US20200407858A1 - Titanium base material, method for producing titanium base material, electrode for water electrolysis, and water electrolysis device - Google Patents

Titanium base material, method for producing titanium base material, electrode for water electrolysis, and water electrolysis device Download PDF

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US20200407858A1
US20200407858A1 US16/979,002 US201916979002A US2020407858A1 US 20200407858 A1 US20200407858 A1 US 20200407858A1 US 201916979002 A US201916979002 A US 201916979002A US 2020407858 A1 US2020407858 A1 US 2020407858A1
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base material
titanium
titanium oxide
oxide film
water electrolysis
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Yosuke Sano
Shinichi Ohmori
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
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    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/075—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
    • C25B11/077—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound the compound being a non-noble metal oxide
    • C25B11/0775—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound the compound being a non-noble metal oxide of the rutile type
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    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Definitions

  • the present invention relates to a titanium base material excellent in conductivity and corrosion resistance, a method for producing a titanium base material, an electrode for water electrolysis formed of the titanium base material, and a water electrolysis device.
  • titanium base materials formed of titanium or a titanium alloy are used in current-carrying members such as electrodes, in particular, in applications which require oxidation resistance (corrosion resistance).
  • Patent Document 2 proposes forming a noble metal coated film of gold, platinum, or the like on the surface of a base material formed of aluminum, nickel, or titanium to improve corrosion resistance while ensuring conductivity.
  • Patent Document 3 proposes a titanium material in which an oxide film, in which an X-ray diffraction peak of TiO 2 is not observed, is formed on the surface of titanium or a titanium alloy.
  • Patent Document 4 proposes a titanium material having a titanium oxide layer having an oxygen/titanium atomic concentration ratio (0/Ti) of 0.3 or more and 1.7 or less on the surface of a titanium material formed of pure titanium or a titanium alloy, in which an alloy layer including at least one type of noble metal selected from Au, Pt, and Pd is formed on this titanium oxide layer.
  • Patent Document 2 in a case where a noble metal film is formed, the cost increases significantly and wide use is not possible.
  • Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) may be used as examples of a material having excellent conductivity and corrosion resistance.
  • This Magneli phase titanium oxide has the same corrosion resistance as TiO 2 and the same conductivity as graphite.
  • the Magneli phase titanium oxide is produced by a thermal reduction method for reducing TiO 2 at a high temperature to be provided in powder form.
  • the present invention is made against the background of the above circumstances and has an object of providing a titanium base material with particularly excellent conductivity and corrosion resistance and able to be used even in a harsh corrosive environment, a method for producing a titanium base material, an electrode for water electrolysis formed of this titanium base material, and a water electrolysis device.
  • a titanium base material of the present invention includes a base material body formed of titanium or a titanium alloy, in which a Magneli phase titanium oxide film formed of a Magneli phase titanium oxide represented by a chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed on a surface of the base material body.
  • the Magneli phase titanium oxide film formed of a Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed on a surface of the base material body formed of titanium or a titanium alloy, the conductivity and corrosion resistance are particularly excellent.
  • a current-carrying member such as an electrode even in a harsh corrosive environment such as a high potential, oxygenated, strongly acidic atmosphere.
  • the Magneli phase titanium oxide film contains at least one or both of Ti 4 O 7 and Ti 5 O 9 .
  • the Magneli phase titanium oxide film contains at least one or both of Ti 4 O 7 and Ti 5 O 9 , which are particularly excellent in conductivity and corrosion resistance, it is particularly suitable as a current-carrying member used in a harsh corrosive environment such as a high potential, oxygenated, strongly acidic atmosphere.
  • the Magneli phase titanium oxide film has a film thickness in a range of 0.1 ⁇ m or more and 30 ⁇ m or less.
  • the film thickness of the Magneli phase titanium oxide film is 0.1 ⁇ m or more, it is possible to secure a sufficient corrosion resistance.
