201141799 六、發明說明： 【發明所屬之技術領域】 本發明是有關於適於切割脆性材料之刀輪（scribing wheel)及其製造方法。更特定而言’本發明是有關於用以 形成用於切割諸如玻璃板（glass plate )或半導體晶圓 (semiconductor wafer)等脆性材料之劃線（scribe line )的 刀輪及其製造方法。 【先前技術】 稱為「刀輪」、「切割器輪」或「切割輪」（下文中稱 為「刀輪」）之工具大體上用以切割諸如玻璃板、半導體晶 圓、薄膜電晶體-液晶顯示器（TFT-LCD)等非金屬脆性材 料。 當使用刀輪切割脆性基板時，刀輪對應於脆性材料上 之所要切割形狀而移動’隨著刀輪之脊部（ridge)壓在脆 性材料上，藉此將較大之應力施加於基板。此處，刀輪在 旋轉的同時與脆性基板接觸，使得劃線形成於脆性基板 上，以在脆性基板之深度方向上形成垂直裂紋（vertical crack)。 刀輪具有實質上圓盤形狀或算盤珠（abacus bead)形 狀’且具有沿其外圓周形成之脊部，以首先接觸脆性基板， 且比刀輪之任何其他部分更深地進入脆性基板。脊部形成 於刀輪之相對侧處，具有一對帶斜面的表面。 決定刀輪之效能的因素包含水平裂紋（鑿平 (chipping))及垂直裂紋，且著重於改良刀輪之研究已箸 201141799 重於增加垂直裂紋之深度’同時減小水平開裂。水平裂紋 貫質上並不有助於切割脆性基板，且使切割品質劣化。韓 國專利公開案第2000-0071315號及第2003-0016337號揭 露其中沿刀輪之脊部以預定間距形成多個切割凹槽 (cutting groove)以用於增加垂直裂紋之深度同時減小水平 裂紋的技術。 此外，按照慣例，具有切割凹槽之刀輪經修改以用於 最終用途，且此修改之實例揭露於韓國專利第555329號 中。為在所要位置切割諸如液晶顯示器（liquid crystal display ’ LCD )等經接合的玻璃基板而提出此刀輪，且此 刀輪之特徵在於在脊部之預定區上未形成切割凹槽。然 而，此刀輪在未形成切割凹槽之區中遭受可加工性之劣 化。在另一刀輪中，切割凹槽形成為具有不同深度，但對 脆性基板上之垂直裂紋之深度的增加不提供實質貢獻，且 在灰切割凹槽周圍之突起處引起過量應力。由此，此等經 修改之刀輪仍存在問題，諸如脊部上之不均一的可加工 性，或脊部之某一區處的過量應力，從而導致對刀輪之損 壞。而且’與具有切割凹槽之現存刀輪相比，經修改之刀 輪不實質上增加垂直裂紋之深度，亦不實質上減少鑿開現 象。 【發明内容】 本發明是針對解決先前技術之問題，且本發明之一態 樣為藉由在刀輪之脊部之預定區中設定不同凹槽間距來改 良刀輪之可加工性.，諸如增加垂直裂紋之深度等。 201141799 根據本發明之-態樣’ -種適於切割脆性材 包含：圓形或弓形脊部；第-及第二帶斜面的表面，阳 所述脊部處彼此蚊；以及乡個叫’其，沿所述脊 形成，其巾所述脊部包含多健段，所龍段依序配^ 所述脊部之區中，且各自具有形成於距其他區段中之凹样 不同間距處的凹槽。因此可理解，凹槽全部沿脊部 曰 如與其中切割凹槽並不有意地形成於脊部上的習輪不 同:所述多個區段可在脊部之圓周方向上以兩個或兩 上循環重複。 在-實施例中，所述區段中之每—者形成有單一凹 槽。在此情況下，所祕段巾之每—者具有界定為所述 ，中之凹槽與鄰近於其之另-區财之凹槽之間的距離的 間距。 鲁 在另-實施例中，所述區段中之每一者形成有兩 兩個以上凹槽。在此情況下，所述區段中之每一者具有界 疋為所述區段中之鄰近凹槽之間的距離的間距。 | 根據本發明之另-態樣，一種刀輪包含：圓形或弓形 切割邊緣，以及多個凹槽，其形成於所述切割邊緣上，其 中所述切割邊緣包含多傭段，所述區段依序配置於所^ 切割邊緣之區中’且在所述切割邊緣之_方向上以兩個 或兩個以上循環重複’每―區段具有形成於距其他區段中 之凹槽不關距處的凹槽。切割邊緣可為脊部或所述脊部 之形成於时置財脊部處魏交叉之—料斜面的㈣ 之間的-部分。此處’所述區段中之每—者可形成有單一 201141799 :且_定為二 輪的:，提供一種製造適於切割脆性材料之刀 法包含：在所述刀輪之_或弓形脊部 上界疋夕麵以及在所述脊部上形成多伽槽，其中 少兩者具有所述凹槽之彼此不同的間距。 下文中，將參見附圖詳細描述本發明之例示性實施 例。以下實施例藉由說明而給出，以向熟習此項技術者提 供本發明之詳盡轉。目此應理解’其他實補將基於本 發明而明顯，且在不脫離本發明之範疇的情況下，可做出 系統、過程或機械改變。同樣應注意，圖式未按精確比例， 且某些尺寸（諸如寬度、長度、厚度等）在圖中為清楚而 誇大。 <第一實施例> 圖1為根據第一實施例之刀輪的侧視圖，且圖2為圖 1所示之刀輪的正視圖。 參見圖1及圖2，根據第一實施例之刀輪1由例如燒 結石反化物（cemented carbide )或多晶金剛石（poly crystalline diamond ’ PCD)製成，且具有實質上圓形圓盤形狀，且包 含沿其外圓周之圓形脊部1〇。脊部1〇在厚度方向上在其 相對側具備第一及第二帶斜面的表面20、30,其自脊部10 201141799 之頂部傾斜。第一及第二帶斜面的表面20、30在脊部 處彼此交叉。此處，第一與第二帶斜面的表面20、3〇之10 的交叉角（0〇可設定於60〜130度之範圍内。 間 當使用刀輪1處理脆性基板時，脊部10充當切 緣，其首先與脆性基板接觸，且比刀輪1之任何其他:^ 更深地進入脆性基板。刀輪1具備軸孔4〇，軸耦接至:分 40。耦接至軸孔40之軸連接至切割裝置之固持器，以孔 刀輪1的旋轉。脊部10在沿脊部1〇之圓周方向上形成許 多個凹槽’亦即’切割凹槽12。此等凹槽12有助 於脆性基板中之垂直裂紋之深度的增加。 、；成 如圖2所不’脊部10包含多個區段A、B及C，亦g 第-區段A、第二區段3及第三區段c，其依序 ^ 有凹槽12(各自具有距鄰砂其之其他凹槽丨2不同2 ，在此實施例中’區段a、b或c中之每—者 单-凹槽12’且具有由分_成於區段及與其鄰 區段中的兩個凹槽12之間的距離界定的間距。更4: 1段f中之_ 12與在順時針方向上鄰近於第一^ 之第一區段B中之凹槽；°名又 第二間距P2界定為第二區段^離’且第—區段^之 向上鄰近於第二區段之第三凹槽12與在順時針方 離。此外，第三區段C之第：二之凹槽12之間的距 中之凹槽η與在順時針方向-上 一區段"中之凹槽12之間的距離。第二至一第Γ區段te 201141799 C之第一至第二間距Pi、P2、P3彼此不同，但形成於區 段中之所有凹槽可具有相同大小、深度及形狀。 配置於脊部10之區中的第一、第二及第三區段A、B、 C沿脊部10連續地重複。在此實施例中，三個區段（亦即， 第一、弟一及第二區段A、B、C，其每一者具有在距其他 鄰近區段之凹槽不同間距處形成的凹槽）沿脊部1〇重複配 置。然而應注意，形成於脊部之區中的區段的數目不限於 二個區段’且兩個或兩個以上區段（亦即，第一區段、、 第N區段A、…、N)可沿脊部1〇重複配置。 「在本文中，界定每一區段之用語，亦即「第—區段」、 ^二區段」'「第三區段」或「第N區段」是根據間距而 ^的’且各自在不同位置處具有不同凹槽之間的一間距 的兩個區段將由同一術語「第N區段」指示。 <第二實施例> 圖3為根據第二實施例之刀輪的正視圖 配置= 之區中依 在脊部U)之區中，第一及第二區段上-”。此外 ^固凹槽U。在第—區段A中， 一者具 亦即，凹槽12之三個第一間距？1在2具有相同間距 值。在第二區段B中，凹槽12 區段A中為相 段A中之凹槽U之間距，但具=間距不同於第-，個第二間距P2在第二區段B中具^值:亦即，凹槽 一區段A及B之配置全部沿脊部1Q第- 連、”焉地重複。 201141799 如圖3所示’具有不同凹槽間距之兩個區段，亦即， 第一區段A及第二區段B，在此實施例中沿脊部1〇重複。 然而應注意，形成於脊部之區中的區段的數目不限於兩個 區段，且具有不同凹槽間距之三個或三個以上區段可沿脊 部重複地配置。此外’在此實施例中，區段A及B中之每 一者具有三個凹槽12，但本發明不限於此。 隨後’將爹考分析測试來描述本發明，其中將對應於 第一及第二實施例之發明性實例與比較性實例進行比較。 # <測試：刀輪之應力/位移分析> 1. 分析模型 對於分析核型’使用有限元素法（行nite eienient method’FEM)來設定模擬模型，其中因施加於其之重量 而旋轉的刀輪（亦即，劃線器（scriber))切割^為工件 (workpiece)而準備之玻璃板（OA_1〇玻璃此處，針對 發明性實例（亦即’第-及第二實例）及比較性實例中之 每一者分析垂直裂紋之深度及水平開裂之程度，以便獲得 鲁藉由推動刀輪之切割邊緣（亦即，脊部）使其與玻璃板接 觸時每一時間步驟處玻璃板的位移量值。作為比較性實 例，使用在脊部上（亦即，在切割邊緣上）不 之 連續型刀輪（比較性實例n及在脊部上具有^一凹^間 距之均一型刀輪（比較性實例2)。 