US20140049122A1 - Electrodynamic actuator and electrodynamic excitation device - Google Patents

Electrodynamic actuator and electrodynamic excitation device Download PDF

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Publication number
US20140049122A1
US20140049122A1 US14/060,969 US201314060969A US2014049122A1 US 20140049122 A1 US20140049122 A1 US 20140049122A1 US 201314060969 A US201314060969 A US 201314060969A US 2014049122 A1 US2014049122 A1 US 2014049122A1
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Prior art keywords
axis
actuator
fixed part
movable
movable part
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Abandoned
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US14/060,969
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English (en)
Inventor
Sigeru Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Keisokuki KK
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Kokusai Keisokuki KK
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Assigned to KOKUSAI KEISOKUKI KABUSHIKI KAISHA reassignment KOKUSAI KEISOKUKI KABUSHIKI KAISHA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MATSUMOTO, SIGERU
Publication of US20140049122A1 publication Critical patent/US20140049122A1/en
Priority to US16/516,590 priority Critical patent/US11289991B2/en
Priority to US17/672,344 priority patent/US11824416B2/en
Priority to US18/377,625 priority patent/US20240055968A1/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • G01M7/027—Specimen mounting arrangements, e.g. table head adapters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • G01M7/06—Multidirectional test stands
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/12—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with armatures moving in alternate directions by alternate energisation of two coil systems
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters

Definitions

  • the present invention relates to an electrodynamic actuator and an electrodynamic excitation device employing the electrodynamic actuator.
  • the biaxial slider 240 ( 340 , 440 ) is configured by coupling a pair of linear guides disposed such that movable axes thereof are perpendicular to each other, via an intermediate stage 245 ( 345 , 445 ).
  • one electrodynamic actuator is able to drive the excitation table 100 without being strongly affected by driving of the excitation table 100 by the other electrodynamic actuators.
  • a movable part 230 is supported by a fixed part 222 only at a tip portion of a slender bar 234 protruding in a drive direction from one end off a body part 232 . Therefore, the body part 232 of the movable part 230 is not supported at a high degree of rigidity in regard to the direction perpendicular to the drive direction, and therefore is easily vibrated in non-drive directions. For this reason, there is a case where crosstalk is caused between the drive axes due to vibrations of the movable part 230 in the non-drive directions and thereby the accuracy of excitation deteriorates.
  • the present invention is advantageous in that it provides an electrodynamic actuator whose movable part is hard to vibrate in the non-derive directions, and an electrodynamic excitation device configured to have an excellent accuracy of excitation by using such an electrodynamic actuator.
  • a linear actuator comprising: a base; a fixed part support mechanism attached to the base; a fixed part elastically supported by the fixed part support mechanism; and a movable part driven to reciprocate in a predetermined drive direction with respect to the fixed part.
  • the fixed part support mechanism comprises: a movable block attached to the fixed part; a linear guide that couples the movable block with the base to be slidable in the predetermined drive direction; and an elastic member that is disposed between the base and the movable block and prevents transmission of a high frequency component of vibration in the predetermined drive direction.
  • the elastic member may comprise an air spring.
  • the linear actuator may further comprise a fixing block fixed to the base.
  • at least one of the linear guide and the elastic member may be attached to the base via the fixing block.
  • the movable block may be provided as a pair of movable blocks.
  • the pair of movable blocks may be attached to both side surfaces of the fixed part to sandwich an axis of the fixed part therebetween.
  • the linear actuator may further comprise a plurality of movable part support mechanisms that support the movable part from a lateral side to enable the movable part to reciprocate in an axial direction of the fixed part.
  • each of the plurality of movable part support mechanisms may comprise: a rail attached to a side surface of the movable part to extend in the predetermined drive direction; and a runner block attached to the fixed part to engage with the rail.
  • the plurality of movable part support mechanisms may be arranged to have approximately constant intervals therebetween around an axis of the fixed part.
  • the plurality of movable part support mechanisms may be two pairs of movable part support mechanisms.
  • the movable part may be disposed to be sandwiched between the two pairs of movable part support mechanisms in two directions which are perpendicular to each other.
  • the linear actuator may be horizontally disposed in a state where the axis of the fixed part is oriented in a horizontal direction.
  • one of the plurality of movable part support mechanisms may be disposed under the axis of the fixed part.
  • the movable part may comprise a rod extending along the axis of the fixed part to protrude from one end of the movable part.
  • the fixed part may comprise a bearing which supports the rod to be movable in the axial direction of the fixed part.
  • an excitation device comprising: at least one linear actuator described above; and a vibration table coupled to the movable part of the at least one linear actuator.
  • the at least one linear actuator may comprise two linear actuators.
  • one of the two linear actuators may be a first actuator having a driving axis in a first direction
  • the other of the two linear actuators may be a second actuator having a driving axis in a second direction perpendicular to the first direction.
  • the excitation device may further comprise: a first slider that couples the vibration table with the first actuator to be slidable in the second direction; and a second slider that couples the vibration table with the second actuator to be slidable in the first direction.
  • the excitation device may further comprise: a third actuator having a driving axis in a third direction which is perpendicular to the first direction and the second direction; and a third slider that couples the vibration table with the third actuator to be slidable in the first direction and the second direction.
  • the first slider may couple the vibration table with the first actuator to be slidable in the second direction and the third direction
  • the second slider may couple the vibration table with the second actuator to be slidable in the first direction and the third direction.
  • FIG. 1 is a front view of an electrodynamic excitation device according to a first embodiment of the invention.
  • FIG. 2 is a plan view of the electrodynamic excitation device according to the first embodiment of the invention.
  • FIG. 3 is a block diagram of a drive system of the electrodynamic excitation device according to the first embodiment of the invention.
  • FIG. 4 is a front view of a main body of a Z-axis actuator according to the first embodiment of the invention.
  • FIG. 5 is a plan view of the main body of the Z-axis actuator according to the first embodiment of the invention.
  • FIG. 6 is a vertical cross section of the main body of the Z-axis actuator according to the first embodiment of the invention.
  • FIG. 7 is an enlarged plan view illustrating a portion around a vibration table of the Z-axis actuator according to the first embodiment of the invention.
  • FIG. 8 is a cross section of a linear guide used in the electrodynamic excitation device according to the first embodiment of the invention.
  • FIG. 9 is a cross section taken by a line I-I in FIG. 8 .
  • FIG. 10 is a front view of an electrodynamic excitation device according to a second embodiment of the invention.
  • FIG. 11 is a plan view of the electrodynamic excitation device according to the second embodiment of the invention.
  • FIG. 12 is a side view of the electrodynamic excitation device according to the second embodiment of the invention.
