WO2000031321A1 - Dispositif de nettoyage - Google Patents

Dispositif de nettoyage Download PDF

Info

Publication number
WO2000031321A1
WO2000031321A1 PCT/JP1999/006489 JP9906489W WO0031321A1 WO 2000031321 A1 WO2000031321 A1 WO 2000031321A1 JP 9906489 W JP9906489 W JP 9906489W WO 0031321 A1 WO0031321 A1 WO 0031321A1
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
steam
section
communication port
sealing lid
Prior art date
Application number
PCT/JP1999/006489
Other languages
English (en)
Japanese (ja)
Inventor
Masahide Uchino
Original Assignee
Japan Field Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Field Co., Ltd. filed Critical Japan Field Co., Ltd.
Priority to KR1020007006830A priority Critical patent/KR100360015B1/ko
Publication of WO2000031321A1 publication Critical patent/WO2000031321A1/fr

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04Apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2230/00Other cleaning aspects applicable to all B08B range
    • B08B2230/01Cleaning with steam

Definitions

  • the present invention relates to a cleaning apparatus for performing a cleaning and drying process on electric components, mechanical components, and other members, so that each process can be performed quickly and economically. is there. Background art
  • a steam cleaning section and a steam generating section are formed in separate tanks, and steam cleaning of the steam generated in the steam generating section is performed through a pipe or the like.
  • steam was introduced into the cleaning section to clean the object to be cleaned.
  • the introduction of the cleaning steam from the steam generating section was shut off, and the object to be cleaned was dried.
  • the cleaning apparatus becomes large, and a large space is required for installation, and the apparatus is expensive.
  • the inside of the cleaning tank can be vertically divided into two parts by a gate valve. Then, when cleaning the object to be cleaned, the object to be cleaned is immersed and cleaned with the cleaning liquid filled in the cleaning tank with the gate valve opened. After this immersion cleaning, the object to be cleaned is pulled up from the cleaning liquid, and steam cleaning is performed in the cleaning tank.
  • the object to be cleaned is moved upward and placed on the upper side of the cleaning tank. Then, by closing the gate valve, the upper side of the cleaning tank in which the object to be cleaned is disposed is sealed. By reducing the pressure on the upper side of the cleaning tank, the object to be cleaned is dried under reduced pressure.
  • the present invention is intended to solve the above-described problems, and divides a cleaning tank into a steam cleaning section and a steam generating section, and provides a communication port between the steam cleaning section and the steam generating section.
  • a sealing lid By providing a sealing lid and moving the sealing lid up and down, it is possible to open and seal the communication port.
  • steam cleaning and drying are performed in one cleaning tank.
  • it is intended to reduce the useless installation space and to economically form a cleaning device with a compact structure.
  • the present invention provides a cleaning tank provided with an upper steam cleaning section for cleaning and drying an object to be cleaned, and a lower steam generating section for filling a cleaning liquid and evaporating the cleaning liquid.
  • the steam cleaning section and the steam generating section can be communicated via a communication port, and the communication port can be sealed or opened by a sealing lid movable upward and downward. Things.
  • the opening of the communication port may be provided between the communication port and the sealing lid through a flow interval in which only the cleaning steam or the cleaning liquid can flow.
  • the sealing lid is formed of a plate-like member having a diameter larger than a communication port provided in a partition wall that separates the steam cleaning unit and the steam generation unit, and the plate-like member is moved by an up-down movement mechanism.
  • the sealing lid is formed of a plate-shaped member having a diameter larger than a communication port provided in a partition wall separating the steam cleaning section and the steam generation section, and one end of the plate-shaped member is formed by a partition wall.
  • the communication port may be sealed or opened by supporting the sealing lid up and down by a vertical movement mechanism through the shaft support.
  • connection between the partition wall provided with the communication port and the sealing lid may be sealed by disposing a sealing member on the lower surface of the member disposed on the upper side.
  • the steam generating section may be connected to a part of an ejector, and this part of the ejector may be provided in a part of a circulation path for circulating the cleaning liquid by connecting a pump to the cleaning liquid tank.
  • the steam cleaning in the steam cleaning section may be reduced-pressure steam cleaning.
  • the steam cleaning in the steam cleaning section may be atmospheric pressure steam cleaning.
  • the present invention is configured as described above, first, in order to perform the steam cleaning process on the object to be cleaned, the object to be cleaned is arranged in the steam cleaning section. Then, the communication port is opened by moving the sealing lid covering the communication port between the steam cleaning section and the steam generation section upward or downward. Then, the cleaning steam in the steam generating section flows through the communication port into the steam cleaning section, and comes into contact with the object to be cleaned and condenses, thereby performing steam cleaning.
  • This hermetic lid does not require a large movement like a gate valve, and moves up and down to provide only a small flow interval between the hermetic lid and the communication port through which only cleaning steam or cleaning liquid can pass. As a result, the cleaning steam flows reliably in the steam cleaning section, and comes into contact with the object to be cleaned.
  • the condensate generated by the contact with the object to be cleaned flows down in the direction of the communication port together with the dirt attached to the object to be cleaned. Then, the condensed liquid flows down to the steam generating section through the communication port and the circulation interval, and is washed. Good liquid drainage is performed in the object and steam cleaning section.
  • the steam cleaning may be reduced-pressure steam cleaning or atmospheric-pressure steam cleaning.
