WO1999033096A1 - Method and composition for dry photoresist stripping in semiconductor fabrication - Google Patents

Method and composition for dry photoresist stripping in semiconductor fabrication Download PDF

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Publication number
WO1999033096A1
WO1999033096A1 PCT/US1998/025194 US9825194W WO9933096A1 WO 1999033096 A1 WO1999033096 A1 WO 1999033096A1 US 9825194 W US9825194 W US 9825194W WO 9933096 A1 WO9933096 A1 WO 9933096A1
Authority
WO
WIPO (PCT)
Prior art keywords
rate
photoresist
semiconductor wafer
gas mixture
etchant gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1998/025194
Other languages
English (en)
French (fr)
Inventor
Changhun Lee
Yun-Yen Jack Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Priority to DE69837112T priority Critical patent/DE69837112T2/de
Priority to EP98961796A priority patent/EP1053566B1/en
Priority to JP2000525912A priority patent/JP2002531932A/ja
Publication of WO1999033096A1 publication Critical patent/WO1999033096A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/427—Stripping or agents therefor using plasma means only
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/286—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials
    • H10P50/287—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials by chemical means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
PCT/US1998/025194 1997-12-19 1998-12-01 Method and composition for dry photoresist stripping in semiconductor fabrication Ceased WO1999033096A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE69837112T DE69837112T2 (de) 1997-12-19 1998-12-01 Verfahren und zusammensetzung zur entfernung von photoresist in der halbleiterfertigung
EP98961796A EP1053566B1 (en) 1997-12-19 1998-12-01 Method and composition for dry photoresist stripping in semiconductor fabrication
JP2000525912A JP2002531932A (ja) 1997-12-19 1998-12-01 半導体製造法における乾式法によるフォトレジストの剥離方法と組成

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/994,552 US6080680A (en) 1997-12-19 1997-12-19 Method and composition for dry etching in semiconductor fabrication
US08/994,552 1997-12-19

Publications (1)

Publication Number Publication Date
WO1999033096A1 true WO1999033096A1 (en) 1999-07-01

Family

ID=25540792

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/025194 Ceased WO1999033096A1 (en) 1997-12-19 1998-12-01 Method and composition for dry photoresist stripping in semiconductor fabrication

Country Status (7)

Country Link
US (1) US6080680A (https=)
EP (1) EP1053566B1 (https=)
JP (1) JP2002531932A (https=)
AT (1) ATE354176T1 (https=)
DE (1) DE69837112T2 (https=)
TW (1) TW494492B (https=)
WO (1) WO1999033096A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001031697A1 (en) * 1999-10-27 2001-05-03 Advanced Micro Devices, Inc. Plasma treatment for polymer removal after via etch
EP1225621A4 (en) * 1999-08-23 2007-03-28 Tokyo Electron Ltd etching method

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3252780B2 (ja) * 1998-01-16 2002-02-04 日本電気株式会社 シリコン層のエッチング方法
JP2000232107A (ja) * 1999-02-12 2000-08-22 Mitsubishi Electric Corp 半導体装置のパターン形成方法
JP2001077086A (ja) * 1999-08-31 2001-03-23 Oki Electric Ind Co Ltd 半導体装置のドライエッチング方法
US6727185B1 (en) * 1999-11-29 2004-04-27 Texas Instruments Incorporated Dry process for post oxide etch residue removal
US6440874B1 (en) * 2000-03-24 2002-08-27 Advanced Micro Devices, Inc. High throughput plasma resist strip process for temperature sensitive applications
US6461974B1 (en) * 2000-10-06 2002-10-08 Lam Research Corporation High temperature tungsten etching process
US6548231B1 (en) 2000-11-13 2003-04-15 Chartered Semiconductor Manufacturing Ltd. Enhanced passivation scheme for post metal etch clean process
DE10220586A1 (de) * 2002-05-08 2003-11-27 Infineon Technologies Ag Verfahren zum Entfernen von Resistschichten von einer Wolframoberfläche
US7229930B2 (en) * 2003-01-13 2007-06-12 Applied Materials, Inc. Selective etching of low-k dielectrics
US7112534B2 (en) * 2003-09-25 2006-09-26 Intel Corporation Process for low k dielectric plasma etching with high selectivity to deep uv photoresist
US6949460B2 (en) * 2003-11-12 2005-09-27 Lam Research Corporation Line edge roughness reduction for trench etch
US7022620B2 (en) * 2003-11-18 2006-04-04 Micron Technology, Inc. Conditioning of a reaction chamber
KR100641952B1 (ko) * 2004-02-06 2006-11-02 주식회사 하이닉스반도체 반도체 소자의 미세 패턴 형성 방법
US20050284573A1 (en) * 2004-06-24 2005-12-29 Egley Fred D Bare aluminum baffles for resist stripping chambers
US20060011578A1 (en) * 2004-07-16 2006-01-19 Lam Research Corporation Low-k dielectric etch
US20060228889A1 (en) * 2005-03-31 2006-10-12 Edelberg Erik A Methods of removing resist from substrates in resist stripping chambers
US20070269975A1 (en) * 2006-05-18 2007-11-22 Savas Stephen E System and method for removal of photoresist and stop layer following contact dielectric etch
CN101925984A (zh) * 2008-02-01 2010-12-22 朗姆研究公司 减小光阻剥离过程中对低k材料的损害

