If the cost permits, you can select Cu-Co-Si system or Cu-Ni-Co-Si system! /.
- Patent Document 3 lists Co as an example of a silicide forming element and an impurity that do not adversely affect the properties of the copper alloy.
- the element is There is a description that it should be replaced with an equivalent amount of Ni and that such elements can be present in an effective amount of about 1% or less.
- Co additive is effective for the structure control of Ni-Si based copper alloys with controlled S content and production conditions, and a small amount of Cr is required to improve hot workability.
- the addition strength is effective, and the amount added can be added within a range not exceeding 0.1% by weight.
- Co is an expensive element compared to Ni and has a practically disadvantageous side, so Co is used as an additive element.
- a lot of research has been done on Cu-Ni-Si alloys.
- Co has formed a compound with Si like Ni, and replacing Ni with Co has been said to improve mechanical strength and conductivity slightly, but it is not thought to improve dramatically. I helped.
- the additive of Cr alone contributes to strengthening only by precipitation alone, and the effect as an element that drastically improves the conductivity without damaging the strength was confirmed.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2001-207229
- Patent Document 2 Japanese Patent No. 3510469
- Patent Document 3 Japanese Patent No. 2572042
- Patent Document 4 Japanese Patent No. 3049137
- An object of the present invention is to provide a Cu—Ni—Si—Co—Cr-based copper alloy for electronic materials, which has excellent properties and dramatically improved strength and electrical conductivity.
- the present inventors have conducted intensive research to meet the demand level for copper alloys used in increasingly sophisticated electronic material parts, and focused on Cu-Ni-Si alloys containing Co and Cr. It came to do. After that, as a result of repeated investigations on Cu-Ni-Si alloys containing Co and Cr, the characteristics (particularly strength and conductivity) of Cu-Ni-Si alloys containing Co and Cr It has been found that when the size, composition and distribution of inclusions are controlled under manufacturing conditions, the inclusions are dramatically improved over those previously described.
- the present invention has been made based on the above findings.
- Cu for electronic materials has been improved in conductivity without impairing strength.
- Ni-Si-Co-Cr alloys can be provided.
- Ni, Co, and Si form an intermetallic compound by appropriate heat treatment, and can increase the strength without degrading the conductivity.
- the individual addition amounts of Ni, Co and Si will be described.
- Ni and Co Ni: approx. 0.5 to approx. 2.5% by mass, Co: approx. 0.5 to approx. 2.5% by mass are necessary to satisfy the target strength and conductivity.
- Ni is about 0.5% by mass, Co: less than about 0.5% by mass, the desired strength cannot be obtained.
- Ni: about 2.5% by mass, Co: about 2.5% by mass If it exceeds 1, the strength can be increased, but the electrical conductivity is remarkably lowered, and further, the hot workability is lowered.
- Si about 0.30 to about 1.2% by mass is necessary to satisfy the target strength and conductivity, and preferably about 0.5 to about 0.8% by mass. However, if it is less than about 0.3%, the desired strength cannot be obtained. If it exceeds about 1.2% by mass, the strength can be increased, but the electrical conductivity is remarkably lowered, and further, hot workability is lowered. .
- the weight concentration ratio of Ni and Co in the alloy composition to Si is further defined.
- the NiZSi ratio is set to the lower side of the conventionally reported specified range 3 ⁇ NiZSi ⁇ 7, and the force is set to a narrow range, that is, by adding a little bit of Si, Ni and Co can be left out.
- the silicide shape can reduce the decrease in conductivity due to the solid solution of excess Ni and Co that do not contribute to precipitation.
- the weight concentration ratio is [Ni + Co] ZSi approximately 4 In this case, since the Si ratio is too high, the electric conductivity is lowered only by the solid solution Si. In the annealing process, an oxide film of SiO is formed on the material surface layer, so that the solderability is deteriorated.
- Ni—Co—S-entrained precipitated particles that do not contribute to strengthening tend to be coarsened, do not contribute to strength, and conversely tend to become crack initiation points and poorly tacked parts during bending.
