WO2005103675A1 - 3次元超音波検査装置 - Google Patents
3次元超音波検査装置 Download PDFInfo
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- WO2005103675A1 WO2005103675A1 PCT/JP2005/007816 JP2005007816W WO2005103675A1 WO 2005103675 A1 WO2005103675 A1 WO 2005103675A1 JP 2005007816 W JP2005007816 W JP 2005007816W WO 2005103675 A1 WO2005103675 A1 WO 2005103675A1
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- sensor
- joint
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/11—Analysing solids by measuring attenuation of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0609—Display arrangements, e.g. colour displays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/044—Internal reflections (echoes), e.g. on walls or defects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/106—Number of transducers one or more transducer arrays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/26—Scanned objects
- G01N2291/267—Welds
Definitions
- the present invention relates to a three-dimensional ultrasonic inspection apparatus for non-destructively inspecting the internal structure, joint state, and defect state of an inspection object by ultrasonic waves, and particularly relates to the state of a welded portion of the inspection object.
- the present invention also relates to a three-dimensional ultrasonic inspection apparatus including an ultrasonic inspection sensor device used for an ultrasonic imaging apparatus for three-dimensionally visualizing the state of welding defects.
- Ultrasonic flaw detection technology is one of the techniques for performing non-destructive inspection of the welding state or the state of welding defects at the joint between flat plate-shaped structural parts, which are inspection objects.
- ultrasonic inspection apparatuses use an ultrasonic transducer in which a large number of piezoelectric vibrators are arranged in a matrix for generating and detecting ultrasonic waves.
- the ultrasonic wave oscillated from the transducer is sent to the weld, which is the joint of the inspection object, and the reflected echo reflected from the weld is received by the ultrasonic transducer, and this received echo signal is passed through the signal detection circuit.
- the signal is sent to the signal processing unit, where the signal processing unit performs parallel arithmetic processing to image the welded part of the inspection object.
- the ultrasonic image of the welded part that has been imaged is displayed on a display device, and by visually observing the ultrasonic image, the state of the welded part and the state of the welding defect can be inspected nondestructively. Puru.
- a conventional ultrasonic inspection apparatus irradiates a welding portion of an inspection object with ultrasonic waves, processes a reflection echo thereof, displays an ultrasonic image on a display device, and displays the welding portion of the displayed welding portion.
- the images are visually judged, and the state of the welded parts and the state of welding defects are inspected nondestructively.
- the joining strength of the welded portion of the inspection object depends on the size of the melt-solidified portion, and the boundary between the welded portion and the melt-solidified portion formed inside the welded portion is the bottom surface of the welded portion of the inspection object. It is known from Japanese Unexamined Patent Publication No. Hei 6-265529 that it can be obtained from the inflection point of the intensity distribution curve of the reflected echo.
- the conventional ultrasonic inspection apparatus it is possible to visualize the layer structure of an inspection object having a plurality of different acoustic characteristics and defects or voids or peeling of a weld in the inspection object by ultrasonic waves. It is possible to make a judgment by visually observing the ultrasonic image of the welded portion displayed on the display device.However, since the two-dimensional ultrasonic image is visually judged, there is a variation in the judgment result due to individual differences. It has been difficult to accurately and quantitatively inspect the positional relationship of the weld with the inspection object in three dimensions. That is, in a conventional ultrasonic inspection apparatus,
- a conventional ultrasonic inspection apparatus has a piezoelectric element for transmitting and receiving ultrasonic waves as a sensor apparatus (ultrasonic sensor) for ultrasonic inspection.
- Ultrasonic transducers arranged in an array are used, and a sound material, which is a sound propagation medium, is attached to the transmitting and receiving surfaces of the ultrasonic sensor by bolting, and this material is used as an object to be inspected. Ultrasonic waves are transmitted to the inspection object in close contact.
- the ultrasonic wave transmitted into the inspection object is partially reflected at an internal defect or a boundary surface of the inspection object and becomes a reflected echo.
- the reflected echo is received by an ultrasonic sensor, and the ultrasonic sensor is used.
- An electric signal generated by vibrating each piezoelectric element of the sensor is processed to perform a three-dimensional image inside the inspection object.
- the ultrasonic wave does not propagate.
- a coupling agent for acoustic matching of ultrasonic waves is applied or interposed between the ultrasonic sensor and the show material and between the show material and the inspection object.
- This coupler is a volatile low-gel liquid or a solid. It is necessary to confirm the presence or absence of air bubbles before the inspection with an ultrasonic inspection device, where air bubbles are easily generated due to temperature difference etc. in the application or interposed part of the coupler. If air bubbles are found, the shoe is removed and the power plant is repainted.
- the present invention has been made in consideration of the above-described circumstances, and enables accurate and accurate non-destructive three-dimensional inspection of an internal inspection of an inspection object, and quantitatively determines whether there is an abnormality due to the internal inspection.
- the purpose of the present invention is to provide a three-dimensional ultrasonic inspection apparatus capable of automatic determination.
- Another object of the present invention is to detect reflected echoes of the force of each of the piezoelectric transducers of the ultrasonic transducers arranged in a matrix or in an array and of the force of the object to be inspected of the oscillated ultrasonic wave and to generate a signal.
- a 3D ultrasonic inspection device that can quickly and quickly obtain high-resolution ultrasonic flaw detection images of the size and location of the melt-solidified portion of the joint, the solid-phase joint (corona bond), and the melting defect.
- Still another object of the present invention is to refer to a database storing pass / fail judgment pattern images based on an ultrasonic inspection image in an appropriate welding state and an inspected ultrasonic inspection image. It is an object of the present invention to provide a three-dimensional ultrasonic inspection apparatus capable of quickly performing a quantitative and stable pass / fail judgment by matching.
- Still another object of the present invention is to improve the detection performance by transmitting ultrasonic waves and reflected echoes accurately and smoothly, so that the three-dimensional imaging processing inside the inspection object can be performed accurately and accurately. It is an object of the present invention to provide an ultrasonic inspection sensor device which can be performed efficiently and a three-dimensional ultrasonic inspection device provided with such an ultrasonic inspection sensor device.
- Another object of the present invention is to provide an ultrasonic inspection system capable of easily and easily attaching and detaching a shower means to and from an ultrasonic sensor, shortening work time, and performing ultrasonic inspection quickly and efficiently.
- An object of the present invention is to provide a sensor device and a three-dimensional ultrasonic inspection device provided with such an ultrasonic inspection sensor device.
- the three-dimensional ultrasonic inspection apparatus of the present invention provided to achieve the above object provides an ultrasonic wave including a transducer as an ultrasonic sensor in which a plurality of piezoelectric vibrators are arranged in a matrix or an array.
- a drive element selection unit that sequentially selects a piezoelectric vibrator that oscillates an ultrasonic wave among a plurality of piezoelectric vibrators constituting the ultrasonic transducer;
- Ultrasonic waves oscillated from the piezoelectric vibrator selected by the drive element selection unit are made incident on the joint of the inspection object via the acoustic propagation medium, and the reflected echo from the joint is received.
- a signal detection circuit for detecting an electric signal for detecting an electric signal
- the intensity distribution force of the three-dimensional image data generated by the signal processing unit is used to detect the size and position of the melt-solidified portion and the position and size of the welding defect at the joint, the detection result and the signal processing unit And a display processing device for displaying the three-dimensional image data from.
- the display processing device may further include a bottom surface of a joint portion of the inspection object generated by the signal processing unit.
- An intermediate data processing unit for detecting the presence or absence and size of a fusion defect in the joint from the intensity distribution of the three-dimensional imaging data of the intermediate joint of the inspection target of the inspection object;
- a determination unit that compares results detected by the bottom surface data processing unit and the intermediate unit data processing unit and determines pass / fail;
- a display unit for displaying the results obtained from the bottom surface data processing unit, the intermediate unit data processing unit and the determination unit and the three-dimensional imaging data generated by the signal processing unit may be provided.
- the intermediate data processing unit of the display processing device extracts the three-dimensional imaging data of the intermediate part of the joining part of the inspection object from the three-dimensional imaging data generated from the signal processing unit, and extracts the intermediate joining surface.
- Detection unit that generates a transmission plane image of the above and measures the thickness of the plate; and, based on the transmission plane image captured from the intermediate detection unit, the center position and size and position of the intermediate connection part, and welding defects such as blow holes.
- a joint position measuring unit for measuring the size and position of the joint.
- the bottom surface data processing unit of the display processing device extracts the three-dimensional image shadow data of the bottom surface of the joint of the inspection object, which is generated by the signal processing unit.
- a bottom surface detection unit that generates a transmission plane image of the joint bottom surface
- a fusion solidification part detection unit for measuring the size and position of the fusion solidification part from the transmission plane image taken from the bottom surface detection part and the center position of the intermediate joint part taken from the center position 'joint part measurement part. Can be.