  • the sealing lid is moved upward or downward to connect to the communication port, and the flow of the cleaning steam from the steam generating section to the steam cleaning section is shut off.
  • the object to be cleaned is dried by introducing cold air, warm air, or the like into the steam cleaning section, or by reducing the pressure in the steam cleaning section.
  • a cleaning device can be formed at a low cost with a compact structure, thereby improving economic efficiency. It will be possible.
  • the sealing lid is slightly moved up and down to open and close the communication port between the steam cleaning unit and the steam generation unit, the device may be formed in consideration of the space for moving the sealing lid. There is no need to secure a large installation area, and the installation of the cleaning device can be performed compactly, and the space can be used effectively.
  • the sealing lid is formed to have a diameter larger than that of the communication port, and can be moved up and down by a conventionally known appropriate up and down movement mechanism.
  • the vertical movement mechanism may be, for example, a cylinder connected to a closed lid, and the cylinder may be moved up and down, or may be a ball screw type, an electric piston, a chain block, or other appropriate one. It is possible to use the method.
  • FIG. 1 shows a first embodiment of the present invention, and is a cross-sectional view in a state where steam cleaning is performed.
  • FIG. 2 is a sectional view showing a state where a drying process is being performed in the first embodiment.
  • FIG. 3 shows a second embodiment of the present invention, and is a cross-sectional view showing a state in which steam cleaning is performed.
  • FIG. 4 is a cross-sectional view showing a state where a drying process is being performed in the second embodiment.
  • FIG. 5 shows a third embodiment of the present invention, and is a cross-sectional view in a state where steam cleaning is performed.
  • FIG. 6 is a cross-sectional view showing a state where a drying process is being performed in the third embodiment.
  • Figure 7 shows FIG.
  • FIG. 6 shows a fourth embodiment of the present invention, and is a cross-sectional view of a state where steam cleaning is being performed.
  • FIG. 8 is a cross-sectional view showing a state where a drying process is being performed in the fourth embodiment.
  • FIG. 9 shows a fifth embodiment of the present invention, and is a cross-sectional view showing a state in which steam cleaning is performed.
  • FIG. 10 is a cross-sectional view showing a state where a drying process is being performed in the fifth embodiment.
  • FIG. 11 shows a sixth embodiment of the present invention and is a cross-sectional view showing a state in which immersion cleaning or steam cleaning is performed using a part of an ejector.
  • FIG. 12 is a cross-sectional view showing a state where a drying process is being performed in the sixth embodiment.
  • FIG. 13 shows a seventh embodiment of the present invention, and is a cross-sectional view showing a state in which immersion cleaning or steam cleaning is performed using a part of an ejector.
  • FIG. 14 is a cross-sectional view showing a state where a drying process is being performed in the seventh embodiment.
  • FIG. 15 shows the eighth embodiment of the present invention, and is a cross-sectional view showing a state in which a part of an ejector is subjected to immersion cleaning or drying treatment.
  • FIG. 16 is a cross-sectional view showing a state where a steam cleaning process is being performed in the eighth embodiment.
  • FIG. 17 shows a ninth embodiment of the present invention, and is a cross-sectional view showing a state in which immersion cleaning or drying processing is performed using a part of an ejector.
  • FIG. 18 is a cross-sectional view showing a state in which a steam cleaning process is being performed in the ninth embodiment
  • FIG. 19 is a cross-sectional view showing a state in which a sealing member is disposed on the upper surface of a sealing lid. Best form for
  • (1) is a vertical washing tank, and the upper side is separated by a steam washing section (3) through a partition wall (2).
  • the lower part is the steam generator (4).
  • a mounting table (6) for placing an object to be cleaned (5) is arranged in the steam cleaning section (3).
  • the mounting table (6) is formed of a wire mesh material or a pipe material, so that the cleaning steam introduced from the steam generating section (4) passes through the mounting table (6) to be cleaned. It is assumed that (5) can be reached.
  • the steam generating section (4) is filled with a cleaning liquid (7), and the cleaning liquid (7) is supplied by an appropriate heating means (8) such as an electric heater or a heating pipe through which heating oil flows. ) Can be vaporized. Also, steam A thermostat (32) is installed in the green part (4) to control the heating of the cleaning liquid (7) by the heating means (8).
  • the partition wall (2) communicates with the steam cleaning section (3) and the steam generating section (4), and cleans steam generated in the steam generating section (4) with the steam cleaning section. Open and communicate with the communication port (10) for introduction into (3).
  • the steam cleaning section (3) By connecting a sealing lid (11) formed of a plate-like member having a diameter larger than that of the communication port (10) to the communication port (10), the steam cleaning section (3) can be connected.
  • the communication between the steam generator and the steam generator (4) is cut off, and the inside of the steam cleaner (3) can be sealed.
  • the sealing lid (11) is arranged on the steam generating section (4) side, and can be attached to the lower surface of the partition wall (2) by an appropriate vertical movement mechanism (not shown).
  • a sealing member (12) such as an orring and a packing is arranged at a connection portion between the sealing lid (11) and the partition wall (2) to enhance the sealing performance.
  • the sealing member (12) is disposed on the lower surface of the partition wall (2) located on the upper side.
  • any suitable conventionally known mechanism such as a cylinder, a ball screw method, an electric screw, a chain block, or the like can be used.
