WO2000052235A1 - Procede de production d'un monocristal de silicium - Google Patents
Procede de production d'un monocristal de silicium Download PDFInfo
- Publication number
- WO2000052235A1 WO2000052235A1 PCT/JP2000/001037 JP0001037W WO0052235A1 WO 2000052235 A1 WO2000052235 A1 WO 2000052235A1 JP 0001037 W JP0001037 W JP 0001037W WO 0052235 A1 WO0052235 A1 WO 0052235A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- magnetic field
- single crystal
- silicon
- crucible
- silicon single
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020007011598A KR20010042835A (ko) | 1999-02-26 | 2000-02-23 | 실리콘 단결정의 제조방법 |
JP2000602842A JP3760769B2 (ja) | 1999-02-26 | 2000-02-23 | シリコン単結晶の製造方法 |
EP00905294A EP1076120A4 (en) | 1999-02-26 | 2000-02-23 | METHOD FOR PRODUCING SILICON CRYSTALS |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11051782A JP2000247788A (ja) | 1999-02-26 | 1999-02-26 | シリコン単結晶の製造方法 |
JP11/51782 | 1999-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000052235A1 true WO2000052235A1 (fr) | 2000-09-08 |
Family
ID=12896529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2000/001037 WO2000052235A1 (fr) | 1999-02-26 | 2000-02-23 | Procede de production d'un monocristal de silicium |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1076120A4 (ja) |
JP (2) | JP2000247788A (ja) |
KR (1) | KR20010042835A (ja) |
WO (1) | WO2000052235A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8795432B2 (en) | 2007-05-30 | 2014-08-05 | Sumco Corporation | Apparatus for pulling silicon single crystal |
CN104011271A (zh) * | 2011-12-26 | 2014-08-27 | 硅电子股份公司 | 制造单晶硅的方法 |
CN113005509A (zh) * | 2019-12-20 | 2021-06-22 | 胜高股份有限公司 | 单晶硅锭的制造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200528592A (en) * | 2004-02-19 | 2005-09-01 | Komatsu Denshi Kinzoku Kk | Method for manufacturing single crystal semiconductor |
KR100840751B1 (ko) | 2005-07-26 | 2008-06-24 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳 제조 방법, 성장 장치 및그로부터 제조된 잉곳 , 웨이퍼 |
KR100831044B1 (ko) | 2005-09-21 | 2008-05-21 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳의 성장장치, 그 장치를 이용한성장방법 |
KR100954291B1 (ko) * | 2008-01-21 | 2010-04-26 | 주식회사 실트론 | 고품질의 반도체 단결정 잉곳 제조장치 및 방법 |
JP4307516B1 (ja) | 2008-11-25 | 2009-08-05 | 佑吉 堀岡 | 結晶成長装置及び結晶成長方法 |
JP5509189B2 (ja) | 2011-12-26 | 2014-06-04 | ジルトロニック アクチエンゲゼルシャフト | 単結晶シリコンの製造方法 |
KR101680213B1 (ko) * | 2015-04-06 | 2016-11-28 | 주식회사 엘지실트론 | 실리콘 단결정 잉곳의 성장 방법 |
JP6930435B2 (ja) * | 2018-01-17 | 2021-09-01 | 株式会社Sumco | 原料供給方法およびシリコン単結晶の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03275586A (ja) * | 1990-03-26 | 1991-12-06 | Mitsubishi Materials Corp | シリコン単結晶ウェーハの製造方法 |
EP0745706A1 (en) * | 1995-06-01 | 1996-12-04 | Shin-Etsu Handotai Company Limited | Manufacturing method of single crystal and apparatus of manufacturing the same |
JPH1121196A (ja) * | 1997-07-02 | 1999-01-26 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8805478D0 (en) * | 1988-03-08 | 1988-04-07 | Secr Defence | Method & apparatus for growing semi-conductor crystalline materials |
-
1999
- 1999-02-26 JP JP11051782A patent/JP2000247788A/ja active Pending
-
2000
- 2000-02-23 EP EP00905294A patent/EP1076120A4/en not_active Withdrawn
- 2000-02-23 KR KR1020007011598A patent/KR20010042835A/ko not_active Application Discontinuation
- 2000-02-23 WO PCT/JP2000/001037 patent/WO2000052235A1/ja not_active Application Discontinuation
- 2000-02-23 JP JP2000602842A patent/JP3760769B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03275586A (ja) * | 1990-03-26 | 1991-12-06 | Mitsubishi Materials Corp | シリコン単結晶ウェーハの製造方法 |
EP0745706A1 (en) * | 1995-06-01 | 1996-12-04 | Shin-Etsu Handotai Company Limited | Manufacturing method of single crystal and apparatus of manufacturing the same |
JPH1121196A (ja) * | 1997-07-02 | 1999-01-26 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1076120A4 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8795432B2 (en) | 2007-05-30 | 2014-08-05 | Sumco Corporation | Apparatus for pulling silicon single crystal |
CN104011271A (zh) * | 2011-12-26 | 2014-08-27 | 硅电子股份公司 | 制造单晶硅的方法 |
CN104011271B (zh) * | 2011-12-26 | 2017-11-07 | 硅电子股份公司 | 制造单晶硅的方法 |
CN113005509A (zh) * | 2019-12-20 | 2021-06-22 | 胜高股份有限公司 | 单晶硅锭的制造方法 |
JP2021098622A (ja) * | 2019-12-20 | 2021-07-01 | 株式会社Sumco | 単結晶シリコンインゴットの製造方法 |
JP7184029B2 (ja) | 2019-12-20 | 2022-12-06 | 株式会社Sumco | 単結晶シリコンインゴットの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20010042835A (ko) | 2001-05-25 |
JP2000247788A (ja) | 2000-09-12 |
JP3760769B2 (ja) | 2006-03-29 |
EP1076120A1 (en) | 2001-02-14 |
EP1076120A4 (en) | 2001-05-09 |
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