WO2006027892A1 - 圧電磁器及び圧電セラミック素子 - Google Patents
圧電磁器及び圧電セラミック素子 Download PDFInfo
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- WO2006027892A1 WO2006027892A1 PCT/JP2005/012699 JP2005012699W WO2006027892A1 WO 2006027892 A1 WO2006027892 A1 WO 2006027892A1 JP 2005012699 W JP2005012699 W JP 2005012699W WO 2006027892 A1 WO2006027892 A1 WO 2006027892A1
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- piezoelectric ceramic
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- 239000000919 ceramic Substances 0.000 title claims description 82
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 6
- 239000000203 mixture Substances 0.000 claims abstract description 23
- 229910052802 copper Inorganic materials 0.000 claims abstract description 9
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 9
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 9
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 8
- 229910052742 iron Inorganic materials 0.000 claims abstract description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 238000010304 firing Methods 0.000 abstract description 17
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 229910052763 palladium Inorganic materials 0.000 abstract description 4
- 229910001316 Ag alloy Inorganic materials 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 15
- 238000010168 coupling process Methods 0.000 description 15
- 238000005859 coupling reaction Methods 0.000 description 15
- 239000000843 powder Substances 0.000 description 9
- 238000002360 preparation method Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 230000009931 harmful effect Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 3
- 229910001252 Pd alloy Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G33/00—Compounds of niobium
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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Definitions
- the present invention relates to a piezoelectric ceramic and a piezoelectric ceramic element. More specifically, the present invention relates to a piezoelectric ceramic suitable as a material for a piezoelectric ceramic element such as a piezoelectric ceramic filter, an actuator, a piezoelectric ceramic oscillator, and a piezoelectric ceramic element using the piezoelectric ceramic element. .
- Piezoelectric ceramic elements such as piezoelectric ceramic filters have been widely used in the past with piezoelectric ceramics mainly composed of lead zirconate titanate (Pb (Ti Zr) O) or lead titanate (PbTiO).
- Pb (Ti Zr) O lead zirconate titanate
- PbTiO lead titanate
- piezoelectric zirconate titanate or piezoelectric ceramics composed mainly of lead titanate, contains harmful lead, which has an impact on the human body and environment during production or disposal. It is a problem.
- the lead component used as a raw material evaporates during the manufacturing process, resulting in a problem that the quality uniformity of the piezoelectric ceramic decreases.
- Patent Document 1 does not contain lead !, and a piezoelectric ceramic is proposed.
- the piezoelectric ceramic includes a first element including sodium (Na), potassium (K), lithium (Li), and silver (Ag), and at least Nb of the group consisting of niobium (Nb) and tantalum (Ta). And a second element containing oxygen and a perovskite oxide that also has oxygen (O) power.
- this piezoelectric ceramic is manufactured, it is fired at a temperature of 950 to 1350 ° C, so that the relative permittivity ⁇ force is 12 to 502, the electromechanical coupling coefficient ⁇ is 38 to 42%, and the generated displacement is 0.06. -0. 075% piezoelectric ceramic is obtained.
- Patent Document 1 JP 2003-277145 A
- the present invention has been made to solve the above-described problems.
- a piezoelectric ceramic that can be fired at a low temperature of 1000 ° C or less without impairing piezoelectric characteristics such as an electromechanical coupling coefficient and a piezoelectric constant, and For the purpose of providing a piezoelectric ceramic element!
- the piezoelectric ceramic according to claim 1 of the present invention has a composition formula of (Ag Li K) NbO (provided that 0
- an oxide of at least one metal element selected from Fe, Co, Ni, Cu, Zn, and Bi is used as MO (where M is Fe, Represents Co, Ni, Cu, Zn, and Bi.
- an oxide of Mn and Z or Si with respect to 100 parts by weight of the main component. These oxides are contained in an amount of 5 parts by weight or less in terms of MnO and SiO, respectively.