- the display processing device includes a determination criterion for determining the plate thickness force of the object to be inspected taken from the intermediate detection unit of the intermediate data processing unit and the melt solidification taken from the fusion solidification unit detection unit of the bottom surface data processing unit.
- a determination unit that performs a pass / fail determination by comparing the size and position of the unit; a center position of the bottom surface data processing unit; a state of the bonding unit fetched from the bonding unit determination unit; and a fusion solidification unit fetched from the determination unit.
- a display unit for displaying a result of the comparison with the state and the three-dimensional imaging data generated by the signal processing unit;
- the display processing device further includes an intermediate detection unit in the intermediate unit data processing unit, and detects a surface position and a joint position of the three-dimensional image data to be inspected generated by the signal processing unit.
- An intermediate detection unit in the intermediate unit data processing unit, and detects a surface position and a joint position of the three-dimensional image data to be inspected generated by the signal processing unit.
- the surface / intermediate position detection unit force The data force of the captured surface position and the joint position
- the plate thickness measurement unit that measures the plate thickness
- An intermediate position plane image generation unit that generates a transmission plane image at an intermediate position from the captured intermediate position data and the three-dimensional image data generated by the signal processing unit;
- the display processing device includes a center position and a joint measuring unit in the intermediate data processing unit, and the center position 'joint measuring unit transmits the intermediate position generated by the intermediate detecting unit.
- a joint outline determining unit that determines the outline of the joint from the planar image
- a center position determining unit that determines the center position of the joint based on the contour data force of the joint including the joint contour determining unit force;
- a joint measuring section for measuring the size of the joint, the contour data of the joint taken in from the joint contour determining section;
- the display processing device includes a bottom surface detection unit in the bottom surface data processing unit,
- the bottom surface detection unit includes a three-dimensional image data generated by the signal processing unit, a dent part for detecting a dent part representing a dent part of a joint part of the object, and a dent part for detecting a bottom position.
- a bottom surface position plane image generation unit for generating a bottom surface position transmission plane image from the data of the bottom surface position and the three-dimensional imaging data generated from the signal processing unit;
- the display processing device further includes a melt-solidification unit detection unit in the bottom surface data processing unit,
- the melt-solidified portion detection unit is configured to calculate the bottom position transmission plane image generated by the bottom detection unit of the bottom surface data processing unit and the center position of the intermediate data processing unit and the joint acquired from the joint measurement unit.
- An intensity distribution creating unit that creates an ultrasonic intensity distribution image at the center position
- a smoothing processing unit that smoothes the ultrasonic intensity distribution image generated by the intensity distribution creating unit
- a primary difference processing unit that performs a primary difference process on the bottom position transmission plane image that has been subjected to the smoothing processing in a direction toward the center position of the outer camera;
- a second-order difference processing unit that performs a second-order difference processing on the bottom surface transmission plane image subjected to the first-order difference processing in the first-order difference processing unit from the outside of the melt-solidification unit toward the center position;
- a melt-solidification unit measuring unit that measures the size of the melt-solidification unit data force melt-solidification unit specified by the melt-solidification unit identification unit
- the display processing device further includes a determination unit that determines whether the bonding state of the bonding unit is good or not, and the determination unit includes a center position of the intermediate data processing unit and a plate measured by the bonding unit measurement unit.
- Thickness value t force A criterion creating section for calculating the required size of the melt-solidified portion, and the required size of the melt-solidified portion generated by the criterion creating portion and the melting of the bottom surface data processing unit
- a quality judgment unit for comparing and judging the size of the molten solidified portion measured by the solidified portion detection unit;
- An ultrasonic sensor as a transducer in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or an array;
- a liquid attachment holding means provided on the sensor surface side of the ultrasonic sensor, wherein the screw means is a cylindrical attachment detachably provided to the ultrasonic sensor by screw connection;
- a holding cap for fastening a thin film covering the opening at the tip of the attachment to the attachment,
- the thin film is configured to be swellable from the opening of the holding cap and to have flexibility.
- the acoustic propagation liquid medium is water, and the thin film is formed to have a thickness of 1Z4 or less of the wavelength of the ultrasonic wave propagating in the thin film.
- the ultrasonic inspection sensor device includes an ultrasonic sensor as a transducer in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or array, and a sensor surface side of the ultrasonic sensor.
- the provided flexible means
- a sensor position adjusting means which includes the flexible shaping means and holds the ultrasonic sensor so as to be able to move forward and backward from the object to be inspected.
- the flexible shower means has a soft shower member such as silicone rubber having excellent ultrasonic wave propagation characteristics.
- the sensor position adjusting means a holding frame holding an ultrasonic sensor
- At least three locations around the ultrasonic sensor have support adjustment bolts screwed to the holding frame, respectively.
- the position of the ultrasonic sensor can be freely adjusted.
- the ultrasonic inspection sensor device includes an ultrasonic sensor as a transducer in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or an array, and a sensor surface side of the ultrasonic sensor. It is provided with a liquid medium holding shower provided and a sensor holder having a medium storage tank capable of supplying an ultrasonic wave propagating liquid medium to the above shoe.
- the liquid medium holding means may include a sponge-like or porous flexible shout member
- the storage tank is provided with an air vent valve on the top, while the periphery of a flexible A sleeve-shaped or skirt-shaped tank guide covering the side surface is provided.
- the ultrasonic inspection sensor device includes: an ultrasonic sensor as a transducer in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged;
- Water tank type shower means provided on the sensor surface side of the ultrasonic sensor, wherein the shower means holds the ultrasonic sensor at the top of the tank,
- a storage tank for the ultrasonic propagation liquid medium is constituted by the inspection target set so as to cover the bottom opening of the tank in a liquid-tight manner.
- the water tank-type shower means includes a circulating liquid medium supply means for circulating the ultrasonic wave propagating liquid medium in the tank;
- An air extraction valve for extracting air from the tank top side.
- the ultrasonic inspection sensor device includes an ultrasonic sensor as a transducer in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or an array.
- a shower means provided on the sensor surface side of the ultrasonic sensor
- One-touch type attaching means capable of detachably attaching the shower means to the ultrasonic sensor with one touch
- the above-mentioned one-touch type attaching means may hold the shoe means in close contact with an ultrasonic sensor.
- the internal inspection of the joint of the inspection object can be quickly, accurately, and accurately performed by ultrasonic non-destructive inspection, and the presence or absence of abnormality due to the internal inspection. That is, it is possible to quantitatively and accurately inspect the size and position of the melt-solidified portion and the melt defect, and to perform automatic determination.
- the ultrasonic transducer includes piezoelectric vibrators arranged in a matrix or array, and each of the piezoelectric vibrators is sequentially operated to oscillate an ultrasonic wave, and a reflected echo reflected from a joint portion of the inspection object.
- a pass / fail judgment pattern image is decoded based on the ultrasonic inspection image in an appropriate welding state. Stable pass / fail judgment is performed quickly, automatically and quantitatively by comparing the stored ultrasonic inspection image of the detected inspection object with the stored standard ultrasonic inspection image. be able to.
- the ultrasonic inspection sensor device can smoothly and smoothly transmit and receive an ultrasonic wave from the ultrasonic sensor to accurately and efficiently detect a reflected echo of the ultrasonic wave. This improves the accuracy and accuracy of detecting the electrical signal of the reflected echo, enabling high-resolution and high-accuracy three-dimensional ultrasonic imaging of the inside of the inspection object. Ultrasonic inspection can be performed accurately and accurately.
- the means for ultrasonic sensor can be easily and easily attached / detached, thereby shortening the operation time, while the inspection object has a curved surface.
- accurate and smooth contact can be achieved, and ultrasonic inspection can be performed quickly and efficiently.
- FIG. 1 is an overall configuration diagram showing one embodiment of a three-dimensional ultrasonic inspection apparatus according to the present invention.
- FIG. 2 is a block diagram showing a configuration of a signal processing unit provided in the three-dimensional ultrasonic inspection apparatus.
- FIG. 3 is a block diagram showing a data processing relationship in a display processing device provided in the three-dimensional ultrasonic inspection apparatus of the present invention.
- FIG. 4 is a block diagram illustrating data processing of an intermediate detection unit in the display processing device shown in FIG. 3.
- FIG. 5 is a block diagram for explaining data processing of a center position′joint measuring unit in the display processing device shown in FIG. 3.
- FIG. 6 is a block diagram illustrating data processing of a bottom surface detection unit in the display processing device shown in FIG. 3.
- FIG. 7 is a block diagram illustrating data processing of a melt-solidification detection unit in the display processing device shown in FIG. 3.
- FIG. 8 is an explanatory view showing a concept of detecting a molten and solidified portion in an inspection area which is a joint of an inspection object.
- FIG. 9 is a block illustrating data processing of a pass / fail determination unit in the display processing device shown in FIG. 3 FIG.
