KR20130035867A - Brittle material scribing wheel, and scribing apparatus and scribing tool for brittle material substrate using such brittle material scribing wheel - Google Patents

Abstract

PURPOSE: A scribing wheel for a brittle material is provided to have a low cross-point skip while having high side strength and good penetrability by forming a small pitch and shortening the length of cutouts to be shorter than the length of protrusions. CONSTITUTION: A scribing wheel for a brittle material comprises a peripheral line(13) on the outer circumference. The scribing wheel has a plurality of cutouts(15) and protrusions(16). The cutouts and protrusions are alternately formed along the peripheral line. The length of the cutouts is shorter than the length of the protrusions. The pitch of the cutouts along the peripheral line is 8-18 Mm. The peripheral length of the cutouts is 1-9 Mm. The depth of the cutouts is 0.3-0.7 Mm.

Description

Scribing wheel for brittle material, scribing device and scribe tool of brittle material substrate using the same

INDUSTRIAL APPLICABILITY The present invention is for brittle materials having a high quality (cross section strength) of the cut surface of the glass after scribing, good permeability, enabling inner contact scribing, and having low cross-point skip. A scribing wheel, a scribing apparatus for a brittle material substrate using the same, and a scribing tool.

Conventionally, in the manufacturing process of flat display panels, such as a liquid crystal display panel and an organic electroluminescent (EL) panel, a solar cell, etc., the scribing process of a brittle material substrate is provided. For example, a liquid crystal display panel has the structure which bonded two glass substrates, and injected the liquid crystal into the gap. In the case of a reflective substrate among projector substrates called LCOS, a pair of substrates on which a quartz substrate and a semiconductor wafer are bonded are used. The bonded substrate on which such a substrate is bonded is usually a unit substrate divided into predetermined dimensions by forming a scribe line on the surface of a large size bonded substrate which is a mother substrate, and then breaking the substrate along the formed scribe line.

In these dividing and cutting processes, the scribing wheel is rolled on the surface of the brittle material substrate while the scribing wheel is loaded with loads suitable for various conditions such as the material and thickness of the brittle material substrate. By forming a scribe line and loading a predetermined force on the brittle material substrate, the brittle material substrate is divided along the scribe line to manufacture individual panels and glass plates.

In addition, forming a scribe line in a mother substrate is called "scribing." Breaking the mother substrate along the scribe line formed by the scribe is referred to as "break". Dividing into a brittle material substrate having a desired size by scribing and breaking is referred to as "cutting". In addition, what isolate | separates the brittle material substrate cut | disconnected through the conveyance after a cutting process into individual unit board | substrates is called "separation."

In addition, in this invention, the property of the scribing wheel which extends a vertical crack from the surface of a board | substrate to the board thickness direction of a board | substrate by formation of a scribe line is called "infiltration effect."

Here, the conventional scribing apparatus and the scribing method using this scribing apparatus are demonstrated using FIGS. 4 is a front view of a conventional scribing apparatus, FIG. 5A is a diagram illustrating a process of dividing a glass substrate by a conventional SBSB method, and FIG. 5B is a diagram illustrating a process of dividing a glass substrate by a conventional SSBB method. Fig. 6A is a front view of a conventional scribing wheel, Fig. 6B is a side view of the scribing wheel of Fig. 6A, and Fig. 7 is a perspective view illustrating an intersection skip phenomenon occurring when cross scribing.

First, the conventional scribing method is explained using FIG. In addition, in FIG. 4, it demonstrates below, making the left-right direction the X direction and the direction orthogonal to the paper surface the Y direction. This scribing apparatus 50 is a horizontally rotatable table 51 which fixes the mounted glass substrate G by a vacuum suction means, and a pair parallel to each other which supports the table 51 so that a movement to a Y direction is possible. Guide rails 52, ball screws 53 for moving the table 51 along the guide rails 52, guide bars 54 arranged above the table 51 along the X direction, and guides The scribing head 55 which is installed in the bar 54 in the X direction so as to be slidable and applies cutting pressure to the scribing wheel 58, and the scribe head 55 are slid along the guide bar 54. It is mounted to the motor 56, the lower end of the scribe head 55 to vibrate, the tip holder 57, which is lifted by the scribe head 55, and the lower end of the tip holder 57 is rotatably mounted. The scribing wheel 58 and the upper portion of the guide bar 54 and the glass on the table 51 A pair of CCD camera 59 which recognizes the alignment mark formed in the switch substrate G is provided.

Here, two examples of the substrate cutting step using the scribe device 50 will be described with reference to FIG. 5. In addition, in the following description, the glass substrate G which is the bonding glass used for the liquid crystal display device panel is taken as an example, and a glass substrate on one side is named A surface substrate, and the other side is called B surface substrate for convenience.

In the first example,

(1) First, as shown to (a) of FIG. 5A, a glass substrate G is mounted on the scribe table of a scribing apparatus with an A surface substrate as an upper side, and scribing with respect to an A surface substrate. A scribe is performed using the wheel 58 to form a scribe line Sa.