  • FIGS. 1 and 2 are a front view and a plan view of the excitation device 1 , respectively.
  • FIG. 3 is a block diagram illustrating a general configuration of a drive system of the excitation device 1 .
  • the left and right direction in FIG. 1 is defined as a X-axis direction (the rightward direction is a positive direction of X-axis), a direction perpendicular to the paper face of FIG.
  • Y-axis direction the direction from the front side to the back side of the paper face of FIG. 1 is a positive direction of Y-axis
  • an up and down direction in FIG. 1 is defined as a Z-axis direction (the upward direction is a positive direction of Z-axis).
  • the Z-axis direction is a vertical direction
  • each of the X-axis direction and the Y-axis direction is a horizontal direction.
  • the excitation device 1 includes a vibration table 400 to which a test piece (not shown) is attached, three actuators (an X-axis actuator 100 , a Y-axis actuator 200 and a Z-axis actuator 300 ) which vibrate the vibration table 400 in X-axis, Y-axis and Z-axis directions, respectively, and a device base 50 which supports the actuators 100 , 200 and 300 .
  • the actuators 100 , 200 and 300 are electrodynamic linear motion actuators each having a voice coil motor, and respectively include main bodies 101 , 201 and 301 , and covers 103 , 203 and 303 covering movable parts (described later) protruding from the respective main bodies 101 , 201 and 301 .
  • the vibration table 400 is coupled to the actuators 100 , 200 and 300 via respective biaxial sliders (a YZ slider 160 , a ZX slider 260 and a XY slider 360 ).
  • the excitation device 1 is able to vibrate the test piece attached to the vibration table 400 in the three axes directions which are perpendicular to each other, by driving the vibration table 400 with the actuators 100 , 200 and 300 .
  • the device base 50 is formed such that horizontally arranged bottom and top plates and 56 are coupled to each other with a plurality of wall plates 58 .
  • the actuators 100 , 200 and 300 are fixed to the top plate 56 of the device base 50 with a pair of fixing blocks 110 , a pair of fixing blocks 210 and a pair of fixing blocks 310 , respectively.
  • An opening 57 is formed in the top plate 56 , and the lower portion of the Z-axis actuator 300 is accommodated in the device base 50 via the opening 57 .
  • the excitation device 1 is formed to have a low height.
  • a plurality of antivibration mounts 52 are attached to the lower surface of the bottom plate 54 .
  • the drive system of the excitation device 1 includes a control unit 10 which totally controls operation of the excitation device 1 , a measurement unit 20 which measures vibration of the vibration table 400 , a power source unit 30 which supplies electric power to the control unit 10 , and an input unit 40 which receives a data input from a user or an external device.
  • the measurement unit 20 includes a triaxial vibration pickup 21 attached to the vibration table 400 .
  • the measurement unit 20 amplifies a signal (e.g., a speed signal) outputted by the triaxial vibration pickup 21 to convert the signal to a digital signal, and transmits the digital signal to the control unit 10 .
  • the triaxial vibration pickup 21 detects the vibrations in the X-axis, Y-axis and Z-axis directions of the vibration table 400 independently. Based on an excitation waveform inputted from the input unit 40 and the signal from the measurement unit 20 , the control unit 10 is able to vibrate the vibration table 400 at desired amplitude and frequency by controlling the magnitude and the frequency of AC currents to be inputted to drive coils (described later) of the actuators 100 , 200 and 300 . Furthermore, based on the signal of the triaxial vibration pickup 21 , the measurement unit 20 calculates various parameters (e.g., speed, acceleration, amplitude, power spectrum) indicating a vibrating state of the vibration table 40 , and transmits the parameters to the control unit 10 .
  • various parameters e.g., speed, acceleration, amplitude, power spectrum
  • each of the X-axis actuator 100 and the Y-axis actuator 200 has the same configuration as that of the Z-axis actuator 300 , except that an air spring is not provided in the Z-axis actuator 300 , the Z-axis actuator 300 is explained in detail as a representative example of the actuators.
  • FIGS. 4 , 5 and 6 are a front view, a plan view and a vertical cross section of the main body 301 of the Z-axis actuator 300 .
  • the main body 301 includes a fixed part 320 having a cylindrical body 322 , and a movable part 350 accommodated in a cylinder of the cylindrical body 322 .
  • the movable part 350 is provided to be movable in the Z-axis direction (the up and down direction in FIGS. 4 and 6 ) with respect to the fixed part 320 .
  • the movable part 350 includes a cylindrical movable frame 356 , and a drive coil 352 disposed to be substantially coaxial with the movable frame 356 .
  • the drive coil 352 is attached to a lower end of the movable frame 356 via a drive coil holding member 351 .
  • the movable frame 356 is configured such that an upper portion thereof is formed in a shape of a cylinder and a lower portion thereof is formed in a shape of a frustum cone whose side face is gently inclined so that the outer diameter becomes larger toward the lower side.
  • the movable frame 356 includes a rod 356 a extending along the center axis, a top plate 356 b disposed to be perpendicular to the center axis, an intermediate plate 356 c and a bottom plate 356 d .
  • the top plate 356 b , the intermediate plate 356 c and the bottom plate 356 d are coupled to each other by the rod 356 a .
  • the rod 356 a is formed to further extend downward from the bottom plate 356 d .
  • the vibration table 400 is attached to the top plate 356 b via the XY slider 360 .
  • a cylindrical inner magnet 326 is fixed to be coaxial with the cylindrical body 322 .
  • the inner magnet 326 has an outer diameter smaller than the inner diameter of the drive coil 352 , and the drive coil 352 is disposed in a gap sandwiched between the outer circumferential surface of the inner magnet 326 and the inner circumferential surface of the cylindrical body 322 .
  • Each of the cylindrical body 322 and the inner magnet 326 is made of magnetic material.
  • a bearing 328 which slidably supports the rod 356 a in the Z-axis direction is fixed.
  • a plurality of recessed parts 322 b are formed, and, in each recessed part 322 b , an excitation coil 324 is accommodated.
  • a DC current (the excitation current) flows through the excitation coil 324 , a magnetic field indicated by an arrow A is produced in the radial direction of the cylindrical body 322 in a portion where the inner circumferential surface 322 a of the cylindrical body 322 is situated to closely face the outer circumferential surface of the inner magnet 326 .
  • a Lorentz force is caused in the axial direction of the drive coil 352 , i.e., in the Z-axis direction, and the movable part 350 is driven in the Z-axis direction.
  • an air spring 330 is accommodated in the cylinder of the inner magnet 326 .
  • the lower end of the air spring 330 is fixed to the fixed part 320
  • the rod 356 a is fixed to the upper end of the air spring 330 .
