WO2004005902A1 - Procede de mesure optique et dispositif a cet effet - Google Patents

Procede de mesure optique et dispositif a cet effet Download PDF

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Publication number
WO2004005902A1
WO2004005902A1 PCT/JP2003/008675 JP0308675W WO2004005902A1 WO 2004005902 A1 WO2004005902 A1 WO 2004005902A1 JP 0308675 W JP0308675 W JP 0308675W WO 2004005902 A1 WO2004005902 A1 WO 2004005902A1
Authority
WO
WIPO (PCT)
Prior art keywords
signal corresponding
light
back surface
transparent
front surface
Prior art date
Application number
PCT/JP2003/008675
Other languages
English (en)
Japanese (ja)
Inventor
Junichi Matsumura
Mutsumi Hayashi
Original Assignee
Toray Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co., Ltd. filed Critical Toray Engineering Co., Ltd.
Priority to KR1020057000344A priority Critical patent/KR100876257B1/ko
Publication of WO2004005902A1 publication Critical patent/WO2004005902A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube

Definitions

  • the present invention relates to an optical measurement method and an apparatus for measuring the state of the front and back surfaces of a transparent measurement object using laser light.
  • Scattered light from foreign matter adhering to the back surface of the glass substrate is imaged far ahead of the line sensor via the imaging optics, and slightly off the position where the line sensor waits. It is composed of For this reason, foreign matter adhering to the back surface is hardly detected.
  • a mechanism utilizing the basic properties of the optical system is employed, so that the inspection can be performed with high reliability and stability.
  • the optical measuring device described in Japanese Patent No. 26711241 irradiates a glass plate with a laser beam at a first incident angle.
  • a first laser light source for making the laser light incident on the glass plate at a second incidence and angle, and a condensing optical system for condensing light originating from each laser light.
  • the light receiving element receives the condensed light, and performs a predetermined process based on a signal from the light receiving element to detect a foreign substance on the inspection surface of the glass plate.
  • the scattered light is slightly applied when the size of the foreign matter attached to the back surface exceeds the size due to the characteristics of the optical system. Entering into the sensor .. Foreign matter adhering to the back side is detected and mixed together.
  • the irradiation of laser light by the first laser light source and the irradiation of laser light by the second laser light source are independent of each other.
  • the scanning time is doubled.
  • the influence of the saturation of the light receiving element makes it impossible to distinguish between the foreign matter on the front and the foreign matter on the back. Limits inevitably exist, and even with this method, foreign substances adhering to the back surface of a certain size or more are mixedly detected.
  • the present invention has been made in view of the above-described problems, and is transparent without increasing the scanning time, and can improve the measurement accuracy of the measurement target surface of the body. It is an object of the present invention to provide an optical measuring method and an apparatus capable of measuring the state of the backside as well. Summary of the Invention
  • the optical measurement method includes irradiating the surface of the transparent measurement object supported by the support member with a linear laser beam at a predetermined angle from obliquely above, so that the light from the surface of the transparent measurement object and The light from the back side is imaged on the light-receiving part of the detector, which has a corresponding linear light-receiving part by the imaging optics, and performs predetermined processing based on the signals output from both detectors.
  • This method selectively assigns one of the signal corresponding to the front surface and the symbol corresponding to the back surface, and displays the allocation signal corresponding to the front surface and the assignment signal corresponding to the back surface.
  • the optical measurement method of the present invention when the optical measurement method of the present invention is adopted, scanning using laser light only needs to be performed once. Without increasing the time required for scanning, the light from the front and back surfaces of the transparent object to be measured is imaged by the imaging optical system onto the light-receiving part of the corresponding detector, and the measurement object surface is measured. The measurement accuracy can be increased, and the condition of not only the front surface but also the back surface can be measured.
  • the optical measuring device of the present invention irradiates a linear member at a predetermined angle from obliquely above the surface of the transparent measuring object supported by the supporting member and the transparent measuring object supported by the supporting member.
  • Laser light irradiation means imaging optical system for imaging light from the front surface and light from the back surface of the transparent measurement object, and arranged corresponding to the imaging position of each light by the imaging optical system ,
  • a pair of light receiving means having a linear light receiving portion, and performing predetermined processing based on signals output from both light receiving means to selectively generate one of a signal corresponding to the front surface and a signal corresponding to the back surface.
  • the transparent measurement can be performed without increasing the scanning time due to the fact that scanning with laser light only needs to be performed once. Pairing the light from the front and back surfaces of the object with the imaging optical system to form an image on the light-receiving part of the corresponding detector can improve the measurement accuracy of the surface to be measured. It is possible to measure not only the front surface but also the rear surface condition r. '' Brief description of the drawings
  • FIG. 1 is a schematic diagram showing an embodiment of the optical measuring device of the present invention.
  • FIG. 2 is a view showing a result of inspecting a scattered surface of a glass plate on which sphere particles are intentionally scattered, and outputting the scattered particles as surface-attached foreign matter.
  • 'FIG. 3 is a diagram showing the result of inspecting the glass substrate of FIG. 2 on which the true spherical particles are intentionally scattered by turning the glass substrate upside down and turning over the glass substrate, and outputting the result as foreign matter adhering to the back surface.
  • FIG. 1 is a schematic view showing a foreign matter and an inspection device as one embodiment of the optical measurement device of the present invention.
  • This optical measuring device is composed of a transparent measuring object supported by a support mechanism (not shown) (for example, a thin substrate such as a glass substrate for a liquid crystal display device or a substrate with a transparent film for a flat panel display device).
  • a transparent measuring object supported by a support mechanism (not shown) (for example, a thin substrate such as a glass substrate for a liquid crystal display device or a substrate with a transparent film for a flat panel display device).
