WO1989006037A1 - Data recording medium - Google Patents

Data recording medium Download PDF

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Publication number
WO1989006037A1
WO1989006037A1 PCT/JP1988/001312 JP8801312W WO8906037A1 WO 1989006037 A1 WO1989006037 A1 WO 1989006037A1 JP 8801312 W JP8801312 W JP 8801312W WO 8906037 A1 WO8906037 A1 WO 8906037A1
Authority
WO
WIPO (PCT)
Prior art keywords
film
information recording
protective film
substrate
oxygen
Prior art date
Application number
PCT/JP1988/001312
Other languages
English (en)
French (fr)
Inventor
Kiyoshi Tanii
Toshiaki Kashihara
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to DE3887882T priority Critical patent/DE3887882T2/de
Publication of WO1989006037A1 publication Critical patent/WO1989006037A1/ja

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2534—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/254—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers
    • G11B7/2542—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers consisting essentially of organic resins
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/256—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers improving adhesion between layers

Definitions

  • the present invention relates to an information recording carrier capable of optically recording and reproducing information.
  • an optical disk having a recording film made of a metal material a method of protecting the recording film with a moisture-resistant protective film or the like is used to prevent the recording layer from being oxidized and degraded.
  • a method of protecting the recording film with a moisture-resistant protective film or the like is used to prevent the recording layer from being oxidized and degraded.
  • the magneto-optical recording film made of rare earth and an amorphous metal alloy such as Fe and Co is a material that is easily oxidized, the role of the protective film is very large.
  • oxides such as S i 3 nitrides N 4 or the like and S i 0 2, T a 2 O s has been studied.
  • Substrate and Substrate 12 are molded substrates made of polycarbonate.
  • Protective film 8 on the substrate ⁇ , the magneto-optical recording film 9, and the coercive Mamorumaku 1 ⁇ are laminated in this order, then it by the adhesive layer 1 1 is bonded to the substrate.
  • the protective film 8 and the protective film 1O are AN, and protect the recording film 9 made of GdTbFeCo from both sides.
  • the conventional protective film still has a problem in preventing the recording film from being oxidized. In other words, in the case of a protective film made of nitride, cracks tend to occur in the film because stress remains in the protective film, and moisture and oxygen enter from the crack to damage the recording film. Had been oxidized. In the case of an oxide protective film, the moisture resistance is completely
  • An object of the present invention is to solve the conventional problem and to provide an information record carrier that is hardly cracked on the protective layer, has good crack resistance, and has excellent moisture resistance. Aim.
  • the information recording carrier of the present invention has a derivative containing anolemminium, nitrogen and oxygen as main components and having an oxygen content of 3 to 25% in atomic ratio. It is characterized in that it was used as a protective film for an optical disc.
  • the anode nitride is made of the nitrogen and the nitrogen.
  • the residual stress in the film can be reduced, and as a result, cracks are less likely to occur and the crack resistance can be increased as compared with a protective film made only of annealed aluminum.
  • FIG. 1 is a cross-sectional view of an information recording carrier according to an embodiment of the present invention
  • FIG. 2 is a characteristic diagram showing the moisture resistance of a protective film
  • FIG. 3 is a cross-sectional view of a conventional information recording carrier.
  • the substrate 1 is a molded substrate made of polycarbonate, on which a protective film 2, a recording film 3, and a protective film 4 are laminated in this order, and thereafter, an adhesive layer 5 made of an ultraviolet curable resin is used.
  • a substrate 6 made of polycarbonate is bonded.
  • the recording film 3 is a GdTbFeCo magneto-optical recording medium] 9
  • the protective film 2 and the protective film 4 are derivative films grooved with aluminum, nitrogen, and oxygen. is there.
  • Each of these three layers was formed by magnetron sputtering.
  • the protective films 2 and 4 were formed using a mixture of argon and oxygen as a discharge gas, using an anodized aluminum nitride as a sputtering target.
  • the oxygen content in the film was adjusted by controlling the oxygen partial pressure in the gas.
  • the oxygen content in the protective film was changed, and a high-temperature and high-humidity environment storage test was performed for each.
  • the environmental conditions were a temperature of 81C and a humidity of 80% RH.
  • the results of the coercive force change of the recording film (GdTbFeCo magneto-optical recording medium) by the test are shown in the figure.
  • the protective film according to the present invention is formed on both sides of the recording film 3. However, if the substrate 1, the substrate 6, or the adhesive layer 5 has sufficient moisture resistance, the protective film according to the present invention is formed. You can use only one side. That is, if only the side where moisture or oxygen is likely to enter is formed, a sufficient effect can be expected.
  • the recording film 3 may be a general rare earth-transition metal amorphous metal alloy film other than JdTbFeCo in the embodiment. — —
  • the moisture resistance of the protective film does not change even with a phase-change type recording film containing S, S, and the like.
  • the substrate 1 and the substrate 6 can be selected with a high degree of freedom, but a highly moisture-permeable epoxy resin, PMMA, etc.
  • the present invention can be applied to a single-plate grooved disk in which the substrate 6 and the adhesive layer 5 are provided instead of the base coat layer.
  • the crack resistance and the moisture resistance of the protective film can be improved, and the recording film can be prevented from being oxidized or degraded, and can be a highly reliable optical disk.
  • An information recording carrier such as a disc can be obtained.

