TW201803818A - Scribing wheel having good pass-through characteristics for a brittle material substrate having high hardness - Google Patents

Abstract

The present invention provides a scribing wheel which has good pass-through characteristics for a brittle material substrate having high hardness, and the scribing wheel is able to generate vertical cracks immediately from a position at which scribing starts. An inclined surface formed of single crystal diamond or polycrystalline diamond and having a V-shape cross section is formed on the outer periphery of a scribing wheel, and the arithmetic average roughness Ra of the inclined surface is set at 0.01 micrometer or less. At a ridge line 13 intersected at 14a and 14b of the inclined surface, recesses 15a and 15b 0.5 are formed at a fixed pitch less than 8 micrometers. Accordingly, for the scribing wheel which uses diamond as a base material, the inscribing characteristics can be enhanced.

Description

Scratching wheel

The invention relates to a scoring wheel which is suitable for scoring a substrate with high hardness and brittle material.

Conventionally, in a manufacturing process of a liquid crystal display panel, a solar cell, or the like, a breaking step of a substrate of a brittle material is provided. In the breaking step, a scoring wheel made of a cemented carbide or polycrystalline sintered diamond (PCD) is applied with a load depending on the material or thickness of the brittle material substrate, and the scoring wheel is placed on the brittle material substrate. Roll on the surface to form a score line to form a vertical crack extending from the score line to the thickness direction of the brittle material substrate. Then, the brittle material substrate is divided by applying a predetermined force along the scribe line of the brittle material substrate to manufacture each panel or glass plate.

As a result of the improvement of substrate materials and various heat treatments by glass material manufacturers, the following phenomenon has occurred: the use of a scoring wheel (hereinafter, also referred to as (Ordinary wheel) When scribed, the state of "poor penetration" is displayed, that is, after the scribe wheel rolls, the tip of the blade slips on the surface of the substrate and cannot form a scribe line.

Patent Document 1 discloses a scribing wheel having a high penetration effect. The scoring wheel has a plurality of notches and protrusions alternately formed in a circumferential direction along a circumferential edge line of a V-shaped cross section. When this scribing wheel is used, a vertical crack can be formed that goes from the surface of the glass substrate to the vertical direction and has a relatively deeper plate thickness than the glass substrate.

The scoring wheel at the front end of the highly permeable blade is widely recognized as a type of "intrusive" blade front end which is better than the scoring wheel at the front end of the ordinary blade.

Patent Document 1: Japanese Patent No. 3074143

However, when scoring high-hardness brittle material substrates such as ceramics, which are harder than glass substrates, the scoring wheels made of cemented carbide or PCD are made of a combination of tungsten carbide or diamond particles and cobalt, so There may be cases where a long-distance crack cannot be formed due to a defect or abrasion of the blade tip. Therefore, when scribing a harder brittle material substrate, it is preferable to use a diamond scribing wheel, such as a single crystal, which is harder than a cemented carbide or sintered diamond and is a homogeneous material. In the scoring wheel of diamond material, the tip of the blade is mirror-shaped, and the surface roughness of the inclined surface is small. Therefore, it is considered that it is easier to slip on the substrate, making "intrusion" worse, and it is difficult to cause vertical cracks from the beginning of scribing.

The present invention has been made in view of the above-mentioned problem of the scribe wheel of diamond material, and the purpose thereof is to provide a case where the scribe wheel of the diamond material is used to scribe a brittle material substrate. Easy to produce scratching wheel.

In order to solve this problem, the scribing wheel of the present invention has a tip end of a V-shaped cross section formed by a ridge line made of diamond and a pair of inclined surfaces around a circular plate, and the arithmetic average roughness of the pair of inclined surfaces is set as Below 0.01 μm, grooves with a pitch of less than 8 μm are formed on the ridge portion of the inclined surface of at least one of the leading edges of the blades over the entire circumference.

Here, the groove of the scribing wheel may be formed parallel to the central axis of the circular plate of the scribing wheel.

Here too, the scribing wheel may be composed of a single crystal diamond.

The groove depth of the ridge portion of the scoring wheel may be set to 0.3 μm or less.

The distance between the grooves of the ridge portion of the scribing wheel may be set to 1 μm or less.

In addition, in order to solve this problem, the scoring wheel of the present invention has a tip of a V-shaped cross-section formed by a ridge line made of diamond and a pair of inclined surfaces around the circular plate, and the arithmetic average roughness of the pair of inclined surfaces. The thickness is set to 0.01 μm or less, and the width of the ridge line including at least one of the inclined surfaces of the leading edge of the blade is within 10 μm, and pattern processing with a pitch of less than 12 μm and a depth of less than 0.7 μm is performed throughout the circumference.

Here too, the pattern processing may be performed by setting convex portions with a radius of curvature of 8 to 12 μm under the ridge line side view.

