USRE42619E1 - Magnetic tunnel junction magnetic device, memory and writing and reading methods using said device - Google Patents

Magnetic tunnel junction magnetic device, memory and writing and reading methods using said device Download PDF

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USRE42619E1
USRE42619E1 US11/861,974 US86197402A USRE42619E US RE42619 E1 USRE42619 E1 US RE42619E1 US 86197402 A US86197402 A US 86197402A US RE42619 E USRE42619 E US RE42619E
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layer
magnetic
storage
magnetization
storage layer
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Bernard Dieny
Olivier Redon
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1659—Cell access
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1675—Writing or programming circuits or methods
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5607—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using magnetic storage elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/329—Spin-exchange coupled multilayers wherein the magnetisation of the free layer is switched by a spin-polarised current, e.g. spin torque effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
    • H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets

Definitions

  • the present invention concerns a magnetic tunnel junction device and a memory using said device.
  • the invention further concerns a thermomagnetic writing method in said device and a reading method of said device.
  • the invention finds an application in electronics and, in particular, in the formation of storage elements and MRAM (Magnetic Random Access Memory) type memories or direct (or random) access magnetic memory.
  • MRAM Magnetic Random Access Memory
  • MRAM magnetic memories There has been renewed interest in MRAM magnetic memories with the development of MTJ (magnetic tunnel junctions) that have high magnetoresistance at ambient temperature.
  • MTJ magnetic tunnel junctions
  • FIGS. 1A and 1B schematically illustrate the structure and the function of a known magnetic tunnel junction.
  • the junction bears the reference 2 . It is a stack comprising an oxide layer 3 b sandwiched between two magnetic layers. This system functions like a spin gate, with the difference that the current flows perpendicularly to the planes of the layers.
  • One 3 a of the magnetic layers is called “free” or “storage” since one can orient its magnetisation in the desired direction by means of an external magnetic field (two directional arrow); the other magnetic layer 3 c is called “pinned” or “reference” since its magnetisation direction is fixed by exchange coupling with an antiferromagnetic layer (single directional arrow).
  • the resistance of the junction is high; when the magnetisations are parallel, said resistance becomes low.
  • the relative variation of resistance between these two states can attain 40% through an appropriate choice of materials for the layers in the slack and/or thermal treatments of said materials.
  • the junction 2 is placed between a switching transistor 4 and a current supply line 6 forming an upper conductive line.
  • a current I 1 flowing in said line produces a first magnetic field 7 .
  • a conductor 8 forming a lower conductive line, orthogonal to the current supply line 6 enables, by making a current I 2 flow in said line, a second magnetic field 9 to be produced.
  • the transistor 4 In the “writing” mode ( FIG. 1A ), the transistor 4 is placed in blocked mode and therefore no current passes through this transistor. One circulates current impulses in the current supply line 6 and in the conductor 8 . The junction 2 is therefore subjected to two orthogonal magnetic fields. One is applied along the axis of difficult magnetisation of the free layer 3 a, in order to reduce its reversal field, whereas the other is applied along its easy axis in order to provoke the reversal of the magnetisation and thus the writing of the storage element.
  • the transistor In the “reading” mode ( FIG. 1B , the transistor is place in saturated regime (in other words, the current crossing this transistor is maximum) by sending a positive current impulse in the gate of the transistor.
  • the current 13 sent in the line 6 only crosses the storage element in which the transistor is placed in saturated mode.
  • the state of the storage element (“0” or “1”) may thus be determined: one then knows if the magnetisation of the storage layer 3 a is parallel or antiparallel to that of the reference layer 3 c.
  • the writing mode uses two current lines at 90°, which limits the integration density.
  • the aim of the present invention is to overcome the above-mentioned disadvantages.
  • a further aim of the present invention is to improve magnetic memories by reducing the size of their storage elements, while at the same time keeping the information stable at ambient temperature, as well as the level of writing errors of said memories.