- the ratio of Ni and Co to Si is increased, and [Ni + Co] ZSi> about 5, the conductivity decreases significantly, which is not preferable for electronic materials.
- the [Ni + Co] ZSi ratio in the alloy composition is controlled in the range of about 4 ⁇ [Ni + Co] ZSi ⁇ about 5.
- the [Ni + Co] ZSi ratio is preferably about 4.2 ⁇ [Ni + Co] ZSi ⁇ about 4.7.
- the weight concentration ratio of Ni and Co (NiZCo ratio) in the alloy composition is further defined.
- Ni and Co not only contribute to the formation of compounds with Si, but are also considered to be related to each other and improve alloy properties.
- the NiZCo ratio is in the range of about 0.5 ⁇ NiZCo ⁇ about 2, the strength is significantly improved.
- the weight concentration ratio is about 0.5, NiZCo can provide high strength, but the conductivity decreases. It also causes solidification prayer during melting and fabrication.
- NiZCo> about 2 the Ni concentration is too high and the conductivity is lowered, which is not preferable.
- the aging treatment characteristics can be further improved by adding about 0.09 to about 0.5 mass%, preferably about 0.1 to about 0.3 mass% of Cr. Therefore, Cr-added coffee is indispensable.
- Cr is appropriately heat-treated, Cr alone or a compound with Si is precipitated in the copper matrix, and the conductivity can be increased without losing strength.
- the amount is less than about 0.09% by mass, the effect is small. If the amount exceeds about 0.5% by mass, coarse inclusions that do not contribute to strengthening are formed, and bending caulking and tackiness are impaired. Absent.
- P, As, Sb, Be, B, Mn, Mg, Sn, Ti, Zr, Al, Fe, Zn, and Ag show various effects by adding a certain amount, but complement each other, strength, Not only conductivity, but also bendability, plating ability, improve productivity such as improvement of hot workability by refining ingot structure Therefore, one or more of these can be added as appropriate to the Cu—Ni—Si alloy containing Co and Cr according to the required characteristics. In such cases, the total amount is at most about 2.0% by weight, preferably from about 0.001 to about 2.0% by weight, preferably from about 0.01 to about 1.0% by weight.
- Cr is added for the purpose of precipitating Cr alone or a compound with Si in the copper matrix and increasing the conductivity without losing strength.
- Cr tends to form carbides.
- carbon powder is mixed into the molten metal from the crucible material used during melting and from charcoal used as a canoring flux to suppress the acidity of the molten metal during melting in the atmosphere, it reacts with Cr to form carbides. Therefore, inclusions with a high carbon content are formed.
- the increase in conductivity due to Cr which should contribute to the increase in conductivity, cannot be achieved. Rather, if the ratio of inclusions with a high carbon content is increased!], The strength and conductivity characteristics are impaired, and if such inclusions are coarsened, bending workability and tackiness are impaired. It becomes.
- inclusions with high carbon concentration in inclusions contain Cr, and if there are many inclusions, the effect of Cr will be reduced. By examining the inclusions in this way, the effect of Cr can be evaluated.
- Inclusions with a high carbon concentration were inclusions with a carbon analysis value of 10% by mass or more.
- the amount of Cr detected in the inclusions is very small or zero, so that inclusions that cause a decrease in strength and conductivity cannot be obtained.
- the size of the inclusion is 1 ⁇ m or more. This is because, if it is less than 1 ⁇ m, the amount of Cr contained in the inclusions is negligible. If there are about 15 inclusions with a carbon analysis value of 10% by mass or more at 1 m or more, ZlOOO / zm 2 or less, the decrease in strength and conductivity is small.
- the number of inclusions (P) whose size is dispersed in the material is: m or more, of which the number of inclusions (Pc) whose carbon concentration is 10% by mass or more is the ratio (PcZP ) Is about 0.3 or less.
- the ratio of the number (Pc / P) exceeds about 0.3, the number of inclusions with a high carbon content is at least the inclusions that have grown, so the proportion of Cr contained in the inclusions is high. This is because the strength and conductivity are affected.
