US6905576B1 - Method and system for producing silane - Google Patents

Method and system for producing silane Download PDF

Info

Publication number
US6905576B1
US6905576B1 US09/868,792 US86879201A US6905576B1 US 6905576 B1 US6905576 B1 US 6905576B1 US 86879201 A US86879201 A US 86879201A US 6905576 B1 US6905576 B1 US 6905576B1
Authority
US
United States
Prior art keywords
sih
boiling
containing product
product
reactive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US09/868,792
Other languages
English (en)
Inventor
Hans-Dieter Block
Hans-Joachim Leimkühler
Dirk Müller
Johannes-Peter Schäfer
Georg Ronge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
SolarWorld AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7892719&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=US6905576(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SolarWorld AG filed Critical SolarWorld AG
Assigned to BAYER AKTIENGESELLSCHAFT reassignment BAYER AKTIENGESELLSCHAFT ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: RONGE, GEORG, MULLER, DIRK, SCHAFER, JOHANNES-PETER, LEIMKUHLER, HANS-JOACHIM, BLOCK, HANS-DIETER
Assigned to SOLARWORLD AKTIENGESELLSCHAFT reassignment SOLARWORLD AKTIENGESELLSCHAFT ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BAYER AKTIENGESELLSCHAFT
Application granted granted Critical
Publication of US6905576B1 publication Critical patent/US6905576B1/en
Assigned to EVONIK DEGUSSA GMBH reassignment EVONIK DEGUSSA GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SOLARWORLD AG
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S203/00—Distillation: processes, separatory
    • Y10S203/06—Reactor-distillation