(2) Next, the upper and lower sides of the glass substrate G are reversed, and the said glass substrate G is conveyed to a brake apparatus. And as shown to (b) of FIG. 5A, in this brake apparatus, with respect to the B surface board | substrate of the glass substrate G mounted on the mat M, the brake bar BB opposes the scribe line Sa. Squeeze along the line. As a result, cracks are extended upward from the scribe line Sa on the lower A surface substrate, and the A surface substrate is divided along the scribe line Sa.

(3) Next, the glass substrate G is conveyed on the scribe table of a scribe apparatus. In this scribing apparatus, as shown in Fig. 5A, (c), a scribe line Sb is formed on the B surface substrate by scribing using the scribing wheel 58.

(4) Next, the glass substrate G is inverted up and down and conveyed to a brake apparatus. And as shown to (d) of FIG. 5A, with respect to the A surface board | substrate of the said glass substrate G mounted on the mat M, the brake bar BB is pressed along the line which opposes the scribe line Sb. do. As a result, the lower B surface substrate extends the crack upward from the scribe line Sb, and the B surface substrate is divided along the scribe line Sb.

In the present invention, the cutting method made of the above-mentioned process is referred to as SBSB method (S means scribe, B means brake).

In the second example,

(1) First, as shown to (a) of FIG. 5B, the glass substrate G is mounted on the scribe table of a scribing apparatus with an A surface substrate as an upper side, and scribing with respect to an A surface substrate. A scribe is performed using the wheel 58 to form a scribe line Sa.

(2) Next, the top and bottom of the glass substrate G are inverted and the glass substrate G is mounted on the scribe table, and the scribe wheel 58 is scribed to the B surface glass substrate. A scribe line Sb is formed (FIG. 5B (b)).

(3) Next, glass substrate G is conveyed to a brake apparatus. And as shown to (c) of FIG. 5B, in this brake apparatus, the brake bar BB is opposed to the scribe line Sa with respect to the B surface glass substrate of the glass substrate G mounted on the mat M. In FIG. Press along the line. As a result, the lower A surface substrate extends the crack upward from the scribe line Sa, and the A surface substrate is divided along the scribe line Sa.

(4) Next, the top and bottom of the glass substrate G are inverted and mounted on the mat M of the brake device as shown in Fig. 5B (d). Then, the brake bar BB is pressed along the line facing the scribe line Sb with respect to the A surface substrate of the glass substrate G. As shown in FIG. As a result, cracks are extended from the scribe line Sb to the upper side of the lower B surface substrate, and the B surface substrate is divided along the scribe line Sb.

In addition, in this specification, the cutting method which consists of said process is called SSBB system. By performing each process of said (1)-(4) of the said two examples, the glass substrate G is divided into two along a scribe line at a desired position. In addition, the glass substrate G is isolate | separated in a desired separation position by applying light force.

In addition, Patent Document 1 discloses an invention of a scribing wheel having a high penetrating effect. Here, the structure of the scribing wheel 60 currently disclosed by following patent document 1 is demonstrated using FIG. 6A is a schematic front view of the scribing wheel disclosed in the following patent document 1, and FIG. 6B is a schematic right side view and a partial enlarged view of the scribing wheel of FIG. 6A.

This scribing wheel 60 consists of the outer periphery part in which the circumferential ridge 61 was formed, and the many notch part 62b and protrusion 62a alternately formed along the circumferential ridge 61 in the circumferential direction. The projection 62a is formed by cutting the circumferential ridge 61 to a predetermined pitch and depth. As this scribing wheel 60, for example, a thickness W of about 0.65 mm, a diameter? Of 1 to 20 mm, and a convergence angle d of the circumferential ridge line is used in a range of 85 to 160 degrees. By using the scribing wheel 60 to form a scribe line, it is possible to form a vertical crack relatively deep with respect to the plate thickness of the glass substrate in the vertical direction from the surface of the glass substrate. When the scribing wheel 60 having such a high penetration effect is used in the cutting step, the brake step in the SBSB system shown in Figs. 5A and 5A, or Fig. 5B (c). ) And the braking process in the SSBB system shown in (d) of FIG. 5B can be simplified or omitted.

By the way, as a result of improvements in the material of the substrate in the glass material maker and various improvements in the heat treatment, a scribing wheel (hereinafter also referred to as a normal wheel) having a conventional blade tip (normal blade tip) has been performed. In the case of using a scribe, the phenomenon of "permeability", that is, the blade tip slipped on the surface of the substrate immediately after rolling of the wheel, did not start to form a scribe line. Therefore, the blade tip "good permeability" is calculated | required rather than the scribing wheel provided with the conventional normal blade tip. In addition, the point of "good permeability" can be responded once using the scribing wheel (henceforth a high permeation wheel) provided with the high penetrating blade tip disclosed by following patent document 1, for example, a flat display panel It becomes difficult to secure the quality standards of the end face strength required at the production site.

In addition, when a scribing wheel having a normal blade tip is used, a good result is obtained in terms of end surface strength. However, when cross scribing, a problem arises in that the intersection skip shown in Fig. 7 occurs. . 7 is a perspective view illustrating the intersection skip phenomenon that occurs when cross scribing.

