TWI796379B - marking wheel - Google Patents
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- TWI796379B TWI796379B TW107139248A TW107139248A TWI796379B TW I796379 B TWI796379 B TW I796379B TW 107139248 A TW107139248 A TW 107139248A TW 107139248 A TW107139248 A TW 107139248A TW I796379 B TWI796379 B TW I796379B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
- C03B33/107—Wheel design, e.g. materials, construction, shape
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
- Braking Arrangements (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
本發明之課題在於提供一種可增加滲透量之劃線輪。 本發明之劃線輪1具有形成於外周部之刃尖部20。刃尖部20包含:複數個槽24,其等在周向上空開間隔地形成;及稜線部23,其形成於在周向上相鄰之槽24之間。槽24包含刃尖角小於稜線部23之部分。The object of the present invention is to provide a scribing wheel that can increase the amount of penetration. The scribing wheel 1 of the present invention has a blade edge portion 20 formed on the outer peripheral portion. The blade edge portion 20 includes: a plurality of grooves 24 formed at intervals in the circumferential direction; and a ridge line portion 23 formed between the grooves 24 adjacent in the circumferential direction. The groove 24 includes a portion whose edge angle is smaller than that of the ridge portion 23 .
Description
本發明係關於一種劃線輪。The present invention relates to a marking wheel.
已知為了形成用於切斷玻璃基板等脆性材料基板之劃線而使用劃線輪。例如專利文獻1之劃線輪在形成於其外周部之刃尖部具有在圓周方向彼此隔開地形成之多數個槽。
[先前技術文獻]
[專利文獻]It is known to use a scribing wheel to form scribing lines for cutting brittle material substrates such as glass substrates. For example, the scribing wheel of
[專利文獻1]日本特開2010-132542號公報[Patent Document 1] Japanese Unexamined Patent Publication No. 2010-132542
[發明所欲解決之問題][Problem to be solved by the invention]
在劃線輪中,較佳為以垂直裂痕之深度相對於脆性材料基板之基板厚度之比所示之滲透量增加。本發明之目的在於提供一種可增加滲透量之劃線輪。 [解決問題之技術手段]In scribing wheels, it is preferred that the amount of penetration increases as the ratio of the depth of the vertical cracks relative to the substrate thickness of the brittle material substrate. The object of the present invention is to provide a scoring wheel which can increase the penetration. [Technical means to solve the problem]
(1)本發明之劃線輪為具有形成於外周部之刃尖部者,前述刃尖部包含:複數個槽,其等在周向上空開間隔形成;及稜線部,其形成於在前述周向上相鄰之前述槽之間;且前述槽包含刃尖角小於前述稜線部之部分。(1) The scribing wheel of the present invention has a blade edge portion formed on the outer peripheral portion, and the blade edge portion includes: a plurality of grooves formed at intervals in the circumferential direction; and a ridge portion formed in the aforementioned between adjacent grooves in the circumferential direction; and the groove includes a portion whose edge angle is smaller than the ridgeline portion.
本申請案發明者著眼於槽之刃尖角與稜線部之刃尖角之關係,在變更槽之刃尖角之情形下,對於以垂直裂痕之深度相對於劃線輪切斷之脆性材料基板之厚度之比所示之滲透量之變化進行了試驗。其結果為,得到在槽包含較稜線部之刃尖角小之部分時,滲透量變大之見解。因此,在本劃線輪中,設為槽包含較稜線部之刃尖角小之部分之構成。因此,可增加滲透量。The inventors of the present application focused on the relationship between the edge angle of the groove and the edge angle of the ridge, and changed the angle of the edge of the groove. The variation in the amount of penetration indicated by the ratio of the thicknesses was tested. As a result, it was found that the amount of infiltration increases when the groove includes a portion with a smaller edge angle than the ridge portion. Therefore, in the present scribing wheel, the groove includes a portion having a smaller blade edge angle than the ridge portion. Therefore, the amount of penetration can be increased.
(2)作為較佳之例,在(1)記載之劃線輪中,前述槽之深度包含自前述周向上之前述槽之端部朝前述槽之中央部變深之部分,至少前述槽之端部之刃尖角小於前述稜線部之刃尖角。(2) As a preferred example, in the scribing wheel described in (1), the depth of the aforementioned groove includes a part that becomes deeper from the end of the aforementioned groove in the aforementioned circumferential direction toward the central portion of the aforementioned groove, at least the end of the aforementioned groove The edge angle of the edge portion is smaller than the edge angle of the aforementioned ridge portion.