曰 圖4緣示模擬模型之組態。參見圖4，由於 際模型極小，因此以倍之放大率來分析刀輪之脊部。 僅分析刀輪之.外圓周的一部分（亦即，脊部之" 201141799 度））。用於模擬模型之材料為作為工件之五個玻璃板 (OA-10) 1%個PCD(多晶金剛石）片以及單—接點（AISI 4130)。 2 · 分析條件 ⑴對於每一工件，僅Ty (推動刀輪之方向）在6 個自由度十不受限制以在PCD之旋轉期間施加壓縮條件。 (2) 對於接點之中心，Τχ、Ty、Tz、Rx及办受限制。 (3) 刀輪之初始速度設定為3,1〇8rpm。 (4) %轉條件疋參考接點之中心點而設定的：評估對 應於總共360度中之10度的旋轉。 2)山接觸條件：如圖5所示’使在刀輪之上端處之脊 部的f端及橫向側與工件接觸。由於脊部與工件之間的接 觸挣^有摩彳祭，因此將靜態摩擦係數及動態摩擦係數設定 為5% ’ _於比較兩麵型。脊部之最大切贿度在 觸時為1 mm。 (6)壓縮條件：用於實際切割之壓縮條件應用於全部 時間梦驟。將0.15 MPa施加至脊部之前端與工件之間的接 觸點。 3·分析結果 (1)比較性實例1 (連續型刀輪） 圖6a圖6b及圖6c續'示當將上述條件應用於脊部上 不具有凹槽之連、_刀輪_分析結果。圖6a為施加於工 件之應力^佈的圖，圖沾為描繪在刀輪之時間步驟〇〜1〇〇 期間之洪密斜斯（賴Mises)應力之和的變化的曲線圓， 201141799 且圖6c繪示在時間步驟丨、5〇及1〇〇處工件之位移量值。 在此分析中，兩個帶斜面的表面在刀輪之脊部處的交叉角 為115度，且刀輪具有21〇 mm之直徑。 參見圖6a’可確定應力分佈在水平方向上較寬，且在 垂直方向上較窄。因此可見，水平開裂（亦即，鑿開程度） 較嚴重，且垂直裂紋具有較低深度。參見圖6b，可見洪^密 斜斯應力之和分佈於16_ MPa之位準中或在時間步 〇〜100處較小。參見圖6c，可見在時間步驟1處之位移量 值之和約為3.63 mm’在時間步驟50處之位移量值和 二咖’且在時間步驟1〇0處之位移量值之和約為 (2)比較性實例2 (均一型刀輪） 圖7a、圖7b及圖7c繪示當將上述條件廡 =分折結果’所述均一型刀輪在 均一 __之寬度、2遷麵之深度及G.9随之間距的 _同槽。刀輪具有115度之脊部角及210 mm之直抨。、 麵加於卫件之應力分佈的圖，圖7 = 刀輪之時間步驟(M00期間之洪密斜 在 曲線圖，且圖7e*干在邮應力之和的變化的 移量值。冑7“.曰不在時間步驟卜5〇及刚處工件之位 增物間步ί '見圖7e ’可見在時間步驟1處之位移量 11 201141799 ^和^ 4·19_’在時間步驟5Q處之位移量值之和約 38.33 1麵，且在時間步驟1〇0處之位移量值之和約為 (3)實例1 (ABC重複型） 重禮:刀Zb及圖8C繪示當將上述條件應用於縱 重硬i刀輪時的分析結果，其中區段A、B及 一201141799 VI. Description of the Invention: [Technical Field] The present invention relates to a scribing wheel suitable for cutting a brittle material and a method of manufacturing the same. More specifically, the present invention relates to a cutter wheel for forming a scribe line for cutting a brittle material such as a glass plate or a semiconductor wafer, and a method of manufacturing the same. [Prior Art] A tool called a "cutter wheel", a "cutter wheel" or a "cutting wheel" (hereinafter referred to as a "cutter wheel") is generally used for cutting such as a glass plate, a semiconductor wafer, a thin film transistor - Non-metallic brittle materials such as liquid crystal displays (TFT-LCDs). When the fragile substrate is cut using a cutter wheel, the cutter wheel moves in response to the desired shape of the cut material on the brittle material. As the ridge of the cutter wheel presses against the brittle material, a greater stress is applied to the substrate. Here, the cutter wheel is in contact with the brittle substrate while rotating, so that the scribe line is formed on the brittle substrate to form a vertical crack in the depth direction of the brittle substrate. The cutter wheel has a substantially disc shape or abacus bead shape and has a ridge formed along its outer circumference to first contact the brittle substrate and enter the brittle substrate deeper than any other portion of the cutter wheel. The ridges are formed at opposite sides of the cutter wheel and have a pair of beveled surfaces. Factors that determine the effectiveness of the cutter wheel include horizontal cracks (chipping) and vertical cracks, and studies focusing on improved cutter wheels have been more important than increasing the depth of vertical cracks while reducing horizontal cracking. The horizontal crack does not contribute to the cutting of the brittle substrate and deteriorates the cutting quality. Korean Patent Publication Nos. 2000-0071315 and 2003-0016337 disclose that a plurality of cutting grooves are formed at predetermined intervals along the ridge of the cutter wheel for increasing the depth of the vertical crack while reducing the horizontal crack. technology. Further, conventionally, a cutter wheel having a cutting groove has been modified for use in the end use, and an example of this modification is disclosed in Korean Patent No. 555329. The cutter wheel is proposed for cutting a bonded glass substrate such as a liquid crystal display (LCD) at a desired