- a piezoelectric ceramic element according to claim 3 of the present invention includes the piezoelectric ceramic according to claim 1 or claim 2, and an electrode formed on the piezoelectric ceramic. It is what you do.
- the piezoelectric ceramic of the present invention has a composition formula of (Ag Li K) NbO (where 0. 075 ⁇ x
- the main component is perovskite-type acid oxide (A BO). That is, the main component of the present invention is based on AgNbO.
- the piezoelectric ceramic according to the present invention contains a perovskite oxide that does not contain Pb, which is a harmful substance, as a main component.
- the substitution amount X of Li with respect to Ag satisfies the relationship of 0.075 ⁇ x ⁇ 0.4, and the substitution amount y of K with respect to Ag is such that 0.03 ⁇ y ⁇ 0.3.
- the Curie point polarization disappearance temperature: the temperature at which the phase transition from a crystal system exhibiting piezoelectricity to a crystal system not exhibiting piezoelectricity due to temperature rise
- the Curie point polarization disappearance temperature: the temperature at which the phase transition from a crystal system exhibiting piezoelectricity to a crystal system not exhibiting piezoelectricity due to temperature rise
- the substitution amount X of Li with respect to Ag is less than 0.075 or more than 0.4, the Curie point becomes lower than 350 ° C, which may cause a practical problem. Also, the substitution amount X of K for Ag is less than 0.03 Even at 0.3 or higher, the Curie point is lower than 350 ° C as in the case of Li.
- the content of Li and K, which are alkaline components, in the above-mentioned yarn and the synthetic formula is, for example, less than that of the conventional piezoelectric ceramic proposed in Patent Document 1, for example, Ag. Therefore, the degree of variation in piezoelectric characteristics and instability of reproducibility due to scattering of alkali components can be reduced.
- the firing temperature is lowered to 1000 ° C or lower. It is possible to prevent harmful effects due to scattering of contained elements, and the relative permittivity ⁇ r , electromechanical coupling coefficient K in thickness vibration, piezoelectric constant d in thickness vibration, thickness vibration
- piezoelectric ceramic that has excellent piezoelectric characteristics such as resonance frequency constant N in 33 33 and excellent temperature characteristics having a Curie point of 350 ° C or higher.
- the piezoelectric ceramic element for example, in Pd or Ag—Pd alloy used as an internal electrode
- the ratio of expensive Pd can be reduced, and the manufacturing cost of the piezoelectric ceramic element can be reduced.
- the amount of the first subcomponent added (in terms of MO) is 0.01 weight per 100 parts by weight of the main component.
- the firing temperature exceeds 1000 ° C, and if it exceeds 10 parts by weight, the electromechanical coupling coefficient ⁇ decreases.
- an oxide of ⁇ and an oxide of ⁇ or Si are converted into ⁇ or SiO, respectively.
- the firing temperature can be further lowered as compared with the case where the second subcomponent is not added, and the piezoelectric force is not inferior to the case without adding the second subcomponent. Characteristics can be obtained.
- the piezoelectric ceramic element of the present invention includes the piezoelectric ceramic of the present invention, it can be fired at a low temperature of 1000 ° C. or less without containing harmful Pb, and is formed on the piezoelectric ceramic. As described above, even when Pd or an Ag—Pd alloy is used, the content ratio of Pd can be reduced, and the manufacturing cost of the piezoelectric ceramic element can be reduced.
- the piezoelectric ceramic according to the present invention is a starting material used for production within a range not to impair the purpose of the present invention. Deviations in stoichiometric composition represented by the above composition formula based on purity, blending method, firing conditions, etc. may occur. Further, a slight amount of impurities may be contained as long as the object of the present invention is not impaired.
- a piezoelectric that can be fired at a low temperature of 1000 ° C or less without impairing piezoelectric properties such as an electromechanical coupling coefficient and a piezoelectric constant.
- Porcelain and piezoelectric ceramic elements can be provided.
- FIG. 1 is a perspective view showing a piezoelectric ceramic vibrator as an embodiment of the piezoelectric ceramic element of the present invention.