  • the present invention concerns a magnetic device comprising a magnetic tunnel junction that comprises:
  • a first magnetic layer forming a reference layer and having a magnetisation of fixed direction
  • a second magnetic layer forming a storage layer and having a magnetisation of variable direction
  • a third layer that is semiconductive or electrically insulating and which separates the first layer from the second layer
  • means for heating the storage layer to a temperature higher than the blocking temperature of the magnetisation of said storage layer said means of heating the storage layer being means provided to make an electric current flow through the magnetic tunnel junction
  • the blocking temperatures of the storage and reference layers have values greater than the value of the operating temperature of the device outside of heating of the tunnel junction (one knows that the device heats up when it operates).
  • the magnetisation of each of the storage and reference layers is substantially perpendicular to the plane of said layers.
  • the storage layer may be a mono-layer in Co—Pt or Co—Pd alloy or a multi-layer formed by a stack of Co layers alternating with layers of Pt or Pd in such a way that the coercive field of the storage layer rapidly decreases when the temperature increases.
  • the storage layer may be a mono-layer in cobalt rich alloy with iron or nickel or chromium and platinum or palladium, or a multi-layer formed by a stack of layers of an alloy rich in cobalt with iron or nickel or chromium, alternating with layers of Pt or Pd in such a way that the coercive field of the storage layer rapidly decreases when the temperature increases.
  • each of the storage and reference layers is substantially parallel to the plane of said layers.
  • the device of the invention may further comprise a first antiferromagnetic layer combined with the reference layer.
  • the blocking temperature of the magnetisation of said first antiferromagnetic layer is higher than the blocking temperature of the storage layer.
  • the reference layer is a multi-layer comprising two magnetic layers and an intermediate layer in Ru or Re or Ir or Rh, the two magnetic layers being separated by the intermediate layer and coupled in an antiparallel manner by interaction through said intermediate layer.
  • said device further comprises a second antiferromagnetic layer coupled to the storage layer by exchange anisotropy.
  • the blocking temperature of the magnetisation of said second antiferromagnetic layer is lower than the blocking temperature of the reference layer.
  • the means of applying the magnetic field torque to the magnetization of the storage layer may comprise means of injecting, in said storage layer, a current of electrons in which the spin is polarised.
  • the present invention also concerns a memory comprising a matrix of storage elements that are addressable by addressing lines and columns, said memory being characterised in that each storage element comprises:
  • each magnetic device being linked to an addressing line and each means of switching being linked to an addressing column.
  • the present invention also concerns a method for writing information in a magnetic device according to the invention, in which:
  • the value, seen by the reference layer, of the magnetic field applied during the storage is less than the value that the reversal magnetic field of the magnetisation of the reference layer reaches at the maximum temperature attained by said layer during the heating of the junction.
  • the storage layer is coupled to an antiferromagnetic layer by exchange anisotropy and one heats the storage layer and said antiferromagnetic layer to a temperature higher than the blocking temperatures of the magnetisation of said layers and, during the cooling of the antiferromagnetic layer, one orientates the magnetisation of the storage layer in any direction whatsoever predefined by the direction of magnetisation of the magnetic field applied during the cooling,
  • the present invention further concerns a method for reading information memorised in a device according to the invention, in which
  • FIGS. 1A and 1B schematically illustrate the operating principle of a known magnetic tunnel junction device, and have already been described
  • FIG. 2 is a schematic and partial view of a memory comprising a matrix of magnetic tunnel junction devices
  • FIG. 3 schematically illustrates the operating principle of a magnetic tunnel junction device according to the invention
  • FIG. 4 is a schematic cross sectional view of a tunnel junction that may be used in the present invention and in which the layers have a magnetisation perpendicular to the plane of said layers,
  • FIG. 5 is a graph illustrating the formation of two different coercive fields by coupling to an antiferromagnetic material one of the two layers of a tunnel junction that may be used in the invention
  • FIG. 6 is a graph showing the variations in the reversal field as a function of the temperature for multi-layers that may be used in the invention.
