JP2015003513A - Cutter wheel and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutter wheel capable of machining a scribe line by being inserted into a narrow scribe street, while a blade edge angle maintains an obtuse angle similarly as hitherto, and to provide a manufacturing method thereof.SOLUTION: In a cutter wheel 1A which is formed of a hard material machinable by electrical discharge, and on which a blade edge 2 having an obtuse blade edge angle is formed on the outer peripheral surface by grinding, each hollow part 3 is formed by cutting by electrical discharge machining, each part of right and left slant faces 2a, 2b of the blade edge in the state where a tip part of the blade edge 2 having an obtuse angle is left as it is, on the ridgeline vicinity of the blade edge 2.

Description

  The present invention relates to a cutter wheel (also referred to as a scribing wheel) used when a scribe line (grooving groove) is processed or divided in a brittle material substrate such as a ceramic substrate or a glass substrate, and a manufacturing method thereof.

  When cutting brittle material substrates such as alumina, HTCC, LTCC and other ceramic substrates and glass substrates, a scribe line is formed on the substrate surface using a cutter wheel, and then external force is applied along the scribe line from the back side. A method of dividing the substrate into units by bending the substrate is generally known, and is disclosed, for example, in Patent Document 1.

There are various types of substrates to be processed, and some of them must be divided in a state in which unevenness exists on the surface of the substrate. In addition to the substrate having irregularities formed on such a substrate, as shown in, for example, the perspective view of FIG. 8 and the partially enlarged sectional view of FIG. Some have been.
For example, in the ceramic laminated mother substrate W for LED, devices D such as LEDs are mounted on a low-temperature fired ceramic (LTCC) or alumina ceramic (Al ₂ O ₃ ) substrate 11, and the periphery of these devices D is a sheet surface 12. A coating layer 14 made of a silicone resin is formed in which the protrusion 13 and the protrusion 13 are integrally formed, and the device D (LED main body) is thereby sealed. In the conventional board | substrate, the space | interval L1 between the adjacent protrusion parts 13 was about 0.12 mm, and the thickness (height) H of the coating layer 14 was about 0.03 mm.

  Cutter wheels for processing the scribe line S between adjacent protrusions 13 are generally cemented carbide or sintered diamond (PCD), which is a material having excellent tool characteristics such as wear resistance and grindability. The product made from is used. However, since it is repeatedly used in the pressure contact state, the operating environment of the blade edge is poor. Therefore, if the blade tip angle at the tip of the cutter wheel is too sharp, blade spillage tends to occur and the service life of the blade is shortened. If the blade edge angle is too acute, the load component in the vertical direction applied to the substrate at the time of pressure contact becomes large, and load control becomes difficult. In particular, since the diameter of the cutter wheel used is as small as about 1 mm to 7 mm, it is difficult to control the load. Therefore, a cutter wheel having an obtuse edge angle is usually desired.

Therefore, in order to process the scribe line S between the protrusions 13 and 13 of the mother substrate W using the cutter wheel having an obtuse edge as described above, the protrusions in the pattern of the coating layer 14 of the mother substrate W The distance L <b> 1 between 13 and 13 is designed to be about three times or more the height H of the protrusion 13. That is, numerical values of the interval L1 and the height H are designed so that scribing can be performed by a cutter wheel having an obtuse cutting edge, and conversely, the cutter wheel having an allowable cutting edge angle at such an interval L1 or height H. Was used.
For example, as shown in FIG. 9, even when a cutter wheel K having a cutting edge angle α (for example, 105 degrees) is used, a gap C can be left between the cutting edge slope and the upper edge of the protrusion 13. The scribe line S can be processed without touching the projecting portion 13 and being damaged.

