WO2001060534A1 - Dispositif et procede de nettoyage de precision de pieces - Google Patents

Dispositif et procede de nettoyage de precision de pieces Download PDF

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Publication number
WO2001060534A1
WO2001060534A1 PCT/IB2001/000148 IB0100148W WO0160534A1 WO 2001060534 A1 WO2001060534 A1 WO 2001060534A1 IB 0100148 W IB0100148 W IB 0100148W WO 0160534 A1 WO0160534 A1 WO 0160534A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
solvent
pieces
container
rotation
Prior art date
Application number
PCT/IB2001/000148
Other languages
German (de)
English (en)
Inventor
Philipp Widmer
Carlo Devittori
Original Assignee
Eco2 Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eco2 Sa filed Critical Eco2 Sa
Priority to EP01953012A priority Critical patent/EP1255621B1/fr
Priority to AU2001228744A priority patent/AU2001228744A1/en
Priority to DE50107279T priority patent/DE50107279D1/de
Publication of WO2001060534A1 publication Critical patent/WO2001060534A1/fr

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/06Cleaning involving contact with liquid using perforated drums in which the article or material is placed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Definitions

  • the present invention relates to the precision cleaning of high-tech products of precision, micro and nano mechanics, electronics, the ceramic industry, cermets, polymers, textile fibers, etc.
  • the precision cleaning process nowadays use organic solvents, especially chlorinated organic solvents such as trichlorethylene and perchlorethylene, chlorofluorocarbides or detergents or surfactants in the water phase.
  • chlorinated organic solvents and freons has recently been criticized, if not prohibited, because they have been classified as harmful to health and the stratospheric ozone layer is destructive.
  • the water phases pose serious problems in terms of final quality because they are difficult to completely eliminate, especially from capillary lines and holes, due to the low vapor pressure of the water and its relatively high viscosity in the liquid state. They also create dirty waters that require complex and costly cleaning processes.
  • all of these methods hardly allow the recovery of contaminating substances that could be reused, in particular like the cutting oils used in mechanical processing.
  • This solvent as well as nitrogen protoxide, ethane, etc., can have a good dissolving action in the liquid phase, but they increase their dissolving action in the vapor phase, especially in areas which are difficult to access, owing to the greater diffusibility and lower viscosity that they reach in the gas state.
  • the supercritical state temperature higher than the critical one and pressure also higher than the critical one
  • the combination of both properties (low viscosity and high density) makes them ideal solvents for precision cleaning processes, which must guarantee a high degree of cleaning in every point of the surface and in the hard-to-reach areas.
  • solvents have proven to be particularly effective for non-polar or slightly polar contaminants; polar organic substances such as additives to cutting oils, salts, abrasives and metals are not noticeably soluble in solvents that are suitable for cleaning in the supercritical phase. Such residues remaining in the solid phase on the surfaces to be cleaned by adhesion or adsorption must be removed from them by physical means: for this purpose, the effectiveness of the cavitation is recognized, which occurs over the surfaces immersed in a liquid through which ultrasound waves propagate.
  • the propagation of the ultrasonic waves in the autoclave is effected by generators located inside the chamber.
  • the mechanical removal of the solid particles and liquids is accomplished by valves located at the entrance of the solvent to create turbulence, or by creating bubbles such that the solvent is kept at a temperature near the boiling point, or by another movement of the liquid solvent caused by propellers or solid elements.
  • fixed or movable brushes are still used for the load.
  • Fig. 1 is a schematic representation of an embodiment of the invention.
  • the invention relates to an apparatus and a method for the precision cleaning of surfaces with complex shapes by using inert liquid or supercritical fluids as solvents, namely supported by irradiation of the surfaces to be cleaned with ultrasonic waves and by the resulting cavitation in a programmed movement of the pieces to be cleaned.
  • the dissolving action of the liquid and / or supercritical fluid removes the soluble or solid contaminating substances from the surfaces.
  • the cavitation effect separates the solid, insoluble particles, such as adhesive metallic particles, dust resulting from the abrasives, the organic and inorganic additives, etc., from the surface and then removes them in suspension by the fluid flow.