- the “inclusion” in the present invention refers to a solid phase after the solidification process at the time of forging in a Cu—Ni—Si based alloy, that is, a cooling process after solidification, a cooling process after hot rolling, and an aging annealing. Precipitates generated by precipitation reaction in the matrix, crystallized products that are generally coarse due to segregation during solidification, and oxides and sulfates that are impurities generated by reaction in the molten metal during melting It is used to include particles observed in the matrix by SEM observation of this alloy. “Inclusion size” refers to the diameter of the smallest circle containing the inclusion under FE-AES observation.
- “Number of inclusions (P)” is the number of inclusions with a size of 1 m or more actually counted in many places by FE-AES observation after electrolytic polishing of the plate surface of the material. Inclusions with a carbon content of 10% by mass or more (Pc) means that inclusions with a size of 1 m or more observed in the above FE-AES observation exclude the adsorbed elements (C, O) on the surface layer. Sputtering was performed to measure the Auger spectrum for each inclusion, and when the detected element was converted to weight concentration as a semi-quantitative value by the sensitivity coefficient method, the carbon analysis value was 10% by mass or more. The number of inclusions.
- the copper alloy of the present invention can be manufactured by the conventional manufacturing method for Cu-Ni-Si-Co-Cr alloys, but the number of inclusions with a size of 1 m or more dispersed in the material.
- the number of inclusions (Pc) with a carbon content of 10% by mass or more (Pc) is about 15 Pc / 1000 / zm 2 or less and the ratio (Pc / P) is about 0.3
- the number of inclusions with a size of 1 m or more dispersed in the material (P), of which inclusions with a carbon content of 10% by mass or more should be reduced and in the material
- the number of inclusions with a dispersion size of: L m or more (P), of which inclusions including inclusions with a carbon concentration of 10% by mass or more are not coarsened.
- the cause of the formation of Cr carbide is mainly the reaction with the carbon mixed with the molten external force or with the carbon-containing member in contact with the molten metal.
- the scrap material put into the molten metal contains a large amount of lubricating oil, the lubricating oil will decompose and the carbon in the lubricating oil will react with Cr.
- carbon is used as a material for parts such as nozzles in molten metal construction equipment, and may react with Cr by contact with the molten metal. In order to prevent such carbon contamination, careful attention must be paid to the selection of raw materials, crucible selection, charcoal coating methods, and the setting of the materials for parts that come into contact with the molten metal.
- the processes after hot rolling are the same as the general manufacturing process for Cu-Ni-Si-based copper alloys, and cold rolling and heat treatment are repeated to obtain the desired thickness. Finish with a strip of foil and properties.
- Heat treatment includes solution treatment and aging treatment. In the solution treatment, compounds such as Ni, Co, Si, and Cr that form precipitates by heating to a high temperature of about 850 ° C or more and less than about 1000 ° C for about 5 to about 3600 s are solidified in the Cu matrix. Dissolve and recrystallize the Cu matrix at the same time.
- the solution treatment may be combined with hot rolling.
- a compound such as Ni, Co, Si, Cr, etc. dissolved in the solution treatment is precipitated as fine particles by heating for about lh or more in a temperature range of about 350 to about 550 ° C.
- This aging treatment increases strength and conductivity. If the aging treatment temperature is low !, if a long time heat treatment is applied, fine precipitates are dispersed, and if aging treatment is performed at a high temperature, a short time is required to avoid coarse precipitates.
- the heat treatment may be performed.
- the optimum conditions may be selected by the process capability of the equipment, and cold rolling may be performed before aging and Z or after aging in order to obtain higher strength.
- strain relief annealing low temperature annealing
- the Cu-Ni-Si-Co-Cr-based copper alloy according to the present invention is a lead frame, connector, pin, terminal, and the like that are required to achieve both high strength and high conductivity (or thermal conductivity). It can be used for electronic parts such as relays, switches and foil materials for secondary batteries.
