TWI486316B - Brittle materials with scribing wheel, the use of its brittle material substrate scribing device and scribing tools - Google Patents

Description

Scribing wheel for brittle material, scribing device for using brittle material substrate and scribing tool

The present invention relates to a scribing wheel for a brittle material having a high quality (end surface strength) of a cut surface of a glass after scribing, good contactability, introgressibility, and low crossover point, and a brittle material using the same Substrate scribe device and scribing tool.

Conventionally, in a manufacturing step of a flat panel display panel such as a liquid crystal display panel or an organic electroluminescence (EL) plate or a solar cell, a scribing step of a brittle material substrate is provided. For example, the liquid crystal display panel has a configuration in which two glass substrates are bonded together and a liquid crystal is injected into the gap. Further, in the case of a reflective substrate in a substrate for a projector called LCOS (Liquid-Crystal-On-Silicon), a pair of substrates in which a quartz substrate and a semiconductor wafer are bonded together is used. . In the bonded substrate in which such a substrate is bonded, a scribe line is usually formed on the surface of the large-sized bonded substrate as the mother substrate, and the scribe line is formed to break the substrate, thereby dividing the substrate into specific Dimensional unit substrate.

In the dividing step to the cutting step, the scribing wheel is subjected to a load corresponding to conditions such as the material or thickness of the brittle material substrate, and the scribing wheel is rolled on the surface of the brittle material substrate to form a scribe line. The brittle material substrate is subjected to a specific force, thereby dividing the brittle material substrate along the scribe line, thereby manufacturing each panel or glass plate.

Furthermore, the operation of forming a scribe line on the mother substrate is referred to as "marking". will The operation of breaking the mother substrate along the scribe line formed by the scribing operation is called "breaking". The operation of dividing a brittle material substrate into a desired size by scribing and breaking is referred to as "cutting". Further, the operation of cutting and cutting the cut brittle material substrate into individual unit substrates after the cutting step is referred to as "separation".

Further, in the present invention, the property of the scribing wheel in which the vertical crack is extended from the surface of the substrate toward the thickness direction of the substrate by forming the scribe line is referred to as "permeation effect".

Here, the previous scribing device and the scribing method using the scribing device will be described with reference to FIGS. 4 to 7. 4 is a front view of the previous scribing apparatus, FIG. 5A is a view illustrating a dividing step of the glass substrate of the prior SSBB method, and FIG. 5B is a view illustrating a dividing step of the glass substrate of the previous SSBB method, FIG. 6A It is a front view of the preceding scribing wheel, FIG. 6B is a side view of the scribing wheel of FIG. 6A, and FIG. 7 is a perspective view illustrating a crossover phenomenon generated when cross-hatching is performed.

First, the previous scribing method will be described using FIG. In the figure, the left-right direction is defined as the X direction, and the direction orthogonal to the paper surface is referred to as the Y direction. The scribing device 50 includes a stage 51 that fixes the mounted glass substrate G by a vacuum suction mechanism and is horizontally rotatable, and a pair of guide rails 52 that movably support the stage 51 in the Y direction and are mutually Parallel; a ball screw 53 that moves the table 51 along the guide rail 52; a guide rod 54 that is mounted above the table 51 in the X direction; and a scribing head 55 that is slidably disposed on the guide rod 54 in the X direction, A cutting pressure is applied to the scribing wheel 58; a motor 56 that slides the scribing head 55 along the guide rod 54; the blade holder 57, which is pendulum The movable end is disposed at the lower end of the scribing head 55 and is raised and lowered by the scribing head 55; the scribing wheel 58 is rotatably mounted to the lower end of the blade holder 57; and a pair of CCD cameras 59 are disposed on the guide Above the rod 54, it is used to identify the alignment marks formed on the glass substrate G on the stage 51.

Here, two examples of the cutting step of the substrate using the scribing device 50 will be described with reference to FIG. In the following description, a glass substrate G which is a bonding glass used in a panel for a liquid crystal display device is taken as an example. For the sake of convenience, one side of the glass substrate is temporarily referred to as an A-side substrate, and the other side is The glass substrate is temporarily referred to as a B-side substrate.

In the first case,

(1) First, as shown in FIG. 5A(a), the A-side substrate is placed on the upper side, the glass substrate G is placed on the scribing table of the scribing device, and the A-side substrate is streaked using the scribing wheel 58. The action forms a scribe line Sa.

(2) Next, the glass substrate G is turned upside down and the glass substrate G is transferred to the breaking device. Then, as shown in FIG. 5A(b), the breaking rod BB is pressed against the B-plane substrate of the glass substrate G placed on the mat M along the line opposite to the scribe line Sa by the breaking device. . Thereby, the crack of the lower A-side substrate extends upward from the scribe line Sa, and the A-side substrate is divided along the scribe line Sa.

(3) Next, the glass substrate G is transported to a scribing table of the scribing device. Then, using the scribing device, as shown in FIG. 5A(c), the B-plane substrate is subjected to a scribing operation using the scribing wheel 58 to form a scribing line Sb.

