US4568578A - Process for the producing of indium oxide-tin oxide layers and the resultant coated substrates - Google Patents

Process for the producing of indium oxide-tin oxide layers and the resultant coated substrates Download PDF

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Publication number
US4568578A
US4568578A US06/569,885 US56988584A US4568578A US 4568578 A US4568578 A US 4568578A US 56988584 A US56988584 A US 56988584A US 4568578 A US4568578 A US 4568578A
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United States
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sup
substrate
tin
layer
solution
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US06/569,885
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English (en)
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Nanning J. Arfsten
Reinhard Kaufmann
Helmut Dislich
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Schott AG
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Schott Glaswerke AG
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Assigned to SCHOTT GLASWERKE HATTENBERGSTRASSE 10, D-6500 MAINZ GERMANY reassignment SCHOTT GLASWERKE HATTENBERGSTRASSE 10, D-6500 MAINZ GERMANY ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ARFSTEN, NANNING J., DISLICH, HELMUT, KAUFMANN, REINHARD
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/27—Oxides by oxidation of a coating previously applied
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/23—Mixtures
    • C03C2217/231—In2O3/SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/111—Deposition methods from solutions or suspensions by dipping, immersion
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/322—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/324—De-oxidation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • This invention relates to the production of transparent, electrically conductive and infrared-radiation-reflecting indium-tin-oxide layers (ITO layers) using the conventional dipping method.
  • ITO layers indium-tin-oxide layers
  • glass panes are dipped into a solution of hydrolyzable compounds of indium and tin, drawn uniformly out into a steam-containing atmosphere, dried, and hardened under the effect of a reducing gas atmosphere.
  • ITO layers are of considerable interest on account of the combination of properties they provide, i.e., high electric conductivity, high IR reflection with high solar energy transmission, high transmission in the visible range, ready etching capability using acids, good environmental stability, good scratch resistance, and good adhesion to glass, even in comparison with other layers such as tin oxide, cadmium stannate and thin copper, silver or gold layers between dielectric layers. These layers are inferior to ITO layers with respect to their combination of properties.
  • ITO layers on thin glass, produced by the vacuum method, have become quite extensively popular in the display field (LCD and others).
  • the combination of high solar energy transmission with simultaneously high IR reflection of long wavelength IR radiation is a very desirable property in connection with coatings in the glazing of buildings (insulating glass windows). These properties allow the window to become a passive solar collector.
  • High transmission is desired from the viewpoint of light technology, and almost ideal requirement profiles are met by ITO layers. Such layers do not exist commercially.
  • Other fields of application include solar cells (ITO, CdS, CuS), photocells (ITO, PbS), optical filters, electric heating, antifogging devices and methods, and many others. Those skilled in the art are familiar with the great significance of ITO layers, especially when considering environmental stability as well.
  • ITO layers are produced by vacuum methods, including sputtering.
  • the expenditure in apparatus is considerable, and the application rate is relatively slow. Therefore, thus far, there exists no large area surface coating method extending over several square meters.
  • ITO layers are also applied by the spraying and CVD techniques. Layers applied in this way do not exhibit the adequate uniformity required for a window. This is essentially due to the occurrence of various interference colors because of varying thickness. Heretofore, this process has not enabled the production of large-surface coatings, either.
  • Highly homogeneous layers of unifom thickness can be applied to large glass panes by the dipping method.
