EP1797331B1 - Reibungsvakuumpumpe - Google Patents

Reibungsvakuumpumpe Download PDF

Info

Publication number
EP1797331B1
EP1797331B1 EP05791919A EP05791919A EP1797331B1 EP 1797331 B1 EP1797331 B1 EP 1797331B1 EP 05791919 A EP05791919 A EP 05791919A EP 05791919 A EP05791919 A EP 05791919A EP 1797331 B1 EP1797331 B1 EP 1797331B1
Authority
EP
European Patent Office
Prior art keywords
housing
rotor
pump
vacuum pump
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP05791919A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1797331A1 (de
Inventor
Ralf Adamietz
Roland Blumenthal
Dirk Kalisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1797331A1 publication Critical patent/EP1797331A1/de
Application granted granted Critical
Publication of EP1797331B1 publication Critical patent/EP1797331B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a friction vacuum pump with a housing having a vane-free pump stator, a rotor drive and a rotor bearing.
  • WO 2004/015 272 A1 is known a screw pump whose housing consists essentially of three axially adjoining parts, which are joined to the housing, for example, bolted together.
  • the three housing parts are a stator housing part, an outlet housing part, of which a cartridge having the motor and / or the bearing is held, and a bearing housing part.
  • seals are arranged to produce the required tightness, which are difficult or impossible, for example, with a corrosion-inhibiting coating, can be coated under certain circumstances.
  • the temperature behavior of the entire housing is inhomogeneous because of the multi-part of the housing.
  • EP-A-0 283 736 and US-A-5 154 572 describe in each case a vacuum pump with a bell-shaped, cylindrical rotor which is axially mounted inside the rotor and is surrounded on the outside by a stator.
  • FR-A-2 611 818 describes a rotary pump with a rotor and with a two-part stator. A first part of the stator is surrounded by the rotor on the outside and a second part of the stator encloses the rotor on the outside.
  • the object of the invention is to improve the physical properties of a friction vacuum pump.
  • the housing is integrally formed over its entire axial length, so that the one-piece housing surrounds the entire axial length of the pump rotor, the rotor drive and the rotor bearing. Due to the integral nature of the housing, a homogeneous temperature behavior of the housing is ensured. By eliminating seals, the tightness of the housing is also ensured in the long term.
  • the housing itself does not have to consist of several parts assembled together, so that assembly work and resulting error sources omitted. By eliminating seals in the area of the housing, the inside of the housing is easy and completely coatable.
  • the friction vacuum pump housing for example, has only one end lid, which has no supporting function, and therefore requires no special precision in assembly.
  • the one-piece construction of the housing improves a large number of physical properties of the friction vacuum pump, in particular the temperature behavior, the tightness and the quality of a coating on the inside of the housing.
  • the rotor bearing and the rotor drive are arranged in a cartridge, which is held by the housing and is surrounded over its entire axial length of the housing.
  • a cartridge is understood to mean an arrangement which consists of a cartridge housing which is cup-shaped or completely closed and in which a shaft is rotatably mounted in a rotor bearing which can be driven by a rotor drive located in the cartridge.
  • the storage and the drive are arranged completely pre-assembled in the closed or almost closed cartridge.
  • the shaft protruding from the cartridge may be connected to the pump rotor, and this assembly may then be inserted into the housing with the cartridge being mounted in the housing interior.
  • the assembly of the friction vacuum pump is simple and reliable vorappelbar.
  • the integrity of the friction vacuum pump housing and the provision of a single drive and storage cartridge result in a modular construction of the friction vacuum pump. Both measures together simplify the assembly or disassembly, which in turn improves the assembly accuracy, the assembly work is reduced and the maintenance or repair is simplified and accelerated.
  • the cartridge has a pot-shaped housing, which is formed integrally with the friction vacuum pump housing. After the rotor bearing and the rotor drive are inserted into the cup-shaped housing, the pot opening is closed by a cartridge lid. Due to the one-piece design of the friction vacuum pump housing with the pot-shaped cartridge housing, the assembly is simplified as a whole, leaks are reduced and in particular a more precise positioning of the cartridge or the rotor drive and the rotor bearing is ensured.
  • the axial length of the cartridge is at least 50% surrounded by the pump rotor, i. the cartridge projects axially into the pot-shaped pump rotor with at least half of its axial length. In this way, a compact axial construction of the friction vacuum pump is realized.
  • a part of the cartridge housing is formed by the friction vacuum pump housing.
  • the cartridge housing has two sections, namely one which, viewed from the mounting location of the cartridge on the housing on the rotor side and one which is oriented away from the rotor.
  • the rotor-facing portion of the cartridge may be formed by the friction vacuum pump housing, i. the pot-shaped cartridge housing has no cartridge-specific lid, but is closed by the friction vacuum pump housing. As a result, the number of components is reduced overall.
  • the housing has on the inside a circular shoulder, on which the cartridge preferably bears on the suction side and to which it is attached.
  • the cartridge is preferably inserted from the suction side into the housing together with the rotor.
  • the cartridge is placed on the circular shoulder and preferably fastened from the pressure side of the heel with suitable fastening means, for example with threaded screws.
  • the circular shoulder is easy to produce and allows a gas-tight attachment of the cartridge to the housing.
  • the pump rotor is a Holweck pump rotor.
  • the radial plane surface between a housing-side stator wall and a rotor-side hub can shrink towards the pressure side.
  • the figure shows a Reibungsvakuumpumpe invention in longitudinal section.
  • a friction vacuum pump 10 which is a screw pump, also called Holweck pump.
  • the friction vacuum pump 10 consists essentially of a suction-side towards the funnel-shaped narrowing housing 12, arranged in the housing 12 and mounted cartridge 14, which includes a rotor bearing, not shown, and a rotor drive, not shown, and a pump rotor 16, the plurality of helically arranged wings 18 has.
  • the housing 12 is formed in one piece and surrounds the entire axial length of the pump rotor 16 and the cartridge 14 containing the rotor drive and the rotor bearing.
  • the pressure-side end of the housing 12 is closed by a front-side housing cover 20.
  • a circular shoulder 22 is provided on its inner circumference, on which a corresponding circular shoulder 24 of the cartridge 14 is supported gas-tight.
  • the paragraphs 22, 24 of the housing 12 and the cartridge 14 are bolted together.
  • a rotor shaft 26 thereof From the cartridge protrudes at its suction end, a rotor shaft 26 thereof, which holds the rotor 16.
  • the rotor 16 is connected to the rotor shaft, for example screwed.
  • the rotor hub 28 of the rotor 16 tapers towards the suction side.
  • the inside of the housing 12 forms a stator 30, which widens towards the suction side. Due to the extension of the inner diameter of the stator and the reduction of the outer diameter of the rotor hub 28 to the suction side, the radial plane surface between the stator 30 and the rotor hub 28 is increased toward the suction side and reduced to the pressure side.
  • the housing 12 has a gas inlet 32 at its one suction-side axial end. On the pressure side of the pump rotor 16, a radial gas outlet 34 is provided.
  • the housing 12 in the part in which it encloses the vacuum not a single seal with a subsequent housing part.
  • a homogeneous temperature behavior is realized. Coatings of the stator wall 30 are free of discontinuities. Lack of a seal between two housing parts and no leaks can occur.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP05791919A 2004-10-01 2005-09-21 Reibungsvakuumpumpe Not-in-force EP1797331B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004047930A DE102004047930A1 (de) 2004-10-01 2004-10-01 Reibungsvakuumpumpe
PCT/EP2005/054735 WO2006037730A1 (de) 2004-10-01 2005-09-21 Reibungsvakuumpumpe

