WO2005004321A1 - Element actionneur - Google Patents

Element actionneur Download PDF

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Publication number
WO2005004321A1
WO2005004321A1 PCT/JP2004/009425 JP2004009425W WO2005004321A1 WO 2005004321 A1 WO2005004321 A1 WO 2005004321A1 JP 2004009425 W JP2004009425 W JP 2004009425W WO 2005004321 A1 WO2005004321 A1 WO 2005004321A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuator element
actuator
electrode layer
driving
opening
Prior art date
Application number
PCT/JP2004/009425
Other languages
English (en)
Japanese (ja)
Inventor
Minoru Nakayama
Kazuo Onishi
Shigeki Fujiwara
Original Assignee
Eamex Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eamex Corporation filed Critical Eamex Corporation
Publication of WO2005004321A1 publication Critical patent/WO2005004321A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/006—Motors

Definitions

  • the present invention relates to an actuator element using an ion exchange resin and a method for driving the same.
  • a polymer actuator element using an ion-exchange resin molded product in which an electrode layer is formed by sandwiching an ion-exchange resin layer with an electrode layer interposed therebetween has a small metal content and is light in weight. Since it bends due to the movement of ions contained therein, the operation is fast, so that it is excellent in practicality as an actuator element for bending motion.
  • an electrode layer is formed on a cylindrical ion exchange resin.
  • an actuator element using an ion-exchange resin molded product is used as an introduction portion of a medical tube represented by force catheter (for example, see Patent Document 1).
  • the mechanism of the bending motion is such that the ion exchange resin in the ion exchange resin layer moves, so that the ion exchange resin in one electrode layer and its vicinity expands, and the other electrode layer and the vicinity in the other electrode layer expand.
  • a bending motion occurs because the ion exchange resin shrinks.
  • Patent Document 1 JP-A-8-10336, page 11-5
  • the bending motion of the actuator element in which the electrode layer forms an electrode pair with the ion-exchange resin layer interposed therebetween when the actuator element is in the form of a film or a plate, the bending motion in the bending width direction.
  • the normal line makes a bending movement parallel to the straight line connecting the electrodes at the shortest distance. If this actuator element is a cylindrical actuator element, the bending width is controlled by controlling the applied voltage.
  • the normal of the bending motion in any direction can be directed in any direction of 360 °.
  • the actuator element since the actuator element is driven by the movement of ions, it performs a bending motion as it is, but it is difficult to perform a linear motion.
  • a conversion device that converts the bending motion of the actuator element into a motion for converting the bending motion into a linear motion is used, a device other than the actuator element is required.
  • the conversion device since the conversion device needs to have hardness enough to withstand the driving pressure and transmit the driving energy to the object without absorbing it, a metal material is used. Therefore, the light-weight characteristic of the actuator element is used. The result is that it is impaired.
  • An object of the present invention is to provide an actuator element in which an electrode layer forms an electrode pair with an ion-exchange resin layer interposed therebetween, in which the direction of generated force is a linear direction, and a method of driving the element. It is.
  • an electrode element is an actuator element in which an electrode pair is formed with an ion-exchange resin layer interposed therebetween, and the actuator element is in the form of a film or a plate.
  • the actuator element has an opening that is widened around the outer periphery of the actuator element, and has an approximately circular space near the center, and the force generated by the actuator element due to a change in shape.
  • the actuator element having an insulating layer provided on the electrode layer of the actuator element, and the actuator element laminate, which is a laminate of these actuator elements are formed by changing the shape of the actuator similarly to the actuator element. It has been found that the direction of the force generated by the eta element is a linear direction.
  • the present inventors use, as a second aspect of the present invention, an actuator element in which an electrode layer is formed with an ion-exchange resin layer interposed therebetween, wherein the actuator layer is formed in a helical blade shape. Also, it has been found that the direction of the force generated by the actuator element due to the change in the shape is linear.
  • FIG. 1 (a) is a perspective view of an embodiment of the actuator element.
  • FIG. 1B is a perspective view of the actuator element of FIG. 1A deformed by applying a voltage.
  • FIG. 2 is a top view of the actuator element of FIG. 1 (a).
  • FIG. 3 is a view showing an actuator element of the present invention in which an insulating layer is provided on one electrode layer.
  • FIG. 2 is a perspective view of an embodiment.
  • FIG. 4 is a schematic view showing a modification of one embodiment of the actuator element laminate of the present invention.
  • FIG. 5A is a cross-sectional view of a piston device using the actuator element laminate of the present invention.
  • FIG. 5B is a cross-sectional view of the piston device of FIG. 5A in a state where a voltage is applied to the actuator element.
  • FIG. 5 (c) is a cross-sectional view of the piston device of FIG. 5 (a) in a state where a voltage is applied to the actuator element and the actuator element laminate.
  • FIG. 6 is a schematic view showing a modification of another embodiment of the actuator element laminate of the present invention.
  • FIG. 7 is a cross-sectional view of a diaphragm pump using the actuator element of the present invention.
  • FIG. 8 is an explanatory diagram illustrating the force generated by the actuator element of the present invention.
  • FIG. 9 is a top view of a focus adjusting device using the actuator element of the present invention.
  • FIG. 9 (b) is a perspective view of the focus adjusting device of FIG. 9 (a).
  • FIG. 9 (c) is a sectional view taken along line AA of the focus adjusting device of FIG. 9 (b).
  • FIG. 9D is a perspective view of the focus adjustment device when the focus adjustment device of FIG. 9A is driven.
  • FIG. 9 (e) is a cross-sectional view of the focus adjusting device BB in FIG. 9 (d).
