US6809338B2 - Electro-optical device - Google Patents

Electro-optical device Download PDF

Info

Publication number
US6809338B2
US6809338B2 US10/602,731 US60273103A US6809338B2 US 6809338 B2 US6809338 B2 US 6809338B2 US 60273103 A US60273103 A US 60273103A US 6809338 B2 US6809338 B2 US 6809338B2
Authority
US
United States
Prior art keywords
light
capacitor
electro
optical device
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US10/602,731
Other versions
US20040004221A1 (en
Inventor
Masao Murade
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
138 East LCD Advancements Ltd
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001007910A external-priority patent/JP3501125B2/en
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to US10/602,731 priority Critical patent/US6809338B2/en
Publication of US20040004221A1 publication Critical patent/US20040004221A1/en
Application granted granted Critical
Publication of US6809338B2 publication Critical patent/US6809338B2/en
Assigned to 138 EAST LCD ADVANCEMENTS LIMITED reassignment 138 EAST LCD ADVANCEMENTS LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SEIKO EPSON CORPORATION
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
    • H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield

Definitions

  • the present invention relates to the technical field of an active matrix driving system electro-optical device.
  • the present invention relates to the technical field of an electro-optical device which includes a pixel electrode and a pixel switching thin film transistor (referred to as “TFT” hereinafter), which are provided with electrical conduction therebetween, and a storage capacitor and a light-shielding film which are provided in a laminated structure formed on a substrate.
  • TFT pixel switching thin film transistor
  • a scanning signal is supplied to a gate electrode of a TFT through a scanning line to turn the TFT on, and an image signal supplied to a source region of a semiconductor layer through a data line is supplied to a pixel electrode through the region between the source and drain of the TFT.
  • Such an image signal is supplied to each of a plurality of pixel electrodes for only a short time through each of a plurality of TFTs. Therefore, in order to hold the voltage of the image signal supplied through a TFT over a longer time than the time of the on state, a storage capacitor is generally added to each pixel electrode.
  • a light-shielding film is provided on a counter substrate on the incidence side of incident light to cover the space between the pixel electrodes including the channel region of the TFT, or an opaque wide data line which includes an Al film or the like is formed to cover the channel region.
  • a light-shielding film is provided below the TFT to shield light reflected by the back, and returned light such as incident light from another electro-optical device, which passes through a synthesis optical system, in a projector that includes a combination of a plurality of electro-optical devices.
  • the storage capacitor is generally formed by utilizing the non-pixel aperture region, and it is thus basically difficult to form the storage capacitor in the pixel aperture region. Therefore, the non-pixel aperture region where the storage capacitor can be formed is narrowed as the pixel aperture region is widened to increase the pixel aperture ratio. However, there is a problem in which the pixel aperture ratio is decreased as the non-pixel aperture region is widened to enlarge the storage capacitor.
  • a decrease in the pixel pitch causes significant deterioration in image quality resulting from only a slight change in properties of TFT.
  • a total plane region where a light-shielding film or a film having a light shielding function can be arranged is narrowed by increasing the pixel aperture ratio, thereby causing the problem of causing difficulties in completely shielding TFT from light. Furthermore, a decrease in the pixel pitch causes a problem in which even with incident light or reflected light slightly inclined with the substrate surface, light finally enters the channel region or the adjacent region of channel due to the occurrence of multiple reflection in a laminated structure after oblique incidence.
  • the present invention has been achieved at least in consideration of the above problems, and an object of the present invention is to provide an electro-optical device in which a pixel aperture ratio can be increased, a storage capacitor can be enlarged, and a high quality image can be displayed.
  • Another object of the present invention is to provide an electro-optical device in which a change in properties of pixel switching TFT due to incident light or reflected light can be decreased while increasing the pixel aperture ratio, and a high quality image can be displayed.
  • an electro-optical device may include a scanning line formed above a substrate, a data line crossing the scanning line, a thin film transistor connected to the scanning line and the data line, a pixel electrode connected to a drain region of the thin film transistor, and a first storage capacitor formed by a plurality of layers between the scanning line and the data line.
  • the first storage capacitor is formed by a plurality of layers between the scanning line and the data line by utilizing the laminated structure to enlarge the storage capacitor, thereby providing an electro-optical device capable of displaying a high quality image.
  • the first storage capacitor may include a first capacitor electrode, an insulating film facing the first capacitor electrode, and a second capacitor electrode opposed to the first capacitor electrode with the insulating film provided therebetween to serve as a relay film for electrically connecting a drain region of the thin film transistor and the pixel electrode.
  • the second capacitor electrode which forms the first storage capacitor is formed as the relay film for electrically connecting the drain region of the thin film transistor and the pixel electrode, whereby the problem of causing a difficulty in electrically connecting the pixel electrode and a semiconductor layer due to a long distance therebetween can be solved. Also, the second capacitor electrode can prevent etching penetration during the formation of a contact hole.
  • the first storage capacitor is formed to overlap with each of the semiconductor layers of the thin film transistor and the scanning line, except the connection region between the source region of the thin film transistors and the data line.
  • the storage capacitor is formed to overlap with each of the semiconductor layers and the scanning line, it is possible to increase the pixel aperture ratio, and to enlarge the storage capacitor.
  • the electro-optical device may further include a second storage capacitor which may include a second capacitor electrode, an insulating film facing the second capacitor electrode, and a third capacitor electrode opposed to the second capacitor electrode with the insulating film provided therebetween and consisting of the same film as the scanning line.
  • a second storage capacitor which may include a second capacitor electrode, an insulating film facing the second capacitor electrode, and a third capacitor electrode opposed to the second capacitor electrode with the insulating film provided therebetween and consisting of the same film as the scanning line.
  • the second storage capacitor is formed by using the second capacitor electrode, which forms the first storage capacitor, and the scanning line layer
  • storage capacitors can be laminated in the thickness direction of the substrate, and even with narrow pixel pitch, a relatively large storage capacitor can be formed in a non-aperture region.
  • the third capacitor electrode may include the same film as the scanning line, storage capacitors can thus be formed by a laminated structure which may consist of a relatively small number of layers,
  • the third capacitor electrode is formed in parallel with the scanning line except in the connection region between the drain region of the thin film transistor and the second capacitor electrode.
  • a storage capacitor can be formed by utilizing the non-aperture region.
  • the third capacitor electrode is electrically connected to the first capacitor electrode.
  • the electrical connection between the third capacitor electrode and the first capacitor electrode is located in a region below the data line.
  • the space between the pixel electrodes, which are located below the data line and which cannot be used as an aperture region for each pixel, is used for connecting the third capacitor electrode and the first capacitor electrode, thereby causing an advantage for improving the pixel aperture ratio.
  • the third capacitor electrode may include a part of a first capacitor line extending along the scanning line, the first capacitor electrode may include a part of a second capacitor line extending along the scanning line, and the first and second capacitor lines are extended to the periphery of the image display region in which the pixel electrode is arranged, and electrically connected to each other.
  • the first capacitor line arranged along the scanning line and including a plurality of third capacitor electrodes, and the second capacitor line arranged along the scanning line and including a plurality of first capacitor electrodes are electrically connected to each other outside the image display region to permit relatively simple and secure electrical connection between the third capacitor electrodes and the first capacitor electrodes through the first and second capacitor lines. Also, contact holes need not be provided for connecting both capacitor electrodes in the image display region, and thus the storage capacitors can be enlarged.
  • the electro-optical device may further include a third storage capacitor comprising the third capacitor electrode, an insulating film facing the third capacitor electrode, and a fourth capacitor electrode opposed to the third capacitor electrode with the insulating films provided therebetween and which may consist of the same film as the semiconductor layer.
  • the third storage capacitor is formed by using the third capacitor electrode, which constitutes the second storage capacitor, and the semiconductor layer, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region, even when the pixel pitch is decreased.
  • the fourth capacitor electrode may include the same film as the semiconductor layer, and thus storage capacitors can be constructed by a laminated structure which may include a relatively small number of layers.
  • the fourth capacitor electrode is formed to extend from the drain region of the thin film transistor.
  • a storage capacitor can be formed by using the drain region of the thin film transistor.
  • the fourth capacitor electrode is formed in parallel with the scanning line.
  • the third capacitor electrode is formed in parallel with the scanning line, and thus storage capacitors can be enlarged by using the non-aperture region.
  • the capacitance of the second storage capacitor is smaller than that of each of the first storage capacitor and the third storage capacitor.
  • the second storage capacitor which includes the first capacitor electrode and the third capacitor electrode consisting of the same film as the scanning line is small, and thus capacitors can be formed without affecting error in the operation of the TFT.
  • the electro-optical device may further include a fourth storage capacitor which may include the fourth capacitor electrode consisting of the same film as the semiconductor layer, an insulating film facing the fourth capacitor electrode, and a fifth capacitor electrode arranged opposite to the fourth capacitor electrode with the insulating film provided therebetween, for shielding the semiconductor layer from light.
  • a fourth storage capacitor which may include the fourth capacitor electrode consisting of the same film as the semiconductor layer, an insulating film facing the fourth capacitor electrode, and a fifth capacitor electrode arranged opposite to the fourth capacitor electrode with the insulating film provided therebetween, for shielding the semiconductor layer from light.
  • the fourth storage capacitor is formed by using the fourth capacitor electrode consisting of the same film as the semiconductor layer, which constitutes the third storage capacitor, and a light-shielding film for shielding the semiconductor layer from light, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region even when the pixel pitch is decreased.
  • the fifth capacitor electrode may include the light-shielding film, and thus storage capacitors can be constructed by a laminated structure which may include a relatively small number of layers.
  • the light-shielding film is formed to cover the substrate side of at least the channel region, whereby the properties of the thin film transistors can be effectively prevented from being changed by incidence of the returned light from the substrate side on the channel region.
  • the fifth capacitor electrode is electrically connected to the first capacitor electrode in the periphery of the image display region.
  • the first capacitor electrode, the fifth capacitor electrode and the third capacitor electrode can be formed with a common potential, thereby permitting the formation of stable storage capacitors.
  • the electro-optical device may further include a fifth storage capacitor which may include the first capacitor electrode, an insulating film laminated on the first capacitor electrode, and a sixth capacitor electrode arranged opposite to the first capacitor electrode with the insulating film provided therebetween to form the pixel electrode.
  • a fifth storage capacitor which may include the first capacitor electrode, an insulating film laminated on the first capacitor electrode, and a sixth capacitor electrode arranged opposite to the first capacitor electrode with the insulating film provided therebetween to form the pixel electrode.
  • the fifth storage capacitor is formed by using the first capacitor electrode, which constitutes the first storage capacitor, and the pixel electrode, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region even when the pixel pitch is decreased.
  • the sixth capacitor electrode may include the pixel electrode, and thus storage capacitors can be constructed by a laminated structure consisting of a relatively small number of layers.
  • the fifth storage capacitor is formed over the entire periphery of each pixel.
  • a storage capacitor can be formed by using the peripheral region of each pixel.
  • an electro-optical device may include a scanning line formed above a substrate, a data line formed above the substrate, a thin film transistor connected to the data line, a pixel electrode connected to the drain region of the thin film transistor, a channel region of the thin film transistor on which the scanning line is arranged with a gage insulating film formed therebetween, and a light-shielding conductive film which constitutes a capacitor electrode of a storage capacitor and which is arranged above the scanning line to cover at least the channel region of the thin film transistor.
  • the gate insulating film, the scanning line, and the conductive film are laminated in this order on the channel region formed on the substrate.
  • the channel region can be shielded by the light-shielding conductive film.
  • the conductive film also functions as the capacitor electrode of the storage capacitor, the storage capacitor can be constructed while sufficiently shielding the channel region by a laminated structure that may include a relatively small number of layers.
  • the conductive film covers at least portions of the channel region of the thin film transistor, the junction region between a source region and the channel region of the thin film transistor, the junction region between the drain region and the channel region of the thin film transistor, and source and drain regions adjacent to the respective junction regions.
  • the channel region, the junction regions between the source-drain regions and the channel region, and the source-drain regions adjacent to the junction regions are covered with the conductive film, and it is thus possible to shield even the lightly-doped region of the thin film transistor having, for example, a LDD structure, from incident light, thereby permitting a further decrease in changes in the properties of the thin film transistors.
  • the storage capacitor may include a first conductive film which forms one of capacitor electrodes of the storage capacitor, and a second conductive film which forms the other capacitor electrode thereof, the second conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode.
  • the second conductive film which constitutes the other electrode of the storage capacitor also functions as a conductive film for relaying the drain region to the pixel electrode, and it is thus possible to prevent etching penetration during the formation of a contact hole for connecting the pixel electrode and the drain region.
  • the drain region can be connected to the second conductive film through the contact hole formed on the drain region
  • the pixel electrode can be connected to the second conductive film through the contact hole formed on the second conductive film to require the two types of contact holes, whereby the etching depth can easily be controlled because of the shortness of the contact holes to prevent the penetration.
  • the second conductive film covers at least portions of the channel region of the thin film transistor, the junction region between a source region and the channel region of the thin film transistor, the junction region between the drain region and the channel region of the thin film transistor, and the source and drain regions adjacent to the respective junction regions.
  • the channel region is shielded from light by the scanning line arranged above the channel region, and the first conductive film, and further shielded by the second conductive film arranged between the scanning line and the first conductive film, and thus the channel region can be shielded by triple films to further increase the effect of shielding the channel region.
  • the channel region is covered with the data line arranged above the first conductive film with an insulating film provided therebetween.
  • the channel region is shielded by the scanning line formed thereon, and the first conductive film, and further shielded by the second conductive film and the data line arranged thereon, light-shielding can be performed with quadruple films, thereby further increasing the effect of shielding the channel region. Furthermore, since the data line is arranged above the first conductive film, an increase in temperature due to light absorption by the first conductive firm can be suppressed.
  • the electro-optical device may further include a third conductive film which may consist of the same film as the scanning line, and which is arranged opposite to the second conductive film with an interlayer insulating film provided therebetween.
  • a storage capacitor can be formed by overlapping the first and second conductive films, and a storage capacitor can also be formed by arranging the second and third conductive films opposite to each other with the interlayer insulating film provided therebetween, thereby permitting lamination of storage capacitors in the thickness direction of the substrate. Therefore, even when the pixel pitch is decreased, a relatively large storage capacitor can be formed in the non-aperture region. Since the third conductive film consists of the same film as the scanning line, the storage capacitors can be formed by a laminated structure that may include a relatively small number of layers.
  • the electro-optical device may further include a fourth conductive film which may consist of the same film as the drain region, and which is arranged opposite to the third conductive film with the gate insulating film provided therebetween.
  • the fourth conductive film may consist of the same film as the drain region is arranged opposite to the third conductive film with the gate insulating film provided therebetween, thereby permitting further lamination of a storage capacitor in the thickness direction of the substrate.
  • the storage capacitor formed by overlapping the first and second conductive films, the storage capacitor formed by overlapping the second and third conductive films, and the storage capacitor formed by overlapping the third and fourth conductive films enable lamination of storage capacitors in the thickness direction of the substrate. Therefore, even when the pixel pitch is decreased, a relatively large storage capacitor can be formed in the non-aperture region.
  • the fourth conductive film may consist of the same film as the drain region, the storage capacitors can be formed by a laminated structure that may include a relatively small number of layers.
  • the first conductive film and the third conductive film are electrically connected to each other.
  • two storage capacitors can be formed with the second conductive film formed therebetween.
  • the second conductive film and the fourth conductive film are electrically connected to each other.
  • two storage capacitors can be formed with the third conductive film formed therebetween.
  • the first conductive film and the third conductive film are electrically connected to each other, and the second conductive film and the fourth conductive film are electrically connected to each other.
  • a storage capacitor is formed in a shape in which the first and the third conductive films, and the second and fourth conductive films, which are arranged in the thickness direction, are engaged in a comb form. Therefore, a larger storage capacitor can be constructed in the non-aperture region.
  • the first conductive film covers the channel region, and the data line is formed on the channel region and the adjacent region thereof so as not to project from the first conductive film in a plan view.
  • the first conductive film covers the channel region, even with oblique incident light, incidence on the channel region can be prevented. Furthermore, the data line is formed on the channel region so as not to project from the first conductive film in a plan view. Since the first conductive film is formed with a larger width and located nearer to the channel region, compared with the data line, incidence of oblique light on the channel region can be prevented, and incidence of reflected light from the data line on the channel region can also be prevented.
  • the first conductive films may include films having lower reflectance than the data lines.
  • the first conductive film has lower reflectance than that of the data line, when reflected light reaching the channel region due to oblique returned light, or multiple reflected light is reflected by the lower surface of the first conductive film, as in the present invention, incident light can be attenuated by an amount corresponding to a decrease in reflectance to suppress the influence of reflected light, as compared with a case in which light is reflected by the lower surface of the data line. Namely, in the present invention, even when reflected light or multiple reflected light from the lower surface of the first conductive film reaches the channel region, the light intensity is decreased, and thus a change in the properties of the thin film transistors due to the reflected light can be suppressed.
  • the channel region can also be sufficiently shielded from oblique incident light by widening the first conductive film.
  • each of the first conductive film and the data line may include a film containing at least Al.
  • incident light can be reflected by the data line and the first conductive film to prevent an increase in the temperature of the electro-optical device and decrease the resistance of the first conductive film.
  • the electro-optical device may further include an underlying light-shielding film which is arranged below the semiconductor layer on the substrate and which is formed to cover at least the channel region as viewed from the opposite side of the substrate, and not to project from the first conductive film in a plan view of the channel region and the adjacent region thereof.
  • the channel region can be prevented from being irradiated with light from above, and the upper and lower side of the channel region can be shielded because the underlying light-shielding film is further arranged below the channel region.
  • the underlying light-shielding film covers the channel region, and can thus prevent the channel region from being irradiated with light (returned light or the like) from the opposite side of the substrate.
  • the channel region can be prevented from being irradiated with incident light reflected by the underlying light-shielding film.
  • the returned light is mostly reflected by the first conductive film having low reflectance and then incident on the channel region, and thus attenuated light is incident on the channel region, whereby the channel region can be prevented from being irradiated with light reflected by the data line having high reflectance. Therefore, even when multiple reflection occurs, the influence on the channel region can be significantly suppressed.
  • At least either of the first conductive film and the underlying light-shielding film is made of a high-melting-point metal.
  • the first conductive film and the underlying light-shielding film are made of, for example, a single metal, an alloy, a metal silicide, or the like which contains at least one of opaque high-melting-point metals such as Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pd (lead), and the like. Therefore, the first conductive film and the underlying light-shielding film can be prevented from being broken or melted by high-temperature treatment.
  • the data line has a reflectance of over 80%, while the first conductive film made of a high-melting-point metal such as Ti, Cr, W, or the like, has reflectance significantly lower than the reflectance of the data line, whereby the effect of the present invention can be sufficiently exhibited.
  • a high-melting-point metal such as Ti, Cr, W, or the like
  • the first conductive film has substantially the same size as the second conductive film under the data line.
  • the first conductive film since the first conductive film has substantially the same size as the second conductive film, light can be prevented from entering the channel layer due to internal reflection by the first conductive film, and the area of the first conductive film can be increased to enlarge storage capacitors.
  • the first conductive film is extended from the image display region in which the pixel electrode is arranged to the periphery thereof, and connected to a constant potential source in the peripheral region.
  • the first conductive film functions not only as the light-shielding film but also as an electrode of the storage capacitor, which functions as a capacitor line, and thus a storage capacitor which may include the capacitor electrode in which the capacitor line is connected to the constant potential source, can be formed in a laminated structure which may include a relatively small number of layers while sufficiently shielding the channel region.
  • the capacitor electrode may include the first conductive film, or the capacitor electrode and the other capacitor line (lengthy capacitor line) may include a conductive film different from the first conductive film.
  • the capacitor electrode can be connected to the constant potential source by effectively using the light-shielding region (the non-aperture region of each pixel).
  • the constant potential source a constant potential source for peripheral circuits such as a data line driving circuit, a scanning line driving circuit, can be used, and an exclusive constant potential source need not be provided to exhibit good efficiency.
  • the third conductive film may include the capacitor line which is extended from the image display region to the periphery thereof along the scanning line, and connected to the constant potential source in the peripheral region, the first conductive film being connected to the capacitor line.
  • the first conductive film is connected to the capacitor line, and thus the potential of the first conductive film can be kept constant through the capacitor line to prevent the situation in which the properties of the thin film transistor are adversely affected by a change in the potential of the first conductive film, even when the first conductive film is arranged near the channel region.
  • the potential of the first conductive film can be fixed by the capacitor line, and thus the first conductive film satisfactorily functions as the capacitor electrode.
  • the underlying light-shielding film may include a light-shielding conductive film, and is connected to the capacitor line for each pixel.
  • the underlying light-shielding film is connected to the capacitor line for each pixel, and thus the potential of the underlying light-shielding film can be kept constant through the capacitor line to prevent the situation in which the properties of the thin film transistors are adversely affected by a change in the potential of the underlying light-shielding films, even when the underlying light-shielding film is arranged near the channel region.
  • the underlying light-shielding film is used as the capacitor electrode, the potential of the underlying light-shielding film can be fixed by the capacitor line, and thus the underlying light-shielding film satisfactorily functions as the capacitor electrode.
  • an electro-optical device may include a thin film transistor, a data line electrically connected to a semiconductor layer of the thin film transistor through a first connection portion, a scanning line overlapped with the semiconductor layer of the thin film transistor, a pixel electrode electrically connected to the semiconductor layer of the thin film transistor through a second connection portion, and a light-shielding film arranged in a region including the data line and the scanning line except the first and second connection portions.
  • a region with a poor contrast ratio produced in the periphery of the pixel electrode can be shielded by the light-shielding film.
  • the light-shielding film overlaps with the edge of the pixel electrode.
  • the regions including the data line and the scanning line can be shielded by the light-shielding film to define the non-aperture region.
  • the electro-optical device may further include an underlying light-shielding film provided below the semiconductor layer so that at least a portion of the thin film transistor is held between the light-shielding film and the underlying light-shielding film.
  • light incidence on the thin film transistor can be prevented by the light-shielding film and the underlying light-shielding film to suppress a change in the properties of the thin film transistor.
  • the underlying light-shielding film is extended along either of the data line and the scanning line.
  • the light-shielding performance of the non-pixel aperture regions can be increased only by the substrate having the thin film transistor.
  • an anti-reflection film is formed on at least the side of the underlying light-shielding film opposite to the thin film transistor side thereof.
  • the anti-reflection film when light is incident on the underlying light-shielding film, can prevent reflection of the light to the channel region and the region adjacent to the channel region of the thin film transistor.
  • the electro-optical device may further include a conductive relay film for electrically connecting the semiconductor layer and the pixel electrode.
  • etching penetration due to the formation of contact holes for connecting the pixel region and the drain region can be prevented.
  • the relay film is arranged in a region including the data line and the scanning line except the first connection portion for connecting the semiconductor layer and the data line.
  • the light-shielding performance can be improved while securing the first connection portion for connecting the semiconductor layer and the data line.
  • the relay film is arranged in the second connection portion between the semiconductor layer and the pixel electrode, which is avoided from the light-shielding film.