  • 'A laser light source 2 that irradiates a line beam at a predetermined angle of incidence on the surface of 1, and surface scattered light and back surface scatter generated from the front and back surfaces of the transparent measurement object 1 due to the irradiated line beam
  • the surface measurement data holding unit 7 for holding and generates a two-dimensional optical measurement data corresponding to the surface of the object 1, back -The output signal from the surface light sensor 6 and the operation information of the support
  • the backside measurement data holding unit 8 that holds and stores two-dimensional optical measurement and constant data corresponding to the backside of the object 1, and the optical measurement data held in the frontside measurement data holding unit 7.
  • the front and back judgment processing is performed by inputting the optical measurement data held in the backside measurement data holding section 8 and the front side data corresponding to only the front side of the transparent measurement target 1 and the back side corresponding to only the back side It has a front and back data generation and holding unit 9 that generates and holds data, and a display unit 10 that displays only based on the front surface data and a display unit that displays based only on the back surface data.
  • An encoder that outputs a signal indicating the position of the transparent measurement target 1, and 12 is a control signal and a control signal from a stage operation control unit (included in the measurement data holding unit 7 for the surface in this embodiment).
  • the signal from the Zen coder 1 1 is input.
  • a stage con preparative roller for outputting an operation command with respect to the support mechanism.
  • the laser light source 2 irradiates the surface of the transparent measurement object 1 with a line beam at an incident angle of 45 ° or more and less than 90 °, preferably an incident angle of 0 °.
  • the laser light emitted from the laser light source 2 is preferably S-polarized light and has a wavelength of 400 to 120011 m, and preferably 800 nm.
  • the width of the line beam is preferably set to be equal to the width of the visual field of the front light sensor 5 and the back light sensor 6.
  • the imaging optical system 3 only needs to have a depth of focus smaller than the thickness of the transparent measurement target 1, and preferably has a depth of focus of 12 or less of the thickness of the transparent measurement target 1. In addition, it is preferable that the swell of the transparent measuring object 1 is set to a depth of focus or less.
  • the positions of the front-surface light sensor 5 and the back-surface light sensor 6 depend on the refractive index, thickness, incident angle of laser light, wavelength, etc. of the transparent measuring object 1. In consideration of the position offset value (deviation amount) determined by this method, the position is set to the same position as the position where the front and back surfaces of the transparent and bright measurement object 1 are imaged.
  • the front-side measurement data holding unit 7 and the back-side measurement data holding unit 8 receive signals from the front-side light sensor 5 and the back-side light sensor 6 and the movement data of the transparent measurement target 1 as inputs and correspond to the signals. In this case, two-dimensional optical measurement data corresponding to the front surface and the back surface of the transparent measurement target 1 are generated and held in consideration of the offset value.
  • the front / back data generation / holding unit 9 is an optical measurement corresponding to the same position among the two-dimensional optical measurement data held in the front side measurement 'data holding unit 7 and the back side measurement data holding unit 8. It is determined which optical measurement data to use based on the relationship between the data, and based on this determination result, only the front surface data corresponding to the front surface of the transparent measurement target 1 and the back surface only are supported. It generates and holds backside data.
  • the optical measurement data held in the front-side measurement data holding unit 7 corresponding to the same position is A
  • the optical measurement data held in the back-side measurement data holding unit 8 If the experimental measurement data is B, the output signals of A and B to be handled are both unknown at this time, but become the scattered light intensity signal from the foreign matter attached to either the front surface or the back surface.
  • the surface data corresponding to only the surface of the transparent measurement target 1 if A> kB
  • the data is the data of the foreign matter attached to the front surface
  • the data is the back surface data corresponding to only the back surface of the transparent measurement target 1, that is, the data of the foreign material attached to the back surface.
  • k is a value determined from the intensity ratio between the light from the front surface and the light from the back surface of the transparent measurement object 1, the optical imaging characteristics of the imaging optical system, the depth of focus, and the like.
  • the light intensity from the back surface is about 1/1 of the light intensity from the front surface.
  • k becomes larger than about 2.
  • the operation of the optical measuring device having the above configuration is as follows.
  • the line beam When a line beam is irradiated from the laser light source 2 to the surface of the transparent measuring object 1 at a predetermined incident angle, the line beam refracts based on Snell's law and penetrates into the transparent measuring object 1. It is emitted from the back side. Therefore, the irradiation position of the line beam on the front side of the transparent measurement target 1 and the emission position from the back side are different from each other with reference to the optical axis of the imaging optical system 3, and ideally, the transparent measurement target.
  • the sensor placed at the image formation position of light (scattered light, etc.) from the irradiation position on the front surface is insensitive to light (scattered light, etc.) from the emission position on the back surface of the transparent measurement target 1 (this The light is received by a sensor arranged at the position where the light is focused on the rear surface of the transparent measurement target 1 from the irradiation position).
  • this portion does not affect the sensor.
  • the transparent measurement object 1 When the transparent measurement object 1 is scanned by the line beam from the laser light source 2, light from the line beam incident position of the transparent measurement object 1 is transmitted to the surface by the imaging optical system 3 and through the half mirror 4. An image is formed on the light receiving surface of the optical sensor 5. In addition, although the amount of light is greatly reduced, light from the back surface facing the line beam incident position is received by the imaging optical system 3 and through the half mirror 4, but the depth of focus is transparent. Since it is smaller than the thickness of 1, it becomes out of focus.
  • the line beam is guided to the back surface of the transparent measurement object 1 according to Snell's law and is emitted as it is. Therefore, the back side position directly opposite the line beam incident position and the line beam The position of the back surface to be cut differs from each other. As a result, light from the rear surface position where the light beam is guided is reflected by the imaging optical system 3 and by the half mirror 14 to form an image on the light receiving surface of the rear light sensor 6. .