  • the cleaning tank (1) has an opening / closing lid (30) detachably connected to an opening through which the object to be cleaned (5) is put in and out. Also, at the connection between the opening / closing lid (30) and the cleaning tank (1), a sealing member (31) is arranged on the lower surface of the opening / closing lid (30) to improve the sealing performance. At the same time, it is possible to prevent condensate and contaminants from adhering to the connection. However, since the cleaning liquid (7) does not flow through the opening of the cleaning tank (1) and there is little possibility that the condensed liquid adheres, the sealing member (31) does not necessarily open and close the lid (30). It does not need to be provided on the lower surface of the cleaning tank, and may be provided on the upper surface of the cleaning tank (1).
  • the steam cleaning section (3) is connected to a vacuum pump (14) via a first solenoid valve (17) so that the pressure in the steam cleaning section (3) can be reduced.
  • a condenser (15) is interposed between the first solenoid valve (17) and the vacuum pump (14), and when the steam cleaning section (3) is depressurized, the steam cleaning section
  • the washing steam in (3) can be introduced into the condenser (15).
  • a cooling pipe (9) through which cooling water flows is inserted into the inside of the condenser (15), so that the washing steam introduced into the condenser (15) can be condensed.
  • the condensed liquid condensed in the condenser (15) in this way is transferred to the steam generating section (4) via the second solenoid valve (35), and can be reused.
  • an appropriate valve mechanism corresponding to reduced pressure steam cleaning and reduced pressure drying such as a pressure regulating valve (not shown) is provided in case of performing reduced pressure steam cleaning and reduced pressure drying. Have been placed.
  • the cleaning steam generated in the steam generating section (4) by the appropriate heating means (8), as shown by the arrow in FIG. 1, is sealed with the sealing lid (11) and the partition wall (2). Even after a narrow flow interval (27), the air passes through the communication port (10) and flows into the steam cleaning section (3).
  • the sealing lid (11) does not need to be largely moved to the opening of the communication port (10)
  • the cleaning tank (1) can be formed compactly. Atmospheric-pressure steam cleaning is performed by contact between the cleaning steam and the object to be cleaned (5) and condensing.
  • the vacuum pump (14) is operated to reduce the pressure while the steam generator (4) and the steam cleaning unit (3) are in communication.
  • the reduced pressure lowers the boiling point of the cleaning liquid (7), and when the boiling point becomes lower than the heating temperature of the cleaning liquid (7), cleaning steam is generated.
  • the cleaning steam flows to the steam cleaning section (3) and condenses upon contact with the object to be cleaned (5), thereby performing reduced pressure steam cleaning.
  • the reduced pressure steam cleaning can be performed at a low temperature, the cleaning liquid (7) is prevented from being thermally degraded, and is suitable for cleaning an object (5) having low heat resistance.
  • the seal member (1 2) is disposed on the lower surface of the partition wall (2) at the connection between the sealing lid (1 1) and the partition wall (2). .
  • the sealing member (12) is disposed on the upper surface of the sealing lid (11), the upper surface of the sealing lid (11) and the sealing lid (11) )
  • cleaning liquid (7) stay in the recess (16) consisting of the inner peripheral surface of the sealing material (12) protruding from the upper surface of the sealing member and the upper surface of the sealing member (12).
  • the seal member (12) since the seal member (12) is provided on the lower surface of the partition wall (2), the seal member (12) is connected to the sealing lid (11). No foreign matter such as dirt adheres to the surface. Further, as shown in FIG. 1, the concave portion (16) formed by the partition wall (2) and the seal member (12) faces downward, as shown in FIG. Nor. As a result, the condensate adhering to the object to be cleaned (5) or the inside of the steam washing section (3) flows down to the steam generating section (4) side, and the inside of the steam washing section (3) is drained well. Will be performed. Further, the condensate flowing down into the steam generating section (4) can be reused by distillation and is not wasted, so that the washing liquid (7) can be economically used.
  • a drying process is performed.
  • a steam-cleaning process is performed by connecting a sealing lid (11) to the communication port (10).
  • the flow of the cleaning steam into the cleaning section (3) is shut off, and the steam cleaning section (3) ⁇ is hermetically sealed.
  • the seal member (12) arranged on the partition wall (2) has a connection portion with the sealing lid (11). Since there is no foreign matter such as the like, the seal member (1 2) can be prevented from being damaged by the connection.
  • the vacuum pump (14) connected to the steam cleaning section (3) is operated to rapidly reduce the pressure in the steam cleaning section (3). Due to this rapid decompression, the boiling point of the cleaning liquid (7) attached to the object to be cleaned (5) and the steam cleaning section (3) is lowered, and rapid drying becomes possible. Also during this drying process, as described above, the drainage of the object to be cleaned (5) and the excess cleaning solution (7) in the steam cleaning section (3) is performed well, so that the drying time is reduced. In addition to this, the energy used for drying can be saved, and the drying process can be performed quickly and economically.
  • the cleaning steam remaining in the steam cleaning section (3) is passed through the first solenoid valve (17).
  • the condenser (15) to condense and liquefy.
  • the condensed liquid is transferred to the steam generating section (4) via the second solenoid valve (35), so that the condensed liquid is again converted into the cleaning vapor, and can be reused by distillation. (7) Economical re-use is possible.
  • a liquid level control mechanism (18) such as a ball tap is installed in the steam generator (4).
  • the opening and closing of the second solenoid valve (35) is controlled by this liquid level control mechanism (18), and the condenser (15)
  • the transfer of the condensate from the tank is adjusted to maintain an appropriate amount of the washing liquid (7) in the steam generator (4).
  • bumping drying is performed by rapidly depressurizing the inside of the steam cleaning section (3).
  • the inside of the steam cleaning section (3) is different.
  • a drying process may be performed by introducing cool air or hot air by an appropriate means, or the drying process may be performed using another appropriate conventional technology.
  • the drying time can be reduced, energy can be saved, and economical drying can be performed.