- FIG. 10 is a schematic configuration diagram of a first embodiment of an ultrasonic inspection sensor device in a three-dimensional ultrasonic inspection device according to the present invention.
- FIG. 11 is a schematic configuration diagram of a second embodiment of the ultrasonic inspection sensor device according to the present invention.
- FIG. 12 is a schematic configuration diagram of a third embodiment of the ultrasonic inspection sensor device according to the present invention.
- FIG. 13 is a schematic configuration diagram of a fourth embodiment of the sensor device for ultrasonic inspection according to the present invention.
- FIG. 14 is a schematic configuration diagram of a fifth embodiment of the ultrasonic inspection sensor device according to the present invention.
- FIG. 1 is a configuration diagram showing one embodiment of a three-dimensional ultrasonic inspection apparatus according to the present invention.
- the three-dimensional ultrasonic inspection apparatus 10 converts an ultrasonic vibration and an electric signal into each other, and transmits and receives an ultrasonic wave of a required frequency.
- the ultrasonic inspection sensor apparatus 100 includes a transducer 11 as an ultrasonic sensor. The details will be described later), a signal generator 12 for generating a drive signal for driving the ultrasonic transducer 11, and a drive signal from the signal generator 12, and selectively driving the piezoelectric vibrator of the ultrasonic transducer 11.
- Ultrasonic waves oscillated from the drive element selecting section 13 to be inspected and the ultrasonic transducer 11 are radiated to the welded portion 15 that is the joint of the inspection object 14, and the reflected echo signal of the welded portion is transmitted by the ultrasonic transducer.
- a signal detection circuit 16 that detects the signal through the sensor 11, and a signal processing unit that generates a three-dimensional (3D) ultrasonic image by performing parallel arithmetic processing on the electric signal of the reflected echo detected by the signal detection circuit 16.
- the ultrasonic transducer 11 has a matrix sensor, that is, an ultrasonic inspection sensor device 100, in which a large number of piezoelectric vibrating elements 20 each having a piezoelectric element force are arranged and arranged in a matrix of m rows and n columns on the substrate 21. Make up.
- Each piezoelectric vibrator 20mn of the ultrasonic transducer 11 has a signal generator 12 A drive signal is selected by the drive element selection unit 13 and applied.
- the driving order of each piezoelectric vibrator 20mn is determined one by one or plural by the selection of the drive element selecting unit 13, and each piezoelectric vibrator 20mn is driven at a required drive timing.
- the piezoelectric vibrating elements 20 may be arranged in a line or in a cross-shaped line to form an array sensor.
- a liquid or solid acoustic propagation medium 23 is brought into close contact with an ultrasonic wave transmitting / receiving surface, which is a sensor surface of the ultrasonic transducer 11, specifically, the inspection object 14 side. Between the acoustic propagation medium 23 and the inspection object 14, a coupling agent 24 for acoustic matching of ultrasonic waves is provided. The coupling agent 24 is unnecessary when the sound propagation medium 23 uses a liquid such as water.
- the acoustic propagation medium 23 has a box shape, and its opening area is formed in accordance with the size of the joint 15 which is the inspection area (target area) of the inspection object 14.
- the height is determined by the oscillation angle (spread angle) of the ultrasonic wave oscillated from the piezoelectric vibrator 20.
- the inspection object 14 is, for example, two plate-like structures 14a and 14b joined by spot welding, and the spot welds of the plate-like structures 14a and 14b are subjected to three-dimensional ultrasonic inspection.
- the inspection object 14 may be one obtained by overlapping and welding three or more plate-like structures.
- the inspection object 14 may be a metal material or a resin material.
- the plate-like structure 14 is formed on the outer surface of the joint 15 as a dent by the welding electrode.
- the concave portion 25 is formed, and the thickness T of the joint portion 15 is smaller than the non-joined portion 26 around the joint portion 15 by the amount of the concave portion 25 formed.
- reference numeral 27 indicates a weld solidified portion of the joint 15
- reference numeral 28 indicates a weld defect such as a blow hole generated in the joint 15.
- the signal generator 12 for applying a drive signal to the ultrasonic transducer 11 is driven in a pulsed or continuous manner by applying an external voltage for driving the piezoelectric body of the piezoelectric vibrator 20 to generate ultrasonic waves.
- Generate a drive signal The generated drive signal is selected by each of the piezoelectric vibrators 20mn to be driven by the drive element selecting unit 13, and the selected piezoelectric vibrator 2 is selected.
- a drive signal is applied to Omn at a required timing.
- the drive element selector 13 sequentially selects one or a plurality of piezoelectric vibrators 20 to be driven at required timing, and the drive signal from the signal generator 12 is added to the selected piezoelectric vibrator 20. Then, the piezoelectric vibrator 20 is driven to oscillate the ultrasonic waves U of a required frequency.
- the ultrasonic waves sequentially oscillated by each piezoelectric vibrator 20mn force of the ultrasonic transducer 11 pass through the acoustic propagation medium 23, enter the inside of the inspection object 14 via the coupling agent 24, and enter the inspection object 14 It reaches the inspection area 15 (non-joined part 26, melt-solidified part 27, weld defect 28 such as blow hole, bottom surface 29), and is reflected at each boundary layer.
- the reflected echoes of the ultrasonic waves reflected on the boundary layers of the bottom surface 29, the non-joined portion 26, the melt-solidified portion 27, and the weld defect portion 28 of the inspection object 14 are transmitted from the inspection object 14 via the acoustic propagation medium 23. It is input to the ultrasonic inspection sensor device 100.
- each of the piezoelectric vibrators 20 of the ultrasonic transducer 11 as a matrix sensor is input with a time difference, and the reflected echo input to each of the piezoelectric vibrators 20 is converted into an electric signal.
- the signal is input to the signal detection circuit 16, where the electric signal of the reflected echo is detected for each piezoelectric vibrator 20.
- the three-dimensional ultrasonic inspection apparatus 10 When a drive signal is applied to the piezoelectric vibrator 20 mn selected by the drive element selecting unit 13 among the piezoelectric vibrators 20 of the ultrasonic transducer 11, the three-dimensional ultrasonic inspection apparatus 10 The vibrator 20mn operates to oscillate the ultrasonic wave U.
- the oscillated ultrasonic wave U is applied to the inspection area, which is the joint 15 of the inspection object 14, via the acoustic propagation medium 23 and the optional coupler 24.
- the ultrasonic wave U applied to the inspection area 15 of the inspection object 14 is partially reflected from the density boundary layer of the inspection area 15 to be a reflected echo.
- the reflected echoes are received by the respective piezoelectric vibrators 20 of the matrix sensor (ultrasonic transducer 11) with a time lag through the coupling agent 24 and the acoustic propagation medium 23, and received by the respective piezoelectric vibrators 20.
- the signal is sent to the signal detection circuit 16 as an electric signal of the reflected echo and detected.
- the drive signal is sequentially applied to each piezoelectric vibrator 20mn by the drive signal selector 13, so that each piezoelectric vibrator 20mn is sequentially driven at a required timing.
- the reflected echo of the ultrasonic wave oscillated from 20mn is The sensor 11 receives each two-dimensionally.
- M rows and n columns force of the piezoelectric vibrator 20mn For example, when 100 cells of 10 ⁇ 10 are arranged in a matrix, when each of the piezoelectric vibrators 20mn is sequentially applied with a drive signal by the drive element selecting unit 13, the drive signal
- the ultrasonic waves U are sequentially oscillated at the timing when the piezoelectric vibrators 20 mn are sequentially applied, and the reflected echoes of the ultrasonic waves sequentially oscillated at the piezoelectric vibrators 20 mn are sequentially received by the matrix sensor 11, and the received signals are used.
- An electric signal of a certain reflected echo is sent to the signal detection circuit 16 each time.
- the signal detection circuit 16 receives the reflected echoes of the ultrasonic waves oscillated by the individual piezoelectric vibrators 20 mn in a matrix arrangement by the operation of the ultrasonic transducer 11 in the matrix sensor 11 two-dimensionally. .
- the matrix sensor 11 receives the reflected echoes of the individual ultrasonic transducers that oscillate ultrasonic waves for 20 mn and sends them to the signal detection circuit 16 as electrical signals of the reflected echoes. Sent to
- the signal detection circuit 16 detects an electric signal of a reflected echo generated by the matrix sensor 11. Among the detected electric signals, a plurality of electric signals necessary for the inspection are guided to the amplifiers 3 la, 31 b,..., 3 li in the signal processing unit 70.
- the amplifiers 31a, 31b, ⁇ , 31i amplify the electric signal of the guided reflected echo, respectively, and supply these to the A / D converters ⁇ a 32a, 32b, ⁇ , 32U. ! / Puru.
- the A / D converters 32a, 32b,..., 32i convert the guided electric signals into AZDs and guide the signals to the parallel processors 33a, 33b,.
