WO2006075426A1 - 裏面接合型太陽電池及びその製造方法 - Google Patents
裏面接合型太陽電池及びその製造方法 Download PDFInfo
- Publication number
- WO2006075426A1 WO2006075426A1 PCT/JP2005/019383 JP2005019383W WO2006075426A1 WO 2006075426 A1 WO2006075426 A1 WO 2006075426A1 JP 2005019383 W JP2005019383 W JP 2005019383W WO 2006075426 A1 WO2006075426 A1 WO 2006075426A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diffusion layer
- type diffusion
- type
- semiconductor substrate
- back surface
- Prior art date
Links
- 238000000034 method Methods 0.000 title description 4
- 238000009792 diffusion process Methods 0.000 claims abstract description 175
- 239000000758 substrate Substances 0.000 claims abstract description 71
- 239000004065 semiconductor Substances 0.000 claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 244000126211 Hericium coralloides Species 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/03529—Shape of the potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Definitions
- a back surface contact type solar cell 1 semiconductor substrate [0030] A back surface contact type solar cell 1 semiconductor substrate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006552839A JP3962086B2 (ja) | 2004-12-27 | 2005-10-21 | 裏面接合型太陽電池及びその製造方法 |
EP05795521A EP1835548B1 (en) | 2004-12-27 | 2005-10-21 | Process for producing a back junction solar cell |
US11/722,811 US7700400B2 (en) | 2004-12-27 | 2005-10-21 | Back junction solar cell and process for producing the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-376603 | 2004-12-27 | ||
JP2004376603 | 2004-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006075426A1 true WO2006075426A1 (ja) | 2006-07-20 |
Family
ID=36677460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/019383 WO2006075426A1 (ja) | 2004-12-27 | 2005-10-21 | 裏面接合型太陽電池及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7700400B2 (ja) |
EP (1) | EP1835548B1 (ja) |
JP (1) | JP3962086B2 (ja) |
TW (1) | TW200635058A (ja) |
WO (1) | WO2006075426A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010539684A (ja) * | 2007-09-07 | 2010-12-16 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | 太陽電池製造用のパターン化アセンブリ及び太陽電池の製造方法 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
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US7790574B2 (en) | 2004-12-20 | 2010-09-07 | Georgia Tech Research Corporation | Boron diffusion in silicon devices |
JP5236914B2 (ja) * | 2007-09-19 | 2013-07-17 | シャープ株式会社 | 太陽電池の製造方法 |
US8198115B2 (en) * | 2008-04-25 | 2012-06-12 | Ulvac, Inc. | Solar cell, and method and apparatus for manufacturing the same |
KR101099480B1 (ko) | 2009-02-13 | 2011-12-27 | 엘지전자 주식회사 | 태양전지 및 그의 제조방법과 기판 식각 방법 |
JP2010283339A (ja) * | 2009-05-02 | 2010-12-16 | Semiconductor Energy Lab Co Ltd | 光電変換装置及びその作製方法 |
US20110124146A1 (en) * | 2009-05-29 | 2011-05-26 | Pitera Arthur J | Methods of forming high-efficiency multi-junction solar cell structures |
DE102009024598A1 (de) * | 2009-06-10 | 2011-01-05 | Institut Für Solarenergieforschung Gmbh | Solarzelle mit Kontaktstruktur mit geringen Rekombinationsverlusten sowie Herstellungsverfahren für solche Solarzellen |
US20110041910A1 (en) * | 2009-08-18 | 2011-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
US20130167915A1 (en) | 2009-12-09 | 2013-07-04 | Solexel, Inc. | High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using three-dimensional semiconductor absorbers |
KR20110071374A (ko) * | 2009-12-21 | 2011-06-29 | 현대중공업 주식회사 | 후면전계형 이종접합 태양전지 및 그 제조방법 |
KR20140015247A (ko) | 2010-08-05 | 2014-02-06 | 솔렉셀, 인크. | 태양전지용 백플레인 보강 및 상호연결부 |
US8633379B2 (en) * | 2010-08-17 | 2014-01-21 | Lg Electronics Inc. | Solar cell |
CN102569493B (zh) * | 2010-12-17 | 2014-04-30 | 上海凯世通半导体有限公司 | 太阳能晶片的掺杂方法以及掺杂晶片 |
CN102569495B (zh) * | 2010-12-17 | 2014-03-19 | 上海凯世通半导体有限公司 | 太阳能晶片的掺杂方法 |
CN102738265A (zh) * | 2011-04-15 | 2012-10-17 | 上海凯世通半导体有限公司 | 掺杂单元、掺杂晶片、掺杂方法、太阳能电池及制作方法 |
US20150171230A1 (en) * | 2011-08-09 | 2015-06-18 | Solexel, Inc. | Fabrication methods for back contact solar cells |