  • the washing liquid (7) in the steam generating section (4) is reduced by repeating the steam washing and the drying process, so that there is a possibility that sufficient washing steam cannot be generated. . Therefore, in another different second embodiment, as shown in FIGS. 3 and 4, a reservoir tank (19) of the cleaning liquid (7) is provided separately from the steam generating section (4).
  • the reservoir (19) is connected to the condenser (15) and the steam generator (4) via the first three-way valve (13).
  • the liquid level control mechanism (18) installed in the steam generating section (4) senses the shortage of the cleaning liquid (7) in the steam generating section (4) and detects the reservoir tank (1 9). Since the cleaning liquid (7) is replenished into the steam generating section (4) from the above), the steam cleaning can be performed efficiently. Also, during the drying process, the condensate condensed in the condenser (15) is introduced into the reservoir (19) through the first three-way valve (13) to enable the reuse and reuse of the cleaning steam by distillation. are doing. In addition, the reserve tank (19) is connected to the pipes (38) (39) through which the cleaning liquid (7) is drawn in and out through the third and fourth solenoid valves (36) (37). Connected to You.
  • the sealing lid (11) is disposed on the steam generating section (4) side so as to be able to move up and down in the steam generating section (4).
  • the sealing member (12) is arranged on the lower surface of (2).
  • the sealing lid (11) is disposed on the steam cleaning section (3) side, and is vertically moved in the steam cleaning section (3). If possible, the sealing member (12) is arranged on the lower surface of the sealing lid (11). In this case, the recess (16) formed by the sealing member (12) and the surface of the sealing lid (11) does not adhere the cleaning liquid (7) or dirt.
  • This recess (16) is arranged on the steam generating section (4) side as shown in Fig. 6 when the container is closed for drying, so that even if droplets or the like adhere, any drying process is performed. It has no effect. Therefore, efficient drying is possible. In addition, since no dirt adheres to the sealing member (12), good airtightness can be maintained.
  • the condenser (15) is connected to the steam cleaning section (3) to enable the condensing of the cleaning steam. These are connected to the second three-way valve (33). Connected through.
  • the condenser (15) is also connected to the steam generator (4) via the second three-way valve (33). Therefore, the washing steam in the steam generating section (4) is directly introduced into the condenser (15) through the second three-way valve (33) without passing through the steam washing section (3), and is distilled and regenerated. It is possible to perform only
  • the communication port (10) is sealed and opened by moving the sealing lid (11) up and down in parallel, so that the sealing lid (11) is closed. Dirt and condensate that have fallen on the upper surface may remain on the upper surface of the closed lid (11) due to surface tension. Therefore, when the inside of the steam cleaning section (3) is closed and the drying process is performed, the condensate remaining on the upper surface of the closed lid (11) is dried, and the energy efficiency is reduced. There is a fear.
  • FIGS. One side of a plate-shaped hermetic lid (11) arranged on the side of the air generating portion (4) is fixed to the partition wall (2) via a hinge (21) such as a hinge. Then, the sealing lid (11) is tilted up and down by an appropriate up-down movement mechanism through the shaft support (21) to seal the communication port (10). Opening is possible.
  • the sealing lid (11) is rotated downward via the pivot (21), and the sealing lid (11) is tilted.
  • the communication port (10) is opened by arranging it.
  • the cleaning steam in the steam generating section (4) flows into the steam cleaning section (3) through the communication port (10), and the object to be cleaned (5) is cleaned with steam.
  • the vacuum pump (14) can be operated to perform reduced-pressure steam cleaning.
  • the condensed liquid condensed in the steam cleaning section (3) drops along with the dirt onto the upper surface of the sealing lid (11) through the communication port (10).
  • the lid (11) is inclined, the condensate slides down the inclined surface to fall into the steam generator (4) without fail.
  • the drainage of 1) is performed well, and the adhesion of dirt is prevented.
  • the moving area of the closed lid (11) can be reduced as compared with the above-described embodiments, and the cleaning tank (1) can be formed more compactly.
  • the sealing cover (11) is rotated upward through the shaft support (21) to form the communication port (10). Seal tightly. This sealing is also performed without deteriorating the airtightness because no condensed liquid or dirt adheres to the connection between the sealing member (12) and the sealing lid (11). In addition, since the liquid in the steam cleaning section (3) is well drained, time and energy can be saved, and efficient drying can be performed.
  • the partition wall (2) is largely opened to form the communication port (10), and the sealing lid (11) is also large in diameter in accordance with the communication port (10). It is formed of a plate-like member.
  • the communication port (10) can be formed to have a small diameter as in another different fifth embodiment shown in FIGS.
  • the cleaning steam can be efficiently introduced into the steam cleaning section (3), and the communication port (10) is not closed by filth.
  • the sealing lid (11) connected to the communication port (10) is formed of a plate-like member having a diameter slightly larger than that of the communication port (10). Up and down movement is possible by connecting a cylinder (22) as a moving mechanism.
  • the hermetic lid (11) is arranged on the steam cleaning section (3) side, and the cylinder (22) projects outside the steam cleaning section (3). ) Can be closed and opened by moving the communication port (10) up and down.
  • a sealing member (12) is arranged on the lower surface of the sealing lid (11) at a connection portion with the partition wall (2) to improve airtightness.
  • the cylinder (22) is raised, and the closed lid (11) is moved upward.
  • the communication port (10) is opened to open the communication port (10) through a slight flow interval (27).
  • the cleaning steam generated in the steam generating section (4) is introduced into the steam cleaning section (3) through the communication port (10).
