CN113045194B

CN113045194B - Scribing wheel

Info

Publication number: CN113045194B
Application number: CN202011333302.2A
Authority: CN
Inventors: 阿部浩; 田中茉纪
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2019-12-27
Filing date: 2020-11-24
Publication date: 2024-02-27
Anticipated expiration: 2040-11-24
Also published as: TW202126593A; CN113045194A; KR20210084234A; JP7398099B2; JP2021107138A

Abstract

The purpose of the present invention is to provide a scoring wheel capable of improving the strength of an end face while forming a vertical crack of a sufficient depth in a substrate. The scoring wheel (100) is provided with: a plurality of blade parts (101) formed along the outer periphery; a plurality of groove parts (102) are provided between the blade parts (101) adjacent in the circumferential direction and are recessed toward the central axis (L0) side. The angle formed by the edge line of the end of the groove is larger than the angle formed by the edge line of the deepest part of the groove when the groove (102) is observed along the direction parallel to the central axis (L0), and the angle formed by the edge line of the end is larger than 155 degrees.

Description

Scribing wheel

Technical Field

The present invention relates to a scribing wheel for forming a scribing line on a brittle material substrate such as a glass substrate.

Background

The division of a brittle material substrate such as a glass substrate is performed by a scribing step of forming a scribing line on the surface of the substrate and a breaking step of dividing the substrate along the scribing line formed. In the scribing step, the scribing wheel is moved along a predetermined line while being pressed against the surface of the substrate. Thereby, the scribing wheel rolls on the surface of the substrate to form a scribing line.

Patent document 1 below describes a scoring wheel in which a plurality of grooves are formed in an outer peripheral ridge line at a predetermined pitch. By using the scribing wheel of this structure, it is possible to reliably form vertical cracks in the substrate immediately after the start of scribing the substrate, and to form deeper vertical cracks.

Prior art literature

Patent literature

Patent document 1: japanese patent laid-open No. 09-188534

Disclosure of Invention

Problems to be solved by the invention

In the case of using the scribing wheel having the above-described structure, scribing lines are formed by intermittently forming scratches on the surface of the substrate at a predetermined pitch and connecting vertical cracks formed directly under the scratches. Moreover, scoring quality is known to vary due to the shape of the groove. In order to form a deep vertical crack, it is necessary to make the groove deep, but there is a case where the end face strength of the divided substrate is lowered.

In view of the above problems, an object of the present invention is to provide a scoring wheel capable of improving the strength of an end face while forming a vertical crack of a sufficient depth in a substrate.

Means for solving the problems

The main aspects of the present invention relate to a scoring wheel for forming a score line in a substrate. The scoring wheel of this embodiment is provided with: a plurality of blades formed along the outer periphery; and a plurality of groove portions provided between the blade portions adjacent in the circumferential direction and recessed toward the center axis side. Here, the groove portion may have an angle formed by a ridge line of an end portion of the groove portion larger than an angle formed by a ridge line of a deepest portion of the groove portion, and the angle formed by the ridge line of the end portion is larger than 155 degrees when viewed in a direction parallel to the central axis.

According to the scribing wheel of the present embodiment, when the scribing wheel rolls on the substrate surface, the portion near the blade portion bites into the substrate and scratches are formed on the substrate surface. In this case, since the groove portion has the above-described shape, the interval between scratches formed under a low load becomes narrow, and vertical cracks formed at the positions of the scratches are easily connected. Further, the angle change of the edge portion, which is the edge portion of the groove, and the boundary of the groove portion is gentle, and damage to the substrate is less likely to occur. Therefore, the end face strength of the divided substrate can be improved.

In the scoring wheel of the present aspect, the groove may be formed such that, when viewed in a direction parallel to the central axis, both side portions of the circumferential direction with respect to the deepest portion are curved. Thus, the groove smoothly bites into the substrate with the rolling of the scribing wheel. Thus, vertical cracks can be smoothly formed in the substrate.

Effects of the invention

As described above, according to the present invention, it is possible to provide a scribing wheel capable of improving the end face strength of a divided substrate with a simple structure.

The effects and meaning of the present invention will be further clarified by the following description of the embodiments. However, the embodiment shown below is merely an example of the implementation of the present invention, and the present invention is not limited to the description of the embodiment below.

Drawings

Fig. 1 (a) and (b) are a side view and a front view, respectively, schematically showing a scoring wheel of an embodiment. Fig. 1 (c) is an enlarged view of a part of the scoring wheel according to the embodiment in the vicinity of the outer periphery.

Fig. 2 is a diagram for explaining the shape of the groove portion of the scribing wheel according to the embodiment when the groove portion is viewed in a direction parallel to the central axis.

Fig. 3 is a graph showing the load in the scribing test using the scribing wheels of examples 1 to 6.

Fig. 4 is a graph showing the end face strength of the divided substrates in the scribing test using the scribing wheels of examples 1 to 6.