Definitions

  • the present invention relates to a continuous process for the preparation of silane SiH 4 by catalytic disproportionation of trichlorosilane SiHCl 3 to form SiH 4 and silicon tetrachloride SiCl 4 .
  • the invention further relates to an installation for carrying out the process.
  • SiH 4 is a very suitable starting material from which, optionally after further purification, very pure silicon of semiconductor grade can be deposited by thermal decomposition. There is a strongly increasing demand for ultrapure silicon and thus for pure silane which is recognized and utilized more and more as a very suitable source of ultrapure silicon.
  • amines especially tertiary amines and hydrochlorides thereof and quaternary ammonium chlorides, both in liquid form (DE 3 500 318) and in solid form, e.g. bound to solid supports, as catalysts is known to accelerate the disproportionation of the trichlorosilane in an economically advantageous manner.
  • amines bound to solid supports U.S. Pat. Nos. 4,701,430, U.S. 5,026,533, DE 3 500 318, DE 3 311 650
  • a disadvantage of the liquid catalysts selected in some other existing processes is that they are discharged from the reaction section slowly over time, because they can never be separated completely from the reaction products.
  • the entrained amounts of catalyst give rise to problems in downstream process steps or, in a circulation system, also in upstream process steps, because they can accumulate at certain points in the system where they can catalyze undesired reactions, for example.
  • Reactive distillation is characterized by a combination of reaction and distillative separation in a single apparatus, in particular a column.
  • the continuous distillative removal of the lowest-boiling component respectively in each element of space ensures that an optimum difference between the equilibrium state and the actual content of lower-boiling components or lowest-boiling component is always maintained, resulting in a maximum reaction rate (JP-01 317 114).
  • DE 2 507 864 discloses another process for the preparation of silane which comprises introducing trichlorosilane into a bed of an anion exchange resin which is insoluble in the reaction medium and contains tertiary amino or quaternary ammonium groups bonded to a carbon atom, maintaining the resin bed at a temperature sufficient to cause trichlorosilane to be disproportionated to form products which rise in the bed, and silicon tetrachloride which condenses and flows to the column bottom, and maintaining the top part of the bed at a temperature above the boiling point of silane and below the boiling point of monochlorosilane, and recovering from the bed silane which is virtually chlorosilane-free.
  • DE 2 507 864 A grave disadvantage of this process described in DE 2 507 864 is that the amount of energy utilized for the separation of the silanes or chlorosilanes has to be completely removed at a very low temperature level matched to the condensation temperatures.
  • DE 2 507 864 requires that the temperature at the top of the column be below the condensation temperature of monochlorosilane SiH 3 Cl and that the temperature in the trichlorosilane SiHCl 3 feed zone be such that trichlorosilane can be evaporated.
  • the energy required for evaporating the various chlorosilanes and the silane in the individual sections of the column is actually removed at a temperature below the condensation temperature of the monochlorosilane, i.e. from below ⁇ 50° C. to ⁇ 120° C.
  • heat removal at a low temperature level is known to be costly and requires additional energy, and indeed the lower the temperature to be set for the coolant, the higher the amount of additional energy required.
  • the heat is to be removed essentially at a temperature level at which the coolant can be used which has a temperature that can be achieved quite easily, and the apparatus and energy required for refrigeration to remove the heat for condensing the products is to be reduced.
  • Suitable catalytically active solids are known and also described in DE 2 507 864.
  • they are solids which contain, on a framework of divinylbenzene-crosslinked polystyrene, amino or alkyleneamino groups such as dimethylamino, diethylamino, ethylmethylamino, di-n-propylamino, di-i-propylamino, di-2-chloroethylamino, di-2-chloropropylamino groups and hydrochlorides thereof, or trialkylammonium groups formed therefrom by methylation, ethylation, propylation, butylation, hydroxyethylation or benzylation, with chloride counterion.
  • suitable solids are those composed of a polyacrylic acid framework, especially a polyacrylamide framework, to which e.g. trialkylbenzylammonium is attached via an alkyl group.
  • catalytically active solids which is suitable for the process according to the invention are those which have sulfonate groups attached to a divinylbenzene-crosslinked polystyrene framework, balanced with tertiary or quaternary ammonium groups as cations.
  • Macroporous or mesoporous exchange resins are usually more suitable than gel resins.
  • suitable catalytically active solids are those which carry organic amino groups of the abovementioned type, e.g. those which have a 3-siloxypropyldimethylamino group, attached to a solid inorganic framework such as silica or zeolite (U.S. Pat. No. 4,701,430).
  • Suitable catalytically active solids are usually employed in the form of beads.
  • the SiH 4 -containing product mixture is separated from the higher-boiling chlorosilanes present in the mixture prior to condensation of the final SiH 4 product so as to increase the SiH 4 concentration.
  • the separation is preferably conducted at a pressure which his higher than that employed in the intermediate condensation, so that the concentration of the SiH 4 can be achieved at a higher temperature level and thus less product is to be condensed at a higher SiH 4 concentration. Chlorosilane obtained in the separation is conveniently returned to the reactive/distillative reaction zone.
  • FIG. 1 shows an installation for the production of silane comprising a reactive/distillative reaction zone, an intermediate condenser, integrated rectifying section and, downstream of the rectifying section, an external overhead condenser for condensing silane;
  • FIG. 2 shows an installation for the production of silane comprising a reactive/distillative reaction zone, an intermediate condenser, integrated rectifying section and, downstream of the rectifying section, an external condenser, a separation column downstream of the latter, and an overhead condenser for condensing silane which is connected to the separation column.
  • FIG. 3 shows an embodiment with external reactors.
  • FIG. 1 shows a flow chart for an installation for the continuous production of silane SiH 4 which comprises an essentially vertical reaction column 1 having a reactive/distillative reaction zone 2 for the catalytic disproportionation of trichlorosilane SiHCl 3 .
  • the disproportionation in the reaction zone 2 is conducted in a catalyst bed 2 ′ which is made of a randomly packed layer of solid bodies of catalytically active solid and through which the disproportionation products can flow.
