WO2015039443A1 - 一种抗大气冲击的分子泵 - Google Patents

一种抗大气冲击的分子泵 Download PDF

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Publication number
WO2015039443A1
WO2015039443A1 PCT/CN2014/076478 CN2014076478W WO2015039443A1 WO 2015039443 A1 WO2015039443 A1 WO 2015039443A1 CN 2014076478 W CN2014076478 W CN 2014076478W WO 2015039443 A1 WO2015039443 A1 WO 2015039443A1
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WO
WIPO (PCT)
Prior art keywords
rotor
chassis
molecular pump
exhaust
atmospheric
Prior art date
Application number
PCT/CN2014/076478
Other languages
English (en)
French (fr)
Inventor
董欣
郁晋军
刘敏强
于天化
Original Assignee
北京北仪创新真空技术有限责任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN2013104262846A external-priority patent/CN103452872A/zh
Priority claimed from CN201320578331.4U external-priority patent/CN203488434U/zh
Application filed by 北京北仪创新真空技术有限责任公司 filed Critical 北京北仪创新真空技术有限责任公司
Publication of WO2015039443A1 publication Critical patent/WO2015039443A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Definitions

  • the invention belongs to the technical field of fluid machinery, and particularly relates to a molecular pump resistant to atmospheric impact for obtaining vacuum in semiconductor, energy-saving lamps and solar energy manufacturing industries.
  • the molecular vacuum pump was built in 1911 by the German Gade (w. Gaede) First invented.
  • the principle is that the high-speed moving rigid body surface transmits the momentum to the gas molecules, so that the gas molecules produce directional flow in the moving direction of the rigid body surface, thereby achieving the purpose of pumping.
  • W. Baker of the Federal Republic of Germany first proposed a turbomolecular pump with practical value.
  • the turbomolecular pump is mainly composed of a pump body, a bladed rotor (ie, a moving impeller), a static impeller, and a drive system.
  • the linear velocity at the outer edge of the impeller is as high as the thermal motion of the gas molecules (typically 150 to 400 m/sec).
  • the compression ratio of a single impeller is small, and the turbomolecular pump is composed of a plurality of moving impellers and static impellers.
  • the impeller and the stationary impeller are alternately arranged.
  • the dynamic and static impeller geometry is basically the same, but the blade inclination angle is opposite.
  • the movement of the inclined vanes causes the probability of gas molecules passing from the intake side through the vanes to the exhaust side, much greater than the probability of passing from the exhaust side through the vanes to the intake side.
  • gas molecules continuously flow from the intake side to the exhaust side, thereby generating a pumping action.
  • the Gade traction pump has a high compression ratio in the molecular flow state and can remove various gases and vapors. It is especially suitable for pumping out heavier gases, but it has the characteristics of low pumping speed.
  • the turbomolecular pump has the unique feature of processing multi-stage dynamic and static blades.
  • molecular pumps have been widely used in the above fields.
  • the existing molecular pumps usually have complex structures and are not easy to maintain. The processing is difficult, the manufacturing cost is high, and the shortcomings are not resistant to impact; especially during the exhausting process, some are often encountered due to being pumped.
  • the vacuum device is damaged, the atmosphere is directly charged into the molecular pump, causing the molecular pump to be broken.
  • the molecular pump rotor is improved at present (Patent No. CN202381395U), but it can only increase the resistance to atmospheric pressure to a certain extent, for example, it can reach 4000Pa, but it cannot achieve complete exposure to the atmosphere.
  • the object of the present invention is to solve the problem that the molecular pump manufactured by the prior art has a complicated structure, is inconvenient to maintain, has high processing difficulty, high manufacturing cost, and is not resistant to impact.
  • the problem is to provide a molecular pump that is simple in structure, easy to maintain, easy to process, less difficult to manufacture, low in processing cost, and resistant to impact, especially against atmospheric impact without crushing the pump.
  • a molecular pump resistant to atmospheric impact comprising a chassis, a motor mounted on the chassis, a rotor attached to the main shaft of the motor, and a pump casing that is fastened to the rotor and the chassis.
  • the central portion of the chassis has a cylindrical through hole in the axial direction, and an annular groove is arranged in the periphery of the cylindrical through hole, and an exhaust port is arranged on the outer side of the bottom plate near the bottom portion, and the exhaust port communicates with the annular groove;
  • the motor main shaft extends upward to the outside of the top of the chassis;
  • the rotor is cylindrical, and the outer surface thereof has 4 to 8 spiral exhaust grooves uniformly from the top to the bottom, and the row
  • the gas groove extends from the starting end in the axial direction, the depth gradually becomes shallower and shallower, and the width gradually narrows from the width to the bottom end of the rotor outer surface, and the rib between each adjacent two spiral exhaust grooves is set as a blade
  • the inner part of the rotor is provided with a mounting layer, a through hole is formed in the center of the mounting layer, and a hollow cavity is arranged on the upper and lower sides of the mounting layer.
  • the pump casing has a cylindrical structure, and the bottom is open and the inner cylinder is The cavity has an air inlet at the top.
  • the depth of the starting end of the exhaust groove is 30 ⁇ 60mm, the depth of the tail end is 2 ⁇ 5mm, and the intermediate depth gradient is decreasing.
  • the cross-sectional outer contour of the rib formed by the adjacent two exhaust grooves is an approximately trapezoidal curved surface, and the height of the cross-section gradually decreases as the depth of the exhaust groove decreases.
  • the diameter of the tip end of the rotor is 10 to 30 mm larger than the diameter of the bottom end.