在周向上之槽之端部與脆性材料基板接觸時,較在周向上之槽之中央部與脆性材料基板接觸時易於形成垂直裂痕。又,在刃尖角為小時,與刃尖角為大時相比,易於產生使垂直裂痕擴展之應力。因此,在本劃線輪中,由於藉由使周向上之槽之端部之刃尖角小於稜線部之刃尖角,而可有效地增大將垂直裂痕擴展之應力,因此可更增加滲透量。Vertical cracks are more likely to be formed when the ends of the grooves in the circumferential direction are in contact with the brittle material substrate than when the central portions of the grooves in the circumferential direction are in contact with the brittle material substrate. Also, when the edge angle is small, stress that propagates a vertical crack tends to be generated more easily than when the edge angle is large. Therefore, in this scribing wheel, since the edge angle of the end of the groove in the circumferential direction is smaller than the edge angle of the edge portion, the stress for expanding the vertical crack can be effectively increased, so the penetration can be further increased. quantity.
(3)作為較佳之例,在(2)記載之劃線輪中,前述槽之端部之刃尖角小於前述槽之中央部之刃尖角。 在周向上之槽之端部與脆性材料基板接觸時,較在周向上之槽之中央部與脆性材料基板接觸時易於形成垂直裂痕。又,在刃尖角為小時,與刃尖角為大時相比,易於產生使垂直裂痕擴展之應力。因此,在本劃線輪中,由於藉由使周向上之槽之端部之刃尖角小於周向上之槽之中央部之刃尖角,而可有效地增大將垂直裂痕擴展之應力,因此可更增加滲透量。(3) As a preferred example, in the scribing wheel described in (2), the blade edge angle at the end of the aforementioned groove is smaller than the blade edge angle at the central portion of the aforementioned groove. Vertical cracks are more likely to be formed when the ends of the grooves in the circumferential direction are in contact with the brittle material substrate than when the central portions of the grooves in the circumferential direction are in contact with the brittle material substrate. Also, when the edge angle is small, stress that propagates a vertical crack tends to be generated more easily than when the edge angle is large. Therefore, in this scribing wheel, since the edge angle of the end of the groove in the circumferential direction is made smaller than the edge angle of the central portion of the groove in the circumferential direction, the stress for extending the vertical crack can be effectively increased, Therefore, the amount of penetration can be further increased.
(4)作為較佳之例,在(2)記載之劃線輪中,前述槽之刃尖角自前述槽之端部朝向前述槽之中央部變小。因此,可獲得與上述(3)相同之效果。(4) As a preferred example, in the scribing wheel described in (2), the edge angle of the groove becomes smaller from the edge of the groove toward the center of the groove. Therefore, the same effect as the above (3) can be obtained.
(5)作為較佳之例,在(2)記載之劃線輪中,前述槽之中央部之刃尖角為前述稜線部之刃尖角以上。(5) As a preferable example, in the scribing wheel described in (2), the edge angle of the center portion of the groove is greater than or equal to the edge angle of the ridge portion.
[發明之效果] 本發明之劃線輪可增加滲透量。[Effect of Invention] The scoring wheel of the present invention can increase the amount of penetration.