  • the air spring 330 supports the movable frame 356 via the rod 356 a from the lower side. That is, the weight (the static load) of the movable part 350 , the XY slider 360 supported by the movable part 350 , the vibration table 400 and the test piece is supported by the air spring 330 . Therefore, by providing the air spring 330 for the Z-axis actuator 300 , it becomes unnecessary to support the weight (the static load) of the movable part 350 , the vibration table 400 and etc.
  • the driving force (Lorentz force) of the Z-axis actuator 300 Since it is only required to provide the dynamic load to vibrate the movable part 350 , the driving current to be supplied to the Z-axis actuator 300 (i.e., power consumption) is reduced considerably. Furthermore, since the drive coil 352 can be downsized thanks to the reduction of the required driving force, it becomes possible to drive the Z-axis actuator 300 at a high frequency. Furthermore, it becomes unnecessary to supply a large DC component to the drive coil for supporting the weight of the movable part 350 , the vibration table 400 and etc. Therefore, it becomes possible to employ a simple and compact circuit as the power source unit 30 .
  • the fixed part 320 When the movable part 350 of the Z-axis actuator 300 is driven, the fixed part 320 also receives a reaction force (the excitation force) in the drive axis (Z-axis) direction.
  • the exciting force transmitted from the movable part 350 to the fixed part 320 is reduced.
  • the vibration of the movable part 350 is prevented from being transmitted, as noise, to the vibration table 400 via the fixed part 320 , the device base 50 and the actuators 100 and 200 .
  • the movable part support mechanism 340 includes guide frames 342 , Z-axis runner blocks 344 and Z-axis rails 346 .
  • the movable part support mechanism 340 includes guide frames 342 , Z-axis runner blocks 344 and Z-axis rails 346 .
  • the guide frame 342 is a fixing member having a cross section formed in a shape of a letter L enforced by a rib.
  • the Z-axis runner block 344 engaging with the Z-rail 346 is attached.
  • the Z-axis runner block 344 has a plurality of rotatable balls 344 b (described later), and constitutes a Z-axis linear guide 345 of a ball bearing type, together with the Z-axis rail 346 .
  • the movable part 350 is supported, from the lateral side, by the four pairs of supporting mechanisms each of which is formed of the guide frame 342 and the Z-axis linear guide 345 , so that the movable part 350 is not able to move in the X-axis and Y-axis directions.
  • occurrence of crosstalk by the vibration of the movable part 350 in the X-axis and Y-axis directions can be prevented.
  • the movable part 350 is able to smoothly move in the Z-axis direction.
  • the movable part 350 is supported to be movable only in the Z-axis direction by the bearing 328 also in the lower portion as described above, the movable part 350 is not able to move in the X-axis and Y-axis directions. As a result, the vibration of the movable part 350 in the X-axis and Y-axis directions becomes hard to occur.
  • the Z-axis rail 346 is lighter than the Z-axis runner block 344 , the Z-axis rail 346 is longer than the Z-axis runner block 344 in the drive direction (Z-axis direction) (therefore, mass per a unit of length is small), the mass distribution in the drive direction is uniform, and therefore the fluctuation of the mass distribution caused when the Z-axis actuator 300 is driven is smaller in the case where the Z-axis rail 346 is attached to the movable side and as a result the vibration caused in accordance with the fluctuation of the mass distribution can be suppressed to a low level.
  • the barycenter of the Z-axis rail 346 is lower (i.e., the distance from the installation surface to the barycenter is shorter) than the barycenter of the Z-axis runner block 344 , the moment of inertia becomes smaller in the case where the Z-axis rail 346 is fixed to the movable side. Accordingly, with this configuration, it becomes possible to set the resonance frequency to be higher than the excitation frequency (e.g., 0 to 100 Hz), and thereby it becomes possible to prevent deterioration of the accuracy of excitation by resonance.
  • the excitation frequency e.g., 0 to 100 Hz
  • FIG. 7 is a plan view enlarging a portion around the vibration table 400 .
  • the XY slider 360 includes two Y-axis rails 362 a , four Y-axis runner blocks 362 b , four joint plates 364 , four X-axis runner blocks 366 b and two X-axis rails 366 b .
  • the two Y-axis rails 362 a extending in the Y-axis direction are attached to the upper surface of the top plate 356 b .
  • the two Y-axis runner blocks 362 engaging with the Y-axis rail 362 are attached to be slidable along the Y-axis rails 362 a .
  • the two X-axis rails 366 a extending in the X-axis direction are attached to the lower surface of the vibration table 400 .
  • the two X-axis runner blocks 366 b engaging with the X-rail 366 a are attached to be slidable along the X-axis rails 366 a .
  • the X-axis runner blocks 366 b are coupled to respective ones of the Y-axis runner blocks 362 b via the respective joint plates 364 .
  • one of the X-axis runner blocks 366 b engaging with one X-axis rail 366 a is coupled to one of the Y-axis runner blocks 362 b engaging with one Y-axis rails 362 a
  • the other X-axis runner block 366 b is coupled to one of the Y-axis runner blocks 362 b engaging with the other Y-axis rail 362 a .
  • each X-axis rail 366 a is coupled to the Y-axis rail 362 a via the X-axis runner block 366 b and the Y-axis runner block 362 b coupled with the joint plate 364 .
  • the vibration table 400 is coupled to the movable part 350 of the Z-axis actuator 300 to be slidable in the X-axis and Y-axis directions.
  • the vibration components of the vibration table 40 in the X-axis and Y-axis directions are not transmitted to the Z-axis actuator 300 even when the vibration table 400 is vibrated in the X-axis and Y-axis directions by the X-axis actuator 100 and the Y-axis actuator 200 .
  • the vibration table 400 is vibrated in the Z-axis direction by the Z-axis actuator 300 , the vibration component of the vibration table 400 in the Z-axis direction is not transmitted to the X-axis actuator 100 and the Y-axis actuator 200 . Accordingly, excitation in a low degree of crosstalk can be realized.
  • the YZ slider 160 includes two Z-axis rails 162 a , two Z-axis runner blocks 162 b , two joint plates 164 , two Y-axis runner blocks 166 b and one Y-axis rail 166 a .
  • the two Z-axis rail 162 a extending in the Z-axis direction are attached to a top plate 156 b of the movable frame of the X-axis actuator 100 .
  • the Z-axis runner block 162 b engaging with the Z-axis rail 162 a is attached to be slidable along the Z-axis rail 162 a .
  • the Y-axis rail 166 a extending in the Y-axis direction is attached.
  • the Y-axis runner block 166 b is coupled to one of the Z-axis runner blocks 162 b via one of the Z-axis runner blocks 162 b .
  • the Y-axis rail 166 a is coupled to the Z-axis rail 162 a via the Y-axis runner block 166 b and the Z-axis runner block 162 b coupled by the joint plate 164 .