  • FIG. 10 (a) is a cross-sectional view of an embodiment in which focus adjustment devices using the actuator elements of the present invention are stacked.
  • FIG. 10B is a cross-sectional view of the embodiment of FIG. 10A when driven.
  • FIG. 11 is a schematic view of a helical blade-shaped actuator element of the present invention. Explanation of symbols
  • the present invention is an actuator element in which an electrode layer forms an electrode pair with an ion-exchange resin layer interposed therebetween, wherein the actuator element is in the form of a film or a plate, and is expanded around the outer periphery of the actuator element.
  • the present invention relates to an actuator element having an opening and having a substantially circular space near the center connected to the opening.
  • FIG. 1A is a perspective view of an embodiment of the actuator element. Actuator element 1 is expanded in the direction from the center toward the outer periphery, and substantially fan-shaped opening 5 is formed by opening forming parts 4 and 4 '. A space 6 is formed near the center of the actuator element 1.
  • Actuator element 1 has electrode layers 3, 3 'on ion exchange resin layer 2.
  • the electrode layers 3 and 3 ' form an electrode pair with the ion exchange resin layer interposed therebetween.
  • a voltage is applied from the power supply 8 to each electrode layer, water molecules and ions contained in the ion exchange resin layer move.
  • a cation exchange resin is used as the ion exchange resin
  • the actuator element 1 becomes convex toward the negative electrode and concave toward the lower positive electrode. 1b, it is deformed into a substantially conical shape having a convex shape as shown in FIG. 1 (b).
  • the outer electrode layer having a substantially conical shape serves as a negative electrode.
  • the electrode layer 4 is a negative electrode
  • the actuator element of the present invention can be pressed upward by the above-described deformation.
  • the actuator element of the present invention since the inner peripheral surface 7 in FIG. 1A before deformation forms the upper surface in FIG. 1B after deformation, the actuator element of the present invention has, for example, C
  • the area for supporting the object is larger than that of the strip-shaped actuator element, so the rigidity is increased, and the generated force is efficiently used. Can tell well.
  • the actuator element of the present invention is an actuator element in which an electrode layer forms an electrode pair with an ion-exchange resin layer interposed therebetween.
  • the electrode element is provided on the ion-exchange resin layer so that the electrode pair can be formed.
  • One electrode layer may be provided on both sides of the ion-exchange resin, or a plurality of electrode layers may be provided on both sides or one side.
  • the actuator element in which the electrode layer forms an electrode pair with an ion-exchange resin layer interposed therebetween can be obtained by a known method.
  • a metal layer is formed on both sides of a film or plate by applying electroless plating to the film or plate of the ion exchange resin, and the metal layer is used as an electrode layer to form the ion exchange resin. You can get your body.
  • the following electroless plating method is preferably used.
  • Can do After performing the surface roughening treatment, an adsorption step of adsorbing a metal complex such as a platinum complex and a gold complex on the ion exchange resin is performed in a state where the ion exchange resin is swelled by immersion in water. Next, a reduction step of reducing the adsorbed metal complex with a reducing agent to deposit a metal is performed, and a washing step of washing and removing the reducing agent is performed, if desired.
  • the adsorption step, the reduction step, and the cleaning step can be repeatedly performed so that the electrode layer, which is an electrode, has a thickness sufficient for energization and bending.
  • an electrode layer is formed by growing an electrode layer in the direction of the inside of the ion-exchange resin, and the cross section of the electrode layer at the interface between the ion-exchange resin and the electrode layer has a fractal structure. Is formed, it is possible to have a large electric double layer at the interface between the electrode layer and the ion exchange resin layer. Further, since the electrode layer has a fractal structure in the direction of the inside of the ion-exchange resin layer, the ion-exchange resin joined body has durability even when repeatedly bent since an anchor effect works.
  • the ion exchange resin is not particularly limited.
  • the ion exchange resin is not particularly limited, and any known ion exchange resin can be used, such as a resin obtained by introducing a hydrophilic functional group such as a sulfonic acid group or a carboxyl group into polyethylene, polystyrene, a fluororesin, or the like. Can be used.
  • Such a resin examples include a perfluorosulfonic acid resin (trade name “Nafion”, manufactured by DuPont), a perfluorocarboxylic acid resin (trade name “Flemion”, manufactured by Asahi Glass Co., Ltd.), and ACIPLEX (manufactured by Asahi Kasei Corporation) , NEOSE PTA (made of Tokumane earth) can be used.
  • a perfluorosulfonic acid resin trade name “Nafion”, manufactured by DuPont
  • a perfluorocarboxylic acid resin trade name “Flemion”, manufactured by Asahi Glass Co., Ltd.
  • ACIPLEX manufactured by Asahi Kasei Corporation
  • NEOSE PTA made of Tokumane earth
  • the metal complex solution used in the electroless plating adsorption step is not particularly limited as long as the metal layer formed by reduction contains a metal complex that can function as an electrode layer. Not something.
  • the metal complex is preferably formed by using a metal complex such as a gold complex, a platinum complex, a palladium complex, a rhodium complex, and a ruthenium complex because a metal having a low ionization tendency is electrochemically stable. Since the metal is used in water as an electrode, a metal complex composed of a noble metal having good electrical conductivity and high electrochemical stability is preferred, and a gold complex which is a gold alloy, in which electrolysis is relatively unlikely to occur, is preferred.
  • the solvent of the metal salt solution is not particularly limited, it is preferable that the solvent contains water as a main component because it is easy to dissolve the metal salt and easy to handle.
