WO2005038918A1 - パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 - Google Patents
パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 Download PDFInfo
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- WO2005038918A1 WO2005038918A1 PCT/JP2003/013174 JP0313174W WO2005038918A1 WO 2005038918 A1 WO2005038918 A1 WO 2005038918A1 JP 0313174 W JP0313174 W JP 0313174W WO 2005038918 A1 WO2005038918 A1 WO 2005038918A1
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- power semiconductor
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Definitions
- the present invention relates to a power semiconductor module, a power converter using the same, and a mobile body.
- the present invention relates to a power semiconductor module using a semiconductor element, a power conversion device using the same, and a moving body.
- the switching device can efficiently supply power to loads such as motors and the like, it is widely used for driving motors of moving objects such as electric trains and automobiles. In particular, it has recently been used to drive motors for restarting after idle stop to improve fuel efficiency for automobiles.
- Power semiconductor elements generate heat due to switching by the operation of the power converter and steady energization. For this reason, at the joint between dissimilar materials, for example, at the joint between a single semiconductor element made of single crystal silicon and a bonding wire made of aluminum, a strain due to thermal fatigue occurs due to a difference in linear expansion coefficient.
- conventional methods of controlling the operation with a small temperature rise a configuration in which power semiconductor modules are connected in parallel to reduce the current density, a method of expanding the cooling capacity to reduce the temperature, and materials with low thermal resistance have been used. By increasing the temperature margin of power semiconductor devices and increasing the temperature margin by selecting materials, the life of power modules has been extended and reliability has been improved.
- a temperature sensor such as a thermocouple is built in the power semiconductor module as described in Japanese Patent Application Laid-Open No. 7-149488. It is known that the change in thermal resistance due to the deterioration of each joint is grasped by the temperature monitor during use. Also, as described in Japanese Patent Application Laid-Open No. 8-2755586, a method of replacing the life with the number of times the switching operation is started and counting the number of times the operation is started to grasp the life is also known. I have. Furthermore, as described in Japanese Patent Application Laid-Open No. 2002-106168, a power semiconductor module is disclosed. A method is also known in which a temperature detector is attached to the fuel cell, the cumulative damage rate is calculated from the temperature rise during each operation, and the life is calculated. Disclosure of the invention
- the conventional methods for extending the life such as an operation control method with a small rise in temperature, have a problem that the size of the power semiconductor module or the cooling device increases.
- An object of the present invention is to provide a power semiconductor module using a semiconductor element, a power conversion device using the same, and a moving body, which are small and capable of detecting deterioration of a metal bonding portion with high accuracy.
- the present invention provides a power semiconductor module having a structure in which a surface of a power semiconductor element having an electrode on its surface and a metal plate for an electrode are metal-bonded.
- the apparatus is provided with a joint characteristic detecting means for detecting the characteristic of the joint.
- the joint characteristic detecting means uses a threshold value determined from a relationship between a rise in resistance or voltage due to deterioration of the joint and a life, to determine the characteristic of the joint. The deterioration is predicted.
- the metal bonding is performed by a metal wire.
- the present invention provides a power semiconductor module having a structure in which a surface of a power semiconductor element having an electrode on its surface and a metal plate for an electrode are metal-bonded. It is provided with a voltage terminal for detecting the characteristic.
- the present invention provides a power semiconductor module having a structure in which a surface of a power semiconductor element having an electrode on its surface and a metal plate for an electrode are metal-bonded,
- a power converter for performing DC-AC conversion comprising a joint characteristic detecting means for detecting a characteristic of a joint of the metal joint.
- the joint characteristic detecting means switches to operation control lower than the rated operation when approaching the life predicted based on the detected characteristic. It is.
- the present invention provides a power semiconductor module having a structure in which a surface of a power semiconductor element having electrodes on its surface and a metal plate for electrodes are metal-bonded, and
- a characteristic of the joint of the metal junction is detected. This is provided with a joint characteristic detecting means for performing the above.
