WO2006003086A8 - Integrierte schaltungsanordnung mit pin-diode und herstellungverfahren - Google Patents

Integrierte schaltungsanordnung mit pin-diode und herstellungverfahren

Info

Publication number
WO2006003086A8
WO2006003086A8 PCT/EP2005/052809 EP2005052809W WO2006003086A8 WO 2006003086 A8 WO2006003086 A8 WO 2006003086A8 EP 2005052809 W EP2005052809 W EP 2005052809W WO 2006003086 A8 WO2006003086 A8 WO 2006003086A8
Authority
WO
WIPO (PCT)
Prior art keywords
integrated circuit
circuit arrangement
pin diode
production method
area
Prior art date
Application number
PCT/EP2005/052809
Other languages
English (en)
French (fr)
Other versions
WO2006003086A1 (de
Inventor
Gernot Langguth
Karlheinz Mueller
Holger Wille
Original Assignee
Infineon Technologies Ag
Gernot Langguth
Karlheinz Mueller
Holger Wille
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Gernot Langguth, Karlheinz Mueller, Holger Wille filed Critical Infineon Technologies Ag
Priority to JP2007518581A priority Critical patent/JP2008504705A/ja
Publication of WO2006003086A1 publication Critical patent/WO2006003086A1/de
Publication of WO2006003086A8 publication Critical patent/WO2006003086A8/de
Priority to US11/647,550 priority patent/US7495306B2/en
Priority to US12/351,623 priority patent/US8058111B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
    • H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
    • H01L27/0647—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. vertical bipolar transistor and bipolar lateral transistor and resistor
    • H01L27/0652—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
    • H01L27/0664—Vertical bipolar transistor in combination with diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14681—Bipolar transistor imagers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells

Landscapes

  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Light Receiving Elements (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

Erläutert wird unter anderem eine integrierte Schaltungsan­ordnung (10), die eine pin-Fotodiode (14) und einen kochdo­tierten Anschlussbereich (62) eines Bipolartransistors (58) enthält. Durch eine geschickte Verfahrensführung wird ein Zwischenbereich (30) der pin-Diode (14) mit einer großen Tiefe und ohne Autodoping in einem mittleren Bereich herge­stellt.
PCT/EP2005/052809 2004-06-30 2005-06-17 Integrierte schaltungsanordnung mit pin-diode und herstellungverfahren WO2006003086A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007518581A JP2008504705A (ja) 2004-06-30 2005-06-17 ｐｉｎダイオードを備えた集積回路構造およびその製造方法
US11/647,550 US7495306B2 (en) 2004-06-30 2006-12-28 Integrated circuit arrangement comprising a pin diode, and production method
US12/351,623 US8058111B2 (en) 2004-06-30 2009-01-09 Integrated circuit arrangement comprising a pin diode, and production method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004031606.6 2004-06-30
DE102004031606A DE102004031606B4 (de) 2004-06-30 2004-06-30 Integrierte Schaltungsanordnung mit pin-Diode und Herstellungsverfahren

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/647,550 Continuation-In-Part US7495306B2 (en) 2004-06-30 2006-12-28 Integrated circuit arrangement comprising a pin diode, and production method

Publications (2)

Publication Number Publication Date
WO2006003086A1 WO2006003086A1 (de) 2006-01-12
WO2006003086A8 true WO2006003086A8 (de) 2006-03-23

Family

ID=34970038

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/052809 WO2006003086A1 (de) 2004-06-30 2005-06-17 Integrierte schaltungsanordnung mit pin-diode und herstellungverfahren

Country Status (4)