  • FIG. 7 schematically illustrates an example of a series of magnetic devices according to the invention, using tunnel junctions with magnetisation perpendicular to the plane of their layers,
  • FIG. 8 schematically illustrates an example of magnetic device according to the invention, using the combination of heating by Joule effect and magnetic switching by injection of a current of electrons in which the spin is polarised
  • FIG. 9 is a schematic cross sectional view of an example of tunnel junction that may be used in the invention and has a planar magnetisation
  • FIG. 10 is a schematic view of an example of magnetic device according to the invention, using a tunnel junction with planar magnetisation, and
  • FIG. 11 is a schematic view of another example of said device.
  • a magnetic memory comprises a matrix of magnetic devices according to the invention.
  • Each of said devices also called “storage elements”, comprises a magnetic tunnel junction of the form F 1 /O/F 2 where F 1 and F 2 respectively designate the magnetic storage layer, also called the “storage magnetic electrode”, and the magnetic reference layer, also called “reference magnetic electrode”, and O designates the layer that is comprised between F 1 and F 2 and forms a tunnel barrier.
  • Each of the layers F 1 and F 2 is characterised by a reversal field of its magnetisation, said field being a function of the temperature of the material forming this layer.
  • the materials of layers F 1 and F 2 are chosen in such a way that the reduction in temperature of the reversal field of layer F 1 , designated HcF 1 , is a lot quicker than that of the reversal field of layer F 2 , designated HcF 2 .
  • the materials for layers F 1 and F 2 in such a way that their reversal fields are, at ambient temperature (around 20° C.), around 100 Oe (around 8000 A/m) for F 1 (it is recalled that 1 Oe equals 1000/(4 ⁇ ) A/m) and around 600 Oe (around 48000 A/m) for F 2 and, at 200° C., around 5 Oe (around 400 A/m) for F 1 and 400 Oe (around 32000 A/m) for F 2 .
  • the materials for layers F 1 and F 2 in such a way that the blocking temperature of the magnetisation of layer F 1 , also called “magnetic blocking temperature” of layer F 1 or, more simply, “blocking temperature” of layer F 1 , is significantly lower than the blocking temperature of the magnetisation of layer F 2 .
  • the principle of the selection of a storage element then consists in provoking a very brief heating (up to a temperature Tmax, typically up to 200° C.) of said storage element, said heating having the effect of lowering the reversal field of the magnetisation of the magnetic layer F 1 in which the information is stored.
  • the storage and reference layers must preferably have blocking temperatures higher than the operating temperature of the device outside of heating.
  • the heating of the junction may be controlled by sending a short current impulse (around 10 5 A/cm 2 to 10 6 A/cm 2 for a few nanoseconds) through the junction.
  • the magnetic field He is created by sending current impulses in the conductive lines situated in the planes lying above and/or below the magnetic tunnel junctions.
  • a second possibility of provoking the switching of the magnetisation of the storage layer during its cooling may consist in injecting in said layer a current of electrons in which the spin is polarised, according to one of the techniques detailed hereafter.
  • the present invention consists in this case in combining the heating of the material of the storage layer, in order to reduce the reversal field of the magnetisation of said layer, with the application of a magnetic torque to this magnetisation, during the cooling of the storage layer, by flowing a current of electrons in which the spin is polarised through the storage layer.
  • the present invention enables much better selection of storage elements than known technologies. Indeed, let us assume that the storage elements are organised into a square array as seen in FIG. 2 , which represents the architecture of a known MRAM.
  • control lines 14 that act on the transistor gates 4 to put them into the passing position (saturated) or closed position (blocked).
  • the writing is carried out by sending current impulses along the upper and lower conductive lines, which cross at the storage element that one wishes to address.
  • certain storage elements situated along the lines risk reversing in an uncontrolled manner.
  • FIG. 3 shows a magnetic device 16 according to the invention, forming a storage element, or cell, of a MRAM memory according to the invention.
  • Said storage element comprises a magnetic tunnel junction 18 , comprising a storage layer 20 a, a reference layer 20 c and an insulating or semiconduetive layer 20 b between these layers.