- the moving body is operated in an idling stop operation mode in which the power is stopped when the moving body stops, and the power is started when the moving body starts.
- FIG. 1 is a circuit diagram of a power semiconductor module according to one embodiment of the present invention.
- FIG. 2 is a cross-sectional perspective view showing an external configuration of the power semiconductor module according to one embodiment of the present invention.
- FIG. 3 is a characteristic diagram of a joint detected by the joint characteristic detecting circuit 20 used in the power semiconductor module according to the embodiment of the present invention.
- FIG. 5 is a third circuit diagram of the power semiconductor module according to one embodiment of the present invention.
- FIG. 6 is a sectional perspective view showing an external configuration of a power semiconductor module according to another embodiment of the present invention.
- FIG. 7 is a circuit diagram of a power semiconductor module according to another embodiment of the present invention.
- FIG. 8 is a circuit diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- FIG. 9 is a system configuration diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- FIG. 10 is a second circuit diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- FIG. 11 is a diagram illustrating the principle of life expectancy by a power converter using a power semiconductor module according to an embodiment of the present invention.
- FIG. 12 is a third circuit diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- FIG. 13 is a block diagram of a moving object using the power converter according to one embodiment of the present invention.
- FIG. 14 is a block diagram of a moving object using the power converter according to one embodiment of the present invention.
- FIG. 1 is a circuit diagram of a power semiconductor module according to one embodiment of the present invention.
- the power semiconductor element 2 will be described by taking IGBT as an example.
- the power semiconductor element 2 has an upper surface voltage terminal 11, a gate terminal 12, and a lower surface voltage terminal 13.
- the emitter of the power semiconductor element 2 is connected to ground via a plurality of metal wires 8 and a metal plate 3, as described later with reference to FIG.
- the collector of power semiconductor element 2 is connected to lower surface voltage terminal 13 via solder.
- the emitter of the power semiconductor element 2 and the metal wire 8 are ultrasonically bonded, a plurality of first bonding portions are formed, and the metal wire 8 and the metal plate 3 are also ultrasonically bonded. Therefore, a plurality of second joints are formed.
- the resistance R t8 indicates the resistance of these first and second junctions.
- the resistance R t9 indicates the resistance of the junction between the collector of the power semiconductor element 2 and the lower surface voltage terminal 13 by solder.
- the junction characteristic detecting circuit 20 is connected to the upper surface voltage terminal 11 and the newly provided voltage terminal 10 and detects the voltage across the resistor Rt8.
- the junction characteristic detection circuit 20 detects the characteristics of the junction based on the detected voltage value or the resistance value obtained from the voltage value, and determines the life of the junction. The method for determining the life will be described later with reference to FIG. The result of the judgment is displayed on the display 30. When the life of the joint becomes short, an alarm is issued by the alarm 32, and the characteristics and the life of the joint are stored in the memory 34.
- the information stored in the storage unit 34 can be read from the outside by connecting the portable terminal 40.
- the power semiconductor module is used in an electric vehicle or the like
- the power repair car repair shop has a portable terminal 40, and data on the life of the joint is read out using the portable terminal 40. be able to.
- FIG. 2 shows an external configuration of a power semiconductor module according to an embodiment of the present invention. It is a sectional perspective view.
- the same reference numerals as those in FIG. 1 indicate the same parts.
- the power semiconductor module 1 includes a power semiconductor element 2 having electrodes on its surface, a metal plate 3 for an external electrode, a metal plate 4 for heat dissipation, an insulating plate 5 having metal plating 6 on both sides and serving as an electrode, And an insulating resin structural material 7 for supporting the
- the lower surface of the power semiconductor element 2 is metal-bonded to a heat-dissipating metal plate 4 via an insulating plate 5 with solder 9 in order to radiate heat generated during switching and steady energization.
