FR2892231B1 - Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire - Google Patents

Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire

Info

Publication number
FR2892231B1
FR2892231B1 FR0510533A FR0510533A FR2892231B1 FR 2892231 B1 FR2892231 B1 FR 2892231B1 FR 0510533 A FR0510533 A FR 0510533A FR 0510533 A FR0510533 A FR 0510533A FR 2892231 B1 FR2892231 B1 FR 2892231B1
Authority
FR
France
Prior art keywords
magnetic
random access
layer
tunnel junction
magnetoresistive tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0510533A
Other languages
English (en)
Other versions
FR2892231A1 (fr
Inventor
Bernard Dieny
Anatoly Vedyaev
Vincent Jerome Faure
Matthieu Warin
Matthieu Jamet
Yves Samson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0510533A priority Critical patent/FR2892231B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to CN2006800381280A priority patent/CN101288186B/zh
Priority to DE602006019897T priority patent/DE602006019897D1/de
Priority to PCT/EP2006/067374 priority patent/WO2007042563A1/fr
Priority to AT06807238T priority patent/ATE497259T1/de
Priority to US12/083,398 priority patent/US7821818B2/en
Priority to EP06807238A priority patent/EP1949466B1/fr
Priority to KR1020087008675A priority patent/KR20080063767A/ko
Priority to JP2008535037A priority patent/JP5468262B2/ja
Priority to TW095137826A priority patent/TWI459385B/zh
Publication of FR2892231A1 publication Critical patent/FR2892231A1/fr
Application granted granted Critical
Publication of FR2892231B1 publication Critical patent/FR2892231B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
    • G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1675—Writing or programming circuits or methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
    • H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F41/305—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Magnetic Heads (AREA)
  • Semiconductor Memories (AREA)
FR0510533A 2005-10-14 2005-10-14 Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire Expired - Fee Related FR2892231B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR0510533A FR2892231B1 (fr) 2005-10-14 2005-10-14 Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire
JP2008535037A JP5468262B2 (ja) 2005-10-14 2006-10-13 磁気抵抗トンネル接合素子およびｍｒａｍへのその適用
PCT/EP2006/067374 WO2007042563A1 (fr) 2005-10-14 2006-10-13 Dispositif magnétique de jonction de tunnel magnétorésistif et son application à un mram
AT06807238T ATE497259T1 (de) 2005-10-14 2006-10-13 Magnetoresistive tunnelübergangs-magnetanordnung und ihre anwendung auf mram
US12/083,398 US7821818B2 (en) 2005-10-14 2006-10-13 Magnetoresistive tunnel junction magnetic device and its application to MRAM
EP06807238A EP1949466B1 (fr) 2005-10-14 2006-10-13 Dispositif magnétique de jonction de tunnel magnétorésistif et son application à un mram
CN2006800381280A CN101288186B (zh) 2005-10-14 2006-10-13 磁阻隧道结磁性器件及其在磁性随机存取存储器中的应用
DE602006019897T DE602006019897D1 (de) 2005-10-14 2006-10-13 Magnetoresistive tunnelübergangs-magnetanordnung und ihre anwendung auf mram
TW095137826A TWI459385B (zh) 2005-10-14 2006-10-13 磁阻隧道接面磁性裝置及其在磁性隨機存取記憶體之應用
KR1020087008675A KR20080063767A (ko) 2005-10-14 2006-10-13 자기저항성 터널 접합 자기 소자 및 ｍｒａｍ에의 적용

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0510533A FR2892231B1 (fr) 2005-10-14 2005-10-14 Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire

Publications (2)

Publication Number Publication Date
FR2892231A1 FR2892231A1 (fr) 2007-04-20
FR2892231B1 true FR2892231B1 (fr) 2008-06-27

Family

ID=36481516

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0510533A Expired - Fee Related FR2892231B1 (fr) 2005-10-14 2005-10-14 Dispositif magnetique a jonction tunnel magnetoresistive et memoire magnetique a acces aleatoire

Country Status (10)

Country Link
US (1) US7821818B2 (fr)
EP (1) EP1949466B1 (fr)
JP (1) JP5468262B2 (fr)
KR (1) KR20080063767A (fr)
CN (1) CN101288186B (fr)
AT (1) ATE497259T1 (fr)
DE (1) DE602006019897D1 (fr)
FR (1) FR2892231B1 (fr)
TW (1) TWI459385B (fr)
WO (1) WO2007042563A1 (fr)

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FR2892231A1 (fr) 2007-04-20
US7821818B2 (en) 2010-10-26
WO2007042563A1 (fr) 2007-04-19
KR20080063767A (ko) 2008-07-07
ATE497259T1 (de) 2011-02-15
EP1949466B1 (fr) 2011-01-26
CN101288186B (zh) 2011-06-29
TW200733104A (en) 2007-09-01
EP1949466A1 (fr) 2008-07-30
TWI459385B (zh) 2014-11-01
JP5468262B2 (ja) 2014-04-09
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US20090231909A1 (en) 2009-09-17
CN101288186A (zh) 2008-10-15

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