  • the ratio of the tip blade pitch to the blade chord length of the rotor is 1.3 to 1.5.
  • the rotor can extend into the annular groove on the chassis, and the rib formed by the external exhaust groove of the rotor has a clearance fit with the annular groove, and the matching clearance is 0.2-0.6 mm; the side of the chassis annular groove is close to the center. Spiral seal, the inner wall of the lower side of the rotor mounting layer has a clearance fit with the spiral seal, and the matching clearance is 0.3 ⁇ 0.6mm; the pump casing is fastened on the rotor, and the ribs formed by the inner wall of the cavity and the outer exhaust groove of the rotor exist.
  • the clearance fits with a clearance of 0.3 ⁇ 0.7mm.
  • the central through hole of the inner mounting layer of the rotor is tapered.
  • An oil pool seat is installed at a central portion of the lower portion of the chassis, and lubricating oil is placed in the oil pool seat, and a lower end of the motor shaft extends into the oil pool seat.
  • An exhaust port flange is disposed outside the exhaust port on the chassis.
  • the rotor is integrally formed from a cylindrical hard aluminum alloy material.
  • the rotor is integrally formed from a hard aluminum alloy material, which also makes the rotor have a high strength and can withstand the impact of the diameter of the atmosphere during operation.
  • the invention solves the problem that the molecular pump is broken due to the damage of the vacuuming device and the atmosphere is directly charged into the molecular pump.
  • the utility model has the advantages of simple structure, convenient maintenance, easy processing, low manufacturing difficulty, low processing cost, high impact resistance, high pumping speed, and especially the direct impact of the atmosphere without the phenomenon of crushing the pump.
  • FIG. 1 is a schematic cross-sectional structural view of a molecular pump embodiment 1, an embodiment 2, and a third embodiment of an anti-atmospheric impact pump provided by the present invention.
  • FIG. 2 is a schematic view showing the structure of a rotor for an atmospheric shock resistant molecular pump according to the first embodiment, the second embodiment, and the third embodiment.
  • FIG 3 is a schematic cross-sectional structural view of a rotor of a molecular pump according to the first embodiment, the second embodiment, and the third embodiment of the present invention.
  • FIG. 4 is a molecular pump of the present invention, which is resistant to atmospheric impact.
  • FIG. 4 is a schematic view showing the structure of the rotor of Embodiment 4, Embodiment 5 and Embodiment 6. .
  • FIG. 5 is a schematic cross-sectional structural view of a rotor of an embodiment 3, an embodiment 5, and a sixth embodiment of a molecular pump resistant to atmospheric impact provided by the present invention.
  • Embodiment 1 a molecular pump resistant to atmospheric impact, as shown in FIG. 1, FIG. 2, FIG. 3, including a chassis 3
  • the middle portion of the chassis 3 has a cylindrical through hole in the axial direction, and an annular groove is arranged in the periphery of the cylindrical through hole.
  • the outer side of the chassis 3 is provided with an exhaust port near the bottom, and the exhaust port communicates with the annular groove.
  • the exhaust port on the chassis 3 is provided with a vent flange 5, the upper portion of the base 3 is provided with a bearing seat 11, and the upper portion of the bearing housing 11 is provided with a bearing seat cover 12, and the side of the annular groove of the chassis 3 is disposed near the center.
  • a motor 9 is embedded in a cylindrical through hole in the chassis 3, and the motor main shaft 8 is supported and positioned by the upper bearing 10 and the lower bearing 7, and the upper bearing 10 is mounted in the bearing housing 11 and passes through the bearing housing cover 12 and the chassis 3 Fixed, lower bearing 6 and chassis 3 Directly fixed, the motor main shaft 8 extends upward to the outer side of the top of the chassis 3, and the oil pool seat 6 is installed at the lower central portion of the chassis 3, and the lubricating oil is placed in the oil pool seat 6, and the lower end of the motor main shaft 8 extends into the oil pool seat 6.
  • a rotor 2 integrally formed of a cylindrical hard aluminum alloy material is mounted, and the outer surface thereof is uniformly opened with five spiral exhaust grooves from the top to the bottom, and the exhaust groove starts from the starting end.
  • the venting groove has a starting end depth of 40 mm, a tail end depth of 4 mm, a middle depth gradient decreasing, and a rib cross section formed by two adjacent venting grooves.
  • the height of the cross section gradually decreases as the depth of the exhaust groove decreases, so that the vertical distance between any point on the rib and the central axis of the rotor is equal, and an inner portion of the rotor 2 is provided with an installation.
  • the layer has a tapered through hole at the center of the mounting layer, and a hollow cavity on each of the upper and lower sides of the mounting layer, wherein the upper hollow body can be It has a collecting effect when foreign matter falls in, which greatly reduces the damage of the foreign body to the pump. Moreover, the weight of the rotor 2 can be reduced, the material is saved, and the production cost is reduced.
  • the lower cavity wall of the rotor extends into the annular groove of the chassis 3, is fastened on the chassis 3, covers the central portion of the chassis 3, and is embedded and mounted on the chassis 3.
  • a motor 9 in a cylindrical through hole, the rotor 2 and the motor main shaft 8 are tapered by a tapered through hole, and fixed by a fixing screw 13
  • the pump casing 1 is fastened on the rotor 2 and the chassis 3, and the pump casing 1 has a cylindrical structure, the bottom of which is open, the inside is a cylindrical cavity, and the top is provided with an air inlet; the rotor 2 extends into the chassis 3 In the upper annular groove, the rib portion formed by the outer exhaust groove of the rotor 2 has a clearance fit with the annular groove, and cooperates The clearance is 0.2mm; the inner wall of the lower layer of the rotor 2 is layered with the spiral seal 4, and the matching clearance is 0.3mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity and the outer exhaust groove of the rotor 2 are formed. There is a clearance fit in the ribs, and the fit clearance is 0.3 mm.