Here, the detail of "skip intersection" is demonstrated. When cutting the glass substrate G by using the scribe device 50 described above, by rotating the table 51 on which the glass substrate G is mounted by 90 °, the scribe line is not only rotated in one direction but a plurality of scribe lines. Cross scribing is carried out vertically and horizontally so that the intersections are formed by crossing the scribe lines. As shown in Fig. 7, when scribing wheels L1 through L6 are formed by passing the scribe lines L1 through L3 initially formed, the scribes to be formed later near the intersection point of these scribe lines are formed. The phenomenon that the lines L4 to L6 are not partially formed in the vicinity of the intersection may occur. This is the intersection skip. If the intersection skip occurs on the glass substrate, the glass substrate is often not separated in accordance with the scribe line, and as a result, a large amount of defective products are generated, resulting in a problem of significantly lowering the production efficiency.

It is considered that the cause of such an intersection skip is as follows. That is, when the scribe line is initially formed with a scribing wheel having a normal blade tip, internal stresses are generated near the glass surfaces on both sides with the scribe line therebetween. Subsequently, when the scribing wheel having the normal blade tip passes through the initially formed scribe line, the scribe is applied from the scribing wheel in the vertical direction to the glass substrate surface by the potential internal stress in the vicinity thereof. As a result, the scribe line to be formed later is not formed near the intersection.

In addition, in addition to the improvement of the surface strength of a brittle substrate, the case where the mother substrate used as a raw material of a panel substrate is chemically etched and the reinforcement of the surface of a board | substrate is increasing, in this case, since the outer periphery of a board | substrate is raised, it is "the outer Scribe operation by " contact scribe " tends to become unstable. Moreover, in the panel substrate used for the portable terminal represented by a mobile telephone, the thickness becomes thin gradually for weight reduction. If an outer contact scribing method using a scribing wheel having a normal blade tip is adopted for such a thin substrate, the edge is cut off by an impact applied to the end surface edge of the substrate when the scribing wheel is mounted on the substrate. This may occur or the substrate itself may be broken, so that the yield of the product decreases. Therefore, for a thin board | substrate, the outer contact scribe by the scribing wheel provided with the normal blade tip is difficult to employ | adopt. Moreover, since the scribing wheel provided with the normal blade tip has poor permeability, the inner contact scribing method cannot be employ | adopted.

On the other hand, when a scribe line is formed using the scribing wheel 60 provided with the high permeability blade edge | tip as disclosed in following patent document 1, it prevents the intersection skipping in said cross scribe, and glass Deep vertical cracks may be formed on the surface of the substrate. However, in the case of forming a scribe line using the scribing wheel 60 having a high permeability blade end, in FIG. 5A (c), when the upper side B surface substrate is scribed, the B side substrate is deeply formed. Vertical cracks are formed and the glass substrate G may be in a substantially separated state. Therefore, in order to transfer the glass substrate G with a suction pad etc. and convey it to a 2nd brake apparatus, in order to transfer to FIG. 5A (d) from FIG. 5A (c), in the separated glass substrate G, One side may remain in the 2nd scribe apparatus, or one of the glass substrates G isolate | separated during conveyance of the glass substrate G may fall. Moreover, compared with the case of using the scribing wheel provided with the conventional normal blade tip, the quality of the divided surface of brittle material, ie, the end surface strength, may fall.

On the other hand, Patent Document 2 below, along with the circumferential ridge formed on the outer periphery, as in the case of the scribing wheel disclosed in Patent Document 1 below for the purpose of improving the permeability to the glass surface while suppressing the high penetrating effect Disclosed is an invention of a scribing wheel having a plurality of cutouts and protrusions alternately formed in the circumferential direction, and the length of the circumferential direction of the cutout portion being shorter than the length of the circumferential direction of the protrusion.

The specific size of the scribing wheel disclosed in the said patent document 2 is, for example,

(a) Length in the circumferential direction of the cutout portion: 4 to 14 µm

(b) pitch of cutout: 20 to 5000㎛

(c) depth of cutout: 0.5-3.0㎛

It is.

Japanese Patent No. 3074143 International Publication WO2007 / 004700

When the scribing wheel disclosed in the patent document 2 is used, the permeability, the pitting property and the intersection skipping are deteriorated, but higher end surface strength is achieved than in the case of using the high penetrating wheel disclosed in the patent document 1 above. In addition, the end face strength is lower than that in the case where the normal wheel is used, but the permeability is good, the intersection skipping is less likely to occur, and the inner contact scribing method can be adopted. .

However, the needs of users of scribing wheels are being advanced year by year. For example, in recent years, it is desired to suppress the increase in weight while employing a large one as a display device of a portable device, and a thinner glass substrate has been used with it. According to the display device employing such a thin and large glass substrate, if the end surface strength of the glass substrate is weak, the glass substrate may be destroyed when an external force is applied to the display surface. After cutting using a scribing wheel, end face treatment is also performed to improve the end face strength by polishing the glass end face. However, in the thin glass substrate, the end face treatment is also difficult, and is also preferable from the point of request for simplification of the process. Not. For this reason, there is an increasing demand for increasing the glass end face strength after cutting using a scribing wheel.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the prior art, and has a strong end surface strength of brittle substrates such as glass substrates after cutting and good permeability during scribing, which allows inner contact scribing and has low intersection skipping. An object of the present invention is to provide a scribing wheel for brittle material, a scribing apparatus for a brittle material substrate using the same, and a scribe tool.