According to the present invention having the above-mentioned characteristics, groove processing is performed on the entire circumference of the front end of the blade of the sloping surface of the scoring wheel, and the pitch between the front ends of the blades is formed at a small pitch of 8 μm or less. Therefore, it is possible to obtain a substrate having a high invasiveness and capable of scoring a substrate having high hardness with deep cracks immediately after the scoring starts.

10‧‧‧ Scribing Wheel

11‧‧‧ center axis

12‧‧‧through hole

13‧‧‧Edge

14a, 14b ‧‧‧ inclined surface

15a, 15b, 15‧‧‧ slots

16‧‧‧ convex

Fig. 1 is a side view and a front view of a scribing wheel according to a first embodiment of the present invention.

FIG. 2 is an enlarged side view and a front view of the front end portion of the blade of the scoring wheel of this embodiment.

FIG. 3 is a perspective view and a side view of a ridge portion of a front end of a scoring wheel blade according to this embodiment.

FIG. 4 is a side view of a ridgeline portion of a blade tip of a modification of the scoring wheel according to this embodiment.

FIG. 5 is an enlarged side view and a front view of a front end portion of a blade of a scoring wheel according to a second embodiment of the present invention.

FIG. 6 is an enlarged side view and a front view of a front end portion of a blade of a scoring wheel according to a third embodiment of the present invention.

Hereinafter, the scribing wheel according to the embodiment of the present invention will be described in detail using drawings. Although the brittle material substrate to be processed in this embodiment is a SiC substrate with high hardness, it is not limited to this. It can also be a glass substrate, a single crystal silicon substrate, or a ceramic substrate such as a liquid crystal display panel or a plasma display panel. And sapphire substrates. In addition, the "arithmetic average roughness Ra" used in this specification is one of the parameters representing the surface roughness of industrial products specified in JISB0601.

The shape of the scribing wheel according to the first embodiment of the present invention will be described. FIG. 1 (a) is a front view of the scoring wheel according to this embodiment when viewed from the center axis direction, and FIG. 1 (b) is a side view of the scoring wheel. Fig. 2 (a) is a side view showing the ridge line portion in an enlarged manner, and Fig. 2 (b) is a front view thereof.

The scoring wheel 10 of the first embodiment is a disc-shaped wheel formed of a single crystal diamond. As shown in FIG. 1 and FIG. The shown pin penetrates the through hole 12. The outer peripheral surface of the scoring wheel 10 is cut into a V-shaped cross section, a ridge line 13 is formed at the center, and inclined surfaces 14a and 14b are provided on the left and right as shown in the figure. The inclined surfaces 14a and 14b are formed to have a convergence angle (α). The arithmetic average roughness Ra of the inclined surfaces 14 a and 14 b processed into the inclined surfaces is, for example, 0.01 μm or less. As described above, by setting the arithmetic mean roughness of the inclined surface to be small, the load applied to the substrate during the scoring can be concentrated, and vertical cracks can be caused. Its depth is fixed. In addition, it can reduce the loss of the ridge line of the scribing wheel or damage to the substrate.

As shown in FIG. 1, the scoring wheel of this embodiment implements a fixed line pitch (pitch) P over the entire circumference of the inclined surfaces 14a, 14b including the ridgeline 13 at the center of the blade within a predetermined width w. Pattern processing. Here, the pattern processing is preferably formed at least in a portion that comes into contact with the substrate during the scoring. In this embodiment, the width w is set to, for example, 10 to 20 μm. In this pattern processing, as shown in the enlarged views of FIGS. 2 and 3, a plurality of grooves 15 a and 15 b are formed at a fixed pitch P so as to be parallel to the central axis 11 of the circular plate. The distance P between the grooves 15a and 15b of the pattern processing is 0.5 μm or more and less than 12 μm, preferably 8 μm or less, more preferably 1 μm or less, and the depth d of the grooves 15 a and 15 b of the scribing wheel 10 is set as 0.05 μm or more and less than 0.7 μm, and preferably 0.3 μm or less.

By forming the above-mentioned fine pattern processing on both sides of the ridgeline 13, a certain friction coefficient can be secured even on a substrate such as a high-hardness SiC substrate, and the invasiveness can be improved. In addition, by setting the depth of the groove to be small, the influence on the scribe quality can be sufficiently reduced.

In the first embodiment, the pattern processing of the ridges and the inclined surfaces formed with diamonds can be performed using a surface processing apparatus using a femtosecond laser. A femtosecond laser is a light source that compresses power in a very short time in femtosecond units. It can form periodic structural grooves or patterns for various materials. Here, as shown in FIG. 2 and FIG. 3, the inclined surfaces 14 a and 14 b including the ridge lines are grooved parallel to the central axis. Moreover, the groove processing of the desired distance P and depth d can be performed by appropriately selecting the light source or pulse width of the femtosecond laser.