Japanese Patent No. 3787489

  In recent years, from the viewpoint of suppressing the product cost by increasing the number of unit boards cut out from each mother board, the area of the unit board cut out tends to be further miniaturized. For example, when manufacturing an LED, it is required to reduce the planar size of the unit substrate from the current 2.0 mm × 1.6 mm to 1.0 mm × 0.8 mm. Furthermore, not only the area of the unit substrate but also the width of the scribe street, which is a region for forming the scribe line S, that is, the distance L1 between the protrusions 13 and 13 is small for miniaturization and mass production. It is requested to do. Specifically, the distance L1 is wide at the current 0.12 mm and needs to be reduced to 0.06 mm or less.

  However, when the interval L1 is reduced to 0.06 mm, the cutter wheel K having an obtuse cutting edge angle α as shown in FIG. 10 (see FIG. 9), the inclined surfaces of the cutting edge (the inclined surfaces on both sides of the cutting edge ridge line). ) Comes into contact with the upper edge of the protrusion 13 and damages the protrusion 13, and cannot be used. Therefore, in order to avoid contact, it is necessary to make the blade edge angle α ′ as shown by a virtual line (two-dot chain line) in FIG. 10 an acute angle of 90 degrees or less. However, when an acute blade edge is used, blade spillage or the like is likely to occur as described above, and the service life is shortened. In addition, when the blade edge becomes a sharper angle, hard particles such as tungsten carbide and diamond used for the material of the cutter wheel are likely to drop off, the strength of the blade edge is significantly reduced, and polishing processing becomes difficult. In addition, various problems such as difficulty in controlling the load during scribing occur.

  Therefore, the present invention maintains the obtuse angle as in the prior art, and even if the scribe street between adjacent protrusions is narrow (specifically, 0.06 mm or less), the cutting edge is It aims at providing the cutter wheel which can perform a scribe process, and its manufacturing method, without contacting.

  In order to solve the above problems, the present invention takes the following technical means. That is, the cutter wheel of the present invention is a cutter wheel that is formed of a hard material that can be subjected to electric discharge machining, and the edge angle of the edge of the edge formed by the left and right slopes is an obtuse angle. In addition, a part of the left and right slopes following the tip portion is excised by electric discharge machining to form a recess that is depressed in the left and right slopes.

  Further, the cutter wheel manufacturing method of the present invention is a cutter wheel manufacturing method in which a cutting edge ridge line is formed by left and right slopes, and grinding is performed on the outer peripheral surface of a disk-shaped disc body made of a hard material capable of electric discharge machining. The left and right slopes where the edge angle of the edge of the edge is obtuse is machined by machining, then the tip part near the edge of the edge is left as an obtuse edge, and part of the left and right slopes following the tip part is excised by electric discharge machining. Thus, depressions recessed in the left and right slopes are formed.

  Here, the blade edge angle of the cutter wheel is preferably 90 to 150 degrees. Thereby, the shape and dimension of a hollow part can be selected according to the space | interval and height between the protrusion parts of the board | substrate scribed, and it can avoid contacting a board | substrate. Further, as a hard material capable of electric discharge machining, a cemented carbide, sintered diamond, conductive single crystal diamond or polycrystalline diamond may be used. Moreover, you may make it form a continuous unevenness | corrugation along a blade edge ridgeline.

  According to the present invention, a part of the left and right slopes following the obtuse cutting edge part is excised to form a depressed recess, so that the left and right width at the cutting edge tip part of the cutter wheel is narrowed by the amount of excision. Therefore, even if the scribe street between adjacent protrusions is narrow, it is possible to scribe without contacting the protrusion edge. In addition, the machining of the recess portion of the cutter wheel is an electrode by electric discharge machining with respect to a normal cutter wheel having an obtuse cutting edge angle which is a conventional product (by grinding processing) and where the recess portion is not formed. Since it can be manufactured only by an additional process of pressing the (wire or jig electrode) against the inclined surface of the blade edge, even a minute part can be manufactured easily and accurately. Moreover, since the dent part excised by electric discharge machining is not a part that contacts and scribes to the substrate to be processed at the time of scribing, it does not require post-processing such as polishing finishing and can be used as a product as it is. And since the tip of the cutting edge leaves the obtuse edge of the original cutter wheel, the cutting edge strength necessary for scribing can be maintained as before, and it can be used for a long time without spilling. it can. Furthermore, there is an effect that the load control can be performed with the same ease as in the prior art.