  • the vibration table 400 is coupled to the movable part 150 of the X-axis actuator 100 to be slidable in the Y-axis and Z-axis directions.
  • the vibration components of the vibration table 400 in the Y-axis and Z-axis directions are not transmitted to the X-axis actuator 100 even when the vibration table 400 is vibrated by the Y-axis actuator 200 and the Z-axis actuator in the Y-axis and Z-axis directions.
  • the vibration table 400 is vibrated in the X-axis direction by the X-axis actuator 100 , the vibration component of the vibration table 400 in the X-axis direction is not transmitted to the Y-axis actuator 200 and the Z-axis actuator 300 . As a result, excitation in a low degree of crosstalk can be realized.
  • the ZX slider 260 which couples the Y-axis actuator 200 to the vibration table 400 also has the same configuration as that of the YZ slider 160 , and the vibration table 400 is coupled to the movable part of the Y-axis actuator 200 to be slidable in the Z-axis and X-axis directions. Therefore, even when the vibration table 400 is vibrated by the Z-axis actuator 300 and the X-axis actuator 100 in the Z-axis and X-axis directions, the vibration components of the vibration table 400 in the Z-axis and X-axis directions are not transmitted to the Y-axis actuator 200 .
  • the vibration table 400 is vibrated in the Y-axis direction by the Y-axis actuator 200 , the vibration component of the vibration table 400 in the Y-axis direction is not transmitted to the Z-axis actuator 300 and the X-axis actuator 100 . As a result, excitation in a low degree of crosstalk can be realized.
  • the actuators 100 , 200 and 300 are able to accurately excite the vibration table 400 in the drive axis directions without interfering with each other. Furthermore, since each of the actuators 100 , 200 and 300 is supported by the guide frame and the linear guide such that the movable part thereof is slidable only in the drive direction, vibration in the non-drive direction is hard to occur. Therefore, vibration in the non-drive direction which is not being controlled is not applied to the vibration table 400 . As a result, the vibration of the vibration table 400 in each drive axis direction can be accurately controlled by driving of the corresponding one of the actuators 100 , 200 and 300 .
  • a configuration of a liner guide mechanism (a rail and a runner block) used in each of the movable part support mechanism 340 , the YZ slider 160 , the ZX slider 260 and the XY slider 360 is explained, taking the Z-axis linear guide mechanism 345 (the Z-axis runner block 344 and the Z-axis rail 346 ) used in the movable part support mechanism 340 as an example.
  • the other rails and the runner blocks are also configured to have the same configurations as those of the Z-axis runner block 344 and the Z-axis rail 346 , respectively.
  • FIG. 8 is a cross-sectional view of the Z-axis rail 346 and the Z-axis runner block 344 of the movable part support mechanism 340 , viewed by cutting along a plane (i.e., an XY plane) perpendicular to the longer axis of the Z-axis rail 346 .
  • FIG. 9 is an I-I cross section of the FIG. 8 . As shown in FIGS. 8 and 9 , a recessed part is formed on the Z-axis runner block 344 to surround the Z-axis rail 346 , and two pairs of grooves 344 a and 344 ′ a are formed on the recessed part to extend in the axial direction of the Z-axis rail 346 .
  • each of the grooves 344 a and 344 a ′ a plurality of stainless steel balls 344 b and a resin retainer 344 r are accommodated.
  • the retainer 344 r has a plurality of spacers 344 rs disposed between the balls 344 b , and a pair of bands 344 rb coupling the plurality of spaces 344 rs .
  • the balls 344 b are held in spaces surrounded by the plurality of spacers 344 rs and the band 344 rb .
  • Grooves 346 a and 346 a ′ are formed on the Z-axis rail 346 at positions facing the grooves 344 a and the 344 a ′ of the Z-axis runner block 344 , respectively, and the balls 344 b and the retainer 344 r are sandwiched between the groove 344 a and the groove 346 a or between the groove 344 a ′ and the groove 346 a ′.
  • Each of the grooves 344 a , 344 a ′, 346 a and 346 a ′ has a cross section formed in a shape of an arc, and the curvature radius of the arc is the same as the radius of the ball 344 b . Therefore, the ball 344 b closely contacts each of the grooves 344 a , 344 a ′, 346 a and 346 a ′ with almost no play.
  • two pairs of ball saving paths 344 c and 344 c ′ are provided to extend in substantially parallel with the grooves 344 a and 344 a ′.
  • the groove 344 a ′ and the saving path 344 c ′ are connected by U-shaped paths 344 d ′ at both ends, and a circular path for circulating the balls 344 b and the retainer 344 r is formed by the groove 344 a ′, the groove 346 a ′, the saving path 344 c ′ and the U-shaped paths 344 d .
  • a circular path is also formed by the groove 344 a , the groove 346 a and the saving path 344 c.
  • the Z-axis runner block 344 moves with respect to the Z-axis rail 346 , the plurality of balls 344 b circulate, together with the retainer 344 r , while rotating along the grooves 344 a and 346 a and the grooves 344 a ′ and 346 a ′. Therefore, even when a large load is applied in a direction other than the axial direction of the rail, the Z-axis runner block 344 can be smoothly moved along the Z-axis rail 346 because the Z-axis runner block 344 can be supported by the plurality of balls 344 b and resistance in the axial direction of the rail can be kept at a low level due to rotations of the balls 344 b .
  • each of the saving paths 344 c and 344 c ′ and the U-shaped paths 344 d and 344 d ′ is slightly larger than the diameter of the ball 344 b . For this reason, the frictional force caused between the ball 344 b and each of the saving paths 344 c and 344 c ′ and the U-shaped paths 344 d and 344 d ′ is very small, and the circulating motion of the balls 344 b are not hampered by the frictional force.
  • Each of the X-axis actuator 100 and the Y-axis actuator 200 also has a movable part support mechanism (not shown).
  • the movable part of the X-axis actuator 100 is supported by a guide frame from the both sides in the two directions (Y-axis and Z-axis directions) which are perpendicular to the drive direction (X-axis).
  • the movable part of the Y-axis actuator 200 is supported by a guide frame from the both sides in the two directions (Z-axis and X-axis directions) which are perpendicular to the drive direction (Y-axis).
  • Each of the X-axis actuator 100 and the Y-axis actuator 200 is placed such that the longer side direction of the movable part is oriented horizontally.
  • a movable part is supported only by a rod in a state of a cantilever type, and therefore a tip side (the vibration table 400 side) of the movable part falls downward due to its own weight and this causes factors of friction and undesired vibration during the driving.
  • the movable part of each of the X-axis actuator 100 and the Y-axis actuator 200 is supported from the lower side by the guide frame, such a problem is solved.
