US20080206041A1 - Drag Vacuum Pump - Google Patents

Drag Vacuum Pump Download PDF

Info

Publication number
US20080206041A1
US20080206041A1 US11/664,142 US66414205A US2008206041A1 US 20080206041 A1 US20080206041 A1 US 20080206041A1 US 66414205 A US66414205 A US 66414205A US 2008206041 A1 US2008206041 A1 US 2008206041A1
Authority
US
United States
Prior art keywords
housing
rotor
vacuum pump
cartridge
friction vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/664,142
Other languages
English (en)
Inventor
Ralf Adamietz
Roland Blumenthal
Dirk Kalisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ADAMIETZ, RALF, BLUMENTHAL, ROLAND, KALISCH, DIRK
Publication of US20080206041A1 publication Critical patent/US20080206041A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a friction vacuum pump comprising a housing having a vaneless pump stator, a rotor drive and a rotor support.
  • the housing of such friction vacuum pumps surrounds the overall axial length of the pump rotor, the rotor drive and the rotor support.
  • a screw pump is known whose housing essentially comprises three axially adjacent portions which are joined together, for example screwed together, to form a housing.
  • the three housing portions are a stator housing portion, an outlet housing portion which supports a cartridge comprising the motor and/or the support, and a bearing housing portion. Between two adjacent housing portions respective seals are arranged for ensuring the required tightness, which seals may be difficult to coat or impossible to coat at all with a corrosion-inhibiting coating material, for example. Even the greatest care taken during the assembly work cannot completely prevent leaks from occurring in the sealing region. Further, the temperature behavior of the overall housing is inhomogeneous due to the multipart configuration of the housing.
  • the housing is configured in one piece over its overall axial length such that the one-piece housing surrounds the overall axial length of the pump rotor, the rotor drive and the rotor support.
  • the one-piece configuration of the housing ensures a homogeneous temperature behavior of the housing. Since no seals are provided, tightness of the housing can be ensured even over a long term. It is not necessary that the housing itself is composed of a plurality of parts, such that no assembly work and resultant sources of defects occur. Since no seals are provided in the housing region, the housing inside can be easily and continuously coated.
  • the friction vacuum pump housing comprises only an end-side cover, for example, which has no load-bearing function and does thus not require any particular precision during assembly work.
  • the one-piece configuration of the housing improves numerous physical properties of the friction vacuum pump, in particular the temperature behavior, the tightness and the quality of coating of the housing inside.
  • the rotor support and the rotor drive are arranged in a cartridge supported by the housing and surrounded over its overall axial length by the housing.
  • the term cartridge refers to a device designed as a cartridge housing which is of pot-shaped or completely closed configuration and in which a shaft of the rotor support is rotatably supported, said shaft being adapted to be driven by a rotor drive disposed in the cartridge.
  • the support and the drive are arranged in a completely preassembled condition in the closed or nearly closed cartridge.
  • the friction vacuum pump can be easily and reliably assembled.
  • the one-piece configuration of the friction vacuum pump housing and the provision of a single drive and support cartridge result in a modular design of the friction vacuum pump. Both features together facilitate the assembly and disassembly work, which, in turn, improves the assembly accuracy, reduces the assembly expenditure, and facilitates and accelerates the maintenance and repair work.
  • the cartridge comprises a pot-shaped housing which is integrally formed with the friction vacuum pump.
  • the pot opening is closed by a cartridge cover.
  • the one-piece configuration of friction vacuum pump housing and pot-shaped cartridge housing facilitates the assembly work, reduces leaks, and in particular ensures a more precise positioning of the cartridge and/or the rotor drive and the rotor support.
  • At least 50% of the axial length of the cartridge is surrounded by the pump rotor, i.e. at least half the axial length of the cartridge axially extends into the pot-shaped pump rotor. In this manner, a friction vacuum pump configuration which is compact with regard to the overall axial length is realized.
  • a portion of the cartridge housing is defined by the friction vacuum pump housing.
  • the cartridge housing comprises two sections, i.e. one arranged on the rotor side as seen from the mounting location of the cartridge at the housing, and one arranged remote from the rotor.
  • the cartridge section arranged remote from the rotor may be defined by the friction vacuum-pump housing, i.e. the pot-shaped cartridge housing does not comprise a cartridge cover but is terminated by the friction vacuum pump housing.
  • the housing comprises a circular shoulder at its inside, against which the cartridge preferably bears on the suction side and to which the cartridge is fastened.
  • the cartridge together with the rotor, is inserted into the housing preferably from the suction side.
  • the cartridge is placed upon the circular shoulder and fastened by suitable fastening means, for example threaded screws, preferably from the discharge side of the shoulder.
  • suitable fastening means for example threaded screws
  • the pump rotor is a Holweck pump rotor.
  • the surface in the radial plane between a housing-side stator wall and a rotor-side hub may decrease towards the discharge side.
  • the FIGURE shows a longitudinal section of the friction vacuum pump according to the invention.
  • the FIGURE shows a friction vacuum pump 10 which is a screw pump, also referred to as a Holweck pump.
  • the friction vacuum pump 10 essentially comprises a housing 12 which narrows in a funnel-like manner towards the suction side, a cartridge 14 arranged and fastened in the housing 12 , said cartridge 14 including a rotor support not shown and a rotor drive not shown, and a pump rotor 16 comprising a plurality of helically arranged vanes 18 .
  • the housing 12 is of one-piece configuration and surrounds the overall axial length of the pump rotor 16 and the cartridge 14 including the rotor drive and the rotor support.
  • the discharge-side end of the housing 12 is closed by a front-side housing cover 20 .
  • a circular shoulder 22 is provided at the inner circumference, on which circular shoulder 22 a corresponding circular shoulder 24 of the cartridge 14 is supported in a gastight manner.
  • the shoulders 22 , 24 of the housing 12 and the cartridge 14 are screwed together.
  • a rotor shaft 26 extends from the suction side of the cartridge, said shaft 26 supporting the rotor 16 .
  • the rotor 16 is connected with the rotor shaft by screwing, for example.
  • the rotor hub 28 of the rotor 16 tapers towards the suction side.
  • the inside of the housing 12 forms a stator wall 30 which expands towards the suction side. Due to the expansion of the inner diameter of the stator wall and the reduction of the outer diameter of the rotor hub 28 towards the suction side, the surface in the radial plane between the stator wall 30 and the rotor hub 28 increases towards the suction side and decreases towards the discharge side.
  • the housing 12 comprises a gas inlet 32 at its suction-side axial end. A the discharge side of the pump rotor 16 a radial gas outlet 34 is provided.
  • the housing 12 Due to its one-piece configuration the housing 12 , in the portion where it encloses the vacuum, does not comprise any seal towards an adjacent housing portion. Thereby, in particular in that region of the housing 12 which is exposed to the vacuum, a homogeneous temperature behavior is achieved. Coatings of the stator wall 30 are free from discontinuities. Since no seal is provided between two housing portions, no leaks can occur.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US11/664,142 2004-10-01 2005-09-21 Drag Vacuum Pump Abandoned US20080206041A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004047930A DE102004047930A1 (de) 2004-10-01 2004-10-01 Reibungsvakuumpumpe
DE102004047930.5 2004-10-01
PCT/EP2005/054735 WO2006037730A1 (de) 2004-10-01 2005-09-21 Reibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
US20080206041A1 true US20080206041A1 (en) 2008-08-28