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Description

明 細 書 .
発明の名称
情報記録担体
技術分野
本発明は、 光学的に情報の記録再生が可能 ¾情報記録担体に 関する。
背景技術
近年、 大容量の情報の蓄積に光ディ ス クを用いた再生専用型、 或は追記型の情報記録装置が用いられ始めている。 また光磁気 記録媒体や相変化型の媒体を用いた情報の消去書換え可能型の 情報記録装置の開発も活発に行われている。 これらの消去書換 え可能型の記録媒体の内、特に光磁気記録媒体は媒体寿命や再生信 号特性の点で実用化に最も近い記録媒体とる っている。
光磁気ディ ス クについては、 例えば、 アイ イ ーィ —ィ — ト ラ ンザク シ ヨ ン オ ン マグネテ イ ク ス ， MA G— 1 8卷 6号， 1 9 8 2年 1 1 月 ( I EEE TRANSACT I ON ON MAGNETICS , VOL . MAG-1 8 , e ， NOVEMBER 1 982 )第 1 233〜
1 2 3 7 ペー ジの 「光磁気デ ィ ス ク記録媒体」 （MAGNETO— OPT I CDI SK STORAGE )に記載されている。
金属材料から る記録膜を有する光ディ ス クでは、 記録瘼の 酸化劣化を防ぐために、 記録膜を耐湿性保護膜で保護する等の 手段が用いられている。 特に希土類と Fe , Co等のァ モ ノレ フ ァ ス合金からなる光磁気記録膜は、 酸化 しやすい材料のため、 保 護膜の役割は非常に大きい。
従来、 光磁気記録膜を有する光ディ ス クの保護腠材料と して、 . A N ， S i 3 N4等の窒化物や S i 02 ， T a 2Os 等の酸化物が検討 されてきた。
以下、 第 3図を参照しながら、 従来の光ディ スクの溝成の一 例を説明する。
5 基板了及び基板 1 2はポ リ カーボネィ トから る成形基板で ある。 この基板ァの上には保護膜 8、 光磁気記録膜 9、 及び保 護膜 1 〇が順に積層され、 その後、 接着層 1 1 によ って、 基板 と接着される。 ここで、 保護膜 8及び保護膜 1 Oは A N であ 、 Gd T b F e C oからなる記録膜 9を両側から保護している。 i o しかしながら、 従来の保護膜では、 まだ記録膜の酸化防止に 対し問題点がある。 すなわち、 窒化物からなる保護膜の場合は、 保護膜中に応力が残留するために、 膜にク ラ ッ クを生じ易く、 このク ラ ッ クから水分や酸素が侵入して、 記録膜を酸化させて いた。 また、 酸化物からなる保護膜の場合は、 耐湿性能が完全
1 5 ではな ぐ、 記録膜の酸化が進行するという問題が つた。
本発明は、 かかる従来の問題を解消して、 保護腠にク ラ ッ ク を生じ難くて耐ク ラ ッ ク性が良く、 しかも、 耐湿性も艮好な管 報記録担体を提供することを目的とする。
発明の開示
2.0 本発明の情報記録担体では、 上記問題点を解決するために、 ァノレミ ニゥム ， 窒素及び酸素を主成分と し、 酸素の含有量が原 子数比で 3 〜 2 5 %の範囲である誘導体を、 光ディ スクの保 護膜と して用いたことを特徵とするもので る。
このよ うにァノレ ミ ニゥム と窒素とからるる窒化ァノレ ミ ニゥム
25 に酸素を添加して保護膜を形成したことによ 、 作成した保護 — —
膜中の残留応力を低下させることができ、 このために窒化ァノレ ミ ニゥ ムのみから る保護膜と比較してク ラ ッ ク を生じ難く、 耐ク ラ ッ ク性を増すことができる。