  • an electrodynamic biaxial excitation device 1000 (hereafter, simply referred to as an “excitation device 1000 ”) according to a second embodiment of the invention is explained with reference to FIGS. 10 to 12 .
  • the main bodies 101 , 201 and 301 (specifically, the fixed part) of the actuators are firmly supported by the device base 50 via the fixing blocks 110 , 210 and 310 , respectively. Therefore, vibration of the fixed part of one actuator may be transmitted to the vibration table 400 via the device base 50 and the other of the actuators 100 , 200 and 300 , and may becomes a noise component of the vibration.
  • the excitation device 1000 is configured such that a fixed part of each actuator is supported by a device base via an air spring in the drive direction in which strong vibration is caused. Therefore, according to the second embodiment, excitation with a still higher degree of accuracy can be realized.
  • FIGS. 10 , 11 and 12 are a front view, a plan view and a side view (showing a left side in FIG. 10 ) of the excitation device 1000 , respectively.
  • the rightward direction in FIG. 10 is defined as a positive direction of the X-axis
  • the direction pointing from the front side to the back side of the paper face of FIG. 10 is defined as the positive direction of the Y-axis
  • the upward direction in FIG. 10 is defined as the positive direction of the Z-axis.
  • the Z-axis direction is a vertical direction
  • each of the X-axis and Y-axis directions is a horizontal direction.
  • the excitation device 1000 is configured to be able to vibrate a test piece (not shown) in the two directions, i.e., the X-axis direction and the Z-axis direction, and includes a vibration table 1400 to which the test piece is attached, two actuators (an X-axis actuator 1100 and a Z-axis actuator 1300 ) which vibrate the vibration table 1400 in the X-axis and Z-axis directions, respectively, a device base 1050 which supports the actuators 1100 and 1300 .
  • the excitation device 1000 also includes a biaxial vibration pickup, a measurement unit, a control unit, an input unit and a power source unit (not shown).
  • the inner configuration of the actuators 1100 and 1300 and the configuration of the device base 1050 are the same as those of the excitation device 1 of the first embodiment.
  • the X-axis actuator 1100 is fixed to a top plate 1056 of the device base 1050 by a support unit 1110 .
  • the support unit 1110 includes a pair of fixing blocks 1112 each having an inverted T-shape attached to the top plate 1056 , a pair of movable blocks 1118 each having a rectangular plate shape respectively attached to the both side faces of a fixed part 1120 of the X-axis actuator 1100 , and a pair of linear guides 1114 which slidably couple the fixing block 1112 and the movable block 1118 in the X-axis direction.
  • Each linear guide 1114 includes a rail 1114 a which is attached to the upper surface of a foot part 1112 b of the inverted T-shape fixed block 1112 to extend in the X-axis direction, and a pair of runner blocks 1114 b which is attached to the lower surface of the movable block 1118 to engage with the rail 1114 a .
  • a branch part 1112 a extending upward is fixed.
  • the side surface of the movable block 1118 on the positive side of the X-axis is coupled to the branch part 1112 a of the fixed block 1112 via a pair of air springs 1116 arranged in the up and down direction.
  • the fixed part 1120 of the X-axis actuator 1100 is flexibly supported, by the fixed part support mechanism including the linear guide 1114 and the air springs 1116 , in the drive direction (X-axis direction), with respect to the fixed block 1112 (i.e., the device base 1050 ).
  • the strong reaction force (the excitation force) applied to the fixed part 1120 in the X-axis direction during driving of the X-axis actuator 1100 is not directly transmitted to the device base 1050 , and is transmitted to the device base 1050 after the high frequency component thereof is largely reduced by the air springs 1116 . Therefore, the vibration noise transmitted to the vibration table 1400 is reduced considerably.
  • the Z-axis actuator 1300 is fixed to the top plate 1056 of the device base 1050 by a pair of support units 1310 arranged on the both sides thereof in the Y-axis direction.
  • the lower portion of the Z-axis actuator 1300 is accommodated in the device base 1050 through an opening 1057 provided in the top plate 1056 of the device base 1050 .
  • Each support unit 1310 includes a movable block 1318 , a pair of angles 1312 and a pair of linear guides 1314 .
  • the movable block 1318 is a support member attached to the side surface of a fixed part 1320 of the Z-axis actuator 1300 .
  • the pair of angles 1312 is disposed to face the both sides of the movable block 1318 in the X-axis direction, and is attached to the upper surface of the top plate 1056 .
  • the both sides of the movable block 1318 in the X-axis direction are coupled to the respective angles 1312 to be slidable in the Z-axis direction by the pair of linear guides 1314 .
  • the movable block 1318 includes an angle block 1318 a , a flat plate block 1318 b and a pair of T-shaped blocks 1318 c .
  • One attachment surface of the L-shaped angle block 1318 a is fixed to the side surface of the fixed part 1320 of the Z-axis actuator 1300 .
  • the flat plate block 1318 b having a rectangular flat shape extending in the X-axis direction is fixed at the central portion in the longer side direction of the flat plate block 1318 b .
  • foot parts 1318 d of the T-shaped blocks 1318 c are attached to the upper surfaces at the both ends in the X-axis direction of the flat plate block 1318 b .
  • the rails 1314 a of the linear guides 1314 extending in the Z-axis direction are attached, respectively.
  • the runner block 1314 b which faces and engages with the rail 1314 a is attached to each angle 1312 .
  • a pair of air springs 1316 is disposed to be sandwiched between the flat plate block 1318 b and the top plate 1056 of the device base 1050 , and the movable block 1318 is supported by the top plate 1056 via the pair of air springs 1316 .
  • the Z-axis actuator 1300 is also flexibly supported, in the drive direction (Z-axis direction), with respect to the device base 1050 via the fixed part support mechanism including the liner guide 1314 and the air springs 1316 .
  • the strong reaction force (the excitation force) applied to the fixed part 1320 during driving of the Z-axis actuator 1300 is not directly transmitted to the device base 1050 , and the high frequency component thereof is largely reduced by the air springs 1316 .
  • the vibration noise transmitted to the vibration table 1400 is reduced largely.
  • the excitation device 1 of the first embodiment is an example in which the invention is applied to an actuator of an electrodynamic triaxial excitation device
  • the excitation device 1000 of the second embodiment is an example in which the invention is applied to an actuator of an electrodynamic biaxial excitation device; however, the invention may also be applied to an electrodynamic single-axis excitation device.
  • the movable part 350 of the electrodynamic actuator 300 is supported, from the lateral side, by the four movable part support mechanism 340 disposed to have approximately constant intervals around the axis of the cylindrical body 322 .
  • the invention is not limited to such a configuration.