Family

ID=35427899

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/664,142 Abandoned US20080206041A1 (en) 2004-10-01 2005-09-21 Drag Vacuum Pump

Country Status (7)

Country Link
US (1) US20080206041A1 (ja)
EP (1) EP1797331B1 (ja)
JP (1) JP2008514862A (ja)
CN (1) CN100458171C (ja)
AT (1) ATE454555T1 (ja)
DE (2) DE102004047930A1 (ja)
WO (1) WO2006037730A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110076201A1 (en) * 2009-09-30 2011-03-31 Joseph Cruickshank Overhung Axial Flow Compressor, Reactor and Method
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015039443A1 (zh) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
CN103452872A (zh) * 2013-09-18 2013-12-18 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
CN104613008B (zh) * 2015-02-28 2017-10-24 北京北仪创新真空技术有限责任公司 一种分子泵的转子
EP3670924B1 (de) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zur herstellung einer solchen

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655678A (en) * 1984-02-24 1987-04-07 Seiko Seiki Kabushiki Kaisha Combined turbo-molecular pump
US4806074A (en) * 1987-02-24 1989-02-21 Alcatel Hochvakuumtechnik Gmbh High-vacuum pump having a bell-shaped rotor
US5154572A (en) * 1990-01-26 1992-10-13 Hitachi Koki Company Limited Vacuum pump with helically threaded cylinders
US5632597A (en) * 1995-03-31 1997-05-27 Osaka Vacuum, Ltd. Thread groove type vacuum pump
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US20020044866A1 (en) * 2000-01-07 2002-04-18 Matsumi Iwane Multiple-type pump
US6619911B1 (en) * 1998-10-07 2003-09-16 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE625444C (de) * 1934-02-24 1936-02-08 Leybold S Nachfolger A G E Molekularluftpumpe
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655678A (en) * 1984-02-24 1987-04-07 Seiko Seiki Kabushiki Kaisha Combined turbo-molecular pump
US4806074A (en) * 1987-02-24 1989-02-21 Alcatel Hochvakuumtechnik Gmbh High-vacuum pump having a bell-shaped rotor
US5154572A (en) * 1990-01-26 1992-10-13 Hitachi Koki Company Limited Vacuum pump with helically threaded cylinders
US5632597A (en) * 1995-03-31 1997-05-27 Osaka Vacuum, Ltd. Thread groove type vacuum pump
US6619911B1 (en) * 1998-10-07 2003-09-16 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US20020044866A1 (en) * 2000-01-07 2002-04-18 Matsumi Iwane Multiple-type pump
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
US20050220607A1 (en) * 2002-06-04 2005-10-06 Ralf Adamietz Evacuating device
US7264439B2 (en) * 2002-06-04 2007-09-04 Oerlikon Leybold Vacuum Gmbh Evacuating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110076201A1 (en) * 2009-09-30 2011-03-31 Joseph Cruickshank Overhung Axial Flow Compressor, Reactor and Method
US8361407B2 (en) 2009-09-30 2013-01-29 Nuovo Pignone S.P.A. Overhung axial flow compressor, reactor and method
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
US10072875B2 (en) 2013-04-26 2018-09-11 Sol-Electrica, Llc Heat concentrator device for solar power system

Also Published As

Publication number Publication date
DE502005008839D1 (de) 2010-02-25
DE102004047930A1 (de) 2006-04-06
ATE454555T1 (de) 2010-01-15
EP1797331A1 (de) 2007-06-20
JP2008514862A (ja) 2008-05-08
EP1797331B1 (de) 2010-01-06
WO2006037730A1 (de) 2006-04-13
CN101031724A (zh) 2007-09-05
CN100458171C (zh) 2009-02-04

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ADAMIETZ, RALF;BLUMENTHAL, ROLAND;KALISCH, DIRK;REEL/FRAME:019143/0052

Effective date: 20070327

Owner name: OERLIKON LEYBOLD VACUUM GMBH,GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ADAMIETZ, RALF;BLUMENTHAL, ROLAND;KALISCH, DIRK;REEL/FRAME:019143/0052

Effective date: 20070327

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION