US20090051252A1 - Piezoelectric Resonator Plate And Piezolectric Resonator Device - Google Patents

Piezoelectric Resonator Plate And Piezolectric Resonator Device Download PDF

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Publication number
US20090051252A1
US20090051252A1 US11/921,639 US92163906A US2009051252A1 US 20090051252 A1 US20090051252 A1 US 20090051252A1 US 92163906 A US92163906 A US 92163906A US 2009051252 A1 US2009051252 A1 US 2009051252A1
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base portion
bonding member
conductive bonding
piezoelectric resonator
resonator plate
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US11/921,639
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English (en)
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Takashi Shirai
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Daishinku Corp
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Individual
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Publication of US20090051252A1 publication Critical patent/US20090051252A1/en
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Definitions

  • the present invention relates to a piezoelectric resonator plate and a piezoelectric resonator device, more particularly to a structure of a piezoelectric resonator plate.
  • Piezoelectric resonator devices include a tuning fork crystal resonator using a tuning fork crystal resonator plate composed of a base portion and a vibrating portion having two leg portions protruding from this base portion (see Patent Document 1, for example).
  • This tuning fork crystal resonator is used in electronic apparatuses, portable terminals, and the like to provide a precise clock frequency.
  • a tuning fork crystal resonator as described above has a housing composed of a base and a lid, and within this housing, a tuning fork crystal resonator plate that is bonded to and held on the base via a conductive bonding member is hermetically enclosed.
  • a conductive bonding member for example, a conductive adhesive is used.
  • Patent Document 1 describes a configuration in which a base portion of a tuning fork crystal resonator plate is provided with a cut groove. The patent document discloses that this configuration alleviates leakage of vibration in leg portions to the base portion side and lowers the CI value (crystal impedance) by enhancing an effect of confining vibrational energy.
  • Patent Document 1 JP 2004-260718A
  • a piezoelectric resonator plate includes a base portion and a vibrating portion having a plurality of leg portions protruding from the base portion.
  • Each of the leg portions is provided with an excitation electrode having a different potential and a lead electrode connected to the excitation electrode so as to electrically connect the excitation electrode to an external electrode.
  • At least two conductive bonding member forming regions for bonding a part of the lead electrode to the external electrode via a conductive bonding member are defined in the base portion.
  • the base portion is formed wider than the vibrating portion and has a base portion central region and base portion wider regions, the base portion central region having the same width as the vibrating portion, the vibrating portion extending from the base portion central region, and the base portion wider regions extending beyond lateral edges of the vibrating portion, the conductive bonding member forming regions being defined in the base portion wider regions.
  • Elongated thin-walled portions starting at boundary corner portions of the base portion between the base portion central region and the base portion wider regions are formed in the base portion.
  • the base portion is formed wider than the vibrating portion and has the base portion central region and the base portion wider regions, and the thin-walled portions are formed in the base portion, so that transmission of vibrational energy generated in the vibrating portion is weakened by the base portion wider regions and efficiently blocked by the thin-walled portions starting at the boundary corner portions between the base portion central region and the base portion wider regions. Accordingly, it is possible to reduce leakage of vibration from the vibrating portion to each of the conductive bonding member forming regions while realizing a reduction in the size of the base portion.
  • the elongated thin-walled portions starting at the boundary corner portions between the base portion central region and the base portion wider regions are formed, it is possible to effectively dispose the conductive bonding member forming regions in the base portion wider regions without increasing the length of the base portion of the piezoelectric resonator plate, and also the bond strength of the piezoelectric resonator plate is not decreased.
  • the thin-walled portions are elongated, the rigidity of the base portion of the piezoelectric resonator plate is not decreased, and breakage or the like of the piezoelectric resonator plate no longer occurs.
  • a piezoelectric resonator plate includes a base portion and a vibrating portion having a plurality of leg portions protruding from the base portion.
  • Each of the leg portions is provided with an excitation electrode having a different potential and a lead electrode connected to the excitation electrode so as to electrically connect the excitation electrode to an external electrode.
  • At least two conductive bonding member forming regions for bonding a part of the lead electrode to the external electrode via a conductive bonding member are defined in the base portion.
  • the base portion is formed wider than the vibrating portion and has a base portion central region and base portion wider regions, the base portion central region having the same width as the vibrating portion, the vibrating portion extending from the base portion central region, and the base portion wider regions extending beyond lateral edges of the vibrating portion, the conductive bonding member forming regions being defined in the base portion wider regions.