  • the metal salt solution is a metal salt aqueous solution. Therefore, the metal complex solution is preferably an aqueous solution of a metal complex, particularly preferably an aqueous solution of a gold complex or an aqueous solution of a platinum complex, and more preferably an aqueous solution of a gold complex.
  • the type can be appropriately selected and used according to the type of the metal complex used in the metal complex solution adsorbed on the ion exchange resin.
  • sodium sulfite, hydrazine, sodium borohydride and the like can be used.
  • an acid or an alkali may be added as necessary.
  • the concentration of the reducing agent solution is not particularly limited as long as the reducing agent solution contains a sufficient amount of the reducing agent to obtain the amount of metal precipitated by reduction of the metal complex. It is also possible to use the same concentration as the metal salt solution used when forming an electrode by electrolysis.
  • the reducing agent solution may contain a good solvent for the ion exchange resin.
  • the actuator element of the present invention has a substantially circular shape in which the actuator element has a film-like or plate-like shape, has an opening that expands around the outer periphery of the actuator, and is connected to the opening near the center.
  • This is an actuator element having a space.
  • the actuator element has an opening that expands in the outer peripheral direction, and the opening forms a fan shape. Due to the deformation of the actuator element described above, the opening is narrowed, and the actuator element has a substantially conical shape.
  • the opening of the actuator element expands toward the outer periphery and forms a substantially sector shape.
  • the angle formed by the opening expanding toward the outer periphery should form an angle within a range of 5 ° and less than 180 ° because it is easy to form a substantially conical shape by deformation. It is more preferable to make a 30-120 ° angle.
  • the angle formed by the opening part expanding toward the outer periphery that is, the angle ⁇ formed by the opening part 4 and the opening part 4 ′ in the top view of the actuator element in FIG. 2 is smaller than 5 °
  • either the opening forming part 4 or the opening forming part 4 ′ is largely caught inside due to deformation, so that sufficient deformation may not be possible due to friction during the winding.
  • the angular force is 180 ° or more, the area of the inner surface in the shape of the actuator element before voltage application becomes small, so that the contact surface when pressing an object by deformation due to voltage application becomes small. Naruta Therefore, the shape stability when applying a force to the object is reduced.
  • the shape of the outer periphery of the actuator element is not particularly limited as long as it can be stably installed when a voltage is applied to a pair of electrodes to form a convex shape.
  • the shape is preferably a polygon or a circle having an outer peripheral force greater than or equal to an angle when a part lacked by the opening is removed, since the shape easily becomes a stable shape when the object is pressed. It is more preferable that the shape is round.
  • the shape of the inner peripheral portion forming the space near the center of the actuator element is not particularly limited, but when a part lacking by the space is exposed, the object is pressed.
  • the shape be a polygon that is hexagonal or larger, or a circular shape, which is more preferably a circular shape that is concentric with the outer periphery that is more preferable. Is especially preferred.
  • a particularly preferred combination of the outer peripheral shape and the inner peripheral shape is a case where both are circular as shown in FIGS. 1 (a) and 2.
  • the actuator element has a substantially C shape.
  • a convex, substantially conical shape excellent in applying a force to the object when pressing the object.
  • the actuator element of the present invention it is preferable to provide an insulating layer on the electrode layer.
  • FIG. 3 is a perspective view of an embodiment in which an insulating layer is provided on one electrode layer in the actuator element of the present invention.
  • the actuator element 31 has an electrode layer 33 formed on an ion exchange resin layer 32 and an electrode layer 33 ′ formed on the opposite surface.
  • an insulating layer 34 is formed on the electrode layer 33.
  • the electrode layer 33 has a substantially conical convex shape. Then, when the opening forming part 35 is rolled inward, the force S can be used to avoid contact between the electrode layer 33 and the electrode layer 33 '.
  • the actuator element may be provided with an insulating layer on both surfaces of an electrode layer forming a force having an insulating layer on one electrode layer.
  • the present invention is also an actuator element laminate in which two or more of the actuator elements are stacked.
  • FIG. 4 is a schematic view of one embodiment of the above-mentioned factorizer element laminate.
  • the actuator element laminate 41 has three actuator elements 42, 43, and 44 stacked thereon.
  • the actuator element stacks are stacked so as to be slidable with each other.
  • the power supply is connected so that the electrode layer 45 of the actuator element 42 becomes a negative electrode and the electrode layer 45 'becomes a positive electrode.
  • the power supply is connected so that the electrode layer 46 of the actuator element 43 becomes a positive electrode and the electrode layer 46 'becomes a negative electrode.
  • the power supply is connected so that the electrode layer 47 of the actuator element 44 becomes a negative electrode and the electrode layer 47 'becomes a positive electrode.
  • the elongation of the actuator element laminate after deformation due to the application of a voltage is extended by an amount obtained by subtracting the sum of the thicknesses of the actuator elements from the sum of the heights of the convex shapes of the actuator elements. Elongation can be obtained.
  • the actuator element laminate may be deformed when a voltage is applied to each electrode layer, so that the laminated state may not be maintained.
  • a support body with which each actuator element can engage in a space may be provided as an auxiliary member.
  • the support has flexibility so as not to hinder the deformation of each actuator element, and the inner surface of each actuator element and the support are slidable, so that the deformation of each actuator element is easy. It is preferable because there is.
  • the auxiliary member is not limited to the support, and may be a cylinder that can house the actuator element laminate inside. In this case, by attaching the rod to the shape of the actuator element stack housed inside the cylinder, the rod can be used as a piston that moves up and down by applying a voltage.