- the upper surface of the semiconductor element 2 and the metal plate 3 for the external electrode are ultrasonically bonded by a plurality of metal wires 8.
- the metal plate 3 is grounded.
- a plurality of metal wires 8 are used as each voltage terminal.
- an upper surface voltage terminal 11, a gate terminal 12, and a lower surface voltage terminal 13 of the power semiconductor element are provided as each voltage terminal.
- the upper voltage terminal 11 is connected to the emitter electrode of the power semiconductor device 2.
- Gate terminal 12 is connected to the gate electrode of power semiconductor element 2.
- Lower surface voltage terminal 13 is connected to the collector electrode of power semiconductor element 2.
- a plurality of first joints are formed between the emitter electrode of the power semiconductor element 2 and the metal wire 8
- a plurality of second joints are formed between the metal wire 8 and the metal plate 3.
- the combined resistance is the resistance R t8 shown in FIG.
- a junction is formed by solder 9 for joining the collector electrode of the power semiconductor element 2 and the lower surface voltage terminal 13, and this resistor is the resistor R t 9 shown in FIG.
- a voltage terminal 10 of an external electrode is newly provided in order to determine the degree of deterioration of the first joint.
- the power semiconductor element 2 generates heat when energized, and the temperature repeatedly rises and falls.
- the power semiconductor element 2 mainly consists Tan'yui crystal silicon, while the coefficient of linear expansion of about 4. 2 X 1 0- 6 Z ° C, metallic wire 8, pure aluminum or number consists ppm of nickel-containing aluminum, the linear expansion coefficient is approximately 2 3 X 1 0- 6 Z ° C, there is a difference of about 5 times.
- the IGBT is used as an example of the power semiconductor element 2.
- FIG. 3 is a characteristic diagram of a joint detected by the joint characteristic detecting circuit 20 used in the power semiconductor module according to the embodiment of the present invention.
- the junction voltage gradually increases as the number of endurance increases. Due to the long-term use of the power semiconductor element, distortion occurs due to a difference in linear expansion coefficient, and cracks are generated and propagated at the joints of the metal wires 8 joined on the upper surface of the power semiconductor element 2. Due to the cracks and propagation, the bonding area of the metal wire 8 gradually decreases over a long period of use, and this portion is gradually enlarged by the electric wire. At points D1, D2, and D3, the curves showing the characteristics are bent, and the voltage value sharply increases at each point. This is because, as shown in FIG.
- the threshold value VL is, for example, about lOOmV.
- the value of this threshold depends on the circuit configuration.
- the current life (current metal junction voltage V—initial metal junction voltage V 0) / (threshold value VL—initial metal junction voltage value V0) to calculate the life (%). Can be.
- the joint characteristic detection circuit 20 displays the determined life on the display 30.
- the junction characteristic detection circuit 20 outputs an alarm from the alarm device 32 when the detected voltage at the junction reaches the threshold value VL or approaches the threshold value VL.
- the junction characteristic detection circuit 20 stores the detected voltage value of the junction or the determined life of the junction in the storage unit 34. The stored content can be read from the storage unit 34 by using the external terminal 40.
- the junction characteristic detection circuit 2OA is connected to the lower surface voltage terminal 13 and the newly provided voltage terminal 10, and detects the voltage across the resistors Rt8 and Rt9. That is, the junction characteristic detection circuit 2OA monitors the resistance Rt8 of the junction of the metal wire 8 and the resistance Rt9 of the junction of the solder 9.
- the voltage of the power semiconductor element 2 is also included.
- the voltage of the power semiconductor element 2 changes according to the temperature. Therefore, a temperature sensor 52 for detecting the temperature of the power semiconductor element 2 and a temperature correction circuit 50 for correcting the temperature characteristics based on the temperature of the power semiconductor element 2 detected by the temperature sensor 52 are provided.
