US20080157367A1 - Multi-layer metal wiring of semiconductor device preventing mutual metal diffusion between metal wirings and method for forming the same - Google Patents

Multi-layer metal wiring of semiconductor device preventing mutual metal diffusion between metal wirings and method for forming the same Download PDF

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Publication number
US20080157367A1
US20080157367A1 US11/755,390 US75539007A US2008157367A1 US 20080157367 A1 US20080157367 A1 US 20080157367A1 US 75539007 A US75539007 A US 75539007A US 2008157367 A1 US2008157367 A1 US 2008157367A1
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layer
forming
metal wiring
wiring
semiconductor device
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Soo Hyun Kim
Baek Mann Kim
Young Jin Lee
Dong Ha JUNG
Jeong Tae Kim
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SK Hynix Inc
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Hynix Semiconductor Inc
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Assigned to HYNIX SEMICONDUCTOR INC. reassignment HYNIX SEMICONDUCTOR INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JUNG, DONG HA, KIM, BAEK MANN, KIM, JEONG TAE, KIM, SOO HYUN, LEE, YOUNG JIN
Publication of US20080157367A1 publication Critical patent/US20080157367A1/en
Priority to US12/754,776 priority Critical patent/US8008774B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H01L21/28562—Selective deposition
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76846—Layer combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
    • H01L21/76855—After-treatment introducing at least one additional element into the layer
    • H01L21/76856—After-treatment introducing at least one additional element into the layer by treatment in plasmas or gaseous environments, e.g. nitriding a refractory metal liner
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
    • H01L23/53223—Additional layers associated with aluminium layers, e.g. adhesion, barrier, cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
    • H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a method for forming a multi-layer metal wiring of a semiconductor device, and more particularly to a multi-layer metal wiring of a semiconductor device including a diffusion barrier layer for preventing mutual metal diffusion between upper and lower metal wirings mutually contacted and a method for forming the same.
  • the memory cells are formed in a stack structure.
  • the metal wirings carrying electrical signals to each cell are also formed in a multi-layer structure.
  • the metal wiring laid out in a multi-layer structure provides advantageous design flexibility and allows more leeway in setting the margins for the metal wiring resistance, the current capacity, etc.
  • Al aluminum
  • Cu copper
  • a Ti layer and/or a TiN layer i.e., either individually or as a stacked layer
  • the diffusion barrier layer made of stacked Ti and TiN layers cannot secure the thickness needed to sufficiently suppress the metal diffusion between the metal wirings.
  • Embodiments of the present invention provide a multi-layer metal wiring of a semiconductor device preventing the mutual metal diffusion between an upper and a lower metal wirings mutually contacted, and a method forming the same.
  • a multi-layer metal wiring of a semiconductor device includes; a lower Cu wiring; an upper Al wiring formed to be contacted with the lower Cu wiring; and a diffusion barrier layer interposed between the lower Cu wiring and the upper Al wiring and formed of a W-based layer.
  • the W-based layer is formed of a WN layer.
  • the WN layer has a thickness of 50 to 200 ⁇ .
  • the W-based layer is formed of a stacked layer of a W layer and a WN layer.
  • the stacked layer of the W layer and the WN layer has a thickness of 50 to 300 ⁇ .
  • the W-based layer is formed of a WSiNy layer.
  • the WSiNy layer has a thickness of 50 to 200 ⁇ .
  • the W-based layer is formed of a stacked layer of a WSix layer and a WSixNy layer.
  • the stacked layer of the WSix layer and the WSixNy layer has a thickness of 50 to 300 ⁇ .
  • the upper Al wiring includes an Al nucleation growth layer formed on the diffusion barrier layer.
  • the Al nucleation growth layer has a thickness of 50 to 500 ⁇ .
  • a method for forming a multi-layer metal wiring of a semiconductor device include: forming a lower Cu wiring over the upper of the semiconductor substrate on which an underlayer is formed; and forming an upper Al wiring by interposing a diffusion barrier layer over the lower Cu metal wiring, wherein the diffusion barrier layer is formed of a W-based layer.