  • the optical sensor 6 outputs a signal indicating that no foreign matter is present.
  • the output signals of the front-surface light sensor 5 and the back-surface light sensor 6 increase as the size of the foreign matter increases. And the increase in the output signal 'is quite steep at first (the effect of the change in brightness is greater than the effect of the change in image size). In addition, after the influence of the change in luminance is almost eliminated, the output signal gradually increases under the influence of the change in the image size. Therefore, an output signal suitable for the size of the foreign object can be obtained without causing saturation of the output signal. As a result, the presence of foreign matter and its size determination can be made favorable.
  • the signals from the front light sensor 5 and the back light sensor 6 and the movement data of the transparent measuring object 1 are input and, if applicable, the position offset value is taken into account.
  • the measurement data holding unit 7 for the front surface and the measurement data holding unit for the back surface The unit 8 generates two-dimensional optical measurement data respectively corresponding to the front surface and the back surface of the transparent measurement target 1. Hold. Therefore, the front surface measurement data holding unit 7 and the back surface / surface measurement data holding unit 8 hold the front surface measurement data and the back surface measurement data corresponding to the same position.
  • the front and back data generation and holding unit 9 compares the measurement data for the front surface and the measurement data for the back surface corresponding to the same position stored in the measurement data holding unit for front surface 7 and the measurement data holding unit 8 for back surface. Then, which optical measurement data is to be adopted is determined, and based on this determination result, front surface data corresponding only to the front surface of the transparent measurement target 1 and back surface data corresponding only to the back surface are generated. Hold.
  • the display unit 10 can perform a display based on only the front surface data and a display based on only the back surface data.
  • the presence / absence, position, and size of the foreign matter adhering to the back surface can be obtained from the back surface data.
  • only one scan by the laser light source 2 can be used to obtain front surface data corresponding to only the front surface of the transparent measurement target 1 and back surface data corresponding only to the back surface, thereby reducing the required time. You can.
  • the necessity of the front / back separation processing is set. Specifically, for example, when the inspection target is a transparent glass substrate, the front and back separation processing is necessary, and when the inspection target is an opaque substrate, the front and back separation processing is unnecessary. In the latter case, only the inspection result by the table inspection camera is significant, so that the same processing as in the past can be performed (detailed description is omitted).
  • the offset amount of inspection results C and D is corrected.
  • a correction amount for performing this correction it is possible to prepare in advance so that a predetermined value can be set, and the offset deviation is corrected using the predetermined value. Since this correction process is conventionally known, a detailed description will be omitted.
  • a foreign substance existing at the same coordinates is recognized based on the position coordinates of the detection results C and D in which the offset deviation has been corrected.
  • tolerance parameters (0.01 to 5: 00 mm) are set for the same coordinate determination, and foreign objects within this distance are identified. If there are a plurality of foreign substances within this distance, only the closer one is identified.
  • the foreign substance information group of C is represented by C & D
  • the foreign substance information group of D is represented by D & C.
  • C-D from which C & D is removed is denoted by C-D
  • D-C from which .D is removed is denoted by D-C.
  • the magnitudes of the detected values are compared for each identified foreign substance.
  • a value multiplied by a predetermined coefficient k is adopted.
  • the coefficient k is a value in the range of 0.:! To 10.0, and is preferably set based on, for example, an actual measurement result.
  • the default value of the coefficient k (e.g., 2.0) preferred to have set arbitrary 0
  • the surface data found by the back inspection camera is (D & C) & (D> k C)
  • FIG. 2 is a diagram showing a result of inspecting a scattered surface of a glass substrate on which sphere particles are intentionally scattered, and outputting the scattered particles as surface-attached foreign matter.
  • the left side is the foreign matter map
  • the periphery is the entire surface of the glass substrate
  • the white square area is the inspection area
  • the gray partial force S is the non-inspection area.
  • the small dots indicate the presence of foreign matter.
  • the histogram (frequency distribution) is shown on the upper right side in FIG. 2, where the horizontal axis represents the size of the foreign substance and the vertical axis represents the number of foreign substances of that size.
  • the lower right in FIG. 2 shows the number of foreign substances and the total number of foreign substances for each of the S, M, and L size classifications. As can be seen from these, about 10,000 foreign substances were detected.
  • Fig. 3 shows the glass substrate of Fig. 2 that is intentionally scattered as spherical particles. It is a figure showing the result of having done.
  • the left side is the foreign matter map
  • the periphery represents the entire surface of the glass substrate
  • the white square region represents the inspection region
  • the gray peripheral portion represents the non-inspection region.
  • the small dots indicate the presence of foreign matter.
  • the histogram (frequency distribution) is shown on the upper right side in FIG. 3, where the horizontal axis represents the size of foreign substances and the vertical axis represents the number of foreign substances of that size. From this histogram, it can be seen that many foreign substances having a size almost in the middle of the horizontal axis are present on the surface of the glass substrate. .. These foreign particles are dispersed particles.
  • the lower right in FIG. 3 shows the number of foreign particles and the total number of foreign particles for each of the S, M, and L size classifications. As can be seen from these, about 10,000 foreign substances were detected.
  • the present invention can be applied to the detection of a defect such as a scratch or a chip on the front and back of a transparent substrate.
  • the present invention can also be applied to the case of detecting the roughness of the front and back surfaces of a substrate.
  • the present invention can be applied to the case of measuring a micropatterned pattern on the front and back of a transparent substrate, and to inspect the pattern.
  • any pattern that allows light transmission for example, a pattern made of a remarkably thin metal thin film formed on a transparent substrate