position, and the cutter wheel is characterized in that no cutting groove is formed on a predetermined region of the ridge. However, this cutter wheel suffers from deterioration in workability in a region where the cutting groove is not formed. In another cutter wheel, the cutting grooves are formed to have different depths, but do not provide a substantial contribution to the increase in the depth of the vertical cracks on the brittle substrate, and cause excessive stress at the protrusions around the ash cutting grooves. Thus, such modified cutter wheels still have problems such as uneven processability on the ridges or excessive stress at a certain portion of the ridges, resulting in damage to the cutter wheel. Moreover, the modified cutter wheel does not substantially increase the depth of the vertical crack as compared to an existing cutter wheel having a cutting groove, nor substantially reduces the occurrence of the chisel. SUMMARY OF THE INVENTION The present invention is directed to solving the problems of the prior art, and an aspect of the present invention is to improve the processability of the cutter wheel by setting different groove pitches in predetermined regions of the ridges of the cutter wheel. Increase the depth of vertical cracks, etc. 201141799 According to the invention - a species suitable for cutting a brittle material comprises: a circular or arcuate ridge; a surface of the first and second beveled surfaces, a mosquito at the ridge of the sun; and a Formed along the ridge, the ridge portion of the towel includes a plurality of healthy segments, and the dragon segments are sequentially disposed in the region of the ridge portion, and each has a different spacing formed from the concave portions in the other segments. Groove. It will thus be appreciated that the grooves are all along the ridge, such as a conventional wheel in which the cutting groove is not intentionally formed on the ridge: the plurality of segments may be two or two in the circumferential direction of the ridge Repeat on the loop. In an embodiment, each of the segments is formed with a single recess. In this case, each of the secret lengths has a spacing defined by the distance between the groove in the middle and the groove adjacent to the other. In another embodiment, each of the segments is formed with two or more grooves. In this case, each of the segments has a spacing that is the distance between adjacent grooves in the segment. According to another aspect of the invention, a cutter wheel includes: a circular or arcuate cutting edge, and a plurality of grooves formed on the cutting edge, wherein the cutting edge includes a multi-drive section, the zone The segments are sequentially disposed in the region of the cutting edge and repeat in two or more cycles in the direction of the cutting edge. Each segment has a groove formed in the other segment. The groove at the distance. The cutting edge may be a portion of the ridge or the ridge formed between the (four) of the bevel of the weft at the time of the ridge. Here, each of the sections can be formed with a single 201141799: and _ is set to two wheels: providing a knife method for making a brittle material comprising: at the knives or bow ridges of the cutter wheel The upper boundary and the ridge are formed on the ridge, wherein the two have different pitches of the grooves from each other. Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following examples are given by way of illustration to provide a thorough description of the invention to those skilled in the art. It is to be understood that the matter of the invention may be made in the form of a system, process, or machine, without departing from the scope of the invention. It should also be noted that the drawings are not to scale, and that certain dimensions (such as width, length, thickness, etc.) are exaggerated in the drawings. <First Embodiment> Fig. 1 is a side view of a cutter wheel according to a first embodiment, and Fig. 2 is a front view of the cutter wheel shown in Fig. 1. Referring to FIGS. 1 and 2, the cutter wheel 1 according to the first embodiment is made of, for example, cemented carbide or polycrystalline diamond 'PCD, and has a substantially circular disk shape. And includes a circular ridge 1 沿 along its outer circumference. The ridges 1 具备 have first and second beveled surfaces 20, 30 on the opposite sides thereof in the thickness direction, which are inclined from the top of the ridge 10 201141799. The first and second beveled surfaces 20, 30 intersect each other at the ridges. Here, the intersection angle of the first and second beveled surfaces 20, 3, 10 (0〇 can be set in the range of 60 to 130 degrees. When the blade 1 is used to treat the brittle substrate, the ridge 10 acts as The cutting edge first contacts the brittle substrate and enters the brittle substrate deeper than any other of the cutter wheel 1. The cutter wheel 1 is provided with a shaft hole 4〇, and the shaft is coupled to: 40. The coupling to the shaft hole 40 The shaft is coupled to the holder of the cutting device to rotate the hole cutter wheel 1. The ridge 10 forms a plurality of grooves 'i.e., 'cutting grooves 12 in the circumferential direction along the ridge 1 。. These grooves 12 have Assisting in the increase of the depth of the vertical crack in the brittle substrate. The ridge 10 includes a plurality of sections A, B, and C, and also the first section A, the second section 3, and a third section c, which in turn has grooves 12 (each having a different groove 2 from the neighboring sand, 2 in each of the sections - a, b or c - in this embodiment - The groove 12' has a spacing defined by the distance between the segment and the two grooves 12 in its adjacent segment. Further 4: _ 12 in the segment f is adjacent in the clockwise direction At the first ^ a groove in the first section B; the second name P2 is defined as a second section and the third section 12 of the first section is adjacent to the second section The hour hand is apart. Further, the distance between the groove η between the grooves 12 of the third section C and the groove 12 in the clockwise direction - the upper section ". The first to second pitches Pi, P2, P3 of the second to first second section te 201141799 C are different from each other, but all the grooves formed in the section may have the same size, depth, and shape. The first, second and third sections A, B, C in the zone are continuously repeated along the ridge 10. In this embodiment, three sections (i.e., first, first and second zones) The segments A, B, C, each having a groove formed at a different pitch from the grooves of the other adjacent segments, are repeatedly arranged along the ridge 1〇. However, it should be noted that the region formed in the region of the ridge The number of segments is not limited to two segments' and two or more segments (ie, the first segment, the Nth segment A, . . . , N) may be repeatedly arranged along the ridge 1〇. In this article Defining the terms of each section, that is, "first section", "two sections", "third section" or "Nth section" is based on the spacing and each is at a different position Two sections having a pitch between different grooves will be indicated by the same term "Nth section". <Second Embodiment> Fig. 3 is a front view configuration of a cutter wheel according to a second embodiment = In the zone of the ridge U), the first and second sections are on-". In addition, the groove U is formed. In the section - A, one of the three, the groove 12 The first pitch ?1 has the same pitch value at 2. In the second segment B, the groove 12 segment A is the distance between the grooves U in the phase segment A, but with a = spacing different from the first -, the first The two pitches P2 have a value in the second section B: that is, the arrangement of the grooves a section A and B is all connected first along the ridge 1Q. 201141799 As shown in Fig. 3, the two sections having different groove pitches, that is, the first section A and the second section B, are repeated along the ridge 1 in this embodiment. It should be noted, however, that the number of segments formed in the region of the ridge is not limited to two segments, and three or more segments having different groove pitches may be repeatedly arranged along the ridge. Further, in this embodiment, each of the sections A and B has three recesses 12, but the present invention is not limited thereto. The present invention will be described hereinafter with reference to analytical tests in which the inventive examples corresponding to the first and second embodiments are compared with comparative examples. # <Test: Stress/Displacement Analysis of the Cutter Wheel> 1. Analytical Model For the analysis of the karyotype 'Use the finite element method (FEM) to set the simulation model, which is rotated by the weight applied to it A cutter wheel (ie, a scriber) cuts a glass plate prepared for a workpiece (OA_1〇 glass here, for inventive examples (ie, 'first and second examples)) and comparative Each of the examples analyzes the depth of the vertical crack and the extent of horizontal cracking in order to obtain a glass sheet at each time step by pushing the cutting edge (ie, the ridge) of the cutter wheel into contact with the glass sheet. Displacement magnitude. As a comparative example, a continuous cutter wheel that is not on the ridge (ie, on the cutting edge) is used (Comparative Example n and a uniform cutter wheel having a concave pitch on the ridge) (Comparative example 2) 曰 Figure 4 shows the configuration of the simulation model. See Figure 4, because the model is extremely small, the ridge of the cutter wheel is analyzed at a magnification of multiple times. Only the outer circumference of the cutter wheel is analyzed. Part (ie, the ridge) 201141799 degrees)) The materials used to simulate the model are five glass plates (OA-10) as workpieces, 1% PCD (polycrystalline diamond) sheets, and single-contacts (AISI 4130). 2 · Analysis conditions (1) For each workpiece, only Ty (the direction of the pusher wheel) is unrestricted at 6 degrees of freedom to apply compression conditions during the rotation of the PCD. (2) For the center of the joint, Τχ, Ty, Tz, Rx and (3) The initial speed of the cutter wheel is set to 3, 1 〇 8 rpm. (4) The % rotation condition is set with reference to the center point of the joint: the evaluation corresponds to a rotation of 10 degrees out of a total of 360 degrees. Mountain contact conditions: As shown in Fig. 5, 'the end of the ridge at the upper end of the cutter wheel and the lateral side are in contact with the workpiece. Since the contact between the ridge and the workpiece earns a sacrificial offering, the static friction coefficient and the dynamic friction coefficient are set to 5% ' _ to compare the two sides. The maximum bribery of the spine is 1 mm at the touch. (6) Compression conditions: Compression conditions for actual cutting are applied to all time dreams. Apply 0.15 MPa to the contact between the front end of the ridge and the workpiece. 