  • Elongated thin-walled portions starting at corner portions on a side of the base portion wider regions from which the leg portions extend are formed in the base portion.
  • the base portion is formed wider than the vibrating portion and has the base portion central region and the base portion wider regions, and the thin-walled portions are formed in the base portion, so that transmission of vibrational energy generated in the vibrating portion is weakened by the base portion wider regions and efficiently blocked at a position closest to the vibrating portion by the thin-walled portions starting at the corner portions that are located on the side of the base portion wider regions from which the leg portions extend. Accordingly, it is possible to suppress diffusion of leakage of vibration to the base portion and reduce the leakage of vibration from the vibrating portion to each of the conductive bonding member forming regions while realizing a reduction in the size of the base portion.
  • the conductive bonding member forming regions can be disposed close to the vibrating portion, it is possible to realize a further reduction in the size of the base portion by suppressing an increase in the length of the base portion.
  • the conductive bonding member forming regions can be effectively disposed in the base portion wider regions without increasing the length of the base portion of the piezoelectric resonator plate, and also the bond strength of the piezoelectric resonator plate is not decreased.
  • the thin-walled portions are elongated, the rigidity of the base portion of the piezoelectric resonator plate is not decreased, and breakage or the like of the piezoelectric resonator plate no longer occurs.
  • terminal end portions of the thin-walled portions may be located farther inside the base portion than the conductive bonding member forming regions.
  • the terminal end portions of the thin-walled portions are located farther inside the base portion than the conductive bonding member forming regions, it is possible to inhibit linear connection of each of the conductive bonding member forming regions and the vibrating portion, and thus the effect of blocking the transmission of vibrational energy generated in the vibrating portion is further enhanced. Accordingly, it is possible to still further reduce leakage of vibration from the vibrating portion to each of the conductive bonding member forming regions while realizing a reduction in the size of the base portion.
  • the conductive bonding member may be a conductive adhesive.
  • the conductive bonding member may be a conductive bump.
  • the conductive bonding member forming regions can be made smaller than in the case of the conductive adhesive, which can contribute to a further reduction in the size of the piezoelectric resonator plate.
  • an impact during bonding of the conductive bump is absorbed by the elongated thin-walled portions, so that cracking or chipping of the piezoelectric resonator plate can be avoided, which is preferable.
  • the leg portion may have a groove in a major surface thereof, and a part of the excitation electrode may be formed within the groove.
  • the leg portion has the groove in a major surface thereof and a part of the excitation electrode is formed within the groove, vibration loss in the leg portions is suppressed even when the size of the piezoelectric resonator plate is reduced, and the CI value (crystal impedance) can be kept low.
  • a piezoelectric resonator device is characterized in that a base and a lid are bonded together to form a housing inside of which is hermetically enclosed, the base within the housing is provided with an electrode pad constituting the external electrode, and the conductive bonding member forming region of the piezoelectric resonator plate according to the present invention is bonded to the electrode pad via a bonding member.
  • a piezoelectric resonator device having functions and effects similar to those of the above-described piezoelectric resonator plate according to the present invention can be provided. Moreover, when stress due to an impact from the outside or an influence from the outside occurs and results in distortion stress from the housing to the vibrating portion of the piezoelectric resonator plate, the elongated thin-walled portions can prevent the stress that has occurred from being transmitted to the vibrating portion, so that it is possible to effectively prevent a change in the CI value or a change in the frequency due to the occurrence of stress from the outside.
  • a piezoelectric resonator plate and a piezoelectric resonator device which offer a higher degree of reliability and with which the size of piezoelectric resonator plates can be reduced without decreasing the bond strength of the piezoelectric resonator plates and the CI value (crystal impedance) can be lowered by enhancing the effect of confining vibrational energy.
  • FIG. 1 is a schematic exploded perspective view illustrating a base and a tuning fork crystal resonator plate constituting a tuning fork crystal resonator according to a first embodiment of the present invention.
  • FIG. 2 is a schematic cross-sectional view of the tuning fork crystal resonator according to the first embodiment, taken along line A-A of FIG. 1 in the direction of the arrow.
  • FIG. 3 is a schematic cross-sectional view of a tuning fork crystal resonator according to a second embodiment of the present invention.
  • FIGS. 4( a ) to 4 ( d ) are schematic perspective views of tuning fork crystal resonator plates according to other variant examples.
