JP4656996B2 - 太陽電池 - Google Patents
太陽電池 Download PDFInfo
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- JP4656996B2 JP4656996B2 JP2005123743A JP2005123743A JP4656996B2 JP 4656996 B2 JP4656996 B2 JP 4656996B2 JP 2005123743 A JP2005123743 A JP 2005123743A JP 2005123743 A JP2005123743 A JP 2005123743A JP 4656996 B2 JP4656996 B2 JP 4656996B2
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- 239000012535 impurity Substances 0.000 claims description 114
- 238000009792 diffusion process Methods 0.000 claims description 102
- 239000000758 substrate Substances 0.000 claims description 64
- 244000126211 Hericium coralloides Species 0.000 claims description 56
- 239000004065 semiconductor Substances 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 50
- 229910052710 silicon Inorganic materials 0.000 description 50
- 239000010703 silicon Substances 0.000 description 50
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 30
- 229910052814 silicon oxide Inorganic materials 0.000 description 30
- 238000002161 passivation Methods 0.000 description 29
- 238000000034 method Methods 0.000 description 20
- 229910000679 solder Inorganic materials 0.000 description 16
- 238000010586 diagram Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000007598 dipping method Methods 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Description
図1(A)に本発明の太陽電池の好ましい一例の裏面の模式的な平面図を示す。図1(A)を参照して、本発明の太陽電池の裏面には、n型不純物を拡散することによって形成された櫛形状のn型不純物拡散領域20aおよびp型不純物を拡散することによって形成された櫛形状のp型不純物拡散領域30aが形成されている。
図4(A)に本発明の太陽電池の他の好ましい一例の裏面の模式的な平面図を示し、図4(B)に図4(A)に示す太陽電池のIVB−IVBに沿った模式的な断面図を示す。図4(A)および図4(B)に示す太陽電池においては、p型不純物拡散領域30aの1つの櫛歯領域31上には直線状のp型電極90が1つずつ形成されているが、n型不純物拡散領域20aの1つの櫛歯領域21上には直線状のn型電極80が2つずつ形成されている点に特徴がある。
図5(A)に本発明の太陽電池の他の好ましい一例の裏面の模式的な平面図を示し、図5(B)に図5(A)に示す太陽電池のVB−VBに沿った模式的な断面図を示す。図5(A)および図5(B)に示す太陽電池においては、n型のシリコン基板10を用い、n型不純物拡散領域20aの櫛歯領域21の幅をp型不純物拡散領域30aの櫛歯領域31の幅よりも狭くしたことに特徴がある。
図6(A)に本発明の太陽電池の他の好ましい一例の裏面の模式的な平面図を示し、図6(B)に図6(A)に示す太陽電池のVIB−VIBに沿った模式的な断面図を示す。図6(A)および図6(B)に示す太陽電池においては、p型のシリコン基板10を用い、p型不純物拡散領域30aの櫛歯領域31の幅をn型不純物拡散領域20aの櫛歯領域21の幅よりも狭くしたことに特徴がある。
図7(A)に本発明の太陽電池の他の好ましい一例の裏面の模式的な平面図を示し、図7(B)に図7(A)に示す太陽電池のVIIB−VIIBに沿った模式的な断面図を示す。図7(A)および図7(B)に示す太陽電池においては、p型不純物拡散領域30aの1つの櫛歯領域31上には直線状のp型電極90が2つずつ形成されており、n型不純物拡散領域20aの1つの櫛歯領域21上にも直線状のn型電極80が2つずつ形成されている点に特徴がある。
Claims (6)
- 半導体基板の一表面に形成されているp型不純物拡散領域およびn型不純物拡散領域を含み、
前記p型不純物拡散領域および前記n型不純物拡散領域はそれぞれ、櫛歯領域と、前記櫛歯領域と交差するバスバー領域と、を有し、
前記p型不純物拡散領域の櫛歯領域と前記n型不純物拡散領域の櫛歯領域とはそれぞれ互いに向かい合って配置されており、
前記p型不純物拡散領域の1つの櫛歯領域上に形成されているp型電極の数および前記n型不純物拡散領域の1つの櫛歯領域上に形成されているn型電極の数の少なくとも一方が複数であることを特徴とする、太陽電池。 - 前記p型不純物拡散領域の櫛歯領域の大きさと、前記n型不純物拡散領域の櫛歯領域の大きさと、が異なることを特徴とする、請求項1に記載の太陽電池。
- 前記p型不純物拡散領域および前記n型不純物拡散領域はそれぞれ複数の直線状の櫛歯領域と、前記複数の直線状の櫛歯領域のそれぞれの端部と直交する1つの直線状のバスバー領域と、を有しており、前記p型不純物拡散領域の櫛歯領域と前記n型不純物拡散領域の櫛歯領域とは交互に1つずつ互いに向かい合って配置されていることを特徴とする、請求項1または2に記載の太陽電池。
- 前記p型不純物拡散領域のバスバー領域は前記半導体基板の一表面の一端に形成され、前記n型不純物拡散領域のバスバー領域は前記半導体基板の一表面の他端に形成されており、前記p型不純物拡散領域のバスバー領域と前記n型不純物拡散領域のバスバー領域とは互いに向かい合って配置されていることを特徴とする、請求項3に記載の太陽電池。
- 前記p型不純物拡散領域のバスバー領域上には前記p型電極と直交するp型集電用電極が形成されており、前記n型不純物拡散領域のバスバー領域上には前記n型電極と直交するn型集電用電極が形成されていることを特徴とする、請求項4に記載の太陽電池。
- 前記半導体基板がp型である場合には前記p型不純物拡散領域のp型不純物濃度は前記半導体基板よりも高く、前記半導体基板がn型である場合には前記n型不純物拡散領域のn型不純物濃度は前記半導体基板よりも高いことを特徴とする、請求項1から5のいずれかに記載の太陽電池。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005123743A JP4656996B2 (ja) | 2005-04-21 | 2005-04-21 | 太陽電池 |
Applications Claiming Priority (1)
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JP2005123743A JP4656996B2 (ja) | 2005-04-21 | 2005-04-21 | 太陽電池 |
Publications (2)
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JP2006303230A JP2006303230A (ja) | 2006-11-02 |
JP4656996B2 true JP4656996B2 (ja) | 2011-03-23 |
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JP2005123743A Expired - Fee Related JP4656996B2 (ja) | 2005-04-21 | 2005-04-21 | 太陽電池 |
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Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7838062B2 (en) * | 2007-05-29 | 2010-11-23 | Sunpower Corporation | Array of small contacts for solar cell fabrication |
US7820460B2 (en) * | 2007-09-07 | 2010-10-26 | Varian Semiconductor Equipment Associates, Inc. | Patterned assembly for manufacturing a solar cell and a method thereof |
JP5099698B2 (ja) * | 2008-04-22 | 2012-12-19 | シャープ株式会社 | 裏面電極型太陽電池および太陽電池モジュール |
DE102008044910A1 (de) * | 2008-08-30 | 2010-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Solarzelle und Solarzellenmodul mit einseitiger Verschaltung |
JP2010283339A (ja) * | 2009-05-02 | 2010-12-16 | Semiconductor Energy Lab Co Ltd | 光電変換装置及びその作製方法 |
JP5273728B2 (ja) * | 2009-06-05 | 2013-08-28 | シャープ株式会社 | 配線シート付き太陽電池セルおよび太陽電池モジュール |
JP5172783B2 (ja) * | 2009-06-18 | 2013-03-27 | シャープ株式会社 | 配線シート付き太陽電池セルおよび太陽電池モジュール |
JP2013506272A (ja) * | 2009-09-20 | 2013-02-21 | インターモレキュラー,インコーポレーテッド | 組合せ的スクリーニングにおいて用いられる結晶シリコン太陽電池の構築方法 |
JP2012175065A (ja) * | 2011-02-24 | 2012-09-10 | Sanyo Electric Co Ltd | 太陽電池及び太陽電池モジュール |
JP7323107B2 (ja) * | 2018-03-26 | 2023-08-08 | シャープ株式会社 | 光電変換素子 |
EP3852150A4 (en) * | 2018-10-02 | 2021-10-06 | Kaneka Corporation | PHOTOVOLTAIC DEVICE AND PHOTOVOLTAIC MODULE |
DE102019122222A1 (de) | 2019-08-19 | 2021-02-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photovoltaische Solarzelle und Solarzellenmodul |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6447064U (ja) * | 1987-09-14 | 1989-03-23 | ||
JPH0575149A (ja) * | 1991-09-11 | 1993-03-26 | Hitachi Ltd | 太陽電池素子とその製造方法 |
JP2001044463A (ja) * | 1999-07-27 | 2001-02-16 | Canon Inc | 太陽電池およびその製造方法 |
JP2001111080A (ja) * | 1999-10-14 | 2001-04-20 | Sony Corp | 半導体素子の製造方法 |
JP2003124483A (ja) * | 2001-10-17 | 2003-04-25 | Toyota Motor Corp | 光起電力素子 |
JP2004221188A (ja) * | 2003-01-10 | 2004-08-05 | Ebara Corp | 裏面接合型太陽電池およびその製造方法 |
JP2005175399A (ja) * | 2003-12-15 | 2005-06-30 | Hitachi Ltd | 太陽電池セルの製造方法及び太陽電池セル |
-
2005
- 2005-04-21 JP JP2005123743A patent/JP4656996B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6447064U (ja) * | 1987-09-14 | 1989-03-23 | ||
JPH0575149A (ja) * | 1991-09-11 | 1993-03-26 | Hitachi Ltd | 太陽電池素子とその製造方法 |
JP2001044463A (ja) * | 1999-07-27 | 2001-02-16 | Canon Inc | 太陽電池およびその製造方法 |
JP2001111080A (ja) * | 1999-10-14 | 2001-04-20 | Sony Corp | 半導体素子の製造方法 |
JP2003124483A (ja) * | 2001-10-17 | 2003-04-25 | Toyota Motor Corp | 光起電力素子 |
JP2004221188A (ja) * | 2003-01-10 | 2004-08-05 | Ebara Corp | 裏面接合型太陽電池およびその製造方法 |
JP2005175399A (ja) * | 2003-12-15 | 2005-06-30 | Hitachi Ltd | 太陽電池セルの製造方法及び太陽電池セル |
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