3. Analysis Results (1) Comparative Example 1 (Continuous cutter wheel) Fig. 6a, Fig. 6b, and Fig. 6c are continued to show the above conditions applied to the ridge without the groove, the _ cutter wheel_analysis result. Figure 6a is a diagram of the stress applied to the workpiece, the graph is a curve circle depicting the change in the sum of the stresses of the dams (Misis) during the time step 刀~1〇〇 of the cutter wheel, 201141799 and 6c shows the displacement magnitude of the workpiece at time steps 丨, 5〇, and 1〇〇. In this analysis, the two beveled surfaces have an intersection angle of 115 degrees at the ridge of the cutter wheel and the cutter wheel has a diameter of 21 mm. Referring to Fig. 6a', it is determined that the stress distribution is wider in the horizontal direction and narrower in the vertical direction. It can thus be seen that horizontal cracking (i.e., degree of chiseling) is more severe and vertical cracks have a lower depth. Referring to Fig. 6b, it can be seen that the sum of the stresses of the flooding is distributed in the level of 16_MPa or is smaller at the time step 〇~100. Referring to Fig. 6c, it can be seen that the sum of the displacement magnitudes at time step 1 is about 3.63 mm 'the displacement magnitude at time step 50 and the sum of the displacement values at time step 〇0 is about (2) Comparative Example 2 (Uniform Type Cutter Wheel) Figures 7a, 7b and 7c show that when the above condition 庑 = split result, the uniform type cutter wheel is in the width of uniform __, 2 Depth and G.9 with the spacing of the same slot. The cutter wheel has a ridge angle of 115 degrees and a straight tang of 210 mm. , the surface of the stress distribution of the surface of the guard, Figure 7 = time step of the cutter wheel (the Hong Kong slope during the M00 curve, and the displacement value of the change of the sum of the post stresses in Figure 7e*. 胄7 ". 曰 is not in the time step 〇 5 〇 and just in the workpiece position between the steps ί ' see Figure 7e ' visible displacement at time step 1 11 201141799 ^ and ^ 4 · 19 _ displacement at time step 5Q The sum of the magnitudes is about 38.33, and the sum of the displacement values at time step 1〇0 is about (3) Example 1 (ABC repeat type). The ceremony: knife Zb and Figure 8C show when the above conditions are applied. Analysis results when the weight of the hard i-cutter wheel is used, in which sections A, B and one
Ϊ在脊部上形成有具有3.679 mm之寬度、2 28()贿G =二一凹槽;且區段A、B、C中之凹槽的間距分別設 角及21〇職之直Γ 具有115度之脊部 圖8a為施加於工件之應力分佈的 2之時間步驟0,〇期間之洪密斜斯應力之二: 示在時間步驟W0及刚處上= 矛夕置值。 在水確定應力分佈與比較性實例1及2相比 明實劍1I 多’且在垂直方向上深得多。此結果表 垂Γ丄 =與比較性實例1及2相比提供較高深度之 ，直裂紋及IX健度之㈣^參㈣8b可見， 之和在大多數時間步驟處分佈於超過17Q() Mb之位準 ，且最大應力之和約為24〇〇 Mpa。參見圖&可見，在 步驟^之位移量值之和約為5·96職，在時間步驟 处之位移量值之和約為28 83麵’且在時間步驟刚 2位移量值之和約為62.45麵。此等值比比較性實例i 2之彼等值大得多，且指示實例i提供與比較性實例i 12 201141799 及2相比大得多深度的垂直裂紋。 (4)實例2 (AAABBB重複型） 圖9a、圖9b及圖9c繪示當將上述條件應用於重複型 刀輪時的分析結果，其中AAA及BBB區段在脊部上重 複。此處，AAA區段形成有各自具有3.679 mm之寬度、 2.280 mm之深度及0.9 mm之均一間距的三個凹槽^且 BBB區段形成有各自具有1.6 mm之均一間距及與AAA扇 區中之凹槽之寬度及深度相同之寬度及深度的三個凹槽: • 刀輪具有115度之脊部角及210 mm之直徑。 圖9a為施加於工件之應力分佈的圖，圖外為描緣在 刀輪之時間步驟0〜1 〇〇期間之洪密斜斯應力之和的變化的 曲線圖，且圖9c繪示在時間步驟卜5〇及1〇〇處工件之位 移量值。 參見圖9a’可確定應力分佈與比較性實例1及2相比 在水平方向上窄得多且在垂直方向上深得多。此結果表明 實例2之刀輪與比較性實例1及2相比亦提供較高深度之 鲁 垂直裂紋及較低私度之馨開。參見圖9b可見，洪密斜斯應 力之和在許多時間步驟處分佈於超過2〇〇〇 MPa之位準 中，且最大應力之和超過約4〇〇〇 MPa。參見圖9c可見， 在時間步驟1處之位移量值之和約為4.19 mm，在時間步 驟50處之位移量值之和約為ΐ6·5〇 mm，且在時間步驟1〇〇 處之位移量值之和約為75.06 mm。此等值比比較性實例j 及2之彼等值大得多，且指示實例2提供與比較性實例i 及2相比大得多深度的垂直裂紋。 13 201141799 (5)實例與比較性實例之比較 表1繪示實例1及2以及比較性實例1及2之工件的 位移量值。如上所述’在實例1及2以及比較性實例丨中， 刀輪之脊部上之凹槽具有不同間距及配置，但具有相同寬 度及深度，即3.679 mm及2.280 mm。此外，在所有實例 及比較性實例中，刀輪具有115度之脊部角及210 mm之 直徑。 