  • This junction is placed between an upper conductive line 22 and a switching transistor 24 and combined with a lower conductive line 26 that is perpendicular to the line 22 .
  • junctions of the memory of FIG. 3 are organised in a square array as in the memory in FIG. 2 (in which the references of the elements are moreover followed, in brackets, by references of the corresponding elements of FIG. 3 ). Consequently, only one junction of the whole array will be heated by the current impulse 30 , all of the others remaining at ambient temperature.
  • the lowering of the reversal field linked to the temperature rise (typically from 100 Oe, at 20° C., to 5 Oe, at 200° C.) is a much more significant than the distribution width of the reversal field at ambient temperature (typically 100 Oe ⁇ 20 Oe).
  • the line 26 is not indispensable for creating the magnetic field.
  • the operation of the storage element 16 of FIG. 3 is therefore as follows: since the addressing transistor 24 is in the passing state, the writing is achieved by sending a current impulse through the junction 18 to heat the junction up to around 200° C. During the cooling of the junction, a current impulse is sent in the lower conductive line 26 to generate a magnetic field in the storage layer 20 a, which has the effect of switching the magnetisation of said layer in the desired direction.
  • the reading is achieved with the transistor in the passing state by making a current flow through the junction (the current being lower than during the writing so that the heating is less), which makes it possible to measure the resistance and thus to know if the magnetisation of the storage layer 20 a is parallel or antiparallel to that of the reference layer 20 c.
  • the electrical consumption may be divided by 10 with the operating principle of the present invention.
  • the present invention makes it possible to use, for the storage layer, materials with high pinning energy at ambient temperature. In the prior art, this is not possible since the higher the pinning of the storage layer, the more it is necessary to supply energy to switch the magnetisation of the storage layer.
  • K and V respectively designate the magnetic anisotropy per unit of volume (or, more generally, the pinning energy per unit of volume) and the volume of the storage layer, the information becomes unstable if KV ⁇ 25 kT (where k is the Boltzmann constant and T the temperature).
  • this limit is always reached at one moment or another when one reduces the size of the storage element whereas, in the present invention, one can very easily compensate the reduction in the volume by an increase in the pinning energy at ambient temperature and thus reduce the size of the storage element as far as the manufacturing method used (for example, lithography/engraving) allows.
  • the basic structure in the present invention, comprises two magnetic layers F 1 and F 2 separated by a tunnel barrier O in such a way that one may designate this structure F 1 /O/F 2 .
  • the two magnetic layers are such that the reversal field of the magnetisation of one of these two magnetic layers (the storage layer) decreases much more quickly, when the temperature increases, than that of the other magnetic layer (the reference layer).
  • the magnetisations of the two layers F 1 and F 2 are perpendicular to the plane of the layers or, more precisely, to the interfaces of said layers.
  • Layers F 1 and F 2 may comprise a pure material, an alloy or a series of alternating layers, certain of which are magnetic.
  • Co layers of hexagonal structure, have their magnetisation perpendicular to the plane of these layers if the axis c of the hexagonal lattice is perpendicular to the plane of the sample containing said layers. Alloy layers such as CoPt, FePd and FePt may also have magnetisations perpendicular to their planes. Finally, multi-layers comprising alternating layers of two different materials at least one of which is magnetic, such as for example Co 0.6 nm/Pt 1.4 nm, may also have magnetisations perpendicular to the plane.
  • the cobalt may easily be replaced by an alloy rich in Co (greater than 70%) with for example Fe or Ni or Cr.
  • FIG. 4 An example of forming a multi-layer Co/Pt based magnetic tunnel junction, which may be used in the present invention, is shown in FIG. 4 .
  • said magnetic tunnel junction comprises a reference layer 36 and a storage layer 38 that have a magnetisation perpendicular to the plane of said layers;
  • the reference layer 36 comprises layers 40 in cobalt that alternate with layers 42 in platinum;
  • the storage layer 38 comprises layers 44 in cobalt that alternate with layers 46 in platinum;
  • the layers 36 and 38 are separated by a tunnel barrier layer 48 in alumina.