  • FIGS. 5( a ) to 5 ( c ) are schematic perspective views of tuning fork crystal resonator plates according to other variant examples.
  • a tuning fork crystal resonator 1 includes a tuning fork crystal resonator plate 2 (a piezoelectric resonator plate as used herein), a base 3 for holding the tuning fork crystal resonator plate 2 , and a lid 4 for hermetically enclosing the tuning fork crystal resonator plate 2 held on the base 3 .
  • the base 3 and the lid 4 are bonded together to form a housing
  • the tuning fork crystal resonator plate 2 is bonded onto the base 3 in a housing inner portion 11
  • the housing inner portion 11 is hermetically enclosed.
  • the base 3 and the tuning fork crystal resonator plate 2 are bonded together using a conductive bonding member 5 .
  • the base 3 is made of, for example, a ceramic material, and as shown in FIG. 1 , is formed in the shape of a box composed of a bottom surface portion 31 and a wall portion 32 extending upward from the bottom surface portion 31 .
  • the wall portion 32 is provided along the periphery of a surface of the bottom surface portion 31 .
  • a metallized layer 34 for bonding to the lid 4 is provided on an upper end portion 33 of the wall portion 32 of the base 3 .
  • electrode pads 35 and 36 electrically connected to lead electrodes 65 a and 65 b described later of the tuning fork crystal resonator plate 2 are provided at both end portions of one side of the bottom surface portion 31 in an inner portion (see the housing inner portion 11 ) of the base 3 that is defined by the bottom surface portion 31 and the wall portion 32 .
  • These electrode pads 35 and 36 are electrically connected to respective terminal electrodes (not shown) formed on a rear surface of the base 3 , and are connected via these terminal electrodes to external apparatuses.
  • the electrode pads 35 and 36 and the terminal electrodes are formed by printing a metallization material, such as tungsten, molybdenum, or the like, before baking these parts together with the base 3 , and for example, nickel plating and gold plating are provided thereon.
  • a metallization material such as tungsten, molybdenum, or the like
  • the lid 4 is, as shown in FIG. 2 , made of a metallic material and formed in the shape of a rectangular solid (single board) having a rectangular shape when viewed from the top.
  • a wax material that is not shown is formed on a lower surface of this lid 4 , and is bonded to the base 3 by a method such as seam welding or beam welding, and thus, a housing of the tuning fork crystal resonator 1 is composed of the lid 4 and the base 3 .
  • the housing inner portion 11 as used in this embodiment refers to a portion hermetically enclosed by the lid 4 and the base 3 .
  • the lid 4 may be made of a ceramic material, and hermetic enclosure may be achieved via a glass material.
  • a silicone conductive adhesive containing a plurality of silver fillers is employed as the material for the conductive bonding member 5 .
  • the plurality of silver fillers is combined together into a conductive substance.
  • silicone containing a plurality of silver fillers is employed, the present invention is not limited to this.
  • the tuning fork crystal resonator plate 2 is, as shown in FIGS. 1 and 2 , formed by etching a substrate 6 made of a piece of crystal crystal, which is an anisotropic material.
  • the substrate 6 includes a vibrating portion composed of two leg portions 61 a and 61 b (a first leg portion and a second leg portion) and a base portion 62 , the two leg portions 61 a and 61 b extend from the base portion 62 , and the base portion 62 is formed wider than the vibrating portion (leg portions 61 a and 61 b ).
  • Grooves 63 a and 63 b are formed in both major surfaces (front major surface and rear major surface) of the two leg portions 61 a and 61 b .
  • the grooves 63 a and 63 b as used in this example have a concave cross section as shown in FIG. 1 .
  • the present invention is not limited to this, and the grooves 63 a and 63 b may be through holes, or may be depressions.
  • Two excitation electrodes (a first excitation electrode and a second excitation electrode) that are not shown and that have different potentials, and the lead electrodes 65 a and 65 b (conductive bonding member forming regions as used herein) led from the excitation electrodes so as to electrically connect the excitation electrodes to the electrode pads 35 and 36 (external electrodes as used herein) are provided on the surface of the tuning fork crystal resonator plate 2 .
  • the lead electrodes 65 a and 65 b are shown partially, and the lead electrodes 65 a and 65 b as used in this embodiment refer to electrodes that are led from the two excitation electrodes.