- the parallel processor 33 in the signal processing unit 17 performs parallel and rapid arithmetic processing on the digital signals guided by the AZD converters 32a, 32b, ..., 32, and outputs them to the inspection area (imaging area). This specifies the reflection intensity from each of the meshes divided into regions. The specified reflection intensity is integrated by the three-dimensional image generation unit 34, which is an integrated processor, to become three-dimensional image information (data), and is sent to the display processing device 18.
- the display processing device 18 performs data processing of the guided three-dimensional imaging data in the intermediate part data processing part 35 and the bottom part data processing part 36 to determine the quality of the inspection area (measurement part) 15 of the inspection object 14.
- the signal processing unit 17 in the three-dimensional ultrasonic inspection apparatus 10 shown in Fig. 1 described above is configured as shown in Fig. 2.
- Each of the parallel processors 33 provided in the signal processing unit 17 has an internal memory 40a, 40b,..., 40i and arithmetic circuits 41a, 41b,.
- the three-dimensional image generation unit 34 which is an integrated processor, includes an image integration processing unit 44, a boundary extraction processing unit 45, a shape data storage unit 46, and a table data storage unit 47.
- the internal memories 40a, 40b, ..., 40i are provided with the AZD conversion signal supplied with the A and D transformations ⁇ 32a, 32b, ..., 32, respectively, and the propagation obtained from the table data storage unit 47.
- the time data is temporarily stored.
- the arithmetic circuits 41a, 41b,..., 41i respectively convert the AZD conversion signals and the propagation time data stored in the internal memories 40a, 40b,. It specifies the reflection intensity of the mesh force and associates each mesh with the reflection intensity.
- the associated reflection intensity is supplied to the image integration processing unit 44 of the three-dimensional image generation unit (integrated processor) 34.
- the image integration processing unit 44 adds the supplied reflection intensity for each mesh in the inspection area to generate three-dimensional imaging data.
- the generated three-dimensional (3D) imaging data is guided to the display processing device 18.
- the boundary extraction processing unit 45 extracts a boundary existing inside the inspection object 14 from the result output by the image integration processing unit 44. Information about the extracted boundary is sent to the table data storage unit 47.
- the shape data storage unit 46 stores information on the surface shape and the boundary layer structure of the inspection object 14 in advance. The stored information is sent to the table data storage unit 47 as needed.
- the table data storage unit 47 is a table that stores the ultrasonic wave propagation time (or equivalent distance) between the piezoelectric vibrators 20mn of the matrix sensor 11 and stores the table in advance. Some or all of the stored ultrasonic propagation times are transferred to the internal memos U40a, 40b,..., 40i of each parallel processor 33 as necessary.
- the ultrasonic propagation time stored in the table data storage unit 47 is supplied by the boundary extraction processing unit 45, and information and shape data relating to the extracted boundary in the inspection object 14 are obtained. It can be reset by the information provided by the data storage unit 46 on the surface shape and layer structure of the inspection object 14.
- the parallel processor 33 and the three-dimensional (3D) image generation unit 34 of the signal processing unit 17 process the digital signals guided from the AZD conversions 32a, 32b,. This is to generate three-dimensional image data I for visualizing the state of the joint 15 of the inspection object 14.
- 3D imaged data is generated from the electrical signals of the reflected echoes detected by the signal detection circuit 46 by aperture synthesis processing so as to correspond to each mesh in the 3D image area set inside the inspection object 14. I do.
- the three-dimensional image generation unit 34 includes two directions (YZ plane) and (ZX plane) orthogonal to the front direction (X-Y plane) as viewed from the ultrasonic transducer 11.
- the three-dimensional imaging data I is seen from three directions in total in the direction perpendicular to the three-dimensional image data, and the largest value among the three-dimensional imaging data I in each of the three directions that overlap in the perspective direction is the largest.
- three plane (two-dimensional) images are generated by seeing from each direction.
- the three-dimensional image data I generated by the three-dimensional image generator 34 is output to the display processing device 18.
- the intermediate data processing unit 35 of the display processing device 18 obtains a transmission front image of the intermediate layer region near the joint 15 between the two plate-like structures 14a and 14b from the intensity distribution of the three-dimensional imaging data I. Extraction detects the bonding state of the bonding part 15, and the bottom part data processing part 36 extracts the transmission front image of the bottom part 29 as well as the intensity distribution force of the three-dimensional imaging data I, and determines the size of the fusion solidification part 27. Upon detection, the determination unit 37 compares and determines the results obtained from the intermediate data processing unit 35 and the bottom data processing unit 36. The display unit 38 displays the respective comparison determination results obtained from the intermediate data processing unit 35, the bottom data processing unit 36, and the determination unit 37, and the three-dimensional image data I from the three-dimensional image generation unit 34.
- the intermediate data processing unit 35 of the display processing device 18 includes an intermediate detecting unit 50 and a center position / joining unit measuring unit 51.
- the intermediate detection unit 50 extracts the three-dimensional image data of the intermediate joint 15 from the three-dimensional image data I generated by the signal processing unit 17, and transmits the transmission plane of the intermediate joint surface. An image is generated and the thickness t of the plate-like structure 14a is measured.
- the center position of the joint measuring section 51 determines the transmission plane image force of the intermediate joint surface generated by the intermediate detecting section 50 as well as the center position of the intermediate joint, the size and position of the joint 15, and the size of welding defects such as blow holes. Measure the position.
- the bottom surface data processing unit 36 of the display processing device 18 includes a bottom surface detecting unit 53 and a melting and solidifying unit detecting unit 54.
- the bottom surface detection unit 53 generates a transmission plane image of the bottom surface 29 of the inspection object 14 from the three-dimensional image data I generated by the signal processing unit 17 and measures the thickness T of the joint 15.
- the melted and solidified portion detecting unit 54 also has a transmission plane image of the bottom surface 29 generated by the bottom surface detecting unit 53 and the center position and the center position force of the intermediate joint 15 taken from the joint measuring unit 51. Measure size and position.
- the determination unit 37 of the display processing device 18 calculates the minimum required size of the melt-solidification unit 27 from the plate thickness t of the plate-like structure 14a taken from the intermediate detection unit 50, A judgment criterion for determining the fusion and solidification part 27 is set, and the size and position of the fusion and solidification part 27 taken in from the fusion and solidification part detection unit 54 are compared with the determined criterion values to determine the quality.
- This judgment criterion is determined by a pass / fail judgment pattern image stored in a database based on an ultrasonic inspection image in an appropriate state, and the pass / fail judgment pattern image is stored in advance in the database of the judgment unit 37 and stored. ing.
- the display unit 38 is a center position.
- the transmission plane image of the intermediate joint surface used in the joint measuring unit 51, and the center position of the intermediate joint measured from here and the size and position of the joint 15 and welding defects such as blowholes.
- the size and position of the unit 28, the transmission plane image of the bottom surface used in the melted and solidified part detecting unit 54, the measured size and position of the melted and solidified part, the judgment reference value set by the judging unit 37 and the pass / fail judgment are displayed.
- FIG. 4 is a diagram illustrating functions of the intermediate detection unit 50 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.
- the intermediate detecting unit 50 of the display processing device 18 includes a surface 'intermediate position detecting unit 50a of the inspection object 14, a plate thickness measuring unit 50b for measuring the plate thickness t of the plate-like structure 14a, and an intermediate layer. And an intermediate position plane image generator 50c for forming a plane image of the area.
- the imaging data includes information in the thickness direction of a plurality of flat inspection objects having the joint 15.
- Surface / intermediate position detection unit 50a uses the fact that the reflection intensity from the bottom surface of the first flat plate as viewed from the matrix sensor 11 is high at the non-bonded part where it is not bonded, and this plate-like structure (flat plate) 14a
- the bottom surface, that is, the intermediate layer position (thickness direction) of the joint 15 is determined.
- the thickness measuring unit 50b is the bottom surface position of the first flat plate determined by the front surface / intermediate position detecting unit 50a.
- the intermediate position plane image generation unit 50c of the intermediate detection unit 50 extracts front-side image data of only the intermediate layer portion from the three-dimensional image data I generated by the signal processing unit 17. Since the intermediate layer has a non-joined portion 26 having a high reflection intensity and a joined portion 15 having a low reflection intensity, the boundary between the non-joined portion 26 and the joined portion 15 appears remarkably as a joint contour shape. Further, welding defects 28 such as blowholes generated in the melt-solidified portion 27 inside the joint 15 also appear in the image data of the intermediate layer in the front direction.
- FIG. 5 is a diagram for explaining the functions of the center position / joint measuring section 51 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.
- the joint outline determining unit 51a recognizes, as image data, the size and position of the joint outline shape appearing as a difference in reflection intensity in the frontal imaging data of only the intermediate layer extracted by the intermediate detecting unit 50. .