In addition, the pattern processing may include an unprocessed portion with ridges remaining between the grooves as in this embodiment. In addition, as a deformation, for example, as shown in FIG. 4, a convex having a predetermined radius of curvature may be provided in a side view.部 16 和 槽 15。 Between the slot 15. The curvature radius R of the convex portion 16 is preferably about 8 to 12 μm.

In the first embodiment of the present invention, as shown in FIGS. 2 and 3, although grooves 15 a and 15 b having the same length as the ridge line 13 are symmetrical with respect to the ridge line 13 as shown in FIGS. The inclined surfaces 14a and 14b are different from each other.

Next, a scribing wheel according to a second embodiment of the present invention will be described. In this embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and detailed descriptions are omitted. As shown in FIG. 5, in the scribing wheel of the second embodiment, grooves 15a and 15b different from each other are formed on the entire circumference of the inclined surfaces 14a and 14b. The other configurations are the same as those of the first embodiment. The pitch P between grooves at this time is the same as in the first embodiment, and the depth d of the grooves 15a and 15b is also the same as in the first embodiment. Accordingly, the pattern angle with respect to the ridge line or the inclined surface can be reduced to obtain substantially the same effect.

Next, a scribing wheel according to a third embodiment of the present invention will be described. In this embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and detailed descriptions are omitted. As shown in FIG. 6, the scribing wheel of the third embodiment is on one of the inclined surfaces. Here, the groove 15 a is formed only on the entire circumference of the inclined surface 14 a. The other configurations are the same as those of the first embodiment. The pitch P between the grooves is the same as the first embodiment described above, and the depth d of the groove 15a is also the same as the first embodiment. Accordingly, the pattern angle with respect to the ridge line or the inclined surface can be reduced to obtain substantially the same effect. In this embodiment, the groove 15b may be formed only on the entire circumference of the other inclined surface 14b.

The scoring wheel of each embodiment of the present invention has good invasiveness, and does not slip even on a substrate with high hardness, and can generate vertical cracks immediately after the scoring starts. Therefore, it is possible to obtain an excellent effect that an undercut can be performed even on a substrate having a high hardness. In addition, since the skid does not occur, the scribe wheel edge line is worn evenly, which can further extend the life of the scribe wheel.

In each of the above embodiments, although the material of the scribing wheel is a single crystal diamond, a polycrystalline diamond may be used as a material. In this case, the scribe wheel having the same effect can be configured by performing the same groove processing on the ridge portion of the scribe wheel.

In addition, in the above-mentioned embodiments, although the entire scribing wheel is shown to be composed of single crystal diamond, for example, a single crystal or polycrystal is fixed to a wheel body made of cemented carbide or the like by adhesion or film formation. The scoring wheel formed by the front end of the blade made of diamond is also applicable to the present invention. If the scribing wheel is configured as described above, it is possible to reduce the use of high-priced diamonds and provide a cheap scribing wheel.

The invention can be applied to a scoring device for scoring a substrate of a brittle material with high hardness.

11‧‧‧ center axis

13‧‧‧Edge

14a, 14b ‧‧‧ inclined surface

15a, 15b‧‧‧slot

P‧‧‧Pitch

w‧‧‧ width

Claims (8)

A scoring wheel has a tip of a V-shaped cross-section formed by a ridge line made of diamond and a pair of inclined surfaces around a circular plate. The arithmetic average roughness of the pair of inclined surfaces is set to 0.01 μm or less. The ridgeline portion of the inclined surface of at least one of the front ends has grooves with a pitch of less than 8 μm over the entire circumference. For example, the scoring wheel of the scope of the patent application, wherein the groove of the scoring wheel is formed parallel to the central axis of the circular plate of the scoring wheel. For example, the scoring wheel in the scope of patent application No. 1 wherein the scoring wheel is composed of a single crystal diamond. For example, the scoring wheel according to any one of claims 1 to 3, wherein the depth of the grooves implemented on the ridge portion of the scoring wheel is 0.3 μm or less. For example, the scoring wheel according to any one of claims 1 to 3, wherein the pitch between the grooves of the ridge portion of the scoring wheel is 1 μm or less. For example, the scoring wheel in the fourth scope of the patent application, wherein the pitch between the grooves of the ridge portion of the scoring wheel is 1 μm or less. A scoring wheel has a tip of a V-shaped cross-section formed by a ridge line made of diamond and a pair of inclined surfaces around a circular plate. The arithmetic average roughness of the pair of inclined surfaces is set to 0.01 μm or less. The width of the sloping surface including at least one of the leading edges is within a range of 10 μm, and pattern processing with a pitch of less than 12 μm and a depth of less than 0.7 μm is performed throughout the entire circumference. For example, the scoring wheel of the seventh scope of the patent application, in which the pattern processing is performed, the convex portion with a curvature radius of 8-12 μm is set on the ridge line when viewed from the side.