  • the W-based layer is formed of a WN layer.
  • the WN layer has a thickness of 50 to 200 ⁇ .
  • the WN layer is formed in an ALD method or a CVD method.
  • the WN layer is formed under the conditions of the temperature of 200 to 400° C. and the pressure of 1 to 40 Torr.
  • the W-based layer is formed of a stacked layer of a W layer and a WN layer.
  • the stacked layer of the W layer and the WN layer has a thickness of 50 to 300 ⁇ .
  • the formation of the stacked layer of the W layer and the WN layer includes the steps of depositing the W layer and nitrifying the surface of the W layer.
  • the W layer is deposited based on a ALD method or a CVD method.
  • the W layer is deposited under the conditions of the temperature of 200 to 400° C. and the pressure of 1 to 40 Torr.
  • the nitrification on the surface of the W layer is performed by a heat treatment or a plasma treatment under the atmosphere of any one of NH 3 , N 2 H 4 , N 2 , and N 2 /H 2 .
  • the W-based layer is formed of a WSiNy layer.
  • the WSiNy layer has a thickness of 50 to 200 ⁇ .
  • the WSiNy layer is formed based on an ALD method or a CVD method.
  • the WSiNy layer is formed under the conditions of the temperature of 300 to 500° C. and the pressure of 0.01 to 10 Torr.
  • the W-based layer is formed of a stacked layer of a WSix layer and a WSiNy layer.
  • the stacked layer of the WSix layer and the WSiNy layer has a thickness of 50 to 300 ⁇ .
  • the formation of the stacked layer of the WSix layer and the WSiNy layer includes the steps of depositing the WSix layer and nitrifying the surface of the WSix layer.
  • the WSix layer is deposited in a ALD method or a CVD method.
  • the WSix layer is deposited under the conditions of the temperature of 300 to 500° C. and the pressure of 0.01 to 10 Torr.
  • the nitrification on the surface of the WSix layer is performed by a heat treatment or a plasma treatment under the atmosphere of any one of NH 3 , N 2 H 4 , N 2 , and N 2 /H 2 .
  • the method for forming the multi-layer metal wiring of the semiconductor device includes forming a Al nucleation growth layer on the diffusion barrier layer prior to forming the upper Al wiring.
  • the Al nucleation growth layer has a thickness of 50 to 500 ⁇ based on a CVD method.
  • the method for forming the upper Al wiring includes the steps of depositing the Al layer over the diffusion barrier layer based on a PVD method at the temperature of 200 to 400° C., and performing a heat treatment on the Al layer at the temperature of 400 to 500° C.
  • the method for forming the upper Al wiring includes the steps of depositing a first Al layer over the diffusion barrier layer based on a PVD method at the temperature of 150 to 200° C., and depositing a second Al layer over the first Al layer based on a PVD method at the temperature of 200 to 450° C.
  • FIGS. 1A through 1E are cross-sectional views for explaining a method for forming a multi-layer metal wiring of a semiconductor device in accordance with an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view for explaining a method for forming a WN layer as a diffusion barrier layer in accordance with a first embodiment of the present invention.
  • FIG. 3 is a cross-sectional view for explaining a method for forming a stacked layer of a W layer and a WN layer as a diffusion barrier layer in accordance with a second embodiment of the present invention.
  • FIG. 4 is a cross-sectional view for explaining a method for forming a WSix layer as a diffusion barrier layer in accordance with a third embodiment of the present invention.
  • FIG. 5 is a cross-sectional view for explaining a method for forming a stacked layer of a WSix layer and a WSixNy layer as a diffusion barrier layer in accordance with a fourth embodiment of the present invention.
  • the present invention forms a diffusion barrier layer of a W-based layer.
  • the W-based diffusion barrier layer is inserted in the contact interface between a lower Cu wiring and an upper Al wiring.
  • the W-based layer is formed of a WN layer, a stacked layer of a W layer and the WN layer, a WSiNy layer, or a stacked layer of the WSix layer and a WSiNy layer.
  • the W-based layer has very excellent diffusion barrier characteristics as compared to a Ti layer and TiN layer, which are conventional diffusion barrier layers.