  • FIGS. 5 (a) and 5 (c) are cross-sectional views of the case where the actuator element laminate is used in a piston device.
  • FIG. 5A is a cross-sectional view of the piston device showing an initial state before a voltage is applied to each actuator element.
  • the piston device 51 includes a rod 53 that passes through the center of a cylindrical housing 52.
  • the actuator element laminate 54 is formed at the bottom of the inner chamber 55 of the housing 52.
  • the rod 53 is mounted on the housing so as to be in contact with the surface 56 and pass through the center of the space of each actuator element of the actuator element stack.
  • the rod passes through the center of the space of the actuator element 58, and the actuator element 58 is stacked on the actuator element stack 54 via the partition plate 57.
  • a cylindrical spring 59 is provided between the actuator element 58 and the recess on the upper surface of the inner chamber 55 and near the outer periphery of the rod.
  • a voltage is applied to the actuator element 58 to bring it to the state shown in Fig. 5 (b).
  • the space of the actuator element is narrowed and the columnar rod is gripped.
  • the adjacent actuator elements in the actuator element stacked body 54 are deformed in a convex shape in the opposite directions to each other, so that the state shown in FIG. 5C is obtained, and the actuator element stacked body is separated via the partition 57 into the actuator element elements. Raise 58 and move the rod to the right in the figure.
  • the actuator element laminate 54 and the actuator element 58 in FIGS. 5 (a)-(c) are provided with electrode layers on both sides of the ion exchange resin layer, and are connected via the respective electrode layer card wires.
  • the power connected to the power supply is omitted to facilitate understanding of the drive state.
  • a known method for connecting each electrode layer to a power source via a lead wire a known method such as providing a hole for introducing a lead wire in a housing can be used.
  • a claw-shaped projection may be provided on the outer periphery of the rod.
  • FIG. 6 is a schematic view of an embodiment of the above-mentioned actuator element laminate in the case of including an actuator element having an insulating layer formed on at least one electrode layer.
  • the actuator element laminate 61 includes an actuator element 63 having an insulating layer 66 formed on an electrode layer 65 ′, and an actuator element 63 having an insulating layer 68 formed on an electrode layer 67 ′.
  • the actuator element 64 is laminated on the insulating layer 68 of the actuator element 63.
  • Each actuator element is slidably stacked.
  • the power supply is connected so that the electrode layer 65 of the actuator element 62 becomes a positive electrode and the electrode layer 65 ′ becomes a negative electrode.
  • the power supply is connected so that the electrode layer 67 of the actuator element 63 becomes a positive electrode and the electrode layer 67 'becomes a negative electrode.
  • the power supply is connected so that the electrode layer 69 of the actuator element 64 becomes a positive electrode and the electrode 69 'becomes a negative electrode.
  • the actuator element Due to this deformation, the actuator element has a shape as shown on the right side of FIG. 6, and has a shape in which hollow substantially conical actuator elements are stacked. In the state of the actuator element laminate after deformation by voltage application, the rate of elongation is shorter than that in the case shown in FIG. However, since the actuator elements have a stacked shape, when the actuator element stack presses the object by deformation, the pressing force of each actuator element increases.
  • the actuator element laminate including an actuator element having an insulating layer formed on at least one electrode layer in FIG. 6, the actuator element having an insulating layer formed on one electrode layer is shown in FIG. Is not limited to a combination of actuator elements, if they are stacked so that the electrode layer of each actuator element does not contact the electrode layer of an adjacent actuator element. Absent.
  • the actuator element laminate also needs to perform a deformation operation when a voltage is applied to each electrode layer.
  • the laminated state cannot be maintained.
  • a support member capable of engaging each actuator element in the space may be provided.
  • the support has flexibility so as not to hinder the deformation of each actuator element, and the inner surface of each actuator element and the support are slidable. Preferred for ease.
  • the auxiliary member is not limited to the above-described support member, and may be a cylinder capable of storing the actuator element laminate inside. In this case, by attaching the rod to the shape of the actuator element stacked body housed inside the cylinder, it becomes possible to use the rod as a piston that moves up and down by applying a voltage.
  • the actuator element and the actuator element laminate can move directly, they can be used as a linear actuator that is lightweight and has no sound when driven. Therefore, the actuator element and the actuator element laminate can be suitably used as a driving unit of a positioning device, a posture control device, a lifting device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, or a joint device. .
  • the actuator element can be suitably used as a driving unit or a pressing unit described below: A device, an antenna, a device for placing a person such as a bed or a chair, a medical device, an engine, an optical device, a fixed device.
  • the actuator element is, for example, a track-type drive unit or an arc-shaped unit that generates a linear drive force in valves, brakes, and lock devices used in general machines including the above-described devices such as OA devices and measurement devices. It can be used as a driving unit that generates a driving force for moving the orbit, or as a pressing unit that operates linearly.
  • the mechanical devices generally include a driving device for a positioning device, a driving device for a posture control device, a driving device for a lifting device, a driving device for a transport device, and a moving device.
  • the driving force S can be suitably used as a driving unit of a control device for adjusting the amount or direction, a driving unit of an adjusting device such as a shaft, a driving unit of a guiding device, and a pressing unit of a pressing device.
  • the actuator element can be suitably used as a drive unit in a joint device, such as a joint unit that can be directly driven, such as a joint intermediate member, or a drive unit that applies rotational motion to a joint.
  • the actuator element is, for example, a drive unit for an ink jet part in an ink jet printer such as a CAD printer, a drive unit for displacing the optical axis of the light beam of the printer, and a head of a disk drive device such as an external storage device.