  • the reaction zone may also contain catalyst bodies in a structured packing.
  • Catalytically active solids are preferably those described in DE 2 507 864, as mentioned above.
  • the SiHCl 3 is introduced into the reaction column 1 via an inlet 3 which opens into the column at an appropriate point.
  • disproportionation of SiHCl 3 yields a lower-boiling SiH 4 -containing product mixture which ascends in the reaction zone and a higher-boiling SiH 4 -containing condensate which descends in the reaction zone.
  • the higher-boiling SiCl 4 -containing condensate exiting from the reaction zone is introduced into a distillative stripping section 4 which is arranged below the reactive/distillative reaction zone 2 .
  • a bottom evaporator 5 arranged below the stripping section, silicon tetrachloride SiCl 4 is discharged as bottom product via an outflow 13 .
  • the amount of heat required for the disproportionation of SiHCl 3 is introduced into the reaction column by means of the beat exchanger 5 .
  • an intermediate condenser 6 is provided for the lower-boiling SiH 4 -containing product mixture ascending in the reaction zone 2 .
  • the SiH 4 concentration in the lower-boiling SiH4-containing product mixture is increased by partial condensation of higher-boiling components of the lower-boiling SiH 4 -containing product mixture at a temperature between ⁇ 25° C. and 50° C., preferably between ⁇ 5° C. and 40° C.
  • the heat of condensation is dissipated by a coolant flowing through the intermediate condenser 6 .
  • the lower-boiling product fractions of the lower-boiling SiH 4 -containing product mixture which are not condensed in the intermediate condenser 6 are introduced into a rectifying section 7 which is arranged downstream of the intermediate condenser in the direction of flow of the ascending product fractions, and further concentrated.
  • the rectifying section 7 is inserted above the intermediate condenser 6 and integrated into the reaction column 1 .
  • the rectifying section can be arranged outside the reaction column.
  • the product mixture from the rectifying section 7 is finally taken off at the top of the reaction column via an outlet 8 and introduced into an overhead condenser 9 in which it is condensed and discharged in liquid form, as final SiH 4 product obtained, via an SiH 4 product line 10 .
  • Part of the recovered SiH 4 is returned to the top of the reaction column 1 via a branch line 11 .
  • the branch line 11 opens into the column above the rectifying section 7 .
  • Residual inert gas fractions obtained in the overhead condenser 9 during SiH 4 condensation are discharged from the overhead condenser via an inert gas line 12 .
  • condensation of the product taken off at the top of the reaction column 1 in the overhead condenser 9 produces silane in a concentration of >70%, preferably >90%, particularly preferably >98%.
  • the lower-boiling SiH 4 -containing product which is ascending from the reaction zone to the top of the reaction column 1 is subjected to an intermediate condensation.
  • a plurality of intermediate condensers can be inserted.
  • the intermediate condenser(s) 6 operate at temperatures at which the removal of the heat of condensation by means of a coolant is still possible between ⁇ 25° C. and 50° C., preferably between ⁇ 5° C. and 40° C., so that only a considerably smaller, uncondensed fraction of the SiH 4 -containing product mixture has to be transferred to a rectifying section 7 equipped with conventional distillation internals such as trays and packings, and only the gas fraction exiting the rectifying section has to be condensed in the overhead condenser 9 at very low temperatures in a final step.
  • the rectifying section 7 including its associated overhead condenser 9 can also be arranged externally outside the reaction column 1 .
  • the overhead condenser 9 With conventional pressures of 1 to 50 bar, preferably 1 to 10 bar, and the desired purities of the silane product, the overhead condenser 9 has to be operated below the condensation temperatures of ⁇ 40° C., in most cases even below ⁇ 60° C.
  • the energy introduced is used several times, i.e.
  • FIG. 2 Another embodiment is shown in FIG. 2 .
  • the construction of the reaction column 1 a is similar to the design of the reaction column 1 of FIG. 1 . Therefore, all equipment parts designed in analogy to the parts of FIGS. 1 and 2 are given the same reference symbols, but are represented with the added index “a” to distinguish them.
  • the separation column 14 is arranged downstream of a condenser 9 a which is located between rectifying section 7 a and separation column 14 .
  • the condenser 9 a all or part of the uncondensed SiH 4 -containing product mixture exiting the rectifying section 7 a via the outlet 8 a is condensed prior to entering the separation column 14 , so that a product mixture which is more concentrated in SiH 4 is introduced into the separation column 14 .
  • Part of the condensate obtained in the condenser 9 a is returned, via a branch line 11 a, to the reaction column la above its rectifying section 7 a.
  • the remaining part of the condensate is compressed by means of a liquid pump 15 and transferred to the separation column 14 via a pressure line 16 . If only part of the product mixture exiting the rectifying section 7 a is condensed in the condenser 9 a, the remaining part is sucked off via an outlet 12 a by means of a compressor 17 , compressed and introduced into the separation column 14 via a pressure line 16 ′. Alternatively, the stream 12 a can be transferred to a workup step.
  • An outlet 18 leads from the top of the separation column 14 to an overhead condenser 19 from which the condensed silane obtained is discharged in an SiH 4 product line 20 , Part of the liquid silane is returned to the separation column 14 in a branch line 21 .
  • Inert gases obtained in the overhead condenser are discharged via an inert gas line 22 .
  • the bottom product of the separation column 14 is discharged from the bottom 23 of the separation column via a bottom outlet 24 .
  • Part of the bottom product flows back into the reaction column 1 a via the branch line 25 , another part is returned to the bottom zone of the separation column 14 via a return line 26 after evaporation in the heat exchanger 27 , another part can be bled off ( 28 ) completely from the plant in order to remove impurities.
  • a liquid or gaseous overhead product having a lower silane purity of between 25% to 90% is produced by reducing the reflux compared to the embodiment of FIG. 1 and complete or partial condensation in the condenser 9 a so as to increase the condensation temperature in the overhead condenser 9 a and to reduce further the condensation energy which has to be removed at a very low temperature.
  • This overhead product is then purified further by separation in the downstream separation column 14 , where the same pressure or preferably a higher pressure than in the reaction column 1 a, preferably 15 bar to 100 bar, is set, so that the separation column 14 operates at higher temperatures than the reaction column 1 a, based on the same composition.