  • the W-based diffusion barrier layer has excellent capability to suppress the metal diffusion between the lower Cu wiring and the upper Al wiring. Therefore, when forming a multi-layer metal wiring to which the lower Cu wiring and the upper Al wiring is formed in an ultra high integration device, the present invention provides an excellent diffusion barrier layer capable of suppressing the metal diffusion between the upper and lower metal wirings as well as suppressing the generation of metal compounds with high resistance due to the metal diffusion mutually between the metal wirings.
  • the present invention can suppress the generation of the metal compounds with high resistance due to the metal diffusion between the metal wirings, making it possible to improve the device performance characteristics and reliability. Also, the present invention provides a diffusion barrier layer of thinner thickness than the conventional barrier layer of the stacked Ti and TiN layers, thereby reducing the contact resistance.
  • FIGS. 1A through 1E the method for forming a multi-layer metal wiring of a semiconductor device according to an embodiment of the present invention will be described in detail with reference to FIGS. 1A through 1E .
  • a first interlayer insulating layer 110 is formed over the a semiconductor substrate 100 on which an underlayer (not shown) is formed and then etched to form a trench 120 defining a region for forming a lower metal wiring 140 .
  • a first diffusion barrier layer 130 is formed over the first interlayer insulating layer 110 including the trench 120 .
  • the first diffusion barrier layer 130 is formed of a stacked layer of a Ta layer 130 a and a TaN layer 130 b.
  • a Cu seed layer is deposited over the first diffusion barrier layer 130 .
  • the Cu layer is deposited over the Cu seed layer with an electroplating method so that the trench 120 is filled.
  • the lower Cu wiring 140 is formed in the trench 120 by etching the Cu layer and the first diffusion barrier layer 130 so that the first interlayer insulating layer 110 outside the trench 120 is exposed.
  • a second interlayer insulating layer 150 is formed over the first interlayer insulating layer 120 including the lower Cu wiring 140 , and then the second interlayer insulating layer 150 is etched to form a contact hole 160 exposing the lower Cu wiring 140 .
  • a second diffusion barrier layer 170 for preventing the mutual metal diffusion between the lower Cu wiring 140 and a upper metal wiring (to be formed in the contact hole 160 ) is formed over the second interlayer insulating layer 150 including the contact hole 160 .
  • the second diffusion barrier layer 170 is formed of a tungsten-based (or W-based) layer.
  • the W-based layer would include a WN layer or a stacked layer of W and WN layers or a WSiNy layer or a stacked layer of WSix and WSiNy layers or the like.
  • an Al nucleation growth layer 181 is formed over the W-based second diffusion barrier layer 170 by a deposition method such as a chemical vapor deposition (CVD).
  • the Al nucleation growth layer 181 is formed to have a thickness of 50 to 500 ⁇ .
  • a wiring 182 of Al layer is formed on the Al nucleation growth layer 181 such that the contact hole 160 is filled.
  • the Al layer for wiring 182 is formed by depositing Al at a temperature in the range of 200 to 400° C. by a deposition method such as a physical vapor deposition (PVD) and by performing a heat treatment on the Al layer at a temperature in the range of 400 to 500° C.
  • PVD physical vapor deposition
  • the Al layer for wiring 182 can be formed as a stacked layer of a fist Al layer and a second Al layer by depositing the first Al layer at a temperature in the range of 150 to 200° C. by a PVD method and depositing the second Al layer over the first Al layer at a temperature in the range of 200 to 450° C. also by a PVD method.
  • the Al layer for upper wiring 182 and the W-based second diffusion barrier layer 170 are etched to form a upper Al wiring 180 contacting the lower Cu wiring 140 , thereby forming a multi-layer metal wiring of a semiconductor device according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view for explaining a method for forming a WN layer as a second diffusion barrier layer in accordance with a first embodiment of the present invention.
  • a WN layer 270 is formed to a thickness of 50 to 200 ⁇ over a second interlayer insulating layer 250 having the contact hole 260 by an atomic layer deposition (ALD) or CVD method.