- the junction characteristic detection circuit 2OA corrects the temperature based on the output of the temperature correction circuit 50, detects the characteristics of the junction, and determines the life of the junction. The results are shown in Figure 1. As described above, the information is output to the display 30, the alarm 32, and the storage unit 34.
- the junction characteristic detection circuit 2OA is connected to the lower surface voltage terminal 13 and the upper surface voltage terminal 11, and detects the voltage across the resistor Rt9. That is, the junction characteristic detection circuit 2OA monitors the resistance Rt9 of the junction of the solder 9.
- the temperature is corrected by the temperature sensor 52 and the temperature correction circuit 50.
- the junction characteristic detection circuit 2OA corrects the temperature based on the output of the temperature correction circuit 50, detects the characteristics of the junction, and determines the life of the junction. The result of the determination is output to the display 30, the alarm 32, and the storage 34 as shown in FIG.
- the measurement can be performed at almost the same temperature every time. Voltage measurement by resistance becomes possible. Therefore, if the measurement is performed at substantially the same temperature as immediately after energization, the temperature sensor 52 and the temperature correction circuit 50 become unnecessary.
- FIG. 6 is a sectional perspective view showing an external configuration of a power semiconductor module according to another embodiment of the present invention.
- the same reference numerals as those in FIG. 2 indicate the same parts.
- This embodiment differs from the embodiment shown in FIG. 2 in that the voltage terminal 1OA on the external electrode side is provided in the same shape as the electrodes 11, 12, 13 of the power semiconductor element.
- the voltage terminal 10A is connected to the external electrode 3 by a metal wire 8B.
- FIG. 7 is a circuit diagram of a power semiconductor module according to another embodiment of the present invention.
- the same reference numerals as those in FIG. 1 indicate the same parts.
- the present embodiment is different from the embodiment shown in FIG. 1 in that the junction characteristic detection circuit 20 is connected to the upper surface voltage terminal 11 and the voltage terminal 1 OA, and the voltage across the resistor R t8. Is to detect The junction characteristic detection circuit 20 detects the characteristics of the junction based on the detected voltage value or the resistance value obtained from the voltage value, and determines the life of the junction. The judgment result is output to the display 30, the alarm 32, and the storage unit 34, as in FIG.
- the influence of the voltage generated by the external electrode 3 in FIG. 2 and the influence of the contact resistance of the voltage terminal 10 in FIG. 2 are excluded from the example shown in FIG. Voltage can be measured with high accuracy.
- the present embodiment it is only necessary to provide an external terminal and measure the voltage of the junction, so that the device is small and the deterioration of the metal junction can be accurately detected.
- FIG. 8 shows a power conversion using a power semiconductor module according to an embodiment of the present invention. It is a circuit diagram of a device.
- FIG. 9 is a system configuration diagram of a power converter using a power semiconductor module according to an embodiment of the present invention.
- the power conversion device 16 when controlling the three-phase AC motor 17, the power conversion device 16 includes six power semiconductor elements 2a, 2b, 2c, 2d, 2e, and 2f. Then, the DC current of the battery 19 is converted into a three-phase AC current and supplied to the motor 17. For example, power semiconductor elements 2 a and 2 b generate a U-phase AC current, power semiconductor elements 2 c and 2 d generate a V-phase AC current, and power semiconductor elements 2 e and 2 f generate a W-phase AC current. Generates an alternating current.
- the gate voltages of the power semiconductor elements 2a, 2b, 2c, 2d, 2e, and 2f are controlled by a motor control unit (MCU) 60, and the switching operation is performed.
- the capacitor 18 is used as a filter capacitor.
- the upper power semiconductor elements 2a, 2c, 2e are connected to a high voltage
- the lower power semiconductor elements 2b, 2d, 2f are connected to ground.
- the junction characteristic detection circuit 20 detects the voltage between both ends of the metal wire junction of the lower power semiconductor element 2d at the center by the configuration shown in FIG.