  • Drive unit and pudding The present invention can be suitably used as a drive unit of a paper pressing contact force adjusting means in a paper feeding device of an image forming apparatus including a printer, a copying machine, and a fax machine.
  • the actuator element includes, for example, a driving unit of a driving mechanism that moves and installs a measuring unit and a feeding unit that moves a high-frequency feeding unit such as a frequency shared antenna for radio astronomy to a second focal point, and It can be suitably used for a mast such as a vehicle-mounted pneumatically-operated telescopic mast (telescopic coving mast) or a drive unit of a lift mechanism in an antenna.
  • a driving unit of a driving mechanism that moves and installs a measuring unit and a feeding unit that moves a high-frequency feeding unit such as a frequency shared antenna for radio astronomy to a second focal point
  • a mast such as a vehicle-mounted pneumatically-operated telescopic mast (telescopic coving mast) or a drive unit of a lift mechanism in an antenna.
  • the actuator element can be suitably used, for example, in the following driving units: a driving unit for a massage unit of a chair-shaped massage machine, a driving unit for a nursing or medical bed, and a posture control of an electric reclining chair.
  • the backrest of the reclining chair used for the device, the massage machine, the easy chair, etc.
  • the drive for the expansion / contraction pad that allows the ottoman to move up and down, and the backrest and redrest in chairs, nursing beds, etc.
  • the actuator element can be suitably used, for example, in the following driving units: a driving unit of an examination device, a driving unit of a pressure measuring device such as a blood pressure used in an extracorporeal blood treatment device, a catheter, Means for relatively expanding and contracting drive units such as endoscope devices and forceps, drive units for cataract surgery devices using ultrasonic waves, drive units for exercise devices such as jaw exercise devices, and hoist chassis for the disabled And a drive unit for raising and lowering, moving, and controlling the posture of the nursing bed.
  • driving units a driving unit of an examination device
  • a driving unit of a pressure measuring device such as a blood pressure used in an extracorporeal blood treatment device
  • a catheter Means for relatively expanding and contracting drive units such as endoscope devices and forceps, drive units for cataract surgery devices using ultrasonic waves, drive units for exercise devices such as jaw exercise devices, and hoist chassis for the disabled
  • a drive unit for raising and lowering, moving, and controlling the posture of the nursing bed for example, in the
  • the actuator element can be suitably used, for example, as a next driving unit; a driving unit of a vibration isolator for attenuating vibration transmitted from a vibration generating unit such as an engine to a vibration receiving unit such as a frame; A drive unit of a valve train for intake and exhaust valves of an internal combustion engine, a drive unit of a fuel control device of an engine, and a drive unit of a fuel supply device of an engine such as a diesel engine.
  • the actuator element can be suitably used, for example, in the following driving units: a driving unit of a calibration device of an imaging device with a camera shake correction function; a driving unit of a lens driving mechanism such as a home video camera lens; Driving unit of the mechanism that drives the moving lens group of optical equipment such as cameras and video cameras, driving unit of the camera autofocus unit, camera, video power Driving unit for lens barrels used in imaging devices such as cameras, drive unit for auto guiders that take in light from optical telescopes, lens driving mechanism or driving lens barrels for optical devices that have two optical systems, such as stereoscopic sights and binoculars Unit, a driving unit or a pressing unit that applies a compressive force to the wavelength conversion fiber of a fiber-type wavelength tunable filter used for optical communication, optical information processing, optical measurement, etc., a driving unit for an optical axis alignment device, and a camera shutter.
  • the drive of the mechanism is a driving unit of a calibration device of an imaging device with a camera shake correction function; a driving unit of
  • the actuator element can be suitably used, for example, as a pressing portion of a fixture such as a caulking fixture of a hose fitting to a hose body.
  • the actuator element can be suitably used, for example, in the following drive unit: a drive unit such as a coil spring of an automobile suspension, and a fuel filler rod for unlocking a fuel filler rod of a vehicle.
  • the actuator element can be suitably used, for example, in the following driving units: a driving unit of a lifting device of a wheelchair with a seat plate lifting device, a driving unit of a lifting device for removing a step, and a driving unit of a lifting / transferring device.
  • driving units Medical beds, electric beds, electric tables, electric chairs, nursing beds, lift tables, CT scanners, truck cabin tilting devices, lifters, etc. It can be suitably used for the drive unit of a special vehicle loading / unloading device.
  • the actuator element can be suitably used, for example, as a drive unit of a discharge amount adjusting mechanism such as a food discharge nozzle device of a food processing device.
  • the actuator element can be suitably used, for example, in a drive unit for raising and lowering a truck and a cleaning unit of a cleaning device.
  • the actuator element can be suitably used, for example, in the following driving units: a driving unit of a measuring unit of a three-dimensional measuring device for measuring the shape of a surface, a driving unit of a stage device, and detection of operating characteristics of a tire.
  • Driving unit for the sensor part of the system, etc. evaluation of the impact response of the force sensor Driving unit for the device that gives the initial speed of the device, Driving unit for the piston driving device of the piston cylinder of the device including the permeation test device in the hole, condensing tracking type Sapphire laser oscillation wave of the measuring device including the driving unit for moving the generator in the elevation direction and the gas concentration measuring device
  • a drive unit of an adjustable aperture device used for a charged particle beam system such as a beam (E-beam) system or a forced ion beam (FIB) system
  • a support device for a measurement target in a flatness measuring instrument Or the drive unit for the detection unit, and the drive unit for precision positioning devices such as semiconductor exposure equipment, semiconductor inspection equipment, and three-dimensional shape measurement equipment, as well as the assembly of fine devices.