  • the first excitation electrode is composed of a first major surface electrode (not shown) formed in both major surfaces (front major surface and rear major surface) and the groove 63 a of the first leg portion 61 a , and a second side surface electrode (not shown) formed in both side surfaces of the second leg portion 61 b .
  • the first major surface electrode and the second side surface electrode are connected to each other by a routing electrode (not shown) and led to the lead electrode 65 a (or the lead electrode 65 b ).
  • the second excitation electrode is composed of a second major surface electrode (not shown) formed in both major surfaces (front major surface and rear major surface) and the groove 63 b of the second leg portion 61 b , and a first side surface electrode (not shown) formed in both side surfaces of the first leg portion 61 a .
  • the second major surface electrode and the first side surface electrode are connected to each other by a routing electrode (not shown) and led to the lead electrode 65 b (or the lead electrode 65 a ).
  • the above-described excitation electrodes are each a multilayer thin film composed of, for example, an underlying electrode layer of chromium and an upper electrode layer of gold. This thin film is formed on an entire surface by a method such as vacuum deposition, before being formed into a desired shape by performing metal etching using a photolithographic technique.
  • the above-described lead electrodes 65 a and 65 b shown in FIGS. 1 and 2 are each a multilayer thin film composed of, for example, an underlying electrode layer of chromium, an intermediate electrode layer of gold, and an upper electrode layer of chromium.
  • This thin film is formed on an entire surface by a method such as vacuum deposition, before being formed into a desired shape by performing metal etching using a photolithographic technique, and only the upper electrode layer of chromium is formed using a method such as vacuum deposition while partially masking.
  • the excitation electrodes are formed in the order of chromium and gold, the excitation electrodes may be formed in the order of chromium and silver, or in the order of chromium, gold, and chromium, or in the order of chromium, silver, and chromium, for example.
  • the lead electrodes 65 a and 65 b are formed in the order of chromium, gold, and chromium, the lead electrodes 65 a and 65 b may be formed in the order of chromium, silver, and chromium, for example.
  • the base portion 62 is formed wider than the vibrating portion (leg portions 61 a and 61 b ) and has a base portion central region 621 that has the same width as the vibrating portion and from which the vibrating portion (leg portions 61 a and 61 b ) extends, and base portion wider regions 622 and 623 that extend beyond the edges of the vibrating portion in a width direction thereof. That is to say, as shown in FIG. 1 , the base portion 62 is composed of the base portion wider regions 622 and 623 and the base portion central region 621 that are disposed adjacent to each other. As shown in FIG.
  • elongated thin-walled portions 7 a and 7 b designed with a narrow width and having a concave cross section are formed in both major surfaces (front major surface and rear major surface) of this base portion 62 .
  • These thin-walled portions 7 a and 7 b are formed to start at boundary corner portions 64 a and 64 b (serving as one end portions) that lie on boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 and that are located on a side of the base portion 62 from which the leg portions 61 a and 61 b extend. That is to say, the boundary corner portions 64 a and 64 b are used as starting end portions, which are one end portions of the thin-walled portions 7 a and 7 b .
  • the thin-walled portions 7 a and 7 b run from the base portion wider regions 622 and 623 over the base portion central region 621 , and when the base portion 62 shown in FIG. 1 is viewed from the top, terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b are located farther inside the base potion 62 than the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ).
  • the thin-walled portions 7 a and 7 b are formed to inhibit linear connection of the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ) and the vibrating portion (leg portions 61 a and 61 b ), as shown in FIG. 1 . That is to say, the thin-walled portions 7 a and 7 b are interposed between the vibrating portion (leg portions 61 a and 61 b ) and the conductive bonding material forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ).
  • the thin-walled portions 7 a and 7 b are formed in a desired shape by performing half-etching using a photolithographic technique, and in this embodiment, are formed in upper and lower surfaces (both major surfaces) of the base portion 62 in an opposed manner.
  • the lead electrodes 65 a and 65 b of the tuning fork crystal resonator plate 2 and the electrode pads 35 and 36 of the base 3 are bonded together via the conductive bonding member 5 , and thus, the lead electrodes 65 a and 65 b and the electrode pads 35 and 36 are electrically connected to each other.
  • the tuning fork crystal resonator plate 2 As described above, with the tuning fork crystal resonator plate 2 according to this embodiment, it is possible to effectively dispose the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ) in the base portion wider regions 622 and 623 without increasing the length of the base portion 62 of the tuning fork crystal resonator plate 2 while separating the two conductive bonding member forming regions in which the lead electrodes 65 a and 65 b shown in FIG. 1 for bonding to the electrode pads 35 and 36 of the base 3 are formed from each other, and also the bond strength of the tuning fork crystal resonator plate 2 to the base 3 is not decreased.