(4) Next, the glass substrate G is turned upside down and conveyed to the breaking device. Then, as shown in FIG. 5A(d), the breaking rod BB is placed along the line opposite to the scribe line Sb. The A-side substrate of the glass substrate G placed on the mat M is pressed. Thereby, the crack of the lower B-side substrate extends upward from the scribe line Sb, and the B-side substrate is divided along the scribe line Sb.

In the present invention, the cutting method including the above steps is referred to as the SSBS method (S is a scribe line, and B is a rupture).

Also, in the second example,

(1) First, as shown in FIG. 5B(a), the A-side substrate is placed on the upper side, the glass substrate G is placed on the scribing table of the scribing device, and the A-side substrate is streaked using the scribing wheel 58. The action forms a scribe line Sa.

(2) Next, the glass substrate G is turned upside down, the glass substrate G is placed on the scribing table, and the B-side glass substrate is subjected to a scribing operation using the scribing wheel 58 to form a scribe line Sb (Fig. 5B (b) )).

(3) Next, the glass substrate G is transported to the breaking device. Then, as shown in FIG. 5B(c), the breaking rod BB is pressed against the B-side glass substrate of the glass substrate G placed on the mat M along the line facing the scribing line by the breaking device. Thereby, the crack of the lower A-side substrate extends upward from the scribe line Sa, and the A-side substrate is divided along the scribe line Sa.

(4) Next, the glass substrate G is turned upside down and placed on the mat M of the breaking device as shown in Fig. 5B(d). Then, the rupture rod BB is pressed against the line facing the scribe line Sb to press the A-side substrate of the glass substrate G. Thereby, the crack of the lower B-side substrate extends upward from the scribe line Sb, and the B-side substrate is divided along the scribe line Sb.

In addition, in this specification, the cutting method including the above steps is referred to as the SSBB method. By performing the steps of (1) to (4) of the above two examples, the glass is used. The substrate G is divided into two along the scribe line at a desired position. Further, the glass substrate G is separated at a desired separation position by a slight force application.

Further, Patent Document 1 listed below discloses an invention of a scribing wheel having a high penetration effect. Here, the configuration of the scribing wheel 60 disclosed in the following Patent Document 1 will be described with reference to Fig. 6 . Further, Fig. 6A is a schematic front view of a scribing wheel shown in the following Patent Document 1, and Fig. 6B is a right side view and a partially enlarged view of the scribing wheel of Fig. 6A.

The scribing wheel 60 includes a peripheral edge portion formed with a circumferential ridge line 61 and a plurality of notches 62b and projections 62a alternately formed in the circumferential direction along the circumferential ridge line 61. The projection 62a is formed by cutting the circumferential ridgeline 61 at a specific distance and depth. As the scribing wheel 60, for example, a thickness W of about 0.65 mm, a diameter Φ of 1 to 20 mm, and a convergence angle d of the circumferential ridge line of 85 to 160° can be used. By forming the scribe line using the scribing wheel 60, a vertical crack which is relatively deep with respect to the thickness of the glass substrate can be formed from the surface of the glass substrate in the vertical direction. When such a scribing wheel 60 having a high permeability effect is used in the cutting step, the breaking step in the SSBB mode shown in FIGS. 5A(b) and 5A(d) can be simplified or omitted or FIG. 5B(c) And the breaking step in the SSBB method shown in Fig. 5B(d).

Furthermore, the glass material manufacturer has made various improvements in the substrate material and heat treatment, and found that the scribing wheel (hereinafter, also referred to as a conventional cutter wheel) having the previous blade tip (conventional blade tip) is used for the drawing. In the case of a line, a "poor contact" state occurs, that is, after the cutter wheel rolls, the blade edge slides on the surface of the substrate without forming a scribe line. Therefore, it is required to have a "good contact" blade compared to a scribing wheel having a conventional conventional blade tip. tip. In addition, when a scribing wheel having a high-permeability blade tip (hereinafter also referred to as a high-permeability cutter wheel) disclosed in Patent Document 1 below is used, it is possible to temporarily respond to "good contact", but it is difficult to secure, for example, a flat panel display panel. The quality benchmark for the end face strength required at the manufacturing site.

Further, in the case of using a scribing wheel having a conventional cutting edge, good results can be obtained in terms of end face strength, but if cross-hatching is performed, there is a problem that an intersection jump occurs as shown in Fig. 7. Furthermore, Fig. 7 is a perspective view showing a phenomenon of intersection jump occurring when cross-hatching is performed.

Here, the "intersection jump" is explained in detail. When the glass substrate G is cut by using the scribing device 50, the stage 51 on which the glass substrate G is placed is rotated by 90°, so that not only the scribe line is formed in one direction on the glass substrate but The manner in which the plurality of stripes are crossed to form an intersection is cross-hatched in the longitudinal direction and the lateral direction. As shown in Fig. 7, when the scribing wheel is formed so as to traverse the scribe lines L1 to L3 which are formed by the first scribe lines L1 to L3, the vicinity of the intersection of the scribe lines may be generated later. A part of the formed scribe lines L4 to L6 cannot be formed near the intersection. This phenomenon is a point of jump. When such an intersection jump occurs on the glass substrate, the number of glass substrates that are not separated by the scribe line increases, and as a result, a large number of defective products are generated, which causes a problem that the production efficiency is remarkably lowered.