  • the bottom product of the separate separation column 14 may contain large proportions of trichlorosilane, dichlorosilane and monochlorosilane, depending on the operating conditions selected. All or part of the bottom product is returned to the reaction column 1 a via the branch line 25 connected to the outlet 24 . If necessary, impurities can be removed ( 28 ) from the system by bleeding off a part-stream.
  • the feed(s) introduced into the reaction column via the inlets 3 , 3 a and 25 are introduced into the stripping section 4 , 4 a, or between reactive/distillative reaction zones 2 , 2 a and stripping section, or into the reactive-distillative reaction zone, or into the overhead condenser 6 , 6 a, depending on the respective composition.
  • the process according to the invention is conducted at pressures from 1 to 50 bar, preferably 1 to 10 bar, particularly preferably 2.8 to 5 bar, in the reactive/distillative reaction zone using catalytically active solids.
  • the temperatures in the system are varied by means of the pressures.
  • the temperatures in that part of the reactive/distillative reaction section in which the disporportionation takes place are between 30° C. and 180° C., preferably between 50° C. and 110° C.
  • the temperature which is to be set in each case depends on the range in which the catalytically active solids are stable.
  • a disadvantage of the previously described processes for the distillative separation of pure silane with concomitant reaction is the large amount of heat which has to be removed at the condensation temperature of the silane at a given pressure, i.e. for example at ⁇ 50° C. to ⁇ 120° C. As mentioned above, condensation at these temperatures is economically very unfavorable. As the amount of heat which has to be removed during operation without intermediate condenser is of the same order as the amount of heat introduced at the bottom of the reaction column, the heat removal costs should generally be considerably higher than the heat introduction costs. This is largely avoided by the intermediate condensation according to the invention. For example, depending on the system pressure, 60% to 97% of the heat of condensation can be removed when using a coolant having a temperature of 25° C.
  • the intermediate condensation for the intermediate condensation to cool down the gas stream exiting above the intermediate condenser(s) to 40° C., so that only 3% to 40% of the heat of condensation have to be removed at the condensation temperature of the silane.
  • purification of the silane to give an SiH 4 content of preferably more than 90%, particularly preferably more than 98%, is possible above the intermediate condenser in a separation column placed directly above the intermediate condenser and/or in a separate separation column, the condenser for condensing silane at the head of the separation column being operated at a coolant temperature below the condensation temperature of the silane.
  • the conditions in the reaction areas in the reactive/distillative reaction zone remain essentially unchanged compared to a reaction column without intermediate condenser, so that intermediates and products formed can still be separated effectively by distillation after their formation. It is only above the intermediate condenser that the vapor and liquid streams are significantly reduced compared to the rest of the system. However, they are sufficient to ensure that the silane which is present in small amounts compared to the bottom product of the reaction column, SiCl 4 , and whose boiling point differs considerably from the remaining components, is concentrated in a separation column placed on top or in a separate separation column, achieving purities of >50%, particularly preferably >98%.
  • Preferred internals used in the reaction columns of the installation according to the invention are those which ensure an intensive mass transfer between gas phase and liquid phase and simultaneously allow an intensive contact with the solid catalyst. Owing to the combination of mass transfer and reaction, a sufficient distance from the respective reaction equilibrium is ensured in the reactive/distillative reaction zone by rapid separation of products formed, so that the reaction always proceeds with a high reaction rate.
  • Examples of such column internals are trays, structured or random packings for introducing heterogeneous catalysts, as described, for example, in the following publications: EP 670 178, EP 461 855, U.S. Pat. Nos. 5,026,459, U.S.
  • the solid catalyst can be spread on distillation trays as such or in agglomerated form.
  • reaction zone When carrying out the process, residence time, catalyst volume and distillative separation effect in the reaction zone are matched to reaction kinetics and mass transfer kinetics, the parameter optimum depending strongly on the boundary conditions, such as the catalyst selected, the system of substances and the pressure and temperature conditions selected.
  • the catalyst can be introduced into external, optionally thermostatted reactors, alternating between transferring the liquid phase from the reaction column into the reactor and from the reactor back to the column for separation of substances.
  • FIG. 3 shows the distillative/reactive reaction zone 2 ; 2 a of FIGS. 1 and 2 for the embodiment having external reactors.
  • the liquid mixture flowing out of a distillative section 29 enters, optionally via heat recovery unit and thermostatting unit 31 , a reactor 32 operated in downward or upward flow mode, and is passed on into the subsequent distillative section.
  • the sequence “distillative section/thermostatting unit/reactor” can be repeated on top of one another any number of times.
  • the disproportionation which is taking place in the reaction zone of the reaction columns is supplemented by a purely distillative separation and purification of the silane- or silicon tetrachloride-containing products to be discharged at the top and at the bottom of the reaction columns.
  • the distillative separation is carried out by means of conventional internals for pure distillation such as trays, structured packings and random packings.
  • SiCl 4 component For the exiting higher-boiling SiCl 4 component it is convenient to produce a substantially concentrated silicon tetrachloride bottom product containing more than 70% of SiCl 4 , preferably more than 95% of SiCl 4 , particularly preferably more than 99% of SiCl 4 , by purely distillative separation below the reactive/distillative reaction zone in the bottom part of the reaction column, and to take off this product at the bottom of the reaction column.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
US09/868,792 1998-12-24 1999-12-14 Method and system for producing silane Expired - Fee Related US6905576B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19860146A DE19860146A1 (de) 1998-12-24 1998-12-24 Verfahren und Anlage zur Herstellung von Silan
PCT/EP1999/009915 WO2000039027A1 (fr) 1998-12-24 1999-12-14 Procede et dispositif permettant de produire du silane