- the copper alloy used in the examples of the present invention has a composition in which the contents of Ni, Co, Cr, and Si are changed as shown in Table 1 and Mg, Sn, Zn, Ag, and B are added as appropriate. Have. Further, the copper alloys used for the comparative examples are Cu—Ni—Si—Co—Cr based alloys that are outside the parameter range of the present invention.
- Copper alloys having various component compositions shown in Table 1 were melted at 1100 ° C or higher in a high-frequency melting furnace and formed into an ingot having a thickness of 25 mm.
- solderability was evaluated by the meniscograph method, immersed in a 235 ⁇ 3 ° C 60% Sn—Pb bath at a depth of 2 mm for 10 seconds, and the time until the solder was completely wet was measured.
- the pre-treatment before solderability evaluation was performed after degreasing acetone, soaking in a 10vol% sulfuric acid aqueous solution for 10 seconds as an acid wash, stirring, washing, drying, and then immersing the test piece in a 25% rosin ethanol solution for 5 seconds. Applied.
- the standard for the solder wetting time is 2 seconds or less.
- the number of inclusions (P) and the number of inclusions whose carbon analysis value was 10% by mass or more (Pc) were measured by FE-AES observation after electropolishing the material plate surface.
- the number of inclusions of 1 m or more was actually observed in 10 fields with 100 ⁇ m 2 as one field, and sputtering was performed with Ar + to remove adsorbed elements (C, O) on the surface layer.
- the spectrum was measured, and the detected elements were converted into weight concentrations as semi-quantitative values by the sensitivity coefficient method, and the number of inclusions whose carbon analysis value was 10% by mass or more was counted.
- Comparative Example 15 22 the same alloy composition of the inventive example (for example, Comparative Example No. 15 and Invention Example No. 1, Comparative Example No. 16, Invention Example No. 5, Comparative Example No. 17) Compared to Invention Example No. 9 etc.), the strength and conductivity are low. In Comparative Example 15 22 all, Pc exceeds 15 or PcZP exceeds 0.3.
- Comparative Example No. 23 25 has a homogeneous homogenization annealing temperature before hot rolling as low as 800 ° C, so the coarse inclusions produced during melt-forming during homogenization annealing before hot rolling are dissolved. Something coarse is left behind. Therefore, although the number of inclusions is small, PcZP exceeds 0.3. Therefore, each comparative example has higher strength, conductivity, bending curve than the inventive example of the same composition (No. 1 59). The solderability and solderability are all getting worse.
- Comparative Example 26 28 in the homogenization annealing before hot rolling, it was generated during melting and forging. The coarsened inclusions are reduced in size. Since the solution temperature was 800 ° C, the inclusions could not be sufficiently dissolved, there were relatively large inclusions, and the total number of inclusions was small (Pc / P) is over 0.3. In Comparative Examples 29-31, the hot rolling and solution treatment were performed under the same conditions as in the invention example, but the aging conditions were 600 ° C-15H. (PcZP) exceeds 0.3 because the ratio of the number of particles increased and the inclusions became coarse and the total number decreased. Therefore, each of the comparative examples is inferior in strength, conductivity, bending cache property, and solderability as compared with the inventive examples (Nos. 1, 5, and 9) having the same composition.