  • E-beam beam
  • FIB forced ion beam
  • the actuator element can be suitably used, for example, in a driving unit of an electric shaver and a driving unit of an electric toothbrush.
  • the actuator element can be suitably used, for example, in the following drive units: a drive unit of a device for adjusting the depth of focus of a three-dimensional object imaging device or a readout optical system shared by CDs and DVDs; At least one of a drive unit of a variable mirror and a magnetic head such as an optical pickup that can easily form a desired curved surface by easily deforming the focal position by deforming the shape of the driven surface as an active curved surface using an actuator element.
  • the actuator element can be suitably used, for example, in the following driving unit: [0111] Single-layer / single-layer drive unit of a rubber composition press-molding vulcanizing apparatus, parts to be transferred. Parts for aligning parts and aligning them in a predetermined position, driving parts for compression molding equipment, driving parts for holding mechanisms for welding equipment, driving parts for bag making and packaging machines, machine tools such as machining centers and injection molding Manufacturing of drive units for molding machines such as presses and press machines, drive units for fluid application devices such as printing devices, coating devices and lacquer spraying devices, and camshafts Driving unit of the device, driving unit of the lifting device of the covering material, driving unit such as the tuft-restrictor of shuttleless loom, needle driving system of tufting machine, looper driving system, driving unit of knife driving system, etc., cam A driving unit of a polishing device for polishing a part such as a grinder or an ultra-precision machined part, a driving unit of a braking device for a pig iron
  • Drive units drive units, drive units for protective sheet peeling devices for semiconductor substrates, etc., drive units for threading devices, drive units for CRT electron gun assembly devices, garments for clothing, tablecloths and seat covers, etc.
  • Drive of shifter fork drive selection linear control device drive of horizontal moving mechanism of anneal window drive device, glass melting furnace
  • a drive unit for the support arm of the heart a drive unit for moving the rack of the exposure device such as a method for forming the fluorescent screen of the color picture tube, a drive unit for the torch arm of the ball bonding device, and a drive unit for the XY direction of the bonding head
  • the actuator element can be suitably used for, for example, a drive unit of a positioning device of a probe of a scanning probe microscope such as an electron microscope, and a drive unit of a sample fine movement device for an electron microscope.
  • the actuator element can be suitably used, for example, in the following driving units: robots including automatic welding robots, industrial robots and nursing care robots, and robot arm wrists in a manipulator, etc.
  • Actuator for joint mechanism actuator for joints other than direct drive type, finger of robot itself, drive for motion conversion mechanism of slide opening / closing type chuck device used as hand of robot, etc.
  • the actuator element can be suitably used, for example, as a pressing portion of a device for pressing an upper rotary blade or a lower rotary blade of a side trimmer.
  • the actuator element is used, for example, as a driving unit of amusement equipment such as a pachinko machine, a driving unit of an amusement device such as a doll or a pet robot, and a driving unit of a simulation device of a boarding simulation device. It can be suitably used.
  • the actuator element can be suitably used, for example, in the following driving unit; it can be used in a driving unit of a valve used for a general machine including the above-mentioned devices and the like.
  • Actuator for valve of reliquefaction unit actuator for bellows-type pressure-sensitive control valve, actuator for opening device to drive pig iron frame, actuator for vacuum gate valve, solenoid operated control valve for hydraulic system Drive unit, valve drive unit incorporating a motion transmission device using a pivot lever, rocket movable nozzle valve drive unit, suck-back valve drive unit, and pressure regulating valve drive unit.
  • the actuator element can be suitably used, for example, for the following pressing parts; for example, it can be used as a pressing part of a brake used in a general machine including the above-mentioned equipment, for example, for emergency, security, A pressing part of a braking device suitable for use as a brake for parking or an elevator, and a pressing part of a brake structure or a brake system.
  • the actuator element can also be used as a drive device for reciprocating and bending movement of a diaphragm valve of a diaphragm pump.
  • FIG. 7 is a cross-sectional view showing an embodiment of a diaphragm pump using the actuator element of the present invention as a driving device.
  • the diaphragm type pump 71 includes a diaphragm valve 74 forming a pump chamber 79.
  • the diaphragm pump 71 includes the actuator elements 73, 73 ', and 73''' of the present invention as an actuator element laminated body in contact with the diaphragm valve 74 in a state before voltage application and in a pressurizable state.
  • Lead wires are connected to the electrode layers of the actuator elements 73, 73 ', and 73''' so that they can be deformed by applying a voltage.
  • Each actuator element is brought into a convex state by applying a voltage, and the diaphragm valve becomes a convex type.
  • the fluid in the pump chamber 79 moves to the discharge port 76 and is discharged.
  • the voltage applied to each actuator element is released to return to the original state, and the diaphragm valve returns to the original state shown in FIG.
  • the fluid flows from the suction port 75 through the valve 77.
  • the actuator element can be used, for example, as a pressing portion of a locking device used in a general machine including the above-mentioned devices and the like, for example, a pressing portion of a mechanical locking device, a pressing portion of a steering lock device for a vehicle. And a pressing portion of a power transmission device having a load limiting mechanism and a coupling release mechanism.
  • the actuator element and the actuator element laminate may include an elastic body capable of changing a panel constant by applying a voltage to an electrode layer, a mobile phone component such as an antenna expansion and contraction device, and an IC contact lifting device. And the like.