參照圖1~圖7,針對本實施形態之劃線輪1進行說明。劃線輪1用於分斷例如玻璃基板或陶瓷基板等由脆性材料形成之基板即脆性材料基板。藉由將劃線輪1一邊以特定之荷重按壓脆性材料基板之表面一邊使其滾動,而在脆性材料基板之表面形成劃線。The
劃線輪1係由燒結金剛石(Poly Crystalline Diamond)、超硬合金、單晶金剛石、多晶金剛石等形成。劃線輪1可係使用將金剛石等之硬質材料之膜塗佈於超硬合金等之基材者。The scribing
如圖1(a)所示般,劃線輪1具有圓板狀之本體部10、及剖面V字狀之刃尖部20。刃尖部20形成於劃線輪1之外周部。本體部10為在劃線輪1中較刃尖部20更朝徑向內側之部分。本體部10與刃尖部20一體地形成。再者,所謂剖面V字狀,為在以沿著劃線輪1之厚度方向(以下為「厚度方向DT」)之平面剖切劃線輪1之剖面上,朝向劃線輪1之外周緣漸尖之形狀(參照圖1(b))。劃線輪1之外徑為1 mm以上且20 mm以下之範圍。本實施形態之劃線輪1之外徑為2 mm。又,劃線輪1之厚度之一例為0.64 mm。As shown in FIG. 1( a ), the
於本體部10之中心部,形成有在厚度方向DT上貫通本體部10之插入孔13。於插入孔13,供插入可旋轉地支持劃線輪1之支持銷(省略圖示)。如圖1(b)所示般,本體部10具有:供形成插入孔13之一端之第1側面11、及供形成插入孔13之另一端之第2側面12。An
刃尖部20具有形成剖面V字狀之2個斜面即第1斜面21及第2斜面22。第1斜面21連結第1側面11與刃尖部20之前端,第2斜面22連結第2側面12與刃尖部20之前端。換言之,第1斜面21與第2斜面22之交線在刃尖部20之前端形成稜線。The
如圖1(b)所示般,在厚度方向DT上,劃線輪1之厚度方向DT之中心位置與、刃尖部20之前端位置彼此相等。在劃線輪1之剖面觀察下,沿著與厚度方向DT正交之方向之線段CL與第1斜面21所成之第1角度θ1、和線段CL與第2斜面22所成之第2角度θ2彼此相等。As shown in FIG. 1( b ), in the thickness direction DT, the center position of the
如圖2(a)所示般,劃線輪1在刃尖部20之前端部具有沿著劃線輪1之圓周方向(以下為「周向DC」)彼此隔開地形成多數個槽24。槽24之個數可任意設定。本實施形態之槽24之數目為150個。於在周向DC上相鄰之槽24之間,形成有第1斜面21與第2斜面22及作為其交線之稜線部23。稜線部23之外周緣與槽24之外周緣形成刃尖25。刃尖部20係由稜線部23與槽24交互地以等節距形成。稜線部23之第1斜面21與第2斜面22所成之角即刃尖角θr為90°以上且160°以下之範圍,較佳為100°以上且150°以下。若刃尖角θr為90°以上,則於脆性材料基板不易產生表面剝離及先行,若為160°以下,則不易產生所述不良。本實施形態之刃尖角θr為120°(參照圖4)。As shown in FIG. 2( a ), the
如圖2(b)所示般,槽24具有自刃尖部20之外周部彎曲狀地凹陷之形狀。又,槽24具有與第1斜面21對應之第1槽斜面21A、及與第2斜面22對應之第2槽斜面22A,於第1槽斜面21A與第2槽斜面22A之交叉之外周緣包含與稜線部23連續之刃尖25。槽24具有自周向DC上之槽24之端部朝向槽24之中央部變深之部分。本實施形態之槽24自周向DC上之槽24之端部朝向槽24之中央部變深。將槽24之深度H規定為劃線輪1之徑向上之稜線部23與槽24之最深部之間之距離。將稜線部23之槽24之寬度WD規定為周向DC上之槽24之兩端緣之間之距離。稜線部23之槽24之深度H係在將脆性材料基板劃線之情形時考量脆性材料基板之材質及厚度、進而將劃線輪1朝脆性材料基板按壓之荷重(以下為「劃線荷重」)、以及藉由劃線而形成之劃線及分斷後之脆性材料基板之品質等而選擇,例如為0.5 μm以上且6.0 μm以下。本實施形態之刃尖部20之槽24之深度為5.5 μm。周向DC上之槽24之寬度WD為2.0 μm以上且35 μm以下。若脆性材料基板之板厚為0.7 mm以下,刃尖25之槽24之寬度WD較佳為2.0 μm以上且15 μm以下,若脆性材料基板之板厚為1.1 mm左右,稜線部23之槽24之寬度WD較佳為10 μm以上且30 μm以下。本實施形態之刃尖25之槽24之寬度WD為24 μm。As shown in FIG. 2( b ), the
如此之槽24係在劃線輪1之插入孔13安裝於未圖示之馬達之旋轉軸之狀態下,藉由自雷射照射裝置照射雷射光而形成。雷射光之照射方向為劃線輪1之徑向。雷射光在較劃線輪1之稜線部23更靠近雷射照射裝置側形成焦點。在雷射照射裝置中照射雷射光之照射部可在厚度方向DT上相對於劃線輪1移動。另一方面,照射部在劃線輪1之徑向上不變更與刃尖部20之間之距離。因此,在劃線輪1之厚度方向DT之中心位置,照射部與刃尖部20之間之距離為最小,隨著沿厚度方向DT與劃線輪1之厚度方向DT之中心位置離開,照射部與刃尖部20之間之距離變長。
若如此般形成槽24,於劃線輪1之稜線部23被雷射光照射之面積為最小,而隨著在厚度方向DT上與刃尖部20之前端位置離開,被雷射光照射之面積增加。因此,如圖3所示般,槽24之寬度WD在刃尖部20之前端位置、亦即刃尖25之槽24處為最小,隨著在厚度方向DT上與刃尖25離開而變大。If the
如圖4及圖5所示般,周向DC上之槽24之端部(以下,簡稱為槽24之端部)之形狀、與周向DC上之槽24之中央部(以下簡稱為槽24之中央部)之形狀互不相同。As shown in Figure 4 and Figure 5, the shape of the end of the
如圖4所示般,槽24之端部之刃尖角即第1槽刃尖角θg1小於刃尖角θr。第1槽刃尖角θg1較佳為較刃尖角θr小2~10°左右。另一方面,如圖5所示般,槽24之中央部之刃尖角即第2槽刃尖角θg2大於刃尖角θr。亦即,第1槽刃尖角θg1小於第2槽刃尖角θg2。As shown in FIG. 4, the edge angle of the end of the
此處,槽24之端部為在周向DC上與稜線部23相鄰之部分。將周向DC上之槽24之一個端部規定為自稜線部23之槽24之槽開始點(圖3之線段C之位置)起至朝槽24之內方遍及特定距離隔開之位置(圖3之線段E之位置)之部分。再者,針對周向DC上之槽24之另一個端部亦同樣地規定。如此般,將第1槽刃尖角θg1規定為自槽24之線段C之位置至線段E之位置之部分之刃尖角。在本實施形態中,周向DC上之線段C與線段E之間之距離為5.0 μm。第1槽刃尖角θg1所規定之距槽24之端部之距離較佳為相對於槽24之寬度WD單側為10~30%左右。槽刃尖角θg藉由第1斜面21之與槽24對應之部分即第1槽斜面21A與第2斜面22之與槽24對應之部分即第2槽斜面22A所成之角界定。第1槽刃尖角θg1藉由槽24之端部之第1槽斜面21A與槽24之端部之第2槽斜面22A所成之角界定。第2槽刃尖角θg2藉由槽24之中央部之第1槽斜面21A與槽24之中央部之第2槽斜面22A所成之角界定。Here, the end portion of the
再者,第1槽刃尖角θg1及第2槽刃尖角θg2可任意變更。作為一例,第2槽刃尖角θg2可等於刃尖角θr,或小於刃尖角θr。Furthermore, the first groove edge angle θg1 and the second groove edge angle θg2 can be changed arbitrarily. As an example, the second groove edge angle θg2 may be equal to or smaller than the edge angle θr.
(實施例)
為了評估劃線輪1之性能而利用實施例1及實施例2之劃線輪與比較例1及比較例2之劃線輪針對劃線荷重與滲透量之關係進行了確認。再者,滲透量係將垂直裂痕之深度相對於脆性材料基板之厚度之比以百分率(%)表示者。(Example)
In order to evaluate the performance of the
針對實施例1、實施例2、比較例1、及比較例2之劃線輪之各者,以槽24之開始位置為基準測定每2.5 μm之測定位置之刃尖角度差θd。具體而言,將與圖3之線段A~線段H對應之位置作為測定位置。線段A為自槽24之開始位置朝稜線部23側離開5 μm之位置,線段B為自槽24之開始位置朝刃尖25側離開2.5 μm之位置。線段A及線段B皆為通過稜線部23之線段。線段C為槽24之開始位置,線段D為自槽24之開始位置朝槽24側離開2.5 μm之位置,線段E為自槽24之開始位置朝槽24側離開5.0 μm之位置,線段F為自槽24之開始位置朝槽24側離開7.5 μm之位置,線段G為自槽24之開始位置朝槽24側離開10.0 μm之位置,線段H為自槽24之開始位置朝槽24側離開12.5 μm之位置。線段C~線段H任一者皆為通過槽24之外周緣之線段。圖6係顯示作為實施例1、實施例2、比較例1、及比較例2之劃線輪之測定位置之線段A、與線段B~線段H之刃尖角度差θd之關係之圖。For each of the scribing wheels of Example 1, Example 2, Comparative Example 1, and Comparative Example 2, the blade edge angle difference θd was measured at each measurement position of 2.5 μm based on the starting position of the
又,實施例1、實施例2、比較例1、及比較例2之劃線輪係各自使用外徑2 mm、刃尖角θr為120°、槽之數目為150個、槽之深度H為5.5 μm者。使用圖6針對實施例1、實施例2、比較例1、及比較例2之劃線輪之具體之槽形狀進行說明。Also, the marking wheels of Example 1, Example 2, Comparative Example 1, and Comparative Example 2 each use an outer diameter 2 mm, the edge angle θr is 120°, the number of grooves is 150, and the groove depth H is 5.5 μm. The specific groove shapes of the scribing wheels of Example 1, Example 2, Comparative Example 1, and Comparative Example 2 will be described using FIG. 6 .
圖6係顯示以線段A之位置之刃尖角θr為基準,實施例1、實施例2、比較例1、及比較例2之劃線輪之各測定部位之刃尖角度差θd之圖。在線段C~線段E之位置,實施例1及實施例2之劃線輪之刃尖角度差θd成為負值,而另一方面,比較例1及比較例2之劃線輪之刃尖角度差θd成為正值。若詳細描述,則在線段C之位置,實施例1之劃線輪之槽刃尖角θg較刃尖角θr小約3°,實施例2之劃線輪之槽刃尖角θg較刃尖角θr小約2.5°。比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約0.2°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約0.1°。在線段D之位置,實施例1之劃線輪之槽刃尖角θg較刃尖角θr小約5.5°,實施例2之劃線輪之槽刃尖角θg較刃尖角θr小約4.5°。在實施例1及實施例2之劃線輪中,在線段D之位置槽刃尖角θg相對於刃尖角θr成為最小。又,比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約1°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約0.8°。在線段E之位置,實施例1之劃線輪之槽刃尖角θg較刃尖角θr小約0.5°,實施例2之劃線輪之槽刃尖角θg較刃尖角θr小約1°。比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約3°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約3.5°。6 is a graph showing the blade edge angle difference θd at each measurement position of the scribing wheels of Example 1, Example 2, Comparative Example 1, and Comparative Example 2 based on the edge angle θr at the position of line segment A. From line segment C to line segment E, the edge angle difference θd of the scribing wheels of Example 1 and Example 2 becomes a negative value, while on the other hand, the edge angles of the scribing wheels of Comparative Example 1 and Comparative Example 2 The difference θd becomes a positive value. If described in detail, at the position of line segment C, the groove edge angle θg of the scribing wheel in
在線段F之位置,實施例2之劃線輪之刃尖角度差θd成為負值,而另一方面,實施例1、比較例1、及比較例2之劃線輪之刃尖角度差θd成為正值。若詳細描述,則在線段F之位置,實施例1之劃線輪之槽刃尖角θg較刃尖角θr大約0.1°,實施例2之劃線輪之槽刃尖角θg較刃尖角θr小約1°。比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約8°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約7.5°。At the position of line segment F, the edge angle difference θd of the scribing wheel of Example 2 becomes a negative value, while on the other hand, the edge angle difference θd of the scribing wheels of Example 1, Comparative Example 1, and Comparative Example 2 become a positive value. If described in detail, at the position of line segment F, the groove edge angle θg of the scribing wheel in
在線段G之位置,實施例2之劃線輪之刃尖角度差θd成為負值,而另一方面,比較例1及比較例2之劃線輪之刃尖角度差θd成為正值。又,實施例1之劃線輪之刃尖角度差θd為0°。若詳細描述,則實施例2之劃線輪之槽刃尖角θg較刃尖角θr小約0.2°。比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約8°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約10°。At the line segment G, the edge angle difference θd of the scribing wheel of Example 2 is a negative value, while the edge angle difference θd of the scribing wheels of Comparative Example 1 and Comparative Example 2 is a positive value. In addition, the edge angle difference θd of the scribing wheel of Example 1 was 0°. If described in detail, the groove edge angle θg of the scribing wheel of the second embodiment is about 0.2° smaller than the edge angle θr. The groove edge angle θg of the scribing wheel in Comparative Example 1 is about 8° greater than the edge angle θr, and the groove edge angle θg of the scribing wheel in Comparative Example 2 is about 10° greater than the edge angle θr.
