JP2005179143A - 圧電磁器およびその製造方法 - Google Patents
圧電磁器およびその製造方法 Download PDFInfo
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- JP2005179143A JP2005179143A JP2003424866A JP2003424866A JP2005179143A JP 2005179143 A JP2005179143 A JP 2005179143A JP 2003424866 A JP2003424866 A JP 2003424866A JP 2003424866 A JP2003424866 A JP 2003424866A JP 2005179143 A JP2005179143 A JP 2005179143A
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- oxide
- piezoelectric ceramic
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Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title abstract description 6
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 17
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 13
- 239000000203 mixture Substances 0.000 claims description 51
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 35
- 229910052721 tungsten Inorganic materials 0.000 claims description 35
- 239000010937 tungsten Substances 0.000 claims description 35
- 229910000906 Bronze Inorganic materials 0.000 claims description 33
- 239000010974 bronze Substances 0.000 claims description 33
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 33
- 239000010955 niobium Substances 0.000 claims description 28
- 229910052715 tantalum Inorganic materials 0.000 claims description 25
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 25
- 229910052758 niobium Inorganic materials 0.000 claims description 24
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 24
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 21
- 229910052700 potassium Inorganic materials 0.000 claims description 21
- 239000011591 potassium Substances 0.000 claims description 21
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 18
- 229910052760 oxygen Inorganic materials 0.000 claims description 18
- 239000001301 oxygen Substances 0.000 claims description 18
- 239000011734 sodium Substances 0.000 claims description 15
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 14
- 229910052744 lithium Inorganic materials 0.000 claims description 14
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 12
- 229910052726 zirconium Inorganic materials 0.000 claims description 12
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 11
- 229910052708 sodium Inorganic materials 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 229910017052 cobalt Inorganic materials 0.000 claims description 10
- 239000010941 cobalt Substances 0.000 claims description 10
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 9
- 239000011572 manganese Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052733 gallium Inorganic materials 0.000 claims description 8
- 229910052732 germanium Inorganic materials 0.000 claims description 8
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052706 scandium Inorganic materials 0.000 claims description 8
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 8
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052748 manganese Inorganic materials 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 6
- 238000001354 calcination Methods 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 4
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 4
- 229910020599 Co 3 O 4 Inorganic materials 0.000 claims description 3
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 3
- 229910005793 GeO 2 Inorganic materials 0.000 claims description 3
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 54
- 238000010304 firing Methods 0.000 abstract description 15
- 239000000758 substrate Substances 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 4
- 238000002156 mixing Methods 0.000 abstract description 3
- 239000000843 powder Substances 0.000 description 33
- 239000002994 raw material Substances 0.000 description 24
- 239000000126 substance Substances 0.000 description 24
- 230000008878 coupling Effects 0.000 description 21
- 238000010168 coupling process Methods 0.000 description 21
- 238000005859 coupling reaction Methods 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 20
- FFQALBCXGPYQGT-UHFFFAOYSA-N 2,4-difluoro-5-(trifluoromethyl)aniline Chemical compound NC1=CC(C(F)(F)F)=C(F)C=C1F FFQALBCXGPYQGT-UHFFFAOYSA-N 0.000 description 12
- 230000005684 electric field Effects 0.000 description 9
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 7
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 6
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229910052725 zinc Inorganic materials 0.000 description 6
- 239000011701 zinc Substances 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 4
- 229910052791 calcium Inorganic materials 0.000 description 4
- 239000011575 calcium Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 4
- 229910000480 nickel oxide Inorganic materials 0.000 description 4
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052712 strontium Inorganic materials 0.000 description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- DEXFNLNNUZKHNO-UHFFFAOYSA-N 6-[3-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-3-oxopropyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)C(CCC1=CC2=C(NC(O2)=O)C=C1)=O DEXFNLNNUZKHNO-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- -1 Sc 2 O 3 Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- UTBYQPSPFXHANA-UHFFFAOYSA-N [K].[Na].[Li] Chemical compound [K].[Na].[Li] UTBYQPSPFXHANA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052800 carbon group element Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- UBEWDCMIDFGDOO-UHFFFAOYSA-N cobalt(2+);cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[Co+2].[Co+3].[Co+3] UBEWDCMIDFGDOO-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- NVDNLVYQHRUYJA-UHFFFAOYSA-N hafnium(iv) carbide Chemical compound [Hf+]#[C-] NVDNLVYQHRUYJA-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000011656 manganese carbonate Substances 0.000 description 1
- 235000006748 manganese carbonate Nutrition 0.000 description 1
- 229940093474 manganese carbonate Drugs 0.000 description 1
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
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Abstract
【解決手段】 圧電基板1は、(1−m−n){(Na1-x-y Kx Liy )(Nb1-z Taz )O3 }+m{(M1)ZrO3 }+n{M2(Nb1-w Taw )2 O6 }を主成分として含有する。M1、M2はアルカリ土類金属元素であり、0.1≦x≦0.9、0≦y≦0.1、0<m<0.1、0<n≦0.01の範囲内が好ましい。これによりキュリー温度を高くすることができると共に、発生変位量を大きくすることができ、焼成も容易とすることができる。焼成の際には、(M1)ZrO3 を作製したのち、他の原料と混合する。
【選択図】 図1
Description
化5に示した第1のペロブスカイト型酸化物と第2のペロブスカイト型酸化物とタングステンブロンズ型酸化物とを含む組成物を主成分として含有する圧電磁器を用い、図1に示したような圧電素子を図2に示した工程で作製した。本実施例では図1および図2を参照し、図1に示した符号を用いて説明する。
化6に示した組成物を主成分として含むようにしたことを除き、他は実施例1―2と同様にして圧電素子を作製した。その際、実施例1―3〜1―5で、第3の元素(化6におけるM1)を、表2に示したように変化させた。マグネシウム、カルシウムおよびバリウムの原料には、塩基性炭酸マグネシウム(4MgCO3 ・Mg(OH)2 ・4H2 O)粉末、炭酸カルシウム(CaCO3 )粉末および、炭酸バリウム粉末を用いた。なお、副成分の含有量は実施例1―2と同様である。
化7に示した組成物を主成分として含むようにしたことを除き、他は実施例1―1,1―2と同様にして圧電素子を作製した。その際、実施例2―1〜2―7で、第1の元素の組成(化7におけるxおよびyの値)と、第2のペロブスカイト型酸化物であるジルコン酸ストロンチウムの含有量(化7におけるmの値)とを、表3に示したように変化させた。なお、副成分の含有量は実施例1―1,1―2と同様である。
化8に示した組成物を主成分として含むようにしたことを除き、他は実施例1―1,1―2と同様にして圧電素子を作製した。その際、実施例3―1,3―2で、タンタルの含有量(化8におけるzおよびwの値)と、第2のペロブスカイト型酸化物であるジルコン酸ストロンチウムの含有量(化8におけるmの値)とを表4に示したように変化させた。なお、副成分の含有量は実施例1―1,1―2と同様であり、タンタルの原料には酸化タンタル(Ta2 O5 )粉末を用いた。
化9に示した組成物を主成分としてさらに表5または表6に示す副成分を添加したことを除き、他は実施例3―1と同様にして圧電素子を作製した。なお、第2副成分の原料には、酸化コバルト(Co3 O4 )粉末,酸化鉄(Fe2 O3 )粉末,酸化ニッケル(NiO)粉末,酸化亜鉛(ZnO)粉末,酸化スカンジウム(Sc2 O3 )粉末,酸化チタン(TiO2 )粉末,酸化ジルコニウム(ZrO2 )粉末,酸化ハフニウム(HfO2 )粉末,酸化アルミニウム(Al2 O3 )粉末,酸化ガリウム(Ga2 O3 )粉末,酸化インジウム(In2 O3 )粉末,酸化ケイ素(SiO2 )粉末,酸化ゲルマニウム(GeO2 )粉末あるいは酸化スズ(SnO2 )粉末を用いた。表5,6に示した副成分の含有量は、酸化物(MnO,Co3 O4 ,Fe2 O3 ,NiO,ZnO,Sc2 O3 ,TiO2 ,ZrO2 ,HfO2 ,Al2 O3 ,Ga2 O3 ,In2 O3 ,SiO2 ,GeO2 ,SnO2 )に換算した主成分に対する値である。
Claims (10)
- 第1のペロブスカイト型酸化物と、第2のペロブスカイト型酸化物と、タングステンブロンズ型酸化物とを含む組成物を含有し、
前記第1のペロブスカイト型酸化物は、ナトリウム(Na)およびカリウム(K)を含む第1の元素と、ニオブ(Nb)およびタンタル(Ta)からなる群のうちの少なくともニオブを含む第2の元素と、酸素(O)とからなり、
前記第2のペロブスカイト型酸化物は、アルカリ土類金属元素を含む第3の元素と、ジルコニウム(Zr)を含む第4の元素と、酸素とからなり、
前記組成物における前記第2のペロブスカイト型酸化物の含有量は10mol%未満である
ことを特徴とする圧電磁器。 - 前記第1の元素におけるカリウムの含有量は10mol%以上90mol%以下の範囲内である
ことを特徴とする請求項1記載の圧電磁器。 - 前記第1の元素として更にリチウムを含み、前記第1の元素におけるリチウムの含有量は10mol%以下である
ことを特徴とする請求項1または請求項2記載の圧電磁器。 - 前記組成物における前記タングステンブロンズ型酸化物の含有量は1mol%以下である
ことを特徴とする請求項1ないし請求項3のいずれかに記載の圧電磁器。 - 前記タングステンブロンズ型酸化物は、
アルカリ土類金属元素を含む第5の元素と、
ニオブおよびタンタルからなる群のうちの少なくともニオブを含む第6の元素と、
酸素とからなる
ことを特徴とする請求項1ないし請求項4のいずれかに記載の圧電磁器。 - 前記第2の元素と前記第6の元素との合計におけるタンタルの含有量は0mol%以上10mol%以下の範囲内である
ことを特徴とする請求項5記載の圧電磁器。 - 前記組成物を主成分とし、更に、副成分として、長周期型周期表の3族から14族の元素のうちの少なくとも1種を含有する
ことを特徴とする請求項1ないし請求項6のいずれかに記載の圧電磁器。 - 前記副成分は、第1副成分としてマンガン(Mn)を、酸化物(MnO)に換算して、主成分の0.1質量%以上1質量%以下の範囲内で含有する
ことを特徴とする請求項7記載の圧電磁器。 - 前記副成分は、第1副成分に加えて、第2副成分としてコバルト(Co),鉄(Fe),ニッケル(Ni),亜鉛(Zn),スカンジウム(Sc),チタン(Ti),ジルコニウム(Zr),ハフニウム(Hf),アルミニウム(Al),ガリウム(Ga),インジウム(In),ケイ素(Si),ゲルマニウム(Ge)およびスズ(Sn)からなる群のうちの少なくとも1種を、酸化物(Co3 O4 ,Fe2 O3 ,NiO,ZnO,Sc2 O3 ,TiO2 ,ZrO2 ,HfO2 ,Al2 O3 ,Ga2 O3 ,In2 O3 ,SiO2 ,GeO2 ,SnO2 )に換算して、第2副成分の合計で、主成分の0.01質量%以上1質量%以下の範囲内で含有する
ことを特徴とする請求項8記載の圧電磁器。 - ナトリウム(Na)およびカリウム(K)を含む第1の元素,ニオブ(Nb)およびタンタル(Ta)からなる群のうちの少なくともニオブを含む第2の元素および酸素(O)からなる第1のペロブスカイト型酸化物と、アルカリ土類金属元素のうちの少なくとも1種を含む第3の元素,ジルコニウム(Zr)を含む第4の元素および酸素からなる第2のペロブスカイト型酸化物と、タングステンブロンズ型酸化物とを含む圧電磁器の製造方法であって、
前記第1のペロブスカイト型酸化物を構成する元素と、前記第2のペロブスカイト型酸化物と、前記タングステンブロンズ型酸化物を構成する元素とを含む混合物を仮焼する工程
を含むことを特徴とする圧電磁器の製造方法。
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PCT/JP2004/019091 WO2005061413A1 (ja) | 2003-12-22 | 2004-12-21 | 圧電磁器およびその製造方法 |
CNB2004800382725A CN100432014C (zh) | 2003-12-22 | 2004-12-21 | 压电陶瓷及其制造方法 |
EP20040807448 EP1702906B1 (en) | 2003-12-22 | 2004-12-21 | Piezoelectric porcelain and method for production thereof |
KR20067012354A KR100821542B1 (ko) | 2003-12-22 | 2004-12-21 | 압전 자기 및 그 제조방법 |
US10/583,447 US20070152183A1 (en) | 2003-12-22 | 2004-12-21 | Piezoelectric ceramic and method of manufacturing the same |
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US8231803B2 (en) | 2008-03-26 | 2012-07-31 | Tdk Corporation | Piezoelectric ceramic and piezoelectric ceramic composition |
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JP2017163055A (ja) * | 2016-03-10 | 2017-09-14 | 太陽誘電株式会社 | 圧電素子及びその製造方法 |
JP2019031424A (ja) * | 2017-08-09 | 2019-02-28 | 日本特殊陶業株式会社 | 無鉛圧電磁器組成物、圧電素子および圧電素子利用装置 |
WO2024095963A1 (ja) * | 2022-10-31 | 2024-05-10 | 京セラ株式会社 | 圧電磁器および圧電素子 |
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EP1702906A4 (en) | 2011-04-27 |
CN1898182A (zh) | 2007-01-17 |
JP4513948B2 (ja) | 2010-07-28 |
WO2005061413A1 (ja) | 2005-07-07 |
KR20060105788A (ko) | 2006-10-11 |
TW200529481A (en) | 2005-09-01 |
TWI249258B (en) | 2006-02-11 |
CN100432014C (zh) | 2008-11-12 |
EP1702906B1 (en) | 2012-08-29 |
EP1702906A1 (en) | 2006-09-20 |
US20070152183A1 (en) | 2007-07-05 |
KR100821542B1 (ko) | 2008-04-14 |
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