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2602529A CA2602529C (en) | 2005-03-31 | 2006-03-31 | Cu-ni-si-co-cr based copper alloy for electronic material and method for production thereof |
EP06730824A EP1876250B1 (en) | 2005-03-31 | 2006-03-31 | Cu-Ni-Si-Co-Cr BASED COPPER ALLOY FOR ELECTRONIC MATERIAL AND METHOD FOR PRODUCTION THEREOF |
US11/887,660 US8070893B2 (en) | 2005-03-31 | 2006-03-31 | Cu—Ni—Si—Co—Cr copper alloy for electronic materials and method for manufacturing same |
AU2006231980A AU2006231980B2 (en) | 2005-03-31 | 2006-03-31 | Cu-Ni-Si-Co-Cr based copper alloy for electronic material and method for production thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2005104474A JP4068626B2 (ja) | 2005-03-31 | 2005-03-31 | 電子材料用Cu−Ni−Si−Co−Cr系銅合金及びその製造方法 |
JP2005-104474 | 2005-03-31 |
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WO2006106939A1 true WO2006106939A1 (ja) | 2006-10-12 |
WO2006106939A8 WO2006106939A8 (ja) | 2009-08-27 |
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PCT/JP2006/306876 WO2006106939A1 (ja) | 2005-03-31 | 2006-03-31 | 電子材料用Cu-Ni-Si-Co-Cr系銅合金及びその製造方法 |
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US (1) | US8070893B2 (ja) |
EP (1) | EP1876250B1 (ja) |
JP (1) | JP4068626B2 (ja) |
KR (1) | KR100968717B1 (ja) |
CN (1) | CN100564559C (ja) |
AU (1) | AU2006231980B2 (ja) |
CA (1) | CA2602529C (ja) |
RU (1) | RU2375483C2 (ja) |
WO (1) | WO2006106939A1 (ja) |
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-
2006
- 2006-03-31 KR KR1020077023936A patent/KR100968717B1/ko active IP Right Grant
- 2006-03-31 AU AU2006231980A patent/AU2006231980B2/en not_active Ceased
- 2006-03-31 WO PCT/JP2006/306876 patent/WO2006106939A1/ja active Application Filing
- 2006-03-31 CN CNB2006800098291A patent/CN100564559C/zh active Active
- 2006-03-31 RU RU2007140308/02A patent/RU2375483C2/ru not_active IP Right Cessation
- 2006-03-31 EP EP06730824A patent/EP1876250B1/en not_active Not-in-force
- 2006-03-31 US US11/887,660 patent/US8070893B2/en active Active
- 2006-03-31 CA CA2602529A patent/CA2602529C/en not_active Expired - Fee Related
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US10143024B2 (en) | 2006-10-20 | 2018-11-27 | Canon Kabushiki Kaisha | Communication parameter setting method, communicating apparatus, and managing apparatus for managing communication parameters |
US10750555B2 (en) | 2006-10-20 | 2020-08-18 | Canon Kabushiki Kaisha | Communication parameter setting method, communicating apparatus, and managing apparatus for managing communication parameters |
EP2194151A1 (en) * | 2007-09-28 | 2010-06-09 | Nippon Mining & Metals Co., Ltd. | Cu-ni-si-co-base copper alloy for electronic material and process for producing the copper alloy |
EP2194151A4 (en) * | 2007-09-28 | 2011-01-26 | Jx Nippon Mining & Metals Corp | CU-NI-SI-CO COPPER ALLOY FOR ELECTRONIC MATERIAL AND METHOD FOR PRODUCING THE SAME |
KR101161597B1 (ko) | 2007-09-28 | 2012-07-03 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 전자 재료용 Cu-Ni-Si-Co계 구리합금 및 그 제조 방법 |
US8444779B2 (en) | 2007-09-28 | 2013-05-21 | JX Nippon Mining & Metals Co., Ltd. | Cu—Ni—Si—Co copper alloy for electronic materials and method for manufacturing same |
Also Published As
Publication number | Publication date |
---|---|
EP1876250B1 (en) | 2012-05-23 |
JP4068626B2 (ja) | 2008-03-26 |
AU2006231980A1 (en) | 2006-10-12 |
EP1876250A1 (en) | 2008-01-09 |
EP1876250A4 (en) | 2008-07-23 |
CA2602529A1 (en) | 2006-10-12 |
RU2375483C2 (ru) | 2009-12-10 |
RU2007140308A (ru) | 2009-05-10 |
JP2006283120A (ja) | 2006-10-19 |
WO2006106939A8 (ja) | 2009-08-27 |
KR20070112868A (ko) | 2007-11-27 |
CA2602529C (en) | 2011-03-29 |
US20090025840A1 (en) | 2009-01-29 |
CN100564559C (zh) | 2009-12-02 |
CN101151385A (zh) | 2008-03-26 |
US8070893B2 (en) | 2011-12-06 |
KR100968717B1 (ko) | 2010-07-08 |
AU2006231980B2 (en) | 2009-06-04 |
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