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102232A (ja) * 1986-10-17 1988-05-07 Tokuda Seisakusho Ltd ドライエツチング装置
JPH01112733A (ja) * 1987-10-27 1989-05-01 Fujitsu Ltd レジストのアッシング方法
US5174856A (en) * 1991-08-26 1992-12-29 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch
WO1997041488A2 (en) * 1996-04-26 1997-11-06 Ulvac Technologies, Inc. Processes for cleaning and stripping photoresist from surfaces of semiconductor wafers

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4699689A (en) * 1985-05-17 1987-10-13 Emergent Technologies Corporation Method and apparatus for dry processing of substrates
US4673456A (en) * 1985-09-17 1987-06-16 Machine Technology, Inc. Microwave apparatus for generating plasma afterglows
JPH0773104B2 (ja) * 1986-02-14 1995-08-02 富士通株式会社 レジスト剥離方法
JPS63152126A (ja) * 1986-12-16 1988-06-24 Fujitsu Ltd アツシング方法
US5298112A (en) * 1987-08-28 1994-03-29 Kabushiki Kaisha Toshiba Method for removing composite attached to material by dry etching
US5316616A (en) * 1988-02-09 1994-05-31 Fujitsu Limited Dry etching with hydrogen bromide or bromine
WO1990005994A1 (fr) * 1988-11-18 1990-05-31 Kabushiki Kaisha Tokuda Seisakusho Procede de gravure par la voie seche
JP2890432B2 (ja) * 1989-01-10 1999-05-17 富士通株式会社 有機物の灰化方法
US5658425A (en) * 1991-10-16 1997-08-19 Lam Research Corporation Method of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layer
US5269879A (en) * 1991-10-16 1993-12-14 Lam Research Corporation Method of etching vias without sputtering of underlying electrically conductive layer
US5221424A (en) * 1991-11-21 1993-06-22 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch
US5545289A (en) * 1994-02-03 1996-08-13 Applied Materials, Inc. Passivating, stripping and corrosion inhibition of semiconductor substrates
JPH08288255A (ja) * 1995-04-12 1996-11-01 Fujitsu Ltd 半導体装置の製造方法
JPH0969525A (ja) * 1995-08-31 1997-03-11 Mitsubishi Electric Corp 金属配線の処理方法
US5824604A (en) * 1996-01-23 1998-10-20 Mattson Technology, Inc. Hydrocarbon-enhanced dry stripping of photoresist

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63102232A (ja) * 1986-10-17 1988-05-07 Tokuda Seisakusho Ltd ドライエツチング装置
JPH01112733A (ja) * 1987-10-27 1989-05-01 Fujitsu Ltd レジストのアッシング方法
US5174856A (en) * 1991-08-26 1992-12-29 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch
WO1997041488A2 (en) * 1996-04-26 1997-11-06 Ulvac Technologies, Inc. Processes for cleaning and stripping photoresist from surfaces of semiconductor wafers

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 337 (E - 657) 12 September 1988 (1988-09-12) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 352 (E - 801) 8 August 1989 (1989-08-08) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1225621A4 (en) * 1999-08-23 2007-03-28 Tokyo Electron Ltd etching method
WO2001031697A1 (en) * 1999-10-27 2001-05-03 Advanced Micro Devices, Inc. Plasma treatment for polymer removal after via etch
US6431182B1 (en) 1999-10-27 2002-08-13 Advanced Micro Devices, Inc. Plasma treatment for polymer removal after via etch

Also Published As

Publication number Publication date
TW494492B (en) 2002-07-11
US6080680A (en) 2000-06-27
DE69837112D1 (de) 2007-03-29
EP1053566A1 (en) 2000-11-22
JP2002531932A (ja) 2002-09-24
ATE354176T1 (de) 2007-03-15
EP1053566B1 (en) 2007-02-14
DE69837112T2 (de) 2007-10-31

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