  • This cleaning steam passes well even in the narrow communication port (10) and the circulation interval (27) and diffuses uniformly in the steam cleaning section (3), so that it contacts the surface of the object to be cleaned (5) evenly. It can be done.
  • the vacuum pump (14) can be operated to perform reduced pressure steam cleaning. You.
  • the sealing member (12) is connected to the lower surface of the upper sealing lid (11). Since the condensate containing dirt flows down, no dirt or the like adheres to the sealing member (12). Therefore, the airtightness of the seal member (12) can be maintained for a long period of time.
  • the cylinder (22) is lowered, the sealing lid (11) is moved downward, and the communication port (10) is closed. .
  • the vacuum pump (14) reduces the pressure in the steam cleaning section (3) and performs the drying process. Since the condensate is well drained, efficient drying is possible. .
  • the cleaning steam in the steam cleaning section (3) and the steam generating section (4) is condensed in the condenser (15) and introduced into the steam generating section (4). It can be reused by distillation.
  • a cleaning liquid tank (20) is provided separately from a cleaning tank (1) for performing steam cleaning, and the cleaning liquid tank (20) is provided in this cleaning liquid tank (20). Condensate can be introduced. Further, in the cleaning liquid tank (20), immersion cleaning of the object to be cleaned (5) is performed as a pretreatment for steam cleaning.
  • an opening / closing lid (42) is detachably connected to the opening of the cleaning liquid tank (20), and a sealing member (43) is arranged on the lower surface of the opening / closing lid (42). Then, the airtightness of the cleaning liquid tank (20) is improved. Further, by connecting a vacuum break valve (44) to the cleaning liquid tank (20), the pressure in the cleaning liquid tank (20) due to the introduction and introduction of the cleaning liquid (7) is constantly adjusted. The pressure state can be maintained.
  • the cleaning liquid (7) in the cleaning liquid tank (20) is introduced into the steam generation section (4) of the cleaning tank (1) through the sixth solenoid valve (41). Evaporates in. Then, the cleaning steam can be used in the steam cleaning process, and the cleaning steam is introduced again into the cleaning liquid tank (20) through the fifth solenoid valve (40). It is also possible to recycle and use You.
  • the circulation of the cleaning steam between the steam generating section (4) and the cleaning liquid tank (20) is controlled by the suction force of the part of the ejector (24) connected to the steam generating section (4). They are trying to do it efficiently.
  • this conventional method is separate from the cleaning tank (1) and the cleaning liquid tank (20).
  • a suction force is generated in a part of the ejector (24), and the suction power causes the cleaning steam in the steam generation section (4) to be generated. Is supplied to the cleaning liquid tank (20).
  • a buffer tank was not formed, and as shown in FIG. 11, a part of the ejector (24) was directly connected to the cleaning liquid tank (20), and this cleaning liquid tank (20) was connected.
  • the cleaning liquid (7) in 20) is formed so as to be circulated and used by the pump (25). As described above, by omitting the buffer tank, the number of tanks can be reduced, and the apparatus can be made compact and inexpensive.
  • the cleaning steam of the steam generating part (4) is supplied to the fifth solenoid valve (4). 0) through the washing liquid tank (20) efficiently.
  • the cooling means (23) in the cleaning liquid tank (20) makes the cooled cleaning liquid (7) and the cleaning steam come into contact with each other to be condensed.
  • a part of the ejector (24) is connected to a condenser (15) via a second solenoid valve (35), so that the condensed liquid condensed in the condenser (15) is removed from the washing liquid tank (15). 20).
  • the object to be cleaned (5) is immersed in the cleaning liquid (7) in the cleaning liquid tank (20), and the pre-cleaning is performed. Perform processing.
  • the object to be cleaned (5) is taken out of the cleaning liquid tank (20) and placed in the steam cleaning section (3) of the cleaning tank (1).
  • the cleaning steam of the steam generation unit (4) is introduced into the steam cleaning unit (3) through the communication port (10), and the steam cleaning process is performed.
  • the vacuum pump (14) is operated to perform reduced pressure steam cleaning. You can do it.
  • the cleaning liquid (7) in the cleaning liquid tank (20) is supplied to the steam generation section (4) via the sixth solenoid valve (41), and is vaporized and used for steam cleaning.
  • the dirty washing solution (7) can be efficiently recycled by distillation.
  • the supply of the cleaning liquid (7) to the steam generating section (4) is controlled by the liquid level control mechanism (18) according to the amount of the cleaning liquid (7) in the steam generating section (4).
  • the amount of the cleaning liquid (7) in the steam generating section (4) is kept constant, and the energy efficiency for generating the cleaning steam is increased.
  • the inside of the steam cleaning section (3) is closed by closing the communication port (10) with the sealing lid (11) as shown in Fig. 12, and then dried under reduced pressure. I do.
  • the condensed liquid condensed in the condenser (15) and the washing steam in the steam generating section (4) are removed by the suction force of the part of the ejector (24). They are introduced into the washing liquid tank (20) via the second solenoid valve (35) and the fifth solenoid valve (40), respectively, and condensed. Then, the condensed liquid can be circulated and reused in immersion cleaning or steam cleaning, and the cleaning liquid (7) can be efficiently reused by distillation.
  • the seventh different embodiment is the same as the sixth embodiment except that the steam generator (4) and the ejector (24) are different from each other as shown in FIGS. 13 and 14.
  • a second condenser (28) is interposed between them.
  • the washing steam from the steam generator (4) is condensed.
  • the condensed liquid can be transferred into the cleaning liquid tank (20) by the suction force of a part of the ejector (24).
  • the cleaning steam is condensed and liquefied and circulated, so that the volume can be reduced and efficient circulation can be achieved as compared with the case of circulating the gas as in the sixth embodiment.
  • the immersion cleaning as pre-cleaning of the steam cleaning can be performed in the steam cleaning section (3) 3 of the cleaning tank (1).