  • the second connection portion between the semiconductor layer and the pixel electrode, which cannot be shielded by the light-shielding film, can be shielded to completely shield the region along the scanning line.
  • the data line is made of a light-shielding material.
  • the light-shielding performance can be further improved.
  • a space is formed between the data line and the pixel electrode, and the light-shielding film is arranged in the space.
  • a parasitic capacitor between the data line and the pixel electrode can be decreased, and the space therebetween can be shielded by the light-shielding film to define the pixel aperture region.
  • the data line is arranged in the first connection portion between the semiconductor layer and the data line, which is avoided from the light-shielding film.
  • the first connection portion between the semiconductor layer and the data line which cannot be shielded by the light-shielding film, can be shielded to completely shield the region along the data line.
  • the non-pixel aperture region may include the light-shielding film and the underlying light-shielding film.
  • the light-shielding performance of the thin film transistor can be improved by shortening the distance between the light-shielding film and the underlying light-shielding film.
  • the scanning line is extended to substantially the center of the non-pixel aperture region.
  • the scanning line can be extended to substantially the center of the non-pixel aperture region to improve the light-shielding performance of the channel region of the thin film transistor and the adjacent region thereof.
  • the relay film in the periphery of the thin film transistor including the channel region, is located in a region inward of the light-shielding film, and the underlying light-shielding film is located in a region inward of the relay film.
  • light incident from the light-shielding film side is not incident directly on the underlying light-shielding film so that incidence of light reflected by the underlying light-shielding film on the thin film transistor can be decreased.
  • the semiconductor layer is located in a region inward of the data line.
  • the semiconductor layer is formed in a region inward of the data line, and thus incidence of light on the semiconductor layer can be decreased. Therefore, the semiconductor layer is not extended along the scanning line, whereby the pitch of the non-pixel aperture regions can be decreased, and the light-shielding performance can be improved.
  • FIG. 1 is a drawing of equivalent circuits including various elements, wiring, etc. provided on a plurality of pixels which are arranged in a matrix and which constitute an image display region of an electro-optical device in accordance with a first exemplary embodiment of the present invention
  • FIG. 2 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with the first embodiment;
  • FIG. 3 is a sectional view taken along line III-III′ in FIG. 2;
  • FIG. 4 is a drawing of an equivalent circuit of each of pixels which constitute an electro-optical device in accordance with an exemplary embodiment of the present invention
  • FIG. 5 is a plan view showing the light-shielding conductive films, and the relay films shown in FIG. 2;
  • FIG. 6 is a plan view showing the relay films and the capacitor electrodes shown in FIG. 2;
  • FIG. 7 is a plan view showing the capacitor electrodes and the semiconductor layers shown in FIG. 2;
  • FIG. 8 is a plan view showing the semiconductor layers and the underlying light-shielding films shown in FIG. 2;
  • FIG. 9 is a plan view showing the light-shielding conductive films and the pixel electrodes shown in FIG. 2;
  • FIG. 10 is a plan view showing the underlying light-shielding films, the light-shielding conductive films, the relay films and the data lines shown in FIG. 2;
  • FIG. 11 (A) is a sectional view taken along line XI-XI′ in FIG. 11 (B) is a sectional view of a related structure;
  • FIG. 12 is a schematic drawing showing the polarities of image signals supplied to a plurality of pixel electrodes which are arranged in a matrix and which constitute an image display region of an electro-optical device in accordance with a second exemplary embodiment of the present invention
  • FIG. 13 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with the second embodiment;
  • FIG. 14 is a sectional view taken along line XIV-XIV′ in FIG. 13;
  • FIG. 15 is a sectional view taken along line XV-XV′ in FIG. 13;
  • FIG. 16 is a sectional view taken along line XVI-XVI′ in FIG. 13;
  • FIG. 17 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with a third exemplary embodiment
  • FIG. 18 is a sectional view taken along line XVIII-XVIII′ in FIG. 17;
  • FIG. 19 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with a fourth exemplary embodiment
  • FIG. 20 is a sectional view taken along line XX-XX′ in FIG. 19;
  • FIG. 21 is a plan view the TFT array substrate and the components formed thereon in a liquid crystal device in accordance with an exemplary embodiment, as viewed from the counter substrate side;
  • FIG. 22 is a sectional view taken along line XXII-XXII′ in FIG. 21 .
  • FIG. 1 is a drawing showing equivalent circuits which include various elements, wiring, etc. of a plurality of pixels which constitute an image display region of the liquid crystal device and which are formed in a matrix
  • FIG. 2 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed
  • FIG. 3 is a sectional view taken along line III-III′ in FIG. 2 .
  • layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing.
  • FIG. 1 in a plurality of pixels which constitute the image display region of the liquid crystal device of this embodiment and which are formed in a matrix, pixel electrodes 9 a and TFTs 30 for controlling the pixel electrodes 9 a are formed, and data lines 6 a to which image signals are supplied are electrically connected to the sources of the TFTs 30 .
  • Image signals S 1 , S 2 , . . . , Sn to be written on the data lines 6 a may be supplied in this order in line sequence, or supplied to each group of the adjacent data lines 6 a.
  • scanning lines 3 a are electrically connected to the gates of the TFTs 30 so that scanning signals G 1 , G 2 , . . .
  • the pixel electrodes 9 a are electrically connected to the drains of the TFTs 30 so that the TFTs 30 respectively serving as switching elements arc switched off for a predetermined time to write the image signals S 1 , S 2 , . . . , Sn supplied from the data lines 6 a with predetermined timing.
  • the image signals S 1 , S 2 , . . . , Sn at the predetermined level written into a liquid crystal through the pixel electrodes 9 a are maintained between the pixel electrodes 9 a and a counter electrode (described below) formed on a counter substrate (described below) for the predetermined time.
  • the liquid crystal modulates light due to a change in the molecular orientation and order according to the level of the applied voltage to enable gray scale display.
  • a normally white mode the quantity of transmitted light of incident light increases according to the applied voltage
  • a normally black mode the quantity of transmitted light of incident light increases according to the applied voltage to emit light from the liquid crystal device as a whole with a contrast ratio corresponding to the image signals.
  • storage capacitors 70 are added in parallel to the liquid crystal capacitor formed between the pixel electrodes 9 a and the counter electrode.
  • Each of the storage capacitors 70 is formed between one of capacitor electrodes electrically connected to each of the pixel electrodes 9 a and the other capacitor electrode electrically connected to a corresponding capacitor line 300 to which a constant potential is supplied, through a dielectric film.
  • each of the storage capacitors 70 functions to maintain the voltage of the corresponding pixel electrode 9 a for a time three orders of magnitude longer than the time of application of a source voltage. This can further improve the holding property to realize a bright crystal device with a high contrast ratio.
  • a plurality of the transparent pixel electrodes 9 a are provided in a matrix on the TFT array substrate of the liquid crystal device, and the data lines 6 a and the scanning lines 3 a are provided along the longitudinal and lateral boundaries between the pixel electrodes 9 a.
  • the scanning lines 3 a are arranged opposite to the channel regions 1 a ′ (the regions shown by slanted lines in the drawing) of semiconductor layers 1 a, and function as gate electrodes.
  • TFT 30 is provided at each of the intersections of the scanning lines 3 a and the data lines 6 a, in which each of the scanning lines 3 a is partially opposed as the gate electrode to the corresponding channel region 1 a ′.
  • Each of the pixel electrodes 9 a is electrically connected to the drain of the corresponding semiconductor layer 1 a, which will be described below, by relaying a relay film 80 a serving as an intermediate conductive film through contact holes 8 a and 8 b.
  • the data lines 6 a are electrically connected to the source regions of the semiconductor layers 1 a consisting of a polysilicon film or the like, which will be described below, through contact holes 5 .
  • capacitor electrodes 3 b (third capacitor electrodes) consisting of the same film as the scanning lines 3 a may be provided so as to overlap with at least portions of capacitor electrodes 1 f (fourth capacitor electrodes), which are extended from the semiconductor layers 1 a, through gate insulating films described below. This permits the formation of at least portions of the storage capacitors 70 shown in FIG. 1 .
  • an underlying light-shielding film 11 a is provided along the corresponding scanning line 3 a so as to pass through the portion below the TFTs 30 . More specifically, the underlying light-shielding films 11 a are provided to cover at least the TFT channel regions 1 a ′ and the junction regions between the channel regions 1 a ′ and the source and drain regions, as viewed from the TFT array substrate side. Also, the underlying light-shielding films 11 a are preferably extended along the direction of the scanning lines 3 a to the periphery of the image display region in which the pixel electrodes 9 a are formed in a matrix to be connected to a constant potential source in the periphery region.
  • a constant potential source such as a negative power source, a positive power source supplied to peripheral circuits for driving the liquid crystal device, for example, a scanning line driving circuit, a data line driving circuit, which will be described below, a ground power source, a constant potential source supplied to the counter electrode, or the like can be used.
  • the potential level is preferably the off level of scanning signals supplied to the scanning lines 3 a.
  • a light-shielding conductive film (first capacitor electrode) 90 a is formed in each of the regions shown by slanted lines in FIG. 2 .
  • the light-shielding conductive films 90 a are formed between the scanning lines 3 a and the data lines 6 a so that in a plan view, the light-shielding conductive films 90 a can be overlapped with the regions where wiring such as the data lines 6 a and the scanning lines 3 a, the TFTs 30 and the storage capacitors are formed, except the regions of the contact holes 5 and the contact holes 8 b, thereby permitting the realization of light shielding on the TFT array substrate.
  • the light-shielding conductive films 90 a can be extended to the periphery of the image display region along the scanning lines 3 a to be connected to a constant potential source in the peripheral region.
  • the light-shielding conductive films 90 a can function as the capacitor lines 300 shown in FIG. 1 .
  • the light-shielding conductive films 90 a can be connected to the capacitor electrodes 3 b consisting of the same film as the scanning lines 3 a through contact holes 95 so that the storage capacitors 70 can easily be formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f by supplying a constant potential.
  • the constant potential source such as the negative power source, the positive power source supplied to the peripheral circuits for driving the liquid crystal device, for example, the scanning line driving circuit, the data line driving circuit, which will be described below, the ground power source, the constant potential source supplied to the counter electrode, or the like can be used.
  • the liquid crystal device of this embodiment may include a transparent TFT array substrate 10 which constitutes an example of substrates, and a transparent counter substrate 20 arranged to opposite to the TFT array substrate 10 .
  • the TFT array substrate 10 may include a quartz substrate, a glass substrate, or a silicon substrate
  • the counter substrate 20 may include a glass substrate or a quartz substrate.
  • the TFT array substrate 10 may include the pixel electrodes 9 a provided thereon and including a transparent conductive film such as an ITO film.
  • a TN (Twisted Nematic) liquid crystal or the like for a liquid crystal layer 50 , an alignment film 16 subjected to predetermined orientation by rubbing or the like is provided on the surfaces of the pixel electrodes 9 a.
  • a counter electrode 21 consisting of a transparent conductive film such as a ITO film is provided over the entire surface of the counter substrate 20 , and an alignment film 22 subjected to predetermined orientation by rubbing or the like is provided on the surface of the counter electrode 21 .
  • the underlying light-shielding films 11 a are respectively provided at positions opposite to the TFTs 30 between the TFT array substrate 10 and the TFTs 30 .
  • the underlying light-shielding films 11 a are formed opposite to at least the channel regions 1 a ′ of the switching TFTs 30 , and the junction regions between the channel regions 1 a ′ and the source and drain regions, whereby preventing irradiation of the channel regions 1 a ′ and the adjacent regions thereof with reflected light from the TFT array substrate 10 side. Therefore, the properties of the TFTs 30 are not changed by the occurrence of a leakage current due to light.
  • the underlying light-shielding conductive films 11 a are preferably made of a single metal, an alloy, a metal silicide, or the like, which contains at least one of opaque high-melting-point metals such as Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pb (lead).
  • opaque high-melting-point metals such as Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pb (lead).
  • anti-reflection films of polysilicon or the like may be formed on the surfaces of the underlying light-shielding films 11 a in order to absorb light even when incident light directly enters the TFTs 30 .
  • a polysilicon film may be used for the underlying light-shielding films 11 a.
  • the underlying light-shielding films 11 a By forming the underlying light-shielding films 11 a using such a material, for example, the underlying light-shielding films 11 a can be prevented from being broken or melted by high-temperature treatment for forming gate insulating films 2 .
  • the underlying light-shielding films 11 a are formed in strips along the scanning lines 3 a below the scanning lines 3 a, of course, the underlying light-shielding films 11 a may be formed in strips along the data lines 6 a below the data lines 6 a, or formed in a lattice form below the scanning lines 3 a and the data lines 6 a.
  • the underlying light-shielding films 11 a By forming the underlying light-shielding films 11 a in strips, relief of stress due to the underlying light-shielding films 11 a can be realized, while by forming then in a lattice form, the high-shielding performance can be improved and the resistance of the underlying light-shielding films 11 a can be further decreased.
  • an underlying insulating film 12 is provided between the underlying light-shielding films 11 a and the TFTs 30 .
  • the underlying insulating film 12 is provided for electrically insulating the semiconductor layers 1 a which constitute the TFTs 30 from the underlying light-shielding films 11 a.
  • the underlying insulating film 12 is formed over the entire surface of the TFT array substrate 10 to have the function as an underlying film for the TFTs 30 . Namely, the underlying insulating film 12 has the function of preventing roughening of the surface of the TFT array substrate 10 during polishing, and a change in the properties of the TFTs 30 due to stains remaining after cleaning.
  • the underlying insulating film 12 may consist of, for example, a highly insulating glass film of NSG (nondoped silicate glass), PSG (phosphosilicate glass), BSG (boron silicate glass), BPSG (boron phosphosilicate glass), or the like, a silicon oxide film, a silicon nitride film.
  • the underlying insulating film 12 can also prevent the situation that the TFTs 30 are contaminated by the underlying light-shielding films 11 a.
  • each of the TFTs 30 formed on the underlying insulating film 12 has an LDD (Lightly Doped Drain) structure in which the semiconductor which layer 1 a may consist of, for example, a polysilicon film, may consist of a lightly-doped source region 1 b and a lightly-doped drain region 1 c with the channel region 1 a ′ in which a channel is formed by an electric field supplied from the corresponding scanning line 3 a, heavily-doped source and drain regions 1 d and 1 e being connected to the lightly-doped source and drain regions 1 b and 1 c, respectively.
  • LDD Lightly Doped Drain
  • Each of the TFTs 30 may have an offset structure in which the lightly-doped source region 1 b and the lightly-doped drain region 1 c are not doped with impurities, or a self alignment TFT structure in which a heavily-doped of impurity is implanted by using the gate electrode which may include a part of the corresponding scanning line 3 a as a mask to form the heavily-doped source region 1 d and the heavily-doped drain region 1 e in a self alignment manner.
  • the gate insulation thin films 2 of 100 nm or less are formed on the semiconductor layers 1 a.
  • the gate insulating films 2 can be formed by oxidizing a polysilicon film at a high temperature of 1000° C. or more to form a film having high density and insulation. When high-temperature treatment cannot be carried out, the gate insulating films 2 may be formed by CVD (Chemical Vapor Deposition), or the like.
  • the scanning lines 3 a consisting of a low-resistance polysilicon film in which, for example, P (phosphorus) is implanted, are arranged on the gate insulating films 2 so that the portions of the scanning lines 3 a overlapped with the semiconductor layers 1 a function as the gate electrodes.
  • an interlayer insulating film 81 is deposited on the gate insulating films 2 and the scanning lines 3 a formed on the semiconductor layers 1 a by CVD or the like, and the contact holes 8 a are formed in the gate insulating films 2 and the interlayer insulating film 81 at the predetermined positions of the heavily-doped drain regions 1 e.
  • the heavily-doped drain regions 1 e are electrically connected to the conductive relay films 80 a through the contact holes 8 a.
  • interlayer insulating films 91 , 4 and 7 are laminated in turn on the relay films 80 a, and the contact holes 8 b are formed in these interlayer insulating films at positions of the relay films 80 a (second capacitor electrodes).
  • the relay films 80 a are electrically connected to the pixel electrodes 9 a through the contact holes 8 b. Therefore, the relay films 80 a function as intermediate conductive films for electrically connecting the semiconductor layers 1 a and the pixel electrodes 9 a.
  • the relay films 80 a By forming the relay films 80 a, long contact holes need not be formed from the pixel electrodes 9 a to the semiconductor layers 1 a, and thus penetration in the thin semiconductor layers 1 a having a thickness of, for example, about 50 nm, can be prevented.
  • the formation of the separate contact holes has the advantage that the diameter of either of the contact holes 8 a and 8 b can be decreased. Therefore, the regions of the contact holes 8 a and 8 b can be decreased to increase the pixel aperture ratio and realize high definition.
  • the relay films 80 a are formed by using a material such as a single metal, an alloy, a metal silicide, which contains at least one of opaque high-melting-point metals such as Ti, Cr, W, Ta, Mo, Pb, thereby permitting the relay films 80 a to function as light-shielding films. Furthermore, even when the relay films 80 a are formed to a thickness of about 50 nm, no penetration in the relay films 80 a occurs during the formation of the contact holes 8 b because of a high etching selection ratio.
  • the relay films 80 a can be provided to overlap with the TFTs 30 and the scanning lines 3 a in a plan view.
  • light-shielding conductive films 90 a are formed on the relay films 80 a with the interlayer insulating film 91 provided therebetween. As described above, the light-shielding conductive films 90 a can shield the non-aperture regions except the contact holes 5 and 8 b. Since the light-shielding conductive films 90 a can also function as the capacitor lines 300 shown in FIG. 1, at least portions of the storage capacitors 70 can be formed by using the interlayer insulating film 91 as a dielectric film between the conductive films 90 a and the relay films 80 a. Namely, the relay films 80 a and the light-shielding conductive films 90 a function as electrodes for forming the storage capacitors 70 .
  • Light shielding can also be realized near the semiconductor layers 1 a, which constitute the TFTs 30 , by two layers including the relay films 80 a and the light-shielding conductive films 90 a. Therefore, a leakage current of the TFTs 30 in an off state can be further decreased to cause an advantage for a liquid crystal device such as a projection projector used under a strong light source.
  • the light-shielding conductive films 90 a are formed by using a material such as such as a single metal, an alloy, a metal silicide, which contains at least one of opaque high-melting-point metals such as Ti, Cr, W, Ta, Mo, Pb, thereby permitting the realization of wiring having high light shielding performance and low resistance.
  • a material such as such as a single metal, an alloy, a metal silicide, which contains at least one of opaque high-melting-point metals such as Ti, Cr, W, Ta, Mo, Pb, thereby permitting the realization of wiring having high light shielding performance and low resistance.
  • the light-shielding conductive films 90 a can be formed by using a single metal, an alloy, a metal silicide, or the like containing low-resistance Al (aluminum).
  • Al aluminum which is the same material as the data lines 6 a
  • the resistance of the capacitor lines 300 can be made smaller than a conventional polysilicon film by two or three orders of magnitude.
  • the crosstalk in the direction of the scanning lines 3 a which is due to the high time constant of the capacitor lines 300 , can be significantly decreased.
  • the light-shielding conductive films 90 a may be electrically connected to the capacitor electrodes 3 b consisting of the same film as the scanning lines 3 a through the contact holes 95 for the respective pixel electrodes 9 a.
  • the capacitor electrodes 3 b can be fixed at the same constant potential as the light-shielding conductive films 90 a. Therefore, at least portions of the storage capacitors 70 can be formed between the capacitor electrodes 3 b and the relay films 80 a electrically connected to the heavily-doped drain regions 1 e of the semiconductor layers 1 a by using the interlayer insulating film 81 as a dielectric film.
  • the storage capacitors 70 can also be formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f extended from the heavily-doped drain regions 1 e of the semiconductor layers 1 a by using the gate insulating films 2 as dielectric films.
  • the contact holes 95 are formed below the data lines 6 a so that the semiconductor layers 1 a connected to the pixel electrodes 9 a adjacent along the data lines 6 a are preferably electrically connected to the data lines 6 a near the contact holes 5 .
  • FIG. 4 is a drawing showing an equivalent circuit of each of the pixels which constitute the liquid crystal device of this embodiment.
  • the heavily-doped drain region 1 e of the semiconductor layer 1 a is electrically connected to the relay film 80 a and the pixel electrode 9 a, while the light-shielding conductive film 90 a is electrically connected to the capacitor electrode 3 b.
  • the light-shielding conductive film 90 a is extended from the image display region to the periphery thereof to be connected to the constant potential source in the peripheral region.
  • the underlying light-shielding film 11 a may be electrically connected to the light-shielding conductive film 90 a.
  • the capacitor electrode 1 f, the relay film 80 a and the pixel electrode 9 a can be formed between the respective conductive film layers of the light-shielding conductive film 90 a fixed at the constant potential, the capacitor electrode 3 b and the underlying light-shielding film 11 a through dielectric films.
  • FIGS. 5 to 9 the regions where the storage capacitors are formed are shown in FIGS. 5 to 9 .
  • the reduction scales are the same.
  • FIG. 5 shows first storage capacitors C 1 formed at positions between the layer of the scanning lines 3 a and the layer of the data lines 6 a, and between the light-shielding conductive films 90 a and the relay films 80 a.
  • the interlayer insulating film 91 is used as a dielectric film.
  • the crosshatched regions are actual regions where the first storage capacitors C 1 are actually formed, and the first storage capacitors C 1 can be for formed in the significant portions of the non-aperture regions except the contact holes 5 , 95 and 8 b.
  • the contact holes 95 for electrically connecting the capacitor electrodes 3 b to the light-shielding conductive films 90 a need not be formed, thereby permitting the formation of the first storage capacitors C 1 in the regions of the contact holes 95 .
  • the first storage capacitors C 1 can be formed above the channel regions 1 a ′ of the TFTs 30 , which is impossible in a conventional device, thereby causing an advantage for improving the pixel aperture ratio and definition of a transmissive liquid crystal device.
  • the interlayer insulating film 91 can be formed by using a film having high insulation and high dielectric constant, such as an oxide film, a nitride film.
  • the interlayer insulating film 91 can be formed by a continuous step using a polysilicon film, thereby permitting the formation of an insulating film having high density and less defect. Therefore, the defects of the device are decreased, and the interlayer insulating film 91 a having a thickness of 100 nm or less can be formed to further enlarge the first storage capacitors C 1 .
  • FIG. 6 shows second storage capacitors C 2 formed between the relay films 80 a and the capacitor electrodes 3 b.
  • the interlayer insulating film 81 is used as a dielectric film.
  • the crosshatched regions are regions where the second storage capacitors C 2 are actually formed.
  • the capacitor electrodes 3 b are parted in the regions of the contact holes 8 a for electrically connecting the semiconductor layers 1 a and the relay films 80 a in the respective pixels, and are electrically connected to the upper light-shielding conductive films 90 a through the contact holes 95 .
  • the capacitor electrodes 3 b are formed in a T shape so that the second storage capacitors C 2 can be efficiently formed.
  • the interlayer insulating film 81 a film having high insulation and a high dielectric constant, such as an oxide film, a nitride film can be formed.
  • the capacitor electrodes 3 b consist of the same film as the scanning lines 3 a, the regions where the second storage capacitors C 2 can be formed become smaller than the regions where the first storage capacitors C 1 are formed, as shown in FIG. 5 .
  • the thickness of the interlayer insulating film 81 must be 500 nm or more in order to prevent an operation error of the TFTs 30 , and thus the second storage capacitors C 2 cannot be so much enlarged as the fist storage capacitors C 1 can be enlarged.
  • FIG. 7 shows third storage capacitors C 3 formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f.
  • the gate insulating films 2 are used as dielectric films.
  • the crosshatched regions are regions where the third storage capacitors C 3 are actually formed. Since the gate insulating films 2 are formed by oxidation at a high temperature of 1000° C. or more, as described above, a film having high density and insulation can be obtained. Therefore, the regions where the third storage capacitors C 3 can be formed are substantially the same as the regions where the second storage capacitors C 2 shown in FIG. 6 are formed, but the regions of the third storage capacitors C 3 can be made larger than the regions of the second storage capacitors C 2 .
  • the third storage capacitors C 3 can also be formed below the regions of the contact holes 95 for electrically connecting the capacitor electrodes 3 b and the upper light-shielding conductive films 90 a.
  • fourth storage capacitors C 4 can be formed between the capacitor electrodes 1 f and the underlying light-shielding films 11 a.
  • the underlying insulating film 12 is used as a dielectric film.
  • the crosshatched regions are regions where the fourth storage capacitors C 4 are actually formed.
  • the underlying insulating film 12 is formed to a thickness of 500 nm or less, the distance between the channel regions 1 a ′ and the underlying light-shielding films 11 a is decreased to cause an operation error of the TFTs 30 according to the potential of the underlying light-shielding films 11 a.
  • the underlying insulating film 12 may be selectively partially thinned in the regions where the capacitor electrodes 1 f overlap with the underlying light-shielding films 11 a in a plan view to enlarge the fourth storage capacitors C 4 .
  • the portions of the underlying insulating film 12 other than the portions opposite to the channel regions 1 a ′ can be thinned to enlarge the fourth storage capacitors C 4 .
  • fifth storage capacitors C 5 can be formed between the pixel electrodes 9 a and the light-shielding conductive films 90 a.
  • the interlayer insulating films 4 and 7 are used as dielectric films.
  • the crosshatched regions are regions where the fifth storage capacitors C 5 are actually formed.
  • Each of the interlayer insulating films 4 and 7 consists of a highly insulating glass film of, for example, NSG, PSG, BSG, BPSG, a silicon oxide film, a silicon nitride film, or the like.
  • the interlayer insulating film 7 since the data lines 6 a are formed on the interlayer insulating film 4 , the interlayer insulating film 7 must be thickly formed because a display image deteriorates due to the parasitic capacitor produced between the pixel electrodes 9 a and the data lines 6 a, and thus the fifth storage capacitors C 5 cannot be so much enlarged as the first storage capacitors C 1 can be enlarged.
  • the stacked type storage capacitors 70 each consisting of the five layers including the first storage capacitor C 1 to the fifth storage capacitor C 5 can be formed.
  • the great storage capacitors 70 can be effectively formed.
  • at least the first storage capacitors C 1 maybe formed.
  • the structure of this embodiment permits the formation of the sufficient storage capacitors 70 by thinning the interlayer insulating film 91 as the dielectric film of the storage capacitors C 1 . Therefore, in this embodiment, any desired storage capacitor can be advantageously selected from the first storage capacitors C 1 to the fifth storage capacitors C 5 and used according to the specifications for the purpose of an electro-optical device.
  • the data lines 6 a are formed on the interlayer insulating film 4 formed above the light-shielding conductive films 90 a.
  • the data lines 6 a are also electrically connected to the heavily-doped source regions 1 d of the semiconductor layers 1 a through the contact holes 5 which are formed at the predetermined positions of the gate insulating films 2 , the interlayer insulating film 81 , the interlayer insulating film 91 , and the interlayer insulating film 4 .
  • the data lines 6 a consist of an Al metal film or metal silicide, or the like having low resistance and high light-shielding property because image signals are supplied thereto.
  • the light-shielding regions as the non-aperture regions can be defined by the data lines 6 a and the light-shielding conductive films 90 a. More specifically, as shown in FIG. 10, the light-shielding conductive films 90 a are formed to overlap with the pixel electrodes 9 a so as to shield the most of the regions including the channel regions 1 a ′. Also, the most of the regions along the data lines 6 a can be shielded by the light-shielding conductive films 90 a, and unlike in a conventional display device, thus the light-shielding regions need not be defined only by the data lines 6 a.
  • the data lines 6 a and the pixel electrodes 9 a can be formed so as not to overlap with each other as much as possible through the interlayer insulating film 7 . Therefore, the parasitic capacitors between the data lines 6 a and the pixel electrodes 9 a can be significantly decreased, thereby preventing the occurrence of deterioration in display image quality due to a change in potential of the pixel electrodes 9 a.
  • the light-shielding conductive films 90 a are formed below the data lines 6 a, the regions where the contact holes 5 are formed for electrically connecting the data lines 6 a and the semiconductor layers 1 a cannot be shielded.
  • the wide data lines 6 a may be formed so as to partially overlap with the pixel electrodes 9 a.
  • the regions where the contact holes 5 are formed may be moved along the data lines 6 a in the direction away from the channel regions 1 a ′ without any problem.
  • This embodiment has the advantage that even when the regions where the contact holes 5 are formed are moved, the first storage capacitors C 1 formed between the relay films 80 a and the light-shielding conductive films 90 a are not changed.
  • the light-shielding conductive films 90 a cannot be provided in the regions where the contact holes 8 b are formed for electrically connecting the relay films 80 a and the pixel electrodes 9 a, and thus these regions may be shielded by the relay films 80 a. If the relay films 80 a consist of a light-transmissive film such as a polysilicon film, the regions may be shielded by the underlying light-shielding films 11 a. In this case, the regions where the contact holes 8 b are formed are preferably separated from the channel regions 1 a ′. As shown in FIG.
  • the contact holes 8 b between the adjacent data lines 6 a so that incident light does not reach the channel regions 1 a ′ even when light is incident on the underlying light-shielding films 11 a. Since the pixels can be formed in line symmetry with respect to the data lines 6 a, for example, a projector including a combination of liquid crystal devices including TN liquid crystals having different twisting directions causes no deterioration in display image quality such as color irregularity.
  • the light-shielding regions can be defined on the TFT array substrate 10 , and thus light-shielding films need not be provided on the counter substrate 20 , as shown in FIG. 3 . Therefore, in mechanically combining the TFT array substrate 10 and the counter substrate 20 , even when alignment is shifted, the regions (aperture regions) where light is transmitted are not changed because no light-shielding film is provided on the counter substrate 20 . Therefore, a stable aperture ratio can be obtained to significantly decrease defects in the device.
  • FIG. 11 (A) is a sectional view taken along line XI-XI′ in FIG. 2, and FIG. 11 (B) shows a conventional structure.
  • FIGS. 11 (A) and (B) show the structures on same reduction scale.
  • this embodiment uses a structure in which the light-shielding conductive films 90 a are provided against incident light L 1 , and the underlying light-shielding films 11 a are provided against reflected light L 2 so as to prevent light irradiation of the semiconductor layers 1 a, as shown in FIG. 11 (A).
  • the width W 1 of each of the light-shielding conductive films 90 a for shielding incident light L 1 is larger than the width W 2 of each of the underlying light-shielding films 11 a.
  • the underlying light-shielding films 11 a are formed so as not to project from the light-shielding conductive films 90 a.
  • the width W 3 of each of the semiconductor layers 1 a is smaller than the width W 2 of each of the underlying light-shielding films 11 a.
  • the channel regions and the vicinities thereof are covered with the underlying light-shielding films 11 a, as viewed from the TFT array substrate side.
  • the probability that the incident light reaches the semiconductor layers 1 a can be decreased.
  • the light-shielding conductive films 90 a can be formed between the data lines 6 a and the semiconductor layers 1 a, light shielding can be achieved nearer to the channel regions than the conventional example shown in FIG. 11 (B) in which the channel regions are shielded by the data lines 6 a.
  • consideration is given to a margin for the incidence angle of the incident light L 1 .
  • the semiconductor layers 1 a Since the semiconductor layers 1 a has a width W 3 of, for example, as small as 1 ⁇ m, the incident light L 1 is not likely to be incident directly on the semiconductor layers 1 a. Therefore, it is assumed that light incident on the underlying light-shielding films 11 a provided below the semiconductor layers 1 a is reflected and incident on the semiconductor layers 1 a. It is also assumed that the underlying light-shielding films 11 a of this embodiment shown in FIG. 11 (A) and the conventional example shown in FIG. 11 ( 1 B) have the same width W 2 .
  • the width W 1 of each of the light-shielding films 90 a for shielding the incident light L 1 in this embodiment is the same as the width W 1 of each of the data lines 6 a in the conventional example.
  • the interlayer distance between the underlying light-shielding films 11 a and the light-shielding conductive films 90 a is D 1
  • the interlayer distance between the underlying light-shielding films 11 a and the data lines 6 a is D 2
  • the relation D 1 > ⁇ D 2 is obtained.
  • the margin for the angle of the incident light L 1 in this embodiment is larger than that in the conventional example by an amount corresponding to a decrease in the interlayer distance to the underlying light-shielding films 11 a.
  • the margin angle of the incident light L 1 in this embodiment is R 1
  • the margin angle of the incident light L 1 in the conventional example is R 2
  • the relation R 1 >R 2 is obtained.
  • the margin for the incidence angle of the incident light in the liquid crystal device of this embodiment is larger than the conventional example, and thus the liquid crystal device of this embodiment can advantageously comply with an increase in the incidence angle with miniaturization of an optical system.
  • light-shielding films can also be formed on the sides of the semiconductor layers 1 a through insulating films to further improve correspondence to the incidence angle.
  • the width W 4 of each of the data lines 6 a in the channel region and the vicinities thereof can be made smaller than the width W 1 of each of the light-shielding conductive films 90 a.
  • the relation W>W 4 is obtained, and the data lines 6 a are thus formed so as not to project from the light-shielding conductive films 90 a in the channel region and the vicinities thereof. Therefore, it is possible to prevent the semiconductor layers 1 a from being irradiated with stray light reflected by the data lines 6 a.
  • the light-shielding conductive films 90 a can be formed by using a film containing a high-melting-point metal having lower reflectance than Al which forms the data lines 6 a, stray light due to the data lines 6 a can also be absorbed by the light-shielding conductive films 90 a.
  • the relay films 80 a can be formed below the light-shielding conductive films 90 a, the vicinities of the semiconductor layers 1 a can be shielded by the relay films 80 a to improve the light-shielding performance.
  • the width of each of the relay films 80 a is substantially the same as the width W 1 of each of the light-shielding conductive films 90 a, the light-shielding performance can be further improved.
  • the reflected light L 2 is incident from the TFT array substrate 10 side, in this embodiment, light is absorbed by the relay films 80 a consisting of polysilicon films or low-resistance films containing a high-melting-point metal, while in the conventional example, stray light reflected below the data lines 6 a is likely to be incident on the semiconductor layers 1 a because the data lines 6 a having high reflectance are also used as light-shielding films. As a result, stray light due to internal reflection can be significantly decreased, thereby eliminating the need to take account of deterioration in the display image quality due to a leakage of the TFTs 30 .
  • the light-shielding conductive films 90 a may include a film containing at least Al having high reflectance. Therefore, in the light-shielding regions of the liquid crystal device, it is possible to form the data lines 6 a and the light-shielding conductive films 90 a consisting of films containing at least Al having high reflectance of, for example, 80% or more in the visible region, and thus reflect incident light by the data lines 6 a and the light-shielding conductive films 90 a to prevent an increase in temperature of the liquid crystal device. In the liquid crystal device of this embodiment, for example, it is thus possible to decrease the cost required for developing a cooling device of a projector, and improve the light-shielding performance of the liquid crystal device.
  • the surface of the interlayer insulating film 7 provided below the pixel electrodes 9 a is planarized. This is performed for preventing disclination of the liquid crystal due to steps formed in wiring, elements, etc., and the lower interlayer insulating film 4 may be also planarized.
  • planarization can be performed by coating an organic or inorganic SOG (Silicon On glass) film by a spin coater, or CMP process.
  • the liquid crystal of the second embodiment of the present invention uses a mechanism in which the polarities of image signals applied to the liquid crystal are reversed for each scanning line 3 a, and the polarities of the image signals are further reversed for 1 field, as shown in FIG. 12 .
  • a DC component applied to the liquid crystal can be suppressed as much as possible, and the occurrence of flicker can be significantly decreased.
  • the image signals having the same polarity are written in the pixel electrodes 9 a adjacent in the X direction along the scanning lines 3 a, thereby producing no electric field between the adjacent pixel electrodes 9 a.
  • the image signals having different polarities are written in the pixel electrodes 9 a adjacent in the Y direction along the data lines 6 a, thereby producing an electric field between the adjacent pixel electrodes 9 a to cause disclination 400 in the liquid crystal.
  • grooves 10 ′ are formed in the shadowed regions of a plurality of pixel groups on the TFT array substrate shown in FIG. 13 so that wiring such as the data lines 6 a and the like, and TFTs 30 are partially buried in the grooves to planarize the substrate.
  • the grooves 10 ′ are not provided in the regions of the scanning lines 3 a, which is in contact with the aperture regions, to further decrease the regions where the disclination 400 occurs.
  • this embodiment is suitable for a liquid crystal device for a projector required to have brightness and a small size.
  • FIG. 14 is a sectional view taken along line XIV-XIV′ in FIG. 13 .
  • the grooves 10 ′ are formed in the regions of the TFT array substrate 10 where the TFTs 30 and the storage capacitors 70 are formed so that the pixel electrodes 9 a and the alignment film 16 can be substantially flatly formed.
  • the grooves 10 ′ can easily be formed by usual photolithography and etching.
  • the taper angle of the sides of the grooves 10 ′ can be controlled to various angles by a dry etching method or a wet etching method.
  • control of the depth of the grooves 10 ′ is important, but the depth can easily be controlled by controlling the dry etching time or the like.
  • planarization can be realized without using a photosensitive organic film or the like, and thus this method is particularly useful for a liquid crystal device of a projector using a strong light source.
  • FIG. 15 is a sectional view taken along line XV-XV′ in FIG. 13, showing the sectional structure between the pixel electrodes 9 a adjacent in the X direction shown in FIG. 12 .
  • the grooves 10 ′ are formed in the TFT array substrate 10 to permit substantially complete planarization of the regions where the data lines 6 a are formed.
  • no disclination occurs due to the steps formed by wiring such as the data lines 6 a, and elements because the regions where the data lines 6 a, etc. are formed are buried in the grooves and planarized.
  • FIG. 16 is a sectional view taken along line XVI-XVI′ in FIG. 13, showing the sectional structure between the pixel electrodes 9 a adjacent in the Y direction shown in FIG. 12 . Since disclination occurs in the liquid crystal due to an electric field between the adjacent pixel electrodes 9 a, the grooves 10 ′ are not formed in the regions of the TFT array substrate 10 where the scanning lines 3 a are formed, so as to decrease the cell gap of the liquid crystal layer 50 in the partition regions between the adjacent pixel electrodes 9 a, as shown in FIG. 16 .
  • the electric field between the counter electrode 21 provided on the counter substrate 20 and the pixel electrodes 9 a is increased, and thus the regions where disclination occurs in the liquid crystal can be decreased as much as possible even when an electric field occurs between the adjacent pixel electrodes 9 a. Since the disclination need not be decreased by narrowing the cell gap of the liquid crystal, the problem of development of a liquid crystal for a narrow cell gap, the problem of causing difficulties in controlling the cell gap, etc. do not occur.
  • the grooves 10 ′ are formed in the TFT array substrate 10 so that wiring and elements can be completely or partially buried therein, thereby realizing an electro-optical device having a higher pixel aperture ratio, as compared with a case such as the CMP process which can perform only complete planarization.
  • the grooves 10 ′ are formed not only in the TFT array substrate 10 but also in the interlayer insulating film such as the underlying insulating film 12 or the interlayer insulating film 81 , the same effect can be obtained.
  • the grooves 10 ′ provided in the TFT array substrate 10 may be combined with the grooves provided in the interlayer insulating film such as the underlying insulating film 12 or the interlayer insulating film 81 for planarization.
  • FIG. 17 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed
  • FIG. 18 is a sectional view taken along line XVIII-XVIII′ in FIG. 17 .
  • layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing.
  • the third embodiment is greatly different from the first embodiment in that auxiliary wirings 3 b ′ also serving as capacitor electrodes 3 b are formed by the same film as scanning lines 3 a.
  • the auxiliary wirings 3 b ′ are extended from an image display region to the periphery thereof along the direction of the scanning lines 3 a so as to be connected to a constant potential source in the peripheral region.
  • a constant potential source such as a negative power source, or a positive power source supplied to peripheral circuits for driving the liquid crystal device (for example, a scanning line driving circuit, a data line driving circuit), which will be described below, a ground power source, a constant potential source supplied to a counter electrode, or the like can be used.
  • the auxiliary wirings 3 b ′ preferably have the same potential as that supplied to light-shielding conductive films 90 a. Therefore, the auxiliary wirings 3 b ′ can be caused to function as parts of the capacitor lines 300 shown in FIG. 1 . Also, the auxiliary wirings 3 b ′ can be electrically connected to the upper light-shielding conductive films 90 a below data lines 6 a through contact holes 95 . In this case, the auxiliary wirings 3 b ′ may be connected to the light-shielding conductive films 90 a through the contact holes 95 for each pixel electrode 9 a or a plurality of the pixel electrodes 9 a.
  • the capacitor lines 300 having a redundant structure can be formed by the auxiliary wirings 3 b ′ and the light-shielding conductive films 90 a. Even when the first or second embodiment has a margin for the light-shielding regions, of course, the capacitor electrodes 3 b may be extended to form the auxiliary wirings 3 b′.
  • the third embodiment is also greatly different from the first embodiment in that relay films 80 a ′ shown by slanted lines are formed so as not to overlap with the scanning lines 3 a in a plan view, as shown in FIG. 17 .
  • the interlayer insulating film 81 is formed to a thickness of 100 nm or less so that large storage capacitors can be formed on the auxiliary wirings 3 b ′ including capacitor electrodes, as shown in FIG. 18 . Namely, the storage capacitors C 2 shown in FIG. 4 can be enlarged.
  • the relay films 80 a ′ since the interlayer insulating film 81 for insulating the scanning lines 3 a and the relay films 80 a ′ is thinned, the relay films 80 a ′ provided to overlap with the scanning lines 3 a enlarge parasitic capacitances, thereby delaying scanning signals. Also, error occurs in the operation of the TFTs 30 due to the influence of a potential applied to the relay films 80 a ′, and thus the relay films 80 a ′ cannot be provided near channel regions 1 a ′.
  • the interlayer insulating film 81 between the semiconductor layers 1 a and the relay films 80 a ′ can be greatly thinned, and thus no penetration in the semiconductor layers 1 a occurs in forming contact holes 8 a for electrically connecting heavily-doped drain regions 1 e of the semiconductor layers 1 a and the relay films 80 a ′.
  • the aperture diameter of the contact holes 8 a can be significantly decreased.
  • an interlayer insulating film 91 must be formed to a thickness of 500 nm or more.
  • the storage capacitors C 1 shown in FIG. 4 can be formed between the auxiliary wirings 3 b ′ and the light-shielding conductive films 90 a.
  • FIG. 19 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed
  • FIG. 20 is a sectional view taken along line XX-XX′ in FIG. 19 .
  • layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing.
  • the same members as the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • scanning lines 3 a and data lines 6 a are provided in substantially centers of non-aperture regions.
  • Semiconductor layers 1 a are provided below the data lines 6 a so as to cross the scanning lines 3 a.
  • the data lines 6 a are electrically connected to heavily-doped source regions 1 d of the semiconductor layers 1 a below the data lines 6 a through contact holes 5 .
  • the heavily-doped drain regions 1 e of the semiconductor layers 1 a are electrically connected to the relay films 80 a below the data lines through contact holes 8 a.
  • the semiconductor layers 1 a are arranged below the light-shielding data lines 6 a to exhibit the effect of preventing direct incidence of light from the counter substrate 20 side on the semiconductor layers 1 a. Furthermore, the semiconductor layers 1 a and the contact holes 5 and 8 a are formed in line symmetry with respect to the center lines of the non-aperture regions in the direction of the scanning lines 3 a and the non-aperture regions in the direction of the data lines 6 a, thereby making the shape of steps symmetric with respect to the data lines. This embodiment is thus advantageous because no difference occurs in light transmission according to the rotation direction of the liquid crystal.
  • underlying light-shielding films 11 a are formed below the semiconductor layers 1 a with an underlying insulating film 12 provided therebetween.
  • the underlying light-shielding films 11 a are formed in a matrix along the direction of the data lines 6 a and the direction of the scanning lines 3 a.
  • the semiconductor layers 1 a are arranged inward of the underlying light-shielding films 11 a, thereby causing the effect of preventing direct incidence of light returned from the TFT array substrate 10 side on the semiconductor layers 1 a.
  • the relay films 80 a may consist of a polysilicon film, or a conductive film containing a high-melting-point metal or the like, and are extended in a substantially T shape along the scanning lines 3 a and the data lines 6 a between the semiconductor layers 1 a and the pixel electrodes 9 a so as to function as buffers for electrically connecting the semiconductor layers 1 a and the pixel electrodes 9 a. More specifically, the heavily-doped drain regions 1 e of the semiconductor layers 1 a are electrically connected to the conductive relay films 80 a through the contract holes 8 a, and the relay films 80 a are electrically connected to the pixel electrodes 9 a through the contact holes 8 b.
  • the relay films 80 a having a high etching selection ratio, it is possible to avoid the possibility of penetration in the semiconductor layers 1 a during the formation of the contact holes.
  • the same films as the relay films 80 a may be provided for relay.
  • an interlayer insulating film 91 is laminated on the relay films 80 a, and the light-shielding conductive films 90 a are formed on the interlayer insulating film 91 .
  • the light-shielding conductive films 90 a are formed to cover the relay films 80 a except the contact holes 8 b.
  • the light-shielding conductive films 90 a are also extended to the outside of the image display region in the direction of the scanning lines 3 a so as to be electrically connected to any one of a constant potential source such as a negative power source, a positive power source supplied to a scanning line driving circuit, a data line driving circuit, etc., a ground power source, a constant potential source supplied to a counter electrode, or the like, thereby fixing the potential. Therefore, each of the relay films 80 a can be used as one of capacitor electrodes, and each of the light-shielding conductive films 90 a can be used as the other capacitor electrode to form each of the storage capacitors C 1 shown in FIGS. 4 and 5.
  • the interlayer insulating film 91 functions as a dielectric film. Since the interlayer insulating film 91 is laminated only for forming the storage capacitors C 1 , the interlayer insulating film 91 is thinned to a thickness which causes no leakage between the relay films 80 a and the light-shielding conductive films 90 a, thereby increasing the storage capacitors C 1 . Furthermore, in the fourth embodiment, the relay films 80 a can be extended to portions above the TFTs 30 and the scanning lines 3 a by thickening the interlayer insulating film 81 , thereby efficiently increasing the storage capacitors C 1 . Furthermore, in the fourth embodiment, the semiconductor layers 1 a are not extended to form capacitor electrodes.
  • capacitor electrodes for forming the storage capacitors and capacitor lines need not be formed by using the same film as the scanning lines 3 a, and thus the scanning lines 3 a can be formed at the substantially centers of the non-aperture regions defined by the light-shielding conductive films 90 a and the underlying light-shielding films 11 a, as shown in FIG. 19 .
  • the semiconductor layers 1 a consisting of a polysilicon film need not be decreased in resistance, and thus impurities need not implanted into the capacitor electrode forming portions to decrease the number of steps.
  • the channel regions 1 a ′ of the TFTs 30 are respectively formed at the intersections of the scanning lines 3 a and the data lines 6 a so that the channel regions 1 a ′ can be formed at the substantially centers of the non-aperture regions in the direction of the data lines 6 a and the direction of the scanning lines 3 a.
  • the channel regions 1 a ′ are located at positions which are most hardly irradiated with light reflected by the counter substrate 20 side and light returned from the TFT array substrate 10 side, thereby significantly decreasing a leakage current of the TFTs 30 due to light.
  • the light-shielding conductive films 90 a, the relay films 80 a and the underlying light-shielding films 11 a are formed near the channel regions 1 a ′ so that the pattern width decreases in this order, to prevent direct incidence of light on the underlying light-shielding films 11 a.
  • the relay films 80 a consisting of a polysilicon film are interposed between the light-shielding conductive films 90 a and the semiconductor layers 1 a to exhibit the effect of absorbing light reflected by the surfaces of the underlying light-shielding films 11 a and light returned from the TFT array substrate 10 side. Therefore, this embodiment is useful for light resistance.
  • the non-aperture regions consisting of the data lines 6 a, the light-shielding conductive films 90 a, the underlying light-shielding films 11 a, etc. can be formed on the TFT array substrate 10 , whereby a light-shielding film need not be provided on the counter substrate 20 . Therefore, since no light-shielding film is provided on the counter substrate 20 , the regions (aperture regions) where light is transmitted is not changed even when alignment is shifted in mechanically combining the TFT array substrate 10 and the counter substrate 20 . As a result, a stable pixel aperture ratio can be obtained, and defects of the device can be significantly decreased.
  • FIG. 21 is a plan view showing the TFT array substrate 10 together with components formed thereon, as viewed from the counter substrate 20 side
  • FIG. 22 is a sectional view taken along line XXII-XXII′ in FIG. 21 .
  • a sealing agent 52 is provided on the TFT array substrate 10 , on which elements and wiring are formed, along the edge of the counter substrate 20 , and a light-shielding frame 53 is provided in parallel to the inner side of the sealing agent, for defining the periphery of the image display region.
  • the frame 53 may be provided on the TFT array substrate 10 side, like in this embodiment, or the counter substrate 20 side.
  • a data line driving circuit 101 for supplying an image signal to the data lines 6 a with predetermined timing and external circuit connecting terminals 102 are provided along one side of the TFT array substrate 10 , and a scanning line driving circuit 104 is provided along each of the two sides adjacent to that side, for supplying a scanning signal to the scanning lines 3 a with predetermined timing.
  • the scanning line driving circuit 104 may be provided on one side.
  • the data line driving circuit 101 may be provided on both sides of the image display region along the sides thereof.
  • a plurality of wirings 105 are provided on the remaining side of the TFT array substrate 10 , for supplying a common signal to the scanning line driving circuits 104 provided on both sides of the image display region.
  • a vertical conducting material 106 is provided at least one of the corners of the counter substrate 20 , for providing electric conduction between the TFT array substrate 10 and the counter substrate 20 . Namely, the counter electrode potential applied from the external circuit connecting terminals 102 is supplied to the counter electrode 21 provided on the counter substrate 20 through the wiring provided on the TFT array substrate 10 and the vertical conducting materials 106 . As shown in FIG. 22, the counter substrate 20 is fixed to the TFT array substrate 10 with the sealing material 52 .
  • the TFT array substrate 10 may be formed a sampling circuit for supplying an image signal to the plurality of the data lines 6 a with predetermined timing, a pre-charging circuit for supplying a predetermined voltage level pre-charge signal to the plurality of the data lines 6 a before the image signal, an inspection circuit for inspecting quality, defects, etc. of the liquid crystal device in the course of manufacture, at the time of shipping, and the like.
  • the peripheral circuits such as the data line driving circuit 101 , and the scanning line driving circuits 102 can be formed on the same TFT array substrate 10 in the step of forming the TFTs 30 for controlling the pixel electrodes 9 a, thereby realizing a liquid crystal device having high definition and high density.
  • the TFT array substrate 10 may be electrically or mechanically connected to driving LSI mounted on, for example, a TAB (Tape Automated Bonding) substrate, through an anisotropic conductive film provided on the peripheral portion of the TFT array substrate 10 instead of providing the data line driving circuit 101 and the scanning line driving circuit 104 on the TFT array substrate 10 .
  • driving LSI mounted on, for example, a TAB (Tape Automated Bonding) substrate
  • a polarizing film, a retardation file, a polarizer or the like may be arranged in the predetermined direction on each of the incident side of the counter substrate 20 and the outgoing side of the TFT array substrate 10 according to the operation mode such as a TN mode, a VA (Vertically Aligned) mode, a PDLC (Polymer Dispersed Liquid Crystal) mode, or the like, and the normally black mode/normally white mode.
  • the operation mode such as a TN mode, a VA (Vertically Aligned) mode, a PDLC (Polymer Dispersed Liquid Crystal) mode, or the like, and the normally black mode/normally white mode.
  • the liquid crystal device of each of the embodiments is used as each of three light valves for R (red), G (green) and B (blue) in order to apply to a color display projector, and light of each of the colors separated through a dichroic mirror for RGB color separation is incident on each of the light valves. Therefore, in each of the embodiments, a color filter is not provided on the counter substrate 20 .
  • a RGB color filter may be formed on the predetermined regions of the counter substrate 20 , which correspond to the pixel electrodes 9 a, together with a protecting film therefore.
  • a color filter layer may be formed by using a color resist or the like below the pixel regions 9 a on the TFT array substrate 10 corresponding to RGB.
  • the liquid crystal device of each of the embodiments can be applied to color display liquid crystal devices such as direct-viewing type and reflection type color liquid crystal televisions.
  • microlenses may be formed on the counter substrate 20 in one-to-one correspondence with pixels. By forming the microlenses, the converging efficiency of incident light can be significantly improved to realize a bright liquid crystal device.
  • an interference layer consisting of layers having different refractive indexes may be deposited on the counter substrate 20 to form a dichroic filter for creating RGB colors by using light interference. By using the counter substrate including the dichroic filter, a liquid crystal device for brighter color display can be realized.
  • incident light is incident on the counter substrate 20 side
  • light may be incident on the TFT array substrate 10 side
  • light may be emitted from the counter substrate 20 side because the underlying light-shielding films 11 a and the light-shielding conductive films 90 a are provided on the TFT array substrate 10 .
  • a polarizer coated with an AR (Anti Reflection) film need not be provided on or an AR film need not be mounted on the back of the TFT array substrate 10 in order to prevent reflection, thereby causing the advantage that the material cost can be accordingly reduced, and the yield is not reduced due to dust, flaws, etc. in mounting the polarizer.
  • the conductive films 90 a has the light shielding ability, the conductive films has no light shielding ability in some cases in which another light-shielding film is formed for light incident on the counter substrate side. Even with the conductive films 90 a having no light shielding ability, the construction of each of the embodiments can enlarge the storage capacitors.
  • each of the embodiments is also effective for other types of TFTs such as a reversed stagger type TFT, an amorphous silicon TFT.
  • An electro-optical device of the present invention is not limited to the above-described embodiments, and appropriate modification can be made within the gist and idea of the present invention which can be read from the claims and the entire specification. An electro-optical device with such modification is also included in the technical field of the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Thin Film Transistor (AREA)