  • the adjacent ferromagnetic layer sees the value of its blocking temperature increase up to the value of that of the antiferromagnetic layer.
  • perpendicular anisotropy multi-layers which may be used in the invention, are for example Co/Pd, Co/Ni and Cu/Ni.
  • FIG. 5 shows that one may obtain a structure with magnetisation perpendicular to the plane, which combines two multi-layers with different coerciveness.
  • the increase in the coerciveness of one of the multi-layers is obtained by coupling the magnetisation of said multi-layer to an adjacent antiferromagnetic layer (for example, NiO (case of FIG. 5 ), PtMn, PdPtMn or FeMn).
  • an adjacent antiferromagnetic layer for example, NiO (case of FIG. 5 ), PtMn, PdPtMn or FeMn.
  • the same result may be obtained by combining a multi-layer of Co/Pt to an alloy of FePt.
  • each of the abovementioned materials has its own variation of coercive field as a function of the temperature.
  • FIG. 6 shows, for example, the variations in the Hr reversal field (in Oe) of a multi-layer (Co 0.6 nm/Pt 1.4 nm) as a function of the temperature T (in ° C.) for a “full wafer” wafer, of macroscopic lateral dimension (curve I), and in arrays of pads of submicronic dimensions (curve II).
  • the Hr reversal field decreases rapidly with the temperature and virtually cancels itself out at a temperature Tc of around 200° C.
  • the reversal field decreases less rapidly, in other words cancels out at a temperature greater than 200° C. Similarly, in the alloy FePt, the reversal field cancels out around 500° C.
  • a magnetic tunnel junction that combines a multi-layer, formed of alternating layers of Co and layers of Pt, with a FePt alloy electrode, one forms a structure according to the invention.
  • a current impulse By sending a current impulse through the junction, one raises the temperature of said junction up to around 200° C.
  • FIG. 7 illustrates an example of forming a series of several storage elements from tunnel junctions with magnetisation perpendicular to the plane according to the present invention.
  • Said junctions 52 a, 52 b, 52 c and 52 d each comprise a reference layer 54 , a storage layer 56 and, between these, an insulating or semiconductive layer 58 .
  • Said junctions 52 a, 52 b, 52 c and 52 d are placed between the switching transistors 60 a, 60 b, 60 c and 60 d and a conductive line 62 .
  • upper conductive lines such as the lines 64 , 66 and 68 , which are located on either side of the junctions.
  • junction 52 b For the writing of a storage element, for example that which comprises the junction 52 b, said junction is heated above the blocking temperature of the storage layer but below the blocking temperature of the reference layer by sending an impulse through the junction.
  • the transistors are put in the blocked state except for the transistor 60 b combined with the junction 52 b, which is put in the passing state.
  • the two upper conductive lines 64 and 66 located on either side of the junction to address 52 b are supplied by substantially opposite currents to create two magnetic fields 70 and 72 substantially perpendicular to the plane, which add themselves to the level of the junction to be addressed. Said fields serve to polarise the magnetisation of the storage layer during its cooling below its blocking temperature.
  • the magnetisation of the storage layer may take here two states (binary storage).
  • a second method for achieving the switching during the cooling consists in injecting a current of electrons with polarised spin through the storage layer.
  • a structure that makes it possible to carry out this operation is shown in FIG. 8 .
  • FIG. 8 shows a stack 74 placed between an upper conductive line 76 and a switching transistor 78 .
  • the stack comprises, going from the line 76 to the transistor 78 , a layer 80 in PtMn, a reference layer 82 , an alumina layer 84 , a storage layer 86 , a copper layer 88 , a layer 90 called “polarising” and a layer 92 in PtMn.
  • the storage layer 86 here comprises a material with perpendicular magnetisation in which the reversal field cancels out around 200° C. such as, for example, a multi-layer (Co/Pt).