  • the film thickness of the Magneli phase titanium oxide film is 30 ⁇ m or less, it is possible to secure sufficient conductivity as a titanium base material.
  • the base material body is a porous body having a porosity in a range of 30% or more and 97% or less.
  • the base material body formed of titanium or a titanium alloy is a porous body and the porosity thereof is set to 30% or more, it is possible to make the specific surface area large and to promote the reaction on the surface of the titanium base material. In addition, it is possible to efficiently discharge the gas generated by the reaction.
  • the porosity of the base material body is 97% or less, it is possible to secure the strength of the base material body.
  • the Magneli phase Ti oxide film has a porous structure.
  • the specific surface area of the electrode is further improved and it becomes possible to provide a wide electrode reaction field.
  • the method for manufacturing a titanium base material of the present invention is the method for manufacturing the titanium base material described above, the method including a TiO 2 film forming step of forming a TiO 2 film on a surface of a base material body formed of titanium or a titanium alloy, and a reduction process step of reducing the TiO 2 film formed on the surface of the base material body by a microwave plasma reduction method to obtain a Magneli phase titanium oxide film formed of a Magneli phase titanium oxide represented by a chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10), in which the reduction process step is carried out under conditions of a substrate temperature of 400° C. or lower and a process time of 15 minutes or less.
  • a TiO 2 film forming step of forming a TiO 2 film on a surface of the base material body formed of titanium or a titanium alloy, and a reduction process step of reducing the TiO 2 film by a microwave plasma reduction method to obtain a Magneli phase titanium oxide film are provided, it is possible to produce a titanium base material having a Magneli phase titanium oxide film formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2-1 (4 ⁇ n ⁇ 10).
  • the reduction process step is carried out under conditions where the substrate temperature is 400° C. or lower and the process time is 15 minutes or less, it is possible to suppress the diffusion of oxygen to the base material body side and suppress the deterioration of the properties of the base material body.
  • the electrode for water electrolysis of the present invention is formed of the titanium base material described above.
  • the electrode for water electrolysis having this configuration is formed of the titanium base material on which the Magneli phase titanium oxide film formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed, the conductivity and corrosion resistance are particularly excellent and it is possible to suppress deterioration due to oxidation and to greatly improve the service life.
  • the corrosion resistance is excellent, use is possible as a substitute for a noble metal electrode and it is possible to form the electrode for water electrolysis at low cost.
  • an electrolysis efficiency after 1,200 cycles is 90% or more of an initial value.
  • the water electrolysis device of the present invention is provided with the electrode for water electrolysis described above.
  • the electrode for water electrolysis formed of a titanium base material on which the Magneli phase titanium oxide film formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed is provided, it is possible to suppress deterioration of the electrode for water electrolysis due to oxidation during use and stable use for a long period of time becomes possible. In addition, it is not necessary to use the noble metal electrode and it is possible to significantly reduce the production cost of the water electrolysis device.
  • a titanium base material with particularly excellent conductivity and corrosion resistance and able to be used even in a harsh corrosive environment, a method for producing a titanium base material, an electrode for water electrolysis formed of this titanium base material, and a water electrolysis device.
  • FIG. 1 is an explanatory diagram showing an example of a titanium base material which is an embodiment of the present invention.
  • FIG. 2 is an enlarged schematic diagram of a surface layer portion of the titanium base material shown in FIG. 1 .
  • FIG. 3 is a flow chart showing an example of a method for producing the titanium base material shown in FIG. 1 .
  • FIG. 4 is an explanatory diagram showing production steps for producing the titanium base material shown in FIG. 1 .
  • FIG. 4( a ) shows a base material body preparing step S 01
  • FIG. 4( b ) shows a TiO 2 film forming step S 02
  • FIG. 4( c ) shows a reduction process step S 03 .
  • FIG. 5 is a schematic explanatory diagram of a water electrolysis device provided with an electrode for water electrolysis which is an embodiment of the present invention.