- the shape, size and position of the professional hole 28 generated in the melt-solidified portion 27 inside the joint portion 15 are also recognized as image data.
- the center position determining unit 51b also calculates the center position of the contour data of the joint 15 recognized by the joint outline determining unit 51a.
- the joint measuring section 51c measures the size and position of the joint data contour shape of the joint 15 recognized by the joint contour judging section 51a. It should be noted that there is a difference in reflection intensity between the melt-solidified portion 27 inside the joint portion 15 and the weld defect portion 28 such as a blow hole, and the difference is used to distinguish between the two.
- FIG. 6 is a diagram illustrating functions of the bottom surface detection unit 53 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.
- the bottom surface detection unit 53 of the surface treatment device 18 is provided with a concave portion (dent portion) and a bottom surface of the inspection object 14. It has a dent portion 'bottom position detecting unit 53a for detecting the position of the 29, a joint thickness measuring unit 53b for detecting the thickness T of the joint 15, and a bottom position plane image generating unit 53c.
- the imaging data of the side surface orthogonal to the front surface includes information in the thickness direction of the plurality of flat inspection objects 14 having the joints 15 It is included.
- the dent portion 'bottom position detecting section 53a has the thickest bottom position of the plurality of flat plate-like inspection objects 14 as a whole, and also determines the reflection position force at the portion.
- the joint thickness measuring section 53b measures the thickness T in the bottom position (in the thickness direction) of the entire inspection object 14 determined by the dent section 'bottom position detecting section 53a.
- the bottom position plane image generation unit 53c extracts the front-side image data of only the bottom part from the three-dimensional imaging data I generated by the signal processing unit 17.
- This bottom surface imaging data includes the information of the welded part 27 inside the welded part and the welded part 15 and the welding defect 28 such as the blowhole inside the melted and solidified part 27.
- the hole 28 can also determine the difference in reflected intensity, but the difference between the joint 15 and the melt-solidified portion 27 is too small to be distinguished.
- FIG. 7 is a diagram for explaining the function of the melted and solidified portion detecting section 54 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.
- the fusion / solidification detecting unit 54 of the display processing device 18 includes an intensity distribution creating unit 54a that creates an ultrasonic intensity distribution image of the bottom surface position of the detection target 14, and the created ultrasonic intensity distribution image data.
- a first-order difference (first-order differentiation) processing unit 54c that performs (first-order) difference processing on the (first-order) difference processing of the bottom-surface position transmission plane image of the joint 15 that has been subjected to the smoothing process, and a difference processing Identify the secondary difference (secondary differential) processing unit 54d that further performs differential processing (secondary differential processing or second differential processing) on the transmission plane image of the bottom surface position of the joint 15 and the melt-solidification unit 27 of the joint 15
- a measuring section 54f is a measuring section 54f.
- the intensity distribution creating unit 54a of the melted and solidified part detection unit 54 is based on the bottom position transmission plane image generated by the bottom part detection unit 53 and the center position ⁇ From the center position of the joint 15 taken in from the joint measurement unit 51, Create an ultrasonic intensity distribution image of the bottom position including the center position information of the joint 15 To achieve.
- the smoothing processing unit 54b of the melting and solidification part detection unit 54 performs a smoothing process on the ultrasonic intensity distribution image data in order to remove noise included in the ultrasonic intensity distribution image data generated by the intensity distribution creating unit 54a. I do.
- the bottom surface image data smoothed by the smoothing processing unit 54b includes the joint 15 and the melt-solidified portion 27 inside the joint 15 and the weld defect 28 such as a blow hole in the melt-solidified portion 27. Information is included. Even with this bottom surface image data, the boundary between the joint 15 and the blowhole 28 can be distinguished from the reflection intensity difference force as it is, but the difference between the reflection intensity of the joint 15 and the melt-solidified portion 27 is too small to be distinguished. .
- the boundary between the joint 15 and the melt-solidified portion 27 inside the joint is the reflection echo intensity of the bottom position transmission plane image smoothed by the smoothing processing unit 54b. It appears as an inflection point P when viewed from the outside of the joint 15 toward the center position. Therefore, the first-order difference (differential) processing unit 54c performs a first-order difference (first-order differentiation) process from the outside toward the center position on the bottom surface transmission plane image of the joint 15 smoothed by the smoothing processing unit 54b.
- the secondary difference (differential) processing section 54d similarly performs the secondary difference (differential) processing, image data of the inflection point P of the bottom position transmission plane image is obtained.
- the image of the inflection point P of the bottom surface transmission plane image obtained by the secondary difference (differential) processing unit 54d is called a nugget part in spot welding.
- the image data of the inflection point P should be a continuous curve indicating the outline of the melt-solidified portion 27.
- discontinuous curve data may not be obtained. If discontinuous curve data cannot be obtained, discontinuity curve data and center are obtained using the center position data of the joint 15 taken from the joint measurement unit 51 by the intensity distribution creating unit 54a.
- the position data force can also be obtained by calculation as a continuous curve indicating the outline of the melt-solidified portion 27.
- the melt-solidified portion measuring unit 54f also recognizes the shape data and the position of the shape of the melt-solidified portion 27 as image data based on the contour data force of the melt-solidified portion 27 obtained by the melt-solidified portion specifying unit 54e.
- the solid-phase joint (nugget) of the heat-affected layer formed on the outer peripheral portion of the melt-solidified portion 27 can be obtained by an arithmetic processing based on the analysis of the joint 15 and the melt-solidified portion 27.
- FIG. 9 is a diagram for explaining functions of the determination unit 37 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.
- the determination unit 37 of the display processing device 18 includes a determination criterion creation unit 37a and a pass / fail determination unit 37b.
- the criterion creating unit 37a of the deciding unit 37 calculates the minimum required size of the melt-solidified part 27 from the center position 'thickness value t obtained by the joint measuring unit 51.
- the pass / fail determination unit 37b compares the minimum required size of the melt-solidified unit 27 calculated by the determination criterion creating unit 37a with the size of the melt-solidified unit 27 obtained by the melt-solidified unit detection unit 54. Is determined, and is automatically determined.
- the ultrasonic transducer 11 which is a matrix sensor is operated. .
- the ultrasonic transducer 11 is configured such that a pulse-like or continuous drive signal generated by the signal generation unit 12 is applied to the piezoelectric vibrators 20 in a matrix by the drive element selection unit 13 at a required timing. Add one by one or in multiples.
- a drive signal electric signal
- the piezoelectric vibrator 20mn is piezoelectrically converted, and an ultrasonic wave of a required frequency is generated. It oscillates.
- the ultrasonic wave U oscillated from the selected piezoelectric vibrator 20 mn is incident on the inspection area (joining portion) 15 of the inspection object 14 with a required spread through the acoustic propagation medium 23.
- the ultrasonic waves U that have entered the inspection area 15 of the inspection object 14 sequentially reach the boundary layers having different densities inside the inspection object 14 and are irradiated on the surface.
- the ultrasonic wave radiated to the surface of the inspection object 14 (two-dimensionally) is partially reflected by the boundary layer, and the reflected wave becomes a reflected echo and passes through the acoustic propagation medium 23 and enters the matrix sensor 11. Then, the light is incident on each piezoelectric vibrator 20 of the matrix sensor 11.
- Each of the piezoelectric vibrators 20 of the matrix sensor 11 that has received the reflected echo acts as a piezoelectric conversion element, and outputs an electric signal corresponding to the size of the reflected echo to the signal detection circuit 16.
- Ma The ultrasonic transducer 11 constituting the tritus sensor 11 is provided with a large number of piezoelectric vibrators 20 mn, and the ultrasonic waves sequentially oscillated from the respective piezoelectric vibrators 20 mn at different oscillation positions are applied to the inspection object 14. The light is successively reflected at the joint (inspection area) and is incident on the matrix sensor 11 as a reflected echo.
- These piezoelectric vibrators 20 of the matrix sensor 11 sequentially transmit the reflected echo electric signals to the signal detection circuit 16. Sent to.
- the electric signal of the reflected echo sent to the signal detection circuit 16 is subsequently input to the signal processing unit 17, where the electric signal of the reflected echo is signal-processed.
- the three-dimensional imaging data is created by the parallel processor 33 of the joint 15 which is the inspection region of the present invention and the three-dimensional image generation unit 34 which is the integrated processor.
- the signal processor 17 is provided with a parallel processor 33, and the electrical signal of the reflected echo input to the signal processor 17 is processed in parallel by the parallel processor 33. Processing can be performed quickly in a short time.