- FIG. 2 is a cross-sectional view of the piezoelectric ceramic element shown in FIG.
- Ag 0, Nb 2 O 3, Li 2 CO 3 and K 2 CO powders are prepared as starting materials for the main components.
- a formulation was prepared that weighed to give samples Nos. 1-146. Subsequently, these preparations were calcined at 800 ° C. to 900 ° C. for 10 hours in an acidic atmosphere using an electric furnace to obtain calcined products.
- the sample indicated by * in the table has a composition outside the scope of the present invention.
- each of the dry powders was formed into a size of 12 mm in length, 12 mm in width, and 2.5 mm in thickness with a uniaxial press (980 MPa) to obtain a prism sample.
- the obtained samples were fired at the temperatures shown in Tables 1 to 6 in an oxidizing atmosphere.
- Ag paste was applied to the upper and lower main surfaces of the sample plate and baked at 800 ° C.
- polarization treatment was performed by applying a DC voltage of 50-20 OkVZcm for 3-10 minutes at room temperature to 150 ° C in an insulating oil bath.
- these samples were cut into a 2 mm ⁇ 2 mm ⁇ 3 mm prismatic shape using a dicing machine, and samples Nos. 1-146 shown in Tables 1 to 6 were prepared.
- Bi 2 0 3 is BiC 0 to 1 part by weight, 10 parts by weight or less
- ZnO is 0.01 parts by weight or more and 10 parts by weight or less in terms of Zn0 2
- CuO is 0 ⁇ 1 parts by weight or more in terms of Cu0 2, 10 parts by weight or less
- NiO is converted to Ni0 2 0.01 parts by weight or more and 10 parts by weight or less
- CoC0 3 is 0.01 to 10 parts by weight in terms of CoC
- Fe 2 0 3 is 0 ⁇ 1 parts by weight or more in terms of Fe_ ⁇ 2, 10 parts by weight or less
- compositions are within the scope of the present invention (sample numbers 4-6, sample numbers 9-11, sample numbers 14-16, sample numbers 18-20, sample numbers 23-25), and the amount of BiO added is within range
- the electromechanical coupling coefficient K, piezoelectric constant d, resonant frequency constant and Curie point (hereinafter
- piezoelectric characteristics which has practically no problem and can be fired at a low temperature of less than 1000 ° C, ie, 940 to 980 ° C. Since low-temperature firing is possible, the Pd compounding ratio of the Ag-Pd alloy can be reduced as the internal electrode of the piezoelectric ceramic element, and the cost can be reduced.
- the value of x of the main component represented by the composition formula (Ag Li K) NbO represents the present invention ⁇ 3
- the Curie point was extremely low at 160 ° C with less than 350 ° C.
- the Curie point was 320 ° C. and less than 350 ° C. in the case of sample numbers 27 and 28 where the value of X was 0.4 or more, which is the upper limit of the range of the present invention.
- the Curie point is less than 350 ° C. there were.
- the amount of Bi 2 O added to the main component is the lower limit of the range of the present invention.
- the firing temperature was higher than 1000 ° C and 1020 ° C.
- the amount of BiO added is that of the present invention.
- the electromechanical coupling coefficient ⁇ was less than 20%.
- each composition of the piezoelectric ceramic is within the scope of the present invention (sample numbers 31 to 33, sample numbers 35 to 37, sample In the case of No. 40 to 45 and Sample No. 47 to 49), the piezoelectric characteristics are the same as in the case of adding BiO.
- the main component represented by the composition formula (Ag Li K) NbO is the category of the present invention.
- Sample numbers 29, 30, 39, 51, and 52 outside the range (0. 075 ⁇ x ⁇ 0. 4, 0. 03 ⁇ y ⁇ 0. 3) are the same as when BiO is added.
- the Curie point was lower than 350 ° C.
- the electromechanical coupling coefficient is less than 20% as in the case of adding BiO.