  • the steam cleaning section (3) is connected to a cleaning liquid tank (20) filled with the cleaning liquid (7) through a seventh solenoid valve (45), and this cleaning liquid tank (20) is It can be used as a reservoir for the cleaning liquid (7) used for immersion cleaning.
  • the cleaning liquid tank (20) is also connected to the steam generating section (4) via the sixth solenoid valve (41), and the cleaning liquid (7) is transferred into the steam generating section (4). It is possible.
  • the object to be cleaned (5) is stored in the steam cleaning section (3).
  • the sealing lid (11) is connected to the communication port (10), and the steam cleaning section (3) is sealed.
  • the inside of the steam washing section (3) is opened by the vacuum pump (14). Is reduced to a vacuum.
  • the seventh solenoid valve (45) is opened in this vacuum state, the cleaning liquid (7) in the cleaning liquid tank (20) is introduced into the steam cleaning section (3) via the seventh solenoid valve (45). Suction is performed, and as shown by the dotted line in FIG. 15, sufficient washing for immersion washing is performed in the steam washing section (3). Purified liquid (7) is introduced.
  • the cleaning liquid tank (2) When introducing the cleaning liquid (7) to the steam cleaning section (3), the cleaning liquid tank (2) is opened by opening the vacuum break valve (44) of the cleaning liquid tank (20). Prevention of decompression in 0) enables smooth introduction. When this introduction is completed, the seventh solenoid valve (45) is closed, and the object to be cleaned (5) is immersed and cleaned.
  • the seventh solenoid valve (45) is opened, the vacuum break valve (26) is opened, and air is introduced into the steam cleaning section (3). I do. Then, the cleaning liquid (7) in the steam cleaning section (3) ⁇ is discharged into the cleaning liquid tank (20) by gravity. Also in this case, by opening the vacuum release valve (44) of the cleaning liquid tank (20), the cleaning liquid (7) can be smoothly discharged to the cleaning liquid tank (20). Become.
  • the cylinder (22) is raised, and the sealing lid (11) is moved upward, and as shown in FIG. Open 10).
  • the steam cleaning section (3) and the steam generating section (4) communicate.
  • the cleaning steam from the steam generation section (4) into the steam cleaning section (3) through the communication port (10)
  • the steam cleaning of the object to be cleaned (5) is performed.
  • the vacuum pump (14) can be operated to perform reduced-pressure steam cleaning.
  • the cleaning liquid (7) is cooled by cooling means (23) such as a pipe through which cold water flows, so that the cleaning object immersed and cleaned in the first step is cleaned.
  • the surface temperature is very low. Therefore, in the steam cleaning of the second step, the cleaning effect comes into contact with the cleaning object (5) in the low-temperature state, whereby the condensation effect is promoted and the cleaning effect is improved.
  • the cleaning liquid (7) in the steam generator (4) is insufficient, According to the structure (18), it is also possible to open the sixth solenoid valve (41), introduce the cleaning liquid (7) in the cleaning liquid tank (20), and replenish it. Then, by introducing the cleaning liquid (7) of the cleaning liquid tank (20) into the vapor generating section (4) and vaporizing the same, the distillation and regeneration of the cleaning liquid (7) contaminated by immersion cleaning is performed. Is possible. As a result, the cleaning liquid (7) can be used economically, and at the same time, the cleaning steam generation operation and the purification can be performed at the same time, so that the working efficiency and energy efficiency are improved.
  • the cylinder (22) is lowered, and the sealing lid (11) is connected to the communication port (10), so that the steam is removed. Seal the inside of the air washing section (3). Then, the inside of the steam cleaning section (3) is depressurized by the vacuum pump (14), so that the object to be cleaned (5) is dried under reduced pressure.
  • the liquid in the steam cleaning section (3) is well drained, so that the drying time and energy waste are eliminated, and the drying process is performed efficiently. Can be performed.
  • the excess cleaning steam in the steam cleaning section (3) is transferred to the condenser (15) via the first solenoid valve (17) by suction by the vacuum pump (14). Is condensed.
  • the condensed liquid is quickly transferred into the cleaning liquid tank (20) via the second solenoid valve (35) by the suction force of the part of the ejector (24).
  • the cleaning steam from the steam generating section (4) is introduced directly into the cleaning liquid tank (20) via the fifth solenoid valve (40) by the suction force of a part of the ejector (24).
  • condensed and liquefied can be used again for immersion cleaning and steam cleaning operations, enabling efficient distillation and recycling.
  • the ninth embodiment is a cleaning apparatus similar to that of the eighth embodiment. However, as shown in FIGS. 17 and 18, the space between the steam generator (4) and a part of the ejector (24) is provided. And a second condenser (28). By condensing the cleaning steam in the steam generating section (4) with the second condensing device (28), the condensing liquid is more efficiently condensed.
  • a single cleaning tank is provided with a steam cleaning section and a steam generating section for an object to be cleaned, so that the steam cleaning process and the drying process can be performed. Therefore, the cleaning device can be compactly and economically formed. Can do things. Further, the hermetic lid disposed between the steam cleaning section and the steam generating section can move and close the steam cleaning section and the steam generating section only by slightly moving up and down. It is possible to realize more compact equipment.
  • the vertical movement of the closed lid enables efficient introduction of the cleaning steam into the steam cleaning section, thereby enabling the object to be cleaned to be satisfactorily cleaned with steam.
  • the condensate in the steam cleaning section is reliably removed, saving drying time and energy, and also suppressing wasteful use of the cleaning solution. I can do it.
  • the present invention does not slide in the horizontal direction as in the conventional gate valve, but uses a method in which the closed lid is moved up and down to open and close the communicating portion. It is possible to prevent wear and breakage of the connection part between the and the connection part and the sealing member arranged at this connection part, to maintain the airtightness for a long period of time, and to improve the durability of the cleaning device. Become.