Abstract

An electro-optical device includes a TFT, a data line, a scanning line, and a pixel electrode, which are provided above a substrate, a semiconductor layer which constitutes the TFT being connected to the pixel electrode through a relay film. A light-shielding conductive film provided between the data line and the relay film is electrically connected to a capacitor electrode which consists of the same film as the scanning line provided between the relay film and the semiconductor layer at a constant potential, thereby forming a storage capacitor between the films. Therefore, in an electro-optical device of a type in which a light-shielding film against incident light is provided above pixel switching TFT, and a light-shielding film against return light is provided below the TFT, the pixel aperture ratio can be increased, and the storage capacitor can be enlarged.

Description

This is a Divisional of application Ser. No. 09/809,275, filed Mar. 16, 2001, now U.S. Pat. No. 6,610,997.
BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates to the technical field of an active matrix driving system electro-optical device. Particularly, the present invention relates to the technical field of an electro-optical device which includes a pixel electrode and a pixel switching thin film transistor (referred to as “TFT” hereinafter), which are provided with electrical conduction therebetween, and a storage capacitor and a light-shielding film which are provided in a laminated structure formed on a substrate.
2. Description of Related Art
In a conventional electro-optical device such as a TFT-driven active matrix driving system liquid crystal device, a scanning signal is supplied to a gate electrode of a TFT through a scanning line to turn the TFT on, and an image signal supplied to a source region of a semiconductor layer through a data line is supplied to a pixel electrode through the region between the source and drain of the TFT. Such an image signal is supplied to each of a plurality of pixel electrodes for only a short time through each of a plurality of TFTs. Therefore, in order to hold the voltage of the image signal supplied through a TFT over a longer time than the time of the on state, a storage capacitor is generally added to each pixel electrode.
When light is incident on at least a portion of a channel region or junction regions between the channel region and source-drain regions, and the source-drain regions adjacent to the junction regions in a semiconductor layer which constitutes the TFT, light excitation occurs to change the transistor properties of the TFT, for example, increase a leakage current in the on state. Therefore, for example, in an electro-optical device of a type in which strong light is incident, such as a transmissive electro-optical device for a projector, in order to prevent such a change in the properties of the TFT with light incidence, a light-shielding film is provided on a counter substrate on the incidence side of incident light to cover the space between the pixel electrodes including the channel region of the TFT, or an opaque wide data line which includes an Al film or the like is formed to cover the channel region. Furthermore, on the outgoing side, a light-shielding film is provided below the TFT to shield light reflected by the back, and returned light such as incident light from another electro-optical device, which passes through a synthesis optical system, in a projector that includes a combination of a plurality of electro-optical devices.
SUMMARY OF THE INVENTION
In this type of electro-optical device, improvement in quality of a display image is strongly demanded, and in order to satisfy this demand, it is important that a pixel aperture region of each pixel through which display light is transmitted is widened relative to a non-pixel aperture region through which display light is not transmitted, to increase the pixel aperture ratio while decreasing the pixel pitch, and enlarge a storage capacitor added to each pixel electrode.
The storage capacitor is generally formed by utilizing the non-pixel aperture region, and it is thus basically difficult to form the storage capacitor in the pixel aperture region. Therefore, the non-pixel aperture region where the storage capacitor can be formed is narrowed as the pixel aperture region is widened to increase the pixel aperture ratio. However, there is a problem in which the pixel aperture ratio is decreased as the non-pixel aperture region is widened to enlarge the storage capacitor.
It is also very important to sufficiently shield incident light and reflected light in a channel region of TFT or a region (referred to as the “adjacent region of channel” hereinafter) adjacent to the channel region, for example, a lightly-doped region of LDD structure TFT, as described above. Namely, a decrease in the pixel pitch causes significant deterioration in image quality resulting from only a slight change in properties of TFT.
However, a total plane region where a light-shielding film or a film having a light shielding function can be arranged is narrowed by increasing the pixel aperture ratio, thereby causing the problem of causing difficulties in completely shielding TFT from light. Furthermore, a decrease in the pixel pitch causes a problem in which even with incident light or reflected light slightly inclined with the substrate surface, light finally enters the channel region or the adjacent region of channel due to the occurrence of multiple reflection in a laminated structure after oblique incidence. Particularly, when the incidence side is covered with a data line which includes an Al film having high reflectance, shielding against incident light approaches perfection with widening of the data line, but widening the data line conversely causes a problem difficult to resolve in which reflected light is reflected by the side facing TFT or subsequently reflected by the TFT-facing surface of a light-shielding film formed below TFT, and the light is likely to be finally incident on the channel region or the adjacent region of channel. Furthermore, shielding against reflected light approaches perfection with widening of the light-shielding film formed below TFT, but widening the light-shielding film formed below TFT causes a problem difficult to resolve in which oblique incident light is reflected by the inner surface of the light-shielding film, or subsequently reflected by the inner surfaces of the data line, and is likely to be finally incident on the channel region or the adjacent region of channel. Particularly, in an electro-optical device for a projector which uses incident light or reflected light having very high intensity per unit region, the above problems are very important for improving image quality.
The present invention has been achieved at least in consideration of the above problems, and an object of the present invention is to provide an electro-optical device in which a pixel aperture ratio can be increased, a storage capacitor can be enlarged, and a high quality image can be displayed.
Another object of the present invention is to provide an electro-optical device in which a change in properties of pixel switching TFT due to incident light or reflected light can be decreased while increasing the pixel aperture ratio, and a high quality image can be displayed.
(1) In a first exemplary aspect of the present invention, an electro-optical device may include a scanning line formed above a substrate, a data line crossing the scanning line, a thin film transistor connected to the scanning line and the data line, a pixel electrode connected to a drain region of the thin film transistor, and a first storage capacitor formed by a plurality of layers between the scanning line and the data line.
In this exemplary embodiment of the present invention, the first storage capacitor is formed by a plurality of layers between the scanning line and the data line by utilizing the laminated structure to enlarge the storage capacitor, thereby providing an electro-optical device capable of displaying a high quality image.
(2) In another exemplary embodiment of the first aspect of the invention, in the electro-optical device, the first storage capacitor may include a first capacitor electrode, an insulating film facing the first capacitor electrode, and a second capacitor electrode opposed to the first capacitor electrode with the insulating film provided therebetween to serve as a relay film for electrically connecting a drain region of the thin film transistor and the pixel electrode.
In this exemplary embodiment of the present invention, the second capacitor electrode which forms the first storage capacitor is formed as the relay film for electrically connecting the drain region of the thin film transistor and the pixel electrode, whereby the problem of causing a difficulty in electrically connecting the pixel electrode and a semiconductor layer due to a long distance therebetween can be solved. Also, the second capacitor electrode can prevent etching penetration during the formation of a contact hole.
(3) In still another exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the first storage capacitor is formed to overlap with each of the semiconductor layers of the thin film transistor and the scanning line, except the connection region between the source region of the thin film transistors and the data line.
In this exemplary embodiment of the present invention, since the storage capacitor is formed to overlap with each of the semiconductor layers and the scanning line, it is possible to increase the pixel aperture ratio, and to enlarge the storage capacitor.
(4) In a further exemplary embodiment of the first aspect of the present invention, the electro-optical device may further include a second storage capacitor which may include a second capacitor electrode, an insulating film facing the second capacitor electrode, and a third capacitor electrode opposed to the second capacitor electrode with the insulating film provided therebetween and consisting of the same film as the scanning line.
In this exemplary embodiment of the present invention, since the second storage capacitor is formed by using the second capacitor electrode, which forms the first storage capacitor, and the scanning line layer, storage capacitors can be laminated in the thickness direction of the substrate, and even with narrow pixel pitch, a relatively large storage capacitor can be formed in a non-aperture region. In addition, the third capacitor electrode may include the same film as the scanning line, storage capacitors can thus be formed by a laminated structure which may consist of a relatively small number of layers,
(5) In a still further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the third capacitor electrode is formed in parallel with the scanning line except in the connection region between the drain region of the thin film transistor and the second capacitor electrode.
In this exemplary embodiment of the present invention, since the third capacitor electrode is formed in parallel with the scanning line, a storage capacitor can be formed by utilizing the non-aperture region.
(6) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the third capacitor electrode is electrically connected to the first capacitor electrode.
In this exemplary embodiment of the present invention, no potential variation occurs between the first capacitor electrode and the third capacitor electrode, whereby the possibility of affecting the properties of the thin film transistors can be prevented.
(7) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the electrical connection between the third capacitor electrode and the first capacitor electrode is located in a region below the data line.
In this exemplary embodiment of the present invention, the space between the pixel electrodes, which are located below the data line and which cannot be used as an aperture region for each pixel, is used for connecting the third capacitor electrode and the first capacitor electrode, thereby causing an advantage for improving the pixel aperture ratio.
(8) In a further exemplary embodiment of the first aspect of the present invention, in the elcctro-optical device, the third capacitor electrode may include a part of a first capacitor line extending along the scanning line, the first capacitor electrode may include a part of a second capacitor line extending along the scanning line, and the first and second capacitor lines are extended to the periphery of the image display region in which the pixel electrode is arranged, and electrically connected to each other.
In this exemplary embodiment of the present invention, the first capacitor line arranged along the scanning line and including a plurality of third capacitor electrodes, and the second capacitor line arranged along the scanning line and including a plurality of first capacitor electrodes are electrically connected to each other outside the image display region to permit relatively simple and secure electrical connection between the third capacitor electrodes and the first capacitor electrodes through the first and second capacitor lines. Also, contact holes need not be provided for connecting both capacitor electrodes in the image display region, and thus the storage capacitors can be enlarged.
(9) In a further exemplary embodiment of the first aspect of the present invention, the electro-optical device may further include a third storage capacitor comprising the third capacitor electrode, an insulating film facing the third capacitor electrode, and a fourth capacitor electrode opposed to the third capacitor electrode with the insulating films provided therebetween and which may consist of the same film as the semiconductor layer.
In this exemplary embodiment of the present invention, the third storage capacitor is formed by using the third capacitor electrode, which constitutes the second storage capacitor, and the semiconductor layer, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region, even when the pixel pitch is decreased. Also, the fourth capacitor electrode may include the same film as the semiconductor layer, and thus storage capacitors can be constructed by a laminated structure which may include a relatively small number of layers.
(10) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the fourth capacitor electrode is formed to extend from the drain region of the thin film transistor.
In this exemplary embodiment of the present invention, a storage capacitor can be formed by using the drain region of the thin film transistor.
(11) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the fourth capacitor electrode is formed in parallel with the scanning line.
In this exemplary embodiment of the present invention, the third capacitor electrode is formed in parallel with the scanning line, and thus storage capacitors can be enlarged by using the non-aperture region.
(12) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the capacitance of the second storage capacitor is smaller than that of each of the first storage capacitor and the third storage capacitor.
In this exemplary embodiment of the present invention, the second storage capacitor which includes the first capacitor electrode and the third capacitor electrode consisting of the same film as the scanning line is small, and thus capacitors can be formed without affecting error in the operation of the TFT.
(13) In a further exemplary embodiment of the first aspect of the present invention, the electro-optical device may further include a fourth storage capacitor which may include the fourth capacitor electrode consisting of the same film as the semiconductor layer, an insulating film facing the fourth capacitor electrode, and a fifth capacitor electrode arranged opposite to the fourth capacitor electrode with the insulating film provided therebetween, for shielding the semiconductor layer from light.
In this exemplary embodiment of the present invention, the fourth storage capacitor is formed by using the fourth capacitor electrode consisting of the same film as the semiconductor layer, which constitutes the third storage capacitor, and a light-shielding film for shielding the semiconductor layer from light, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region even when the pixel pitch is decreased. Also, the fifth capacitor electrode may include the light-shielding film, and thus storage capacitors can be constructed by a laminated structure which may include a relatively small number of layers. In addition, the light-shielding film is formed to cover the substrate side of at least the channel region, whereby the properties of the thin film transistors can be effectively prevented from being changed by incidence of the returned light from the substrate side on the channel region.
(14) In a further exemplary embodiment of the first aspect of the present invention, in the electro-optical device, the fifth capacitor electrode is electrically connected to the first capacitor electrode in the periphery of the image display region.
In this construction of the present invention, the first capacitor electrode, the fifth capacitor electrode and the third capacitor electrode can be formed with a common potential, thereby permitting the formation of stable storage capacitors.
(15) In a further exemplary embodiment of the first aspect of the present invention, the electro-optical device may further include a fifth storage capacitor which may include the first capacitor electrode, an insulating film laminated on the first capacitor electrode, and a sixth capacitor electrode arranged opposite to the first capacitor electrode with the insulating film provided therebetween to form the pixel electrode.
In this exemplary embodiment of the present invention, the fifth storage capacitor is formed by using the first capacitor electrode, which constitutes the first storage capacitor, and the pixel electrode, and storage capacitors can thus be laminated in the thickness direction of the substrate, thereby permitting the construction of a relatively large storage capacitor in the non-aperture region even when the pixel pitch is decreased. Also, the sixth capacitor electrode may include the pixel electrode, and thus storage capacitors can be constructed by a laminated structure consisting of a relatively small number of layers.
(16) In a further embodiment of the first aspect of the present invention, in the electro-optical device, the fifth storage capacitor is formed over the entire periphery of each pixel.
In this exemplary embodiment of the present invention, a storage capacitor can be formed by using the peripheral region of each pixel.
(17) In a second exemplary aspect of the present invention, an electro-optical device may include a scanning line formed above a substrate, a data line formed above the substrate, a thin film transistor connected to the data line, a pixel electrode connected to the drain region of the thin film transistor, a channel region of the thin film transistor on which the scanning line is arranged with a gage insulating film formed therebetween, and a light-shielding conductive film which constitutes a capacitor electrode of a storage capacitor and which is arranged above the scanning line to cover at least the channel region of the thin film transistor.
In this exemplary embodiment of the present invention, the gate insulating film, the scanning line, and the conductive film are laminated in this order on the channel region formed on the substrate. In this laminated structure, the channel region can be shielded by the light-shielding conductive film. Since the conductive film also functions as the capacitor electrode of the storage capacitor, the storage capacitor can be constructed while sufficiently shielding the channel region by a laminated structure that may include a relatively small number of layers.
(18) In another exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the conductive film covers at least portions of the channel region of the thin film transistor, the junction region between a source region and the channel region of the thin film transistor, the junction region between the drain region and the channel region of the thin film transistor, and source and drain regions adjacent to the respective junction regions.
In this construction of the present invention, at least portions of the channel region, the junction regions between the source-drain regions and the channel region, and the source-drain regions adjacent to the junction regions are covered with the conductive film, and it is thus possible to shield even the lightly-doped region of the thin film transistor having, for example, a LDD structure, from incident light, thereby permitting a further decrease in changes in the properties of the thin film transistors.
(19) In still another embodiment of the second aspect of the present invention, in the electro-optical device, the storage capacitor may include a first conductive film which forms one of capacitor electrodes of the storage capacitor, and a second conductive film which forms the other capacitor electrode thereof, the second conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode.
In this exemplary embodiment of the present invention, the second conductive film which constitutes the other electrode of the storage capacitor also functions as a conductive film for relaying the drain region to the pixel electrode, and it is thus possible to prevent etching penetration during the formation of a contact hole for connecting the pixel electrode and the drain region. Namely, the drain region can be connected to the second conductive film through the contact hole formed on the drain region, and the pixel electrode can be connected to the second conductive film through the contact hole formed on the second conductive film to require the two types of contact holes, whereby the etching depth can easily be controlled because of the shortness of the contact holes to prevent the penetration.
(20) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the second conductive film covers at least portions of the channel region of the thin film transistor, the junction region between a source region and the channel region of the thin film transistor, the junction region between the drain region and the channel region of the thin film transistor, and the source and drain regions adjacent to the respective junction regions.
In this exemplary embodiment of the present invention, the channel region is shielded from light by the scanning line arranged above the channel region, and the first conductive film, and further shielded by the second conductive film arranged between the scanning line and the first conductive film, and thus the channel region can be shielded by triple films to further increase the effect of shielding the channel region.
(21) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the channel region is covered with the data line arranged above the first conductive film with an insulating film provided therebetween.
In this exemplary embodiment, since the channel region is shielded by the scanning line formed thereon, and the first conductive film, and further shielded by the second conductive film and the data line arranged thereon, light-shielding can be performed with quadruple films, thereby further increasing the effect of shielding the channel region. Furthermore, since the data line is arranged above the first conductive film, an increase in temperature due to light absorption by the first conductive firm can be suppressed.
(22) In a further exemplary embodiment of the second aspect of the present invention, the electro-optical device may further include a third conductive film which may consist of the same film as the scanning line, and which is arranged opposite to the second conductive film with an interlayer insulating film provided therebetween.
In this exemplary embodiment of the present invention, a storage capacitor can be formed by overlapping the first and second conductive films, and a storage capacitor can also be formed by arranging the second and third conductive films opposite to each other with the interlayer insulating film provided therebetween, thereby permitting lamination of storage capacitors in the thickness direction of the substrate. Therefore, even when the pixel pitch is decreased, a relatively large storage capacitor can be formed in the non-aperture region. Since the third conductive film consists of the same film as the scanning line, the storage capacitors can be formed by a laminated structure that may include a relatively small number of layers.
(23) In a further exemplary embodiment of the second aspect of the present invention, the electro-optical device may further include a fourth conductive film which may consist of the same film as the drain region, and which is arranged opposite to the third conductive film with the gate insulating film provided therebetween.
In this exemplary embodiment of the present invention, since the fourth conductive film may consist of the same film as the drain region is arranged opposite to the third conductive film with the gate insulating film provided therebetween, thereby permitting further lamination of a storage capacitor in the thickness direction of the substrate. Namely, the storage capacitor formed by overlapping the first and second conductive films, the storage capacitor formed by overlapping the second and third conductive films, and the storage capacitor formed by overlapping the third and fourth conductive films enable lamination of storage capacitors in the thickness direction of the substrate. Therefore, even when the pixel pitch is decreased, a relatively large storage capacitor can be formed in the non-aperture region. Since the fourth conductive film may consist of the same film as the drain region, the storage capacitors can be formed by a laminated structure that may include a relatively small number of layers.
(24) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive film and the third conductive film are electrically connected to each other.
In this exemplary embodiment of the present invention, two storage capacitors can be formed with the second conductive film formed therebetween.
(25) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the second conductive film and the fourth conductive film are electrically connected to each other.
In this exemplary embodiment of the present invention, two storage capacitors can be formed with the third conductive film formed therebetween.
(26) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive film and the third conductive film are electrically connected to each other, and the second conductive film and the fourth conductive film are electrically connected to each other.
In this exemplary embodiment of the present invention, a storage capacitor is formed in a shape in which the first and the third conductive films, and the second and fourth conductive films, which are arranged in the thickness direction, are engaged in a comb form. Therefore, a larger storage capacitor can be constructed in the non-aperture region.
(27) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive film covers the channel region, and the data line is formed on the channel region and the adjacent region thereof so as not to project from the first conductive film in a plan view.
In this exemplary embodiment of the present invention, since the first conductive film covers the channel region, even with oblique incident light, incidence on the channel region can be prevented. Furthermore, the data line is formed on the channel region so as not to project from the first conductive film in a plan view. Since the first conductive film is formed with a larger width and located nearer to the channel region, compared with the data line, incidence of oblique light on the channel region can be prevented, and incidence of reflected light from the data line on the channel region can also be prevented.
(28) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive films may include films having lower reflectance than the data lines.
In this exemplary embodiment of the present invention, since the first conductive film has lower reflectance than that of the data line, when reflected light reaching the channel region due to oblique returned light, or multiple reflected light is reflected by the lower surface of the first conductive film, as in the present invention, incident light can be attenuated by an amount corresponding to a decrease in reflectance to suppress the influence of reflected light, as compared with a case in which light is reflected by the lower surface of the data line. Namely, in the present invention, even when reflected light or multiple reflected light from the lower surface of the first conductive film reaches the channel region, the light intensity is decreased, and thus a change in the properties of the thin film transistors due to the reflected light can be suppressed. The channel region can also be sufficiently shielded from oblique incident light by widening the first conductive film.
(29) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, each of the first conductive film and the data line may include a film containing at least Al.
In this exemplary embodiment of the present invention, incident light can be reflected by the data line and the first conductive film to prevent an increase in the temperature of the electro-optical device and decrease the resistance of the first conductive film.
(30) In a further exemplary embodiment of the second aspect of the present invention, the electro-optical device may further include an underlying light-shielding film which is arranged below the semiconductor layer on the substrate and which is formed to cover at least the channel region as viewed from the opposite side of the substrate, and not to project from the first conductive film in a plan view of the channel region and the adjacent region thereof.
In this exemplary embodiment of the present invention, since the scanning line, the first conductive film and the data line are formed above the channel region, the channel region can be prevented from being irradiated with light from above, and the upper and lower side of the channel region can be shielded because the underlying light-shielding film is further arranged below the channel region. Particularly, the underlying light-shielding film covers the channel region, and can thus prevent the channel region from being irradiated with light (returned light or the like) from the opposite side of the substrate. Furthermore, since the underlying light-shielding film is formed not to project from the first conductive film in a plan view of the channel region and the adjacent region thereof, the channel region can be prevented from being irradiated with incident light reflected by the underlying light-shielding film. In addition, even when there is oblique returned light which is likely to be incident on the channel region due to multiple reflection, the returned light is mostly reflected by the first conductive film having low reflectance and then incident on the channel region, and thus attenuated light is incident on the channel region, whereby the channel region can be prevented from being irradiated with light reflected by the data line having high reflectance. Therefore, even when multiple reflection occurs, the influence on the channel region can be significantly suppressed.
(31) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, at least either of the first conductive film and the underlying light-shielding film is made of a high-melting-point metal.
In this exemplary embodiment of the present invention, the first conductive film and the underlying light-shielding film are made of, for example, a single metal, an alloy, a metal silicide, or the like which contains at least one of opaque high-melting-point metals such as Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pd (lead), and the like. Therefore, the first conductive film and the underlying light-shielding film can be prevented from being broken or melted by high-temperature treatment. For example, in the use of Al (aluminum) generally used as a material for the data line, the data line has a reflectance of over 80%, while the first conductive film made of a high-melting-point metal such as Ti, Cr, W, or the like, has reflectance significantly lower than the reflectance of the data line, whereby the effect of the present invention can be sufficiently exhibited.
(32) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive film has substantially the same size as the second conductive film under the data line.
In this exemplary embodiment, since the first conductive film has substantially the same size as the second conductive film, light can be prevented from entering the channel layer due to internal reflection by the first conductive film, and the area of the first conductive film can be increased to enlarge storage capacitors.
(33) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the first conductive film is extended from the image display region in which the pixel electrode is arranged to the periphery thereof, and connected to a constant potential source in the peripheral region.
In this exemplary embodiment, the first conductive film functions not only as the light-shielding film but also as an electrode of the storage capacitor, which functions as a capacitor line, and thus a storage capacitor which may include the capacitor electrode in which the capacitor line is connected to the constant potential source, can be formed in a laminated structure which may include a relatively small number of layers while sufficiently shielding the channel region. In this case, the capacitor electrode may include the first conductive film, or the capacitor electrode and the other capacitor line (lengthy capacitor line) may include a conductive film different from the first conductive film. In addition, the capacitor electrode can be connected to the constant potential source by effectively using the light-shielding region (the non-aperture region of each pixel). As the constant potential source, a constant potential source for peripheral circuits such as a data line driving circuit, a scanning line driving circuit, can be used, and an exclusive constant potential source need not be provided to exhibit good efficiency.
(34) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the third conductive film may include the capacitor line which is extended from the image display region to the periphery thereof along the scanning line, and connected to the constant potential source in the peripheral region, the first conductive film being connected to the capacitor line.
In this exemplary embodiment, the first conductive film is connected to the capacitor line, and thus the potential of the first conductive film can be kept constant through the capacitor line to prevent the situation in which the properties of the thin film transistor are adversely affected by a change in the potential of the first conductive film, even when the first conductive film is arranged near the channel region. When the first conductive film is used as the capacitor line, the potential of the first conductive film can be fixed by the capacitor line, and thus the first conductive film satisfactorily functions as the capacitor electrode.
(35) In a further exemplary embodiment of the second aspect of the present invention, in the electro-optical device, the underlying light-shielding film may include a light-shielding conductive film, and is connected to the capacitor line for each pixel.
In this exemplary embodiment, the underlying light-shielding film is connected to the capacitor line for each pixel, and thus the potential of the underlying light-shielding film can be kept constant through the capacitor line to prevent the situation in which the properties of the thin film transistors are adversely affected by a change in the potential of the underlying light-shielding films, even when the underlying light-shielding film is arranged near the channel region. When the underlying light-shielding film is used as the capacitor electrode, the potential of the underlying light-shielding film can be fixed by the capacitor line, and thus the underlying light-shielding film satisfactorily functions as the capacitor electrode.
(36) In a third exemplary aspect of the present invention, an electro-optical device may include a thin film transistor, a data line electrically connected to a semiconductor layer of the thin film transistor through a first connection portion, a scanning line overlapped with the semiconductor layer of the thin film transistor, a pixel electrode electrically connected to the semiconductor layer of the thin film transistor through a second connection portion, and a light-shielding film arranged in a region including the data line and the scanning line except the first and second connection portions.
In this exemplary embodiment construction of the present invention, a region with a poor contrast ratio produced in the periphery of the pixel electrode can be shielded by the light-shielding film.
(37) In another exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the light-shielding film overlaps with the edge of the pixel electrode.
In this exemplary embodiment of the present invention, the regions including the data line and the scanning line can be shielded by the light-shielding film to define the non-aperture region.
(38) In still another exemplary embodiment of the third aspect of the present invention, the electro-optical device may further include an underlying light-shielding film provided below the semiconductor layer so that at least a portion of the thin film transistor is held between the light-shielding film and the underlying light-shielding film.
In this exemplary embodiment of the present invention, light incidence on the thin film transistor can be prevented by the light-shielding film and the underlying light-shielding film to suppress a change in the properties of the thin film transistor.
(39) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the underlying light-shielding film is extended along either of the data line and the scanning line.