The reason for the occurrence of such a point jump is as follows. In other words, it is considered that when a scribe line is formed by a scribing wheel having a conventional cutting edge, internal stress is generated in the vicinity of the glass surfaces on both sides by a scribe line; secondly, a scribe wheel having a conventional cutting edge is used to traverse By way of the initial scribe line, the internal stress in the vicinity of it will weaken the glass base from the scribe wheel in the vertical direction. The force necessary for the scribing action is applied to the plate surface, and as a result, a scribe line which should be formed later is not formed near the intersection.

In addition, in addition to the improvement of the surface strength of the brittle substrate, the case where the mother substrate as the material of the panel substrate is chemically etched to enhance the strength of the surface of the substrate is also increased, but in this case, the outer periphery of the substrate is raised, so that The tendency of the scribing (external scribing action) performed by "external cutting" is unstable. Further, in the panel substrate used in the mobile terminal represented by the mobile phone, the thickness thereof is continuously reduced in order to reduce the weight. If the thin-thick substrate is an external scribe line method using a scribing wheel having a conventional blade tip, when the scribing wheel is placed on the substrate, the edge is brought to the edge of the substrate end face. A gap is created or the substrate itself is broken, thereby causing a decrease in the yield of the product. Therefore, for a thin substrate, it is difficult to perform an outer scribe line by a scribing wheel having a conventional blade tip. Furthermore, since the contact of the scribing wheel having the conventional cutting edge is poor, the inscribed scribe line method cannot be used.

On the other hand, when the scribing wheel 60 having the high-permeability blade tip disclosed in the following Patent Document 1 is used to form the scribing line, the intersection of the cross-hatching lines can be prevented from jumping and can be applied to the surface of the glass substrate. Form deeper vertical cracks. However, when a scribing line is formed using the scribing wheel 60 having a high-permeability blade tip, the B-plane substrate may be applied to the B-plane substrate on the upper side in FIG. 5A(c). A deep vertical crack is formed on the upper surface to substantially separate the glass substrate G. Therefore, in order to move from the suction pad or the like to the second breaking device, the one of the separated glass substrates G remains in the second scribe line when moving to the second breaking device by the suction pad or the like, as shown in FIG. 5A(c). One of the glass substrates G on the device or separated from the glass substrate G The situation of falling during the transfer. Further, compared with the case of using the scribing wheel having the conventional conventional blade tip, there is a case where the quality of the divided surface of the brittle material, that is, the end face strength is lowered.

On the other hand, in the following Patent Document 2, in order to improve the contact with the glass surface while suppressing the high-permeation effect, a scribing wheel is disclosed similarly to the case of the scribing wheel disclosed in Patent Document 1 below. According to the invention, the plurality of notches and projections alternately formed in the circumferential direction along the circumferential ridge line formed on the outer peripheral edge portion are provided, and the length of the notch in the circumferential direction is shorter than the length of the projection in the circumferential direction.

The specific size of the scribing wheel disclosed in the above Patent Document 2 is set to, for example:

(a) Length of the circumferential direction of the notch: 4~14 μm

(b) Distance between gaps: 20~5000 μm

(c) Depth of the gap: 0.5 to 3.0 μm.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Patent No. 3074143

[Patent Document 2] International Publication WO2007/004700

When the scribing wheel disclosed in the above Patent Document 2 is used, the permeability, the contact property, and the intersection jump are deteriorated as compared with the case of using the high-permeability cutter wheel disclosed in Patent Document 1, but a higher degree can be achieved. The end face strength, and the end face strength is deteriorated compared with the case of using the conventional cutter wheel described above, but the following excellent effects are obtained: good contact property, difficulty in occurrence of intersection jump, and An inscribed line method is employed.

However, the requirements of users of the scribing wheel have increased year by year. For example, in recent years, as a display device for mobile devices, it is required to increase the weight while using a large-sized device, and to start using a glass substrate having a smaller thickness. According to the display device using such a thin and large glass substrate, if the end surface of the glass substrate is weak, the glass substrate is destroyed when an external force is applied to the display surface. After the cutting is performed by using the scribing wheel, the end surface treatment for improving the end surface strength by polishing the glass end surface is also performed. However, for the thin glass substrate, the end surface treatment is also difficult, and the step is required to be simplified. The point of view is not good. Therefore, in particular, the requirement for increasing the strength of the glass end face after the cutting with the scribing wheel is increased.

The present invention has been made in view of the above problems of the prior art, and an object of the invention is to provide a structure in which the end surface of a brittle substrate such as a glass substrate after cutting has high strength, good contact at the time of scribing, intrinsic cutting, and low crossover point. A scribing wheel for a brittle material, a scribing device using a brittle material substrate thereof, and a scribing tool.

In order to achieve the above object, the squeegee of the brittle material of the present invention has a peripheral portion which is formed by intersecting the bottoms of the two truncated cones of the common rotating shaft to form a peripheral ridge line, and a plurality of alternately formed in the circumferential direction along the circumferential ridge line. Notches and protrusions,

The protrusion is formed by a portion of the circumferential ridge line having a length in the circumferential direction which is cut after the circumferential ridge line is cut, The length of the circumferential direction of the notch is longer than the circumferential direction of the protrusion The degree is short and is formed over the entire circumference of the circumferential ridge line at a distance of 8 μm or more and 18 μm or less.