  • the rigidity of the base portion 62 of the tuning fork crystal resonator plate 2 is not decreased, and leakage of vibration in the leg portions 61 a and 61 b to the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ) can be alleviated more efficiently.
  • the elongated thin-walled portions 7 a and 7 b starting at the boundary corner portions 64 a and 64 b between the base portion central region 621 and the base portion wider regions 622 and 623 are formed, it is possible to effectively dispose the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 1 ) in the base portion wider regions 622 and 623 without increasing the length of the base portion 62 of the tuning fork crystal resonator plate 2 , and also the bond strength of the tuning fork crystal resonator plate 2 is not decreased.
  • the rigidity of the base portion 62 of the tuning fork crystal resonator plate 2 is not decreased, and breakage or the like of the tuning fork crystal resonator plate 2 no longer occurs.
  • FIG. 3 a second embodiment of the present invention will be described with reference to FIG. 3 .
  • the present invention is applied to a tuning fork crystal resonator as a piezoelectric resonator device according to the second embodiment, as is the case with the first embodiment.
  • a configuration different from that of the above-described first embodiment will be described, and the description of the same configuration will be omitted. Therefore, the functions and effects of the same configuration are similar to those of the above-described first embodiment.
  • the second embodiment is different from the above-described first embodiment in that a conductive bump such as a metal bump or a metal-plated bump is used as the material for the conductive bonding member 5 . That is to say, for example, metal bumps 51 such as gold bumps are interposed between the lead electrodes 65 a and 65 b of the tuning fork crystal resonator plate 2 and the electrode pads 35 and 36 of the base 3 , and the lead electrodes 65 a and 65 b and the electrode pads 35 and 36 are bonded to each other by applying ultrasonic waves to the tuning fork crystal resonator plate 2 from the above. In this case, the area of the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG.
  • a tuning fork crystal resonator plate 2 in FIG. 4( a ) is different from the above-described embodiments in that thin-walled portions 7 a and 7 b are formed by half-etching only a major surface at the front (front major surface) using a photolithographic technique. It should be noted that the surface to be half-etched may be on the side of a bonding portion or on another side.
  • thin-walled portions 7 a and 7 b are formed to start at the boundary corner portions 64 a and 64 b (serving as one end portions) that lie on the boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 and that are located on a side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • These thin-walled portions 7 a and 7 b are formed along the boundaries 69 , and when the base portion 62 shown in FIG.
  • the terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b are located farther inside the base portion 62 than the lead electrodes 65 a and 65 b constituting the conductive bonding member forming regions.
  • the conductive bonding member forming regions are disposed adjacent to (parallel to) the outer side of the thin-walled portions 7 a and 7 b in the base portion 62 .
  • a tuning fork crystal resonator plate 2 in FIG. 4( c ) is different from the above-described embodiments in that thin-walled portions 7 a and 7 b are formed by half-etching only a major surface at the front (front major surface) using a photolithographic technique, as is the case with the thin-walled portions 7 a and 7 b shown in FIG. 4( a ). It should be noted that the surface to be half-etched may be on the side of a bonding portion or on another side. Moreover, in the tuning fork crystal resonator plate 2 in FIG.
  • the thin-walled portions 7 a and 7 b are formed to start at boundary corner portions 66 a and 66 b (serving as one end portions) that lie on the boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 and that are located on the opposite side of a side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • These thin-walled portions 7 a and 7 b are formed along the boundaries 69 , and when the base portion 62 shown in FIG.
  • the terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b are located farther inside the base portion 62 than the lead electrodes 65 a and 65 b constituting the conductive bonding member forming regions.
  • the conductive bonding member forming regions are disposed adjacent to (parallel to) the outer side of the thin-walled portions 7 a and 7 b in the base portion 62 .
  • thin-walled portions 7 a , 7 b , 8 a , and 8 b are formed to start at corner portions 67 a , 67 b , 68 a , and 68 b (serving as one end portions) that are located on the outer side of boundary regions (boundaries 69 ) in the base portion 62 (in the base portion wider regions 622 and 623 ), rather than at the boundary corner portions 64 a , 64 b , 66 a , and 66 b between the base portion central region 621 and the base portion wider regions 622 and 623 as described above.