In this exemplary embodiment of the present invention, the light-shielding performance of the non-pixel aperture regions can be increased only by the substrate having the thin film transistor.
(40) In a still further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, an anti-reflection film is formed on at least the side of the underlying light-shielding film opposite to the thin film transistor side thereof.
In this exemplary embodiment of the present invention, when light is incident on the underlying light-shielding film, the anti-reflection film can prevent reflection of the light to the channel region and the region adjacent to the channel region of the thin film transistor.
(41) In a further exemplary embodiment of the third aspect of the present invention, the electro-optical device may further include a conductive relay film for electrically connecting the semiconductor layer and the pixel electrode.
In this exemplary embodiment of the present invention, etching penetration due to the formation of contact holes for connecting the pixel region and the drain region can be prevented.
(42) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the relay film is arranged in a region including the data line and the scanning line except the first connection portion for connecting the semiconductor layer and the data line.
In this exemplary embodiment of the present invention, the light-shielding performance can be improved while securing the first connection portion for connecting the semiconductor layer and the data line.
(43) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the relay film is arranged in the second connection portion between the semiconductor layer and the pixel electrode, which is avoided from the light-shielding film.
In this exemplary embodiment of the present invention, the second connection portion between the semiconductor layer and the pixel electrode, which cannot be shielded by the light-shielding film, can be shielded to completely shield the region along the scanning line.
(44) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the data line is made of a light-shielding material.
In this exemplary embodiment of the present invention, the light-shielding performance can be further improved.
(45) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, a space is formed between the data line and the pixel electrode, and the light-shielding film is arranged in the space.
In this exemplary embodiment of the present invention, a parasitic capacitor between the data line and the pixel electrode can be decreased, and the space therebetween can be shielded by the light-shielding film to define the pixel aperture region.
(46) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the data line is arranged in the first connection portion between the semiconductor layer and the data line, which is avoided from the light-shielding film.
In this exemplary embodiment of the present invention, the first connection portion between the semiconductor layer and the data line, which cannot be shielded by the light-shielding film, can be shielded to completely shield the region along the data line.
(47) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the non-pixel aperture region may include the light-shielding film and the underlying light-shielding film.
In this exemplary embodiment of the present invention, the light-shielding performance of the thin film transistor can be improved by shortening the distance between the light-shielding film and the underlying light-shielding film.
(48) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the scanning line is extended to substantially the center of the non-pixel aperture region.
In this exemplary embodiment of the present invention, if the capacitor electrode which constitutes the storage capacitor need not be made of the same film as the scanning line, the scanning line can be extended to substantially the center of the non-pixel aperture region to improve the light-shielding performance of the channel region of the thin film transistor and the adjacent region thereof.
(49) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, in the periphery of the thin film transistor including the channel region, the relay film is located in a region inward of the light-shielding film, and the underlying light-shielding film is located in a region inward of the relay film.
In this exemplary embodiment of the present invention, light incident from the light-shielding film side is not incident directly on the underlying light-shielding film so that incidence of light reflected by the underlying light-shielding film on the thin film transistor can be decreased.
(50) In a further exemplary embodiment of the third aspect of the present invention, in the electro-optical device, the semiconductor layer is located in a region inward of the data line.
In this exemplary embodiment of the present invention, the semiconductor layer is formed in a region inward of the data line, and thus incidence of light on the semiconductor layer can be decreased. Therefore, the semiconductor layer is not extended along the scanning line, whereby the pitch of the non-pixel aperture regions can be decreased, and the light-shielding performance can be improved.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a drawing of equivalent circuits including various elements, wiring, etc. provided on a plurality of pixels which are arranged in a matrix and which constitute an image display region of an electro-optical device in accordance with a first exemplary embodiment of the present invention;
FIG. 2 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with the first embodiment;
FIG. 3 is a sectional view taken along line III-III′ in FIG. 2;
FIG. 4 is a drawing of an equivalent circuit of each of pixels which constitute an electro-optical device in accordance with an exemplary embodiment of the present invention;
FIG. 5 is a plan view showing the light-shielding conductive films, and the relay films shown in FIG. 2;
FIG. 6 is a plan view showing the relay films and the capacitor electrodes shown in FIG. 2;
FIG. 7 is a plan view showing the capacitor electrodes and the semiconductor layers shown in FIG. 2;
FIG. 8 is a plan view showing the semiconductor layers and the underlying light-shielding films shown in FIG. 2;
FIG. 9 is a plan view showing the light-shielding conductive films and the pixel electrodes shown in FIG. 2;
FIG. 10 is a plan view showing the underlying light-shielding films, the light-shielding conductive films, the relay films and the data lines shown in FIG. 2;
FIG. 11(A) is a sectional view taken along line XI-XI′ in FIG. 11(B) is a sectional view of a related structure;
FIG. 12 is a schematic drawing showing the polarities of image signals supplied to a plurality of pixel electrodes which are arranged in a matrix and which constitute an image display region of an electro-optical device in accordance with a second exemplary embodiment of the present invention;
FIG. 13 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with the second embodiment;
FIG. 14 is a sectional view taken along line XIV-XIV′ in FIG. 13;
FIG. 15 is a sectional view taken along line XV-XV′ in FIG. 13;
FIG. 16 is a sectional view taken along line XVI-XVI′ in FIG. 13;
FIG. 17 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with a third exemplary embodiment;
FIG. 18 is a sectional view taken along line XVIII-XVIII′ in FIG. 17;
FIG. 19 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed in the electro-optical device in accordance with a fourth exemplary embodiment;
FIG. 20 is a sectional view taken along line XX-XX′ in FIG. 19;
FIG. 21 is a plan view the TFT array substrate and the components formed thereon in a liquid crystal device in accordance with an exemplary embodiment, as viewed from the counter substrate side;
FIG. 22 is a sectional view taken along line XXII-XXII′ in FIG. 21.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
Exemplary embodiments of the present invention will be described below with reference to the drawings.
(First Exemplary Embodiment)
The construction of a liquid crystal device as an example of an electro-optical device of the present invention will be described with reference to FIGS. 1 to 11(B). FIG. 1 is a drawing showing equivalent circuits which include various elements, wiring, etc. of a plurality of pixels which constitute an image display region of the liquid crystal device and which are formed in a matrix, FIG. 2 is a plan view of a plurality of adjacent pixel groups of a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed, and FIG. 3 is a sectional view taken along line III-III′ in FIG. 2. In FIG. 3, layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing.
In FIG. 1, in a plurality of pixels which constitute the image display region of the liquid crystal device of this embodiment and which are formed in a matrix, pixel electrodes 9 a and TFTs 30 for controlling the pixel electrodes 9 a are formed, and data lines 6 a to which image signals are supplied are electrically connected to the sources of the TFTs 30. Image signals S1, S2, . . . , Sn to be written on the data lines 6 a may be supplied in this order in line sequence, or supplied to each group of the adjacent data lines 6 a. Furthermore, scanning lines 3 a are electrically connected to the gates of the TFTs 30 so that scanning signals G1, G2, . . . Gm are applied to the scanning lines 3 a in this order in line sequence with predetermined timing. The pixel electrodes 9 a are electrically connected to the drains of the TFTs 30 so that the TFTs 30 respectively serving as switching elements arc switched off for a predetermined time to write the image signals S1, S2, . . . , Sn supplied from the data lines 6 a with predetermined timing. The image signals S1, S2, . . . , Sn at the predetermined level written into a liquid crystal through the pixel electrodes 9 a are maintained between the pixel electrodes 9 a and a counter electrode (described below) formed on a counter substrate (described below) for the predetermined time. The liquid crystal modulates light due to a change in the molecular orientation and order according to the level of the applied voltage to enable gray scale display. In a normally white mode, the quantity of transmitted light of incident light increases according to the applied voltage, while in a normally black mode, the quantity of transmitted light of incident light increases according to the applied voltage to emit light from the liquid crystal device as a whole with a contrast ratio corresponding to the image signals. In order to prevent a leakage of the maintained image signals, storage capacitors 70 are added in parallel to the liquid crystal capacitor formed between the pixel electrodes 9 a and the counter electrode. Each of the storage capacitors 70 is formed between one of capacitor electrodes electrically connected to each of the pixel electrodes 9 a and the other capacitor electrode electrically connected to a corresponding capacitor line 300 to which a constant potential is supplied, through a dielectric film. For example, each of the storage capacitors 70 functions to maintain the voltage of the corresponding pixel electrode 9 a for a time three orders of magnitude longer than the time of application of a source voltage. This can further improve the holding property to realize a bright crystal device with a high contrast ratio.
In FIG. 2, a plurality of the transparent pixel electrodes 9 a (the pixel electrode ends 9 a′ shown by dotted lines) are provided in a matrix on the TFT array substrate of the liquid crystal device, and the data lines 6 a and the scanning lines 3 a are provided along the longitudinal and lateral boundaries between the pixel electrodes 9 a. The scanning lines 3 a are arranged opposite to the channel regions 1 a′ (the regions shown by slanted lines in the drawing) of semiconductor layers 1 a, and function as gate electrodes. In this embodiment, TFT 30 is provided at each of the intersections of the scanning lines 3 a and the data lines 6 a, in which each of the scanning lines 3 a is partially opposed as the gate electrode to the corresponding channel region 1 a′. Each of the pixel electrodes 9 a is electrically connected to the drain of the corresponding semiconductor layer 1 a, which will be described below, by relaying a relay film 80 a serving as an intermediate conductive film through contact holes 8 a and 8 b. The data lines 6 a are electrically connected to the source regions of the semiconductor layers 1 a consisting of a polysilicon film or the like, which will be described below, through contact holes 5.
Also, capacitor electrodes 3 b (third capacitor electrodes) consisting of the same film as the scanning lines 3 a may be provided so as to overlap with at least portions of capacitor electrodes 1 f (fourth capacitor electrodes), which are extended from the semiconductor layers 1 a, through gate insulating films described below. This permits the formation of at least portions of the storage capacitors 70 shown in FIG. 1.
In each of the regions shown by bold lines in FIG. 2, an underlying light-shielding film 11 a is provided along the corresponding scanning line 3 a so as to pass through the portion below the TFTs 30. More specifically, the underlying light-shielding films 11 a are provided to cover at least the TFT channel regions 1 a′ and the junction regions between the channel regions 1 a′ and the source and drain regions, as viewed from the TFT array substrate side. Also, the underlying light-shielding films 11 a are preferably extended along the direction of the scanning lines 3 a to the periphery of the image display region in which the pixel electrodes 9 a are formed in a matrix to be connected to a constant potential source in the periphery region. In this way, by fixing the potential of the underlying light-shielding films 11 a to the constant potential, operational errors of the TFTs 30 can be prevented. As the constant potential source, a constant potential source such as a negative power source, a positive power source supplied to peripheral circuits for driving the liquid crystal device, for example, a scanning line driving circuit, a data line driving circuit, which will be described below, a ground power source, a constant potential source supplied to the counter electrode, or the like can be used. The potential level is preferably the off level of scanning signals supplied to the scanning lines 3 a. As a result, substantially no parasitic capacitance occurs between the underlying light-shielding films 11 a and the scanning lines 3 a, thereby causing substantially no delay in the scanning signals supplied to the scanning lines 3 a.
Particularly, in this embodiment, a light-shielding conductive film (first capacitor electrode) 90 a is formed in each of the regions shown by slanted lines in FIG. 2. The light-shielding conductive films 90 a are formed between the scanning lines 3 a and the data lines 6 a so that in a plan view, the light-shielding conductive films 90 a can be overlapped with the regions where wiring such as the data lines 6 a and the scanning lines 3 a, the TFTs 30 and the storage capacitors are formed, except the regions of the contact holes 5 and the contact holes 8 b, thereby permitting the realization of light shielding on the TFT array substrate. Also, the light-shielding conductive films 90 a can be extended to the periphery of the image display region along the scanning lines 3 a to be connected to a constant potential source in the peripheral region. As a result, the light-shielding conductive films 90 a can function as the capacitor lines 300 shown in FIG. 1. Also, the light-shielding conductive films 90 a can be connected to the capacitor electrodes 3 b consisting of the same film as the scanning lines 3 a through contact holes 95 so that the storage capacitors 70 can easily be formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f by supplying a constant potential. As a constant potential source, the constant potential source such as the negative power source, the positive power source supplied to the peripheral circuits for driving the liquid crystal device, for example, the scanning line driving circuit, the data line driving circuit, which will be described below, the ground power source, the constant potential source supplied to the counter electrode, or the like can be used.
As shown in a sectional view of FIG. 3, the liquid crystal device of this embodiment may include a transparent TFT array substrate 10 which constitutes an example of substrates, and a transparent counter substrate 20 arranged to opposite to the TFT array substrate 10. For example, the TFT array substrate 10 may include a quartz substrate, a glass substrate, or a silicon substrate, and the counter substrate 20 may include a glass substrate or a quartz substrate. The TFT array substrate 10 may include the pixel electrodes 9 a provided thereon and including a transparent conductive film such as an ITO film. In the use of a TN (Twisted Nematic) liquid crystal or the like for a liquid crystal layer 50, an alignment film 16 subjected to predetermined orientation by rubbing or the like is provided on the surfaces of the pixel electrodes 9 a.
On the other hand, a counter electrode 21 consisting of a transparent conductive film such as a ITO film is provided over the entire surface of the counter substrate 20, and an alignment film 22 subjected to predetermined orientation by rubbing or the like is provided on the surface of the counter electrode 21.
Furthermore, the underlying light-shielding films 11 a are respectively provided at positions opposite to the TFTs 30 between the TFT array substrate 10 and the TFTs 30. The underlying light-shielding films 11 a are formed opposite to at least the channel regions 1 a′ of the switching TFTs 30, and the junction regions between the channel regions 1 a′ and the source and drain regions, whereby preventing irradiation of the channel regions 1 a′ and the adjacent regions thereof with reflected light from the TFT array substrate 10 side. Therefore, the properties of the TFTs 30 are not changed by the occurrence of a leakage current due to light. The underlying light-shielding conductive films 11 a are preferably made of a single metal, an alloy, a metal silicide, or the like, which contains at least one of opaque high-melting-point metals such as Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pb (lead). Alternatively, anti-reflection films of polysilicon or the like may be formed on the surfaces of the underlying light-shielding films 11 a in order to absorb light even when incident light directly enters the TFTs 30. With weak reflected light from the TFT array substrate 10 side, a polysilicon film may be used for the underlying light-shielding films 11 a. By forming the underlying light-shielding films 11 a using such a material, for example, the underlying light-shielding films 11 a can be prevented from being broken or melted by high-temperature treatment for forming gate insulating films 2. Although, in this embodiment, the underlying light-shielding films 11 a are formed in strips along the scanning lines 3 a below the scanning lines 3 a, of course, the underlying light-shielding films 11 a may be formed in strips along the data lines 6 a below the data lines 6 a, or formed in a lattice form below the scanning lines 3 a and the data lines 6 a. By forming the underlying light-shielding films 11 a in strips, relief of stress due to the underlying light-shielding films 11 a can be realized, while by forming then in a lattice form, the high-shielding performance can be improved and the resistance of the underlying light-shielding films 11 a can be further decreased.
Furthermore, an underlying insulating film 12 is provided between the underlying light-shielding films 11 a and the TFTs 30. The underlying insulating film 12 is provided for electrically insulating the semiconductor layers 1 a which constitute the TFTs 30 from the underlying light-shielding films 11 a. Furthermore, the underlying insulating film 12 is formed over the entire surface of the TFT array substrate 10 to have the function as an underlying film for the TFTs 30. Namely, the underlying insulating film 12 has the function of preventing roughening of the surface of the TFT array substrate 10 during polishing, and a change in the properties of the TFTs 30 due to stains remaining after cleaning. The underlying insulating film 12 may consist of, for example, a highly insulating glass film of NSG (nondoped silicate glass), PSG (phosphosilicate glass), BSG (boron silicate glass), BPSG (boron phosphosilicate glass), or the like, a silicon oxide film, a silicon nitride film. The underlying insulating film 12 can also prevent the situation that the TFTs 30 are contaminated by the underlying light-shielding films 11 a.
In this embodiment, furthermore, each of the TFTs 30 formed on the underlying insulating film 12 has an LDD (Lightly Doped Drain) structure in which the semiconductor which layer 1 a may consist of, for example, a polysilicon film, may consist of a lightly-doped source region 1 b and a lightly-doped drain region 1 c with the channel region 1 a′ in which a channel is formed by an electric field supplied from the corresponding scanning line 3 a, heavily-doped source and drain regions 1 d and 1 e being connected to the lightly-doped source and drain regions 1 b and 1 c, respectively. In this way, by forming the LDD structure TFTs 30, a leakage current of the TFTs 30 in an off state can be significantly decreased to improve the holding performance. Each of the TFTs 30 may have an offset structure in which the lightly-doped source region 1 b and the lightly-doped drain region 1 c are not doped with impurities, or a self alignment TFT structure in which a heavily-doped of impurity is implanted by using the gate electrode which may include a part of the corresponding scanning line 3 a as a mask to form the heavily-doped source region 1 d and the heavily-doped drain region 1 e in a self alignment manner.
The gate insulation thin films 2 of 100 nm or less are formed on the semiconductor layers 1 a. The gate insulating films 2 can be formed by oxidizing a polysilicon film at a high temperature of 1000° C. or more to form a film having high density and insulation. When high-temperature treatment cannot be carried out, the gate insulating films 2 may be formed by CVD (Chemical Vapor Deposition), or the like. The scanning lines 3 a consisting of a low-resistance polysilicon film in which, for example, P (phosphorus) is implanted, are arranged on the gate insulating films 2 so that the portions of the scanning lines 3 a overlapped with the semiconductor layers 1 a function as the gate electrodes.
Furthermore, an interlayer insulating film 81 is deposited on the gate insulating films 2 and the scanning lines 3 a formed on the semiconductor layers 1 a by CVD or the like, and the contact holes 8 a are formed in the gate insulating films 2 and the interlayer insulating film 81 at the predetermined positions of the heavily-doped drain regions 1 e. The heavily-doped drain regions 1 e are electrically connected to the conductive relay films 80 a through the contact holes 8 a. Furthermore, interlayer insulating films 91, 4 and 7 are laminated in turn on the relay films 80 a, and the contact holes 8 b are formed in these interlayer insulating films at positions of the relay films 80 a (second capacitor electrodes). The relay films 80 a are electrically connected to the pixel electrodes 9 a through the contact holes 8 b. Therefore, the relay films 80 a function as intermediate conductive films for electrically connecting the semiconductor layers 1 a and the pixel electrodes 9 a. By forming the relay films 80 a, long contact holes need not be formed from the pixel electrodes 9 a to the semiconductor layers 1 a, and thus penetration in the thin semiconductor layers 1 a having a thickness of, for example, about 50 nm, can be prevented. The formation of the separate contact holes has the advantage that the diameter of either of the contact holes 8 a and 8 b can be decreased. Therefore, the regions of the contact holes 8 a and 8 b can be decreased to increase the pixel aperture ratio and realize high definition. Like the underlying light-shielding films 11 a, the relay films 80 a are formed by using a material such as a single metal, an alloy, a metal silicide, which contains at least one of opaque high-melting-point metals such as Ti, Cr, W, Ta, Mo, Pb, thereby permitting the relay films 80 a to function as light-shielding films. Furthermore, even when the relay films 80 a are formed to a thickness of about 50 nm, no penetration in the relay films 80 a occurs during the formation of the contact holes 8 b because of a high etching selection ratio. When the interlayer insulating film 81 for insulating the scanning lines 3 a from the relay films 80 a is formed to a thickness of, for example, 500 nm or more, which has no influence on the switching operation of the TFTs 30, the relay films 80 a can be provided to overlap with the TFTs 30 and the scanning lines 3 a in a plan view. Therefore, light shielding can be realized below the data lines 6 a near the semiconductor layers 1 a which constitute the TFTs 30, thereby preventing the channel regions 1 a′ and the lightly-doped source regions 1 b and the lightly-doped drain regions 1 c, which serve as the junction regions, from being irradiated directly with incident light and stray light reflected by the data lines 6 a and the like. As a result, a leakage current of the TFTs 30 in an off state can be significantly decreased to further increase the holding performance.
In this embodiment, as shown in FIG. 3, light-shielding conductive films 90 a are formed on the relay films 80 a with the interlayer insulating film 91 provided therebetween. As described above, the light-shielding conductive films 90 a can shield the non-aperture regions except the contact holes 5 and 8 b. Since the light-shielding conductive films 90 a can also function as the capacitor lines 300 shown in FIG. 1, at least portions of the storage capacitors 70 can be formed by using the interlayer insulating film 91 as a dielectric film between the conductive films 90 a and the relay films 80 a. Namely, the relay films 80 a and the light-shielding conductive films 90 a function as electrodes for forming the storage capacitors 70. Light shielding can also be realized near the semiconductor layers 1 a, which constitute the TFTs 30, by two layers including the relay films 80 a and the light-shielding conductive films 90 a. Therefore, a leakage current of the TFTs 30 in an off state can be further decreased to cause an advantage for a liquid crystal device such as a projection projector used under a strong light source. Like the underlying light-shielding films 11 a or the relay films 80 a, the light-shielding conductive films 90 a are formed by using a material such as such as a single metal, an alloy, a metal silicide, which contains at least one of opaque high-melting-point metals such as Ti, Cr, W, Ta, Mo, Pb, thereby permitting the realization of wiring having high light shielding performance and low resistance. When performing high-temperature treatment at 400° C. or more, for example, activation heat treatment is terminated before the light-shielding conductive films 90 a are formed, the light-shielding conductive films 90 a can be formed by using a single metal, an alloy, a metal silicide, or the like containing low-resistance Al (aluminum). By forming the light-shielding conductive films 90 a serving as the capacitor lines 300 using Al which is the same material as the data lines 6 a, the resistance of the capacitor lines 300 can be made smaller than a conventional polysilicon film by two or three orders of magnitude. As a result, the crosstalk in the direction of the scanning lines 3 a, which is due to the high time constant of the capacitor lines 300, can be significantly decreased.
The light-shielding conductive films 90 a may be electrically connected to the capacitor electrodes 3 b consisting of the same film as the scanning lines 3 a through the contact holes 95 for the respective pixel electrodes 9 a. As a result, the capacitor electrodes 3 b can be fixed at the same constant potential as the light-shielding conductive films 90 a. Therefore, at least portions of the storage capacitors 70 can be formed between the capacitor electrodes 3 b and the relay films 80 a electrically connected to the heavily-doped drain regions 1 e of the semiconductor layers 1 a by using the interlayer insulating film 81 as a dielectric film. Furthermore, at least portions of the storage capacitors 70 can also be formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f extended from the heavily-doped drain regions 1 e of the semiconductor layers 1 a by using the gate insulating films 2 as dielectric films. The contact holes 95 are formed below the data lines 6 a so that the semiconductor layers 1 a connected to the pixel electrodes 9 a adjacent along the data lines 6 a are preferably electrically connected to the data lines 6 a near the contact holes 5. By using this construction, large regions for forming the storage capacitors 70 can be secured below the data lines 6 a.
FIG. 4 is a drawing showing an equivalent circuit of each of the pixels which constitute the liquid crystal device of this embodiment. As shown in FIG. 4, the heavily-doped drain region 1 e of the semiconductor layer 1 a is electrically connected to the relay film 80 a and the pixel electrode 9 a, while the light-shielding conductive film 90 a is electrically connected to the capacitor electrode 3 b. The light-shielding conductive film 90 a is extended from the image display region to the periphery thereof to be connected to the constant potential source in the peripheral region. The underlying light-shielding film 11 a may be electrically connected to the light-shielding conductive film 90 a. These conductive films are combined to form the storage capacitors 70 having an ideal stacked structure. Namely, in this embodiment, the capacitor electrode 1 f, the relay film 80 a and the pixel electrode 9 a can be formed between the respective conductive film layers of the light-shielding conductive film 90 a fixed at the constant potential, the capacitor electrode 3 b and the underlying light-shielding film 11 a through dielectric films.
Specifically, in a plane view of the adjacent pixel groups in FIG. 2, the regions where the storage capacitors are formed are shown in FIGS. 5 to 9. In FIGS. 2 and 5 to 9, the reduction scales are the same.
FIG. 5 shows first storage capacitors C1 formed at positions between the layer of the scanning lines 3 a and the layer of the data lines 6 a, and between the light-shielding conductive films 90 a and the relay films 80 a. The interlayer insulating film 91 is used as a dielectric film. The crosshatched regions are actual regions where the first storage capacitors C1 are actually formed, and the first storage capacitors C1 can be for formed in the significant portions of the non-aperture regions except the contact holes 5, 95 and 8 b. When the capacitor electrodes 3 b are not provided, the contact holes 95 for electrically connecting the capacitor electrodes 3 b to the light-shielding conductive films 90 a need not be formed, thereby permitting the formation of the first storage capacitors C1 in the regions of the contact holes 95. In this embodiment, the first storage capacitors C1 can be formed above the channel regions 1 a′ of the TFTs 30, which is impossible in a conventional device, thereby causing an advantage for improving the pixel aperture ratio and definition of a transmissive liquid crystal device. The interlayer insulating film 91 can be formed by using a film having high insulation and high dielectric constant, such as an oxide film, a nitride film. Where the relay films 80 a consist of a polysilicon film, and the light-shielding conductive films 90 a consist of a multilayer structure including a polysilicon film as a lower layer, and a light-shielding film containing a high-melting-point metal as an upper layer, the interlayer insulating film 91 can be formed by a continuous step using a polysilicon film, thereby permitting the formation of an insulating film having high density and less defect. Therefore, the defects of the device are decreased, and the interlayer insulating film 91 a having a thickness of 100 nm or less can be formed to further enlarge the first storage capacitors C1.
FIG. 6 shows second storage capacitors C2 formed between the relay films 80 a and the capacitor electrodes 3 b. The interlayer insulating film 81 is used as a dielectric film. The crosshatched regions are regions where the second storage capacitors C2 are actually formed. The capacitor electrodes 3 b are parted in the regions of the contact holes 8 a for electrically connecting the semiconductor layers 1 a and the relay films 80 a in the respective pixels, and are electrically connected to the upper light-shielding conductive films 90 a through the contact holes 95. As shown in FIG. 6, the capacitor electrodes 3 b are formed in a T shape so that the second storage capacitors C2 can be efficiently formed. As the interlayer insulating film 81, a film having high insulation and a high dielectric constant, such as an oxide film, a nitride film can be formed. However, since the capacitor electrodes 3 b consist of the same film as the scanning lines 3 a, the regions where the second storage capacitors C2 can be formed become smaller than the regions where the first storage capacitors C1 are formed, as shown in FIG. 5. In addition, when the channel regions 1 a′ and the adjacent regions thereof are shielded from light by the relay films 80 a, the thickness of the interlayer insulating film 81 must be 500 nm or more in order to prevent an operation error of the TFTs 30, and thus the second storage capacitors C2 cannot be so much enlarged as the fist storage capacitors C1 can be enlarged.
FIG. 7 shows third storage capacitors C3 formed between the capacitor electrodes 3 b and the capacitor electrodes 1 f. The gate insulating films 2 are used as dielectric films. The crosshatched regions are regions where the third storage capacitors C3 are actually formed. Since the gate insulating films 2 are formed by oxidation at a high temperature of 1000° C. or more, as described above, a film having high density and insulation can be obtained. Therefore, the regions where the third storage capacitors C3 can be formed are substantially the same as the regions where the second storage capacitors C2 shown in FIG. 6 are formed, but the regions of the third storage capacitors C3 can be made larger than the regions of the second storage capacitors C2. The third storage capacitors C3 can also be formed below the regions of the contact holes 95 for electrically connecting the capacitor electrodes 3 b and the upper light-shielding conductive films 90 a.
Furthermore, as shown in FIG. 8, fourth storage capacitors C4 can be formed between the capacitor electrodes 1 f and the underlying light-shielding films 11 a. The underlying insulating film 12 is used as a dielectric film. The crosshatched regions are regions where the fourth storage capacitors C4 are actually formed. When the underlying insulating film 12 is formed to a thickness of 500 nm or less, the distance between the channel regions 1 a′ and the underlying light-shielding films 11 a is decreased to cause an operation error of the TFTs 30 according to the potential of the underlying light-shielding films 11 a. Therefore, the underlying insulating film 12 may be selectively partially thinned in the regions where the capacitor electrodes 1 f overlap with the underlying light-shielding films 11 a in a plan view to enlarge the fourth storage capacitors C4. Namely, the portions of the underlying insulating film 12 other than the portions opposite to the channel regions 1 a′ can be thinned to enlarge the fourth storage capacitors C4.
Furthermore, as shown in FIG. 9, fifth storage capacitors C5 can be formed between the pixel electrodes 9 a and the light-shielding conductive films 90 a. The interlayer insulating films 4 and 7 are used as dielectric films. The crosshatched regions are regions where the fifth storage capacitors C5 are actually formed. Each of the interlayer insulating films 4 and 7 consists of a highly insulating glass film of, for example, NSG, PSG, BSG, BPSG, a silicon oxide film, a silicon nitride film, or the like. However, since the data lines 6 a are formed on the interlayer insulating film 4, the interlayer insulating film 7 must be thickly formed because a display image deteriorates due to the parasitic capacitor produced between the pixel electrodes 9 a and the data lines 6 a, and thus the fifth storage capacitors C5 cannot be so much enlarged as the first storage capacitors C1 can be enlarged.
In this way, in the liquid crystal device of this embodiment, by laminating the capacitor electrodes for forming the storage capacitors 70 through the dielectric films, the stacked type storage capacitors 70 each consisting of the five layers including the first storage capacitor C1 to the fifth storage capacitor C5 can be formed. As a result, even with the regions, where the storage capacitors are formed, are narrow, the great storage capacitors 70 can be effectively formed. In the liquid crystal device of this embodiment, at least the first storage capacitors C1 maybe formed. Even when, for example, the storage capacitor electrodes 3 b cannot be formed because the aperture ratio and definition of the pixels are further increased, the structure of this embodiment permits the formation of the sufficient storage capacitors 70 by thinning the interlayer insulating film 91 as the dielectric film of the storage capacitors C1. Therefore, in this embodiment, any desired storage capacitor can be advantageously selected from the first storage capacitors C1 to the fifth storage capacitors C5 and used according to the specifications for the purpose of an electro-optical device.