In order to achieve the above object, the scribing wheel for brittle material of the present invention is a plurality of alternately formed in the circumferential direction along the circumferential direction along the circumferential ridge and the outer periphery of the circumferential ridge formed by crossing the bottom of two truncated cones sharing the axis of rotation; Have cutouts and protrusions,

The projection is composed of a portion of the circumferential ridge having a length in the circumferential direction, the circumferential ridge is left after cutting off,

The cutout portion is characterized in that the length in the circumferential direction is shorter than the length in the circumferential direction of the protrusion, and is formed at a pitch of 8 µm or more and 18 µm or less over the entire circumference of the circumferential ridge.

In the scribing wheel for brittle materials of the present invention, the cutout portion is shorter in the circumferential direction than in the circumferential direction of the projection. Therefore, according to the scribing wheel for brittle materials of this invention, the cut-out part provided with the high permeability blade tip disclosed in the said patent document 1 whose length of the circumferential direction becomes longer than the length of the circumferential direction of a processus | protrusion. Compared with the case of the scribing wheel, higher end face strength can be achieved and substantially equivalent permeability can be achieved, resulting in a scribing wheel for brittle material having substantially equivalent intersection skipping property.

In addition, the scribing wheel for the brittle material of the present invention is a scribing disclosed in the Patent Document 2, because the cutout is formed in a relatively small pitch of 8 to 18 ㎛ over the entire circumference of the circumferential ridge Compared with the case of a wheel, since the permeability is better, the intersection skipping hardly occurs, and since the depth of the cutout is relatively shallow, higher end face strength can be achieved. In addition, while the inner contact scribing method cannot be adopted in the case of the conventional normal wheel, the inner contact scribing method can be employed, and a high end surface strength substantially equivalent to that of the conventional normal wheel is achieved. You can do it.

A scribing wheel formed over the entire circumference of the circumference of the circumference with a pitch of more than 18 μm, even if the depth and the length of the circumferential direction are in the range employed in the scribing wheel for the brittle material of the present invention. In a tendency, permeability tends to fall. In addition, since the lower limit of this pitch tends to lower the end surface strength if it is less than 8 µm, damage is more likely to occur at the blade edge of the scribing wheel, so that the lower limit is 8 µm or more, and the circumferential direction of the cutout portion. It is more than twice the length of. Moreover, more preferable pitch is 10-18 micrometers.

As the scribing wheel for brittle material of the present invention, an outer diameter of 1 to 20 mm and a converging angle of the circumferential ridge can be adopted, and more preferably, an outer diameter of 1 to 5 mm and a circumference. The angle of convergence of the ridge is 100 ° to 115 °.

Moreover, in the scribing wheel for brittle materials of this invention, it is preferable that the said notch part shall be in the range of 1 micrometer or more and less than 9 micrometers in the circumferential direction.

In the circumferential length of the cutout, the scribing wheel tends to have better permeability to brittle material, and in the circumferential length of the cutout, the scribing wheel tends to improve the end surface strength of the brittle material. There is this. In the scribing wheel for brittle materials of the present invention, the length in the circumferential direction of the cutout portion is set to be in the range of 1 µm or more and less than 9 µm, so that the brittle material has a balance between the end surface strength of the divided surface of the permeability and the brittle material. Scribing wheel. Moreover, the length of the circumferential direction of a more preferable notch part is 1-7 micrometers, and the length of the circumferential direction of a more preferable notch part is 1-5 micrometers.

Moreover, in the scribing wheel for brittle materials of this invention, it is preferable to make the depth of the said notch part into the range of 0.3-0.7 micrometer.

In the scribing wheel having a deep depth of cutout, permeability to brittle material tends to be good, and in the scribing wheel having a shallow depth of cutout, there is a tendency that the end surface strength of the divided surface of the brittle material is improved. In the scribing wheel for brittle materials of the present invention, since the depth of the cutout is in the range of 0.3 to 0.7 µm, the scribing wheel for brittle materials in which the balance between the permeability and the end surface strength of the divided surface of the brittle material is balanced. Becomes More preferably, the depth of the cutout portion is 0.4 to 0.6 mu m.

Further, in the scribing wheel for brittle material of the present invention, the brittle material scribing wheel has a shaft hole through which a pin for axially supporting the wheel penetrates or is formed integrally with the pin. It is preferable that it is an integral wheel.

According to the scribing wheel for brittle materials of the present invention, since a stable scribe line is formed, a brittle material substrate with stable quality after scribing is obtained.

Moreover, in order to achieve the said objective, the brittle material scribing apparatus of this invention is a brittle material board | substrate loading means (for example, a rotatable table) which loads a brittle material board | substrate, and the brittle material board | substrate mounted by the said loading means. And a scribing wheel mounting portion for moving any relative to the scribing wheel mounting portion and the scribing wheel for any one of the above-mentioned brittle materials attached to the scribing wheel mounting portion.