そこで、 耐湿性能を損なわ ¾い程度の酸素を窒化ァ レミ ニゥ ムに含有させた材料から る保護膜を用いることによ 、 耐湿 性と耐ク ラ ッ ク性の双方を両立でき る倩報記録担体を実現する ことができたものである。
図面の簡単る説明
第 1 図は本発明の実施例の情報記録担体の断面図、 第 2図は 保護膜の耐湿性能を示す特性図、 第 3図は従来例の情報記録担 体の断面図である。
発明を実施するための最良の形態
以下、 本発明の実施例について、 第 1 図を参照 し がら説明 する。 - 基板 1 は、 ポ リ カ ーボネイ トから ¾る成形基板で、 この片面 に、 保護膜 2 ， 記録膜 3 ， 保護膜 4が順に積層され、 その後、 紫外線硬化樹脂からるる接着層 5によ 、 ポ リ カ ーボネ イ ト製 の基板 6が接着されている。 こ こで、 記録膜3は G d T b F e C o 光磁気記録媒体であ ]9、 保護膜 2及び保護膜 4は、 ア ミ ニゥ ム ， 窒素 ， 酸素で溝成される誘導体膜である。 これら 3層の膜 はいずれもマグネ ト ロ ンス パッ タ リ ングを用いて成膜した。 特 に、 保護膜 2及び保護膜 4は、 窒化ァノレ ミ ニ ゥ ム をス パ ッタ リ ングタ—ゲッ ト に用い、 ア ゴン と酸素の混合ガ スを放電ガス と して成膜した。 ここで、 ガス中の酸素分圧を制御することで、 膜中の酸素含有量を調節した。 上のよ う に溝成された光ディ スクにおいて、 保護膜中の酸 素含有量を変え、 それぞれについて高温高湿環境放置試験を行 なった。 環境条件は、 温度 8 0 1C ， 湿度 8 0 % R Hと した。 試 験による記録膜 （ GdTbFeCo光磁気記録媒体 ） の保磁力変化 の結果を図に示す。
この結果から明らか ¾よ うに、 酸素含有量が 2 5 a t 以下で あれば、 1 O O O時間の試験後も保磁力変化がないことが明ら かに つた。
また、 酸素を含ま い窒化ァノレミ ニゥ ム保護膜でも、 保磁力 の低下は認められるかつたが、 本試験で 2 O O時間経過後に、 記録膜に酸化による孔食が発生した。 これは、 保護膜中の残留 応力のために、 外部環境の変化で徵小ク ラ ッ クを生じ、 そこか ら、 水分が侵入して孔食を生ぜしめたものと考えられる。 保護 膜中に酸素を含—有させたも のでは、 いずれも孔食は発生しるか つた 0
これらの結果によ ]?、 ア ミ ニ ウ ム と窒素から る保護膜に、 原子数比で 3 %から 2 5 %までの酸素を含有させると、 優れた 保護効果を示すことが明らかになつた。
お、 本実施例では、 記録膜 3の両側に、 本発明による保護 膜を形成していたが、 基板 1 ， 基板 6あるいは、 接着詹 5に十 分 耐湿性があれば、 本発明による保護膜の使用は片側だけで も構わない。 つま ])、 水分や酸素の侵入が懸念される側のみ形 成されれば十分 ¾効果が期待でき る。
また、 記録膜 3は、 実施例にある JdTbFeCo以外の一般的 な希土類一遷移金属のァモ ノレ フ ァ ス合金膜でも よ く、 また、 Te — —
や S e 等を含む相変化型記録膜であっても保護膜の耐湿特性が 変わることはない。
また、 記録膜の保護効果は、 本発明の保護膜によ って十分満 足されているので、 基板 1 、 基板 6の選択にも自由度が広が 、 透湿性の高いェポキシ樹脂や P M M A等が使用でき、 更には、 基板 6や接着層 5がる く代わ に才ーバー コ 一 ト層が施してあ るだけの単板溝造デ ィ ス クへの応用も も ちろん可能とるる。 産業上の利用可能性
以上のよ う に、 本発明によれば、 保護膜の耐ク ラ ッ ク性と耐 湿性を向上することができて、 記録膜の酸化'劣化を生じること の い、 高信頼性の光ディ スク等の情報記録担体を得ることが でき る。