表1 比較性實例1 比較性實例2 時間步驟1 (位移量值之和； mm) 3.63 4.19 時間步驟50 (位移量值之和； 10,65 時間步驟100 (位移量值之和； mm、 12.23Ϊ has a width of 3.679 mm on the ridge, 2 28 () bribe G = 21 groove; and the spacing of the grooves in the sections A, B, C are respectively angled and 21 〇 straight Γ The ridge of 115 degrees is shown in Fig. 8a as the time step 0 of the stress distribution applied to the workpiece, and the second of the immersed stress during the enthalpy: shown in the time step W0 and immediately above = spear. The water-determined stress distribution is much more than the comparative examples 1 and 2 and is much deeper in the vertical direction. This result table coveted = higher depth compared to comparative examples 1 and 2, straight crack and IX robustness (four) ^ reference (four) 8b visible, and the sum is distributed over 17Q() Mb at most time steps The level of the maximum stress is about 24 〇〇Mpa. Referring to the figure & it can be seen that the sum of the displacement magnitudes in step ^ is about 5.96, the sum of the displacement magnitudes at the time step is about 28 83 faces' and the sum of the magnitudes of the displacements in the time step is about 2 It is 62.45 faces. This value is much larger than the value of Comparative Example i 2 and indicates that Example i provides a vertical crack that is much deeper than Comparative Examples i 12 201141799 and 2. (4) Example 2 (AAABBB repeat type) Figs. 9a, 9b, and 9c show the results of analysis when the above conditions are applied to the repetitive type cutter wheel, in which the AAA and BBB sections are repeated on the ridge. Here, the AAA section is formed with three grooves each having a width of 3.679 mm, a depth of 2.280 mm, and a uniform pitch of 0.9 mm, and the BBB sections are formed with a uniform pitch of 1.6 mm and with an AAA sector. Three grooves of width and depth of the same width and depth: • The cutter wheel has a ridge angle of 115 degrees and a diameter of 210 mm. Figure 9a is a graph of the stress distribution applied to the workpiece, the outside of which is a graph depicting the change in the sum of the Hongsinian stresses during the time step 0~1 刀 of the cutter wheel, and Figure 9c shows the time step The displacement value of the workpiece at 5 〇 and 1 。. Referring to Fig. 9a', it was confirmed that the stress distribution was much narrower in the horizontal direction and much deeper in the vertical direction than Comparative Examples 1 and 2. This result indicates that the cutter wheel of Example 2 also provides a higher depth of the vertical crack and a lower degree of private opening than the comparative examples 1 and 2. Referring to Fig. 9b, it can be seen that the sum of the stresses of the Hongmosis is distributed in a position exceeding 2 MPa in many time steps, and the sum of the maximum stresses exceeds about 4 MPa. Referring to Figure 9c, the sum of the displacement magnitudes at time step 1 is about 4.19 mm, the sum of the displacement magnitudes at time step 50 is about ΐ6·5〇mm, and the displacement at time step 1〇〇 The sum of the magnitudes is approximately 75.06 mm. This value is much larger than the values of Comparative Examples j and 2, and indicates that Example 2 provides a vertical crack of much greater depth than Comparative Examples i and 2. 13 201141799 (5) Comparison of Examples and Comparative Examples Table 1 shows the displacement magnitudes of the workpieces of Examples 1 and 2 and Comparative Examples 1 and 2. As described above, in Examples 1 and 2 and Comparative Example, the grooves on the ridges of the cutter wheel have different pitches and configurations, but have the same width and depth, namely 3.679 mm and 2.280 mm. Moreover, in all of the examples and comparative examples, the cutter wheel has a ridge angle of 115 degrees and a diameter of 210 mm. Table 1 Comparative Example 1 Comparative Example 2 Time Step 1 (sum of displacement magnitude; mm) 3.63 4.19 Time Step 50 (sum of displacement magnitude; 10, 65 time step 100 (sum of displacement magnitude; mm, 12.23