In the scribing wheel for a brittle material according to the present invention, the length of the notch in the circumferential direction is shorter than the length of the protrusion in the circumferential direction. Therefore, the scribing wheel for a brittle material according to the present invention is compared with the case of the scribing wheel having the high-permeability blade tip disclosed in Patent Document 1 in which the length of the notch in the circumferential direction is longer than the circumferential direction of the protrusion. A higher end face strength can be achieved, and substantially the same contact property can be achieved, thereby becoming a brittle material scribing wheel having substantially the same point of jump.

Further, in the scribing wheel for a brittle material of the present invention, the notch is formed over a whole circumference of the circumferential ridge line at a small distance of 8 μm or more and 18 μm or less, and thus the case of the scribing wheel disclosed in the above Patent Document 2 In comparison, the contact is better, so that the intersection jump is difficult to occur, and since the depth of the notch is shallow, a higher end strength can be achieved. In addition, the inscribed scribe line method cannot be used in the case of the conventional conventional cutter wheel, and the present invention can adopt the scribe line method and achieve a surface strength substantially equal to that of the conventional conventional cutter wheel.

Even if the depth of the notch and the length in the circumferential direction are within the range of the scribing wheel for the brittle material of the present invention, the scribing wheel formed over the entire circumference of the circumferential ridge line with a distance of more than 18 μm is also There is a tendency for contact to decrease. In addition, if the lower limit of the pitch is less than 8 μm, the tip end of the scribing wheel is likely to be defective in addition to the tendency of the end face strength to be lowered. Therefore, it is set to 8 μm or more, and further exceeds the circumferential length of the notch. 2 times. Furthermore, the better spacing is 10~18 μm.

As the scribing wheel for the brittle material of the present invention, the outer diameter of 1 to 20 mm, the convergence angle of the circumferential ridge line is 90° to 120°, and the outer diameter is 1 to 5 mm, and the convergence angle of the circumferential ridge line can be used. It is 100°~115°.

Further, in the scribing wheel for a brittle material according to the present invention, the notch preferably has a length in the circumferential direction of 1 μm or more and less than 9 μm.

The scribing wheel having a long length in the circumferential direction of the notch tends to improve the contact with the brittle material, and the scribing wheel having a short length in the circumferential direction of the notch tends to increase the strength of the end surface of the brittle material. In the scribing wheel for a brittle material according to the present invention, the length of the notch in the circumferential direction is in the range of 1 μm or more and less than 9 μm, so that the end face strength of the contact surface of the brittle material and the brittle material can be balanced. wheel. Further, it is more preferable that the length in the circumferential direction of the notch is 1 to 7 μm, and more preferably the length in the circumferential direction of the notch is 1 to 5 μm.

Further, in the scribing wheel for a brittle material of the present invention, the depth of the notch is preferably in the range of 0.3 to 0.7 um.

The scribing wheel having a deep depth of the notch tends to have good contact with the brittle material, and the scribing wheel having a shallow depth of the notch tends to increase the end face strength of the divided surface of the brittle material. In the scribing wheel for a brittle material of the present invention, since the depth of the notch is in the range of 0.3 to 0.7 μm, it is a scribing wheel for a brittle material in which the end face strength of the fracture surface of the contact and brittle material can be balanced. More preferably, the depth of the gap is 0.4 to 0.6 μm.

Further, in the scribing wheel for a brittle material according to the present invention, it is preferable that the scribing wheel for a brittle material has a shaft hole through which a pin for supporting the wheel is inserted, or a body wheel integrally formed with the pin.

According to the scribing wheel for a brittle material of the present invention, a stable scribe line can be formed, so that a brittle material substrate having a stable quality after scribing can be obtained.

Further, in order to achieve the above object, a slashing apparatus for a brittle material according to the present invention includes: a brittle material substrate mounting mechanism (for example, a rotatable table) on which a brittle material substrate is placed; a scribing wheel mounting portion that relatively moves the brittle material substrate on the mechanism; and a scribing wheel for a brittle material according to any one of the above-described scribing wheel mounting portions.

According to the scribing device for the brittle material of the present invention, it is possible to obtain a scribing device capable of stably transporting, which can prevent the intersection of the scribing when the brittle material is cut, and does not deteriorate the quality of the separated glass substrate. The drop is not caused by the excessive penetration of the vertical cracks at the time of scribing, resulting in the fall of the end material during the transfer.

Further, in order to achieve the above object, the manual scribing tool for a brittle material according to the present invention is characterized in that the brittle material is rotatably attached to a holder provided at a front end of the shank by a scribing wheel.

According to the hand-draw tool of the brittle material of the present invention, it is possible to obtain a manual scribing tool for a brittle material which can prevent the intersection of the scribe line when the brittle material is cut, and which does not deteriorate the quality of the cross section of the separated glass substrate. .

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. However, the embodiment shown below is an example of a scribing wheel for embodying the technical idea of the present invention, a scribing device using the brittle material substrate, and a scribing tool, and is not intended to be specific to the present invention. Scribing wheel, using it The scribe line device and the scribing tool of the brittle material substrate may also be adapted to other embodiments included in the patent application. In addition, in each of the drawings for explaining the present specification, in order to draw each member into a degree recognizable in the drawing, the scale of each member is appropriately displayed and displayed, not necessarily the actual size. Displayed proportionally.