  • ALD atomic layer deposition
  • the WN layer 270 is formed by supplying one or more gases in combinations of B 2 H 6 , WF 6 , and NH 3 under a temperature in the range of 200 to 400° C. and a pressure in the range of 1 to 40 Torr.
  • One or more gases in combination of B 10 H 14 , SiH 4 , and Si 2 H 6 , besides or in addition to B 2 H 6 can be used when forming the WN layer 270 .
  • the WN layer 270 can also be formed by depositing a W layer to a thickness of 10 to 100 ⁇ by supplying the gases of B 2 H 6 and WF 6 , and then changing the W layer into the WN layer by supplying the gases of B 2 H 6 and NH 3 , thereby depositing the WN layer.
  • the W layer can be formed by using any one of gas B 10 H 14 , SiH 4 , and Si 2 H 6 , besides the gas of B 2 H 6 .
  • the reference numeral 200 represents a semiconductor substrate; 210 represents a first interlayer insulating layer; 230 a represents a Ta layer; 230 b represents a TaN layer; 230 represents a first diffusion barrier layer; and 240 represents a lower Cu wiring.
  • FIG. 3 is a cross-sectional view for explaining a method for forming a stacked layer of a W layer and a WN layer as a second diffusion barrier layer in accordance with a second embodiment of the present invention.
  • a stacked layer 370 of a W layer 371 and a WN layer 372 is formed to a thickness of 50 to 300 ⁇ by first depositing the W layer 371 over the second interlayer insulating layer 350 having the contact hole 360 by an ALD or CVD method, and then nitrifying the surface of the W layer 371 .
  • the method for forming the stacked layer 370 of the W layer 371 and WN layer 372 is formed by forming the WN layer 372 on the surface of the W layer 371 by first supplying the gas of WF 6 and B 2 H 6 under a temperature in the range of 200 to 400° C. and a pressure in the range of 1 to 40 Torr to deposit the W layer 371 and then nitrifying the surface of the W layer 371 under the atmosphere of NH 3 .
  • the W layer 371 can be deposited by using any one of gas of B 10 H 14 , SiH 4 , and Si 2 H 6 besides the gas of B 2 H 6 .
  • the nitrification on the surface of the W layer 371 can be performed by using the gas of N 2 H 4 besides the gas of NH 3 , and further the nitrification can be performed by supplying a radical including N by forming N 2 and N 2 /H 2 plasma.
  • the nitrification on the surface of the W layer 371 may be performed by raising the temperature of the semiconductor substrate or may be performed by a heat treating process for an efficient nitrification processing.
  • the reference numeral 300 represents a semiconductor substrate; 310 represents a first interlayer insulating layer; 330 a represents a Ta layer; 330 b represents a TaN layer; 330 represents a first diffusion barrier layer; and 340 represents a lower Cu wiring.
  • FIG. 4 is a cross-sectional view for explaining a method for forming a WSixNy layer as a second diffusion barrier layer in accordance with a third embodiment of the present invention.
  • the WSixNy layer 470 is formed to a thickness of 50 to 300 ⁇ over the second interlayer insulating layer 450 having the contact hole 460 by an ALD or CVD method.
  • the WSixNy layer 470 is formed by supplying one or more gases in combination of WF 6 , B 2 H 6 , SiH 4 , and NH 3 under a temperature in the range of 300 to 500° C. and a pressure of 0.01 to 10 Torr.
  • the WSixNy layer 470 can be formed in a cycle of B 2 H 6 supply-B 2 H 6 purge-WF 6 supply-WF 6 purge-SiH 4 supply-SiH 4 purge-NH 3 supply-NH 3 purge or in a cycle of WF 6 supply-WF 6 purge-B 2 H 6 supply-B 2 H 6 purge-SiH 4 supply-SiH 4 purge-NH 3 supply-NH 3 purge.
  • the WSixNy layer 470 can be formed by using one or more gases of BH 3 and B 10 H 14 besides the gas of B 2 H 6 , and can be formed by using one or more gases of Si 2 H 6 and SiH 2 Cl 2 besides the gas of SiH 4 .