According to the scribing apparatus of the brittle material of the present invention, when cutting the brittle material, it is possible to prevent the skipping of the intersection point during scribing, and to reduce the quality of the cross section of the glass substrate after the separation, without excessive degradation of the vertical cracks during scribing. A scribing apparatus is obtained in which there is no fall of the end member during conveyance due to high permeation, thereby enabling stable conveyance.

Further, in order to achieve the above object, the manual scribe tool for brittle materials of the present invention is characterized by being pivotally mounted to the above-described brittle material scribing wheel in a holder provided at the end of a bag.

According to the manual scribing tool for brittle materials of the present invention, a manual scribe tool for brittle materials which prevents skipping of intersection points during scribing when cutting brittle materials and does not deteriorate the quality of the cross section of the glass substrate after separation Obtained.

Figure 1a is a front view of the scribing wheel of the present invention, Figure 1b is a side view of the scribing wheel of Figure 1a.
FIG. 2A is an enlarged view of portion IIA of FIG. 1B, and FIG. 2B is an enlarged view of portion IIB of FIG. 2A;
3 is a front view of a manual scribe tool of the present invention.
4 is a front view of a conventional scribe device.
5A is a diagram for explaining a step of dividing a glass substrate by a conventional SBSB method, and FIG. 5B is a diagram for explaining a step of dividing a glass substrate by a conventional SSBB method.
6A is a schematic front view of a conventional scribing wheel, and FIG. 6B is a schematic right side view and a partial enlarged view of the scribing wheel of FIG. 6A.
Fig. 7 is a perspective view illustrating an intersection skip phenomenon that occurs when cross scribing.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail based on drawing. However, embodiment shown below shows an example of the scribing wheel for embodying the technical idea of this invention, the scribing apparatus of the brittle material substrate using this, and the scribe tool, and It is not intended to be specific to the scribing apparatus and the scribing tool of the used brittle material substrate, and this invention is adaptable to the thing of other embodiment contained in a claim. In addition, in each drawing used for the description in this specification, in order to make each member into the magnitude | size which can be recognized in drawing, it scales suitably for each member, and is necessarily proportional to an actual dimension. It is not displayed.

In addition, the brittle material substrate to be processed in the present invention is not particularly limited in terms of form, material, use, and size, and may be a substrate formed from a single plate or a bonded substrate obtained by bonding two or more single plates. A thin film or semiconductor material may be attached or included on the surface or inside. Moreover, the said brittle material board | substrate becomes an object of the scribe by the scribing wheel of this invention even if the thin film etc. which do not correspond to a brittle material adhere to the surface.

Glass, ceramics, semiconductors (silicon, etc.), sapphire, etc. are mentioned as a material of the brittle-material board | substrate of this invention, The use is for a liquid crystal display panel, a plasma display panel, an organic electroluminescent display panel, and a surface electric field display (SED). FPD panels, such as a field emission display (FED) panel, such as a panel, are mentioned. In addition, "center line average roughness Ra" used in this specification is one of the parameter which shows the surface roughness of the industrial product prescribed | regulated by JISB0601, and is an arithmetic mean value extracted randomly from the surface of a target object.

First, the shape of the scribing wheel which concerns on embodiment of this invention is demonstrated using FIG. 1A is a front view of the scribing wheel of the present invention viewed from a direction orthogonal to its axis of rotation, and FIG. 1B is a side view of the scribing wheel of FIG. 1A. 2A is an enlarged view of the IIA portion of FIG. 1B, and FIG. 2B is an enlarged view of the IIB portion of FIG. 2A.

Moreover, the scribing wheel 10 of this embodiment forms a scribe line in this brittle material board | substrate by rolling-moving in the state which pressed against brittle material board | substrates, such as glass, and from the scribe line with formation of a scribe line. It is a scribing wheel for brittle materials which forms the vertical crack extended in the thickness direction of a brittle material board | substrate. The scribing wheel 10 of this embodiment can be attached to the scribing head 55 of the conventional scribing apparatus 50 demonstrated using FIG. 4 instead of the conventional scribing wheel 60, for example. will be.

As shown in FIG. 1 and FIG. 2, in the scribing wheel 10 of the present embodiment, the outer circumferential portion where the bottoms of the two truncated cones 12 sharing the rotating shaft 11 cross each other and the circumferential ridges 13 are formed. 14 and the plurality of cutouts 15 and the projections 16 formed in the circumferential direction along the circumferential ridge 13.

The circumferential ridge 13 is formed by performing a grinding process toward the radially outer side from an axial center, and grinding streak remains on the surface of the outer peripheral edge part 14 which was grind | processed. The outer peripheral portion 14 is formed to have a convergence angle α. The scribing wheel 10 is a disk-shaped wheel having a shaft hole 17 through which a pin (not shown) for axially supporting the scribing wheel 10 passes. The material of the scribing wheel 10 is preferably cemented carbide, sintered diamond, ceramics or cermet.