- the motor control unit 60 performs switching driving of a power semiconductor element included in the power conversion device 16 according to an output of a sensor 62 that detects an intention such as a degree of driver's acceleration. .
- the motor drive current supplied from the battery 19 to the motor 17 is controlled.
- the sensor 62 for example, an accelerator opening sensor is used.
- FIG. 10 is a second circuit diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- the same reference numerals as those in FIG. 8 indicate the same parts.
- FIG. 11 is a diagram illustrating the principle of life expectancy by a power converter using a power semiconductor module according to an embodiment of the present invention.
- a life prediction circuit 22 is provided in addition to the configuration shown in FIG. As shown in Fig. 11, the life prediction circuit 22 predicts the future life by linear approximation from the life prediction so far.
- the prediction result is displayed on the display 30.
- the displayed content is, for example, "The life of this device is X years y months z days.” As a result, the user can grasp the life in time.
- FIG. 12 is a third circuit diagram of a power converter using a power semiconductor module according to one embodiment of the present invention.
- the junction characteristic detection circuit 20 B sends the power save signal PS to the motor control unit 60. Output.
- the control unit 60 reduces the current supplied to the motor 17 and reduces the output torque of the motor to perform the power save operation.
- the life when outputting the power save signal is, for example, 95%.
- the display “go” indicates “current life ⁇ ⁇ %. Is running ". As a result, when the service life is approaching, the operation is restricted and damage caused by stopping the motor can be prevented.
- FIG. 13 is a block diagram of a moving object using the power converter according to one embodiment of the present invention.
- the same reference numerals as those in FIG. 12 indicate the same parts.
- the moving body 70 is an electric vehicle such as an electric vehicle driven by only the motor 17 or a hybrid vehicle driven by a motor and an engine.
- the motor 17 is driven by the power conversion system shown in FIG.
- the junction characteristic detection circuit 20 B outputs the power save signal
- the display shows “Current life x x%. During power save operation. Check it” on the display 30. This makes it possible to know when to replace the power converter, thereby reducing costs and mounting it on a mobile object. In particular, it is effective as a power conversion device in a conduction mode such as driving a motor for idling stop to improve fuel efficiency for automobiles.
- FIG. 14 is a block diagram of a moving object using the power converter according to one embodiment of the present invention.
- the same reference numerals as those in FIG. 13 indicate the same parts.
- the engine control unit (ECU) 70 supplies fuel to the engine 80 in accordance with the engine speed detected by the crank angle sensor 92 and the amount of intake air detected by the air flow sensor 93. Controls injection amount and ignition timing.
- the ECU 70 detects, for example, that the brake pedal is being depressed by a brake pedal sensor 94 and that the vehicle speed sensor 95 detects that the vehicle speed is 0 kmZh and the vehicle is stopped. When the conditions are met, stop the engine 80 Stop and idle stop. After that, when the brake pedal sensor 94 stops the depression of the brake and the accelerator pedal sensor 96 detects that the accelerator pedal has been depressed, a motor drive command is issued to the MCU 60. Send. When the motor 17 is driven by the MCU 60, the moving object starts moving.
- the ECU 70 When the ECU 70 detects that the vehicle speed detected by the vehicle speed sensor 95 has become faster than 0 kmZh and the moving object has begun to move, the ECU 70 starts fuel injection control and ignition timing control, and the engine 80 Restart. As described above, at the time of idle stop, the moving body is started to be moved by the motor 17, and thereafter, the engine 70 is restarted.