Claims

• 請 求 の 範 囲
1 . 平板状の基板の少く とも片側の面に、 金属を主成分とする 情報記録膜と少ぐ と もその片面を覆う誘導体膜を含む保護膜と を有し、 前記誘導体膜はァノレミ ニゥム ， 窒素及び酸素を主成分 と しかつその酸素の含有量が原子数比で 3 〜 2 5 %の範囲に あるものであることを特徴とする情報記録担体。
2 . 情報記録膜が、 希土類及び遷移金属を含む磁気光学記録材 料から ることを特徵とする請求の範囲第 1 項記載の情報記録 担体。
3 . 誘導体膜が、 平板状基板と情報記録膜との間にあることを 特徵とする請求の範囲第 1 項記載の情報記録担体。
4 . 情報記録膜が、 平板^:基板と誘導体膜の間にあることを特 徵とする請求の範囲第 1 項記載の情報記録担体。 5
0
5
PCT/JP1988/001312 1987-12-24 1988-12-23 Data recording medium WO1989006037A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3887882T DE3887882T2 (de) 1987-12-24 1988-12-23 Datenspeicherungsmedium.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62/328517 1987-12-24
JP62328517A JPH01169759A (ja) 1987-12-24 1987-12-24 情報記録担体

Publications (1)

Publication Number Publication Date
WO1989006037A1 true WO1989006037A1 (en) 1989-06-29

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WO (1) WO1989006037A1 (ja)

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JPH04106742A (ja) * 1990-08-27 1992-04-08 Shin Etsu Chem Co Ltd 光磁気記録媒体
US6222271B1 (en) 1997-07-15 2001-04-24 Micron Technology, Inc. Method of using hydrogen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom
TW574394B (en) * 1997-07-15 2004-02-01 Micron Technology Inc Method of using hydrogen and oxygen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom
US5969423A (en) 1997-07-15 1999-10-19 Micron Technology, Inc. Aluminum-containing films derived from using hydrogen and oxygen gas in sputter deposition
JP2000113426A (ja) * 1998-10-06 2000-04-21 Tdk Corp 薄膜デバイス、薄膜磁気ヘッドおよび磁気抵抗効果素子

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS61198450A (ja) * 1985-02-27 1986-09-02 Fujitsu Ltd 光デイスク保護膜の形成方法
JPS62197939A (ja) * 1986-02-24 1987-09-01 Oki Electric Ind Co Ltd 光磁気記録用媒体
JPS62275340A (ja) * 1986-02-05 1987-11-30 Oki Electric Ind Co Ltd 光磁気記録用媒体の保護膜

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US4680742A (en) * 1984-07-07 1987-07-14 Kyocera Corporation Magneto-optical recording element
DE3716736A1 (de) * 1987-05-19 1988-12-01 Basf Ag Flaechenfoermiges, mehrschichtiges, magneto-optisches aufzeichnungsmaterial

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JPS61198450A (ja) * 1985-02-27 1986-09-02 Fujitsu Ltd 光デイスク保護膜の形成方法
JPS62275340A (ja) * 1986-02-05 1987-11-30 Oki Electric Ind Co Ltd 光磁気記録用媒体の保護膜
JPS62197939A (ja) * 1986-02-24 1987-09-01 Oki Electric Ind Co Ltd 光磁気記録用媒体

Non-Patent Citations (1)

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Title
See also references of EP0352333A4 *

Also Published As

Publication number Publication date
JPH01169759A (ja) 1989-07-05
EP0352333A4 (en) 1991-01-16
EP0352333A1 (en) 1990-01-31
DE3887882D1 (de) 1994-03-24
DE3887882T2 (de) 1994-06-01
EP0352333B1 (en) 1994-02-16

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