在線段H之位置中,實施例1、實施例2、比較例1、及比較例2之劃線輪之刃尖角度差θd為正值。實施例1之劃線輪之槽刃尖角θg較刃尖角θr大約2°,實施例2之劃線輪之槽刃尖角θg較刃尖角θr大約1°,比較例1之劃線輪之槽刃尖角θg較刃尖角θr大約9°,比較例2之劃線輪之槽刃尖角θg較刃尖角θr大約8°。In the position of line segment H, the edge angle difference θd of the scribing wheels of Example 1, Example 2, Comparative Example 1, and Comparative Example 2 is a positive value. The groove edge angle θg of the scribing wheel in Example 1 is about 2° greater than the edge angle θr, the groove edge angle θg of the scribing wheel in Example 2 is about 1° than the edge angle θr, and the scribing wheel of Comparative Example 1 The groove edge angle θg of the wheel is about 9° greater than the edge angle θr, and the groove edge angle θg of the scribing wheel of Comparative Example 2 is about 8° than the edge angle θr.
又,對於槽24之刃尖角即槽刃尖角θg利用例如雷射顯微鏡如下述般進行運算。亦即,雷射顯微鏡朝劃線輪1之徑向照射雷射,藉由計測雷射顯微鏡與劃線輪1之間之距離,而取得與沿刃尖部20之方向正交之方向之槽24之輪廓。然後,根據取得之槽24之第1槽斜面21A及第2槽斜面22A之各自之輪廓而運算槽刃尖角θg。在本實施例中,作為雷射顯微鏡,使用基恩斯公司(KEYENCE)之VK-X100。The groove edge angle θg, which is the edge angle of the
在劃線荷重與滲透量之關係中,測定在使劃線荷重變化為0.09 MPa、0.10 MPa、0.11 MPa、0.13 MPa、0.15 MPa、0.17 MPa、0.19 MPa、0.21 MPa、及0.23 MPa時之滲透量。In the relationship between the marking load and the penetration amount, measure the penetration amount when the marking load is changed to 0.09 MPa, 0.10 MPa, 0.11 MPa, 0.13 MPa, 0.15 MPa, 0.17 MPa, 0.19 MPa, 0.21 MPa, and 0.23 MPa .
如圖7所示般,若劃線荷重為0.09 MPa,實施例1之劃線輪之滲透量為約75%,實施例2之劃線輪之滲透量為約76%,比較例1之劃線輪之滲透量為約64%,比較例2之劃線輪之滲透量為約66%。若劃線荷重為0.10 MPa,實施例1及實施例2之劃線輪之滲透量各自為約78%,比較例1之劃線輪之滲透量為約60%,比較例2之劃線輪之滲透量為約74%。若劃線荷重為0.11 MPa,實施例1之劃線輪之滲透量為約82%,實施例2之劃線輪之滲透量為約81%,比較例1之劃線輪之滲透量為約77%,比較例2之劃線輪之滲透量為約74%。若劃線荷重為0.13 MPa,實施例1及實施例2之劃線輪之滲透量為約84%,比較例1之劃線輪之滲透量為約79%,比較例2之劃線輪之滲透量為約77%。若劃線荷重為0.15MPa,實施例1及實施例2之劃線輪之滲透量為約86%,比較例1之劃線輪之滲透量為約81%,比較例2之劃線輪之滲透量為約83%。若劃線荷重為0.17 MPa,實施例1及實施例2之劃線輪之滲透量為約87%,比較例1及比較例2之劃線輪之滲透量為約85%。若劃線荷重為0.19MPa,實施例1、實施例2、及比較例2之劃線輪之滲透量為約90%,比較例1之劃線輪之滲透量為約86%。若劃線荷重為0.21 MPa,實施例1之劃線輪之滲透量為約92%,實施例2之劃線輪之滲透量為約93%,比較例1及比較例2之劃線輪之滲透量為約90%。若劃線荷重為0.23 MPa,實施例1及實施例2之劃線輪之滲透量為約95%,比較例1及比較例2之劃線輪之滲透量為約93%。As shown in Figure 7, if the scribing load is 0.09 MPa, the penetration rate of the scribing wheel of Example 1 is about 75%, the penetration rate of the scribing wheel of Example 2 is about 76%, and the scribing wheel of Comparative Example 1 The penetration amount of the scribing wheel was about 64%, and the penetration amount of the scribing wheel of Comparative Example 2 was about 66%. If the scribing load is 0.10 MPa, the penetration of the scribing wheel of Example 1 and Example 2 is about 78% respectively, the penetration of the scribing wheel of Comparative Example 1 is about 60%, and the scribing wheel of Comparative Example 2 The penetration rate is about 74%. If the marking load is 0.11 MPa, the penetration of the marking wheel of Example 1 is about 82%, the penetration of the marking wheel of Example 2 is about 81%, and the penetration of the marking wheel of Comparative Example 1 is about 82%. 