  • This drum may or may not be provided with central axes. In it the pieces are free to move with respect to the wall of the drum.
  • the bases and the outer surface of the drum are designed in the form of gratings that allow the passage of the ultrasonic waves and at the same time the solid heavy particles that separate from the surface of the pieces.
  • the return of the pieces is also facilitated by the fact that they are located inside a drum which is inserted into the chamber at the beginning and removed at the end.
  • the removal of the solid parts in suspension is also facilitated by the movement which frees them.
  • the possibility of modulating the speed of rotation of the drum allows the mechanical friction between the pieces to be metered in order to avoid damage.
  • rotation speeds of 1 to 100 revolutions per minute can be provided for 10 to 20 minutes with 1 or 2 changes of rotation.
  • the power provided is generally of the order of 1000 W and the frequency between 10 and 2000 kHz depending on the dimensions of the solid particles to be rubbed off the surface of the pieces.
  • the device consists of an autoclave 1, in which the drum 2 is inserted, in which the pieces 3 are located, which are to be subjected to the precision cleaning process.
  • the drum is driven by the motor 4 via an axis 5.
  • Ultrasonic transducers 6 are arranged on the outer cylindrical surface 11 of the autoclave 1, one over the entire inside of the wall
  • the fluid can be transported in the autoclave 1 after preheating or at room temperature via the inlet 7 and can also be cooled by evaporation via the outlet 8 and 9. Excessive cooling of the chamber during the depression phase can be avoided by introducing an inert gas at a suitable pressure through the inlet 10.
  • Temperatures, alternation and duration of the cleaning cycles in the liquid and supercritical phase, the movements of the drum 2 with the pieces to be cleaned 3 (sense of rotation, change of direction, times and speed), pressure and amount of the solvent are by a computer (not in 1) and regulates a specific program.
  • Both the detached substances in the liquid or mainly supercritical phase, as well as the solid particles in suspension are conveyed out of the chamber by a fluid flow.
  • Another embodiment of the invention is characterized in that the container 2 is rotatable in both directions of rotation, and that the possibility consists of changing the direction of rotation and / or the speed of rotation. This is preferably done in a programmed form.
  • the device according to the invention can also be provided with blades arranged on the inner wall of the container 2 or on an axis in order to enable a guided movement of the pieces 3.
  • the ultrasonic transducers 6 can be arranged on the outer wall 11 of the chamber 1, preferably on the one with the larger extension.
  • the inlet 7 for the solvent can be at the lowest point inside the chamber 1 and the outlet 9 at the highest point. Furthermore, an outlet 8 for the solvent can be located in the lowest point of the chamber 1, this preferably being in a position opposite the inlet 7. At the highest point of the chamber 1, preferably in an area opposite the outlet 9, there can be another inlet 10 which is provided for a gas, preferably an inert gas such as nitrogen, argon or helium.
  • a gas preferably an inert gas such as nitrogen, argon or helium.
  • the method for precision cleaning with the aid of the described device is characterized in that the pieces 3 to be cleaned are exposed to a preferably continuous flow of a fluidic solvent and / or an ultrasound energy from a stationary source 6, the pieces 3 being characterized by Movement of the container 2 can be moved.
  • a further embodiment of the method is characterized in that a solvent at a critical temperature between -70 ° and 700 ° and a critical pressure between 1 and 700 bar, preferably carbon dioxide, propane, ethane, water or nitrogen protoxide, optionally supported by a co-solvent, preferably water or an organic solvent such as preferably an alcohol, an ester, an ether or a surfactant is used, which can be pure or dissolved in said co-solvent.
  • a solvent at a critical temperature between -70 ° and 700 ° and a critical pressure between 1 and 700 bar preferably carbon dioxide, propane, ethane, water or nitrogen protoxide, optionally supported by a co-solvent, preferably water or an organic solvent such as preferably an alcohol, an ester, an ether or a surfactant is used, which can be pure or dissolved in said co-solvent.
  • a solvent at a critical temperature between -70 ° and 700 ° and a critical pressure between 1 and 700 bar preferably carbon dioxide
  • the use of ultrasound waves programmed with regard to duration, intensity and / or frequency causes a cavitation effect on the surfaces of the pieces 3 to be cleaned.

