WO2004073075A1 - Dispositif a semi-conducteur encapsule et son procede de fabrication - Google Patents
Dispositif a semi-conducteur encapsule et son procede de fabrication Download PDFInfo
- Publication number
- WO2004073075A1 WO2004073075A1 PCT/KR2004/000297 KR2004000297W WO2004073075A1 WO 2004073075 A1 WO2004073075 A1 WO 2004073075A1 KR 2004000297 W KR2004000297 W KR 2004000297W WO 2004073075 A1 WO2004073075 A1 WO 2004073075A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor chip
- semiconductor
- transparent electrode
- resin
- filler resin
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 121
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims description 30
- 239000011347 resin Substances 0.000 claims abstract description 61
- 229920005989 resin Polymers 0.000 claims abstract description 61
- 238000000465 moulding Methods 0.000 claims abstract description 11
- 239000000945 filler Substances 0.000 claims description 42
- 239000000463 material Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000012811 non-conductive material Substances 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000012141 concentrate Substances 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229920001940 conductive polymer Polymers 0.000 description 2
- 239000008267 milk Substances 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
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- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/241—Disposition
- H01L2224/24135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/24137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/732—Location after the connecting process
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- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
Definitions
- the present invention relates to a package of a semiconductor device and a fabrication method thereof, and in particular, to a semiconductor package for electrically connecting a light emitting diode (LED) to an external lead using a transparent electrode, and a method of fabricating the same.
- LED light emitting diode
- a semiconductor package has a function of connecting a semiconductor chip to an external substrate, such as a printed circuit board, through fitting the semiconductor chip to a lead frame, and mounting it onto the external substrate.
- an external substrate such as a printed circuit board
- semiconductor packages are existent while being differentiated in the structure and the function thereof. Among them, wire bonding semiconductor packages have been most extensively used with excellent product adaptability.
- Fig. 1 illustrates a semiconductor chip packaged using the wire bonding technique, which has an LED radiating visible rays of a specific wavelength.
- a first bonding pad 2 is formed on a printed circuit board
- the semiconductor chip 3 is mounted onto the printed circuit board 1 using a silver paste 5 as an adhesive.
- the so-called wire bonding process is performed using a gold- based wire 6 to interconnect the first bonding pad 2 of the printed circuit board 1 and the second bonding pad 4 of the semiconductor chip 3.
- a photolithography process is conventionally performed to form such a bonding pad.
- the photolithography process involves the steps of coating a photoresist film onto a target, light-exposing and developing it, removing the photoresist film, and cleaning the target. That is, the photolithography process involves complicated processing steps with much time consumption.
- the photolithography process it is required with the photolithography process to provide high cost equipments, such as a light exposing apparatus, a spin coater, a developer, and a wet etching apparatus. Furthermore, as the area of the non-transparent bonding pad on the semiconductor chip does not serve to make the light emission, the brightness of the resulting light-emitting device is limited.
- the size of the bonding pad should be reduced as much as possible. Accordingly, the bonding pad is locally formed at a predetermined region on the chip. However, with such a structure, the current flow is concentrated close to the bonding pad so that it is not uniformly distributed over the entire area of the chip. This deteriorates the device light emission efficiency.
- the flip chip package refers to the package where the chip is overturned, and attached to the substrate.
- the flip chip is manufactured through attaching a chip to a substrate with connection pads arranged corresponding to the input and output pads of the chip, and forming a protective layer thereon.
- a conductive bump is additionally formed on the bonding pad of the chip instead of the conventional wire bonding.
- the semiconductor device package includes a semiconductor chip mounted on a printed circuit board, an external electrode formed on the printed circuit board, a transparent electrode formed on the semiconductor chip such that it is connected to the external electrode to supply power to the semiconductor chip, and a molding resin formed on the transparent electrode.
- Fig. 1 is a sectional view of a semiconductor device package based on the wire bonding according to a prior art
- Fig. 2 is a sectional view of a semiconductor device package according to an embodiment of the present invention
- Fig. 3 is a sectional view of a semiconductor device package according to another embodiment of the present invention.
- Fig. 2 is a sectional view of a semiconductor device package according to an embodiment of the present invention.
- a semiconductor chip 13 is mounted on a printed circuit board 1 1 via an adhesive layer 12 based on a conductive resin, such as a silver paste.
- First and second external electrodes 17 and 18 are formed at the printed circuit board 11 to supply power to the semiconductor chip 13.
- a light emitting diode is mounted as the semiconductor chip 13.
- the LED has a p-n contact structure, and emits visible rays.
- the first external electrode 17 supplies power to the upper p layer of the p-n contact structure, and the second external electrode 18 supplies power to the lower n layer of the p-n contact structure.
- a transparent electrode 15 is formed on the semiconductor chip 13 while being connected to the first external electrode 17.
- the transparent electrode 15 is formed with a transparent conductive material, such as indium tin oxide (ITO), but it is not needed to limit the electrode material to the specific one. Furthermore, it is not needed to form the transparent electrode 15 only with the film shape.
- the transparent electrode 15 may be formed with a transparent conductive polymer material.