  • the pumping process in the specific use is: under the drive of the motor 9, the motor spindle 8 drives the rotor 2 to rotate at a high speed, the gas The molecule collides with the rotor rotating at high speed Momentum, and under the action of the exhausting passage formed by the rotor 2 and the outer casing 1 and the chassis 3, is exhausted from the air inlet to the exhaust port flange 5, and is withdrawn through the pre-stage pumping system. The gas inside the pump body is exhausted through the exhaust passage formed by the rotor 2 and the spiral seal 4.
  • Embodiment 1 a molecular pump resistant to atmospheric impact, as shown in FIG. 1, FIG. 2, FIG. 3, including a chassis 3
  • the middle portion of the chassis 3 has a cylindrical through hole in the axial direction, and an annular groove is arranged in the periphery of the cylindrical through hole.
  • the outer side of the chassis 3 is provided with an exhaust port near the bottom, and the exhaust port communicates with the annular groove.
  • the exhaust port on the chassis 3 is provided with a vent flange 5, the upper portion of the base 3 is provided with a bearing seat 11, and the upper portion of the bearing housing 11 is provided with a bearing seat cover 12, and the side of the annular groove of the chassis 3 is disposed near the center.
  • a motor 9 is embedded in a cylindrical through hole in the chassis 3, and the motor main shaft 8 is supported and positioned by the upper bearing 10 and the lower bearing 7, and the upper bearing 10 is mounted in the bearing housing 11 and passes through the bearing housing cover 12 and the chassis 3 Fixed, lower bearing 6 and chassis 3 Directly fixed, the motor main shaft 8 extends upward to the outer side of the top of the chassis 3, and the oil pool seat 6 is installed at the lower central portion of the chassis 3, and the lubricating oil is placed in the oil pool seat 6, and the lower end of the motor main shaft 8 extends into the oil pool seat 6.
  • a rotor 2 integrally formed of a cylindrical hard aluminum alloy material is mounted, and the outer surface thereof is uniformly opened with five spiral exhaust grooves from the top to the bottom, and the exhaust groove starts from the starting end.
  • the venting groove has a starting end depth of 40 mm, a tail end depth of 4 mm, a middle depth gradient decreasing, and a rib cross section formed by two adjacent venting grooves.
  • the height of the cross section gradually decreases as the depth of the exhaust groove decreases, so that the vertical distance between any point on the rib and the central axis of the rotor is equal, and an inner portion of the rotor 2 is provided with an installation.
  • the layer has a tapered through hole at the center of the mounting layer, and a hollow cavity on each of the upper and lower sides of the mounting layer, wherein the upper hollow body can be It has a collecting effect when foreign matter falls in, which greatly reduces the damage of the foreign body to the pump. Moreover, the weight of the rotor 2 can be reduced, the material is saved, and the production cost is reduced.
  • the lower cavity wall of the rotor extends into the annular groove of the chassis 3, is fastened on the chassis 3, covers the central portion of the chassis 3, and is embedded and mounted on the chassis 3.
  • a motor 9 in a cylindrical through hole, the rotor 2 and the motor main shaft 8 are tapered by a tapered through hole, and fixed by a fixing screw 13
  • the pump casing 1 is fastened on the rotor 2 and the chassis 3, and the pump casing 1 has a cylindrical structure, the bottom of which is open, the inside is a cylindrical cavity, and the top is provided with an air inlet; the rotor 2 extends into the chassis 3 In the upper annular groove, the rib portion formed by the outer exhaust groove of the rotor 2 has a clearance fit with the annular groove, and cooperates The clearance is 0.2mm; the inner wall of the lower layer of the rotor 2 is layered with the spiral seal 4, and the matching clearance is 0.3mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity and the outer exhaust groove of the rotor 2 are formed. There is a clearance fit in the ribs, and the fit clearance is 0.3 mm.
  • the pumping process in the specific use is: under the drive of the motor 9, the motor spindle 8 drives the rotor 2 to rotate at a high speed, the gas The molecule collides with the rotor rotating at high speed Momentum, and under the action of the exhausting passage formed by the rotor 2 and the outer casing 1 and the chassis 3, is exhausted from the air inlet to the exhaust port flange 5, and is withdrawn through the pre-stage pumping system. The gas inside the pump body is exhausted through the exhaust passage formed by the rotor 2 and the spiral seal 4.
  • Embodiment 2 a molecular pump resistant to atmospheric impact as shown in FIG. 1, FIG. 2, FIG. 3, which differs from Embodiment 1 in the height H of the rotor 2.
  • the depth of the starting end of the exhaust groove is 30mm, the depth of the tail end is 2mm, the intermediate depth gradient decreases, the ribs formed by the outer exhaust groove of the rotor 2 have a clearance fit with the annular groove, the matching clearance is 0.6mm; the lower layer of the rotor 2 is installed.
  • the inner wall has a clearance fit with the spiral seal 4, and the matching clearance is 0.6 mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity has a clearance fit with the rib formed by the outer exhaust groove of the rotor 2, and the clearance is 0.7.
  • Mm other structural features are the same as in the first embodiment, and the description will not be repeated.
  • Embodiment 3 a molecular pump resistant to atmospheric impact as shown in FIG. 1, FIG. 2, FIG. 3, which differs from Embodiment 1 in the height H of the rotor 2.