- deterioration of a metal joint is detected by a rise in resistance or a rise in voltage, whereby a power semiconductor module, a power conversion device using the same, and an electric vehicle
- a rise in resistance or a rise in voltage whereby a power semiconductor module, a power conversion device using the same, and an electric vehicle
- the present invention it is possible to obtain a small-sized power semiconductor module using a semiconductor element capable of accurately detecting deterioration of a metal joint, a power converter using the same, and a moving body.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Inverter Devices (AREA)
- Power Conversion In General (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005509597A JPWO2005038918A1 (ja) | 2003-10-15 | 2003-10-15 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
PCT/JP2003/013174 WO2005038918A1 (ja) | 2003-10-15 | 2003-10-15 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
AU2003304509A AU2003304509A1 (en) | 2003-10-15 | 2003-10-15 | Power semiconductor module, power converter employing it and mobile unit |
JP2005514715A JP4450796B2 (ja) | 2003-10-15 | 2004-08-26 | 電力変換装置 |
PCT/JP2004/012702 WO2005038919A1 (ja) | 2003-10-15 | 2004-08-26 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
Applications Claiming Priority (1)
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PCT/JP2003/013174 WO2005038918A1 (ja) | 2003-10-15 | 2003-10-15 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
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WO2005038918A1 true WO2005038918A1 (ja) | 2005-04-28 |
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PCT/JP2003/013174 WO2005038918A1 (ja) | 2003-10-15 | 2003-10-15 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
PCT/JP2004/012702 WO2005038919A1 (ja) | 2003-10-15 | 2004-08-26 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
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PCT/JP2004/012702 WO2005038919A1 (ja) | 2003-10-15 | 2004-08-26 | パワー半導体モジュール及びそれを用いた電力変換装置並びに移動体 |
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JP (2) | JPWO2005038918A1 (ja) |
AU (1) | AU2003304509A1 (ja) |
WO (2) | WO2005038918A1 (ja) |
Cited By (5)
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DE102006049211A1 (de) * | 2006-06-22 | 2007-12-27 | Mitsubishi Electric Corp. | Halbleitervorrichtung und Lebensdauervorhersageschaltung und Lebensdauervorhersageverfahren für Halbleitervorrichtung |
JP2015092140A (ja) * | 2013-11-08 | 2015-05-14 | 株式会社明電舎 | 半導体モジュールの検査方法及び半導体システム |
JP2016138784A (ja) * | 2015-01-27 | 2016-08-04 | 日本電気株式会社 | 半導体集積回路の寿命予測装置 |
WO2016170584A1 (ja) * | 2015-04-20 | 2016-10-27 | 三菱電機株式会社 | 電力変換装置 |
WO2018211735A1 (ja) * | 2017-05-19 | 2018-11-22 | 三菱電機株式会社 | 半導体装置 |
Families Citing this family (10)
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JP2007049870A (ja) * | 2005-08-12 | 2007-02-22 | Fuji Electric Device Technology Co Ltd | 電力用半導体モジュール |
JP4765638B2 (ja) * | 2006-01-25 | 2011-09-07 | トヨタ自動車株式会社 | インバータモジュールの検査方法及び検査装置 |
JP5245306B2 (ja) * | 2007-07-11 | 2013-07-24 | 富士電機株式会社 | 半導体装置の劣化保護方法 |
JP5233198B2 (ja) | 2007-08-06 | 2013-07-10 | 富士電機株式会社 | 半導体装置 |