Further, the brittle material substrate to be processed in the present invention is not particularly limited in shape, material, use, and size, and may be a substrate including a single plate or a bonded substrate in which two or more veneers are bonded together. It is also possible to attach or contain a film or a semiconductor material on the surface or inside thereof. Further, the brittle material substrate is a target of a scribing wheel of the present invention even if a film or the like which does not conform to a brittle material adheres to the surface thereof.

Examples of the material of the brittle material substrate of the present invention include glass, ceramics, semiconductors, etc., and sapphire, and examples thereof include a liquid crystal display panel, a plasma display panel, and an organic EL (Organic Electro-Luminescence) display. A panel for a flat panel display (FPD) such as a panel for a Field Emission Display (FED) such as a panel for surface-conduction electron-emitting display (SED). In addition, the "center line average roughness Ra" used in the present specification is one of the parameters of the surface roughness of the industrial product specified in JIS B 0601, which is an arithmetic mean value randomly extracted from the surface of the object.

First, the shape of the scribing wheel according to the embodiment of the present invention will be described with reference to Figs. 1 and 2 . 1A is a front view of the scribing wheel of the present invention viewed from a direction orthogonal to the rotational axis of the scribing wheel of the present invention, and FIG. 1B is a plan view of FIG. 1A. Side view of the reel. 2A is an enlarged view of a portion IIA of FIG. 1B, and FIG. 2B is an enlarged view of a portion IIB of FIG. 2A.

Further, the scribing wheel 10 of the present embodiment is a scribing wheel for a brittle material, which is rolled while being pressed against a brittle material substrate such as glass to form a scribe line on the brittle material substrate, and is accompanied by a scribe line. Formed to form a vertical crack extending from the scribe line toward the thickness direction of the brittle material substrate. The scribing wheel 10 of the present embodiment can be attached to the scribing head 55 of the preceding scribing device 50 described with reference to Fig. 4, for example, by replacing the scribing wheel 60.

As shown in FIGS. 1 and 2, the scribing wheel 10 of the present embodiment has a peripheral portion 14 which is formed by intersecting the bottoms of the two truncated cones 12 of the common rotating shaft 11 to form a peripheral ridge line 13; and along the circumferential ridge line 13 A plurality of notches 15 and protrusions 16 are formed in the circumferential direction.

The circumferential ridge line 13 is formed by performing a grinding process from the axial center toward the outer side in the radial direction, and the grinding streak remains on the surface of the peripheral edge portion 14 except for the grinding process. The outer peripheral edge portion 14 is formed to have a convergence angle (α). The scribing wheel 10 is a disk-shaped wheel having a shaft hole 17 through which a pin (not shown) of the shaft branching wheel 10 passes. Further, the material of the scribing wheel 10 is preferably a super hard alloy, a sintered diamond, a ceramic or a cermet.

The outer peripheral edge portion 14 includes the inclined faces of the two truncated cones 12, and the grinding streaks remain due to the grinding process for forming the circumferential ridge lines 13, and the center line average roughness Ra of the beveled surface is, for example, 0.05 μm or more and 0.35 μm or less. . Therefore, compared with the previous grinding process in which the center line average roughness Ra is larger, the total amount of the material of the blade tip to be cut can be reduced, whereby the abrasion of the protrusions 16 can be suppressed, and the life can be greatly extended.

The circumferential ridge line 13 has fine irregularities formed by the above-described ground streaks of the inclined surface of the truncated cone 12 of the outer peripheral edge portion 14, and the center line average roughness Ra of the irregularities is, for example, 0.05 μm or more and 0.20 μm or less. Thereby, when the notch 15 is formed in the circumferential ridge line 13, the height position (position in the radial direction) of the circumferential ridge line 13 in which the notch 15 is started can be easily determined.

As shown in Fig. 2A and Fig. 2B, the notch 15 of the scribing wheel 10 is formed at a pitch P, and the length a in the circumferential direction is shorter than the length b in the circumferential direction of the projection 16. Further, the projections 16 are formed by a portion of the circumferential ridgeline 13 having a length in the circumferential direction which is cut out by the circumferential ridge line 13. Further, the notch 15 is formed by cutting out a substantially V-shaped groove having a depth h from the flat circumferential ridge line 13 at intervals P. By forming such a notch 15, a projection 16 having a height h is formed at intervals P on the circumferential ridge line 13. The portion of the projection 16 corresponding to the circumferential ridge 13 has fine irregularities formed by the bead of the bevel of the truncated cone 12, and the center line average roughness Ra of the concavities and convexities is 0.05 μm or more and 0.20 μm or less.