KR101225019B1 (ko) * | 2011-08-31 | 2013-01-22 | 한화케미칼 주식회사 | 선택적 펀치 쓰루를 이용한 후면 전극 태양전지의 제조방법 |
AU2012340098B2 (en) * | 2011-11-20 | 2016-04-21 | Solexel, Inc. | Smart photovoltaic cells and modules |
CN103208556A (zh) * | 2012-01-13 | 2013-07-17 | 上海凯世通半导体有限公司 | 太阳能电池的制作方法及太阳能电池 |
TWI501292B (zh) | 2012-09-26 | 2015-09-21 | Ind Tech Res Inst | 形成圖案化摻雜區的方法 |
US9515217B2 (en) | 2012-11-05 | 2016-12-06 | Solexel, Inc. | Monolithically isled back contact back junction solar cells |
US9379258B2 (en) * | 2012-11-05 | 2016-06-28 | Solexel, Inc. | Fabrication methods for monolithically isled back contact back junction solar cells |
CN103594532B (zh) * | 2013-11-21 | 2016-03-23 | 苏州阿特斯阳光电力科技有限公司 | 一种n型晶体硅太阳能电池的制备方法 |
KR101627204B1 (ko) * | 2013-11-28 | 2016-06-03 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
WO2018092189A1 (ja) * | 2016-11-15 | 2018-05-24 | 信越化学工業株式会社 | 高光電変換効率太陽電池、その製造方法、太陽電池モジュール及び太陽光発電システム |
Citations (6)
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JPH09172196A (ja) * | 1995-11-22 | 1997-06-30 | Ebara Solar Inc | アルミニウム合金接合自己整合裏面電極型シリコン太陽電池の構造および製造 |
JP2002057352A (ja) * | 2000-06-02 | 2002-02-22 | Honda Motor Co Ltd | 太陽電池およびその製造方法 |
JP2002164556A (ja) | 2000-11-27 | 2002-06-07 | Kyocera Corp | 裏面電極型太陽電池素子 |
JP2003124483A (ja) * | 2001-10-17 | 2003-04-25 | Toyota Motor Corp | 光起電力素子 |
JP2004071763A (ja) * | 2002-08-05 | 2004-03-04 | Toyota Motor Corp | 光起電力素子 |
JP2004071828A (ja) | 2002-08-06 | 2004-03-04 | Toyota Motor Corp | 太陽電池 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US5538564A (en) * | 1994-03-18 | 1996-07-23 | Regents Of The University Of California | Three dimensional amorphous silicon/microcrystalline silicon solar cells |
US6262359B1 (en) * | 1999-03-17 | 2001-07-17 | Ebara Solar, Inc. | Aluminum alloy back junction solar cell and a process for fabrication thereof |
DE10045249A1 (de) * | 2000-09-13 | 2002-04-04 | Siemens Ag | Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements |
JP4074763B2 (ja) * | 2002-01-22 | 2008-04-09 | シャープ株式会社 | 太陽電池の製造方法 |
US7339110B1 (en) * | 2003-04-10 | 2008-03-04 | Sunpower Corporation | Solar cell and method of manufacture |
US7144751B2 (en) * | 2004-02-05 | 2006-12-05 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
US7704352B2 (en) * | 2006-12-01 | 2010-04-27 | Applied Materials, Inc. | High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate |
US7638438B2 (en) * | 2006-12-12 | 2009-12-29 | Palo Alto Research Center Incorporated | Solar cell fabrication using extrusion mask |
-
2005
- 2005-10-21 JP JP2006552839A patent/JP3962086B2/ja active Active
- 2005-10-21 EP EP05795521A patent/EP1835548B1/en active Active
- 2005-10-21 WO PCT/JP2005/019383 patent/WO2006075426A1/ja active Application Filing
- 2005-10-21 US US11/722,811 patent/US7700400B2/en active Active
- 2005-11-17 TW TW094140463A patent/TW200635058A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09172196A (ja) * | 1995-11-22 | 1997-06-30 | Ebara Solar Inc | アルミニウム合金接合自己整合裏面電極型シリコン太陽電池の構造および製造 |
JP2002057352A (ja) * | 2000-06-02 | 2002-02-22 | Honda Motor Co Ltd | 太陽電池およびその製造方法 |
JP2002164556A (ja) | 2000-11-27 | 2002-06-07 | Kyocera Corp | 裏面電極型太陽電池素子 |
JP2003124483A (ja) * | 2001-10-17 | 2003-04-25 | Toyota Motor Corp | 光起電力素子 |
JP2004071763A (ja) * | 2002-08-05 | 2004-03-04 | Toyota Motor Corp | 光起電力素子 |
JP2004071828A (ja) | 2002-08-06 | 2004-03-04 | Toyota Motor Corp | 太陽電池 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1835548A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010539684A (ja) * | 2007-09-07 | 2010-12-16 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | 太陽電池製造用のパターン化アセンブリ及び太陽電池の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US7700400B2 (en) | 2010-04-20 |
JPWO2006075426A1 (ja) | 2008-08-07 |
US20070264746A1 (en) | 2007-11-15 |
JP3962086B2 (ja) | 2007-08-22 |
TW200635058A (en) | 2006-10-01 |
EP1835548A1 (en) | 2007-09-19 |
EP1835548B1 (en) | 2012-11-28 |
TWI323040B (ja) | 2010-04-01 |
EP1835548A4 (en) | 2010-12-01 |
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