Publications (1)

Publication Number Publication Date
US6905576B1 true US6905576B1 (en) 2005-06-14

Family

ID=7892719

Family Applications (1)

Application Number Title Priority Date Filing Date
US09/868,792 Expired - Fee Related US6905576B1 (en) 1998-12-24 1999-12-14 Method and system for producing silane

Country Status (8)

Country Link
US (1) US6905576B1 (fr)
EP (1) EP1144307B1 (fr)
JP (1) JP4767417B2 (fr)
AT (1) ATE262486T1 (fr)
AU (1) AU3038600A (fr)
CA (1) CA2357025C (fr)
DE (2) DE19860146A1 (fr)
WO (1) WO2000039027A1 (fr)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050199558A1 (en) * 2002-06-26 2005-09-15 Jensen Marina B. Dual porosity filter
US20090053123A1 (en) * 2006-03-03 2009-02-26 Wacker Chemie Ag Process for recycling high-boiling compounds within an integrated chlorosilane system
US20090068082A1 (en) * 2002-01-02 2009-03-12 Blacklight Power, Inc. Synthesis and characterization of a highly stable amorphous silicon hydride as the product of a catalytic hydrogen plasma reaction
US20090155156A1 (en) * 2005-09-27 2009-06-18 Evonik Degussa Gmbh Process for producing monosilane
US20100074824A1 (en) * 2006-09-27 2010-03-25 Denki Kagaku Kogyo Kabushiki Kaisha Process for continuously producing monosilane
US20110110839A1 (en) * 2009-11-06 2011-05-12 Gt Solar Incorporated Systems and methods of producing trichlorosilane
EP2426089A1 (fr) * 2010-09-03 2012-03-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé de séparation de monosilane dans des mélanges riches en chlorosilanes
CN102481491A (zh) * 2009-07-08 2012-05-30 施米德硅晶片科技有限责任公司 用于制备甲硅烷的方法和设备
US20120145530A1 (en) * 2009-12-28 2012-06-14 Lg Chem, Ltd. Method and apparatus for purification of trichlorosilane
US20120183464A1 (en) * 2009-07-15 2012-07-19 Evonik Degussa Gmbh Process and use of amino-functional resins for dismutating halosilanes and for removing extraneous metals
CN102951646A (zh) * 2012-11-22 2013-03-06 覃攀 硅烷的生产方法
CN103172071A (zh) * 2013-03-27 2013-06-26 天津大学 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法
CN103241743A (zh) * 2013-05-22 2013-08-14 黄国强 三氯氢硅直接歧化制备硅烷的反应精馏方法及设备
RU2503616C2 (ru) * 2008-03-31 2014-01-10 Шмид Силикон Текнолоджи Гмбх Способ и система для получения чистого кремния
US8691055B2 (en) * 2004-11-19 2014-04-08 Memc Electronic Materials Spa Processes for the purification of trichlorosilane or silicon tetrachloride
CN104140104A (zh) * 2014-07-18 2014-11-12 中国恩菲工程技术有限公司 利用制备三氯氢硅的装置制备三氯氢硅的方法
TWI510433B (zh) * 2009-08-04 2015-12-01 Schmid Silicon Technology Gmbh 製備單矽烷之設備及方法
US9352971B2 (en) 2013-06-14 2016-05-31 Rec Silicon Inc Method and apparatus for production of silane and hydrohalosilanes
US10384182B2 (en) 2015-02-27 2019-08-20 Schmid Silicon Technology Gmbh Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane and plant for production of monosilane