The outer circumferential edge portion 14 is constituted by the inclined surfaces of the two truncated cones 12, and the grinding marks remain after the grinding process for forming the circumferential ridges 13, but the centerline average roughness Ra of the inclined surface is, for example, 0.05. It is processed so that it may be 0.3 micrometer or less in micrometers. For this reason, compared with the conventional grinding process in which the centerline average roughness Ra is larger, the whole amount of the cutting edge constituent material to be cut can be reduced, whereby the wear of the projections 16 is suppressed and the life can be greatly extended. have.

The circumferential ridge 13 has fine irregularities formed by the grinding streaks of the inclined surface of the truncated cone 12 constituting the outer circumferential portion 14, and the centerline average roughness Ra of the irregularities is, for example, 0.05 µm or more and 0.20 µm. It becomes as follows. Thereby, when forming the notch 15 on the circumferential ridge 13, the height position (position in the radial direction) of the circumferential ridge 13 which starts processing of the notch 15 can be easily determined. Will be.

As shown in FIGS. 2A and 2B, which are partially enlarged views of FIG. 1A, the cutouts 15 of the scribing wheel 10 are formed at the pitch P, and the length a in the circumferential direction of the protrusions 16 It is made shorter than the length b of the circumferential direction. Moreover, the projection 16 is comprised by the part of the circumference ridge 13 which has a length in the circumferential direction which the circumference ridge 13 cut | disconnected and remained. The notch 15 is formed by cutting a roughly V-shaped groove from the flat circumferential ridge 13 at a depth h for each pitch P. FIG. By the formation of such cutouts 15, the projections 16 having a height h are formed on the circumferential ridges 13 for each pitch P. FIG. The portion corresponding to the circumferential ridge 13 of the projection 16 has fine concavities and convexities formed by grinding streaks of the inclined surface of the truncated cone 12, and the centerline average roughness Ra of the concavities and convexities is 0.05 µm or more and 0.20 µm or less. It is.

As shown in FIG. 2B, the cutout portion 15 has a cutout surface 18 cut out toward the radially inner side of the bottom of the scribing wheel 10, and is provided at an end portion 13a of the protrusion 16. Tangential line C intersects notch 18 with angle (theta) of 15-60 degrees. That is, if the tangent C at the end 13a of the projection 16 intersects the cutout surface 18 at an angle perpendicular to or close to a right angle, the surface of the projection 16 to the substrate surface at the end 13a of the projection 16. Digging improves, but wear of the end 13a of the projection 16 is faster, and if the tangent C at the end 13a of the projection 16 intersects the notched surface 18 at an angle of 30 degrees or less. The indentation to the substrate surface at the end 13a of the projection 16 worsens. Thus, by setting the range of angle (theta) to 15-60 degrees, the scribing wheel dent to the surface of a board | substrate can be kept favorable while aiming at extending the lifetime of the scribing wheel 10. FIG.

Since the notch 15 has a substantially V-shape as viewed from the axial direction of the truncated cone 12, the depth of the notched portion 15 (the height of the projection 16) h is changed by changing the angle of the center of the V-shape. While securing, the length a of the circumferential direction of the notch 15 and the length b of the circumferential direction of the projection 16 can be easily adjusted.

Here, an example of the manufacturing method of the scribing wheel 10 is demonstrated. First, a cylindrical disk serving as the parent of the scribing wheel 10 is prepared, and the outer peripheral edges 14 on both sides are ground to the cylindrical disk, so that the inclined surfaces of the two truncated cones 12 cross each other so that the circumferential ridgeline (13) is formed. At the time of this grinding process, it is preferable to make the axial curvature of the circumferential ridge 13 derived from the surface roughness of the inclined surface of the truncated cone 12 and surface roughness become small.

The inclined surface of the truncated cone 12 has a centerline average roughness Ra of, for example, 0.05 µm or more and 0.35 µm or less, and the circumferential ridge 13 has fine irregularities formed by grinding streaks of the inclined surface of the truncated cone 12. The particle size of the grindstone used is selected so that the centerline average roughness Ra of the unevenness may be, for example, 0.05 µm or more and 0.20 µm or less. Thus, by suppressing the inclined surface of the truncated cone 12 and the surface roughness of the circumferential ridge 13, the scribe line formed becomes thin and constant in width, and is obtained by scribing by the scribing wheel 10. Generation | occurrence | production of notch (chipping) etc. is suppressed in the split surface of the glass substrate G after separation.

Next, the notch 15 is formed in the circumferential ridge 13. As an example of forming the notch 15, the notch 15 which forms the V-shaped shape seen from the axial direction of the truncated cone 12 by laser beam is formed in the outer peripheral edge part. According to this method, by changing the center angle of the V-shape, the length a in the circumferential direction of the notch 15 and the length b in the circumferential direction of the protrusion 16 are easily maintained while the height h of the projection is kept constant. I can adjust it.

The outer diameter of the scribing wheel 10, the pitch P of the cutouts 15, the length a in the circumferential direction of the cutouts 15 and the length b of the circumferential direction of the protrusions 16, the depth of the cutouts 15, and The specification of the scribing wheel such as the convergence angle α of the outer circumferential portion 14 is appropriately set according to the kind, thickness, thermal history, and desired quality of the brittle material divided surface to be cut.