Description of the reference numerals

100 … scoring wheel

101 … blade

102 … groove part

102a … deepest portion.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the drawings, for convenience, an X axis, a Y axis, and a Z axis are orthogonal to each other. The Z axis is parallel to the central axis of the scoring wheel.

Fig. 1 (a) and (b) are a side view and a front view schematically showing the structure of the scribing wheel 100, respectively. Fig. 1 (c) is an enlarged view showing a part of the scoring wheel 100 near the outer periphery.

The scribing wheel 100 has a circular plate shape in which edges on both sides of the outer peripheral portion are obliquely cut off. Two inclined surfaces 100a inclined in directions different from each other when viewed from the side are formed on the outer peripheral portion of the scribing wheel 100. A plurality of blade portions 101 including ridge lines are formed by intersecting the two inclined surfaces 100a, and a groove portion 102 recessed toward the central axis L0 is formed between the blade portions 101 adjacent in the circumferential direction. The lengths of the respective blade portions 101 in the circumferential direction are equal to each other. The lengths of the groove portions 102 in the circumferential direction are also equal to each other. Thus, the pitch of the blade 101 in the circumferential direction is constant, and the pitch of the groove 102 in the circumferential direction is also constant.

The scoring wheel 100 is formed of cemented carbide, sintered diamond, single crystal diamond, or polycrystalline diamond, or the like. A circular hole 100b into which a shaft body serving as a rotation shaft is inserted is formed in the center of the scribing wheel 100. The scoring wheel 100 has a diameter of about 1mm to about 5mm and a thickness of about 0.4mm to about 1 mm. The angle of the blade 101, that is, the angle formed by the two inclined surfaces 100a is about 100 to 160 °, and the diameter of the hole 100b is about 0.4 to 1.5 mm.

The pitch p1 of the groove 102 (the sum of the length (L1) of one groove 102 in the circumferential direction and the length (L2) of one blade 101 in the circumferential direction) is, for example, about 10 to 100 μm. The groove depth d1 (the difference between the ridge line of the blade 101 and the distance of the deepest portion of the groove 102 in the radial direction of the scribing wheel 100) is, for example, about 1 to 10 μm. The length of the region of the scribing wheel 100 recessed from the ridge line of the peripheral edge portion 101, that is, the length (L1) in the circumferential direction of the groove portion 102 is, for example, about 3 to 40 μm. In addition, the groove 102 has a ridge line formed therein, which is identical to the edge 101.

Fig. 2 is a diagram for explaining the shape of the groove 102 of the scribing wheel 100 when viewed in a direction parallel to the central axis L0.

As shown in fig. 2, a groove 102 having a width W in the circumferential direction is formed between adjacent blade portions 101. The groove 102 has a shape in which both side portions with respect to the deepest portion 102a in the circumferential direction protrude in a direction away from the center axis L0 when viewed in a direction parallel to the center axis L0 (Z-axis direction). That is, the edge groove angle, which is the angle at which the edge 101 intersects with the ridge line at the boundary positions P3 and P4 of the groove 102, is different from the bottom groove angle, which is the angle at which the ridge line of the groove 102 of the deepest portion 102a makes, and is larger than the bottom groove angle. Here, angles formed by the ridge line of the groove 102 and the ridge line of the blade 101 change at positions P1 and P2 on both sides of the deepest portion 102a in the circumferential direction. In fig. 2, for convenience of explanation, the blade 101 and the groove 102 are formed in a straight line, but are actually formed in a shape including a curved line.

Tangents Ln1, ln2 to the ends of the groove 102 are set at boundary positions P3, P4 between the groove 102 and the blade 101, and the angle formed by the tangents Ln1, ln2 is set as an end groove angle θ1. Further, tangential lines Ln3 and Ln4 are set at both side portions of the deepest portion 102a, and an angle formed by the tangential lines Ln3 and Ln4 is set as a bottom groove angle θ2. In the present embodiment, θ1 is larger than θ2. Further, θ1 is 155 degrees or more, preferably 160 degrees or more, and more preferably 165 degrees or more. Thus, the deepest portion 102a is located closer to the center axis of the scribing wheel than the intersection of the tangential lines Ln1, ln 2.

As described above, in the scribing wheel 100, when the end groove angle θ1, which is the angle formed by the tangent line of the groove at the boundary position between the blade 101 and the groove 102, is 155 degrees or more, the volume of the portion biting into the substrate becomes large and the interval of the portion biting into the substrate becomes narrow, particularly when the scribing load is small. Thereby, vertical cracks are made more easily to occur under low load. Further, since the angle between the edge 101 and the groove 102 at the boundary positions P3 and P4 between the edge 101 and the groove 102 is further blunted, the impact applied to the substrate can be further reduced, and the impact can interact with the case where the scribing load is small, so that the end face strength of the divided substrate can be improved.