Country Link
US (2) US7495306B2 (de)
JP (2) JP2008504705A (de)
DE (2) DE102004031606B4 (de)
WO (1) WO2006003086A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100723137B1 (ko) * 2005-11-24 2007-05-30 삼성전기주식회사 포토다이오드 소자 및 이를 이용한 광센서용 포토다이오드어레이
DE102006027969A1 (de) * 2006-06-17 2007-12-20 X-Fab Semiconductor Foundries Ag Verfahren zur selektiven Entspiegelung einer Halbleitergrenzfläche durch eine besondere Prozessführung
KR100929741B1 (ko) * 2007-11-20 2009-12-03 주식회사 동부하이텍 이미지 센서 및 그 제조 방법
EP2216815B1 (de) 2009-02-05 2014-04-02 ams AG Integrierte Schaltung mit PIN-Dioden
US8101479B2 (en) * 2009-03-27 2012-01-24 National Semiconductor Corporation Fabrication of asymmetric field-effect transistors using L-shaped spacers
US8030151B2 (en) * 2009-03-27 2011-10-04 National Semiconductor Corporation Configuration and fabrication of semiconductor structure having bipolar junction transistor in which non-monocrystalline semiconductor spacing portion controls base-link length
US8482078B2 (en) * 2011-05-10 2013-07-09 International Business Machines Corporation Integrated circuit diode
US10468543B2 (en) 2013-05-22 2019-11-05 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
CN105556680B (zh) * 2013-05-22 2017-12-22 王士原 微结构增强型吸收光敏装置
US10446700B2 (en) 2013-05-22 2019-10-15 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
US10700225B2 (en) 2013-05-22 2020-06-30 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
US11121271B2 (en) 2013-05-22 2021-09-14 W&WSens, Devices, Inc. Microstructure enhanced absorption photosensitive devices
US9530905B2 (en) 2014-11-18 2016-12-27 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
US10553633B2 (en) * 2014-05-30 2020-02-04 Klaus Y.J. Hsu Phototransistor with body-strapped base

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0353509B1 (de) * 1988-08-04 1995-06-14 Siemens Aktiengesellschaft Verfahren zur Herstellung einer integrierten Halbleiteranord- nung mit einem Photoelement und einem npn-Bipolartransistor in einem Siliziumsubstrat
JPH0779154B2 (ja) * 1989-03-10 1995-08-23 シャープ株式会社 回路内蔵受光素子
US5598022A (en) * 1990-08-31 1997-01-28 Hamamatsu Photonics K.K. Optical semiconductor device
JPH09219534A (ja) * 1995-12-06 1997-08-19 Sony Corp 受光素子、光ピツクアツプ及び半導体装置製造方法
EP0778621B1 (de) * 1995-12-06 2008-08-13 Sony Corporation Aus einer Fotodiode und einem bipolaren Element bestehende Halbleitervorrichtung und Verfahren zur Herstellung
JP3317942B2 (ja) * 1999-11-08 2002-08-26 シャープ株式会社 半導体装置およびその製造方法
KR100477788B1 (ko) * 1999-12-28 2005-03-22 매그나칩 반도체 유한회사 커패시터가 접속된 포토다이오드를 갖는 씨모스이미지센서 및 그 제조방법
JP3782297B2 (ja) * 2000-03-28 2006-06-07 株式会社東芝 固体撮像装置及びその製造方法
JP2002033484A (ja) * 2000-07-18 2002-01-31 Mitsubishi Electric Corp 半導体装置
CN100446264C (zh) * 2000-10-19 2008-12-24 量子半导体有限公司 制作和cmos电路集成在一起的异质结光电二极管的方法
US6580109B1 (en) * 2002-02-01 2003-06-17 Stmicroelectronics, Inc. Integrated circuit device including two types of photodiodes
US6743652B2 (en) * 2002-02-01 2004-06-01 Stmicroelectronics, Inc. Method for making an integrated circuit device including photodiodes
DE10241156A1 (de) * 2002-09-05 2004-03-18 Infineon Technologies Ag Verfahren zum Herstellen einer integrierten pin-Diode und zugehörige Schaltungsanordnung
KR100446309B1 (ko) * 2002-11-14 2004-09-01 삼성전자주식회사 Ｌ자형 스페이서를 채용한 반도체 소자의 제조 방법

Also Published As

Publication number Publication date
US8058111B2 (en) 2011-11-15
JP2011018920A (ja) 2011-01-27
US20090209057A1 (en) 2009-08-20
DE102004063997B4 (de) 2010-02-11
US20070187795A1 (en) 2007-08-16
WO2006003086A1 (de) 2006-01-12
DE102004031606A1 (de) 2006-01-19
US7495306B2 (en) 2009-02-24
JP2008504705A (ja) 2008-02-14
DE102004031606B4 (de) 2009-03-12
JP5281620B2 (ja) 2013-09-04

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