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un dispositif de mesure optique comprenant : une section (7) de conservation de données de mesure de surface avant qui permet de créer et conserver des données de mesure optique bidimensionnelles correspondant à la surface avant d'un objet de mesure transparent (1) en appliquant un faisceau linéaire à la surface de l'objet (1) selon un angle prédéterminé, un capteur de lumière de surface avant (5) et un capteur de lumière de surface arrière (6) recevant, respectivement, la lumière de la surface avant et la lumière de la surface arrière produites sur les surfaces avant et arrière de l'objet (1), et un mécanisme de support recevant le signal de sortie en provenance du capteur de lumière de surface avant (5) et des informations relatives au fonctionnement ; une section (8) de conservation de données de mesure de surface arrière qui permet de créer et conserver des données de mesure optique bidimensionnelles correspondant à la surface arrière de l'objet (1) en recevant le signal de sortie en provenance du capteur de lumière de surface arrière (6) et des informations relatives au fonctionnement sur le mécanisme de support ; et une section (9) de création et conservation de données de surface avant et arrière qui permet de créer et conserver des données de surface avant et des données de surface arrière de l'objet (1) en recevant les données de mesure optique bidimensionnelles de surface avant et les données de mesure optique bidimensionnelles de surface arrière et en procédant à un jugement avant et arrière. L'invention permet, sans augmenter le temps de balayage, d'améliorer l'exactitude de la détection d'une matière étrangère sur la surface soumise à la détection et de détecter tant l'état de la surface arrière que celui de la surface avant.
PCT/JP2003/008675 2002-07-08 2003-07-08 Procede de mesure optique et dispositif a cet effet WO2004005902A1 (fr)