  • the actuator element has an expanded opening and a space. Therefore, before the voltage is applied to the electrode layer, the C-shaped actuator element has a shape like the actuator element 81 in FIG. 8 when viewed from above. On the other hand, when a voltage is applied to the electrode layer with respect to the C-shaped actuator element, the actuator element is deformed like the actuator element 82, and the opening forming parts 83 and 83 'narrow the opening. , Perform opening and closing operations or pinching operations, and generate forces F1 and F2. Also, the actuator element 81 The inner side surface 84 narrows the space in the center direction, performs an opening / closing operation or a pinching operation, and generates a force F3.
  • the actuator element and the actuator element laminate are suitably used as a feeder device for an antenna since the opening forming portion opens and closes, and also performs a linear motion. It is possible.
  • the actuator element and the actuator element laminated body perform an operation of opening and closing a space portion on the inner surface
  • the actuator element and the actuator element laminate can be suitably used as a flow rate adjusting device and a throttle device for adjusting a light amount. Also, it can be suitably used as a focus adjusting device for deforming a lens by disposing the lens in a space.
  • FIGS. 9 (a), (e) and FIGS. 10 (a), (b) are schematic views showing an embodiment of a focus adjusting device when a lens is installed in the space of the actuator element of the present invention. It is.
  • FIG. 9A is a top view of the focus adjusting device 91.
  • FIG. A deformable lens 93 is set in the space of an actuator element 92 having electrode layers on both surfaces of the ion exchange resin layer.
  • FIG. 9B is a perspective view of the focus adjusting device 91
  • FIG. 9C is a cross-sectional view taken along the line AA of FIG. 9B.
  • FIG. 9 (e) is a sectional view taken along line BB in FIG. 9 (d).
  • the focus adjusting device 91 can adjust the lens focus by deforming the thickness of the lens.
  • the focus adjusting devices 91 ′ and 91 of FIG. 9 (a) are superposed and driven so as to be convex in the opposite directions, whereby the focus adjusting device ), The focus can be adjusted, and the force can be adjusted by adjusting the vertical direction of the image reflected on the lens.
  • the actuator element and the actuator element laminate can be suitably used for a brake and a clutch because the inner surface performs a clamping operation.
  • the present invention is an actuator element in which the electrode layer is formed with the ion exchange resin layer interposed therebetween, and also an actuator element formed in a helical blade shape.
  • FIG. 11 is an explanatory view showing a modification of the embodiment of the helical blade-shaped actuator element of the present invention.
  • the actuator element 111 formed in a helical blade shape An actuator element having an enlarged opening on the outer periphery of the actuator element, and having a substantially circular space near the center which is continuous with the opening. It has a connected shape at the part.
  • a voltage is applied to the actuator element 111, a substantially conical shape like the actuator element 112 in FIG.
  • the actuator element 112 returns to the state of the actuator element 111.
  • the actuator element formed in a helical blade shape is an actuator element in which an electrode layer forms an electrode pair with an ion exchange resin layer interposed therebetween, similarly to the above-described actuator element, and the direction of the generated force is linear. It is possible to obtain an actuator element in the direction.
  • the actuator elements 111 and 112 in FIG. 11 have a laminated structure in which electrode layers are laminated on both sides of the ion exchange resin layer in the thickness direction, but are simplified for explanation.
  • the helical blade-shaped actuator element of the present invention has an opening that is expanded on the outer periphery of the actuator element, and linearly moves in the same manner as the actuator element that has a substantially circular space near the center and continuous with the opening. Therefore, it can be suitably used as a linear actuator which is lightweight and has no force when driven. Therefore, the actuator element and the actuator element laminate can be suitably used as a positioning device, a posture control device, a lifting device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, or a driving unit of a joint device. it can.
  • the helical blade-shaped actuator element of the present invention is similar to an actuator element having an opening that is expanded on the outer periphery of the actuator element and having a substantially circular space near the center and continuous with the opening.
  • a diaphragm-type pump, a pressing portion of a lock device generally used for machinery including the above-described devices, a pressing portion of a mechanical locking device, a pressing portion of a steering lock device for a vehicle, and a load limiting mechanism and a coupling release mechanism are provided.
  • An elastic body that can be suitably used for the pressing part of a power transmission device that has a combination and can change the spring constant by applying a voltage to the electrode layer, a mobile phone component such as an antenna expansion and contraction device, an IC contact lifting device, etc. It can be used for a card reader or the like.
  • the actuator element of the present invention is in the form of a film or a plate, is provided with an opening that is expanded around the outer periphery of the actuator element, and is provided with a substantially circular space near the center and continuous with the opening. Therefore, the direction of the force generated by the change in the shape is a linear direction.
  • the actuator element and the actuator element laminate can be used as a lightweight and silent linear actuator. Therefore, the actuator element and the actuator element laminated body are provided with a positioning device, a posture control device, a lifting device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, or a joint device, an opening / closing device, and a flow adjusting device.
  • a diaphragm unit, and a drive unit of a focus adjustment device Further, it can be suitably used as a pressing portion of a pressing device.
  • the helical blade-shaped actuator element of the present invention is also in the form of a film or a plate as described above, and has an opening that is expanded around the outer periphery of the actuator element.
  • the direction of the force generated by the change in shape is linear, so it can be used as a lightweight and silent linear actuator. It can be suitably used as a drive unit of a device, a lifting device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, an articulating device, an opening / closing device, a flow adjusting device, a diaphragm device, and a focus adjusting device. Further, it can be suitably used as a pressing portion of a pressing device.