  • the movable part may be supported, from the lateral side, by two or more (preferably more than three) movable part support mechanisms arranged to have approximately constant intervals around the axis of the cylindrical body.
  • the runner block is fixed to the upper surface of the cylindrical body 322 via the fixed guide frame 342 ; however, the runner block may be directly fixed to the inner circumferential surface of the cylindrical body 322 .
  • the air springs 1116 and 1316 are used as buffering members for reducing the vibration of the fixed part support mechanism; however, various members, such as another type of spring or an elastic body (a rubber cushion) having the vibration absorption function, or a damper device using an electromagnetic reaction force, may be used.
  • the linear actuator according to the embodiment of the invention may be used for a device other than the excitation device.
  • the actuator according to the embodiment may be used for a universal test device (material test device) for performing a tension and compression test, an accurate positioning device or a jack device.
  • the actuator is controlled using the speed of the vibration table as a control variable; however, control may be performed by using the displacement or the acceleration of the vibration table as a control variable.
  • the vibration table the displacement, the speed or the acceleration of the test piece or the movable part of the actuator may be used as a control variable to drive and control the actuator.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Vibration Prevention Devices (AREA)
  • Paper (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Linear Motors (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
US14/060,969 2011-04-26 2013-10-23 Electrodynamic actuator and electrodynamic excitation device Abandoned US20140049122A1 (en)

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US16/516,590 US11289991B2 (en) 2011-04-26 2019-07-19 Electrodynamic actuator and electrodynamic excitation device with movable part support mechanism and fixed part support mechanism
US17/672,344 US11824416B2 (en) 2011-04-26 2022-02-15 Electrodynamic actuator and electrodynamic excitation device
US18/377,625 US20240055968A1 (en) 2011-04-26 2023-10-06 Electrodynamic Actuator and Electrodynamic Excitation Device

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JP2011-098775 2011-04-26
JP2011098775 2011-04-26
JP2011238849A JP5913910B2 (ja) 2011-04-26 2011-10-31 直動アクチュエータ及び加振装置
JP2011-238849 2011-10-31
PCT/JP2012/060581 WO2012147607A1 (ja) 2011-04-26 2012-04-19 動電型アクチュエータ及び動電型加振装置

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US16/516,590 Active US11289991B2 (en) 2011-04-26 2019-07-19 Electrodynamic actuator and electrodynamic excitation device with movable part support mechanism and fixed part support mechanism
US17/672,344 Active US11824416B2 (en) 2011-04-26 2022-02-15 Electrodynamic actuator and electrodynamic excitation device
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US17/672,344 Active US11824416B2 (en) 2011-04-26 2022-02-15 Electrodynamic actuator and electrodynamic excitation device
US18/377,625 Pending US20240055968A1 (en) 2011-04-26 2023-10-06 Electrodynamic Actuator and Electrodynamic Excitation Device

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199633A1 (en) * 2014-06-27 2015-12-30 Dogan Adnan Earthquake experiment board
KR20170036050A (ko) * 2014-07-30 2017-03-31 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치, 동전형 액추에이터, 크로스 가이드웨이, 리니어 가이드웨이 및 진동 테이블
EP3081915A4 (en) * 2013-12-12 2018-01-24 Kokusai Keisokuki Kabushiki Kaisha Bearing testing machine
US9954424B2 (en) * 2014-09-02 2018-04-24 Zhejiang University Wide-frequency-band large displacement angle shaker
US20180321111A1 (en) * 2016-01-15 2018-11-08 Kokusai Keisokuki Kabushiki Kaisha Oscillating device
US20190356200A1 (en) * 2017-02-06 2019-11-21 Libertine Fpe Ltd Linear Electrical Machine
US11289991B2 (en) * 2011-04-26 2022-03-29 Kokusai Keisokuki Kabushiki Kaisha Electrodynamic actuator and electrodynamic excitation device with movable part support mechanism and fixed part support mechanism

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* Cited by examiner, † Cited by third party
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CN116907781B (zh) * 2023-09-13 2023-11-28 中国科学院长春光学精密机械与物理研究所 一种微振动模拟与主被动隔振一体化实验平台
CN117606858B (zh) * 2023-11-01 2024-05-10 合肥市中心血站 一种白细胞提取样本制作装置及方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115340A (ja) * 1981-12-28 1983-07-09 Kokusai Kikai Shindo Kenkyusho:Kk 振動試験装置
US7187143B2 (en) * 2003-02-21 2007-03-06 Sumitomo Eaton Nova, Corporation Mover device and semiconductor manufacturing apparatus and method
WO2009130953A1 (ja) * 2008-04-25 2009-10-29 国際計測器株式会社 動電型振動試験装置
WO2009130818A1 (ja) * 2008-04-24 2009-10-29 国際計測器株式会社 動電型振動試験装置
KR20090130882A (ko) * 2007-07-19 2009-12-24 고쿠사이 게이소쿠키 가부시키가이샤 진동시험장치

Family Cites Families (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50147052U (ko) * 1974-05-23 1975-12-05
GB1546073A (en) * 1976-05-10 1979-05-16 Ready Seal Ltd Method of repairing leaks in pipes and pipelines carrying fluent medium under pressure and means for use in the method
US4346762A (en) * 1976-03-16 1982-08-31 Igal Tovim Plastics material horseshoes
DE2842598A1 (de) * 1977-10-15 1979-04-19 Usm Corp Blind-befestigungselemente
DE2810942C3 (de) * 1978-03-14 1981-04-23 Uni-Cardan Ag, 5200 Siegburg Dichtungsanordnung
JPS5832196Y2 (ja) * 1978-03-27 1983-07-16 日本電子株式会社 電子顕微鏡等用試料ホルダ−軸受構造
US4243729A (en) * 1978-07-31 1981-01-06 Semi-Alloys, Inc. Metallic hermetic sealing cover for a container
US4322121A (en) * 1979-02-06 1982-03-30 Bunker Ramo Corporation Screw-coupled electrical connectors