77%, the penetration rate of the scribing wheel of Comparative Example 2 was about 74%. If the marking load is 0.13 MPa, the penetration of the marking wheel of
如圖7所示般,可確認到實施例1及實施例2之劃線輪較比較例1及比較例2之劃線輪滲透量大5~10%。特別是,可確認到在低的劃線荷重之範圍內,實施例1及實施例2之劃線輪之滲透量顯著地大於比較例1及比較例2之劃線輪之滲透量。As shown in FIG. 7 , it was confirmed that the scribing wheels of Example 1 and Example 2 had 5 to 10% more penetration than the scribing wheels of Comparative Example 1 and Comparative Example 2. In particular, it was confirmed that the penetrating amounts of the scribing wheels of Examples 1 and 2 were significantly larger than those of the scribing wheels of Comparative Example 1 and Comparative Example 2 in the range of low scribing loads.
根據本實施形態,可獲得以下之效果。 (1)藉由槽刃尖角θg小於刃尖角θr,而脆性材料基板之滲透量增加。藉此,可容易地分斷脆性材料基板。又,由於可減小用於獲得所期望之垂直裂痕之深度之劃線荷重,因此可抑制由劃線荷重變大所引起之先行等之脆性材料基板之劃線時之不良發生。According to this embodiment, the following effects can be obtained. (1) Since the edge angle θg of the groove is smaller than the edge angle θr, the penetration amount of the brittle material substrate increases. Thereby, the brittle material substrate can be easily broken. In addition, since the scribing load for obtaining the desired depth of the vertical crack can be reduced, it is possible to suppress the occurrence of failure in scribing of the preceding brittle material substrate due to the increase in the scribing load.
(2)槽24之端部與脆性材料基板接觸之情形,與槽24之中央部與脆性材料基板接觸之情形相比更易於形成垂直裂痕。又,槽刃尖角θg較小之情形,與槽刃尖角θg較大之情形相比,易於產生使垂直裂痕擴展之應力。因此,在本實施形態中,使第1槽刃尖角θg1小於第2槽刃尖角θg2。藉此,由於可有效地增大使垂直裂痕擴展之應力,因此可更增加滲透量。(2) The case where the end portion of the
(變化例) 上述實施形態之說明為本發明之劃線輪所能採取之形態之例示,並非意圖限制該形態。本發明之劃線輪可採取例如以下所示之上述實施形態之變化例、及組合相互不矛盾之至少2個變化例之形態。在以下之變化例中,針對與上述實施形態之形態共通之部分,賦予與上述實施形態相同之符號而省略其說明。(variation example) The description of the above-mentioned embodiment is an illustration of the form that the scribing wheel of the present invention can take, and is not intended to limit the form. The scribing wheel of the present invention can take, for example, a modification example of the above-mentioned embodiment shown below, and a form in which at least two modifications that do not contradict each other are combined. In the following modified examples, the same symbols as those in the above-mentioned embodiment are given to the parts that are in common with those of the above-mentioned embodiment, and the description thereof will be omitted.