  • the depth of the starting end of the exhaust groove is 45mm, the depth of the tail end is 3.5mm, and the intermediate depth gradient is decreasing.
  • the ribs formed by the outer exhaust groove of the rotor 2 have a clearance fit with the annular groove, and the matching clearance is 0.4mm; the lower layer of the rotor 2 is installed.
  • the inner wall of the cavity has a clearance fit with the spiral seal 4, and the matching clearance is 0.4 mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity has a clearance fit with the rib formed by the outer exhaust groove of the rotor 2, and the clearance is 0.4 mm, other structural features are the same as in Embodiment 1, and the description will not be repeated.
  • Embodiment 4 as shown in FIG. 4 and FIG. 5, a molecular pump resistant to atmospheric impact, which differs from Embodiment 1 in that the rotor 2 is provided with a widened portion on the outer side of the blade near the tip end portion, with a widened portion.
  • the blade length accounts for 40% of the total length of the blade, the tip diameter of the rotor 2 is 10 mm larger than the diameter of the bottom end, and the ratio of the tip blade pitch of the rotor 2 to the blade chord length is 1.3.
  • the rotor 2 extends into the annular groove on the chassis 3, and the rib formed by the external exhaust groove of the rotor 2 has a clearance fit with the annular groove.
  • the clearance is 0.3mm; the inner wall of the lower layer of the rotor 2 installation layer has a clearance fit with the spiral seal 4, and the matching clearance is 0.3mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity and the outer exhaust groove of the rotor 2 are formed. There is a clearance fit in the ribs, and the matching gap is 0.4 mm.
  • Other structural features are the same as those in Embodiment 1, and the description will not be repeated.
  • Embodiment 5 as shown in FIG. 4 and FIG. 5, a molecular pump resistant to atmospheric impact, which differs from Embodiment 1 in that the rotor 2 is provided with a widened portion on the outer side of the blade near the tip end portion, with a widened portion.
  • the blade length accounts for 50% of the total length of the blade, the tip diameter of the rotor 2 is 20 mm larger than the diameter of the bottom end, and the ratio of the tip blade pitch of the rotor 2 to the blade chord length is 1.4.
  • the rotor 2 extends into the annular groove on the chassis 3, and the rib formed by the external exhaust groove of the rotor 2 has a clearance fit with the annular groove.
  • the clearance is 0.4mm; the inner wall of the lower layer of the rotor 2 is layered with the spiral seal 4, and the matching clearance is 0.4mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity and the outer exhaust groove of the rotor 2 are formed.
  • Other structural features are the same as those in Embodiment 1, and the description will not be repeated.
  • Embodiment 6 is an anti-atmospheric impact molecular pump as shown in FIG. 4 and FIG. 5, which differs from Embodiment 1 in that the rotor 2 is provided with a widened portion on the outer side of the blade near the tip end portion, with a widened portion.
  • the blade length accounts for 60% of the total length of the blade, the tip diameter of the rotor 2 is 30 mm larger than the diameter of the bottom end, and the ratio of the tip blade pitch of the rotor 2 to the blade chord length is 1.5.
  • the rotor 2 extends into the annular groove on the chassis 3, and the rib formed by the external exhaust groove of the rotor 2 has a clearance fit with the annular groove.
  • the clearance is 0.5mm; the inner wall of the lower layer of the rotor 2 mounting layer has a clearance fit with the spiral seal 4, and the matching clearance is 0.5 mm; the pump casing 1 is fastened on the rotor 2, and the inner wall of the cavity and the outer exhaust groove of the rotor 2 are formed. There is a clearance fit in the ribs, and the matching gap is 0.6 mm. Other structural features are the same as those in Embodiment 1, and the description will not be repeated.
  • the rotor is modified to have a tip diameter that is 10 to 30 mm larger than the diameter of the bottom end, so that the blade size of the rotor tip is increased, that is, the size of the pump end of the molecular pump is increased, so that the intake air is increased by ensuring the rotor mass.
  • the area of the pumping area is increased to increase the pumping rate and reduce the pressure of the rotor on the bearing.
  • the present invention provides an anti-atmospheric impact molecular pump that is well solved for some of the pumping
  • the vacuum device is damaged, and the atmosphere is directly charged into the molecular pump, causing the molecular pump to be broken, and has a simple structure.
  • Easy to maintain, easy to process, low manufacturing difficulty, low processing cost, high impact resistance, high pumping speed can directly withstand the impact of atmospheric impact without breaking, greatly improving the safety of the pump.
  • the unique rotor structure and exhaust mode are compared with conventional molecular pumps at 10 Between 0 Pa and 0.01 Pa, it has superior exhaust capacity, which greatly shortens the pumping time of the system and reduces the operating cost of the system.