- a filler resin 14 may be formed at the lateral side of the semiconductor chip 13 with a non-conductive material to improve the insulating characteristic thereof.
- the filler resin 14 may be formed with a material capable of transmitting visible rays, ultraviolet rays or infrared rays, but not limited thereto.
- the filler resin 14 may be formed with a milk white-colored material.
- the filler resin 14 it is preferable to form the filler resin 14 at the lateral side of the semiconductor chip 13. However, it may be formed also at a predetermined region on the top of the semiconductor chip 13 close to the lateral side thereof during the formation process. With the formation of the filler resin 14, it is preferable to form the transparent electrode 15 on the top surface of the semiconductor chip 13 together with the filler resin 14.
- a molding resin 16 is formed on the top of the transparent electrode 15. In order to improve the brightness of the LED, it is preferable to form the molding resin 16 with a material capable of transmitting visible rays, ultraviolet rays or infrared rays.
- an adhesion-inducement layer may be formed at the interface between the transparent electrode 15 and the semiconductor chip 13 as well as at the interface between the transparent electrode 15 and the filler resin 14 to reinforce the adhesive force.
- Fig. 3 is a sectional view of a semiconductor device package according to another embodiment of the present invention. As different from the structure related to the previous embodiment of the present invention, the package involves plural numbers of semiconductor chips 23.
- a plurality of semiconductor chips 23 are mounted on the printed circuit board 21 via an adhesive layer 22 based on a conductive resin, such as a silver paste.
- a filler resin 24 is formed at the lateral side of the semiconductor chips with a non-conductive material to fill the space between the semiconductor chip neighbors 23.
- a transparent electrode 25 is formed on the filler resin 24 and the semiconductor chips 23.
- a reflector 27 may be installed between the semiconductor chips 23 to concentrate the light emitted from the chips 23.
- the filler resin 24 fills the space between the semiconductor chip neighbors 23 except for the reflector 27.
- the transparent electrode 25 is formed on the reflector 27, the filler resin 24, and the semiconductor chip 23.
- a semiconductor chip 13 is mounted onto a printed circuit board 11 via an adhesive layer 12 based on a conductive resin, such as a silver paste, and first and second external electrodes 17 and 18 are formed on the printed circuit board 11 to supply power to the semiconductor chip 13.
- a conductive resin such as a silver paste
- a light emitting diode (LED) is mounted as the semiconductor chip 13.
- the LED has a p-n contact structure, and emits visible rays.
- the first external electrode 17 supplies power to the upper p layer of the p-n contact structure, and the second external electrode 18 supplies power to the lower n layer of the p-n contact structure.
- the LED may radiate visible rays, ultraviolet rays, or infrared rays.
- a transparent electrode 15 is formed on the top of the semiconductor chip 13 such that it is connected to the first external electrode 17.
- the transparent electrode 15 may be formed using a sputtering technique, or other film formation techniques. Furthermore, it is not needed to form the transparent electrode 15 only with the film shape.
- the transparent electrode 15 may be formed with a transparent conductive polymer material.
- a filler resin 14 may be formed at the lateral side of the semiconductor chip 13 with a non-conductive material to improve the insulating characteristic thereof.
- the filler resin 14 may be formed with a material capable of transmitting visible rays, ultraviolet rays or infrared rays, and other suitable materials.
- the filler resin 14 may be formed with a milk white-colored material.
- the filler resin 14 is preferably formed at the lateral side of the semiconductor chip 13, it may be also formed at a predetermined region on the top of the semiconductor chip 13 close to the lateral side thereof during the formation process. With the formation of the filler resin 14, the transparent electrode 15 is formed on the filler resin 14 and the semiconductor chip 13.
- a molding resin 16 is formed on the top of the transparent electrode 15, thereby completing the package. It is preferable to form the molding resin 16 with a material capable of transmitting visible rays, ultraviolet rays or infrared rays. Furthermore, an adhesion-inducement layer (not shown) may be formed at the interface between the transparent electrode 15 and the semiconductor chip 13 as well as at the interface between the transparent electrode 15 and the filler resin 14 to reinforce the adhesive force.
- a plurality of semiconductor chips 23 are mounted on the printed circuit board 21 via an adhesive layer 22 based on a conductive resin, such as a silver paste.
- a filler resin 24 is formed at the lateral side of the semiconductor chips with a non-conductive material to fill the space between the semiconductor chip neighbors 23.
- a transparent electrode 25 is formed on the filler resin 24 and the semiconductor chips 23.
- a reflector 27 is installed between the semiconductor chips 23 to concentrate the light emitted from the chips 23.
- the filler resin 24 fills the space between the semiconductor chip neighbors 23 except for the reflector 27. It is preferable that the transparent electrode 25 is formed on the reflector 27, the filler resin 24, and the semiconductor chip 23.
- the photolithography process for forming a bonding pad in a separate manner is omitted with the inventive package fabricating method.
- a transparent electrode is formed on the chip, it is not required to form a separate bonding pad, that is, to separately perform the photolithography process.
- the overall process is simplified while reducing the processing time and cost.