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10057522B4 (de) * 2000-11-21 2009-04-16 Evonik Degussa Gmbh Verfahren zur Herstellung von Silanen
DE10057521B4 (de) * 2000-11-21 2009-04-16 Evonik Degussa Gmbh Verfahren zur Herstellung von Silanen
DE10153795A1 (de) * 2001-10-31 2003-05-22 Degussa Verfahren zur Herstellung von in 3-Stellung funktionalisierten Propylsilanen
DE102004045245B4 (de) * 2004-09-17 2007-11-15 Degussa Gmbh Vorrichtung und Verfahren zur Herstellung von Silanen
DE102010034469A1 (de) 2010-08-06 2012-02-09 Schmid Silicon Technology Gmbh Anlage zur Herstellung von Monosilan
RU2608523C1 (ru) * 2015-07-30 2017-01-19 Общество с ограниченной ответственностью "Фирма "ХОРСТ" Способ получения силана и хлорсиланов
US11002255B2 (en) 2019-08-20 2021-05-11 Lowry Inheritors Trust Carbon negative clean fuel production system

Citations (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2834648A (en) * 1953-03-25 1958-05-13 Union Carbide Corp Disproportionation of chlorosilanes employing amine-type catalysts
FR2118725A5 (fr) 1970-12-17 1972-07-28 Union Carbide Corp
FR2261977A1 (fr) 1974-02-25 1975-09-19 Union Carbide Corp
US4099936A (en) * 1976-12-16 1978-07-11 Union Carbide Corporation Process for the purification of silane
US4113845A (en) * 1971-06-14 1978-09-12 Union Carbide Corporation Disproportionation of chlorosilane
US4340574A (en) * 1980-08-28 1982-07-20 Union Carbide Corporation Process for the production of ultrahigh purity silane with recycle from separation columns
EP0063067A1 (fr) 1981-04-03 1982-10-20 Rhone-Poulenc Specialites Chimiques Procédé de fabrication de silane
EP0093640A1 (fr) 1982-05-03 1983-11-09 Rhone-Poulenc Specialites Chimiques Procédé de fabrication de silane à partir de trichlorosilane
DE3500318A1 (de) 1984-01-11 1985-08-01 Denki Kagaku Kogyo Kk Disproportionierungskatalysator fuer silanverbindungen und verfahren zur kontinuierlichen herstellung von silanverbindungen
US4536373A (en) 1982-06-21 1985-08-20 Chemical Research & Licensing Company Contact structure for use in catalytic distillation
JPS61191513A (ja) 1985-02-19 1986-08-26 Denki Kagaku Kogyo Kk シラン化合物の連続的製造方法
US4610858A (en) * 1984-04-06 1986-09-09 Denki Kagaku Kogyo Kabushiki Kaisha Chlorosilane disproportionation catalyst and method for producing a silane compound by means of the catalyst
US4613491A (en) 1984-05-17 1986-09-23 Korea Advanced Institute Of Science And Technology Redistribution catalyst and methods for its preparation and use to convert chlorosilicon hydrides to silane
US4676976A (en) 1985-03-08 1987-06-30 Ajinomoto Co., Inc. Konjak mannan-containing reversible gel
US4701430A (en) 1984-05-17 1987-10-20 Korea Advance Institute Of Science & Technology Hydrogenation catalyst and methods for its preparation and use to convert silicon tetrachloride to chlorosilane and silane
JPH01317114A (ja) 1988-06-14 1989-12-21 Mitsui Toatsu Chem Inc モノシランの簡便な製造方法
US5026459A (en) 1988-03-21 1991-06-25 Institut Francais Du Petrole Apparatus for reactive distillation
US5026533A (en) 1987-04-04 1991-06-25 Huls Troisdorf Ag Method and apparatus for the preparation of dichlorosilane
EP0458472A1 (fr) 1990-05-21 1991-11-27 Chemical Research & Licensing Company Structure de distillation catalytique
US5073236A (en) 1989-11-13 1991-12-17 Gelbein Abraham P Process and structure for effecting catalytic reactions in distillation structure
EP0476938A1 (fr) 1990-09-19 1992-03-25 Chemical Research & Licensing Company Dispositif de distillation catalytique
US5130102A (en) 1990-06-11 1992-07-14 Chemical Research & Licensing Company Catalytic distillation reactor
US5211931A (en) * 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
US5275790A (en) 1990-03-30 1994-01-04 Koch Engineering Company, Inc. Structure and method for catalytically reacting fluid streams in mass transfer apparatus
WO1994008682A1 (fr) 1992-10-16 1994-04-28 Koch Engineering Company, Inc. Structures integrees pour colonnes de distillation, y compris celles utilisables dans des reactions catalytiques
WO1994008681A1 (fr) 1992-10-16 1994-04-28 Koch Engineering Company, Inc. Structure de reaction catalytique et de transfert de masse et procede utilisant une telle structure
US5308451A (en) 1992-11-02 1994-05-03 Uop Fractionation tray for catalytic distillation
US5417938A (en) 1988-09-02 1995-05-23 Sulzer Brothers Limited Device for carrying out catalyzed reactions
EP0665041A1 (fr) 1994-01-31 1995-08-02 Chemical Research & Licensing Company Structure de distillation catalytique
US5470542A (en) 1993-06-30 1995-11-28 Sulzer Chemtech Ag Catalyzing fixed bed reactor
US5473082A (en) 1988-09-02 1995-12-05 Sulzer Brothers Limited Device for carrying out catalyzed reactions
US5493059A (en) 1990-08-01 1996-02-20 Eniricerche Spa Process for preparing tertiary alkyl ethers and apparatus for reactive distillation
US5536699A (en) 1993-08-26 1996-07-16 Sulzer Chemtech Ag Packing having catalytic or absorbent agents
US5593548A (en) 1990-02-06 1997-01-14 Koch Engineering Company, Inc. Method for concurrent reaction with distillation
US5601797A (en) 1992-08-10 1997-02-11 Glitsch, Inc. Liquid-phase catalyst-assembly for chemical process tower
WO1997026971A1 (fr) 1996-01-22 1997-07-31 Koch Engineering Company, Inc. Procede et appareil a reaction et distillation concurrentes
US5730843A (en) 1995-12-29 1998-03-24 Chemical Research & Licensing Company Catalytic distillation structure
US5776320A (en) 1995-07-24 1998-07-07 Institut Francais Du Petrole Process and apparatus for reactive distillation with a particular distribution of liquid and vapour phases
US5779993A (en) 1993-10-05 1998-07-14 Glitsch, Inc. Liquid-phase catalyst-assembly for chemical process tower
EP0950433A1 (fr) 1998-04-18 1999-10-20 Gorak, Andrzej, Prof. Dr.-Ing. Garnissage pour colonnes d' échange de matière
US6054630A (en) 1995-12-27 2000-04-25 Institut Francais Du Petrole Apparatus comprising a catalytic distillation zone comprising a reaction zone with distribution of hydrogen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215513A (ja) * 1984-04-06 1985-10-28 Denki Kagaku Kogyo Kk シラン化合物の連続的製造方法