Further, since the bottom groove angle θ2 of the bottom of the groove is smaller than the end groove angle θ1, the groove depth d1 and the groove width can be independently changed according to the type and thickness of the substrate.

< Experimental example >

The inventors performed scoring evaluation using the scoring wheel 100 of each of examples 1 to 6 obtained by changing the groove end angle θ1 in 6 steps. As the brittle material substrate, a glass substrate having a thickness of 0.4mm was used. The scribing speed was set at 100 mm/sec. The configuration other than the shape of the groove 102 when viewed along the direction of the central axis L0 was the same as that of the scoring wheels of examples 1 to 6, and was set to have an outer diameter of 2.0mm, a thickness of 0.65mm, and a cutting edge angle of 115 degrees.

FIG. 3 is a table of scoring wheels relating to examples 1-6. As shown in fig. 3, the groove angle θ1 at the end of the scribing wheel 100 was 165.2 degrees in experimental example 1, 162.7 degrees in experimental example 2, 157.8 degrees in experimental example 3, 154.0 degrees in experimental example 4, 153.4 degrees in experimental example 5, and 150.0 degrees in experimental example 6. By using these scribing wheels, the load was changed every time the scribing line was formed, and rib-like lines were formed on the substrate, and the range of the load with good scribing quality was confirmed.

As shown in fig. 3, in experimental examples 1 to 6, the lowest load for forming the rib was 5.0 to 6.5N, and the lowest load tended to be smaller as the groove end angle θ1 was larger. The highest load of the scribe line, which can obtain good quality, is 14.5 to 15.0N, and the variation due to the groove end angle θ1 is small compared with the lowest load.

Next, using each scoring wheel, score lines were formed at a load 0.5N higher than the lowest load shown in fig. 3, and the end face strength was measured for 20 divided test pieces using a 4-point bending test.

Fig. 4 is a graph showing the end face strength of the divided substrates in the scribing test using the scribing wheels of examples 1 to 6. In fig. 4, the average value of the end face intensities is shown by a numerical value, and the maximum value and the minimum value are shown by a horizontal bar. The bar graph below represents the standard deviation. As shown in fig. 4, the average value of the end face strength was 121.0N in the scoring wheel of experimental example 1 and 110.0N in the scoring wheel of experimental example 2. In addition, the minimum value of the end face strength in the scoring wheels of examples 1 and 2 was also over 100N, and a tendency was found that the standard deviation was also relatively low. On the other hand, the average value of the end face strength in the scoring wheel of experimental example 3 was 89.5N, which was a sufficiently high value. In contrast, the end face intensities in the scoring wheels of examples 4, 5, and 6 were 73.3N, 53.0N, and 51.3N, respectively.

As described above, it was confirmed that by using the scribing wheel 100 having the end groove angle θ1 of 155 degrees or more, the end face strength of the substrate after being divided by the load near the lowest load at which the scribing line can be formed can be significantly improved as compared with the conventional one. Thus, by using the scribing wheel 100 according to the embodiment, it was confirmed that a good scribing line can be formed even with a lower load.

< modification example >

The embodiments of the present invention can be variously modified in addition to the above.

For example, in the above-described embodiment, as shown in fig. 2, both side portions of the deepest portion 102a have a shape including a straight line portion when viewed in a direction parallel to the central axis L0, but the shape of the portion is not limited thereto, and may be changed as appropriate as long as the portion protrudes in a direction away from the central axis L0. For example, the shape of both side portions of the deepest portion 102a may be a curved shape whose curvature changes toward the deepest portion 102 a.

The length of the ridge of the blade 101 in the circumferential direction can be appropriately adjusted according to the number of grooves 102 formed in the outer periphery of the scribing wheel 100. Similarly, the width W of the groove 102 in the circumferential direction can be appropriately adjusted according to the number of grooves 102 formed in the outer periphery of the scribing wheel 100.

In the above embodiment, the shape of the groove 102 when viewed in the circumferential direction is a shape having a ridge line in the groove 102 as shown in fig. 1 (b) and (c), but may be other shapes such as a curved shape protruding in a direction away from the central axis, a shape including a plane perpendicular to the radial direction, and the like.

The embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical idea indicated by the technical means.

Claims

1. A scribing wheel for forming a scribing line on a substrate,

the scoring wheel is characterized by comprising:

a plurality of blades formed along the outer periphery and including a ridge; and

a plurality of groove parts which are arranged between the adjacent blade parts in the circumferential direction and are recessed toward the central axis side,

a ridge line is formed inside the groove portion,

the angle formed by the edge line of the end part of the groove part is larger than the angle formed by the edge line of the deepest part of the groove part when being observed along the direction parallel to the central axis, the angle formed by the edge line of the end part is larger than 155 degrees,

the groove portion has a curved shape at both side portions of the circumferential direction with respect to the deepest portion when viewed in a direction parallel to the central axis.