As an example of the conditions of the scribing wheel in embodiment, the outer diameter of the wheel is 1-20 mm, the pitch of the notch 15 is 8 micrometers or more and 18 micrometers or less, and the depth of the notch 15 is 0.3-0.7. And the convergence angle of the circumferential ridges 13 is 90 to 120 degrees. As a more preferable scribing wheel condition, the wheel outer diameter is 1 to 7 mm, and as a more preferable scribing wheel condition, the outer diameter of the wheel is 1 to 5 mm and the pitch of the cutout 15 is 10 µm or more 18 The thickness of the notch 15 is 0.4-0.6 micrometer or less, and the convergence angle of the circumferential ridge 13 is 100-115 degrees. In addition, the lower limit of the pitch of the notch 15 may be selected so as to be more than twice the length in the circumferential direction of the notch from the viewpoint of the end face strength and the edge of the blade.

In general, the use of a scribing wheel with a deep cutout tends to improve permeability to brittle material (especially less intersection skipping during cross scribing), and a scribing wheel with a shallow depth of cutout Although the end surface strength of the brittle material tends to be improved by using the present invention, in the present embodiment, the depth of the cutout portion 15 is controlled in a relatively shallow range, and the pitch of the cutout portion is controlled in a relatively short range, thereby providing permeability and Both effects of the end face strength are exerted.

Also, in general, the use of a shorter (multipart) scribing wheel with a notched pitch tends to improve permeability to brittle material, and a longer (less divided) scribing pitch By using the wheel, the end surface strength of the brittle material tends to improve, but in the present embodiment, the pitch of the cutout portion is controlled in a relatively short range, while the depth of the cutout portion is controlled in a relatively shallow range, By controlling the length in the circumferential direction to a relatively short range, good effects are exhibited in both permeability and end face strength.

In addition, in general, it is preferable to use a scribing wheel having a small outer diameter for dividing the bonded glass substrate, and for example, a scribing wheel having an outer diameter of 1 to 4 mm is suitable. On the other hand, for dividing the raw material end plate, it is preferable to use a scribing wheel having a large outer diameter, for example, a scribing wheel having an outer diameter of 4 to 20 mm is suitable.

In general, the scribing wheel having a large convergence angle of the circumferential ridge tends to have a long life, and in view of the service life, the convergence angle of the circumferential ridge is preferably 90 to 120 °, for example, and 100 to 115 degrees. It is especially preferable that it is °.

Moreover, generally, the penetrating property to brittle material tends to become favorable by using the scribing wheel with a long circumferential direction of a notch, and brittle by using a scribing wheel with a short circumferential length of a notch. Although the strength of the end face of the material tends to improve, in the present embodiment, the permeability and the pitch of the cutouts are made shorter than the lengths of the cutouts in the circumferential direction than the lengths in the circumferential direction of the projections. Both effects of the end face strength are exerted.

The scribing wheel of the above embodiment according to the present invention has good permeability, and thus, skipping of intersection points in the cross scribe is less likely to occur, and has a thin thickness that cannot adopt an outer contact scribe by a conventional normal wheel. The substrate (for example, substrate having a thickness of 0.3 mm or less, particularly 0.2 mm or less) also exhibits an excellent effect of being able to cope with an inner contact scribe.

[Experimental Example]

In the case of a conventional normal wheel (first comparative example) and the scribing disclosed in Patent Document 1 described above, the quality of the divided section (cross section strength) when cross scribing the scribing wheel according to the above embodiment is performed. It confirmed by performing the contrast experiment with the case of a ice wheel (2nd comparative example). This contrast experiment was cross scribed using the corresponding scribing wheel in both a 1st direction and a 2nd direction about each of embodiment, a 1st comparative example, and a 2nd comparative example. In addition, the scribing wheel of the second comparative example is outside the scope of the present invention in that the pitch of the cutout portion is at least 20 µm.

First, a normal wheel made of PCD having a thickness of 0.65 mm, an outer diameter of 2.1 mm, and a convergence angle of the circumferential ridge line corresponding to the first comparative example was 135 ° was produced. Subsequently, using the normal wheel made of this PCD, by the laser irradiation method, as shown in FIG. 1 and FIG. 2, the depth of cutout part is 0.5 micrometer, the number of cutouts formed 400, and pitch of 16.4 micrometer of embodiment A scribing wheel was produced. Similarly, the scribing wheel of the 2nd comparative example of 1.5 micrometers in depth of a cutout part, the number of 5 cutout parts formed, and a pitch of 1.319mm was produced.

Thus, the scribing wheel of embodiment produced, the 1st comparative example, and the 2nd comparative example was used for the cross scribe test as shown below. In addition, the used glass substrate is an alkali free glass (OA-10: brand name) single plate made from Nippon Denki Glass Co., Ltd., 0.3 mm in thickness.