  • the pane is dipped into a solution of hydrolyzable metal compounds, such as, for example, silicic acid esters in alcohol, drawn out at uniform speed, then air-dried, and hardened at 400°-500° C. and thus transformed into a transparent SiO 2 layer.
  • hydrolyzable metal compounds such as, for example, silicic acid esters in alcohol
  • ITO layers produced by the dipping method show long-term stability against weathering, even if one of the two layers faces the outside.
  • a substantial advance is provided by this invention in that excellent properties, such as the highest transparency (up to 96% at 550 nm) and IR reflection of >80% (up to 85% at 9.5 ⁇ m), can be achieved using layers that are thinner by 100 nm than layers produced according to the state of the art.
  • the invention encompasses, on the one hand, the production of ITO dipping solutions and the layers they enable, as well as the manufacture of dipping solutions for the production of barrier layers affording at the same time an essential improvement in the layer properties of the subsequently applied ITO coating with respect to layer hardness and long-term stability, and, on the other hand, encompasses the associated process parameters to be maintained to obtain defined layer properties.
  • a barrier layer to prevent diffusion of alkali metal ions from the basic glass into the subsequently applied ITO layer.
  • an SiO 2 layer could be applied by the dipping method for this purpose, the lifetime of the ITO layers applied thereto is rather limited.
  • a good mechanical and chemical durability of the ITO layer is obtained by producing mixed-oxide barrier layers of SiO 2 with oxides of tantalum, zirconium, titanium, aluminum, and tin.
  • the invention achieves, using these mixed oxide layers, a marked improvement in all important properties of the ITO layer, especially IR reflection.
  • charge carrier concentrations of 5.6 ⁇ 10 20 [cm -3 ], specific conductivities of 5,800 [ ⁇ -1 cm -1 ], and mobilities of 60 [cm 2 V -1 sec -1 ] are obtained, corresponding to the best layers manufactured by other methods.
  • the mixed-oxide layers are obtained by dissolving hydrolyzable compounds of silicon and one or more of tantalum, zirconium, titanium, aluminum, and/or tin, dipping the glass pane into this solution, e.g., for 0.5-5 minutes at a temperature of 20°-30° C., drawing the pane uniformly out into a steam-containing atmosphere, drying the pane, and hardening it at an elevated temperature of up to 550° C., usually 400°-450° C.
  • Suitable hydrolyzable compounds include salts of organic or inorganic acids or alkoxides of all aforementioned elements, for example, acetates, nitrates, halogenides, C 1 -C 6 -alkoxides, e.g., of methanol or ethanol.
  • the silicon compound will be a silicic acid C 1 -C 4 -alkyl ester, e.g., a methyl or ethyl ester.
  • the choice of the composition is extensively arbitrary; it depends on the case under consideration and can be optimized in a simple series of routine tests by varying the usual parameters such as concentration, identity of the salt or salts used and/or of the metal(s) used.
  • the barrier layer solution further contains 0.05-12 wt% of water, preferably distilled water, rest alcohol, preferably ethanol, and 0.1-7 wt% of an acid preferably concentrated acetic acid.
  • the mixture is preferably prepared by adding all ingredients together except for the hydrolyzable salt of Ti, Zr, Al, Sn and/or Ta and allowed to stand at room temperature for 6-72 hours. The order of mixing preferably is: silicon compound, part of the ethanol, the water and then the acid. After the standing period, the other metal salt is added followed by the remaining ethanol.
  • the initial substrate should be cleaned conventionally prior to the initial dipping step. After the latter, it is simply lifted out of the solution at a uniform rate (e.g., 0.1-2 cm/sec) into an atmosphere containing 1-20 g/m 3 of steam at a temperature of 20°-30° C. for a period of time of 0.5-5 min.
  • a uniform rate e.g. 0.1-2 cm/sec
  • the dipping process in the production of the barrier layers involves a maximally careful, adapted climatization with respect to temperature and atmospheric humidity as described above. Besides achieving improved properties, this also affords an advantage from the viewpoint of economy in that the high-temperature stage need only be passed through once in the latter preferred embodiment.
  • This procedure is novel, and the effect surprising, because a person skilled in the art would have to harbor considerable doubts against dipping the substrate into the ITO solution because of the known instability of not-completely-hardened layers--i.e., layers which are not as yet purely oxidic--due to the possibility of partial dissolution into and contamination of the ITO solution.