Publications (2)

Publication Number Publication Date
EP1797331A1 EP1797331A1 (de) 2007-06-20
EP1797331B1 true EP1797331B1 (de) 2010-01-06

Family

ID=35427899

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05791919A Not-in-force EP1797331B1 (de) 2004-10-01 2005-09-21 Reibungsvakuumpumpe

Country Status (7)

Country Link
US (1) US20080206041A1 (ja)
EP (1) EP1797331B1 (ja)
JP (1) JP2008514862A (ja)
CN (1) CN100458171C (ja)
AT (1) ATE454555T1 (ja)
DE (2) DE102004047930A1 (ja)
WO (1) WO2006037730A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1395718B1 (it) * 2009-09-30 2012-10-19 Nuovo Pignone Spa Compressore a flusso assiale a sbalzo, reattore e metodo
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
WO2015039443A1 (zh) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
CN103452872A (zh) * 2013-09-18 2013-12-18 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
CN104613008B (zh) * 2015-02-28 2017-10-24 北京北仪创新真空技术有限责任公司 一种分子泵的转子
EP3670924B1 (de) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zur herstellung einer solchen

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE625444C (de) * 1934-02-24 1936-02-08 Leybold S Nachfolger A G E Molekularluftpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung

Also Published As

Publication number Publication date
DE502005008839D1 (de) 2010-02-25
DE102004047930A1 (de) 2006-04-06
ATE454555T1 (de) 2010-01-15
EP1797331A1 (de) 2007-06-20
JP2008514862A (ja) 2008-05-08
WO2006037730A1 (de) 2006-04-13
CN101031724A (zh) 2007-09-05
CN100458171C (zh) 2009-02-04
US20080206041A1 (en) 2008-08-28

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