  • FIG. 6 is a graph showing XRD analysis results of Invention Example 2 and Comparative Example 1 in Examples.
  • FIG. 7 is an SEM image showing a result of observing a cross-section of the titanium base material of Invention Example 1 in the Examples.
  • FIG. 8 is an SEM image showing a result of observing a cross-section of the titanium base material of Invention Example 11 in the Examples.
  • a titanium base material 10 of the present embodiment is used as, for example, a current-carrying member such as a cathode electrode of a solid polymer electrolyte fuel cell (PEFC), an anode electrode of a water electrolysis device, and an electrode material for a lithium ion battery or a lithium ion capacitor.
  • a current-carrying member such as a cathode electrode of a solid polymer electrolyte fuel cell (PEFC), an anode electrode of a water electrolysis device, and an electrode material for a lithium ion battery or a lithium ion capacitor.
  • the titanium base material 10 of the present embodiment is provided with a base material body 11 formed of titanium or a titanium alloy, and a Magneli phase titanium oxide film 16 formed on the surface of the base material body 11 .
  • the base material body 11 is a porous body and is provided with a skeleton portion 12 having a three-dimensional network structure and a pore portion 13 surrounded by the skeleton portion 12 .
  • the base material body 11 has a porosity P in a range of 30% or more and 97% or less.
  • the porosity P of the base material body 11 is calculated by the following formula.
  • V Volume of base material body 11 (cm 3 )
  • the base material body 11 formed of this porous body is formed of, for example, a titanium sintered body obtained by sintering a titanium sintering raw material including titanium.
  • the pore portions 13 surrounded by the skeleton portion 12 are structured to communicate with each other and open toward the outside of the base material body 11 .
  • the Magneli phase titanium oxide film 16 is formed on the surface of the base material body 11 .
  • This Magneli phase titanium oxide film 16 is formed of a Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10).
  • the Magneli phase titanium oxide film 16 contains at least one or both of Ti 4 O 7 and Ti 5 O 9 . It is possible to identify the titanium oxide structure in the Magneli phase titanium oxide film 16 by an X-ray diffraction analysis (XRD) method.
  • XRD X-ray diffraction analysis
  • the XRD peaks of Ti 4 O 7 and Ti 5 O 9 in X-ray diffraction (XRD) are included and the sum of the maximum peak intensities of both is greater than the maximum peak intensity of the other Magneli phase titanium oxide (6 ⁇ n ⁇ 10).
  • the film thickness t of the Magneli phase titanium oxide film 16 is preferably set appropriately according to the properties required for the titanium base material 10 .
  • the lower limit of the film thickness t of the Magneli phase titanium oxide film 16 is set to 0.1 ⁇ m or more in order to sufficiently improve the corrosion resistance.
  • the upper limit of the film thickness t of the Magneli phase titanium oxide film 16 is set to 30 ⁇ m or less.
  • the lower limit of the film thickness t of the Magneli phase titanium oxide film 16 is preferably 0.2 ⁇ m or more, and more preferably 0.3 ⁇ m or more.
  • the upper limit of the film thickness t of the Magneli phase titanium oxide film 16 is preferably 5 ⁇ m or less, and more preferably 3 ⁇ m or less.
  • the Magneli phase titanium oxide film 16 has a nanometer or micrometer order porous structure in the film.
  • the base material body 11 formed of titanium and a titanium alloy shown in FIG. 4( a ) is prepared.
  • a porous titanium sintered body is prepared as the base material body 11 .
  • the base material body 11 formed of this porous titanium sintered body for example, by the following steps.
  • a sintering raw material including titanium is mixed with an organic binder, a foaming agent, a plasticizer, water and, as necessary, a surfactant to prepare a foamable slurry.
  • This foamable slurry is applied using a doctor blade (applying device) to form a sheet-shaped molded body.
  • This sheet-shaped molded body is heated to foam and obtain a foamed molded body. Then, the result is degreased and then sintered. Due to this, the base material body 11 formed of a porous titanium sintered body is produced.