Abstract

L'invention concerne un dispositif de nettoyage pour nettoyer des objets. Ce dispositif comprend une section de nettoyage à la vapeur et une section de génération de vapeur qui sont prévues dans une seule cuve de nettoyage pour assurer un traitement de nettoyage à la vapeur et un traitement de séchage. La communication entre les ces deux sections est assurée ou coupée par un couvercle d'étanchéité mobile dans le sens vertical. L'invention permet d'obtenir un dispositif de nettoyage compact économique. La section de nettoyage à la vapeur (3) pour nettoyer et sécher les objets est placée dans la zone supérieure et est remplie d'un liquide de nettoyage (7). La section de génération de vapeur (4) prévue pour vaporiser le liquide de nettoyage (7) est placée dans la zone inférieure, constituant une cuve de nettoyage (1). La communication entre la zone de nettoyage à la vapeur (3) et la section de génération de vapeur (4) est assurée par un orifice de communication (10). Cet orifice est placé de telle sorte qu'il est peut être fermé ou ouvert par le couvercle mobile dans le sens vertical (11).
PCT/JP1999/006489 1998-11-26 1999-11-19 Dispositif de nettoyage WO2000031321A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020007006830A KR100360015B1 (ko) 1998-11-26 1999-11-19 세정장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10336077A JP3011706B1 (ja) 1998-11-26 1998-11-26 洗浄装置
JP10/336077 1998-11-26