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Abstract

一种抗大气冲击的分子泵，包括底盘（3），底盘（3）中部安装有电机（9），转子（2）扣装在底盘（3）上，泵壳（1）通过螺钉固定扣装在转子（2）与底盘（3）上，泵壳（1）顶部设有进气口，底盘（3）侧面靠近底部设有排气口；转子（2）由圆柱形硬质铝合金材料整体加工成型，转子（2）从顶部至底部均匀开有4〜8个螺旋形排气槽，转子（2）内部设有一个安装层，其上下两侧为中空腔体，安装层中心位置开有一个锥形通孔；电机主轴（8）延伸到底盘上部的部分插入转子安装层上的锥形通孔内，与锥形通孔紧密配合。这种分子泵结构简单，便于维护，能降低生产成本，易于加工，转子强度高，具有抗大气冲击的能力。

Description

一种 抗大气冲击的分子泵 技术领域
本发明属于流体机械技术领域，尤其涉及用于半导体、节能灯、太阳能制造行业获得真空的一种抗大气冲击的分子泵。
背景技术
分子真空泵是在 1911 年由德国人盖德 (w · Gaede) 首先发明的。其原理是靠高速运动的刚体表面传递给气体分子以动量，使气体分子在刚体表面的运动方向上产生定向流动，从而达到抽气的目的。1958年，联邦德国的W.贝克首次提出有实用价值的涡轮分子泵。涡轮分子泵主要由泵体、带叶片的转子（即动叶轮）、静叶轮和驱动系统等组成。动叶轮外缘的线速度高达气体分子热运动的速度（一般为150～400米／秒）。单个叶轮的压缩比很小，涡轮分子泵要由多个动叶轮和静叶轮组成。动叶轮和静叶轮交替排列。动、静叶轮几何尺寸基本相同，但叶片倾斜角相反。倾斜叶片的运动使气体分子从进气侧穿过叶片到达排气侧的几率，比从排气侧穿过叶片到达进气侧的几率大得多。叶轮连续旋转，气体分子便不断地由进气侧流向排气侧，从而产生抽气作用。
盖德牵引泵在分子流态下有很高的压缩比，能抽除各种气体和蒸汽，特别适于抽除较重的气体，但存在抽速小的特点。涡轮分子泵则存在加工多级动静叶片工艺复杂的特点。
随着科技发展，特别是节能减排驱使下，半导体、节能灯、太阳能等领域得到大力发展，而分子泵在上述领域得到广泛应用，现有的分子泵通常都具有结构复杂，不便于维护，加工难度大，制造成本高，不耐冲击的缺点；尤其在排气过程中，常遇到一些因被抽 真空 装置 损坏 ，大气直接充入分子泵，造成分子泵碎裂状况，目前虽然对分子泵转子有所改进（专利号 CN202381395U），但只能在一定程度提高抗气压强，比如可以达到4000Pa，但并不能实现完全暴露在大气中。
技术问题
本发明的目的在于解决现有技术制造的分子泵 结构复杂，不便于维护，加工难度大，制造成本高，不耐冲击 的问题，而提供 结构 简单 ， 便于维护，易于加工，制造难度小，加工成本低，耐冲击，尤其可抵抗大气直接冲击而不会发生碎泵现象的 一种抗大气冲击的分子泵 。
技术解决方案
本发明所采用的技术方案是：
一种抗大气冲击的分子泵 ，包括底盘 、安装在底盘上的电机、连接在电机主轴上的转子和 固定扣装在转子与底盘上的泵壳， 所述底盘的中部轴向有一个圆柱形通孔，圆柱形通孔外围设有一个环形槽，底盘外侧面靠近底部位置设有一个排气口，排气口与环形槽连通；所述电机为嵌入安装在底盘上的圆柱形通孔内，电机主轴向上延伸到底盘顶部外侧；所述的转子为圆柱形，其外表面从顶部至底部均匀开有4~8条螺旋形排气槽，排气槽从起始端开始沿轴向延伸，深度逐渐由深变浅，宽度逐渐由宽变窄，直至转子外表面底端，每相邻两个螺旋形排气槽之间的筋部设置成叶片，转子内部居中部位设有一个安装层，安装层中心位置开有一个通孔，安装层的上下两侧各有一个中空腔体，所述泵壳为圆柱形结构，其底部开放，内为圆柱形腔体，顶部设有进气口。
所述排气槽的起始端深度为30~60mm，尾端深度为2~5mm，中间深度梯度递减。
所述相邻两个排气槽形成的筋部的横截面外轮廓为近似梯形的曲面，所述横截面的高度随排气槽深度的递减而逐渐递减。
所述转子的顶端直径比底端直径大10~30mm。
所述转子的顶端叶片节距和叶片弦长的比值为1.3~1.5。
所述的转子能伸入到底盘上的环形槽内，转子外部排气槽构成的筋部与环形槽存在间隙配合，配合间隙为0.2~0.6mm；底盘环形槽内靠近中心的一侧套装有螺旋封，转子安装层下侧腔体内壁与螺旋封存在间隙配合，其配合间隙为0.3~0.6mm；泵壳扣装在转子上，其腔体内壁与转子外部排气槽构成的筋部存在间隙配合，配合间隙为0.3~0.7mm。
所述的转子内部安装层中心通孔为锥形。
所述的底盘下部中心部位安装有油池座，油池座内放置有润滑油，电机主轴下端伸入到油池座内。
所述底盘上的排气口外侧装有排气口法兰。
所述的转子由圆柱形硬质铝合金材料整体加工成型。
 有益效果
本发明的有益效果在于：
  1. 1. 因为现有技术通常是在转子外表面加工安装叶片，本发明提供的一种抗大气冲击的分子泵，其转子采用整块圆柱形材料直接在其外表面加工出螺旋形排气槽，相邻两个排气槽构成的筋部与转子本身为一体结构，较之现有技术的叶片与转子本身为连接结构大幅增加了转子强度，使其拥有抵抗大气直接冲击的能力，并且螺旋形排气槽相比叶片更易加工，使得转子的制造成本也大幅降低；
  1. 2. 本发明提供的一种抗大气冲击的分子泵，取消了定片、隔环，降低了设备的复杂程度，降低了生产成本，且便于维护；
