WO2006011607A8 - レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法 - Google Patents
レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法Info
- Publication number
- WO2006011607A8 WO2006011607A8 PCT/JP2005/013976 JP2005013976W WO2006011607A8 WO 2006011607 A8 WO2006011607 A8 WO 2006011607A8 JP 2005013976 W JP2005013976 W JP 2005013976W WO 2006011607 A8 WO2006011607 A8 WO 2006011607A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- forming resist
- protective film
- resist film
- same
- resist pattern
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/128—Radiation-activated cross-linking agent containing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Materials For Photolithography (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05767418A EP1788439A4 (en) | 2004-07-30 | 2005-07-29 | MATERIAL FOR FORMING A RESISTANCE FILM AND METHOD FOR FORMING RESIST PATTERN THEREWITH |
US11/659,006 US7951523B2 (en) | 2004-07-30 | 2005-07-29 | Material for forming resist protective film and method for forming resist pattern using same |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004224811 | 2004-07-30 | ||
JP2004-224811 | 2004-07-30 | ||
JP2004228696A JP4368267B2 (ja) | 2004-07-30 | 2004-08-04 | レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法 |
JP2004-228696 | 2004-08-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006011607A1 WO2006011607A1 (ja) | 2006-02-02 |
WO2006011607A8 true WO2006011607A8 (ja) | 2008-02-07 |
Family
ID=35786351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/013976 WO2006011607A1 (ja) | 2004-07-30 | 2005-07-29 | レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7951523B2 (ja) |
EP (1) | EP1788439A4 (ja) |
JP (1) | JP4368267B2 (ja) |
KR (1) | KR20070039970A (ja) |
TW (1) | TW200609683A (ja) |
WO (1) | WO2006011607A1 (ja) |
Families Citing this family (17)
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JP4606136B2 (ja) * | 2004-06-09 | 2011-01-05 | 富士通株式会社 | 多層体、レジストパターン形成方法、微細加工パターンを有する装置の製造方法および電子装置 |
JP4368267B2 (ja) | 2004-07-30 | 2009-11-18 | 東京応化工業株式会社 | レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法 |
JP4368266B2 (ja) | 2004-07-30 | 2009-11-18 | 東京応化工業株式会社 | レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法 |
JP4322205B2 (ja) | 2004-12-27 | 2009-08-26 | 東京応化工業株式会社 | レジスト保護膜形成用材料およびこれを用いたレジストパターン形成方法 |
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WO2007119804A1 (ja) * | 2006-04-13 | 2007-10-25 | Asahi Glass Company, Limited | 液浸露光用レジスト組成物 |
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JP4322205B2 (ja) * | 2004-12-27 | 2009-08-26 | 東京応化工業株式会社 | レジスト保護膜形成用材料およびこれを用いたレジストパターン形成方法 |
JP2006301524A (ja) * | 2005-04-25 | 2006-11-02 | Tokyo Ohka Kogyo Co Ltd | 保護膜形成用材料およびこれを用いたレジストパターン形成方法 |
JP2007078744A (ja) * | 2005-09-09 | 2007-03-29 | Tokyo Ohka Kogyo Co Ltd | 保護膜形成用材料およびこれを用いたホトレジストパターン形成方法 |
-
2004
- 2004-08-04 JP JP2004228696A patent/JP4368267B2/ja not_active Expired - Fee Related
-
2005
- 2005-07-29 EP EP05767418A patent/EP1788439A4/en not_active Withdrawn
- 2005-07-29 WO PCT/JP2005/013976 patent/WO2006011607A1/ja active Application Filing
- 2005-07-29 US US11/659,006 patent/US7951523B2/en active Active
- 2005-07-29 TW TW094126083A patent/TW200609683A/zh unknown
- 2005-07-29 KR KR1020077004561A patent/KR20070039970A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1788439A1 (en) | 2007-05-23 |
JP4368267B2 (ja) | 2009-11-18 |
EP1788439A4 (en) | 2009-04-08 |
US20090197199A1 (en) | 2009-08-06 |
JP2006064712A (ja) | 2006-03-09 |
TW200609683A (en) | 2006-03-16 |
US7951523B2 (en) | 2011-05-31 |
KR20070039970A (ko) | 2007-04-13 |
WO2006011607A1 (ja) | 2006-02-02 |
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