  • the thin-walled portions 7 a and 7 b are formed to start at the corner portions 67 a and 67 b (serving as one end portions) that lie in the base portion wider regions 622 and 623 and that are located on a side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • These thin-walled portions 7 a and 7 b are formed along the boundaries 69 , and when the base portion 62 shown in FIG.
  • the terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b are located farther inside the base portion 62 than the lead electrodes 65 a and 65 b constituting the conductive bonding member forming regions.
  • the thin-walled portions 8 a and 8 b are formed to start at the corner portions 68 a and 68 b (serving as one end portions) that lie in the base portion wider regions 622 and 623 and that are located on the opposite side of the side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • These thin-walled portions 8 a and 8 b are formed along the boundaries 69 .
  • the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 4( d )) can be disposed close to the vibrating portion (leg portions 61 a and 61 b ), so that a further reduction in the size of the base portion 62 can be realized by suppressing an increase in the length of the base portion 62 .
  • the thin-walled portions 7 a , 7 b , 8 a , and 8 b are disposed opposed in the corner portions 67 a , 67 b , 68 a , and 68 b in the base portion 62 .
  • a tuning fork crystal resonator plate 2 in FIG. 5( a ) is different from the above-described embodiments in that thin-walled portions 7 a and 7 b are formed by half-etching only a major surface at the front (front major surface) using a photolithographic technique, as is the case with the thin-walled portions 7 a and 7 b shown in FIG. 4( a ). It should be noted that the surface to be half-etched may be on the side of a bonding portion or on another side. Moreover, the thin-walled portions 7 a and 7 b shown in FIG.
  • the boundary corner portions 64 a and 64 b (serving as one end portions) that lie on the boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 and that are located on a side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • the thin-walled portions 7 a and 7 b run from the base portion wider regions 622 and 623 over the base portion central region 621 while curving toward the opposite side of the side of the base portion 62 from which the leg portions 61 a and 61 b extend. That is to say, when the base portion 62 shown in FIG.
  • the thin-walled portions 7 a and 7 b are curved such that the thin-walled portions 7 a and 7 b bulge downward in the drawing.
  • the terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b are located farther inside the base portion 62 than the conductive bonding member forming regions (lead electrodes 65 a and 65 b shown in FIG. 5( a )). That is to say, the lead electrodes 65 a and 65 b shown in FIG. 5( a ) are formed on the outer side of the thin-walled portions 7 a and 7 b in the base portion 62 shown in FIG. 5( a ).
  • the shape of the thin-walled portions 7 a and 7 b is not limited to the shape of the thin-walled portions 7 a and 7 b that are curved as shown in FIG. 5( a ), and it is also possible that the thin-walled portions 7 a and 7 b are formed in a stepwise manner from the one end portions (boundary corner portions 64 a and 64 b ) to the terminal end portions 71 a and 71 b (the other end portions) and the lead electrodes 65 a and 65 b are formed on the outer side of the thin-walled portions 7 a and 7 b in the base portion 62 .
  • a tuning fork crystal resonator plate 2 in FIG. 5( b ) is different from the above-described embodiments in that thin-walled portions 7 a and 7 b are formed by half-etching only a major surface at the front (front major surface) using a photolithographic technique, as is the case with the thin-walled portions 7 a and 7 b shown in FIG. 4( a ).
  • the surface to be half-etched may be on the side of a bonding portion or on another side.
  • the surface to be half-etched is the front major surface of the base portion 62 in order to achieve good electrical conduction to the excitation electrodes that are not shown so that the excitation electrodes are electrically connected to the electrode pads 35 and 36 .
  • the thin-walled portions 7 a and 7 b are formed along and substantially on the boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 , and run from a side of the base portion 62 from which the leg portions 61 a and 61 b extend to the opposite side. Therefore, when the base portion 62 shown in FIG. 5( b ) is viewed from the top, the thin-walled portions 7 a and 7 b are disposed farther inside the base portion 62 than the lead electrodes 65 a and 65 b constituting the conductive bonding member forming regions.
  • a tuning fork crystal resonator plate 2 in FIG. 5( c ) is different from the above-described embodiments in that thin-walled portions 7 a and 7 b are formed by half-etching only a major surface at the front (front major surface) using a photolithographic technique, as is the case with the thin-walled portions 7 a and 7 b shown in FIG. 4( a ).