  1. 3. 转子的排气槽从起始端开始沿轴向深度逐渐由深变浅，宽度逐渐由宽变窄，直至排气槽尾端，可取得较大的抽速和压缩比，合理的排气槽的深度与宽度也使得和常规分子泵相比，在10 0 Pa到0.01Pa之间有更优越的排气能力，大大缩短了系统的抽气时间，降低了系统运营成本；
  1. 4. 转子安装层的上下两侧各有一个中空腔体，其中上层中空腔体既可以在 有异物掉入时起到收集作用， 大大 降低了异物对泵的损坏 ，又可以减去转子重量，降低生产成本；下层中空腔体使得整个转子的结构更加合理，便于安装；
  1. 5. 转子外表面 相邻两个排气槽形成的筋部的横截面外轮廓为近似梯形的曲面，使得筋部具有较高的强度，耐冲击，并同时利于排气；
  1. 6. 将转子改进为其顶端直径比底端直径大10~30mm，使转子顶端的叶片尺寸增大，即分子泵进气端叶片尺寸增大，使得在保证转子质量一定情况下，通过增大进气口抽气面积，达到提高抽气速率，减小转子对轴承的压力目的；
  1. 7. 进一步将 转子的顶端叶片节距和叶片弦长的比值设定为1.3~1.5之间，优化了转子槽内壁的曲线，使转子槽内壁曲线进一步内凹，从而达到提高抽速目的；
  1. 8. 各部件间合理的配合间隙尺寸，也使得本发明提供的分子泵整体具有更好的排气能力；
  1. 9. 转子内部 安装层中心通孔为锥形，可以与电机主轴顶端配合的更加紧密，不易滑脱；
  1. 10. 底盘下部中心部位安装有油池座，油池座内放置有润滑油，电机主轴下端伸入到油池座内，可以使电机主轴在工作时获得不间断润滑，提高分子泵的使用效率，延长使用寿命；
转子由硬质铝合金材料整体加工成型，也使得转子具有较高的强度，在工作过程中能抵抗大气的直径冲击。
本发明很好地解决了 因被抽 真空 装置 损坏 ，大气直接充入分子泵，造成分子泵碎裂 的问题，具有 结构 简单 ， 便于维护，易于加工，制造难度小，加工成本低，耐冲击，抽速高，尤其可抵抗大气直接冲击而不会发生碎泵现象的优点 。
附图说明
图1为本发明提供的一种抗大气冲击的分子泵实施例1、实施例2、实施例3的剖面结构示意图。
图2为本发明提供的一种抗大气冲击的分子泵实施例1、实施例2、实施例3的转子的结构示意图。
图3为本发明提供的一种抗大气冲击的分子泵实施例1、实施例2、实施例3的转子的剖面结构示意图。
图4为 本发明提供的一种 抗 大气冲击 的 分子泵 实施例4、实施例5、实施例6的 转子结构示意图 。
图5为本发明提供的一种抗大气冲击的分子泵实施例4、实施例5、实施例6的转子的剖面结构示意图。
图中：1、泵壳；2、转子；3、底盘；4、螺旋封；5、排气口法兰；6、油池座；7、下轴承；8、电机主轴；9、电机；10、上轴承；11、轴承座；12、轴承座压盖；13、固定螺钉 。
 本发明的最佳实施方式
实施例1，如图1、图2、图3所示一种抗大气冲击的分子泵 ，包括底盘3 ，所述的底盘3中部轴向有一个圆柱形通孔，圆柱形通孔外围设有一个环形槽，底盘3外侧面靠近底部位置设有一个排气口，排气口与环形槽连通， 底盘3上的排气口外侧装有排气口法兰5，底座3上部设有轴承座11，轴承座11上部设有轴承座压盖12，底盘3环形槽内靠近中心的一侧套装有螺旋封4，； 在底盘3上的圆柱形通孔内嵌入安装有电机9，电机主轴8通过上轴承10与下轴承7支撑定位，上轴承10装于轴承座11中，并通过轴承座压盖12与底盘3固定，下轴承6与底盘3 直接固定，电机主轴8向上延伸到底盘3顶部外侧， 底盘3下部中心部位安装有油池座6，油池座6内放置有润滑油，电机主轴8下端伸入到油池座6内 ；在电机主轴8上部安装有一个由圆柱形硬质铝合金材料整体加工成型的转子2，其外表面从顶部至底部均匀开有5条螺旋形排气槽，排气槽从起始端开始沿轴向延伸，深度逐渐由深变浅，宽度逐渐由宽变窄，直至转子外表面底端，每相邻两个螺旋形排气槽之间的筋部设置成叶片， 所述排气槽的起始端深度为40mm，尾端深度为4mm，中间深度梯度递减，相邻两个排气槽形成的筋部横 截面 外轮廓 为近似于梯形的拱形曲面，所述横截面的高度随排气槽深度的递减而逐渐递减，使得筋部上任一点与转子中心轴线的垂直距离均相等，转子2内部居中部位设有一个安装层，安装层中心位置开有一个锥形通孔，安装层的上下两侧各有一个中空腔体，其中上层中空腔体既可以在 有异物掉入时起到收集作用， 大大 降低了异物对泵的损坏 ，又可以减去转子2重量，节省材料，降低生产成本，转子下层腔壁伸入到底盘3的环形槽内，扣装在底盘3上，覆盖底盘3中心部位及嵌入安装在底盘3上的圆柱形通孔内的电机9，转子2与电机主轴8通过锥形通孔形成锥面配合，并通过固定螺钉13固定， 转子 2高度H 与直径 D的 取值一般为： H = （ 1~1.5 ） D ，此种比例关系可在一定 转子质量下，可获得 比较 好的真空性能 ，本实施例中选取 转子 2高度H 与直径 D的关系为：H =D ；在转子2与底盘3上扣装由泵壳1，所述泵壳1为圆柱形结构，其底部开放，内为圆柱形腔体，顶部设有进气口；转子2伸入到底盘3上的环形槽内，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合 间隙为0.2mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.3mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.3mm。