As shown in Fig. 2B, the notch 15 has a notch surface 18 which is cut inward in the radial direction toward the bottom of the scribing wheel 10. The tangent C on the end portion 13a of the projection 16 intersects the notch surface 18 at an angle (θ) of 15 to 60°. . That is, if the tangent line C on the end portion 13a of the projection 16 intersects the notch surface 18 at a right angle or a nearly right angle, the end portion 13a of the projection 16 becomes better to the substrate surface, but the end portion 13a of the projection 16 is The wear is advanced; and if the tangent C on the end portion 13a of the projection 16 intersects the notch surface 18 at an angle of 30 or less, the engagement of the end portion 13a of the projection 16 with the surface of the substrate is deteriorated. Thus, by setting the range of the angle (θ) to 15 to 60°, the life of the scribing wheel 10 can be extended, and the scribing wheel pair can be favorably maintained. The bite of the substrate surface.

The shape of the notch 15 as viewed from the axial direction of the truncated cone 12 is substantially V-shaped. Therefore, by changing the center angle of the V-shape, the depth of the notch 15 (the height of the projection 16) h can be ensured on the one hand, and the notch can be easily adjusted on the one hand. The length a of the circumferential direction 15 of the 15 and the length b of the circumferential direction of the projection 16.

Here, an example of a method of manufacturing the scribing wheel 10 will be described. First, a cylindrical disk as a mother body of the scribing wheel 10 is prepared, and the peripheral edge portions 14 on both sides are ground by grinding the cylindrical disk, and the inclined faces of the two truncated cones 12 are formed to intersect each other to form a circumferential ridge line 13. In the grinding process, it is preferable to reduce the surface roughness of the inclined surface of the truncated cone 12 and the undulation of the circumferential ridgeline 13 derived from the surface roughness.

The center line average roughness Ra of the inclined surface of the truncated cone 12 is, for example, 0.05 μm or more and 0.35 μm or less, and the circumferential ridge line 13 has fine irregularities formed by the grinding of the bevel of the truncated cone 12, and the center of the unevenness is formed. The particle size of the grindstone to be used is selected such that the line average roughness Ra is, for example, 0.05 μm or more and 0.20 μm or less. Thus, by suppressing the surface roughness of the inclined surface of the truncated cone 12 and the circumferential ridgeline 13, the width of the formed scribe line is finely fixed, and the separation obtained by the scribe line by the scribing wheel 10 can be suppressed. The split surface of the glass substrate G generates chipping or the like.

Next, a notch 15 is formed on the circumferential ridge line 13. As an example of forming the notch 15, a notch 15 having a V-shaped shape as viewed from the axial direction of the frustum 12 is formed on the outer peripheral edge portion by irradiation of a laser. According to this method, the height h of the projection can be kept fixed by changing the center angle of the V-shape, and the length a of the circumferential direction of the notch 15 and the circumferential direction of the projection 16 can be easily adjusted. The length b.

The outer diameter of the scribing wheel 10, the distance P between the notches 15, the length a in the circumferential direction of the notch 15, the length b of the projection 16 in the circumferential direction, the depth of the notch 15, and the convergence angle (α) of the outer peripheral portion 14 are scribed. The specification of the wheel can be appropriately set depending on the type, thickness, thermal history, and quality of the brittle material division surface of the brittle material to be cut.

As an example of the condition of the scribing wheel of the embodiment, the outer diameter of the wheel is 1 to 20 mm, the distance between the notches 15 is 8 μm or more and 18 μm or less, the depth of the notch 15 is 0.3 to 0.7 μm, and the convergence angle of the circumferential ridge 13 It is 90~120°. As a better condition of the scribing wheel, the outer diameter of the wheel is 1~7 mm; as a condition of a further scribing wheel, the outer diameter of the wheel is 1~5 mm, and the distance between the notches 15 is 10 μm or more and 18 μm or less. The depth of the notch 15 is 0.4 to 0.6 μm, and the convergence angle of the circumferential ridge 13 is 100 to 115°. Further, from the viewpoint of the end face strength and the difficulty of the blade tip defect, the lower limit of the distance between the notches 15 may be selected to be twice the length of the circumferential direction of the notch.

In general, by using a scribing wheel having a deep depth of the notch, there is a tendency to make the contact with respect to the brittle material (especially the number of intersections at the time of cross-hatching) become good, by using the notch The shallow depth of the scribing wheel has a tendency to increase the strength of the end surface of the brittle material. However, in the present embodiment, the depth of the notch 15 is controlled within a shallow range and the distance between the notches is controlled within a short range. This gives the effect of good contact and end strength.

Further, in general, by using a scribing wheel having a short gap (a large number of divisions), the contact with the brittle material is improved, and The use of the scribing wheel having a long gap between the notches (the number of divisions is small) tends to increase the strength of the end surface of the brittle material. However, in the present embodiment, the distance between the notches is controlled within a short range and the depth of the notch is controlled to In the shallower range, the length in the circumferential direction of the notch is controlled to a shorter range, whereby the contact property and the end face strength are both excellent.

Moreover, in general, when dividing a laminated glass substrate, it is preferable to use a scribing wheel having a small outer diameter, and for example, a scribing wheel having an outer diameter of 1 to 4 mm is suitable. On the other hand, in the case of dividing the raw material veneer, it is preferable to use a scribing wheel having a large outer diameter, for example, a scribing wheel having an outer diameter of 4 to 20 mm is suitable.