Patent Citations (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2834648A (en) * 1953-03-25 1958-05-13 Union Carbide Corp Disproportionation of chlorosilanes employing amine-type catalysts
FR2118725A5 (fr) 1970-12-17 1972-07-28 Union Carbide Corp
US4113845A (en) * 1971-06-14 1978-09-12 Union Carbide Corporation Disproportionation of chlorosilane
US4113845B1 (fr) * 1971-06-14 1984-01-24
US3968199A (en) 1974-02-25 1976-07-06 Union Carbide Corporation Process for making silane
FR2261977A1 (fr) 1974-02-25 1975-09-19 Union Carbide Corp
US4099936A (en) * 1976-12-16 1978-07-11 Union Carbide Corporation Process for the purification of silane
US4340574A (en) * 1980-08-28 1982-07-20 Union Carbide Corporation Process for the production of ultrahigh purity silane with recycle from separation columns
EP0063067A1 (fr) 1981-04-03 1982-10-20 Rhone-Poulenc Specialites Chimiques Procédé de fabrication de silane
EP0093640A1 (fr) 1982-05-03 1983-11-09 Rhone-Poulenc Specialites Chimiques Procédé de fabrication de silane à partir de trichlorosilane
US4536373A (en) 1982-06-21 1985-08-20 Chemical Research & Licensing Company Contact structure for use in catalytic distillation
DE3500318A1 (de) 1984-01-11 1985-08-01 Denki Kagaku Kogyo Kk Disproportionierungskatalysator fuer silanverbindungen und verfahren zur kontinuierlichen herstellung von silanverbindungen
US4610858A (en) * 1984-04-06 1986-09-09 Denki Kagaku Kogyo Kabushiki Kaisha Chlorosilane disproportionation catalyst and method for producing a silane compound by means of the catalyst
US4613491A (en) 1984-05-17 1986-09-23 Korea Advanced Institute Of Science And Technology Redistribution catalyst and methods for its preparation and use to convert chlorosilicon hydrides to silane
US4701430A (en) 1984-05-17 1987-10-20 Korea Advance Institute Of Science & Technology Hydrogenation catalyst and methods for its preparation and use to convert silicon tetrachloride to chlorosilane and silane
JPS61191513A (ja) 1985-02-19 1986-08-26 Denki Kagaku Kogyo Kk シラン化合物の連続的製造方法
US4676976A (en) 1985-03-08 1987-06-30 Ajinomoto Co., Inc. Konjak mannan-containing reversible gel
US5026533A (en) 1987-04-04 1991-06-25 Huls Troisdorf Ag Method and apparatus for the preparation of dichlorosilane
US5026459A (en) 1988-03-21 1991-06-25 Institut Francais Du Petrole Apparatus for reactive distillation
JPH01317114A (ja) 1988-06-14 1989-12-21 Mitsui Toatsu Chem Inc モノシランの簡便な製造方法
US5417938A (en) 1988-09-02 1995-05-23 Sulzer Brothers Limited Device for carrying out catalyzed reactions
US5473082A (en) 1988-09-02 1995-12-05 Sulzer Brothers Limited Device for carrying out catalyzed reactions
US5550298A (en) 1988-09-02 1996-08-27 Sulzer Brothers Limited Device for carrying out catalyzed reactions
US5073236A (en) 1989-11-13 1991-12-17 Gelbein Abraham P Process and structure for effecting catalytic reactions in distillation structure
US5593548A (en) 1990-02-06 1997-01-14 Koch Engineering Company, Inc. Method for concurrent reaction with distillation
US5275790A (en) 1990-03-30 1994-01-04 Koch Engineering Company, Inc. Structure and method for catalytically reacting fluid streams in mass transfer apparatus
EP0458472A1 (fr) 1990-05-21 1991-11-27 Chemical Research & Licensing Company Structure de distillation catalytique
US5130102A (en) 1990-06-11 1992-07-14 Chemical Research & Licensing Company Catalytic distillation reactor
US5493059A (en) 1990-08-01 1996-02-20 Eniricerche Spa Process for preparing tertiary alkyl ethers and apparatus for reactive distillation
EP0476938A1 (fr) 1990-09-19 1992-03-25 Chemical Research & Licensing Company Dispositif de distillation catalytique
US5211931A (en) * 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
US5601797A (en) 1992-08-10 1997-02-11 Glitsch, Inc. Liquid-phase catalyst-assembly for chemical process tower
WO1994008682A1 (fr) 1992-10-16 1994-04-28 Koch Engineering Company, Inc. Structures integrees pour colonnes de distillation, y compris celles utilisables dans des reactions catalytiques
WO1994008681A1 (fr) 1992-10-16 1994-04-28 Koch Engineering Company, Inc. Structure de reaction catalytique et de transfert de masse et procede utilisant une telle structure
US5308451A (en) 1992-11-02 1994-05-03 Uop Fractionation tray for catalytic distillation
US5470542A (en) 1993-06-30 1995-11-28 Sulzer Chemtech Ag Catalyzing fixed bed reactor
US5536699A (en) 1993-08-26 1996-07-16 Sulzer Chemtech Ag Packing having catalytic or absorbent agents
US5779993A (en) 1993-10-05 1998-07-14 Glitsch, Inc. Liquid-phase catalyst-assembly for chemical process tower
EP0665041A1 (fr) 1994-01-31 1995-08-02 Chemical Research & Licensing Company Structure de distillation catalytique
US5776320A (en) 1995-07-24 1998-07-07 Institut Francais Du Petrole Process and apparatus for reactive distillation with a particular distribution of liquid and vapour phases
US6054630A (en) 1995-12-27 2000-04-25 Institut Francais Du Petrole Apparatus comprising a catalytic distillation zone comprising a reaction zone with distribution of hydrogen
US6084141A (en) 1995-12-27 2000-07-04 Institut Français Du Petrole Hydrogenation process comprising a catalytic distillation zone comprising a reaction zone with distribution of hydrogen
US6072091A (en) 1995-12-27 2000-06-06 Institut Francais Du Petrole Process for selective hydrogenation of a hydrocarbon cut containing at least three carbon atoms
US5730843A (en) 1995-12-29 1998-03-24 Chemical Research & Licensing Company Catalytic distillation structure
WO1997026971A1 (fr) 1996-01-22 1997-07-31 Koch Engineering Company, Inc. Procede et appareil a reaction et distillation concurrentes
EP0950433A1 (fr) 1998-04-18 1999-10-20 Gorak, Andrzej, Prof. Dr.-Ing. Garnissage pour colonnes d' échange de matière