  • the reference layer 82 comprises a material in which the reversal field and the magnetisation remain significant at 200° C. such as, for example, FePt.
  • the magnetisation of the second magnetic layer of FePt forming the polarising layer 90 remains significant at 200° C.
  • the principle of magnetic switching is as follows: one applies a current impulse either from the top to the bottom or from the bottom to the top through the tunnel junction.
  • Said current impulse has a specific profile: it shows its maximum value in a time of around 1 ns to several nanoseconds then drops again progressively to zero in several nanoseconds.
  • Said current impulse has the effect, in a first phase, of heating the junction then, in a second phase, during the decrease of the current, in other words during the cooling of the junction, of orientating the magnetisation in a specific direction.
  • electrons with spin polarised “towards the bottom” are injected into the multi-layer of Co/Pt.
  • the electrons that are going to cross the alumina barrier 84 by tunnel effect are preferentially electrons in which the spin is parallel to the magnetisation of the layer 82 of FePt and are thus electrons with spin “towards the top”.
  • the interest of the additional polarising layer 90 is to make it possible to cumulate the current of electrons with polarised spin coming from the other layer 82 of the tunnel junction and the current of electrons with polarised spin coming from the polarising layer 90 .
  • This structure of the storage element is particularly simple since it only requires, in addition to the addressing transistor and the tunnel junction, one level of conductive line.
  • the magnetisations of the two layers F 1 and F 2 are parallel to the plane of the layers or, more precisely, to the interfaces of said layers.
  • the magnetic materials making up the magnetic tunnel junction must be chosen in such a way that one has a faster thermal decrease of its coercive field than the other.
  • the material of the reference layer F 2 may be an alloy based on Co, Fe, Ni (for example COCo 90 Fe 10 ) and its magnetisation may be pinned by an exchange interaction with an antiferromagnetic material with high blocking temperature (a lot higher than 200° C.) such as PtMn.
  • the material of layer F 1 may be formed of art alloy in which the Curie temperature is reduced in volume to enable the switch over of its magnetisation to be facilitated when said material is heated to around 200° C.
  • An advantageous means of obtaining this property consists in coupling the magmetisation of the storage layer to an antiferromagnetic layer with low blocking temperature (for example Fe 50 Mn 50 or Ir 20 Mn 80 in which the blocking temperature is below 200° C. where as the magnetisation of the other magnetic layer (the reference layer) is coupled to an antiferromagnetic layer with high blocking temperature, for example PtMn in which the blocking temperature is greater than 280° C.
  • low blocking temperature for example Fe 50 Mn 50 or Ir 20 Mn 80 in which the blocking temperature is below 200° C.
  • FIG. 9 shows an example of tunnel junction with planar magnetisation that may be used in the present invention.
  • the reference layer 94 in Co 90 Fe 10 is pinned by interaction with an antiferromagnetic layer 96 with high blocking temperature (well above 200° C.), for example in PtMn or NiMn.
  • the storage layer 98 in Ni 80 Fe 20 is coupled to an antiferromagnetic layer 100 with low blocking temperature (between 100° C. and 200° C.), for example in Fe 50 Mn 50 or in Ir 20 Mn 80 and said layer 98 is separated from the layer 94 by a tunnel barrier layer 102 in Al 2 O 3 .
  • one way of lowering the blocking temperature of the antiferromagnetic layer coupled to the storage layer may be to reduce its thickness. Indeed, it is known that the thinner an antiferromagnetic layer, the lower its blocking temperature.
  • the writing of the information is carried out as previously by sending a current impulse through the junction, which has the effect of heating the material of the storage layer (comprising the adjacent antiferromagnetic layer) to a temperature enabling the reversal of the magnetisation of said layer, whereas the reference layer remains at a sufficiently low temperature for its magnetisation to remain fixed.
  • FIG. 10 shows an example of forming a storage element from a tunnel junction with planar magnetisation according to the present invention.
  • the junction is heated above the blocking temperature of the storage layer 98 but below the blocking temperature of the reference layer 94 , by sending a current impulse through the junction, said impulse going along the conductive line 104 to the transistor 106 , which is then made passing.