US4438950A (en) * 1981-02-20 1984-03-27 Monarch Marking Systems, Inc. Composite label web, price tag and re-price label combination, and method of price and re-price marking
US4457539A (en) * 1981-02-20 1984-07-03 Monarch Marking Systems, Inc. Composite label web, price tag and re-price label combination, and method of price and re-price marking
DE3106548A1 (de) * 1981-02-21 1982-09-09 Gewerkschaft Eisenhütte Westfalia, 4670 Lünen Schwerthobel mit mehrteiliger gelenkiger schwertplatte
HU184906B (en) * 1981-12-01 1984-11-28 Richter Gedeon Vegyeszet Device for furthering liquid and separating gases sepregating from liquid
GB2111663B (en) * 1981-12-16 1986-03-26 Ocean Phoenix Holdings Nv Tank for the storage and transport of pressurised fluid
US4495582A (en) * 1982-06-04 1985-01-22 Harris Graphics Corporation Control system for pre-setting and operation of a printing press and collator
DE3339708C1 (de) * 1983-11-03 1985-02-28 Goetze Ag, 5093 Burscheid OElabstreif-Kolbenringsystem
JPS63500961A (ja) * 1985-09-14 1988-04-07 エルゲーツエット・ランディス・ウント・ギール・ツーク・アクチエンゲゼルシャフト 静的積算電気計器の変流装置
JPS62152580A (ja) * 1985-12-26 1987-07-07 株式会社　振研 複数方向加振機
GB8619165D0 (en) * 1986-08-06 1986-09-17 Thor Hammer Co Ltd Split head hammers
US4791711A (en) * 1987-11-27 1988-12-20 Simulators Limited, Inc. Child resistant buckle for seat belt restraints
CH675146A5 (ko) * 1988-02-01 1990-08-31 Asea Brown Boveri
US5341054A (en) * 1988-08-31 1994-08-23 Aura Systems, Inc. Low mass electromagnetic actuator
US5015426A (en) * 1989-05-18 1991-05-14 Galic Maus Ventures Precision single cavity and multicavity plastic injection molding via an adaptive mold process
US4981634A (en) * 1989-05-22 1991-01-01 Galic Maus Ventures Injection molding process operating without opening the mold to airborne contaminants
GB2236434B (en) 1989-09-29 1993-10-13 Ling Dynamic Systems Suspension for an electriomagnetic vibration generator
DE3939072A1 (de) * 1989-11-25 1991-05-29 Philips Patentverwaltung Verfahren zum zeitverschachtelten verarbeiten von datenwoertern und anordnung zur durchfuehrung dieses verfahrens
US5291645A (en) * 1989-12-01 1994-03-08 Yoshitaka Aoyama Method and apparatus for feeding and tightening threaded parts
US5016860A (en) * 1990-01-31 1991-05-21 Holcroft Inc. "No-nick" part-handling apparatus and method
US5199093A (en) * 1990-05-22 1993-03-30 Bicc Plc. Multi-part optical fibre connectors
JPH082498Y2 (ja) * 1990-06-04 1996-01-29 日本トムソン株式会社 小型ボールスプライン軸受
SE469815B (sv) * 1990-11-27 1993-09-27 Moelnlycke Ab Hölje för en absorberande artikel
GB9105367D0 (en) * 1991-03-13 1991-04-24 Univ Strathclyde Computerised information-retrieval database systems
US5549198A (en) * 1991-03-22 1996-08-27 Basf Magnetics Gmbh Multipack for recording media in tape form wound onto hubs
US5334571A (en) * 1991-10-18 1994-08-02 Moore Business Forms, Inc. Carbonless paper for non-impact laser printing
NZ244699A (en) * 1991-10-24 1995-04-27 Moore Business Forms Inc Multi-part business form: upper and lower sheets having adhesive strips, and intermediate sheets having plural apertures: strips and apertures vertically aligned
FR2683449A1 (fr) * 1991-11-08 1993-05-14 Cardon Alain Endoprothese pour implantation transluminale.
DE4138564A1 (de) * 1991-11-23 1993-05-27 Sf Vollverbundstein Pflastersteinsatz sowie verfahren und vorrichtung zum herstellen desselben
EP0544423B1 (en) * 1991-11-23 1997-02-12 Yoshitaka Aoyama Part-detecting device combined with a part-supply rod of a part-supply unit
US5231336A (en) * 1992-01-03 1993-07-27 Harman International Industries, Inc. Actuator for active vibration control
US5386728A (en) * 1992-02-24 1995-02-07 Automotive Technologies International, Inc. Vibrator for subjecting an object to vibration
US5456658A (en) * 1992-03-30 1995-10-10 Parker Medical Associates Custom-fitting body part protector with cure-retarding storage system, method of constructing a body part protector, and method of custom-fitting a body part protector
US5477982A (en) * 1992-04-04 1995-12-26 Aoyama; Yoshitaka Method and apparatus for supplying parts
US5238386A (en) * 1992-05-20 1993-08-24 Corning Incorporated Multi-part extrusion die
US5293717A (en) * 1992-07-28 1994-03-15 United Technologies Corporation Method for removal of abradable material from gas turbine engine airseals
SE9202466L (sv) * 1992-08-28 1993-07-26 Televerket Foerfarande och anordning vid mobila telekommunikationsnaet foer att moejliggoera en foerbaettrad cellplanering
DE4234043C1 (de) * 1992-10-09 1994-03-24 Daimler Benz Ag Bremsdruck-Steuereinrichtung für ein Straßenfahrzeug
WO1994023476A1 (en) * 1993-03-26 1994-10-13 Zaidan Khalil S Hinge assembly for electronic devices
US5269533A (en) * 1993-03-26 1993-12-14 Kellams John W Five-part support post for volleyball net
US5435281A (en) * 1994-11-04 1995-07-25 Chrysler Corporation Cylinder head construction for internal combustion engines
JPH08136392A (ja) * 1994-11-08 1996-05-31 Shinken:Kk 振動試験機の加振軸連結構造
US5575229A (en) * 1994-11-21 1996-11-19 Blackmer; Richard Control tackle apparatus for a sailboard rig outhaul
US5575488A (en) * 1995-03-10 1996-11-19 Srw Associates, Inc. Hand-held part holder and fixture
US5607738A (en) * 1995-08-29 1997-03-04 Moore Business Forms, Inc. Multiple-part carbonless pressure seal business form assembly
US5623174A (en) * 1995-12-08 1997-04-22 General Electric Co. Internal grading of generator stator bars with electrically conducting thermoplastic paints
DE19649922A1 (de) * 1996-12-02 1998-06-04 Krupp Polysius Ag Verfahren und Vorrichtung zur Wärmebehandlung von feinkörnigem Gut
SE506241C2 (sv) * 1996-03-04 1997-11-24 Ericsson Telefon Ab L M Förfarande och anordning för bitmönsterdetektering
SE506471C2 (sv) * 1996-04-03 1997-12-22 Kim Silfverberg Kopplingsstycke för isolering av ledaränddelar eller elektrisk förbindning av dito