Further, in general, the scribing wheel having a large convergence angle of the circumferential ridge has a tendency to have a long life, and from the viewpoint of life, the convergence angle of the circumferential ridge is preferably, for example, 90 to 120°, particularly preferably 100 to 115°. .

Further, in general, by using a scribing wheel having a long length in the circumferential direction of the notch, the contact with the brittle material is favored, and the scribing wheel having a short length in the circumferential direction of the notch is used. In the present embodiment, the length of the notch in the circumferential direction is set to be shorter than the length in the circumferential direction of the protrusion, and the distance between the notches is shorter. This gives the effect of good contact and end strength.

The scribing wheel according to the above-described embodiment of the present invention exhibits an excellent effect that the contact property is good, so that it is difficult to cause the intersection jump when the cross-hatching occurs, and the thickness of the outer scribe line by the conventional conventional cutter wheel cannot be used. A thin substrate (for example, a substrate having a thickness of 0.3 mm or less, especially 0.2 mm or less) can also be treated by an undercut.

[Experimental example]

A comparison experiment was conducted together with the case of the conventional conventional cutter wheel (Comparative Example 1) and the scribing wheel disclosed in Patent Document 1 (Comparative Example 2) to confirm the scribing wheel of the above-described embodiment. The quality of the split surface (end face strength) when cross-hatching. In the comparative experiment, the scribing wheels corresponding to the first direction and the second direction in the first embodiment and the second direction were cross-hatched in the embodiment, the comparative example 1 and the comparative example 2, respectively. Further, in the scribing wheel of Comparative Example 2, at least the gap between the notches was 20 μm or more, and this aspect is outside the scope of the present invention.

First, a conventional cutter wheel made of PCD (polycrystallite diamond) having a thickness of 0.65 mm, an outer diameter of 2.1 mm, and a convergence angle of a circumferential ridge of 135° corresponding to Comparative Example 1 was produced. Next, using the conventional cutter wheel made of PCD, the depth of the notch shown in FIGS. 1 and 2 is 0.5 μm, the number of notches formed is 400, and the pitch is 16.4 μm by laser irradiation. The scribing wheel of the form. In the same manner, a scribing wheel of Comparative Example 2 in which the depth of the notch was 1.5 μm, the number of notches formed was five, and the pitch was 1.319 mm was produced.

The scribing wheel of the embodiment prepared in this manner, Comparative Example 1 and Comparative Example 2 was subjected to the cross-hatching test shown below. Further, the glass substrate to be used is an alkali-free glass (OA-10: trade name) veneer having a thickness of 0.3 mm manufactured by Nippon Electric Glass Co., Ltd.

Further, in the cross-hatch test, using the scribing device shown in FIG. 4, as shown in FIG. 7, three scribing lines (cross-dash lines) are formed in the longitudinal direction and the lateral direction at intervals of 100 mm, along the scribing lines. A test piece (100 mm × 100 mm) was obtained by breaking. Visually observe the state of the intersection point jump at this time, and distinguish it as "completely not Displayed by the occurrence of intersection jumps, "partially generated intersection jumps" and "all generated intersection jumps". Further, the bending strength of each of the obtained test pieces was measured for every 20 pieces, and the average value was determined.

The bending strength is obtained by the following method: the center line on one of the faces of each test piece (flatly divided into two lines of 100 mm × 50 mm) is separated from the two sides by two lines of 50 mm and The center line on the opposite side (back side) (the line opposite the center line of the surface) is separated from the two sides by two lines of 10 mm, and the glass substrate is pressed from the vertical direction, and the damage is measured. Stress. Table 1 shows the measurement results of the end face strength of the glass substrate and the results of confirming the contact properties (the presence or absence of the intersection jump at the intersection of the cross-cuts).

The results shown in Table 1 above are as follows. That is, it is understood that the test piece after the scribing wheel division according to the embodiment of the present invention exhibits substantially the same bending strength characteristics as the test piece divided by the scribing wheel of Comparative Example 1, and shows that Comparative Example 2 is used. The test piece after the scribing wheel is divided into better bending strength. This shows that the test piece which was divided by the scribing wheel according to the embodiment of the present invention has a strong end face strength and a good end face quality.

Further, in the test piece divided by the scribing wheel of Comparative Example 1, all of the intersection jumpers accounted for 82%, and some of the intersection jumpers also existed 9%, and none of the intersection jumpers existed only 9%. . Same use comparison In the test piece after the scribing wheel division of Example 2, there was no occurrence of all the intersection jumpers, but some of the intersection jumpers also existed 62%, and only 38% of the intersections did not occur at all.

On the other hand, in the test piece which was divided by the scribing wheel according to the embodiment of the present invention, there was no occurrence of a point jump, but a part of the intersection jump occurred only 43%, and no intersection jump occurred at all. There are also 57%. From this, it was confirmed that the test piece which was divided by the scribing wheel of the embodiment of the present invention was less likely to cause intersection jump and the contact property was very good.

Further, in the above embodiment, the example in which the scribing wheel is attached to the scribing device to scribe the glass substrate is shown. However, the present invention is also applicable to the slewing wheel 10 being rotatably mounted on the front end of the shank. A manual scribing tool formed on the holder. This manual scribing tool will be described using FIG. Furthermore, Figure 3 is a front view of the manual scribing tool.