具体使用时的抽气过程为：在电机9驱动下，电机主轴8带动转子2高速旋转，气体 分子与高速旋转的转子碰撞获得 动量，并在转子2与外壳1及底盘3形成抽气通道作用下，由进气口排向排气口法兰5，经前级抽气系统抽走。泵体内部气体通过转子2与螺旋封4形成的排气通道排走。
 本发明的实施方式
实施例1，如图1、图2、图3所示一种抗大气冲击的分子泵 ，包括底盘3 ，所述的底盘3中部轴向有一个圆柱形通孔，圆柱形通孔外围设有一个环形槽，底盘3外侧面靠近底部位置设有一个排气口，排气口与环形槽连通， 底盘3上的排气口外侧装有排气口法兰5，底座3上部设有轴承座11，轴承座11上部设有轴承座压盖12，底盘3环形槽内靠近中心的一侧套装有螺旋封4，； 在底盘3上的圆柱形通孔内嵌入安装有电机9，电机主轴8通过上轴承10与下轴承7支撑定位，上轴承10装于轴承座11中，并通过轴承座压盖12与底盘3固定，下轴承6与底盘3 直接固定，电机主轴8向上延伸到底盘3顶部外侧， 底盘3下部中心部位安装有油池座6，油池座6内放置有润滑油，电机主轴8下端伸入到油池座6内 ；在电机主轴8上部安装有一个由圆柱形硬质铝合金材料整体加工成型的转子2，其外表面从顶部至底部均匀开有5条螺旋形排气槽，排气槽从起始端开始沿轴向延伸，深度逐渐由深变浅，宽度逐渐由宽变窄，直至转子外表面底端，每相邻两个螺旋形排气槽之间的筋部设置成叶片， 所述排气槽的起始端深度为40mm，尾端深度为4mm，中间深度梯度递减，相邻两个排气槽形成的筋部横 截面 外轮廓 为近似于梯形的拱形曲面，所述横截面的高度随排气槽深度的递减而逐渐递减，使得筋部上任一点与转子中心轴线的垂直距离均相等，转子2内部居中部位设有一个安装层，安装层中心位置开有一个锥形通孔，安装层的上下两侧各有一个中空腔体，其中上层中空腔体既可以在 有异物掉入时起到收集作用， 大大 降低了异物对泵的损坏 ，又可以减去转子2重量，节省材料，降低生产成本，转子下层腔壁伸入到底盘3的环形槽内，扣装在底盘3上，覆盖底盘3中心部位及嵌入安装在底盘3上的圆柱形通孔内的电机9，转子2与电机主轴8通过锥形通孔形成锥面配合，并通过固定螺钉13固定， 转子 2高度H 与直径 D的 取值一般为： H = （ 1~1.5 ） D ，此种比例关系可在一定 转子质量下，可获得 比较 好的真空性能 ，本实施例中选取 转子 2高度H 与直径 D的关系为：H =D ；在转子2与底盘3上扣装由泵壳1，所述泵壳1为圆柱形结构，其底部开放，内为圆柱形腔体，顶部设有进气口；转子2伸入到底盘3上的环形槽内，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合 间隙为0.2mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.3mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.3mm。
具体使用时的抽气过程为：在电机9驱动下，电机主轴8带动转子2高速旋转，气体 分子与高速旋转的转子碰撞获得 动量，并在转子2与外壳1及底盘3形成抽气通道作用下，由进气口排向排气口法兰5，经前级抽气系统抽走。泵体内部气体通过转子2与螺旋封4形成的排气通道排走。
实施例2， 如图1、图2、图3所示一种抗大气冲击的分子泵，其与实施例1的区别在于 转子 2高度H 与直径 D的关系为：H = 1.5 D ，转子外表面从顶部至底部均匀开有5条螺旋形排气槽， 排气槽的起始端深度为30mm，尾端深度为2mm，中间深度梯度递减，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合间隙为0.6mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.6mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.7mm，其他结构特征均与实施例1相同，不再重复叙述。
实施例3， 如图1、图2、图3所示一种抗大气冲击的分子泵，其与实施例1的区别在于 转子 2高度H 与直径 D的关系为：H = 1.2 D ，转子外表面从顶部至底部均匀开有5条螺旋形排气槽， 排气槽的起始端深度为45mm，尾端深度为3.5mm，中间深度梯度递减，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合间隙为0.4mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.4mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.4mm，其他结构特征均与实施例1相同，不再重复叙述。
实施例4，如图4、图5所示一种抗大气冲击的分子泵，其与实施例1的区别在于所述转子2靠近顶端部分的叶片外侧设有加宽部，带有加宽部的叶片长度占叶片总长度的40%，转子2的顶端直径比底端直径大10mm，转子2的顶端叶片节距和叶片弦长的比值为1.3， 转子2伸入到底盘3上的环形槽内，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合 间隙为0.3mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.3mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.4mm，其他结构特征均与实施例1相同，不再重复叙述。