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
**Patent Abstracts of Japan, vol. 011, No. 013 (C-397), Jan. 14, 1987, & JP 61 191513 A (Denki Kagaku Kogyo KK), Aug. 26, 1986.
Perry et al Distillstion, 1965, p. 299. *

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090068082A1 (en) * 2002-01-02 2009-03-12 Blacklight Power, Inc. Synthesis and characterization of a highly stable amorphous silicon hydride as the product of a catalytic hydrogen plasma reaction
US7588686B2 (en) * 2002-06-26 2009-09-15 University Of Copenhagen Dual porosity filter
US20050199558A1 (en) * 2002-06-26 2005-09-15 Jensen Marina B. Dual porosity filter
US8691055B2 (en) * 2004-11-19 2014-04-08 Memc Electronic Materials Spa Processes for the purification of trichlorosilane or silicon tetrachloride
US8105564B2 (en) * 2005-09-27 2012-01-31 Evonik Degussa Gmbh Process for producing monosilane
US20090155156A1 (en) * 2005-09-27 2009-06-18 Evonik Degussa Gmbh Process for producing monosilane
US20090053123A1 (en) * 2006-03-03 2009-02-26 Wacker Chemie Ag Process for recycling high-boiling compounds within an integrated chlorosilane system
US7803342B2 (en) * 2006-03-03 2010-09-28 Wacker Chemie Ag Process for recycling high-boiling compounds within an integrated chlorosilane system
EP2085358A4 (fr) * 2006-09-27 2015-06-17 Denki Kagaku Kogyo Kk Procédé de fabrication en continu de monosilane
TWI404676B (zh) * 2006-09-27 2013-08-11 Denki Kagaku Kogyo Kk Single Silane Continuous Manufacturing Method
US20100074824A1 (en) * 2006-09-27 2010-03-25 Denki Kagaku Kogyo Kabushiki Kaisha Process for continuously producing monosilane
RU2503616C2 (ru) * 2008-03-31 2014-01-10 Шмид Силикон Текнолоджи Гмбх Способ и система для получения чистого кремния
CN102481491A (zh) * 2009-07-08 2012-05-30 施米德硅晶片科技有限责任公司 用于制备甲硅烷的方法和设备
CN102481491B (zh) * 2009-07-08 2014-07-23 施米德硅晶片科技有限责任公司 用于制备甲硅烷的方法和设备
US9023297B2 (en) 2009-07-08 2015-05-05 Schmid Silicon Technology Gmbh Method and system for producing monosilane
US20120183464A1 (en) * 2009-07-15 2012-07-19 Evonik Degussa Gmbh Process and use of amino-functional resins for dismutating halosilanes and for removing extraneous metals
US9908781B2 (en) * 2009-07-15 2018-03-06 Evonik Degussa Gmbh Process and use of amino-functional resins for dismutating halosilanes and for removing extraneous metals
TWI510433B (zh) * 2009-08-04 2015-12-01 Schmid Silicon Technology Gmbh 製備單矽烷之設備及方法
US20110110839A1 (en) * 2009-11-06 2011-05-12 Gt Solar Incorporated Systems and methods of producing trichlorosilane
US8298490B2 (en) 2009-11-06 2012-10-30 Gtat Corporation Systems and methods of producing trichlorosilane
US8535488B2 (en) * 2009-12-28 2013-09-17 Lg Chem, Ltd. Method and apparatus for purification of trichlorosilane
US20120145530A1 (en) * 2009-12-28 2012-06-14 Lg Chem, Ltd. Method and apparatus for purification of trichlorosilane
US20130156677A1 (en) * 2010-09-03 2013-06-20 L'Air Liquide, Société Anonyme pour I'Etude et L'Exploitation des Procédés Georges Claude Process for separating monosilane from chlorosilanes-rich mixture
WO2012028570A1 (fr) * 2010-09-03 2012-03-08 L'air Liquide,Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé de préparation de monosilane d'un mélange riche en chlorosilanes
US9242868B2 (en) * 2010-09-03 2016-01-26 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Process for separating monosilane from chlorosilanes-rich mixture
EP2426089A1 (fr) * 2010-09-03 2012-03-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé de séparation de monosilane dans des mélanges riches en chlorosilanes
CN102951646A (zh) * 2012-11-22 2013-03-06 覃攀 硅烷的生产方法
CN103172071A (zh) * 2013-03-27 2013-06-26 天津大学 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法
CN103172071B (zh) * 2013-03-27 2015-06-03 天津大学 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法
CN103241743A (zh) * 2013-05-22 2013-08-14 黄国强 三氯氢硅直接歧化制备硅烷的反应精馏方法及设备
CN103241743B (zh) * 2013-05-22 2015-07-22 黄国强 三氯氢硅直接歧化制备硅烷的反应精馏方法及设备
US9352971B2 (en) 2013-06-14 2016-05-31 Rec Silicon Inc Method and apparatus for production of silane and hydrohalosilanes
CN104140104A (zh) * 2014-07-18 2014-11-12 中国恩菲工程技术有限公司 利用制备三氯氢硅的装置制备三氯氢硅的方法
US10384182B2 (en) 2015-02-27 2019-08-20 Schmid Silicon Technology Gmbh Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane and plant for production of monosilane

Also Published As

Publication number Publication date
CA2357025C (fr) 2008-01-29
ATE262486T1 (de) 2004-04-15
DE19860146A1 (de) 2000-06-29
JP4767417B2 (ja) 2011-09-07
CA2357025A1 (fr) 2000-07-06
JP2002533293A (ja) 2002-10-08
EP1144307B1 (fr) 2004-03-24
WO2000039027A1 (fr) 2000-07-06
AU3038600A (en) 2000-07-31
EP1144307A1 (fr) 2001-10-17
DE59908976D1 (de) 2004-04-29

Similar Documents

Publication Publication Date Title
US6905576B1 (en) Method and system for producing silane
US6942844B2 (en) Method and facility for producing silane
US8105564B2 (en) Process for producing monosilane
US8298490B2 (en) Systems and methods of producing trichlorosilane
US20130156675A1 (en) Process for production of silane and hydrohalosilanes
JP6328850B2 (ja) 蒸留および吸着によるクロロシランの精製
TWI404676B (zh) Single Silane Continuous Manufacturing Method
US20040042949A1 (en) Method for removing aluminum from chlorosilanes
US9242868B2 (en) Process for separating monosilane from chlorosilanes-rich mixture
JPS643807B2 (fr)
US8551298B2 (en) Processes for purifying silane
US8871168B2 (en) Process for producing monosilane from dichlorosilane
CN219291372U (zh) 一种电子级四甲基硅烷的制备装置
JPH0470249B2 (fr)
US8524044B2 (en) Systems for recovering silane from heavy-ends separation operations
JPS61151017A (ja) シラン化合物の連続的製造法
JPS59121110A (ja) シラン化合物の連続的製法
KR20160003696A (ko) 실란을 제조하기 위한 시스템 및 방법
WO2014200612A1 (fr) Procédé et appareil de production de silane et d'hydrohalosilanes
UA78152C2 (en) Process for preparation of monosilane

Legal Events

Date Code Title Description
AS Assignment

Owner name: BAYER AKTIENGESELLSCHAFT, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BLOCK, HANS-DIETER;LEIMKUHLER, HANS-JOACHIM;MULLER, DIRK;AND OTHERS;REEL/FRAME:012113/0281;SIGNING DATES FROM 20010504 TO 20010510

AS Assignment

Owner name: SOLARWORLD AKTIENGESELLSCHAFT, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:BAYER AKTIENGESELLSCHAFT;REEL/FRAME:012437/0726

Effective date: 20011120

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

AS Assignment

Owner name: EVONIK DEGUSSA GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SOLARWORLD AG;REEL/FRAME:021428/0799

Effective date: 20080804

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20170614