US5707055A (en) * 1996-05-20 1998-01-13 Moore Business Forms, Inc. Method and system for producing multiple part business forms
JP3679886B2 (ja) * 1997-02-25 2005-08-03 株式会社ミツトヨ 加振機における振動ピックアップの支持装置
US5989028A (en) * 1997-05-15 1999-11-23 Core-Vent Corporation Non-submergible, one-part, root-form endosseous dental implants
US6166465A (en) * 1998-04-30 2000-12-26 Delta Tooling Co., Ltd. Vibration generating mechanism using repulsive forces of permanent magnets
JP3616058B2 (ja) * 2002-01-25 2005-02-02 山崎 恒彦 リニアモータ
US7069787B2 (en) * 2003-09-29 2006-07-04 Crowson Ii Randolph J Robust low profile shaker
US7051593B2 (en) * 2004-05-21 2006-05-30 Ling Dynamic Systems, Inc. Vibration testing apparatus and a method of vibration testing
WO2009144989A1 (ja) 2008-05-24 2009-12-03 国際計測器株式会社 振動試験装置
CN101414778B (zh) * 2008-09-27 2010-12-01 北京航空航天大学 大振幅振动主动隔离杆
WO2010098399A1 (ja) * 2009-02-27 2010-09-02 国際計測器株式会社 除振装置
JP5913910B2 (ja) * 2011-04-26 2016-04-27 国際計測器株式会社 直動アクチュエータ及び加振装置
US9482593B2 (en) * 2014-09-17 2016-11-01 King Fahd University Of Petroleum And Minerals Selectable multi-axis shaker table
EP3002026A1 (en) * 2014-09-30 2016-04-06 Shenzhen Mindray Bio-Medical Electronics Co., Ltd. System and method for stabilizing a voice coil motor
EP4194833A1 (en) * 2016-01-15 2023-06-14 Kokusai Keisokuki Kabushiki Kaisha Vibration application device and electrodynamic actuator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115340A (ja) * 1981-12-28 1983-07-09 Kokusai Kikai Shindo Kenkyusho:Kk 振動試験装置
US7187143B2 (en) * 2003-02-21 2007-03-06 Sumitomo Eaton Nova, Corporation Mover device and semiconductor manufacturing apparatus and method
KR20090130882A (ko) * 2007-07-19 2009-12-24 고쿠사이 게이소쿠키 가부시키가이샤 진동시험장치
WO2009130818A1 (ja) * 2008-04-24 2009-10-29 国際計測器株式会社 動電型振動試験装置
WO2009130953A1 (ja) * 2008-04-25 2009-10-29 国際計測器株式会社 動電型振動試験装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP 58115340 Description Machine Translation, English *
KR20090130882 English Translation *
WO 2009130818 A1, Machine Translation *
WO 2009130953 A1, Machine Translation *

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* Cited by examiner, † Cited by third party
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US20220173647A1 (en) * 2011-04-26 2022-06-02 Kokusai Keisokuki Kabushiki Kaisha Electrodynamic Actuator And Electrodynamic Excitation Device
US11289991B2 (en) * 2011-04-26 2022-03-29 Kokusai Keisokuki Kabushiki Kaisha Electrodynamic actuator and electrodynamic excitation device with movable part support mechanism and fixed part support mechanism
EP3569998A1 (en) * 2013-12-12 2019-11-20 Kokusai Keisokuki Kabushiki Kaisha Bearing testing machine
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US10203266B2 (en) 2013-12-12 2019-02-12 Kokusai Keisokuki Kabushiki Kaisha Bearing testing machine
WO2015199633A1 (en) * 2014-06-27 2015-12-30 Dogan Adnan Earthquake experiment board
KR20220011778A (ko) * 2014-07-30 2022-01-28 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
KR102498200B1 (ko) 2014-07-30 2023-02-09 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
KR20170036050A (ko) * 2014-07-30 2017-03-31 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치, 동전형 액추에이터, 크로스 가이드웨이, 리니어 가이드웨이 및 진동 테이블
CN110530592A (zh) * 2014-07-30 2019-12-03 国际计测器株式会社 激振装置
KR20200071779A (ko) * 2014-07-30 2020-06-19 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
KR102595796B1 (ko) 2014-07-30 2023-10-30 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
KR102350411B1 (ko) * 2014-07-30 2022-01-14 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
US10281356B2 (en) 2014-07-30 2019-05-07 Kokusai Keisokuki Kabushiki Kaisha Oscillating device, electrodynamic actuator, cross guideway, linear guideway and vibrating table
KR102357171B1 (ko) 2014-07-30 2022-02-08 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
EP4215893A1 (en) * 2014-07-30 2023-07-26 Kokusai Keisokuki Kabushiki Kaisha Oscillating device to couple a vibrating table with a z-axis oscillating unit
KR20230022306A (ko) * 2014-07-30 2023-02-14 고쿠사이 게이소쿠키 가부시키가이샤 가진 장치
US10436670B2 (en) * 2014-07-30 2019-10-08 Kokusai Keisokuki Kabushiki Kaisha Oscillating device, electrodynamic actuator, cross guideway, linear guideway and vibrating table
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US9954424B2 (en) * 2014-09-02 2018-04-24 Zhejiang University Wide-frequency-band large displacement angle shaker
US20220120634A1 (en) * 2016-01-15 2022-04-21 Kokusai Keisokuki Kabushiki Kaisha Oscillation device with counter balancer
US20180321111A1 (en) * 2016-01-15 2018-11-08 Kokusai Keisokuki Kabushiki Kaisha Oscillating device
US10942085B2 (en) * 2016-01-15 2021-03-09 Kokusai Keisokuki Kabushiki Kaisha Oscillation device with counter balancer
US11898944B2 (en) * 2016-01-15 2024-02-13 Kokusai Keisokuki Kabushiki Kaisha Oscillation device with a vibrating table that houses an oscillated object
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ES2949419T3 (es) 2023-09-28
US11289991B2 (en) 2022-03-29
US20190341837A1 (en) 2019-11-07
KR102266234B1 (ko) 2021-06-17
EP2713487A1 (en) 2014-04-02
EP2713487A4 (en) 2016-03-16
CN103609009A (zh) 2014-02-26
CN105728305A (zh) 2016-07-06
KR20200135546A (ko) 2020-12-02
EP4191846A1 (en) 2023-06-07
JP2012237736A (ja) 2012-12-06
US11824416B2 (en) 2023-11-21
CN105743275B (zh) 2020-08-18
CN105743275A (zh) 2016-07-06
CN103609009B (zh) 2017-03-29
KR20140028024A (ko) 2014-03-07
CN105728305B (zh) 2019-08-16
TW201249548A (en) 2012-12-16
US20220173647A1 (en) 2022-06-02
KR102181674B1 (ko) 2020-11-23
US20240055968A1 (en) 2024-02-15
EP3624316A1 (en) 2020-03-18
EP3624316B1 (en) 2023-04-19
WO2012147607A1 (ja) 2012-11-01
JP5913910B2 (ja) 2016-04-27

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