- each composition of the piezoelectric ceramic is within the scope of the present invention (sample numbers 55 to 57, sample numbers 59 to 61, sample In the case of Nos. 64 to 69 and Sample Nos. 71 to 73), as in the case of adding BiO, the piezoelectric characteristics are
- the main component represented by the composition formula (Ag Li K) NbO is within the scope of the present invention.
- Sample numbers 53, 54, 63, 75, and 76 outside the range (0. 075 ⁇ x ⁇ 0. 4, 0. 03 ⁇ y ⁇ 0. 3) are the same as when adding BiO.
- the Curie point was lower than 350 ° C.
- the value of electromechanical coupling coefficient ⁇ is less than 20%, as in the case of adding BiO.
- each composition of the piezoelectric ceramic was within the scope of the present invention (sample number 79-81, sample number 83- 85, sample numbers 88-93, sample numbers 95-97), the piezoelectric properties are the same as when BiO is added.
- the main component represented by the composition formula (Ag Li K) NbO is the category of the present invention.
- the amount of NiO added exceeds 10 parts by weight of sample numbers 82, 86, 94, 98
- the value of electromechanical coupling coefficient ⁇ is less than 20%, as in the case of adding BiO.
- composition of the porcelain is within the scope of the present invention (sample number 103 to 105, sample number 107 to 109, sample number 112 to 116, sample number 118 to 120), it is the same as when BiO is added.
- the piezoelectric characteristics were maintained without any practical problems, and the firing force could be fired at a low temperature of 1000 ° C or less.
- the main component represented by the composition formula (Ag Li K) NbO is the category of the present invention.
- Sample numbers 101, 102, 111, 122, 12 3 outside H (0. 075 ⁇ x ⁇ 0.4, 0.03 ⁇ y ⁇ 0.3) are the same as when adding BiO.
- the Curie point was lower than 350 ° C.
- electromechanical coupling coefficient ⁇ is the same as in the case of adding BiO.
- composition of the vessel is within the scope of the present invention (sample number 126 to 128, sample number 130 to 132, sample number 135 to 139, sample number 141 to 143), it is the same as when BiO is added.
- the piezoelectric characteristics were maintained without any practical problems, and the firing force could be fired at a low temperature of 1000 ° C or less.
- the main component represented by the composition formula (Ag Li K) NbO is the category of the present invention.
- Sample numbers 124, 125, 134, 145, and 14 outside H (0. 075 ⁇ x ⁇ 0.4, 0.03 ⁇ y ⁇ 0.3) are the same as when BiO is added.
- the Curie point was lower than 350 ° C.
- the electromechanical coupling coefficient ⁇ is 2 as in the case of adding BiO.
- samples Nos. 201 to 220 were prepared.
- secondary component is MO. Converted to 0 to 1 part by weight, 10 parts by weight or less
- the electromechanical coupling coefficient ⁇ is less than 20%.
- the firing temperature was 1020 ° C exceeding 1000 ° C.
- Mn and Si oxides were added as the second subcomponent, and the influence of these oxides was investigated.
- the main component was prepared in the same manner as in Example 1. Next, each of the six types of FeO, CoCO, NiO, CuO, ZnO, and BiO powders as the first subcomponent, and the second subcomponent,
- the amount of addition of the second subcomponent was also varied within the scope of the present invention.
- the sample indicated by * in the table has a composition outside the scope of the present invention.
- sample numbers 301 and 302 sample numbers 304 to 307, and sample numbers 309 to 312 added within the scope of the present invention (5 parts by weight or less), the same electromechanical connection as in the case of not adding them.
- a composite coefficient ⁇ (20% or more) is obtained, and the Curie point is the same as in Example 1 and the discoloration force is also in Example 1.
- MnCO and Z or SiO added as the second subcomponent are MnO and Si, respectively.