Again refer to FIG. 3, the data lines 6 a are formed on the interlayer insulating film 4 formed above the light-shielding conductive films 90 a. The data lines 6 a are also electrically connected to the heavily-doped source regions 1 d of the semiconductor layers 1 a through the contact holes 5 which are formed at the predetermined positions of the gate insulating films 2, the interlayer insulating film 81, the interlayer insulating film 91, and the interlayer insulating film 4. The data lines 6 a consist of an Al metal film or metal silicide, or the like having low resistance and high light-shielding property because image signals are supplied thereto.
In the liquid crystal device of this embodiment, the light-shielding regions as the non-aperture regions can be defined by the data lines 6 a and the light-shielding conductive films 90 a. More specifically, as shown in FIG. 10, the light-shielding conductive films 90 a are formed to overlap with the pixel electrodes 9 a so as to shield the most of the regions including the channel regions 1 a′. Also, the most of the regions along the data lines 6 a can be shielded by the light-shielding conductive films 90 a, and unlike in a conventional display device, thus the light-shielding regions need not be defined only by the data lines 6 a. Therefore, the data lines 6 a and the pixel electrodes 9 a can be formed so as not to overlap with each other as much as possible through the interlayer insulating film 7. Therefore, the parasitic capacitors between the data lines 6 a and the pixel electrodes 9 a can be significantly decreased, thereby preventing the occurrence of deterioration in display image quality due to a change in potential of the pixel electrodes 9 a. However, since the light-shielding conductive films 90 a are formed below the data lines 6 a, the regions where the contact holes 5 are formed for electrically connecting the data lines 6 a and the semiconductor layers 1 a cannot be shielded. Therefore, in the regions where the contact holes 5 are formed, the wide data lines 6 a may be formed so as to partially overlap with the pixel electrodes 9 a. When the regions where the contact holes 5 are formed is near the channel regions 1 a′, the vicinities of the channel regions 1 a′ cannot be sufficiently shielded by the light-shielding conductive films 90 a. In this case, the regions where the contact holes 5 are formed may be moved along the data lines 6 a in the direction away from the channel regions 1 a′ without any problem. This embodiment has the advantage that even when the regions where the contact holes 5 are formed are moved, the first storage capacitors C1 formed between the relay films 80 a and the light-shielding conductive films 90 a are not changed. The light-shielding conductive films 90 a cannot be provided in the regions where the contact holes 8 b are formed for electrically connecting the relay films 80 a and the pixel electrodes 9 a, and thus these regions may be shielded by the relay films 80 a. If the relay films 80 a consist of a light-transmissive film such as a polysilicon film, the regions may be shielded by the underlying light-shielding films 11 a. In this case, the regions where the contact holes 8 b are formed are preferably separated from the channel regions 1 a′. As shown in FIG. 10, it is advantageous to form the contact holes 8 b between the adjacent data lines 6 a so that incident light does not reach the channel regions 1 a′ even when light is incident on the underlying light-shielding films 11 a. Since the pixels can be formed in line symmetry with respect to the data lines 6 a, for example, a projector including a combination of liquid crystal devices including TN liquid crystals having different twisting directions causes no deterioration in display image quality such as color irregularity.
In this way, in this embodiment, the light-shielding regions can be defined on the TFT array substrate 10, and thus light-shielding films need not be provided on the counter substrate 20, as shown in FIG. 3. Therefore, in mechanically combining the TFT array substrate 10 and the counter substrate 20, even when alignment is shifted, the regions (aperture regions) where light is transmitted are not changed because no light-shielding film is provided on the counter substrate 20. Therefore, a stable aperture ratio can be obtained to significantly decrease defects in the device.
The liquid crystal device of this embodiment can also use a structure stronger against an angle of incident light than a conventional device. This will be described with reference to FIGS. 11(A)-(B). FIG. 11(A) is a sectional view taken along line XI-XI′ in FIG. 2, and FIG. 11(B) shows a conventional structure. FIGS. 11(A) and (B) show the structures on same reduction scale.
In general, when light is incident on the vicinities of the channel regions 1 a′ of the semiconductor layers 1 a, in an off state of the TFTs 30, the ability to hold the charges written on the pixel electrodes 9 a are decreased by the occurrence of leakage currents due to photo excitation. Therefore, this embodiment uses a structure in which the light-shielding conductive films 90 a are provided against incident light L1, and the underlying light-shielding films 11 a are provided against reflected light L2 so as to prevent light irradiation of the semiconductor layers 1 a, as shown in FIG. 11(A). Since the quality of reflected light L2 is one hundredth of the quality of incident light L1, in the channel regions and the vicinities thereof, the width W1 of each of the light-shielding conductive films 90 a for shielding incident light L1 is larger than the width W2 of each of the underlying light-shielding films 11 a. Namely, in the channel regions and the vicinities thereof, the underlying light-shielding films 11 a are formed so as not to project from the light-shielding conductive films 90 a. Furthermore, in the channel regions and the vicinities thereof, the width W3 of each of the semiconductor layers 1 a is smaller than the width W2 of each of the underlying light-shielding films 11 a. Namely, the channel regions and the vicinities thereof are covered with the underlying light-shielding films 11 a, as viewed from the TFT array substrate side. By using this structure, even when incident light L1 is incident at an angle, the probability that the incident light reaches the semiconductor layers 1 a can be decreased. In this embodiment, since the light-shielding conductive films 90 a can be formed between the data lines 6 a and the semiconductor layers 1 a, light shielding can be achieved nearer to the channel regions than the conventional example shown in FIG. 11(B) in which the channel regions are shielded by the data lines 6 a. In this embodiment and the conventional example, consideration is given to a margin for the incidence angle of the incident light L1. Since the semiconductor layers 1 a has a width W3 of, for example, as small as 1 μm, the incident light L1 is not likely to be incident directly on the semiconductor layers 1 a. Therefore, it is assumed that light incident on the underlying light-shielding films 11 a provided below the semiconductor layers 1 a is reflected and incident on the semiconductor layers 1 a. It is also assumed that the underlying light-shielding films 11 a of this embodiment shown in FIG. 11(A) and the conventional example shown in FIG. 11(1B) have the same width W2. It is further assumed that the width W1 of each of the light-shielding films 90 a for shielding the incident light L1 in this embodiment is the same as the width W1 of each of the data lines 6 a in the conventional example. In this embodiment, the interlayer distance between the underlying light-shielding films 11 a and the light-shielding conductive films 90 a is D1, while in the conventional example, the interlayer distance between the underlying light-shielding films 11 a and the data lines 6 a is D2. Summing that the interlayer distance between the underlying light-shielding films 11 a and the data lines 6 a in this embodiment is D2, the relation D1>≦D2 is obtained. Therefore, when the incident light L1 is incident at the same angle, the margin for the angle of the incident light L1 in this embodiment is larger than that in the conventional example by an amount corresponding to a decrease in the interlayer distance to the underlying light-shielding films 11 a. Namely, assuming that the margin angle of the incident light L1 in this embodiment is R1, and the margin angle of the incident light L1 in the conventional example is R2, the relation R1>R2 is obtained. As a result, the margin for the incidence angle of the incident light in the liquid crystal device of this embodiment is larger than the conventional example, and thus the liquid crystal device of this embodiment can advantageously comply with an increase in the incidence angle with miniaturization of an optical system. In this embodiment, light-shielding films can also be formed on the sides of the semiconductor layers 1 a through insulating films to further improve correspondence to the incidence angle.
In the liquid crystal device of this embodiment, unlike in the conventional example, light shielding need not be attained by the data lines 6 a, and thus the width W4 of each of the data lines 6 a in the channel region and the vicinities thereof can be made smaller than the width W1 of each of the light-shielding conductive films 90 a. Namely, the relation W>W4 is obtained, and the data lines 6 a are thus formed so as not to project from the light-shielding conductive films 90 a in the channel region and the vicinities thereof. Therefore, it is possible to prevent the semiconductor layers 1 a from being irradiated with stray light reflected by the data lines 6 a. Particularly, since the light-shielding conductive films 90 a can be formed by using a film containing a high-melting-point metal having lower reflectance than Al which forms the data lines 6 a, stray light due to the data lines 6 a can also be absorbed by the light-shielding conductive films 90 a.
Furthermore, in the liquid crystal device of this embodiment, the relay films 80 a can be formed below the light-shielding conductive films 90 a, the vicinities of the semiconductor layers 1 a can be shielded by the relay films 80 a to improve the light-shielding performance. In this case, when the width of each of the relay films 80 a is substantially the same as the width W1 of each of the light-shielding conductive films 90 a, the light-shielding performance can be further improved. If the reflected light L2 is incident from the TFT array substrate 10 side, in this embodiment, light is absorbed by the relay films 80 a consisting of polysilicon films or low-resistance films containing a high-melting-point metal, while in the conventional example, stray light reflected below the data lines 6 a is likely to be incident on the semiconductor layers 1 a because the data lines 6 a having high reflectance are also used as light-shielding films. As a result, stray light due to internal reflection can be significantly decreased, thereby eliminating the need to take account of deterioration in the display image quality due to a leakage of the TFTs 30. By forming the relay films 80 a consisting of films with low reflectance, like the data lines 6 a, the light-shielding conductive films 90 a may include a film containing at least Al having high reflectance. Therefore, in the light-shielding regions of the liquid crystal device, it is possible to form the data lines 6 a and the light-shielding conductive films 90 a consisting of films containing at least Al having high reflectance of, for example, 80% or more in the visible region, and thus reflect incident light by the data lines 6 a and the light-shielding conductive films 90 a to prevent an increase in temperature of the liquid crystal device. In the liquid crystal device of this embodiment, for example, it is thus possible to decrease the cost required for developing a cooling device of a projector, and improve the light-shielding performance of the liquid crystal device.
In the above-described embodiment, the surface of the interlayer insulating film 7 provided below the pixel electrodes 9 a is planarized. This is performed for preventing disclination of the liquid crystal due to steps formed in wiring, elements, etc., and the lower interlayer insulating film 4 may be also planarized. In this embodiment, planarization can be performed by coating an organic or inorganic SOG (Silicon On glass) film by a spin coater, or CMP process.
(Second Exemplary Embodiment)
The construction of an electro-optical device in accordance with a second embodiment of the present invention will be described below with reference to FIGS. 12 to 16.
In a liquid crystal device as an example of electro-optical devices, AC reverse driving must be generally performed for preventing deterioration in a liquid crystal. Although several driving methods have been proposed, the liquid crystal of the second embodiment of the present invention uses a mechanism in which the polarities of image signals applied to the liquid crystal are reversed for each scanning line 3 a, and the polarities of the image signals are further reversed for 1 field, as shown in FIG. 12. As a result, a DC component applied to the liquid crystal can be suppressed as much as possible, and the occurrence of flicker can be significantly decreased. When the polarities of image signals applied to the liquid crystal are reversed for each scanning line 3 a, the image signals having the same polarity are written in the pixel electrodes 9 a adjacent in the X direction along the scanning lines 3 a, thereby producing no electric field between the adjacent pixel electrodes 9 a. On the other hand, the image signals having different polarities are written in the pixel electrodes 9 a adjacent in the Y direction along the data lines 6 a, thereby producing an electric field between the adjacent pixel electrodes 9 a to cause disclination 400 in the liquid crystal.
Therefore, in order to minimize the regions where the disclination 400 occurs, as shown in FIG. 12, in the second embodiment of the present invention, grooves 10′ are formed in the shadowed regions of a plurality of pixel groups on the TFT array substrate shown in FIG. 13 so that wiring such as the data lines 6 a and the like, and TFTs 30 are partially buried in the grooves to planarize the substrate. In addition, when the TFT array substrate is rubbed in the direction shown by arrows in FIG. 13, the grooves 10′ are not provided in the regions of the scanning lines 3 a, which is in contact with the aperture regions, to further decrease the regions where the disclination 400 occurs. As a result, the regions of the pixels where light leaks, can be decreased, and the pixel aperture ratio can be significantly increased. Particularly, this embodiment is suitable for a liquid crystal device for a projector required to have brightness and a small size.
FIG. 14 is a sectional view taken along line XIV-XIV′ in FIG. 13. As shown in FIG. 14, the grooves 10′ are formed in the regions of the TFT array substrate 10 where the TFTs 30 and the storage capacitors 70 are formed so that the pixel electrodes 9 a and the alignment film 16 can be substantially flatly formed. The grooves 10′ can easily be formed by usual photolithography and etching. The taper angle of the sides of the grooves 10′ can be controlled to various angles by a dry etching method or a wet etching method. In planarization by forming the grooves 10′, control of the depth of the grooves 10′ is important, but the depth can easily be controlled by controlling the dry etching time or the like. In such planarization by forming the grooves 10′, planarization can be realized without using a photosensitive organic film or the like, and thus this method is particularly useful for a liquid crystal device of a projector using a strong light source.
FIG. 15 is a sectional view taken along line XV-XV′ in FIG. 13, showing the sectional structure between the pixel electrodes 9 a adjacent in the X direction shown in FIG. 12. In this way, the grooves 10′ are formed in the TFT array substrate 10 to permit substantially complete planarization of the regions where the data lines 6 a are formed. Particularly, in rubbing along the data lines 6 a, as shown in FIG. 13, no disclination occurs due to the steps formed by wiring such as the data lines 6 a, and elements because the regions where the data lines 6 a, etc. are formed are buried in the grooves and planarized.
FIG. 16 is a sectional view taken along line XVI-XVI′ in FIG. 13, showing the sectional structure between the pixel electrodes 9 a adjacent in the Y direction shown in FIG. 12. Since disclination occurs in the liquid crystal due to an electric field between the adjacent pixel electrodes 9 a, the grooves 10′ are not formed in the regions of the TFT array substrate 10 where the scanning lines 3 a are formed, so as to decrease the cell gap of the liquid crystal layer 50 in the partition regions between the adjacent pixel electrodes 9 a, as shown in FIG. 16. Therefore, the electric field between the counter electrode 21 provided on the counter substrate 20 and the pixel electrodes 9 a is increased, and thus the regions where disclination occurs in the liquid crystal can be decreased as much as possible even when an electric field occurs between the adjacent pixel electrodes 9 a. Since the disclination need not be decreased by narrowing the cell gap of the liquid crystal, the problem of development of a liquid crystal for a narrow cell gap, the problem of causing difficulties in controlling the cell gap, etc. do not occur.
In this way, in the second embodiment of the present invention, the grooves 10′ are formed in the TFT array substrate 10 so that wiring and elements can be completely or partially buried therein, thereby realizing an electro-optical device having a higher pixel aperture ratio, as compared with a case such as the CMP process which can perform only complete planarization. When the grooves 10′ are formed not only in the TFT array substrate 10 but also in the interlayer insulating film such as the underlying insulating film 12 or the interlayer insulating film 81, the same effect can be obtained. Of course, the grooves 10′ provided in the TFT array substrate 10 may be combined with the grooves provided in the interlayer insulating film such as the underlying insulating film 12 or the interlayer insulating film 81 for planarization.
(Third Exemplary Embodiment)
The construction of a liquid crystal device as an electro-optical device in accordance with a third embodiment of the present invention will be described with reference to FIGS. 17 and 18. FIG. 17 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed, and FIG. 18 is a sectional view taken along line XVIII-XVIII′ in FIG. 17. In FIG. 18, layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing.
As shown in FIG. 17, the third embodiment is greatly different from the first embodiment in that auxiliary wirings 3 b′ also serving as capacitor electrodes 3 b are formed by the same film as scanning lines 3 a. The auxiliary wirings 3 b′ are extended from an image display region to the periphery thereof along the direction of the scanning lines 3 a so as to be connected to a constant potential source in the peripheral region. As the constant potential source, a constant potential source such as a negative power source, or a positive power source supplied to peripheral circuits for driving the liquid crystal device (for example, a scanning line driving circuit, a data line driving circuit), which will be described below, a ground power source, a constant potential source supplied to a counter electrode, or the like can be used. The auxiliary wirings 3 b′ preferably have the same potential as that supplied to light-shielding conductive films 90 a. Therefore, the auxiliary wirings 3 b′ can be caused to function as parts of the capacitor lines 300 shown in FIG. 1. Also, the auxiliary wirings 3 b′ can be electrically connected to the upper light-shielding conductive films 90 a below data lines 6 a through contact holes 95. In this case, the auxiliary wirings 3 b′ may be connected to the light-shielding conductive films 90 a through the contact holes 95 for each pixel electrode 9 a or a plurality of the pixel electrodes 9 a. In this way, the capacitor lines 300 having a redundant structure can be formed by the auxiliary wirings 3 b′ and the light-shielding conductive films 90 a. Even when the first or second embodiment has a margin for the light-shielding regions, of course, the capacitor electrodes 3 b may be extended to form the auxiliary wirings 3 b′.
The third embodiment is also greatly different from the first embodiment in that relay films 80 a′ shown by slanted lines are formed so as not to overlap with the scanning lines 3 a in a plan view, as shown in FIG. 17. As a result, the interlayer insulating film 81 is formed to a thickness of 100 nm or less so that large storage capacitors can be formed on the auxiliary wirings 3 b′ including capacitor electrodes, as shown in FIG. 18. Namely, the storage capacitors C2 shown in FIG. 4 can be enlarged. In this case, since the interlayer insulating film 81 for insulating the scanning lines 3 a and the relay films 80 a′ is thinned, the relay films 80 a′ provided to overlap with the scanning lines 3 a enlarge parasitic capacitances, thereby delaying scanning signals. Also, error occurs in the operation of the TFTs 30 due to the influence of a potential applied to the relay films 80 a′, and thus the relay films 80 a′ cannot be provided near channel regions 1 a′. However, the interlayer insulating film 81 between the semiconductor layers 1 a and the relay films 80 a′ can be greatly thinned, and thus no penetration in the semiconductor layers 1 a occurs in forming contact holes 8 a for electrically connecting heavily-doped drain regions 1 e of the semiconductor layers 1 a and the relay films 80 a′. There is also the advantage that the aperture diameter of the contact holes 8 a can be significantly decreased. Furthermore, in order that the channel regions 1 a′, the vicinities thereof and the scanning lines 3 a are shielded by the light-shielding conductive films 90 a, an interlayer insulating film 91 must be formed to a thickness of 500 nm or more. However, the storage capacitors C1 shown in FIG. 4 can be formed between the auxiliary wirings 3 b′ and the light-shielding conductive films 90 a.
(Fourth Exemplary Embodiment)
The construction of a liquid crystal device as an electro-optical device in accordance with a fourth embodiment of the present invention will be described with reference to FIGS. 19 and 20. FIG. 19 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed, and FIG. 20 is a sectional view taken along line XX-XX′ in FIG. 19. In FIG. 20, layers and members are shown on different reduction scales in order to make each of the layers and the members recognizable in the drawing. The same members as the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
In the fourth embodiment, as shown in FIG. 19, scanning lines 3 a and data lines 6 a are provided in substantially centers of non-aperture regions. Semiconductor layers 1 a are provided below the data lines 6 a so as to cross the scanning lines 3 a. As shown in FIG. 20, the data lines 6 a are electrically connected to heavily-doped source regions 1 d of the semiconductor layers 1 a below the data lines 6 a through contact holes 5. The heavily-doped drain regions 1 e of the semiconductor layers 1 a are electrically connected to the relay films 80 a below the data lines through contact holes 8 a. In this way, the semiconductor layers 1 a are arranged below the light-shielding data lines 6 a to exhibit the effect of preventing direct incidence of light from the counter substrate 20 side on the semiconductor layers 1 a. Furthermore, the semiconductor layers 1 a and the contact holes 5 and 8 a are formed in line symmetry with respect to the center lines of the non-aperture regions in the direction of the scanning lines 3 a and the non-aperture regions in the direction of the data lines 6 a, thereby making the shape of steps symmetric with respect to the data lines. This embodiment is thus advantageous because no difference occurs in light transmission according to the rotation direction of the liquid crystal.
Furthermore, underlying light-shielding films 11 a are formed below the semiconductor layers 1 a with an underlying insulating film 12 provided therebetween. The underlying light-shielding films 11 a are formed in a matrix along the direction of the data lines 6 a and the direction of the scanning lines 3 a. The semiconductor layers 1 a are arranged inward of the underlying light-shielding films 11 a, thereby causing the effect of preventing direct incidence of light returned from the TFT array substrate 10 side on the semiconductor layers 1 a.
The relay films 80 a may consist of a polysilicon film, or a conductive film containing a high-melting-point metal or the like, and are extended in a substantially T shape along the scanning lines 3 a and the data lines 6 a between the semiconductor layers 1 a and the pixel electrodes 9 a so as to function as buffers for electrically connecting the semiconductor layers 1 a and the pixel electrodes 9 a. More specifically, the heavily-doped drain regions 1 e of the semiconductor layers 1 a are electrically connected to the conductive relay films 80 a through the contract holes 8 a, and the relay films 80 a are electrically connected to the pixel electrodes 9 a through the contact holes 8 b. In this structure, by providing the relay films 80 a having a high etching selection ratio, it is possible to avoid the possibility of penetration in the semiconductor layers 1 a during the formation of the contact holes. In the contact holes 5 for electrically connecting the data lines 6 a and the heavily-doped source regions 1 d of the semiconductor layers 1 a, the same films as the relay films 80 a may be provided for relay.
In the fourth embodiment, an interlayer insulating film 91 is laminated on the relay films 80 a, and the light-shielding conductive films 90 a are formed on the interlayer insulating film 91. The light-shielding conductive films 90 a are formed to cover the relay films 80 a except the contact holes 8 b. The light-shielding conductive films 90 a are also extended to the outside of the image display region in the direction of the scanning lines 3 a so as to be electrically connected to any one of a constant potential source such as a negative power source, a positive power source supplied to a scanning line driving circuit, a data line driving circuit, etc., a ground power source, a constant potential source supplied to a counter electrode, or the like, thereby fixing the potential. Therefore, each of the relay films 80 a can be used as one of capacitor electrodes, and each of the light-shielding conductive films 90 a can be used as the other capacitor electrode to form each of the storage capacitors C1 shown in FIGS. 4 and 5. In this embodiment, of course, the interlayer insulating film 91 functions as a dielectric film. Since the interlayer insulating film 91 is laminated only for forming the storage capacitors C1, the interlayer insulating film 91 is thinned to a thickness which causes no leakage between the relay films 80 a and the light-shielding conductive films 90 a, thereby increasing the storage capacitors C1. Furthermore, in the fourth embodiment, the relay films 80 a can be extended to portions above the TFTs 30 and the scanning lines 3 a by thickening the interlayer insulating film 81, thereby efficiently increasing the storage capacitors C1. Furthermore, in the fourth embodiment, the semiconductor layers 1 a are not extended to form capacitor electrodes. Therefore, capacitor electrodes for forming the storage capacitors and capacitor lines need not be formed by using the same film as the scanning lines 3 a, and thus the scanning lines 3 a can be formed at the substantially centers of the non-aperture regions defined by the light-shielding conductive films 90 a and the underlying light-shielding films 11 a, as shown in FIG. 19. Also, the semiconductor layers 1 a consisting of a polysilicon film need not be decreased in resistance, and thus impurities need not implanted into the capacitor electrode forming portions to decrease the number of steps.
In the fourth embodiment, the channel regions 1 a′ of the TFTs 30 are respectively formed at the intersections of the scanning lines 3 a and the data lines 6 a so that the channel regions 1 a′ can be formed at the substantially centers of the non-aperture regions in the direction of the data lines 6 a and the direction of the scanning lines 3 a. As a result, the channel regions 1 a′ are located at positions which are most hardly irradiated with light reflected by the counter substrate 20 side and light returned from the TFT array substrate 10 side, thereby significantly decreasing a leakage current of the TFTs 30 due to light.
Furthermore, in the fourth embodiment, as shown in FIG. 19, the light-shielding conductive films 90 a, the relay films 80 a and the underlying light-shielding films 11 a are formed near the channel regions 1 a′ so that the pattern width decreases in this order, to prevent direct incidence of light on the underlying light-shielding films 11 a. Also, the relay films 80 a consisting of a polysilicon film are interposed between the light-shielding conductive films 90 a and the semiconductor layers 1 a to exhibit the effect of absorbing light reflected by the surfaces of the underlying light-shielding films 11 a and light returned from the TFT array substrate 10 side. Therefore, this embodiment is useful for light resistance.
Furthermore, in the fourth embodiment, the non-aperture regions consisting of the data lines 6 a, the light-shielding conductive films 90 a, the underlying light-shielding films 11 a, etc. can be formed on the TFT array substrate 10, whereby a light-shielding film need not be provided on the counter substrate 20. Therefore, since no light-shielding film is provided on the counter substrate 20, the regions (aperture regions) where light is transmitted is not changed even when alignment is shifted in mechanically combining the TFT array substrate 10 and the counter substrate 20. As a result, a stable pixel aperture ratio can be obtained, and defects of the device can be significantly decreased.
(Whole Construction of Electro-optical Device)
The whole construction of the liquid crystal device of each of the embodiments constructed as described above will be described with reference to FIGS. 21 and 22. FIG. 21 is a plan view showing the TFT array substrate 10 together with components formed thereon, as viewed from the counter substrate 20 side, and FIG. 22 is a sectional view taken along line XXII-XXII′ in FIG. 21.
In FIG. 21, a sealing agent 52 is provided on the TFT array substrate 10, on which elements and wiring are formed, along the edge of the counter substrate 20, and a light-shielding frame 53 is provided in parallel to the inner side of the sealing agent, for defining the periphery of the image display region. The frame 53 may be provided on the TFT array substrate 10 side, like in this embodiment, or the counter substrate 20 side. In the region outside the scaling agent 52, a data line driving circuit 101 for supplying an image signal to the data lines 6 a with predetermined timing and external circuit connecting terminals 102 are provided along one side of the TFT array substrate 10, and a scanning line driving circuit 104 is provided along each of the two sides adjacent to that side, for supplying a scanning signal to the scanning lines 3 a with predetermined timing. When a delay of the scanning signal supplied to the scanning lines 3 a is not a problem, of course, the scanning line driving circuit 104 may be provided on one side. Alternatively, the data line driving circuit 101 may be provided on both sides of the image display region along the sides thereof. Furthermore, a plurality of wirings 105 are provided on the remaining side of the TFT array substrate 10, for supplying a common signal to the scanning line driving circuits 104 provided on both sides of the image display region. Furthermore, a vertical conducting material 106 is provided at least one of the corners of the counter substrate 20, for providing electric conduction between the TFT array substrate 10 and the counter substrate 20. Namely, the counter electrode potential applied from the external circuit connecting terminals 102 is supplied to the counter electrode 21 provided on the counter substrate 20 through the wiring provided on the TFT array substrate 10 and the vertical conducting materials 106. As shown in FIG. 22, the counter substrate 20 is fixed to the TFT array substrate 10 with the sealing material 52. Besides the data line driving circuit 101 and the scanning line driving circuits 104, on the TFT array substrate 10 may be formed a sampling circuit for supplying an image signal to the plurality of the data lines 6 a with predetermined timing, a pre-charging circuit for supplying a predetermined voltage level pre-charge signal to the plurality of the data lines 6 a before the image signal, an inspection circuit for inspecting quality, defects, etc. of the liquid crystal device in the course of manufacture, at the time of shipping, and the like. In the liquid crystal device of this embodiment, the peripheral circuits such as the data line driving circuit 101, and the scanning line driving circuits 102 can be formed on the same TFT array substrate 10 in the step of forming the TFTs 30 for controlling the pixel electrodes 9 a, thereby realizing a liquid crystal device having high definition and high density.
The TFT array substrate 10 may be electrically or mechanically connected to driving LSI mounted on, for example, a TAB (Tape Automated Bonding) substrate, through an anisotropic conductive film provided on the peripheral portion of the TFT array substrate 10 instead of providing the data line driving circuit 101 and the scanning line driving circuit 104 on the TFT array substrate 10. Furthermore, a polarizing film, a retardation file, a polarizer or the like may be arranged in the predetermined direction on each of the incident side of the counter substrate 20 and the outgoing side of the TFT array substrate 10 according to the operation mode such as a TN mode, a VA (Vertically Aligned) mode, a PDLC (Polymer Dispersed Liquid Crystal) mode, or the like, and the normally black mode/normally white mode.
The liquid crystal device of each of the embodiments is used as each of three light valves for R (red), G (green) and B (blue) in order to apply to a color display projector, and light of each of the colors separated through a dichroic mirror for RGB color separation is incident on each of the light valves. Therefore, in each of the embodiments, a color filter is not provided on the counter substrate 20. However, a RGB color filter may be formed on the predetermined regions of the counter substrate 20, which correspond to the pixel electrodes 9 a, together with a protecting film therefore. Alternatively, a color filter layer may be formed by using a color resist or the like below the pixel regions 9 a on the TFT array substrate 10 corresponding to RGB. As a result, besides the projector, the liquid crystal device of each of the embodiments can be applied to color display liquid crystal devices such as direct-viewing type and reflection type color liquid crystal televisions. Furthermore, microlenses may be formed on the counter substrate 20 in one-to-one correspondence with pixels. By forming the microlenses, the converging efficiency of incident light can be significantly improved to realize a bright liquid crystal device. Furthermore, an interference layer consisting of layers having different refractive indexes may be deposited on the counter substrate 20 to form a dichroic filter for creating RGB colors by using light interference. By using the counter substrate including the dichroic filter, a liquid crystal device for brighter color display can be realized.
Although, in the liquid crystal device of each of the above-mentioned embodiments, like in a conventional device, incident light is incident on the counter substrate 20 side, light may be incident on the TFT array substrate 10 side, and light may be emitted from the counter substrate 20 side because the underlying light-shielding films 11 a and the light-shielding conductive films 90 a are provided on the TFT array substrate 10. Also, a polarizer coated with an AR (Anti Reflection) film need not be provided on or an AR film need not be mounted on the back of the TFT array substrate 10 in order to prevent reflection, thereby causing the advantage that the material cost can be accordingly reduced, and the yield is not reduced due to dust, flaws, etc. in mounting the polarizer. Furthermore, even when the efficiency of light utilization is improved by using a bright light source or polarization conversion with a polarization beam splitter, deterioration in image quality such as cross talk due to light does not occur because of the excellent light resistance. Although, in each of the embodiments, the conductive films 90 a has the light shielding ability, the conductive films has no light shielding ability in some cases in which another light-shielding film is formed for light incident on the counter substrate side. Even with the conductive films 90 a having no light shielding ability, the construction of each of the embodiments can enlarge the storage capacitors.
Furthermore, although a normal stagger type or coplanar type polysilicon TFT is used as a switching element provided in each of pixels, each of the embodiments is also effective for other types of TFTs such as a reversed stagger type TFT, an amorphous silicon TFT.
An electro-optical device of the present invention is not limited to the above-described embodiments, and appropriate modification can be made within the gist and idea of the present invention which can be read from the claims and the entire specification. An electro-optical device with such modification is also included in the technical field of the present invention.

Claims (31)

What is claimed is:
1. An electro-optical device, comprising:
a scanning line formed above a substrate;
a data line crossing the scanning line;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a first storage capacitor formed by a plurality of layers between a gate electrode of the thin film transistor and the data line.
2. The electro-optical device according to claim 1, the first storage capacitor includes:
a first capacitor electrode;
an insulating film facing the first capacitor electrode; and
a second capacitor electrode arranged opposite to the first capacitor electrode with the insulating film provided therebetween to serve as a relay film for electrically connecting the drain region of the thin film transistor and the pixel electrode.
3. The electro-optical device according to claim 1, the first storage capacitor is formed to overlap with each of a semiconductor layer of the thin film transistor and the scanning line except a connection region between a source region of the thin film transistor and the data line.
4. The electro-optical device according to claim 2, further comprising:
a second storage capacitor including:
a second capacitor electrode;
an insulating film facing the second capacitor electrode; and
a third capacitor electrode opposed to the second capacitor electrode with the insulating film provided therebetween and including a same film as the gate electrode.
5. The electro-optical device according to claim 4, the third capacitor electrode is formed in parallel with the scanning line except in the connection region between the drain region of the thin film transistor and the second capacitor electrode.
6. The electro-optical device according to claim 4, the third capacitor electrode is electrically connected to the first capacitor electrode.
7. The electro-optical device according to claim 6, the electric connection between the third capacitor electrode and the first capacitor electrode is located in a region below the data line.
8. The electro-optical device according to claim 4, the third capacitor electrode comprises a part of a first capacitor lines extending along the scanning line, the first capacitor electrode includes a part of a second capacitor line extending along the scanning line, and the first and second capacitor lines are extended to the periphery of the image display region in which the pixel electrode is arranged, and electrically connected to each other.
9. The electro-optical device according to claim 4, further comprising:
a third storage capacitor including:
a third capacitor electrode;
an insulating film facing the third capacitor electrode; and
a fourth capacitor electrode opposed to the third capacitor electrode with the insulating film provided therebetween and including a same film as the semiconductor layer.
10. The electro-optical device according to claim 9, the fourth capacitor electrode is formed to extend from the drain region of the thin film transistor.
11. The electro-optical device according to claim 9, the fourth capacitor electrode is formed in parallel with the scanning line.
12. The electro-optical device according to claim 9, the capacity of the second storage capacitor is smaller than that of each of the first storage capacitor and the third storage capacitor.
13. The electro-optical device according to claim 4, further comprising:
a fourth storage capacitor including:
the fourth capacitor electrode including a same film as the semiconductor layer;
an insulating film facing the fourth capacitor electrode; and
a fifth capacitor electrode arranged opposite to the fourth capacitor electrode, with the insulating film provided therebetween, for shielding the semiconductor layer from light.
14. The electro-optical device according to claim 13, the fifth capacitor electrode is electrically connected to the first capacitor electrode in the periphery of the image display region.
15. The electro-optical device according to claim 2, further comprising:
a fifth storage capacitor including:
the first capacitor electrode;
an insulating film laminated on the first capacitor electrode; and
a sixth capacitor electrode arranged opposite to the first capacitor electrode with the insulating film provided therebetween to form the pixel electrode.
16. The electro-optical device according to claim 15, the fifth storage capacitor is formed over the entire periphery of each pixel.
17. An electro-optical device, comprising:
a scanning line formed above a substrate;
a data line formed above the substrate;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a storage capacitor having a first conductive film which forms at least one capacitor electrode of the storage capacitor, and a second conductive light-shielding film which forms another capacitor electrode and is arranged above a gate electrode of the thin film transistor, the second light-shielding conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode,
the second conductive light-shielding film covers at least portions of a channel region of the thin film transistor, a junction region between the source region and the channel region of the thin film transistor, a junction region between the drain region and the channel region of the thin film transistor, and the source and drain regions adjacent to the respective junction regions.
18. The electro-optical device according to claim 17, the first conductive film covers the channel region, and the data line is formed on the channel region and the adjacent region thereof so as not to project from the first conductive film in a plan view.
19. The electro-optical device according to claim 17, each of the first conductive film and the data line includes a film containing at least Al.
20. The electro-optical device according to claim 17, the first conductive film is extended from the image display region in which the pixel electrode is arranged to the periphery thereof, and connected to a constant potential source in the peripheral region.
21. An electro-optical device, comprising:
a scanning line formed above a substrate;
a data line formed above the substrate;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a storage capacitor having a first conductive file which forms at least one capacitor electrode of the storage capacitor, and a second conductive light-shielding film which forms another capacitor electrode and is arranged above a gate electrode of the thin film transistor, the second light-shielding conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode; and
a channel region of the thin film transistor covered with the data line arranged above the first conductive film with an insulating film formed therebetween.
22. An electro-optical device, comprising:
a scanning line formed above a substrate;
a data line formed above the substrate;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor;
a storage capacitor having a first conductive film which forms at least one capacitor electrode of the storage capacitor, and a second conductive film which forms another capacitor electrode and is arranged above a gate electrode of thin film transistor, the second conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode; and
a third conductive film which includes a same film as the gate electrode, and which is arranged opposite to the second conductive film with an interlayer insulating film formed therebetween, the first conductive film and the third conductive film being electrically connected to each other by the first conductive film and the third conductive film directly contacting each other.
23. The electro-optical device according to claim 22, the first conductive film and the third conductive film being electrically connected to each other, and the second conductive film and a fourth conductive film being electrically connected to each other.
24. The electro-optical device according to claim 22, the third conductive film includes a capacitor line which is extended from the image display region to the periphery thereof along the scanning line, and connected to a constant potential source in the peripheral region, the first conductive film being connected to the capacitor line.
25. The electro-optical device according to claim 24, the underlying light-shielding film includes a light-shielding conductive film, and is connected to the capacitor line of each pixel.
26. An electro-optical device, comprising:
a scanning line formed above a substrate;
a data line formed above the substrate;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a storage capacitor having a first conductive film which forms at least one capacitor electrode of the storage capacitor, and a second conductive light-shielding film which forms another capacitor electrode and is arranged above a gate electrode of the thin film transistor, the second light-shielding conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode,
the first conductive film includes a film having a lower reflectance than the data line.
27. The electro-optical device according to claim 26, further comprising:
an underlying light-shielding film which is arranged below the semiconductor layer on the substrate and which is formed to cover at least the channel region as viewed from the opposite side of the substrate, and not to project from the first conductive film in a plan view of the channel region and the adjacent region thereof.
28. The electro-optical device according to claim 27, at least either of the first conductive film and the underlying light-shielding film is made of a high-melting-point metal.
29. The electro-optical device according to claim 26, the first conductive film has substantially the same size as the second conductive film under the data line.
30. A projection display device, comprising:
an electro-optical device including:
a scanning line formed above a substrate;
a data line crossing the scanning line;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a first storage capacitor formed by a plurality of layers between a gate electrode of the thin film transistor and the data line; and
a projection device that projects a light passing through the electro-optical device.
31. An electrode-optical device, comprising:
a scanning line formed above a substrate;
a data line formed above the substrate;
a thin film transistor disposed in correspondence with an intersection of the scanning line and the data line;
a pixel electrode electrically connected to a drain region of the thin film transistor; and
a storage capacitor having a first conductive light-shielding film which forms one of capacitor electrodes of the storage capacitor, is arranged below the pixel electrode, and a second conductive film which forms another capacitor electrode, is arranged above a gate electrode of the thin film transistor and below the first conductive light-shielding film, the second conductive film electrically connecting a semiconductor layer constituting the drain region to the pixel electrode,
the first conductive light-shielding film and the second conductive film covering at least portions of a channel region of the thin film transistor, a first junction region between the source region and the channel region of the thin film transistor, a second junction region between the drain region and the channel region of the thin film transistor, the source and drain regions respectively adjacent to the first junction region and the second junction region, a scanning line region and a data line region.
US10/602,731 2000-03-17 2003-06-25 Electro-optical device Expired - Lifetime US6809338B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/602,731 US6809338B2 (en) 2000-03-17 2003-06-25 Electro-optical device

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP2000-77171 2000-03-17
JP2000077173 2000-03-17
JP2000077171 2000-03-17
JP2000-77173 2000-03-17
JP2000-077173 2000-03-17
JP2000-077171 2000-03-17
JP2000-007910 2001-01-16
JP2001007910A JP3501125B2 (en) 2000-03-17 2001-01-16 Electro-optical device
JP2000-7910 2001-01-16
US09/809,275 US6610997B2 (en) 2000-03-17 2001-03-16 Electro-optical device
US10/602,731 US6809338B2 (en) 2000-03-17 2003-06-25 Electro-optical device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/809,275 Division US6610997B2 (en) 2000-03-17 2001-03-16 Electro-optical device

Publications (2)

Publication Number Publication Date
US20040004221A1 US20040004221A1 (en) 2004-01-08
US6809338B2 true US6809338B2 (en) 2004-10-26

Family

ID=27342722

Family Applications (2)

Application Number Title Priority Date Filing Date
US09/809,275 Expired - Lifetime US6610997B2 (en) 2000-03-17 2001-03-16 Electro-optical device
US10/602,731 Expired - Lifetime US6809338B2 (en) 2000-03-17 2003-06-25 Electro-optical device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US09/809,275 Expired - Lifetime US6610997B2 (en) 2000-03-17 2001-03-16 Electro-optical device

Country Status (4)

Country Link
US (2) US6610997B2 (en)
KR (2) KR100450922B1 (en)
CN (2) CN1161647C (en)
TW (1) TWI301915B (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040135940A1 (en) * 2002-10-31 2004-07-15 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20040135145A1 (en) * 2002-12-19 2004-07-15 Seiko Epson Corporation Electro-optical device, method of manufacturing the same, and electronic instrument
US20040141130A1 (en) * 2002-10-31 2004-07-22 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20050088596A1 (en) * 2002-10-31 2005-04-28 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20050140858A1 (en) * 2003-12-30 2005-06-30 Lg Philips Lcd Co., Ltd. Liquid crystal display device and method of manufacturing the same
US20050206812A1 (en) * 2004-03-16 2005-09-22 Sharp Kabushiki Kaisha Color filter substrate and display apparatus using the same
US20060163583A1 (en) * 2005-01-21 2006-07-27 Seiko Epson Corporation Semiconductor device, liquid crystal device, electronic apparatus, and method of manufacturing semiconductor device
US20070139597A1 (en) * 2005-11-15 2007-06-21 Samsung Electronics Co., Ltd. Display substrate, method of manufacturing the same and display device having the same
US20080067521A1 (en) * 2006-09-15 2008-03-20 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20080068525A1 (en) * 2006-07-25 2008-03-20 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20100044823A1 (en) * 2006-02-10 2010-02-25 Noble Peak Vision Corp. Semiconductor photonic devices with enhanced responsivity and reduced stray light
US20100164066A1 (en) * 2008-12-30 2010-07-01 Stmicroelectronics S.R.L. Integrated capacitor having a non-uniform thickness
US20120161135A1 (en) * 2010-12-24 2012-06-28 Au Optronics Corporation Pixel structure
US20130063703A1 (en) * 2011-09-08 2013-03-14 Sony Corporation Spatial light modulation device and projection display
US8551796B2 (en) 2000-09-29 2013-10-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW478169B (en) * 1999-07-16 2002-03-01 Seiko Epson Corp Electro optical device and the projection display device using the same
TWI301915B (en) * 2000-03-17 2008-10-11 Seiko Epson Corp
KR100620847B1 (en) * 2001-06-05 2006-09-13 엘지.필립스 엘시디 주식회사 Array Substrate of Liquid Crystal Display and Fabricating Method Thereof
US7474002B2 (en) * 2001-10-30 2009-01-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having dielectric film having aperture portion
JP2003207794A (en) * 2002-01-11 2003-07-25 Sanyo Electric Co Ltd Active matrix type display device
KR100860468B1 (en) * 2002-04-17 2008-09-25 엘지디스플레이 주식회사 Substrate for Liquid Crystal Device
JP4088190B2 (en) * 2002-05-21 2008-05-21 セイコーエプソン株式会社 Electro-optical device and electronic apparatus
KR100859521B1 (en) * 2002-07-30 2008-09-22 삼성전자주식회사 a thin film transistor array panel
JP2004151546A (en) * 2002-10-31 2004-05-27 Sharp Corp Active matrix substrate and display apparatus
US7133088B2 (en) * 2002-12-23 2006-11-07 Lg.Philips Lcd Co., Ltd. Liquid crystal display device and method of fabricating the same
JP4417072B2 (en) * 2003-03-28 2010-02-17 シャープ株式会社 Substrate for liquid crystal display device and liquid crystal display device using the same
TWI225705B (en) * 2003-05-02 2004-12-21 Toppoly Optoelectronics Corp Electrostatic discharge protection device and manufacturing method thereof
JP4016955B2 (en) * 2003-05-02 2007-12-05 セイコーエプソン株式会社 ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE
TW594653B (en) * 2003-06-02 2004-06-21 Toppoly Optoelectronics Corp Low leakage thin film transistor circuit
KR20050000653A (en) 2003-06-24 2005-01-06 엘지.필립스 엘시디 주식회사 Liquid crystal display panel
KR100686333B1 (en) * 2003-07-04 2007-02-22 삼성에스디아이 주식회사 TFT, FPD having the TFT and Method of fabricating the FPD
US6885416B2 (en) * 2003-07-07 2005-04-26 Au Optronics Corp. Flat panel display with a non-matrix light shielding structure
JP4314926B2 (en) * 2003-08-04 2009-08-19 セイコーエプソン株式会社 Electro-optical device, manufacturing method thereof, and electronic apparatus
JP4069906B2 (en) * 2003-08-04 2008-04-02 セイコーエプソン株式会社 ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE
WO2005048353A1 (en) * 2003-11-14 2005-05-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing liquid crystal display device
US8247965B2 (en) * 2003-11-14 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Light emitting display device and method for manufacturing the same
US7397067B2 (en) * 2003-12-31 2008-07-08 Intel Corporation Microdisplay packaging system
KR100761072B1 (en) * 2004-05-28 2007-09-21 삼성에스디아이 주식회사 Flat panel display and fabricating method of the same
US7586121B2 (en) * 2004-12-07 2009-09-08 Au Optronics Corp. Electroluminescence device having stacked capacitors
CN100481156C (en) * 2004-12-16 2009-04-22 夏普株式会社 Active matrix substrate and fabricating method thereof, display device, liquid crystal display device, and television device
JP2006245031A (en) * 2005-02-28 2006-09-14 Casio Comput Co Ltd Thin film transistor panel
JP5117667B2 (en) * 2005-02-28 2013-01-16 カシオ計算機株式会社 Thin film transistor panel
JP2006243579A (en) * 2005-03-07 2006-09-14 Seiko Epson Corp Electro-optical device and manufacturing method,and electronic equipment
KR101133767B1 (en) 2005-03-09 2012-04-09 삼성전자주식회사 Organic thin film transistor array panel and method for manufacturing the same
CN100381930C (en) * 2005-08-05 2008-04-16 友达光电股份有限公司 Liquid crystal display device
JP4513777B2 (en) * 2005-11-14 2010-07-28 セイコーエプソン株式会社 LIGHT EMITTING DEVICE AND ELECTRONIC DEVICE
JP4674544B2 (en) * 2005-12-27 2011-04-20 セイコーエプソン株式会社 Manufacturing method of electro-optical device
JP4586732B2 (en) * 2006-01-06 2010-11-24 セイコーエプソン株式会社 ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE
JP2007199188A (en) * 2006-01-24 2007-08-09 Seiko Epson Corp Electrooptical apparatus and method for manufacturing the same, and electronic equipment
JP2007212499A (en) * 2006-02-07 2007-08-23 Seiko Epson Corp Liquid crystal device and projector
US20090207329A1 (en) * 2006-03-24 2009-08-20 Sharp Kabushiki Kaisha Liquid crystal display
JP4321557B2 (en) * 2006-07-06 2009-08-26 エプソンイメージングデバイス株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
JP4197016B2 (en) * 2006-07-24 2008-12-17 セイコーエプソン株式会社 Electro-optical device substrate, electro-optical device, and electronic apparatus
US7507998B2 (en) * 2006-09-29 2009-03-24 Tpo Displays Corp. System for displaying images and method for fabricating the same
TWI351764B (en) * 2007-04-03 2011-11-01 Au Optronics Corp Pixel structure and method for forming the same
CN100452412C (en) * 2007-05-31 2009-01-14 友达光电股份有限公司 Pixel structure and manufacture method and photoelectronic device with the pixel structure and manufacture method
TWI338806B (en) 2007-09-26 2011-03-11 Au Optronics Corp Liquid crystal display panel, pixel structure for liquid crystal display and liquid crystal display array substrate
JP5386994B2 (en) 2009-01-09 2014-01-15 ソニー株式会社 Display device and electronic device
JP5391106B2 (en) * 2010-02-25 2014-01-15 株式会社ジャパンディスプレイ Pixel circuit, liquid crystal device, and electronic device
JP5423548B2 (en) * 2010-04-05 2014-02-19 セイコーエプソン株式会社 Electro-optical device and electronic apparatus
JP5724531B2 (en) * 2010-04-12 2015-05-27 セイコーエプソン株式会社 Electro-optical device and electronic apparatus
JP5919636B2 (en) * 2011-04-01 2016-05-18 セイコーエプソン株式会社 Electro-optical device, electronic apparatus, and method of manufacturing electro-optical device
WO2012161702A1 (en) * 2011-05-24 2012-11-29 Apple Inc. Pixel-to-pixel coupling in displays
TWI415268B (en) * 2011-09-22 2013-11-11 Au Optronics Corp Thin film transistor device and pixel structure and driving circuit of display panel
JP5834705B2 (en) * 2011-09-28 2015-12-24 セイコーエプソン株式会社 Electro-optical device and electronic apparatus
US9923101B2 (en) 2012-09-13 2018-03-20 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor structure
TWI505476B (en) * 2012-12-27 2015-10-21 E Ink Holdings Inc Thin film transistor structure
KR20150006685A (en) * 2013-07-09 2015-01-19 삼성디스플레이 주식회사 Display apparatus and manufacturing method of the same
WO2015025924A1 (en) 2013-08-21 2015-02-26 株式会社デンソー Gas sensor
CN103700669A (en) 2013-12-19 2014-04-02 京东方科技集团股份有限公司 Array substrate and preparation method thereof as well as display device
CN103715207B (en) * 2013-12-31 2017-11-10 合肥京东方光电科技有限公司 The electric capacity and its manufacture method and relevant device of tft array substrate
CN204204377U (en) * 2014-01-21 2015-03-11 苹果公司 Display and electronic equipment display
US9716134B2 (en) 2014-01-21 2017-07-25 Apple Inc. Organic light-emitting diode display with bottom shields
CN103941507B (en) * 2014-04-02 2017-01-11 上海天马微电子有限公司 Array substrate, display panel and display device
KR102265751B1 (en) * 2014-08-22 2021-06-17 삼성디스플레이 주식회사 Organic light emitting display apparatus
CN110112145B (en) * 2015-01-21 2023-08-29 群创光电股份有限公司 display device
JP2016177230A (en) * 2015-03-23 2016-10-06 セイコーエプソン株式会社 Electro-optic device and electronic apparatus
CN104698706B (en) * 2015-03-31 2018-05-29 合肥京东方光电科技有限公司 A kind of array substrate and its manufacturing method, display device
KR102500271B1 (en) * 2015-08-19 2023-02-16 삼성디스플레이 주식회사 Organic light emitting display apparatus and method for manufacturing the same
TWI663448B (en) * 2015-10-06 2019-06-21 南韓商Ｌｇ化學股份有限公司 Display device
JP2017072741A (en) 2015-10-08 2017-04-13 セイコーエプソン株式会社 Electro-optical device, electronic apparatus, manufacturing method of electro-optical device
CN106449651B (en) * 2016-09-12 2019-05-21 厦门天马微电子有限公司 Dot structure and display device
WO2018145123A1 (en) * 2017-02-06 2018-08-09 Chromera, Inc. Polymorphic electro-optic displays
CN106684103B (en) * 2017-02-28 2020-04-03 厦门天马微电子有限公司 Array substrate, display panel and display device
CN106940506A (en) * 2017-05-12 2017-07-11 上海天马有机发光显示技术有限公司 Display panel and display device
CN107611181A (en) * 2017-10-26 2018-01-19 京东方科技集团股份有限公司 Thin film transistor (TFT), array base palte and its manufacture method, display device
CN108020971A (en) * 2017-12-22 2018-05-11 武汉华星光电技术有限公司 Array base palte, liquid crystal panel and liquid crystal display device
CN108257977B (en) * 2018-01-10 2021-01-01 京东方科技集团股份有限公司 Display back plate and manufacturing method thereof, display panel and display device
KR102576995B1 (en) * 2018-07-02 2023-09-12 삼성디스플레이 주식회사 Display apparatus and Method for manufacturing the same
TWI680603B (en) * 2018-11-12 2019-12-21 友達光電股份有限公司 Pixel array substrate
CN109541833A (en) * 2018-12-13 2019-03-29 华为技术有限公司 Display component, display device and its driving method
KR20200105565A (en) * 2019-02-28 2020-09-08 삼성디스플레이 주식회사 Display device
KR200496021Y1 (en) 2020-07-29 2022-10-13 주식회사 한국가스기술공사 Device for carrier chain maintenance
CN114203787A (en) * 2021-12-10 2022-03-18 深圳市华星光电半导体显示技术有限公司 Display panel and preparation method thereof

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02165125A (en) 1988-12-20 1990-06-26 Seiko Epson Corp Display device
JPH04333828A (en) 1991-05-09 1992-11-20 Sony Corp Liquid crystal display device
JPH04348324A (en) 1990-07-23 1992-12-03 Hosiden Corp Liquid crystal display element
JPH0728093A (en) 1993-07-13 1995-01-31 Sony Corp Active matrix substrate for display
US5459596A (en) 1992-09-14 1995-10-17 Kabushiki Kaisha Toshiba Active matrix liquid crystal display with supplemental capacitor line which overlaps signal line
US5510916A (en) 1992-01-30 1996-04-23 Nec Corporation Active matrix liquid crystal device with opposite substrate having black matrix with larger aperture than active substrate
US5940059A (en) 1996-02-28 1999-08-17 Samsung Electronics Co., Ltd. Thin-film transistor liquid crystal display devices having high resolution
JP2000010120A (en) 1998-06-23 2000-01-14 Seiko Epson Corp Liquid crystal device and electronic appliance
US6066860A (en) 1997-12-25 2000-05-23 Seiko Epson Corporation Substrate for electro-optical apparatus, electro-optical apparatus, method for driving electro-optical apparatus, electronic device and projection display device
US6075580A (en) 1993-12-28 2000-06-13 Canon Kabushiki Kaisha Active matrix type liquid crystal display apparatus with conductive light shield element
US6108056A (en) 1996-09-03 2000-08-22 Semiconductor Energy Laboratory Co., Ltd. Active matrix electro-optical device
US6172721B1 (en) 1998-02-09 2001-01-09 Seiko Epson Corporation Electrooptical panel and electronic appliances
US6320204B1 (en) 1997-12-25 2001-11-20 Seiko Epson Corporation Electro-optical device in which an extending portion of a channel region of a semiconductor layer is connected to a capacitor line and an electronic apparatus including the electro-optical device
US6610997B2 (en) * 2000-03-17 2003-08-26 Seiko Epson Corporation Electro-optical device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2800956B2 (en) * 1992-03-10 1998-09-21 シャープ株式会社 Active matrix substrate
JP3307144B2 (en) * 1995-02-28 2002-07-24 ソニー株式会社 Display device
JP3433779B2 (en) * 1996-06-19 2003-08-04 シャープ株式会社 Active matrix substrate and manufacturing method thereof
JP3503685B2 (en) * 1999-08-30 2004-03-08 日本電気株式会社 Liquid crystal display device and manufacturing method thereof
KR20010088329A (en) * 2000-03-07 2001-09-26 가네꼬 히사시 Liquid crystal display unit and method for manufacturing the same

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02165125A (en) 1988-12-20 1990-06-26 Seiko Epson Corp Display device
JPH04348324A (en) 1990-07-23 1992-12-03 Hosiden Corp Liquid crystal display element
JPH04333828A (en) 1991-05-09 1992-11-20 Sony Corp Liquid crystal display device
US5510916A (en) 1992-01-30 1996-04-23 Nec Corporation Active matrix liquid crystal device with opposite substrate having black matrix with larger aperture than active substrate
US5459596A (en) 1992-09-14 1995-10-17 Kabushiki Kaisha Toshiba Active matrix liquid crystal display with supplemental capacitor line which overlaps signal line
JPH0728093A (en) 1993-07-13 1995-01-31 Sony Corp Active matrix substrate for display
US6075580A (en) 1993-12-28 2000-06-13 Canon Kabushiki Kaisha Active matrix type liquid crystal display apparatus with conductive light shield element
US5940059A (en) 1996-02-28 1999-08-17 Samsung Electronics Co., Ltd. Thin-film transistor liquid crystal display devices having high resolution
US6108056A (en) 1996-09-03 2000-08-22 Semiconductor Energy Laboratory Co., Ltd. Active matrix electro-optical device
US6066860A (en) 1997-12-25 2000-05-23 Seiko Epson Corporation Substrate for electro-optical apparatus, electro-optical apparatus, method for driving electro-optical apparatus, electronic device and projection display device
US6320204B1 (en) 1997-12-25 2001-11-20 Seiko Epson Corporation Electro-optical device in which an extending portion of a channel region of a semiconductor layer is connected to a capacitor line and an electronic apparatus including the electro-optical device
US6172721B1 (en) 1998-02-09 2001-01-09 Seiko Epson Corporation Electrooptical panel and electronic appliances
JP2000010120A (en) 1998-06-23 2000-01-14 Seiko Epson Corp Liquid crystal device and electronic appliance
US6610997B2 (en) * 2000-03-17 2003-08-26 Seiko Epson Corporation Electro-optical device

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8551796B2 (en) 2000-09-29 2013-10-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
US20070058102A1 (en) * 2002-10-31 2007-03-15 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7268843B2 (en) 2002-10-31 2007-09-11 Seiko Epson Corporation Liquid crystal display with capacitive light shield between data line and pixel electrode
US20040141130A1 (en) * 2002-10-31 2004-07-22 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7253795B2 (en) 2002-10-31 2007-08-07 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20050088596A1 (en) * 2002-10-31 2005-04-28 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20050199889A1 (en) * 2002-10-31 2005-09-15 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20040135940A1 (en) * 2002-10-31 2004-07-15 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7317497B2 (en) 2002-10-31 2008-01-08 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7193663B2 (en) * 2002-10-31 2007-03-20 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7161193B2 (en) 2002-10-31 2007-01-09 Seiko Epson Corporation Electro-optical device and electronic apparatus
US6876000B2 (en) * 2002-12-19 2005-04-05 Seiko Epson Corporation Electro-optical device, method of manufacturing the same, and electronic instrument
US7119370B2 (en) 2002-12-19 2006-10-10 Seiko Epson Corporation Electro-optical device, method of manufacturing the same, and electronic instrument
US20040135145A1 (en) * 2002-12-19 2004-07-15 Seiko Epson Corporation Electro-optical device, method of manufacturing the same, and electronic instrument
US7750999B2 (en) * 2003-12-30 2010-07-06 Lg. Display Co., Ltd. Liquid crystal display device and method of manufacturing the same
US20050140858A1 (en) * 2003-12-30 2005-06-30 Lg Philips Lcd Co., Ltd. Liquid crystal display device and method of manufacturing the same
US8212976B2 (en) 2003-12-30 2012-07-03 Lg Display Co., Ltd. Liquid crystal display device and method of manufacturing the same
US20050206812A1 (en) * 2004-03-16 2005-09-22 Sharp Kabushiki Kaisha Color filter substrate and display apparatus using the same
US7710530B2 (en) 2004-03-16 2010-05-04 Sharp Kabushiki Kaisha Color filter substrate and display apparatus using the same
US20060163583A1 (en) * 2005-01-21 2006-07-27 Seiko Epson Corporation Semiconductor device, liquid crystal device, electronic apparatus, and method of manufacturing semiconductor device
US7804096B2 (en) * 2005-01-21 2010-09-28 Seiko Epson Corporation Semiconductor device comprising planarized light-shielding island films for thin-film transistors
US20070139597A1 (en) * 2005-11-15 2007-06-21 Samsung Electronics Co., Ltd. Display substrate, method of manufacturing the same and display device having the same
US20100044823A1 (en) * 2006-02-10 2010-02-25 Noble Peak Vision Corp. Semiconductor photonic devices with enhanced responsivity and reduced stray light
US7619699B2 (en) 2006-07-25 2009-11-17 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20080068525A1 (en) * 2006-07-25 2008-03-20 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7652293B2 (en) * 2006-09-15 2010-01-26 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20080067521A1 (en) * 2006-09-15 2008-03-20 Seiko Epson Corporation Electro-optical device and electronic apparatus
US20100164066A1 (en) * 2008-12-30 2010-07-01 Stmicroelectronics S.R.L. Integrated capacitor having a non-uniform thickness
US9054225B2 (en) * 2008-12-30 2015-06-09 Stmicroelectronics S.R.L. Integrated capacitor having a non-uniform thickness
US20120161135A1 (en) * 2010-12-24 2012-06-28 Au Optronics Corporation Pixel structure
US8421079B2 (en) * 2010-12-24 2013-04-16 Au Optronics Corporation Pixel structure
US20130063703A1 (en) * 2011-09-08 2013-03-14 Sony Corporation Spatial light modulation device and projection display

Also Published As

Publication number Publication date
US20040004221A1 (en) 2004-01-08
TWI301915B (en) 2008-10-11
CN1314608A (en) 2001-09-26
KR20010092688A (en) 2001-10-26
KR20040063089A (en) 2004-07-12
CN1287213C (en) 2006-11-29
CN1519634A (en) 2004-08-11
KR100450922B1 (en) 2004-10-02
US6610997B2 (en) 2003-08-26
US20010022365A1 (en) 2001-09-20
CN1161647C (en) 2004-08-11
KR100484343B1 (en) 2005-04-22

Similar Documents

Publication Publication Date Title
US6809338B2 (en) Electro-optical device
US6850292B1 (en) Electric-optic device, method of fabricating the same, and electronic apparatus
US8525960B2 (en) Electro-optical device
TWI291058B (en) Electro-optical device, electronic equipment substrate for electro-optical device, method of manufacturing substrate for electro-optical device, and light shielding film
JP3424234B2 (en) Electro-optical device and method of manufacturing the same
US7075109B2 (en) Electro-optical having a configuration to prevent generation and trapping of material residues
JP2001356709A (en) Optoelectronic device and method for manufacturing the same
US7202927B2 (en) Electrooptic device comprising a silicon nitride film formed directly on the data lines and not existent on a side face of contact holes
JP4599655B2 (en) Electro-optical device and projector
JP2020060636A (en) Electro-optic device, electronic apparatus
JP3501125B2 (en) Electro-optical device
JP3931547B2 (en) Electro-optical device and manufacturing method thereof
JP2000275680A (en) Reflection type liquid crystal display device and display panel using the same
US7215388B2 (en) Electro-optical device and method of manufacturing the same comprising an interlayer insulating film having a multi-layered structure
KR20040055688A (en) Manufacturing method for electrooptical substrate, electrooptical apparatus, and manufacturing method for same
JP2003280020A (en) Electrooptical device, method for manufacturing the same, and electronic apparatus
JP3979010B2 (en) Electro-optical device and projector
JP4147747B2 (en) Electro-optical device and projector
JP4496600B2 (en) Electro-optical device and projector
JP4023107B2 (en) Electro-optical device and electronic apparatus including the same
JP2005148387A (en) Method for manufacturing electrooptical device, electrooptical device, and electronic equipment provided with the same
JP3849342B2 (en) Electro-optical device manufacturing method, electro-optical device, and projector
JP3454252B2 (en) Electro-optical device
JP2002094072A (en) Element substrate for electro-optical device and manufacturing method therefor, electro-optical device and manufacturing method therefor and electronic equipment
JP4284950B2 (en) Electro-optical device, manufacturing method thereof, and electronic apparatus

Legal Events

Date Code Title Description
STCF Information on status: patent grant

Free format text: PATENTED CASE

FPAY Fee payment

Year of fee payment: 4

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12

AS Assignment

Owner name: 138 EAST LCD ADVANCEMENTS LIMITED, IRELAND

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SEIKO EPSON CORPORATION;REEL/FRAME:050197/0212

Effective date: 20190725