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Application Number Priority Date Filing Date Title
KR1020057000344A KR100876257B1 (ko) 2002-07-08 2003-07-08 광학적 측정 방법 및 그 장치

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JP2002-198074 2002-07-08
JP2002198074A JP4104924B2 (ja) 2002-07-08 2002-07-08 光学的測定方法およびその装置

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CN (1) CN100570342C (fr)
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WO2005006779A3 (fr) * 2003-06-30 2006-02-09 Motorola Inc Rapport signal sur interference non fausse dans des dispositifs de communication radio et procedes correspondants
US7929129B2 (en) 2009-05-22 2011-04-19 Corning Incorporated Inspection systems for glass sheets

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JP5082552B2 (ja) * 2007-04-05 2012-11-28 コニカミノルタホールディングス株式会社 光学的測定装置及び光学的測定方法
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
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DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置
KR20150056713A (ko) 2013-11-15 2015-05-27 삼성전자주식회사 영상표시장치의 비파괴 검사 시스템 및 방법과 이를 위한 비파괴 검사 장치
JP6385472B2 (ja) * 2014-06-17 2018-09-05 ヘレーウス クオーツ ノース アメリカ エルエルシーＨｅｒａｅｕｓ Ｑｕａｒｔｚ Ｎｏｒｔｈ Ａｍｅｒｉｃａ ＬＬＣ 透明な円柱状製品を測定するための装置および方法
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JP2018128326A (ja) * 2017-02-07 2018-08-16 大塚電子株式会社 光学スペクトル測定装置および光学スペクトル測定方法
CN107764841B (zh) * 2017-11-17 2024-03-01 仝人智能科技(江苏)有限公司 一种检测并区分透明玻璃盖板上下表面缺陷的装置及方法
KR102580487B1 (ko) * 2018-06-18 2023-09-21 주식회사 케이씨텍 패드 모니터링 장치 및 이를 포함하는 패드 모니터링 시스템, 패드 모니터링 방법

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CN100570342C (zh) 2009-12-16
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JP4104924B2 (ja) 2008-06-18
KR100876257B1 (ko) 2008-12-26

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