- the three-dimensional image generation unit 34 determines whether the ultrasonic transducer 11 looks at the inspection object 14 from the front and the two directions orthogonal to the front. In addition to seeing through the three-dimensional ultrasonic image data from a total of three directions perpendicular to the side surface, the largest value of the three-dimensional ultrasonic image data, Generate three plane images in each direction by projecting
- the image data of the two side surfaces orthogonal to the front surface includes a large number of pieces of information in the thickness direction of the plurality of flat plate-shaped inspection objects 14 having the joint portions 15, and the unjoined non-joined Since the reflection strength of the bottom surface force of the first plate-like structure 14a as viewed from the ultrasonic transducer 11 is high, the position of the bottom surface of the plate-like structure 14a can be determined. On the other hand, in the region where the plurality of flat test objects 14 are bonded, the position of the bottom surface 29 of the plurality of flat test objects 14 can be determined as the site where the ultrasonic wave transmittance is high and the reflection intensity is the highest.
- the joined portion 15 and the non-joined portion 26 have significantly different reflection intensities.
- the boundary between 15 and the non-joined part 26 is prominently shown as the joint contour shape.
- the joining strength of the joint 15 depends on the size of the melt-solidified portion 27 existing in the joint 15
- the boundary between the simple joint 15 and the melt-solidified portion 27 generated in the joint 15 is: It is known that the determination can be made at the inflection point P of the reflection intensity distribution on the bottom surface 29 of the flat inspection object 14.
- the reflection intensity distribution data of the bottom surface portion 29 of the plate-like inspection object 14 is subjected to two difference processings from the outside of the melt-solidified portion 27 toward the center position, and the reflection intensity is calculated.
- contour data of the melt-solidified portion 27 in the joint 15 can be obtained, and the size and position of the melt-solidified portion 27 can be measured.
- discontinuous contour data may not be obtained in actuality, and in some cases, it may not be obtained.
- the size of the melt-solidified portion 27 may be measured. In some cases, it is not possible.
- the central position of the joint 15 is measured from the size of the joint 15 in the intermediate layer portion of the plurality of plate-like inspection objects 14, and therefore, the melting is performed. Even if the contour data of the solidified portion 27 is partially discontinuous data, continuous contour data is calculated from the discontinuous contour data of the melt-solidified portion 27 using this center position, and the molten solidified portion is calculated. 27 dimensions can be measured.
- the bonding strength of the bonding portion 15 depends on the size of the melt-solidified portion 27 existing in the bonding portion 15, the minimum bonding strength required for the plurality of plate-like bonding portions 15 is a minimum. This agrees with the required size of the melt-solidified part 27.
- the minimum required bonding strength for the plurality of The required size of the melt-solidified portion 27 is determined by the thickness t of the plate-like structure 14a of the inspection object 14.
- the three-dimensional ultrasonic inspection apparatus according to the present invention is not limited to the one described in the above embodiment, and various modifications are conceivable.
- the signal processing unit 17 and the display processing apparatus 18 are provided in the three-dimensional imaging apparatus 10, but they may be realized by independent computers. Good. Further, the three-dimensional image generation unit 34 of the signal processing unit 17 may be provided in the display processing device 18 by being shifted.
- the computer executes each process in the present embodiment based on a program stored in a storage medium, and includes a single-use computer device such as a computer, and a plurality of computer devices connected to a network. Any configuration such as a computer system may be used.
- the term “computer” is not limited to a personal computer (personal computer), but also includes a communication device, an arithmetic processing device included in an information processing device, a microcomputer, and the like, and a device or device capable of realizing the functions of the present invention by a program.
- the internal configuration of the display processing device 18 can be realized by software.
- the software may be stored in a computer-readable storage medium such as a flexible disk, or may be transmitted as a single piece of software (program) over a network such as a LAN or the Internet.
- the computer can read the software (program) stored in the storage medium or download it from a site (server) on the LAN or the Internet and install it on the hard disk, so that the computer can process it. .
- the software (program) according to the present invention is not limited to one stored in a storage medium independent of a computer, but also includes one distributed through a transmission medium such as a LAN or the Internet. .
- the program can be read by a computer in a storage medium such as a memory, a flexible disk, a hard disk, an optical disk (CD-ROM, CD-R, DVD, etc.), a magneto-optical disk (MO, etc.), a semiconductor memory, or the like. If it is stored, its language format and storage format may be in the form of deviation.
- the storage medium power runs on the computer based on the instructions of the program installed in the computer, and an operating system (OS), database management software, MW (middleware) such as network software, and the like are provided. A part of each process for realizing the present embodiment may be executed.
- OS operating system
- MW middleware
- the storage medium is not limited to a medium independent of a computer, and includes a storage medium in which a program transmitted via a LAN, the Internet, or the like is downloaded and stored or temporarily stored.
- the number of storage media is not limited to one, and a case where the processing in the present embodiment is executed from a plurality of media is also included in the storage medium of the present invention, and the media configuration may be a misaligned configuration.
- the three-dimensional ultrasonic inspection apparatus 10 it is possible to provide a three-dimensional ultrasonic inspection apparatus capable of improving the accuracy of an internal inspection using ultrasonic waves and enabling automatic determination of the inspection.
- the present invention provides an ultrasonic inspection sensor device relating to the three-dimensional ultrasonic inspection device shown in FIG. 1 having the above-described configuration and operation.
- the embodiment will be described below with reference to FIGS.
- other members and elements of the three-dimensional ultrasonic inspection apparatus will be described using the same reference numerals as those in FIGS.
- the ultrasonic inspection sensor device 100 includes an ultrasonic sensor 11 in which a number of piezoelectric elements 20 for transmitting and receiving ultrasonic waves are arranged and arranged, and a sensor surface of the ultrasonic sensor 11. And a liquid medium holding means 21 provided on a certain ultrasonic wave transmitting / receiving surface side.
- the ultrasonic sensor 11 constitutes the ultrasonic transducer of the embodiment according to FIGS. 1 and 9 described above.
- the ultrasonic sensor 11 is a matrix sensor in which a large number of piezoelectric elements 20 are arranged in m rows and n columns. However, a plurality of piezoelectric elements 20 are arranged in a line or in a cross shape. Alternatively, an array sensor may be used.
- the ultrasonic sensor 11 has a cylindrical or cylindrical appearance, and a cylindrical attachment 140 constituting the liquid medium holding means 21 is detachably screwed to and integrated with the ultrasonic sensor 11.
- the liquid is kept liquid-tight by liquid-tight means 141 such as an O-ring.
- FIG. 10 shows an example in which the attachment 140 is externally fitted to the ultrasonic sensor 11.
- the force attachment 140 may be fitted to the ultrasonic sensor 11 from inside!
- a holding cap 143 is provided on the distal end side of the cylindrical attachment 140 by screw connection, and is detachably provided by a screw connection.
- the thin film 144 covering the opening of the distal end of the attachment 140 is liquid-tightly held by the holding cap 143.
- the holding cap 143 has an opening 145 for exposing the thin film 144 at the top of the cap.
- the thin film 144 is fixedly held between the attachment 140 and the holding cap 143. By fastening the holding cap 143, the thin film 144 is also fastened, and by the fastening operation of the holding cap 143, the thin film 144 is also fastened to the attachment 140 together.
- a liquid-tight means 145 such as an O-ring is interposed between the attachment 140 and the holding cap 143.
- Water 147 is filled as an ultrasonic wave propagating liquid medium in the attachment 140 on which the thin film 144 is mounted, and the liquid medium holding shower means 21 is configured by being filled.
- the thin film 144 of the shower means 21 is made of a rubber material or a resin material as a soft medium, and has a film thickness of 1Z4 or less, for example, a number of z ⁇ ! To about several tens / zm.
- a film thickness of 1Z4 or less for example, a number of z ⁇ ! To about several tens / zm.
- the ultrasonic sensor 11 is provided on one side of the attachment 140 and the thin film 144 is provided on the other side in a liquid-tight manner, and the inside of the attachment 40 is filled with water, whereby the ultrasonic inspection sensor device 100 is configured. You.
- the attachment 140 is attached to the ultrasonic sensor 11 by screw connection, and the attachment 140 is provided with a holding cap 143 for pressing and holding the thin film 144. Before the attachment 140 is filled with water 147, the ultrasonic transmitting and receiving surface of the ultrasonic sensor 11 and the thin film 144 are kept parallel.
- the attachment 140 is lightly screwed into the ultrasonic sensor 11, and the ultrasonic sensor 11 is turned downward so that the inside of the attachment 140 is filled with water 147.
- the thin film 144 is covered so as to cover the distal end opening of the attachment 140, and the upper force placed on the attachment 10 is also covered with the holding cap 143 and screwed and fixed to the attachment 140.
- the holding cap 143 By screwing the holding cap 143, the thin film 144 is sandwiched between the holding cap 143 and the attachment 140 in a liquid-tight manner and fastened together.
- the attachment 140 is screwed into the ultrasonic sensor 11 with the thin film 144 held between the holding caps 143.
- the screwing of the attachment 140 increases the water pressure in the attachment 140, and the thin film 144 expands so as to swell from the opening 145 of the holding cap 143.