為輯實例i及2以及比較性實例i及2之模 擬…果的曲線圖。時間步驟在橫座標上指 + :而變:工件(0㈣玻璃)之累計位移量值在= ‘二^圖10,發明性實例與比較性實例之間在時間步 2趨於i ί不存在累計位移量值之顯著差異，但實例1及 實例2在5〇之後展現累計位移量值之快速增加。 及2相一多深度:二2r藉輪 14 201141799 件之優良切割效成。在實例j及2之刀輪中，多個區段重 複地配置於脊部上，且每一區段形成有具有距鄰近凹槽不 同間距的凹槽。在比較性實例1之刀輪中，脊部上不存在 凹槽’且在比較性實例2之刀輪中，凹槽在脊部上以怪定 間距配置。此處’實例j及2以及比較性實例^及2具有 相同條件’諸如凹槽之寬度、深度及形狀，但凹槽間距除 外0 由此，在根據貫施例之刀輪中，脊部具備多個區段， 其各自具有形成於距其他鄰近區段之凹槽不同間距處的凹 槽（切割凹槽），使得當切割（或劃線）脆性基板時，刀輪 可朝脆性基板之底部增加垂直裂紋之深度，同時抑制脆性 基板中之水平開裂。此外，各自具有距其他鄰近區段中之 凹，不同凹槽間距的多個區段在脊部上以兩個或兩個以上 循環重複，藉此確保脊部上之均一劃線。 熟習此項技術者將明瞭，在不脫離本發明之精神或範 疇之情況下，可在本發明中做出各種修改及變化。因此， • 希望本發明涵蓋對本發明之修改及變化，只要其在附加之 申請專利範圍及其均等物之範_内。 【圖式簡單說明】 自以下結合附圖之詳細描述將明瞭本發明之上述及 其他態樣、特徵及優點，其中： 圖1為根據本發明第一實施例之刀輪的側視圖。 圖2為圖1所示之刀輪的正視圖。 圖3為根據本發明第一實施例之刀輪的正視圖。 15 201141799 圖4至圖10為實例及比較性實例之刀輪之應力/位移 的分析圖。 【主要元件符號說明】 1 :刀輪 10:圓形脊部/脊部 12 :切割凹槽/凹槽 20 :第一帶斜面的表面 30 :第二帶斜面的表面 40 :軸孔 ❿ A:第一區段 B:第二區段 C:第三區段 P1 :第一間距 P2 :第二間距 P3 :第三間距 16A graph of the simulation results of the examples i and 2 and the comparative examples i and 2. The time step on the abscissa refers to + : and the change: the cumulative displacement value of the workpiece (0 (four) glass) is = '二^图10, between the inventive example and the comparative example, the time step 2 tends to i ί there is no accumulation Significant differences in displacement magnitudes, but Examples 1 and 2 showed a rapid increase in cumulative displacement after 5 。. And 2 phase and more depth: 2 2r borrowing wheel 14 201141799 pieces of excellent cutting effect. In the cutter wheels of Examples j and 2, a plurality of sections are repeatedly disposed on the ridges, and each section is formed with a groove having a different pitch from the adjacent grooves. In the cutter wheel of Comparative Example 1, there was no groove ' on the ridge portion and in the cutter wheel of Comparative Example 2, the grooves were arranged at a strange pitch on the ridge. Here, 'Examples j and 2 and Comparative Examples ^ and 2 have the same conditions 'such as the width, depth and shape of the groove, except for the groove pitch 0. Thus, in the cutter wheel according to the embodiment, the ridge is provided a plurality of segments each having a groove (cutting groove) formed at a different pitch from the grooves of the other adjacent segments, such that when cutting (or scribing) the brittle substrate, the cutter wheel may face the bottom of the brittle substrate Increase the depth of the vertical crack while suppressing horizontal cracking in the brittle substrate. In addition, each having a recess from the other adjacent sections, the plurality of sections of different groove spacing are repeated on the ridge in two or more cycles, thereby ensuring a uniform scribe on the ridge. It will be apparent to those skilled in the art that various modifications and changes can be made in the present invention without departing from the spirit and scope of the invention. Therefore, it is intended that the present invention cover the modifications and variations of the invention, as the scope of the appended claims and their equivalents. BRIEF DESCRIPTION OF THE DRAWINGS The above and other aspects, features and advantages of the present invention will become apparent from the following detailed description of the appended claims. Figure 2 is a front elevational view of the cutter wheel of Figure 1. Figure 3 is a front elevational view of a cutter wheel in accordance with a first embodiment of the present invention. 15 201141799 Figures 4 to 10 are analysis diagrams of the stress/displacement of the cutter wheel of the examples and comparative examples. [Main component symbol description] 1 : cutter wheel 10: circular ridge/ridge 12: cutting groove/groove 20: first beveled surface 30: second beveled surface 40: shaft hole ❿ A: First section B: second section C: third section P1: first pitch P2: second pitch P3: third pitch 16