・可以自劃線輪1之槽24之端部隨著朝向槽24之中央部而槽刃尖角θg逐漸變小之方式設置槽24。藉由該構成亦可獲得上述實施形態之效果。・The
・亦可在槽24之端部,以自槽開始點(圖3之線段C之位置)隨著朝向圖3之線段E之位置而槽刃尖角θg逐漸變小之方式設置槽24。藉由該構成亦可獲得上述實施形態之效果。・At the end of the
・槽24之端部以外之槽24之槽刃尖角θg可為刃尖角θr以上。亦即,可以僅槽24之端部之第1槽刃尖角θg1小於刃尖角θr之方式形成。藉由該構成亦可獲得上述實施形態之效果。・The groove edge angle θg of the
・槽24之深度方向之形狀可任意地變更。作為一例,槽24可為其底部含有平坦部之形狀。
・刃尖部20之形狀可任意地變更。作為一例,在厚度方向DT上,稜線部23之位置與劃線輪1之厚度方向DT之中心位置可互不相同。・The shape of the
1‧‧‧劃線輪
1b-1b‧‧‧線
10‧‧‧本體部
11‧‧‧第1側面
12‧‧‧第2側面
13‧‧‧插入孔
20‧‧‧刃尖部
21‧‧‧第1斜面
21A‧‧‧第1槽斜面
22‧‧‧第2斜面
22A‧‧‧第2槽斜面
23‧‧‧稜線部
24‧‧‧槽
25‧‧‧刃尖
A~H‧‧‧線段
CL‧‧‧線段
DC‧‧‧周向
DT‧‧‧厚度方向
H‧‧‧(槽之)深度/線段
WD‧‧‧(槽之)寬度
θ1‧‧‧第1角度
θ2‧‧‧第2角度
θg‧‧‧槽刃尖角
θg1‧‧‧第1槽刃尖角
θg2‧‧‧第2槽刃尖角
θr‧‧‧刃尖角
1‧‧‧Scribing wheel
1b-1b‧‧‧
圖1(a)係針對第1實施形態之劃線輪之側視圖,圖1(b)係圖1(a)之1b-1b線之剖視圖。 圖2係將圖1之劃線輪之刃尖部之一部分放大之圖,圖2(a)係立體圖,圖2(b)係側視圖。 圖3係刃尖部之一部分之平面圖。 圖4係刃尖部之槽之端部之剖視圖。 圖5係刃尖部之槽之中央部之剖視圖。 圖6係顯示刃尖部之槽之位置、和與該位置對應之槽之刃尖角與刃尖部之稜線部之刃尖角之角度差的關係之圖。 圖7係顯示劃線荷重與滲透量之關係之圖。Fig. 1(a) is a side view of the scribing wheel of the first embodiment, and Fig. 1(b) is a cross-sectional view of line 1b-1b of Fig. 1(a). Fig. 2 is an enlarged view of a portion of the blade tip of the scribing wheel in Fig. 1, Fig. 2(a) is a perspective view, and Fig. 2(b) is a side view. Fig. 3 is a plan view of a part of the blade tip. Fig. 4 is a cross-sectional view of the end of the groove of the blade tip. Fig. 5 is a cross-sectional view of the central portion of the groove of the blade tip. Fig. 6 is a diagram showing the position of the groove of the blade edge, and the relationship between the angle difference between the blade edge angle of the groove corresponding to the position and the edge angle of the ridge line portion of the blade edge. Fig. 7 is a graph showing the relationship between the scribe load and the amount of penetration.
1‧‧‧劃線輪 1‧‧‧Scribing wheel
10‧‧‧本體部 10‧‧‧Body Department
11‧‧‧第1側面 11‧‧‧1st side
12‧‧‧第2側面 12‧‧‧The second side
20‧‧‧刃尖部 20‧‧‧Blade tip
21‧‧‧第1斜面 21‧‧‧1st slope
21A‧‧‧第1槽斜面 21A‧‧‧The slope of the first slot
22‧‧‧第2斜面 22‧‧‧The second slope
22A‧‧‧第2槽斜面 22A‧‧‧The slope of the second groove
23‧‧‧稜线部 23‧‧‧edge line
24‧‧‧槽 24‧‧‧slot
25‧‧‧刃尖 25‧‧‧Blade tip
DT‧‧‧厚度方向 DT‧‧‧thickness direction
θ g‧‧‧槽刃尖角 θ g‧‧‧groove edge angle
θg1‧‧‧第1槽刃尖角 θg1‧‧‧The first groove edge angle
θr‧‧‧刃尖角 θr‧‧‧tip angle
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Also Published As
Publication number | Publication date |
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JP7032787B2 (en) | 2022-03-09 |
JP2019098605A (en) | 2019-06-24 |
KR102625907B1 (en) | 2024-01-18 |
CN109849197A (en) | 2019-06-07 |
TW201925116A (en) | 2019-07-01 |
KR20190064438A (en) | 2019-06-10 |
CN109849197B (en) | 2022-07-29 |
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