EP2302673A3 (de) * | 2009-09-28 | 2016-05-25 | SEMIKRON Elektronik GmbH & Co. KG | Halbleiteranordnung und Verfahren zur Ermittlung der Sperrschichttemperatur eines Halbleiterbauelements |
CN102783014B (zh) * | 2010-03-10 | 2015-02-18 | 株式会社日立制作所 | 功率变换装置 |
JP5893106B1 (ja) * | 2014-09-08 | 2016-03-23 | 三菱電機株式会社 | モータジェネレータ装置およびその制御方法 |
JP6683510B2 (ja) * | 2016-03-17 | 2020-04-22 | 東京エレクトロンデバイス株式会社 | 半導体装置、メンテナンス装置、及びメンテナンス方法 |
DE112018003222T5 (de) * | 2017-06-22 | 2020-03-26 | Mitsubishi Electric Corporation | Halbleitermodul |
CN113994467A (zh) | 2019-06-25 | 2022-01-28 | 三菱电机株式会社 | 半导体装置以及电力变换装置 |
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JP3209004B2 (ja) * | 1994-08-10 | 2001-09-17 | 株式会社明電舎 | パワースイッチング素子の寿命監視装置及び同寿命監視装置を有するパワースイッチング素子を用いた装置 |
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-
2003
- 2003-10-15 WO PCT/JP2003/013174 patent/WO2005038918A1/ja active Application Filing
- 2003-10-15 AU AU2003304509A patent/AU2003304509A1/en not_active Abandoned
- 2003-10-15 JP JP2005509597A patent/JPWO2005038918A1/ja active Pending
-
2004
- 2004-08-26 WO PCT/JP2004/012702 patent/WO2005038919A1/ja active Application Filing
- 2004-08-26 JP JP2005514715A patent/JP4450796B2/ja not_active Expired - Fee Related
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JPH0670553A (ja) * | 1992-08-20 | 1994-03-11 | Hitachi Ltd | 寿命診断機能を備えたインバータ装置 |
JPH0714948A (ja) * | 1993-06-15 | 1995-01-17 | Hitachi Ltd | パワー半導体モジュール |
JP2002119043A (ja) * | 2000-10-03 | 2002-04-19 | Hitachi Ltd | 半導体装置及びその点検方法 |
JP2002369542A (ja) * | 2001-06-12 | 2002-12-20 | Mitsubishi Electric Corp | 半導体パワーモジュールおよび電力変換装置 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006049211A1 (de) * | 2006-06-22 | 2007-12-27 | Mitsubishi Electric Corp. | Halbleitervorrichtung und Lebensdauervorhersageschaltung und Lebensdauervorhersageverfahren für Halbleitervorrichtung |
JP2008004728A (ja) * | 2006-06-22 | 2008-01-10 | Mitsubishi Electric Corp | 半導体素子並びに半導体素子の寿命予測回路および寿命予測方法 |
US8004304B2 (en) | 2006-06-22 | 2011-08-23 | Mitsubishi Electric Corporation | Semiconductor device, and life prediction circuit and life prediction method for semiconductor device |
DE102006049211B4 (de) | 2006-06-22 | 2021-08-26 | Mitsubishi Electric Corp. | Lebensdauervorhersageschaltung und Lebensdauervorhersageverfahren für Halbleitervorrichtung |
JP2015092140A (ja) * | 2013-11-08 | 2015-05-14 | 株式会社明電舎 | 半導体モジュールの検査方法及び半導体システム |
JP2016138784A (ja) * | 2015-01-27 | 2016-08-04 | 日本電気株式会社 | 半導体集積回路の寿命予測装置 |
WO2016170584A1 (ja) * | 2015-04-20 | 2016-10-27 | 三菱電機株式会社 | 電力変換装置 |
JP6029796B1 (ja) * | 2015-04-20 | 2016-11-24 | 三菱電機株式会社 | 電力変換装置 |
WO2018211735A1 (ja) * | 2017-05-19 | 2018-11-22 | 三菱電機株式会社 | 半導体装置 |
CN110612600A (zh) * | 2017-05-19 | 2019-12-24 | 三菱电机株式会社 | 半导体装置 |
JPWO2018211735A1 (ja) * | 2017-05-19 | 2020-01-23 | 三菱電機株式会社 | 半導体装置 |
US11346879B2 (en) | 2017-05-19 | 2022-05-31 | Mitsubishi Electric Corporation | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JP4450796B2 (ja) | 2010-04-14 |
AU2003304509A1 (en) | 2005-05-05 |
JPWO2005038918A1 (ja) | 2007-02-01 |
JPWO2005038919A1 (ja) | 2007-02-08 |
WO2005038919A1 (ja) | 2005-04-28 |
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