实施例5，如图4、图5所示一种抗大气冲击的分子泵，其与实施例1的区别在于所述转子2靠近顶端部分的叶片外侧设有加宽部，带有加宽部的叶片长度占叶片总长度的50%，转子2的顶端直径比底端直径大20mm，转子2的顶端叶片节距和叶片弦长的比值为1.4， 转子2伸入到底盘3上的环形槽内，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合 间隙为0.4mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.4mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.5mm，其他结构特征均与实施例1相同，不再重复叙述。
实施例6，如图4、图5所示一种抗大气冲击的分子泵，其与实施例1的区别在于所述转子2靠近顶端部分的叶片外侧设有加宽部，带有加宽部的叶片长度占叶片总长度的60%，转子2的顶端直径比底端直径大30mm，转子2的顶端叶片节距和叶片弦长的比值为1.5， 转子2伸入到底盘3上的环形槽内，转子2外部排气槽构成的筋部与环形槽存在间隙配合，配合 间隙为0.5mm；转子2安装层下层腔体内壁与螺旋封4存在间隙配合，其配合间隙为0.5mm；泵壳1扣装在转子2上，其腔体内壁与转子2外部排气槽构成的筋部存在间隙配合，配合间隙为0.6mm，其他结构特征均与实施例1相同，不再重复叙述。
合理选择转子2高度H与直径D的比例关系，排气槽的深度及各部件间的配合间隙，既 可以保证泵安全运转，又可以获得较好的真空性能 ，作为进一步的优化改进， 将转子改进为其顶端直径比底端直径大10~30mm，使转子顶端的叶片尺寸增大，即分子泵进气端叶片尺寸增大，使得在保证转子质量一定情况下，通过增大进气口抽气面积，达到提高抽气速率，减小转子对轴承的压力目的，而将 转子的顶端叶片节距和叶片弦长的比值设定为1.3~1.5，优化了转子槽内壁的曲线，使转子槽内壁曲线进一步内凹，从而达到提高抽速目的。总之，本发明提供的一种抗大气冲击的分子泵很好地解决了一些因被抽 真空 装置 损坏 ，大气直接充入分子泵，造成分子泵碎裂的问题，具有 结构 简单 ， 便于维护，易于加工，制造难度小，加工成本低，耐冲击，抽速高，可直接承受大气冲击而不会碎裂的优点，大大提高泵的安全性。同时独特的转子结构及排气方式，和常规分子泵相比，在10 0 Pa到0.01Pa之间有更优越的排气能力，大大缩短了系统的抽气时间，降低了系统运营成本。
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  1. 1、一种抗大气冲击的分子泵 ，包括底盘 、安装在底盘上的电机、连接在电机主轴上的转子和 固定扣装在转子与底盘上的泵壳，其特征在于： 所述底盘的中部轴向有一个圆柱形通孔，圆柱形通孔外围设有一个环形槽，底盘外侧面靠近底部位置设有一个排气口，排气口与环形槽连通；所述电机为嵌入安装在底盘上的圆柱形通孔内，电机主轴向上延伸到底盘顶部外侧；所述的转子为圆柱形，其外表面从顶部至底部均匀开有4~8条螺旋形排气槽，排气槽从起始端开始沿轴向延伸，深度逐渐由深变浅，宽度逐渐由宽变窄，直至转子外表面底端，每相邻两个螺旋形排气槽之间的筋部设置成叶片，转子内部居中部位设有一个安装层，安装层中心位置开有一个通孔，安装层的上下两侧各有一个中空腔体，所述泵壳为圆柱形结构，其底部开放，内为圆柱形腔体，顶部设有进气口。
    2、根据权利要求1所述的一种 抗大气冲击的分子泵，其特征在于： 所述排气槽的起始端深度为30~60mm，尾端深度为2~5mm，中间深度梯度递减。
    3、根据权利要求2所述的 一种抗大气冲击的分子泵 ，其特征在于：所述相邻两个排气槽形成的筋部的横截面外轮廓为近似梯形的曲面，所述横截面的高度随排气槽深度的递减而逐渐递减。
    4、根据权利要求1所述的 一种抗大气冲击的分子泵 ，其特征在于：所述转子的顶端直径比底端直径大10~30mm。
    5、根据权利要求4所述的一种抗大气冲击的分子泵，其特征在于：所述转子的顶端叶片节距和叶片弦长的比值为1.3~1.5。
    6、根据权利要求1至5其中之一所述的一种 抗大气冲击的分子泵 ，其特征在于：所述的转子能伸入到底盘上的环形槽内，转子外部排气槽构成的筋部与环形槽存在间隙配合，配合间隙为0.2~0.6mm；底盘环形槽内靠近中心的一侧套装有螺旋封，转子安装层下侧腔体内壁与螺旋封存在间隙配合，其配合间隙为0.3~0.6mm；泵壳扣装在转子上，其腔体内壁与转子外部排气槽构成的筋部存在间隙配合，配合间隙为0.3~0.7mm。
    7、根据权利要求1至5其中之一所述的一种 抗大气冲击的分子泵 ，其特征在于：所述的转子内部安装层中心通孔为锥形。
    8、根据权利要求1至5其中之一所述的一种 抗大气冲击的分子泵 ，其特征在于：所述的底盘下部中心部位安装有油池座，油池座内放置有润滑油，电机主轴下端伸入到油池座内。
    9、根据权利要求1至5其中之一所述的一种 抗大气冲击的分子泵 ，其特征在于：所述底盘上的排气口外侧装有排气口法兰。
    10、根据权利要求1至5其中之一所述的一种 抗大气冲击的分子泵 ，其特征在于： 所述的转子由圆柱形硬质铝合金材料整体加工成型。
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