  • the ITO solution must have long-term stability because of the high costs of indium.
  • hydrolyzable compounds of indium and tin such as salts of organic or inorganic acids or alkoxides, as described above, e.g., acetates, halogenides, nitrates, methoxides, ethoxides or propoxides, are dissolved in solvents or solvent mixtures, e.g., alcohols especially methanol, ethanol, propanol, optionally with the addition of dilute acetic acid.
  • solvents or solvent mixtures e.g., alcohols especially methanol, ethanol, propanol, optionally with the addition of dilute acetic acid.
  • solvents or solvent mixtures e.g., alcohols especially methanol, ethanol, propanol
  • the indium-tin ratio is preferably 5.2-9.8 atom-% Sn in In 2 O 3 -SnO 2 , to achieve a desirable high conductivity and IR reflection.
  • concentration of In salt is usually 5-20%, and of Sn salt as above.
  • the solution can also contain, besides the solvent, additives such as, for instance acetic acid, acetyl acetone and other chelating agents.
  • the substrate temperature upon dipping into the ITO solution is 20°-30° C.
  • the solution temperature is usually 20°-30° C.
  • the optional drying step is conducted for 1-15 minutes.
  • the reducing atmosphere also contains trace amounts of steam.
  • the gas can comprise nitrogen, hydrogen, oxygen and trace amounts of water.
  • furnace materials which are catalytically inactive for O 2 and H 2 at the heating temperatures, e.g., silica glass (quartz), and, e.g., for the latter to heat the coated glass pane through the silica glass with shortwave radiators.
  • silica glass quartz
  • the temperature of the furnace wall material remains considerably below the temperature of the coated glass pane.
  • the ITO pane is left in the reducing gas atmosphere down to 200° C., preferably.
  • substrates are applicable for this invention, e.g., comprising glass, glass ceramics, ceramics, and metals.
  • layers are obtained having IR reflections of up to 85% at 9.5 ⁇ m, transmission in the visible range at 550 nm of up to 96%, and surface resistances of below 20 ⁇ / ⁇ .
  • the specific conductivity of such layers lies at 1,000-5,800 [ ⁇ -1 cm -1 ], the charge concentration is 3 to 6 ⁇ 10 20 [m -3 ], and the mobility values range at 10-60 [cm 2 V -1 sec -1 ].
  • the respectively desired layer quality for example as mentioned above for windows or displays, can be regulated without altering the solution or the process, i.e., by way of the layer thickness.
  • layer thickness can be altered as a function of the drawing rate during emergence from the dipping bath. This simple possibility for variation presents a considerable advantage of the process according to this invention. In general, thinner layers are of higher quality. Barrier layer thicknesses generally are 20-200 nm and ITO layer thicknesses generally are 20-200 nm.
  • coated substrates of this invention include window panes with an indium oxide-tin oxide layer and having the following properties:
  • a carefully cleaned float glass pane is dipped (a) into a solution according to Example 1, or (b) into a solution according to Example 2, and drawn out at a rate of 0.6 cm/sec into an atmosphere which contains steam at >7 g/m 3 .
  • a brief drying step is conducted at 250° C., and the pane stemming from (a) is heated for 5 minutes at 450° C., and the pane stemming from (b) is heated for 5 minutes to 250° C. Both layers are coated with ITO in accordance with Example 6.
  • the ITO layer exhibits the following typical properties:
  • Example 6 The process of Example 6 is analogously conducted, except that the drawing rate is 0.3 cm/sec.
  • the ITO layer has the following properties:

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemically Coating (AREA)
US06/569,885 1983-01-11 1984-01-11 Process for the producing of indium oxide-tin oxide layers and the resultant coated substrates Expired - Fee Related US4568578A (en)

Applications Claiming Priority (2)

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DE3300589 1983-01-11
DE19833300589 DE3300589A1 (de) 1983-01-11 1983-01-11 Verfahren zur herstellung von indiumoxid-zinnoxid-schichten

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JPH0160548B2 (enrdf_load_stackoverflow) 1989-12-22
JPS59213623A (ja) 1984-12-03
DE3300589C2 (enrdf_load_stackoverflow) 1988-09-22
EP0114282A1 (de) 1984-08-01
DE3300589A1 (de) 1984-07-12
EP0114282B1 (de) 1986-09-03

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