- the thin film 144 Due to the swelling action of the thin film 144, even if there is a curved surface such as a concave-convex surface in which the surface shape of the inspection object 14 is completely flat, the thin film 144 follows the surface shape of the inspection object 14, The thin film 144 is efficiently and effectively brought into close contact with the surface of the inspection object 14.
- the ultrasonic inspection sensor device 100 by filling the water 147 between the ultrasonic sensor 11 and the thin film 144, the conventional shower material / coupler is not required. Even when the surface of the inspection area (ultrasonic incident portion) of the inspection object 14 is not a perfect plane, image processing using ultrasonic waves can be performed.
- Reference numeral 148 denotes an electric cable connected to the ultrasonic sensor 11, and denotes a signal cable, which transmits a drive signal to each piezoelectric element 20 of the ultrasonic sensor 11, or receives a reflected echo received by the ultrasonic sensor 11. Is sent to a signal detection circuit.
- FIG. 11 shows a second embodiment of the ultrasonic inspection sensor device provided in the three-dimensional ultrasonic inspection device.
- the same components as those of the ultrasonic inspection sensor device 100 of the first embodiment are denoted by the same reference numerals and description thereof is omitted.
- the ultrasonic inspection sensor device 100A shown in the second embodiment has an ultrasonic sensor 11 in which a large number of piezoelectric elements 20 are arranged in a matrix or array, and an ultrasonic sensor 11 It has a flexible shaping means 150 in close contact with the ultrasonic wave transmitting / receiving surface side, and a sensor position adjusting means 151 as an elevating means for finely adjusting the ultrasonic sensor 11 so as to be able to advance and retreat to the inspection object 14.
- the ultrasonic sensor 11 is configured by a matrix sensor or an array sensor, similarly to the ultrasonic transducer shown in FIG.
- the flexible shower means 150 provided on the ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11 is made of a soft shoe material 152.
- the surface of the soft shower material 152 is coated with a low-volatility gel-like coupling agent between the ultrasonic sensor 11 and the object 14 to be detected.
- the soft shoe material 151 is formed of a soft resin material such as silicone rubber or polystyrene.
- the soft shoe member 150 is constituted by the soft shoe member 152, the soft shoe member 152 can be directly fixed by bolts or the like.
- the flexible shout means 150 is held in an immovable state while maintaining a constant shaping shape by including the flexible shout means 150 in the sensor position adjusting means 151 which is a holding jig. can do.
- the sensor position adjusting means 151 for moving the ultrasonic sensor 11 toward and away from the inspection object 14 includes a frame-shaped holding frame 153 for holding the ultrasonic sensor 11 also with an external force, and the vicinity of four corners of the holding frame 153. And a leg bolt 155 serving as a support adjusting bolt screw-connected via the boss 154. Three or more, for example, four leg bolts 155 are provided on the holding frame 153.
- the holding frame 153 can be finely adjusted to move forward and backward (elevation). And it can be kept in the advanced / retracted state.
- the leg bolts 155 are connected to the drive motors and the bolt heads 156 are not shown, and the motor drive of each drive motor is not shown. Can be.
- the ultrasonic inspection sensor device 100A rotates the leg bolt 155 of the sensor position adjusting means 151 around the bolt axis while pressing the leg bolt 155 against the inspection object 14, so that the ultrasonic sensor 11 and the inspection object 14
- the degree of parallelism and the distance (interval) can be finely adjusted, and the adhesion and the contact area between the inspection object 14 and the ultrasonic sensor 11 and the flexible shoe member 152 can be adjusted.
- the soft shrink means 150 may be a flexible shrink member in which a liquid medium such as water is filled between thin films made of rubber or resin instead of the soft shrink member 152 made of a material such as silicon rubber. .
- the soft shoe member 152 is fixed so as to be sandwiched between three or more, for example, four leg bolts 155 of the sensor position adjusting means 151, the ultrasonic sensor 11, and the inspection object 14, and As long as does not act, it is stably maintained in the immobile state. For this reason, the positional relationship between the ultrasonic sensor 11 and the inspection object 14 is constant.
- the ultrasonic inspection sensor device 100A shown in FIG. 11 uses the soft shower member 152 as the flexible shower means 150 on the ultrasonic transmitting and receiving surface side of the ultrasonic sensor 11, so that the inspection object 14 is not used. Even if the surface of the object is a curved surface that is not a flat surface, the soft shoe member 152 can be stably adhered to the object 14 to be inspected, and the ultrasonic waves U that do not form an air layer can be applied to the object 14 to be inspected. Light can be stably and smoothly incident.
- FIG. 12 shows a third embodiment of the ultrasonic inspection sensor device.
- the ultrasonic inspection sensor device 100B shown in the third embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 20 are arranged in a matrix or array, and an ultrasonic sensor 11
- a sensor holder 162 having a water tank 161 as a storage tank capable of supplying water as an ultrasonic wave propagation liquid medium to the shower means 160 is provided.
- the medium storage shower means 160 has a spongy or porous flexible shower member 163 provided on the sensor surface (ultrasonic transmission / reception surface) side of the ultrasonic sensor 11, and this shower member 163 is A sufficient amount of water (ultrasonic (Propagating liquid medium).
- shoe member 163 is supported so as to be wrapped in a torus- or sleeve-shaped water tank 161.
- a water tank 161 serving as a storage tank is provided with an air release valve 164 for releasing air from the tank at the top of the tank.
- the water tank 161 has a sleeve-shaped or skirt-shaped tank guide 165 covering the peripheral surface of the sponge-shaped or porous-shaped flexible shoe member 163.
- the water tank 161 is formed integrally with the ultrasonic sensor 11 and adjusts the excess or deficiency of the water contained in the flexible shoe member 163 so that the tank is always filled with water.
- the flexible sponge-like or porous shoe member 161 can be in close contact with the curved shape of the surface of the inspection object 14, and the hydraulic inspection object 14 supplied to the flexible shoe member 161 can be compared with the flexible inspection member 14.
- the flexible shear members 61 By being filled between the flexible shear members 61, transmission of ultrasonic waves into the inspection object 14 and transmission of reflected echoes of ultrasonic waves reflected from a boundary layer such as an internal defect of the inspection object 14 are prevented. It can be performed efficiently.
- the water tank 161 communicates with the top of the shower member 162 so that the ultrasonic transmitting and receiving surface, which is the sensor surface of the ultrasonic sensor 11, is in direct contact with the flexible shroud member 162.
- a mounting portion (installation portion) 166 of the sensor holder 162 holding the water tank 1 61 to the inspection object 14 is also formed so that the flexible shoe member 163 and the inspection object 14 are in direct contact.
- the mounting portion 166 of the sensor holder 162 is formed in parallel with the ultrasonic wave transmitting and receiving surface of the ultrasonic sensor 11, and the ultrasonic wave transmitting and receiving surface of the ultrasonic sensor 11 and the inspection surface of the inspection object 11 are also parallel. It is configured to be.
- the ultrasonic inspection sensor device 100B attaches a flexible shower member 163 to the ultrasonic sensor 11, and before the shower member 163 is brought into contact with the inspection object 14, water is sufficiently applied to the shower member 163. Include it.
- the flexible shoe member 163 is inspected.
- the water in the shoe member 163 flows into the water tank 161 by an amount corresponding to the pressing deformation of the shower member 163 filled with water between the inspection object 14 and the ultrasonic sensor 11.
- the water tank 161 is formed in a flow path structure upward from the flexible shower member 163, air bubbles generated in the shroud member 163 between the ultrasonic sensor 11 and the inspection object 14 are formed. Is guided to the aquarium 161.
- a flexible shower member 163 filled with water is provided between the ultrasonic sensor 11 and the inspection object 14, and the water held by the flexible shower member 163 is provided. Is satisfied, an ultrasonic inspection is performed, and an internal inspection of the inspection object 14 is performed by ultrasonic waves. In the internal inspection, an ultrasonic wave is oscillated by the ultrasonic sensor 11 to perform image processing.
- the ultrasonic sensor 11 is moved to the next inspection area.
- the ultrasonic sensor 11 is moved away from the inspection object 14, moved to the next inspection object position, and then the ultrasonic inspection sensor device 100 ⁇ / b> B is pressed to perform continuous image processing. Can be performed.
- a flexible shower member filled with water is provided, so that there is no need for a coupling agent which does not need to be coated with a coupling agent.
- the ultrasonic inspection sensor device 100B performs image processing on a plurality of inspection target locations by using the flexible sponge-shaped shear member 152 attached to the ultrasonic transmission / reception surface side of the ultrasonic sensor 11. Even in this case, the ultrasonic inspection operation can be continuously performed only by pressing the shear member 163 of the ultrasonic sensor 11 against the inspection object 14, and continuous ultrasonic image processing can be performed.
- FIG. 13 is a configuration diagram illustrating a fourth embodiment of the ultrasonic inspection sensor device in a simplified manner. is there.