- Sample numbers 301, 302, 304 to 30 are good if they do not exceed 5 parts by weight in total when converted to O
- FIG. 1 is a perspective view showing a piezoelectric ceramic vibrator as an embodiment of the piezoelectric ceramic element of the present invention
- FIG. 2 is a cross-sectional view of the piezoelectric ceramic vibrator shown in FIG.
- the piezoelectric ceramic vibrator 10 of the present embodiment includes, for example, a piezoelectric ceramic 11 formed in a rectangular parallelepiped shape by the piezoelectric ceramic of the present invention, upper and lower surfaces of the piezoelectric ceramic 11, and Circular vibration electrodes 12A, 12B, and 12C formed in the middle of the thickness direction, and one end of each of the vibration electrodes 12A, 12B, and 12C is connected to the piezoelectric ceramic 11. And lead electrodes 13A, 13B, and 13C formed in a T-shape.
- the piezoelectric ceramic 11 is formed, for example, by laminating two piezoelectric ceramic layers 11A and 1IB, and a substantially intermediate vibrating electrode 12C in the thickness direction is formed at the interface of the piezoelectric ceramic layers 11A and 1IB. Formed.
- the upper and lower piezoelectric ceramic layers 11A and 11B are polarized in the same thickness direction as indicated by arrows in FIG.
- the upper and lower vibrating electrodes 12A and 12B and the respective extraction electrodes 13A and 13B are formed in a positional relationship overlapping each other, and the extraction electrode 13C connected to the middle vibration electrode 12C is connected to the upper and lower extraction electrodes 13A and 13B. Is formed in the opposite direction.
- the other ends of the extraction electrodes 13A, 13B, and 13C are formed in a letter shape along one piece of the piezoelectric ceramic 11.
- One upper electrode 15A is connected to the upper and lower vibrating electrodes 12A and 12B via lead electrodes 13A and 13B and a lead wire 14A, respectively, and the lead electrode 13C and another lead wire are connected to the middle vibrating electrode 12C.
- the other external electrode 15B is connected via 14B.
- the piezoelectric ceramic vibrator 10 of the present embodiment can be manufactured by low-temperature firing at 1000 ° C or less without containing Pb, and can provide a piezoelectric vibrator with a low environmental load. In addition, since low-temperature firing is possible, an internal electrode with a low Pd content can be used, and the manufacturing cost can be reduced. It should be noted that the present invention is included in the present invention as long as it is not contrary to the gist of the present invention, which is not limited to the above-described embodiments.
- the piezoelectric ceramic element can be widely applied to conventionally known piezoelectric ceramic elements such as a piezoelectric ceramic filter and a piezoelectric ceramic oscillator in addition to the above-described piezoelectric ceramic vibrator.
- the present invention can be suitably used for, for example, IJ for piezoelectric ceramic elements used in electronic products and household electrical appliances.
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- Manufacturing & Machinery (AREA)
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- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
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Description
Claims
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JP2006535059A JP4466652B2 (ja) | 2004-09-09 | 2005-07-08 | 圧電磁器及び圧電セラミック素子 |