In addition, the cross scribe test uses the scribe device shown in FIG. 4 to form (cross scribe) three scribe lines each longitudinally and horizontally at intervals of 100 mm as shown in FIG. 7, and break along the scribe line. And the test piece (100 mm x 100 mm) was obtained. Observe the state of the intersection skipping at this time, and see that "no intersection skip occurs", "the intersection skipped in part" and "the intersection skipped in all" Are shown separately. Moreover, the bending strength was measured about each 20 pieces of test pieces obtained, and the average value was calculated | required.

The bending strength is the center line (the surface of the surface) of two straight lines separated from each other by 50 mm on both sides from the center line on the one side of each test piece (the line divided into two at a size of 100 mm x 50 mm) and the opposite side (the back side). From two straight lines separated from each other by 10 mm on both sides from a line facing the center line, a pressure was applied from the vertical direction with respect to the glass substrate and measured by measuring the stress when broken. Table 1 summarizes the measurement results of the end surface strength of the glass substrate and the results of confirming the permeability (with or without the intersection skip at the intersection of the cross cut).

From the result shown in the said Table 1, the following is understood. That is, the test piece segmented using the scribing wheel which concerns on embodiment of this invention shows the bending strength characteristic substantially equivalent to the test piece segmented by the scribing wheel of a 1st comparative example, and the scribe of the 2nd comparative example It can be seen that the bending strength is better than that of the test piece segmented by the ice wheel. This shows that the test piece segmented using the scribing wheel which concerns on embodiment of this invention has strong end surface strength, and the quality of an end surface is favorable.

Moreover, in the test piece segmented by the scribing wheel of the 1st comparative example, 82% of all the intersections generate | occur | produce and 9% of the intersections generate | occur | produce a part, and there exists no intersection at all. Only 9% of the jumps did not occur. Similarly, in the test piece segmented by the scribing wheel of the second comparative example, there was no intersection skipping in all of them, but 62% of the intersection skippings existed in some portions. Only 38% of the jumps did not occur.

In contrast, in the test piece segmented by the scribing wheel of the embodiment of the present invention, there was no intersection skipping in all, but only 43% of intersection skipping occurred in some. 57% of the time, no intersection skipping occurred. Thereby, the test piece divided | segmented using the scribing wheel which concerns on embodiment of this invention was hard to generate | occur | produce an intersection, and it was confirmed that permeability is very favorable.

Moreover, in the said embodiment, although the example which scribed the glass substrate by attaching the scribing wheel to the scribing apparatus was shown, this invention pivotally mounts the scribing wheel 10 to the holder attached to the edge of a bag. It can also be applied to a manual scribe tool. This manual scribe tool is explained using FIG. 3 is a front view of a manual scribe tool.

As shown in FIG. 3 as a front view, such a scribe tool 20 has the holder 21 in which the scribing wheel 10 is mounted so that replacement is possible, and the rod shape which can attach / detach the holder 21 is possible. It is mainly composed of the handle 22. The handle 22 has an oil chamber 23 formed therein, one end of which forms a coupling portion with the holder 21, and the other end of the handle 22 can attach or detach a cap 24 for supplying lubricant to the oil chamber 23. Equipped with.

In addition, in the said embodiment, although the example which used the laser irradiation method was shown in order to form the notch 15, in consideration of the material and processing efficiency of a scribing wheel, the manufacturing method by a grinding process or an electric discharge process is also employ | adopted. Can be.

10: scribing wheel
11:
12: truncated cone
13: circumferential ridge
13a: end
14: Outer periphery
15: notch
16: turning
17: shaft hole
18: notch
20: scribe tool
21: holder
22: handle
23: oil seal
24: cap

Claims (6)

An outer circumferential edge where a bottom of two truncated cones sharing a rotation axis intersect to form a circumferential ridge, and a plurality of cutouts and protrusions alternately formed in the circumferential direction along the circumferential ridge,
The projection is a scribing wheel for brittle material composed of a portion of the circumferential ridge having a length in the circumferential direction after the circumferential ridge is cut off,
The cutout portion has a length in the circumferential direction of which is shorter than a length in the circumferential direction of the protrusion, and is formed at a pitch of 8 µm or more and 18 µm or less over the entire circumference of the circumferential ridge. Crying Wheel. The scribing wheel for brittle material according to claim 1, wherein the cutout has a length in the circumferential direction of 1 µm or more and less than 9 µm. The scribing wheel for brittle material according to claim 1, wherein the cutout has a depth in a range of 0.3 to 0.7 mu m. The scribing wheel for brittle material according to any one of claims 1 to 3 has a shaft hole through which a pin for axially supporting the wheel penetrates, or is integrally formed with the pin. A scribing wheel for brittle material which is a wheel of the. A substrate loading means for loading a brittle material substrate, a scribing wheel mounting portion relatively moving relative to the brittle material substrate loaded on the loading means, and any one of claims 1 to 4 attached to the scribing wheel mounting portion. The scribing apparatus of a brittle material which comprises the scribing wheel for brittle materials of any one of Claims. The manual scribe tool for brittle materials formed by rotatably pivoting the scribing wheel for brittle materials in any one of Claims 1-4 to the holder provided in the tip of a bag.

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