  • Japanese Unexamined Patent Application, First Publication No. 2006-138005 Japanese Unexamined Patent Application, First Publication No. 2003-082405
  • a TiO 2 film 26 is formed on the surface of the base material body 11 .
  • This TiO 2 film forming step S 02 is carried out under a temperature condition of 100° C. or lower in order to suppress oxygen from diffusing to the base material body 11 side.
  • the lower limit value of temperature conditions is not limited; however, it is possible to efficiently perform the following plasma electrolytic oxidation process in a range of up to 0° C.
  • the TiO 2 film 26 is formed by a plasma electrolytic oxidation method in which a higher voltage than that of normal anodic oxidation is applied to generate an arc discharge on the surface of the base material to promote oxidation.
  • the plasma electrolytic oxidation process is carried out in an aqueous solution bath of K 3 PO 4 , Na 3 PO 4 , K 4 P 2 O 7 , Na 2 P 2 O 7 , or the like.
  • a film thickness t 0 of the TiO 2 film 26 is preferably in a range of 0.1 ⁇ m or more and 30 ⁇ m or less.
  • the TiO 2 film 26 is subjected to a reduction process using plasma generated by irradiating the gas with microwaves (microwave plasma reduction process), such that the TiO 2 film 26 is changed to the Magneli phase titanium oxide film 16 formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10), as shown in FIG. 4( c ) .
  • this reduction process step S 03 is carried out under conditions of a substrate temperature of 400° C. or lower and a process time of 15 minutes or less.
  • the film thickness t 0 of the TiO 2 film 26 becomes the film thickness t of the Magneli phase titanium oxide film 16 . Therefore, adjusting the film thickness t 0 of the TiO 2 film 26 in the TiO 2 film forming step S 02 makes it possible to control the film thickness t of the Magneli phase titanium oxide film 16 .
  • the titanium base material 10 is produced in which the Magneli phase titanium oxide film 16 formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed on the surface of the base material body 11 formed of titanium or a titanium alloy.
  • FIG. 5 shows a schematic diagram of the electrode for water electrolysis and the water electrolysis device according to the present embodiment.
  • the water electrolysis device of the present embodiment is a solid polymer electrolyte water decomposition device having high electrolysis efficiency and hydrogen purity at the time of production.
  • a water electrolysis device 30 of the present embodiment is provided with a water electrolysis cell 31 provided with an anode electrode 32 and a cathode electrode 33 which are arranged to face each other, and an ion permeable membrane 34 which is arranged between the anode electrode 32 and the cathode electrode 33 .
  • catalyst layers 35 and 36 are formed on both surfaces of the ion permeable membrane 34 (contact surface with the anode electrode 32 and contact surface with the cathode electrode 33 ), respectively.
  • the cathode electrode 33 the ion permeable membrane 34 , and the catalyst layers 35 and 36 , it is possible to use examples used in general solid polymer electrolyte water electrolysis devices of the related art.
  • the anode electrode 32 described above is used as the electrode for water electrolysis according to the present embodiment.
  • the anode electrode 32 (electrode for water electrolysis) is formed of the titanium base material 10 according to the present embodiment described above, and is provided with the base material body 11 formed of titanium or a titanium alloy and the Magneli phase titanium oxide film 16 formed on the surface of the base material body 11 .
  • the base material body 11 is a porous body, and has a structure provided with the skeleton portion 12 having a three-dimensional network structure and the pore portion 13 surrounded by the skeleton portion 12 .
  • the electrolysis efficiency after 1,200 cycles is preferably 90% or more with respect to the initial value.
  • water (H 2 O) is supplied from the side of the anode electrode 32 and the anode electrode 32 and the cathode electrode 33 are energized. By doing so, oxygen (O 2 ) generated by the electrolysis of water is discharged from the anode electrode 32 and hydrogen (H 2 ) is discharged from the cathode electrode 33 .