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

Dispositif et procédé permettant le nettoyage de précision de surfaces de pièces (3) en métal, en céramique ou en polymère. Ledit procédé consiste à exposer les pièces qui sont déplacées selon un mouvement programmé à l'action solvante d'un flux de fluide se trouvant alternativement à l'état liquide et à l'état supercritique. L'action d'ondes ultrasonores qui sont produites par des transducteurs (6) situés à l'extérieur de la chambre de nettoyage (1) provoque la cavitation.
PCT/IB2001/000148 2000-02-18 2001-02-06 Dispositif et procede de nettoyage de precision de pieces WO2001060534A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01953012A EP1255621B1 (fr) 2000-02-18 2001-02-06 Autoclave pour le nettoyage de precision de pieces et utilisation de cet autoclave
AU2001228744A AU2001228744A1 (en) 2000-02-18 2001-02-06 Device and method for the precision cleaning of objects
DE50107279T DE50107279D1 (de) 2000-02-18 2001-02-06 Autoklav zur präzisionsreinigung von stücken und verwendung des autoklavs

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH0312/00 2000-02-18
CH3122000 2000-02-18

Publications (1)

Publication Number Publication Date
WO2001060534A1 true WO2001060534A1 (fr) 2001-08-23

Family

ID=4494778

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2001/000148 WO2001060534A1 (fr) 2000-02-18 2001-02-06 Dispositif et procede de nettoyage de precision de pieces

Country Status (4)

Country Link
EP (1) EP1255621B1 (fr)
AU (1) AU2001228744A1 (fr)
DE (1) DE50107279D1 (fr)
WO (1) WO2001060534A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846380B2 (en) 2002-06-13 2005-01-25 The Boc Group, Inc. Substrate processing apparatus and related systems and methods
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems
US7211553B2 (en) 2003-08-05 2007-05-01 Air Products And Chemicals, Inc. Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
WO2012142479A1 (fr) * 2011-04-15 2012-10-18 W.L. Gore & Associates, Inc. Méthode de réduction des frottements entre les composants d'une seringue
US8722178B2 (en) 2009-10-29 2014-05-13 W. L. Gore & Associates, Inc. Syringe stopper
US9597458B2 (en) 2009-10-29 2017-03-21 W. L. Gore & Associates, Inc. Fluoropolymer barrier materials for containers
DE102015222247A1 (de) * 2015-11-11 2017-05-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Bearbeiten von Kapillarrohren
US10471212B2 (en) 2009-10-29 2019-11-12 W. L. Gore & Associates, Inc. Silicone free drug delivery devices
US11612697B2 (en) 2010-10-29 2023-03-28 W. L. Gore & Associates, Inc. Non-fluoropolymer tie layer and fluoropolymer barrier layer