  • the upper conductive line 108 serves to create the magnetic field 110 , which polarises the magnetisation of the storage layer 98 in the desired direction during its cooling. Said magnetisation of the storage layer can only take here two states (binary storage).
  • the line 108 is not obligatory: its function may advantageously be performed by the line 104 . In this case, one also has to verify that the magnetisation directions of the layers are orthogonal to the direction of the line 104 .
  • This device in which the storage layer is coupled to an antiferromagnetic layer in which the blocking temperature is lower than the reference layer, has two major advantages.
  • the magnetic storage layer is coupled to an antiferromagnetic layer in which the anisotropy is relatively high at ambient temperature but decreases rapidly when one approaches the blocking temperature of said layer (around 200° C.), then the superparamagnetic limit is pushed back.
  • the energy barrier to overcome to reverse the magnetisation of the storage layer at ambient temperature is now equal to A(K f E f +K a E a ) where A designates the common area of the magnetic storage layer and the antiferromagnetic layer, E f and E a respectively designate the thicknesses of said storage and antiferromagnetic layers and K f and K a respectively designate their magnetic anisotropies.
  • K a E a may be 100 times higher at ambient temperature than the term K f E f . This implies that the area of the junction may be 100 times smaller while at the same time remaining above the superparamagnetic limit. Consequently, this makes it possible to attain much high higher integration densities.
  • a storage element has two possible states that correspond to the two magnetic configurations parallel and antiparallel, said configurations corresponding respectively to parallel and antiparallel alignments of the magnetisation of the storage layer in relation to that of the reference layer.
  • bistable type systems are obtained by giving to the storage layer a magnetic anisotropy of magnetocrystalline or shape (storage element, for example, of elliptic shape) origin, with an easy magnetisation axis parallel to the magnetisation of the reference layer.
  • the magnetisation of the storage layer may advantageously be orientated in any intermediate direction between the direction parallel and the direction antiparallel to the magnetisation of the reference layer.
  • Said lines make it possible to generate magnetic fields along two perpendicular directions. By playing on the relative intensity of the current flowing in the two lines, one can generate a magnetic field in any direction to in the plane of the storage layer.
  • FIG. 11 shows an example of forming a storage element from a tunnel junction with planar magnetisation according to the present invention.
  • the magnetic tunnel junction is heated above the blocking temperature of the storage layer 112 but below the blocking temperature of the reference layer 114 , by sending a current impulse through the junction.
  • the upper 116 and lower 118 conductive lines serve to create magnetic fields 120 and 122 along two perpendicular directions in the plane, which makes it possible to polarise the magnetisation of the storage layer 112 in any desired direction in the plane of the junction, during its cooling.
  • the line 116 is not indispensable: it may be replaced by the line 124 .
  • the magnetisation of the storage layer may therefore take here more than two states (multilevel storage).
  • the reference 123 designates the tunnel barrier layer. Also shown are the conductive line 124 and the switching transistor 126 between which the junction is placed and which makes it possible to make a current flow through said junction when the transistor operates in saturated mode.
  • the magnetisation of the magnetic layer creating the polarisation of the spin of the electrons injected must be substantially perpendicular to the magnetic field generated by the current flowing in the conductive line.
  • the writing is carried out by measuring the level of resistance of the junction.
  • ⁇ R/R par (R ant ⁇ R par )/R par is the total magnetoresistance amplitude.
  • the reading of the level of intermediate resistance between the parallel resistance R par and the antiparallel resistance R ant therefore makes it possible to determine the direction of the magnetisation of the storage layer.
  • Said thin layers may be magnetic layers, intended to reinforce the polarisation of the electrons in the neighbourhood of the interface with the tunnel barrier layer, or non magnetic layers making it possible to form quantum wells depending on the spin in the neighbourhood of the tunnel barrier layer or to increase the magnetic decoupling of two magnetic layers on either side of the tunnel junction.

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