Landscapes

  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un élément actionneur possédant des couches électrodes avec une couche de résine échangeuse d'ions entre ces dernières. Cet élément actionneur se présente sous la forme d'un film ou d'une plaque, possède une ouverture élargie formée dans la périphérie extérieure et un espace sensiblement circulaire formé à proximité du centre et communiquant avec l'ouverture. L'élément actionneur peut se présenter sous la forme d'une lame hélicoïdale. Un élément actionneur possédant des couches d'électrodes avec une couche de résine échangeuse d'ions maintenue entre elles de manière qu'une paire d'électrodes soit formée est décrit. Il est possible d'obtenir un élément actionneur dans lequel la direction d'une force produite est linéaire, ainsi que son procédé de commande.
PCT/JP2004/009425 2003-07-03 2004-07-02 Element actionneur WO2005004321A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003191026A JP4659343B2 (ja) 2003-07-03 2003-07-03 アクチュエータ素子及び駆動方法
JP2003-191026 2003-07-03

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007093755A (ja) * 2005-09-27 2007-04-12 Fujifilm Corp 光学鏡胴、光制御器、および撮影装置
JP2009530650A (ja) * 2006-03-15 2009-08-27 ノキア コーポレイション 携帯カメラ用絞り構造
EP2146425A1 (fr) * 2007-04-09 2010-01-20 Eamex Corporation Corps d'actionneur et mécanisme de papillon
US11592010B1 (en) 2022-05-18 2023-02-28 Toyota Motor Engineering & Manufacturing North America, Inc. Shape-memory material actuators

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4530163B2 (ja) 2005-03-31 2010-08-25 セイコープレシジョン株式会社 焦点調節装置及び撮像装置
JP5233068B2 (ja) * 2005-11-18 2013-07-10 ソニー株式会社 アクチュエータ、並びにブレーキ装置、流体制御装置、レンズ位置調整装置
JP4758211B2 (ja) * 2005-12-01 2011-08-24 富士フイルム株式会社 手ぶれ補正ユニットおよび撮影装置
JP2007225638A (ja) * 2006-02-21 2007-09-06 Sony Corp 立体表示装置
JP5207519B2 (ja) * 2007-01-25 2013-06-12 独立行政法人海洋研究開発機構 自己変形型空中線装置
JP2008253058A (ja) * 2007-03-30 2008-10-16 Japan Aviation Electronics Industry Ltd アクチュエータ及び入力デバイス
JP5271410B2 (ja) * 2009-04-17 2013-08-21 アルプス電気株式会社 アクチュエータ素子及び入力装置
JP5541562B2 (ja) * 2009-08-14 2014-07-09 セイコーエプソン株式会社 輸送ポンプ
JP5679733B2 (ja) * 2010-08-06 2015-03-04 キヤノン株式会社 アクチュエータ
JP5518688B2 (ja) * 2010-12-08 2014-06-11 アルプス電気株式会社 入力器及び入力装置
CN112421988B (zh) * 2020-11-12 2022-04-12 福州大学 一种螺旋形磁性微米马达及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08275564A (ja) * 1995-03-31 1996-10-18 Terumo Corp アクチュエータ素子
JPH08280187A (ja) * 1995-04-04 1996-10-22 Terumo Corp アクチュエータ及びガイドワイヤ
JPH0937571A (ja) * 1995-07-19 1997-02-07 Denso Corp 積層型アクチュエータおよび移動装置
JPH09264779A (ja) * 1996-03-29 1997-10-07 Nkk Corp 自発電源による振動検出装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60179059U (ja) * 1984-05-07 1985-11-28 横河電機株式会社 セラミツクアクチユエ−タ
JPH06278239A (ja) * 1993-03-29 1994-10-04 Asahi Chem Ind Co Ltd 粘弾性可変複合材料
JP2961125B2 (ja) * 1998-02-20 1999-10-12 工業技術院長 高分子アクチュエータの製造方法
JP3030361B2 (ja) * 1998-03-30 2000-04-10 工業技術院長 高分子電解質アンモニウム誘導体
JP4245096B2 (ja) * 1999-04-15 2009-03-25 セイコーインスツル株式会社 積層圧電素子およびこれを用いた圧電アクチュエータ、超音波モータ
US7224813B2 (en) * 1999-12-21 2007-05-29 1. . . Limited Loudspeaker using an electro-active device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08275564A (ja) * 1995-03-31 1996-10-18 Terumo Corp アクチュエータ素子
JPH08280187A (ja) * 1995-04-04 1996-10-22 Terumo Corp アクチュエータ及びガイドワイヤ
JPH0937571A (ja) * 1995-07-19 1997-02-07 Denso Corp 積層型アクチュエータおよび移動装置
JPH09264779A (ja) * 1996-03-29 1997-10-07 Nkk Corp 自発電源による振動検出装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007093755A (ja) * 2005-09-27 2007-04-12 Fujifilm Corp 光学鏡胴、光制御器、および撮影装置
JP2009530650A (ja) * 2006-03-15 2009-08-27 ノキア コーポレイション 携帯カメラ用絞り構造
EP2146425A1 (fr) * 2007-04-09 2010-01-20 Eamex Corporation Corps d'actionneur et mécanisme de papillon
EP2146425A4 (fr) * 2007-04-09 2010-09-15 Eamex Corp Corps d'actionneur et mécanisme de papillon
US11592010B1 (en) 2022-05-18 2023-02-28 Toyota Motor Engineering & Manufacturing North America, Inc. Shape-memory material actuators
US11841008B1 (en) 2022-05-18 2023-12-12 Toyota Motor Engineering & Manufacturing North America, Inc. Shape-memory material actuators

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JP4659343B2 (ja) 2011-03-30

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