  • the reference numeral 400 represents a semiconductor substrate; 410 represents a first interlayer insulating layer; 430 a represents a Ta layer; 430 b represents a TaN layer; 430 represents a first diffusion barrier layer; and 440 represents a lower Cu wiring.
  • FIG. 5 is a cross-sectional view for explaining a method for forming a stacked layer of a WSix layer and a WSixNy layer as a second diffusion barrier layer in accordance with a fourth embodiment of the present invention.
  • a stacked layer 570 of the WSix layer 571 and the WSixNy layer 572 is formed to a thickness of 50 to 300 ⁇ by depositing the WSix layer 571 over the second interlayer insulating layer 550 having the contact hole 560 by an ALD or CVD method and nitrifying the surface of the WSix layer 571 .
  • the method for forming the stacked layer 570 of the WSix layer 571 and WSixNy layer 572 is formed by forming the WSixNy layer 572 on the surface of the WSix layer 571 by first supplying one or more gases in combination of WF 6 , B 2 H 6 and SiH 4 to deposit the WSix layer 571 under a temperature in the range of 300 to 500° C. and a pressure in the range of 0.01 to 10 Torr and then nitrifying the surface of the WSix layer 571 under the atmosphere of NH 3 .
  • the WSix layer 571 can be deposited by using a gas of BH 3 or B 10 H 14 besides the gas of B 2 H 6 and using a gas of Si 2 H 6 or SiH 2 Cl 2 besides the gas of SiH 4 .
  • the nitrification on the surface of the WSix layer 571 can be performed by using the gas of N 2 H 4 besides the gas of NH 3 and can be performed by supplying a radical including N by forming N 2 and N 2 /H 2 plasma.
  • the nitrification on the surface of the WSix layer 571 can be performed by raising the temperature of the semiconductor substrate 500 and can be performed by a heat treating process for an efficient nitrification processing.
  • the reference numeral 510 represents a first interlayer insulating layer
  • 530 a represents a Ta layer
  • 530 b represents a TaN layer
  • 530 represents a first diffusion barrier layer
  • 540 represents a lower Cu wiring.
  • the present invention uses the W-based layer as the diffusion barrier layer between the lower Cu wiring and the upper Al wiring.
  • the W-based layer has excellent diffusion barrier characteristics as compared to the conventional diffusion barrier such as the stacked layer of the Ti layer and the TiN layer, effectively suppressing the metal diffusion between the lower Cu wiring contacting the upper Al wiring.
  • the present invention when forming a multi-layer metal wiring structure having the lower Cu wiring contacting the upper Al wiring in an ultra high integration device, provides an excellent diffusion barrier for effectively suppressing the metal diffusion between the upper and lower metal wirings.
  • the present invention also suppresses the high resistance metal compounds from being generated through the metal diffusion between the metal wirings, thereby improving the device reliability and performance characteristics.
  • the present invention provides a thinner diffusion barrier than the conventional diffusion barrier layer of the stacked Ti and TiN layers, thereby lowering the contact resistance.

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  • General Chemical & Material Sciences (AREA)
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US20120273950A1 (en) * 2011-04-27 2012-11-01 Nanya Technology Corporation Integrated circuit structure including copper-aluminum interconnect and method for fabricating the same
CN110571189B (zh) * 2018-06-05 2022-04-29 中芯国际集成电路制造(上海)有限公司 导电插塞及其形成方法、集成电路
CN111696918A (zh) * 2020-07-15 2020-09-22 华虹半导体(无锡)有限公司 互连结构的制作方法及器件
US20220367260A1 (en) * 2021-05-12 2022-11-17 Taiwan Semiconductor Manufacturing Company, Ltd. Metal nitride diffusion barrier and methods of formation

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US8679971B2 (en) 2010-07-21 2014-03-25 International Business Machines Corporation Metal-contamination-free through-substrate via structure

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US20100193956A1 (en) 2010-08-05
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KR100842914B1 (ko) 2008-07-02
CN101211892B (zh) 2011-11-09

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