DE112005002067T DE112005002067B4 (de) | 2004-09-09 | 2005-07-08 | Piezoelektrische Keramik und piezoelektrisches Keramikelement |
US11/705,527 US20070138918A1 (en) | 2004-09-09 | 2007-02-13 | Piezoelectric ceramic and piezoelectric ceramic element |
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US11/705,527 Continuation US20070138918A1 (en) | 2004-09-09 | 2007-02-13 | Piezoelectric ceramic and piezoelectric ceramic element |
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JP (1) | JP4466652B2 (ja) |
CN (1) | CN100491286C (ja) |
DE (1) | DE112005002067B4 (ja) |
WO (1) | WO2006027892A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007261863A (ja) * | 2006-03-28 | 2007-10-11 | Kyocera Corp | 圧電磁器組成物および圧電磁器 |
WO2007113189A1 (de) * | 2006-03-31 | 2007-10-11 | Siemens Aktiengesellschaft | Bleifreier piezokeramischer werkstoff mit kupferdotierung, verfahren zum herstellen eines piezokeramischen bauteils mit dem werkstoff und verwendung des bauteils |
WO2009125871A1 (ja) * | 2008-04-10 | 2009-10-15 | 住友化学株式会社 | 焼結体および熱電変換材料 |
JP2009256182A (ja) * | 2008-03-21 | 2009-11-05 | Ngk Insulators Ltd | 圧電/電歪磁器組成物の製造方法 |
JP2011241105A (ja) * | 2010-05-17 | 2011-12-01 | Taiheiyo Cement Corp | 非鉛圧電セラミックス用焼結助剤、非鉛圧電セラミックスおよびその製造方法 |
CN111302799A (zh) * | 2020-02-26 | 2020-06-19 | 中国科学院上海硅酸盐研究所 | 一种高功率脉冲电源用铌酸银钾铁电陶瓷材料及其制备方法和应用 |
Families Citing this family (4)
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WO2009066519A1 (ja) * | 2007-11-21 | 2009-05-28 | Konica Minolta Medical & Graphic, Inc. | 超音波受信用振動子、その製造方法、超音波探触子及び超音波医用画像診断装置 |
JP5605544B2 (ja) * | 2010-03-10 | 2014-10-15 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、並びに圧電素子及び圧電材料 |
DE102011109008A1 (de) * | 2011-07-29 | 2013-01-31 | Epcos Ag | Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements |
CN114956817A (zh) * | 2022-06-17 | 2022-08-30 | 陕西科技大学 | 一种高储能密度的铌酸银钠基无铅反铁电陶瓷材料及其制备方法 |
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- 2005-07-08 CN CNB2005800302852A patent/CN100491286C/zh not_active Expired - Fee Related
- 2005-07-08 JP JP2006535059A patent/JP4466652B2/ja not_active Expired - Fee Related
- 2005-07-08 DE DE112005002067T patent/DE112005002067B4/de not_active Expired - Fee Related
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007261863A (ja) * | 2006-03-28 | 2007-10-11 | Kyocera Corp | 圧電磁器組成物および圧電磁器 |
WO2007113189A1 (de) * | 2006-03-31 | 2007-10-11 | Siemens Aktiengesellschaft | Bleifreier piezokeramischer werkstoff mit kupferdotierung, verfahren zum herstellen eines piezokeramischen bauteils mit dem werkstoff und verwendung des bauteils |
JP2009256182A (ja) * | 2008-03-21 | 2009-11-05 | Ngk Insulators Ltd | 圧電/電歪磁器組成物の製造方法 |
WO2009125871A1 (ja) * | 2008-04-10 | 2009-10-15 | 住友化学株式会社 | 焼結体および熱電変換材料 |
JP2009249264A (ja) * | 2008-04-10 | 2009-10-29 | Sumitomo Chemical Co Ltd | 焼結体および熱電変換材料 |
JP2011241105A (ja) * | 2010-05-17 | 2011-12-01 | Taiheiyo Cement Corp | 非鉛圧電セラミックス用焼結助剤、非鉛圧電セラミックスおよびその製造方法 |
CN111302799A (zh) * | 2020-02-26 | 2020-06-19 | 中国科学院上海硅酸盐研究所 | 一种高功率脉冲电源用铌酸银钾铁电陶瓷材料及其制备方法和应用 |
CN111302799B (zh) * | 2020-02-26 | 2022-02-08 | 中国科学院上海硅酸盐研究所 | 一种高功率脉冲电源用铌酸银钾铁电陶瓷材料及其制备方法和应用 |
Also Published As
Publication number | Publication date |
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CN101014550A (zh) | 2007-08-08 |
JP4466652B2 (ja) | 2010-05-26 |
JPWO2006027892A1 (ja) | 2008-05-08 |
DE112005002067B4 (de) | 2010-01-28 |
CN100491286C (zh) | 2009-05-27 |
DE112005002067T5 (de) | 2007-10-25 |
US20070138918A1 (en) | 2007-06-21 |
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