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1961900A1 (de) * 1968-12-31 1970-07-16 Boliden Ab Verfahren zur chlorierenden Roestung bei niedrigen Temperaturen von in Roestprodukten vorhandenen Nichteisenmetallen und deren Auslaugen und Rueckgewinnung
US4922939A (en) * 1988-02-01 1990-05-08 Henry Adamczyk Dental cleaning apparatus
US5759209A (en) * 1995-03-16 1998-06-02 Linde Aktiengesellschaft Cleaning with liquid gases
US5858107A (en) * 1998-01-07 1999-01-12 Raytheon Company Liquid carbon dioxide cleaning using jet edge sonic whistles at low temperature
EP0893166A1 (fr) * 1996-09-25 1999-01-27 Shuzurifuresher Kaihatsukyodokumiai Systeme de lavage utilisant un gaz liquefie de haute densite
EP0894542A1 (fr) * 1991-10-04 1999-02-03 Cfmt, Inc. Nettoyage minutieux de micropièces de configuration complexe
DE19741836A1 (de) * 1997-09-23 1999-03-25 Bosch Gmbh Robert Reinigungsvorrichtung
US5944996A (en) * 1995-11-03 1999-08-31 The University Of North Carolina At Chapel Hill Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1961900A1 (de) * 1968-12-31 1970-07-16 Boliden Ab Verfahren zur chlorierenden Roestung bei niedrigen Temperaturen von in Roestprodukten vorhandenen Nichteisenmetallen und deren Auslaugen und Rueckgewinnung
US4922939A (en) * 1988-02-01 1990-05-08 Henry Adamczyk Dental cleaning apparatus
EP0894542A1 (fr) * 1991-10-04 1999-02-03 Cfmt, Inc. Nettoyage minutieux de micropièces de configuration complexe
US5759209A (en) * 1995-03-16 1998-06-02 Linde Aktiengesellschaft Cleaning with liquid gases
US5944996A (en) * 1995-11-03 1999-08-31 The University Of North Carolina At Chapel Hill Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
EP0893166A1 (fr) * 1996-09-25 1999-01-27 Shuzurifuresher Kaihatsukyodokumiai Systeme de lavage utilisant un gaz liquefie de haute densite
DE19741836A1 (de) * 1997-09-23 1999-03-25 Bosch Gmbh Robert Reinigungsvorrichtung
US5858107A (en) * 1998-01-07 1999-01-12 Raytheon Company Liquid carbon dioxide cleaning using jet edge sonic whistles at low temperature

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846380B2 (en) 2002-06-13 2005-01-25 The Boc Group, Inc. Substrate processing apparatus and related systems and methods
US7267727B2 (en) 2002-09-24 2007-09-11 Air Products And Chemicals, Inc. Processing of semiconductor components with dense processing fluids and ultrasonic energy
US7211553B2 (en) 2003-08-05 2007-05-01 Air Products And Chemicals, Inc. Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
US7195676B2 (en) 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems
US10471212B2 (en) 2009-10-29 2019-11-12 W. L. Gore & Associates, Inc. Silicone free drug delivery devices
US8722178B2 (en) 2009-10-29 2014-05-13 W. L. Gore & Associates, Inc. Syringe stopper
US11654241B2 (en) 2009-10-29 2023-05-23 W. L. Gore & Associates, Inc. Fluoropolymer barrier material for containers
US9597458B2 (en) 2009-10-29 2017-03-21 W. L. Gore & Associates, Inc. Fluoropolymer barrier materials for containers
US11020531B2 (en) 2009-10-29 2021-06-01 W. L. Gore & Associates, Inc. Silicone free drug delivery devices
US10478563B2 (en) 2009-10-29 2019-11-19 W. L. Gore & Associates, Inc. Fluoropolymer barrier materials for containers
US11612697B2 (en) 2010-10-29 2023-03-28 W. L. Gore & Associates, Inc. Non-fluoropolymer tie layer and fluoropolymer barrier layer
WO2012142479A1 (fr) * 2011-04-15 2012-10-18 W.L. Gore & Associates, Inc. Méthode de réduction des frottements entre les composants d'une seringue
EP3560535A1 (fr) * 2011-04-15 2019-10-30 W. L. Gore & Associates, Inc. Procédé de réduction de la friction entre des composants de seringue
US9539394B2 (en) 2011-04-15 2017-01-10 W. L. Gore & Associates, Inc. Method of reducing friction between syringe components
DE102015222247B4 (de) * 2015-11-11 2017-10-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Bearbeiten von Kapillarrohren
DE102015222247A1 (de) * 2015-11-11 2017-05-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Bearbeiten von Kapillarrohren

Also Published As

Publication number Publication date
EP1255621B1 (fr) 2005-08-31
EP1255621A1 (fr) 2002-11-13
DE50107279D1 (de) 2005-10-06
AU2001228744A1 (en) 2001-08-27

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