- the ultrasonic inspection sensor device 100C shown in this embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 20 are arranged in a matrix or array, and a sensor of this ultrasonic sensor 11. And an aquarium type shower means 170 provided on the ultrasonic wave transmitting / receiving surface side.
- the ultrasonic sensor 11 is not different from the ultrasonic sensors used in the first to fourth embodiments.
- the water tank-type shower means 170 includes a scar-shaped or sleeve-shaped tank 171 which is attached to the outer peripheral surface of the ultrasonic sensor 11 in a liquid-tight manner.
- the tank 171 is provided in a liquid-tight manner in the measurement area of the inspection object 14. Be attached.
- a tank is formed by filling the inside of the tank 171 with water 172 as a sound propagation liquid medium while the tank 171 is mounted in a liquid-tight manner on the inspection object 14.
- a liquid-tight means 173 such as an O-ring is provided on the installation surface of the tank 171.
- a suction cup may be provided on the installation surface of the tank 171 to form a tank liquid-tight structure with the suction cup.
- a liquid-tight means 173 such as an O-ring may be similarly provided.
- the tank 171 of the water tank shut-off means 170 is provided with a water supply port 174 and a drain port 175 on the side of the tank, and a circulating liquid medium (water) supply means 176.
- the circulating water supply means 176 has a closed liquid medium (water) loop 177 extending from the discharge port 175 to the inflow port 174, and is operated and controlled by the control device 178 in the middle of the water loop 177.
- 179 are provided.
- reference numeral 180 is a supply valve provided on a liquid medium supply pipe (water supply pipe) on the suction side of the pump 179
- reference numeral 181 is a drain provided on a drain pipe branched from a water loop 177 on the pump suction side. It is a valve.
- an ultrasonic transmission / reception surface of the ultrasonic sensor 11 is provided on the top of the tank of the aquarium shower means 170 so as to protrude into the tank, and an air formed above the ultrasonic transmission / reception surface is formed.
- An air vent pipe 184 is connected to the vent port 183, and an air vent valve 185 is provided in the air vent pipe 184.
- the ultrasonic sensor 11 transmits and receives ultrasonic waves.
- the mounting surface (installation part) of the tank and the tank 171 to the inspection object 14 is formed in parallel. As a result, the distance and parallelism between the front surface (ultrasonic transmission / reception surface) of the ultrasonic sensor 11 and the inspection object 14 can be maintained.
- the tank 171 is completely open, and when the tank 171 to which the ultrasonic sensor 11 is attached is installed on the inspection object 14, the water 172 in the tank 171 is removed from the inspection object 14 or the ultrasonic sensor.
- the water 172 in the tank 71 is in direct contact with the ultrasonic transmission / reception surface 11 so that the water 172 in the tank 71 does not leak from the water tank even when the water tank is filled with the liquid-tight means 173.
- a tank 171 constituting a water tank is attached to the ultrasonic sensor 11, and the ultrasonic sensor 11 integrated with the tank 171 is pressed against the inspection object 14. Thereby, a water tank is formed, and even if water is sent into the tank 171, water leakage is prevented.
- the ultrasonic sensor 11 with the tank constituting the water tank is installed in the inspection area of the inspection object 14, and the upper force is suppressed, and the air vent valve 185 of the tank 171 is opened. With the valve open, the drain nozzle 181 is closed, the pump water supply valve 180 is opened, and water flowing through the water loop 177 is injected.
- the pump feeder also controls the operation of the pump 179 by the controller 178 while injecting the water guided to the water loop 177.
- the pump 179 was operated, and it was confirmed that the space between the ultrasonic transmission / reception unit of the ultrasonic sensor 11 and the inspection object 14 was filled with the water 172, and that the water 177 in the tank 171 was free of bubbles. To close the air release valve 184 and stop the operation of the pump 179.
- the ultrasonic inspection sensor device 100C is started.
- the ultrasonic inspection sensor device 100C ultrasonic waves are transmitted and received from each of the piezoelectric elements 20 of the ultrasonic sensor 11, the internal structure of the inspection object 14 is inspected by ultrasonic waves, and image processing is performed.
- the ultrasonic wave transmitting / receiving part of the ultrasonic sensor 11 and the mounting part of the inspection object 14 of the tank 171 are configured to be parallel, the same as when a conventional block-shaped parallel plane shower member is used. At the same time, the ultrasonic waves are perpendicularly incident on the inspection object 14.
- Ultrasonic waves from the ultrasonic sensor 11 are incident on the inspection object 14, and the reflected echoes thereof are supersonic.
- the drain valve 181 of the water loop 177 and the air vent valve 185 of the water tank are opened, the pump 179 is operated, and the water tank is operated. And the water loop 177 to drain the water.
- the apparatus moves to the next inspection target location, where an ultrasonic image by ultrasonic inspection is obtained.
- the water tank attached to the ultrasonic sensor 11 is filled with water by the operation in the pump 179, so that the conventional block-shaped shower member and the coupling agent are not required. It becomes. Since the tank 171 constituting the water tank is open to the inspection object side, if the water tank is filled with the water 172, the water 172 having good ultrasonic wave propagation characteristics comes into direct contact with the surface of the inspection area of the inspection object 14. In addition, even when the surface of the inspection object 14 is not a perfect plane, image processing by ultrasonic waves without using a coupler can be performed.
- FIG. 14 is a simplified configuration diagram showing a fifth embodiment of the sensor device for ultrasonic inspection.
- the ultrasonic inspection sensor device 100D shown in the fifth embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 20 are arranged in a matrix, or arranged in an array.
- an attachment means 192 of the type
- the shower member 190 of the shower means 191 is made of a material having excellent sound propagation characteristics, such as reinforced polystyrene, epoxy resin, ceramic, etc., and is formed in a parallel plane shape in which the ultrasonic wave receiving and receiving surface and the surface on the opposite side are parallel.
- the one-touch type mounting means 192 includes a mounting member 194 capable of mounting an external force to both opposing side walls of the shoe member 191; a locking member 195 rotatably supported by the mounting member 194; And a spring means 198 for urging the engaging hook 196 provided on the free end side of the ultrasonic sensor 11 toward the engaging hole 197 of the ultrasonic sensor 11.
- the ultrasonic inspection sensor device 100D is a block-shaped member having a parallel plane.
- the one-touch type attachment means 192 makes it possible to easily attach and detach the shoe member 190, which is the shoe means 191, with one touch.
- the shower means 191 can be removed with one touch, and the shower member 190 and the sensor surface of the ultrasonic sensor 11 and the surface of the inspection object are temporarily provided. Even if air bubbles enter, remove the shuffling means 191 from the ultrasonic sensor 11 and apply a low-volatility dull-shaped coupling agent to the surface of the shuffling member 190 of the shuffling means 191 to prevent air bubbles from entering. Can be easily adjusted.
- the ultrasonic inspection sensor device shown in Fig. 10 and Fig. 14 is not limited to the three-dimensional ultrasonic inspection device having the configuration shown in Figs. Can also adapt.
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
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Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/587,482 US7496456B2 (en) | 2004-04-26 | 2005-04-25 | 3D ultrasonographic device |
EP05734549.8A EP1742047B1 (en) | 2004-04-26 | 2005-04-25 | 3d ultrasonographic device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004130390A JP4542813B2 (ja) | 2004-04-26 | 2004-04-26 | 3次元超音波検査装置 |
JP2004130391A JP2005315583A (ja) | 2004-04-26 | 2004-04-26 | 超音波検査用センサ装置 |
JP2004-130390 | 2004-04-26 | ||
JP2004-130391 | 2004-04-26 |
Publications (1)
Publication Number | Publication Date |
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WO2005103675A1 true WO2005103675A1 (ja) | 2005-11-03 |
Family
ID=35197098
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PCT/JP2005/007816 WO2005103675A1 (ja) | 2004-04-26 | 2005-04-25 | 3次元超音波検査装置 |
Country Status (4)
Country | Link |
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US (1) | US7496456B2 (ja) |
EP (1) | EP1742047B1 (ja) |
KR (3) | KR100896300B1 (ja) |
WO (1) | WO2005103675A1 (ja) |
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Also Published As
Publication number | Publication date |
---|---|
US20070282543A1 (en) | 2007-12-06 |
KR20080072923A (ko) | 2008-08-07 |
KR100867971B1 (ko) | 2008-11-11 |
EP1742047A1 (en) | 2007-01-10 |
KR100896304B1 (ko) | 2009-05-07 |
KR100896300B1 (ko) | 2009-05-07 |
US7496456B2 (en) | 2009-02-24 |
KR20070011538A (ko) | 2007-01-24 |
EP1742047A4 (en) | 2014-04-02 |
KR20080015465A (ko) | 2008-02-19 |
EP1742047B1 (en) | 2021-03-31 |
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