  • the anode electrode 32 As described above, water (liquid) and oxygen (gas) are circulated, thus, in order to stably circulate the liquid and gas, it is preferable to have a high porosity. In addition, since the anode electrode 32 is exposed to oxygen, there is a demand for excellent corrosion resistance. Therefore, the electrode for water electrolysis formed of the titanium base material 10 of the present embodiment is particularly suitable as the anode electrode 32 .
  • the Magneli phase titanium oxide film 16 formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10) is formed on the surface of the base material body 11 formed of titanium or a titanium alloy, the conductivity and corrosion resistance are particularly excellent.
  • a current-carrying member such as an electrode even in a harsh corrosive environment such as a high potential, oxygenated, strongly acidic atmosphere.
  • the Magneli phase titanium oxide film 16 contains, as the Magneli phase titanium oxide, at least one or both of Ti 4 O 7 and Ti 5 O 9 , which are particularly excellent in conductivity and corrosion resistance, it is particularly suitable as a current-carrying member used in a harsh corrosive environment such as a high potential, oxygenated, strongly acidic atmosphere.
  • the film thickness t of the Magneli phase titanium oxide film 16 is in a range of 0.1 ⁇ m or more and 30 ⁇ m or less, it is possible to improve the corrosion resistance and the conductivity in a well-balanced manner.
  • the base material body 11 formed of titanium or a titanium alloy is a porous body, and the porosity P thereof is set to 30% or more, the specific surface area becomes large and it is possible to promote a reaction on the surface of the titanium base material 10 . In addition, it is possible to efficiently discharge the gas generated by the reaction. Thus, the result is particularly suitable as an electrode member.
  • the porosity P of the base material body 11 formed of a porous body is 97% or less, it is possible to secure the strength of the base material body 11 .
  • the Magneli phase titanium oxide film 16 has a nanometer or micrometer order porous structure and it is possible to further improve the surface area of an electrode base material.
  • the method for producing the titanium base material 10 according to the present embodiment is provided with the base material body preparing step S 01 for preparing the base material body 11 formed of titanium or a titanium alloy, the TiO 2 film forming step S 02 of forming the TiO 2 film 26 on the surface of the base material body 11 , and the reduction process step S 03 of reducing the TiO 2 film 26 by a microwave plasma reduction method to obtain the Magneli phase titanium oxide film 16 formed of a Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10), it is possible to produce the titanium base material 10 having particularly excellent corrosion resistance and conductivity.
  • the TiO 2 film forming step S 02 is carried out at 100° C. or lower and the reduction process step S 03 is carried out under the condition that the substrate temperature is 400° C. or lower and the process time is 15 minutes or less, it is possible to suppress the diffusion of oxygen to the base material body 11 side and to suppress deterioration of the properties of the base material body 11 .
  • adjusting the film thickness t 0 of the TiO 2 film 26 formed in the TiO 2 film forming step S 02 makes it possible to accurately control the film thickness t of the Magneli phase titanium oxide film 16 .
  • the electrode for water electrolysis (anode electrode 32 ) of the present embodiment is formed of the titanium base material 10 described above, the conductivity and corrosion resistance are particularly excellent and it is possible to suppress deterioration due to oxidation and to greatly improve the service life. In addition, since corrosion resistance is excellent, use is possible as a substitute for the noble metal electrode, and it is possible to form an electrode for water electrolysis (anode electrode 32 ) at low cost.
  • the electrode for water electrolysis (anode electrode 32 ) of the present embodiment, in a voltammetry test in which one cycle is denoted by a holding time of 1 minute at 2.5 V and 1 minute at 0 V, in a case where the electrolysis efficiency after 1,200 cycles is 90% or more with respect to the initial value, deterioration of the electrode for water electrolysis during use is reliably suppressed and it is possible to reliably improve the service life.
  • the electrode for water electrolysis formed of the titanium base material 10 described above is used for the anode electrode 32 , even in a use environment exposed to oxygen gas, it is possible to suppress deterioration of the electrode for water electrolysis (anode electrode 32 ) due to oxidation and to use the electrode stably for a long period of time.