Publications (1)

Publication Number Publication Date
WO2000031321A1 true WO2000031321A1 (fr) 2000-06-02

Family

ID=18295467

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/006489 WO2000031321A1 (fr) 1998-11-26 1999-11-19 Dispositif de nettoyage

Country Status (5)

Country Link
JP (1) JP3011706B1 (fr)
KR (1) KR100360015B1 (fr)
CN (1) CN1138874C (fr)
TW (1) TW429172B (fr)
WO (1) WO2000031321A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4225985B2 (ja) * 2005-06-01 2009-02-18 ジャパン・フィールド株式会社 被洗浄物の洗浄方法及びその装置
JP4575513B1 (ja) * 2009-08-26 2010-11-04 ジャパン・フィールド株式会社 被乾燥物の乾燥方法及びその装置
CN103128074B (zh) * 2011-11-25 2016-06-22 株式会社Ihi 真空清洗装置以及真空清洗方法
CN102698996A (zh) * 2012-05-30 2012-10-03 圣睿太阳能科技(镇江)有限公司 非晶硅薄膜太阳能电池pecvd基片装载箱清洁系统及清洁方法
JP5076033B1 (ja) * 2012-06-08 2012-11-21 ジャパン・フィールド株式会社 被洗浄物の蒸気洗浄方法及びその装置
CN103343816B (zh) * 2013-07-11 2015-08-26 中国石油化工股份有限公司 棘爪开锁机构、蒸汽密闭正压洗罐装置以及槽罐车
CN103721970B (zh) * 2013-12-19 2015-09-02 攀钢集团工程技术有限公司 用于清洗脱硫系统的冷却器的清洗装置及方法
CN105177614A (zh) * 2015-08-19 2015-12-23 苏州吴江春宇电子股份有限公司 一种清洗生产线用高温脱脂槽
CN106238372B (zh) * 2016-08-26 2018-10-02 重庆新红旗缸盖制造有限公司 缸盖蒸汽清洗装置
CN107842840A (zh) * 2016-09-21 2018-03-27 苏州润桐专利运营有限公司 一种发动机缸盖清洗的蒸汽加热装置
JP7037206B2 (ja) * 2020-01-27 2022-03-16 アクトファイブ株式会社 蒸気洗浄減圧乾燥装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184335A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184335A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Also Published As

Publication number Publication date
JP2000160378A (ja) 2000-06-13
CN1293718A (zh) 2001-05-02
KR20010033363A (ko) 2001-04-25
CN1138874C (zh) 2004-02-18
JP3011706B1 (ja) 2000-02-21
KR100360015B1 (ko) 2002-11-11
TW429172B (en) 2001-04-11

Similar Documents

Publication Publication Date Title
US5593507A (en) Cleaning method and cleaning apparatus
WO2000031321A1 (fr) Dispositif de nettoyage
KR100411366B1 (ko) 세정 건조처리 방법 및 그 장치
JP3230057B2 (ja) 改善された一般部品用洗浄装置
CN101314158A (zh) 清洗干燥装置
US4745690A (en) Method of replenishing and/or preparing treating liquids
JP2004008929A (ja) 洗浄装置
JP2006292261A (ja) 被洗浄物の乾燥装置及び蒸気洗浄装置
WO1998006889A2 (fr) Systeme de sechage a vapeur surchauffee
JP2002313764A (ja) 高圧処理装置
JPH06283497A (ja) 洗浄処理後の基板の乾燥処理装置
JPH08252546A (ja) 有機溶剤を使用する洗浄装置
JP6526858B2 (ja) 洗浄液蒸留再生装置、部品洗浄装置、及び、洗浄液の蒸留再生方法
JP2000325893A (ja) 洗浄装置
KR100309580B1 (ko) 웨이퍼건조장치
JP2000033348A (ja) 部品洗浄装置
JP2000237703A (ja) 真空洗浄乾燥方法及び装置
JPH0326383A (ja) 有機溶剤を使用する洗浄装置
JP2010240606A (ja) 密閉型洗浄装置
JP3049213B2 (ja) 蒸気脱脂装置及び脱脂方法
JP3701811B2 (ja) 基板処理方法及び基板処理装置
EP0747140B1 (fr) Procédé et dispositif pour rincer et/ou sécher des articles soumis à un procédé de nettoyage
US20220375769A1 (en) Drying environments for reducing substrate defects
JPH1034097A (ja) 洗浄装置
JPS62198126A (ja) 処理装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 99804160.2

Country of ref document: CN

AK Designated states

Kind code of ref document: A1

Designated state(s): CN KR US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): DE FR GB IT

WWE Wipo information: entry into national phase

Ref document number: 1020007006830

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 09600450

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
WWP Wipo information: published in national office

Ref document number: 1020007006830

Country of ref document: KR

WWG Wipo information: grant in national office

Ref document number: 1020007006830

Country of ref document: KR