- the transparent electrode is formed at the entire area of the chip, the brightness of the LED is enhanced compared to the conventional case where the non-transparent bonding pad takes a local region on the semiconductor chip so that the brightness thereof is deteriorated.
- the light emission efficiency of the device is enhanced.
- the package can be effectively minimized.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Led Device Packages (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2003-0008966 | 2003-02-13 | ||
KR10-2003-0008966A KR100523803B1 (ko) | 2003-02-13 | 2003-02-13 | 반도체 소자의 패키지 및 그 제조 방법 |
Publications (1)
Publication Number | Publication Date |
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WO2004073075A1 true WO2004073075A1 (fr) | 2004-08-26 |
Family
ID=32866884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/KR2004/000297 WO2004073075A1 (fr) | 2003-02-13 | 2004-02-13 | Dispositif a semi-conducteur encapsule et son procede de fabrication |
Country Status (2)
Country | Link |
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KR (1) | KR100523803B1 (fr) |
WO (1) | WO2004073075A1 (fr) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007008524A1 (de) * | 2007-02-21 | 2008-08-28 | Osram Opto Semiconductors Gmbh | Strahlung emittierender Chip mit mindestens einem Halbleiterkörper |
WO2012013435A1 (fr) * | 2010-07-28 | 2012-02-02 | Osram Opto Semiconductors Gmbh | Élément semi-conducteur émetteur de lumière et procédé de fabrication d'un élément semi-conducteur émetteur de lumière |
JP2013125816A (ja) * | 2011-12-14 | 2013-06-24 | Toshiba Corp | 半導体発光素子 |
EP2362449A3 (fr) * | 2010-02-18 | 2014-09-17 | LG Innotek Co., Ltd. | Structures d'électrode pour un dispositif électroluminescent et emballage correspondant |
DE102015107591A1 (de) * | 2015-05-13 | 2016-11-17 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauteil und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils |
US9537056B2 (en) | 2010-02-18 | 2017-01-03 | Lg Innotek Co., Ltd. | Light emitting device |
WO2021245344A1 (fr) * | 2020-06-04 | 2021-12-09 | Aledia | Dispositif optoélectronique pour affichage lumineux à parois de confinement lumineux conductrices et procédé de fabrication correspondant |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100878327B1 (ko) * | 2007-07-06 | 2009-01-14 | 한국광기술원 | 웨이퍼레벨 패키징된 발광다이오드 및 그의 제조 방법 |
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JPH10162953A (ja) * | 1996-12-03 | 1998-06-19 | Hokuriku Electric Ind Co Ltd | チップ型電界発光素子 |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI514612B (zh) * | 2007-02-21 | 2015-12-21 | Osram Opto Semiconductors Gmbh | 具有至少一個半導體晶粒之輻射發出晶片 |
US8067783B2 (en) | 2007-02-21 | 2011-11-29 | Osram Opto Semiconductors Gmbh | Radiation-emitting chip comprising at least one semiconductor body |
DE102007008524A1 (de) * | 2007-02-21 | 2008-08-28 | Osram Opto Semiconductors Gmbh | Strahlung emittierender Chip mit mindestens einem Halbleiterkörper |
EP2362449A3 (fr) * | 2010-02-18 | 2014-09-17 | LG Innotek Co., Ltd. | Structures d'électrode pour un dispositif électroluminescent et emballage correspondant |
US9537056B2 (en) | 2010-02-18 | 2017-01-03 | Lg Innotek Co., Ltd. | Light emitting device |
WO2012013435A1 (fr) * | 2010-07-28 | 2012-02-02 | Osram Opto Semiconductors Gmbh | Élément semi-conducteur émetteur de lumière et procédé de fabrication d'un élément semi-conducteur émetteur de lumière |
JP2013125816A (ja) * | 2011-12-14 | 2013-06-24 | Toshiba Corp | 半導体発光素子 |
US9076924B2 (en) | 2011-12-14 | 2015-07-07 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
DE102015107591A1 (de) * | 2015-05-13 | 2016-11-17 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauteil und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils |
US20180108695A1 (en) | 2015-05-13 | 2018-04-19 | Osram Opto Semiconductors Gmbh | Optoelectronic semiconductor component and method for producing an optoelectronic semiconductor component |
US10381391B2 (en) | 2015-05-13 | 2019-08-13 | Osram Opto Semiconductors Gmbh | Optoelectronic semiconductor component and method for producing an optoelectronic semiconductor component |
DE102015107591B4 (de) | 2015-05-13 | 2021-09-02 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Halbleiterbauteil und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils |
WO2021245344A1 (fr) * | 2020-06-04 | 2021-12-09 | Aledia | Dispositif optoélectronique pour affichage lumineux à parois de confinement lumineux conductrices et procédé de fabrication correspondant |
FR3111235A1 (fr) * | 2020-06-04 | 2021-12-10 | Aledia | Dispositif optoélectronique pour affichage lumineux à parois de confinement lumineux conductrices et procédé de fabrication |
Also Published As
Publication number | Publication date |
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KR100523803B1 (ko) | 2005-10-25 |
KR20040073040A (ko) | 2004-08-19 |
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