  • the corrosion resistance is excellent, it is not necessary to use a noble metal electrode, and it is possible to significantly reduce the production cost of the water electrolysis device 30 .
  • the titanium base material 10 is formed of the porous body having the structure described above, it is possible to favorably circulate water and oxygen gas.
  • the base material body 11 is described as a porous body, but the present invention is not limited thereto and the base material body 11 may be in the shape of a plate, wire, rod, tube, or the like.
  • the base material body 11 is described as being formed of a titanium sintered body, but, without being limited thereto, a mesh plate or the like may be used.
  • the Magneli phase titanium oxide film is described as containing at least one or both of Ti 4 O 7 and Ti 5 O 9 , but the present invention is not limited thereto, and the above may be formed of Magneli phase titanium oxide represented by the chemical formula Ti n O 2n-1 (4 ⁇ n ⁇ 10).
  • the film thickness of the Magneli phase titanium oxide film is in a range of 0.1 ⁇ m or more and 30 ⁇ m or less, but the present invention is not limited thereto and the film thickness of the Magneli phase titanium oxide film is preferably set as appropriate according to the properties required for the titanium base material.
  • a water electrolysis device (water electrolysis cell) having the structure shown in FIG. 5 is described as an example, but the present invention is not limited thereto and as long as an electrode for water electrolysis formed of the titanium base material according to the present embodiment is provided, the water electrolysis device (water electrolysis cell) may have another structure.
  • the base material body shown in Table 1 is prepared.
  • “titanium” was pure titanium having a purity of 99.9 mass % or more
  • “titanium alloy” was a titanium alloy having Ti-0.15 mass % Pd.
  • each prepared base material body was width 50 mm ⁇ length 60 mm ⁇ thickness 0.3 mm.
  • a TiO 2 film is formed on the surface of the base material body.
  • a plasma electrolytic oxidation process was carried out in an aqueous solution of K 3 PO 4 .
  • a high-density carbon plate was used as the cathode and the above was carried out under conditions of a temperature of 100° C. or lower, a voltage of 450 V, and a time of 0 to 300 minutes.
  • the film thickness of the TiO 2 film was set to the value shown in Table 1 by adjusting the time of the plasma electrolytic oxidation process.
  • the base material body on which the TiO 2 film was formed was charged into a microwave plasma reduction device and the inside of the device was decompressed to a vacuum (3.8 ⁇ 10 ⁇ 2 torr (5 Pa) or less) once. After that, hydrogen gas was introduced into the device to set the pressure to 30 Pa, and then irradiated with microwaves of 2.45 GHz. The reduction time was 0.1 to 15 minutes.
  • Comparative Examples 1, 3, and 7 a reduction process was not carried out.
  • the reduction process was performed by a thermal reduction method.
  • a titanium base material which had a titanium oxide film (Magneli phase titanium oxide film in the Invention Examples) formed on the surface of a base material body formed of titanium or a titanium alloy.
  • a titanium oxide film Magnetic phase titanium oxide film in the Invention Examples
  • the identification of the titanium oxide film, and the thickness, the conductivity, and the corrosion resistance of the titanium oxide film were evaluated as follows.
  • the titanium oxide of the titanium oxide film was identified by the X-ray diffraction analysis (XRD) method.
  • the acceleration voltage was set to 30 keV and a Cu Ka line of 8 keV was used for measurement.
  • the presence/absence of Ti 4 O 7 and Ti 5 O 9 was confirmed by the presence/absence of peaks near 21°, 26°, and 30° (Ti 4 O 7 ), 22°, 26°, and 29° (Ti 5 O 9 ), respectively.
  • the evaluation results are shown in Table 2.
  • FIG. 6 shows the XRD analysis results of Invention Example 2 and Comparative Example 1.
  • the sample after film formation is filled with resin and cut in the direction perpendicular to the thickness direction of the titanium oxide film to expose a cross-section thereof.