  • the surface to be half-etched may be on the side of a bonding portion or on another side.
  • the surface to be half-etched is the front major surface of the base portion 62 in order to achieve good electrical conduction to the excitation electrodes that are not shown so that the excitation electrodes are electrically connected to the electrode pads 35 and 36 .
  • the thin-walled portions 7 a and 7 b are formed to start at boundary corner portions 66 a and 66 b (serving as one end portions) that lie on the boundaries 69 between the base portion central region 621 and the base portion wider regions 622 and 623 and that are located on the opposite side of a side of the base portion 62 from which the leg portions 61 a and 61 b extend.
  • the thin-walled portions 7 a and 7 b are formed along the boundaries 69 , and are bent in a width direction of the base portion 62 to reach side surfaces of the base portion wider regions 622 and 623 , which serve as the terminal end portions 71 a and 71 b (the other end portions) of the thin-walled portions 7 a and 7 b , so as to surround the lead electrodes 65 a and 65 b shown in FIG. 5( c ).
  • the present invention can be embodied and practiced in other different forms without departing from the spirit and essential characteristics thereof.
  • the terminal end portions of the thin-walled portions are located farther inside the base portion than the conductive bonding member forming regions
  • this case is a preferred example, and the present invention is not limited to this.
  • the thin-walled portions inhibit linear connection of the conductive bonding member forming regions and the vibrating portion
  • this case is a preferred example, and the present invention is not limited to this.
  • the thin-walled portions have their terminal end portions in the midst of the base portion, the thin-walled portions may run all the way across the base portion.
  • crystal crystal is preferably used as the material for the piezoelectric resonator plate according to the present invention.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
US11/921,639 2005-06-30 2006-04-21 Piezoelectric Resonator Plate And Piezolectric Resonator Device Abandoned US20090051252A1 (en)

Applications Claiming Priority (3)

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JP2005-190822 2005-06-30
JP2005190822 2005-06-30
PCT/JP2006/308444 WO2007004348A1 (ja) 2005-06-30 2006-04-21 圧電振動片及び圧電振動デバイス

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JP (1) JPWO2007004348A1 (ja)
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US20130154444A1 (en) * 2009-11-18 2013-06-20 Wafer Mems Co., Ltd. Tuning fork quartz crystal resonator
JP2013245937A (ja) * 2012-05-23 2013-12-09 Seiko Epson Corp 力検出素子、力検出モジュール、力検出ユニットおよびロボット
JP2014190949A (ja) * 2013-03-28 2014-10-06 Seiko Epson Corp 振動片およびその製造方法

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US8888286B2 (en) 2009-04-01 2014-11-18 Tearscience, Inc. Full-eye illumination ocular surface imaging of an ocular tear film for determining tear film thickness and/or providing ocular topography
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US9642520B2 (en) 2009-04-01 2017-05-09 Tearscience, Inc. Background reduction apparatuses and methods of ocular surface interferometry (OSI) employing polarization for imaging, processing, and/or displaying an ocular tear film
US8915592B2 (en) 2009-04-01 2014-12-23 Tearscience, Inc. Apparatuses and methods of ocular surface interferometry (OSI) employing polarization and subtraction for imaging, processing, and/or displaying an ocular tear film
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JP5432582B2 (ja) * 2009-04-28 2014-03-05 京セラクリスタルデバイス株式会社 水晶振動素子
CN103152007B (zh) * 2009-12-02 2016-12-28 威华微机电股份有限公司 音叉型石英晶体谐振器
JP2011151562A (ja) * 2010-01-21 2011-08-04 Kyocera Kinseki Corp 音叉型屈曲水晶振動素子
JP5708089B2 (ja) * 2011-03-18 2015-04-30 セイコーエプソン株式会社 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス
JP6005442B2 (ja) * 2012-08-23 2016-10-12 京セラクリスタルデバイス株式会社 水晶振動素子
US9339177B2 (en) 2012-12-21 2016-05-17 Tearscience, Inc. Full-eye illumination ocular surface imaging of an ocular tear film for determining tear film thickness and/or providing ocular topography
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JP6363328B2 (ja) * 2013-03-27 2018-07-25 京セラ株式会社 水晶デバイス
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US9795290B2 (en) 2013-11-15 2017-10-24 Tearscience, Inc. Ocular tear film peak detection and stabilization detection systems and methods for determining tear film layer characteristics
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