As shown in FIG. 3 of the front view, the scribing tool 20 mainly includes a holder 21 for removably attaching the scribing wheel 10 to one end, and a rod-shaped handle 22 for attaching and detaching the holder 21. The handle 22 is provided with a cover 24 that is detachable, and has an oil chamber 23 formed therein, one end of which forms a joint portion with the holder 21, and the other end for supplying lubricating oil to the oil chamber 23.

Further, in the above-described embodiment, an example in which a laser irradiation method is used to form the notch 15 is shown. However, in consideration of the material of the scribing wheel or the processing efficiency, a manufacturing method of grinding or electric discharge machining may be employed.

10‧‧‧marking wheel

11‧‧‧Rotary axis

12‧‧‧French table

13‧‧‧Circumference

13a‧‧‧End

14‧‧‧The outer peripheral part

15‧‧‧ gap

16‧‧‧ Protrusion

17‧‧‧Axis hole

18‧‧‧ notched surface

20‧‧‧Scribe tool

21‧‧‧ Holder

22‧‧‧Hands

23‧‧‧ Oil room

24‧‧‧ Cover

50‧‧‧ scribe device

51‧‧‧

52‧‧‧rails

53‧‧‧Ball screw

54‧‧‧guides

55‧‧‧Drawing head

56‧‧‧Motor

57‧‧‧ blade holder

58‧‧‧marking wheel

59‧‧‧A pair of CCD cameras

60‧‧‧marking wheel

61‧‧‧Circumference

62a‧‧‧ Protrusion

62b‧‧‧ gap

A‧‧‧A surface substrate

a‧‧‧The length of the circumferential direction of the gap

B‧‧‧B surface substrate

b‧‧‧The length of the circumferential direction of the protrusion

BB‧‧‧ broken rod

C‧‧‧ tangent

D‧‧‧ Convergence angle

G‧‧‧glass substrate

H‧‧‧ height of protrusion

L1~L6‧‧‧

M‧‧‧ pads

P‧‧‧ gap between gaps

Sa, Sb‧‧‧

W‧‧‧Drawn wheel thickness

Φ‧‧‧diameter

θ‧‧‧The intersection of the tangent and the notch

1A is a front view of a scribing wheel of the present invention, and FIG. 1B is a side view of the scribing wheel of FIG. 1A.

2A is an enlarged view of a portion IIA of FIG. 1B, and FIG. 2B is an enlarged view of a portion IIB of FIG. 2A.

Figure 3 is a front elevational view of the hand scribing tool of the present invention.

Figure 4 is a front view of a prior scribing device.

5A(a) to 5(d) are diagrams showing the steps of dividing the glass substrate of the prior SSBB method, and FIGS. 5B(a) to (d) are views showing the steps of dividing the glass substrate of the prior SSBB method.

6A is a front view of the pattern of the preceding scribing wheel, and FIG. 6B is a right side view and a partially enlarged view of the mode of the scribing wheel of FIG. 6A.

Fig. 7 is a perspective view showing the phenomenon of intersection jump occurring when cross-hatching is performed.

13‧‧‧Circumference

13a‧‧‧End

15‧‧‧ gap

16‧‧‧ Protrusion

18‧‧‧ notched surface

a‧‧‧The length of the circumferential direction of the gap

b‧‧‧The length of the circumferential direction of the protrusion

C‧‧‧ tangent

H‧‧‧ height of protrusion

P‧‧‧ gap between gaps

θ‧‧‧The intersection of the tangent and the notch

Claims (6)

A scribing wheel for a brittle material, characterized in that: a bottom portion of two truncated cones having a common rotating shaft intersect to form a peripheral portion outside the circumferential ridge line, and a plurality of notches alternately formed in the circumferential direction along the circumferential ridge line and a projection formed by a portion of the circumferential ridge line having a length in the circumferential direction formed by the circumferential ridge line being notched, wherein a length of the notch in the circumferential direction is shorter than a length of the protrusion in a circumferential direction and extending over the circumference The entire circumference of the ridge line is formed at a distance of 8 μm or more and 18 μm or less, the depth of the notch is in the range of 0.3 to 0.7 μm, and the center line average roughness Ra of the circumferential ridge line is 0.05 μm or more and 0.20 μm or less. The swarf material of claim 1 is characterized in that the length of the notch in the circumferential direction is 1 μm or more and less than 9 μm. In the scribing wheel for a brittle material according to claim 1, the center line average roughness Ra of the inclined surface constituting the outer peripheral edge portion is 0.05 μm or more and 0.35 μm or less. A slash wheel for a brittle material according to claim 1, wherein the above-mentioned brittle material scribing wheel has a shaft hole through which a pin for the shaft is pivoted, or a body wheel integrally formed with the pin. A scribing device for a brittle material, comprising: a substrate mounting mechanism on which a brittle material substrate is placed; a scribing wheel mounting portion that relatively moves with respect to a brittle material substrate placed on the mounting mechanism; and Draw A reeling wheel for a brittle material according to any one of claims 1 to 4 of the present invention. A manual scribing tool for a brittle material, which is constructed by arbitrarily axially attaching a brittle material according to any one of claims 1 to 4 to a holder provided at a front end of the shank.