  • This cross-section was observed by SEM, and five points were equally taken from one end to the other end of the titanium oxide film layer in the SEM image observed at a magnification of 5,000 times and the thicknesses were calculated for each point. Then, the thickness of the titanium oxide film was determined from the average value of the measured 5 points.
  • FIG. 7 shows a cross-sectional observation result (SEM image) of the titanium base material of Invention Example 1 in which the base material body is a plate material.
  • FIG. 8 shows a cross-sectional observation result (SEM image) of the titanium base material of Invention Example 11 in which the base material body is a porous body.
  • Cyclic voltammetry measurement was performed in a cell with a radius of 4 cm filled with 1 M sulfuric acid, with the created titanium base material prepared as the working electrode and the coiled Pt wire as the counter electrode. The sweep was repeated between 0-2V for the Ag/AgCl electrode used as the reference electrode. Cyclic voltammetry was measured for 1,000 cycles, and when no change was seen in the CV waveform, the evaluation was “A (pass)”, and when a change was observed, the evaluation was “B (not possible)”. The evaluation results are shown in Table 2.
  • Comparative Example 6 in which the microwave plasma reduction process was carried out on the base material body after plasma electrolytic oxidation under conditions of a temperature of 650° C. for a process time of 30 minutes, the process temperature was high and the process time was long, thus, it was not possible to obtain the desired Magneli phase titanium oxide.
  • Comparative Examples 4 and 5 the deterioration of the base material due to oxygen diffusion into the Ti base material body was also observed, although only slightly, thus, evaluation of the conductivity and corrosion resistance was not carried out.
  • Invention Examples 1 to 11 in which the Magneli phase titanium oxide film was formed were excellent in conductivity and corrosion resistance.
  • FIGS. 7 and 8 in the titanium base materials of Invention Example 1 and Invention Example 11, it was confirmed that the Magneli phase titanium oxide films had porous structures.
  • FIG. 8 it was confirmed that the Magneli phase titanium oxide film was formed relatively uniformly on the surface of the base material body even in a case where the base material body was formed of a porous body.
  • a titanium base material (Invention Example 11) on which a Magneli phase titanium oxide film was formed and a titanium base material (Comparative Example 7) on which a titanium oxide film (insulating titanium oxide film) which was not a Magneli phase titanium oxide film was formed were each used as an anode electrode, a solid polymer water electrolysis cell (area 4 cm ⁇ 4 cm) having the structure shown in FIG. 5 was formed and set as Invention Example 101 and Comparative Example 101.
  • Comparative Example 102 a titanium base material on which a titanium oxide film was not formed on the surface of the base material body formed of a porous body was used as the anode electrode.
  • Table 3 shows the ratio of the current density after each cycle with respect to the initial value, with the current density at the tenth cycle as the initial value and using this initial value as a reference value (1.0).
  • Comparative Example 101 in which the titanium base material (Comparative Example 7) on which a titanium oxide film (insulating titanium oxide film) which was not a Magneli phase titanium oxide film was formed was used as the anode electrode, the current density at the initial stage was very low at 0.1 A/cm 2 or less. For this reason, the voltammetry test was not carried out.
  • Comparative Example 102 in which a titanium base material not having a titanium oxide film formed on the surface of the base material body formed of a porous body was used as the anode electrode, the current density was 0.65 of the initial value after 400 cycles and 0.59 of the initial value after 1,200 cycles. It is presumed that the anode electrode (titanium base material) was oxidized and deteriorated.
  • Invention Example 101 in which the titanium base material on which the Magneli phase titanium oxide film was formed (Invention Example 11) was used as the anode electrode, the current density was 0.97 of the initial value after 400 cycles, 1.05 of the initial value after 800 cycles, and 0.93 of the initial value after 1,200 cycles, and did not change significantly from the initial value even if the number of cycles increased. It is presumed that the deterioration of the anode electrode (titanium base material) due to oxidation was suppressed.
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