The front view which shows the cutter wheel which concerns on this invention. The figure at the time of giving a hollow part by the wire cut electric discharge machining to the blade edge | tip of a cutter wheel. The expanded sectional view of the blade tip part of a cutter wheel. The enlarged view which shows the use condition of a cutter wheel. The figure at the time of giving a hollow part to the cutter wheel by electric discharge machining. The figure which shows the other example of the sculpture electric discharge machining method similar to FIG. The front view which shows the example of a change of the process shape of a hollow part. The perspective view which shows an example of the mother board | substrate used as a process target. The partial expanded sectional view of FIG. Sectional drawing which shows the virtual example at the time of making the protrusion part of a mother board | substrate narrow.

  Below, the cutter wheel of this invention and its manufacturing method are demonstrated in detail based on figures. Here, a cutter wheel that is optimal for scribing a mother substrate having a protrusion on the substrate surface will be described as an example.

Fig.1 (a) is a front view which shows the cutter wheel 1 which concerns on this invention, Comprising: It is produced with the hard material (for example, metal) which has electroconductivity and is capable of electric discharge machining. Specifically, it is made of, for example, cemented carbide or sintered diamond, single crystal diamond having conductivity, or polycrystalline diamond. In order to impart conductivity to diamond, a method of doping impurities such as boron during synthesis is known. Polycrystalline diamond includes diamond synthesized by chemical vapor deposition and diamond synthesized by sintering fine diamond particles without using a binder. Sintered diamond generally has conductivity by including cobalt or the like as a binder, but in order to enable more precise electrical discharge machining, diamond particles mixed with impurities to provide conductivity were used. Sintered diamond can also be used.
This cutter wheel 1 uses a cutter wheel 1A as shown in FIG. 1 (b) having a blade edge 2 formed on the outer peripheral surface of a disk-shaped disk with an edge angle of the edge of the blade edge being an obtuse angle, for example, an angle of 105 degrees. Manufactured. That is, while leaving the front-end | tip part of the blade edge ridgeline vicinity which has an obtuse cutting edge angle, a part of right-and-left slope 2a, 2b of the blade edge 2 following a front-end | tip part is excised by electric discharge machining, and FIG. ) Is formed.

The cutter wheel 1A shown in FIG. 1 (b) before processing the recess 3 is cut into a general substrate scribe cutter wheel having a smooth and flat ridge line at the tip of the blade edge, that is, a cutting edge ridge line part. It is a normal cutter wheel (normal cutter wheel) having no notches (uneven portions), in which the blade edge 2 is produced by grinding and the surface of the blade edge is polished. The diameter is about 1.0 mm to 7.0 mm, preferably 1.0 to 3.0 mm, and the thickness is about 0.4 mm to 1.1 mm. These are used as cutter wheels as they are and are stocked as inventory.
In addition, as a cutter wheel before processing the hollow part 3, the cutter wheel (grooved cutter wheel) 1A provided with the small unevenness | corrugation (notch) 8 which continued along the blade edge ridgeline as shown in FIG.1 (c). 'Can also be used. The grooved cutter wheel 1A ′ includes a penet (registered trademark) cutter wheel and an APIO (registered trademark) cutter wheel manufactured by Samsung Diamond Co., Ltd. The cutter wheel according to the present invention can be formed by performing additional processing based on the cutter wheels 1A and 1A ′ shown in FIGS. 1B and 1C.

Next, FIG. 2 shows an example of a method for machining the recess 3 on the slopes 2a and 2b of the cutting edge 2 of the cutter wheel 1 by wire-cut electric discharge machining.
In this method, as shown in FIGS. 2A and 2B, a rotating shaft (not shown) is fitted in the shaft hole 4 of the cutter wheel 1A (or 1A ′), and the wire electrode is rotated while rotating the cutter wheel 1A. 5 is moved to one slope 2a of the blade edge 2, and a part of the slope 2a is excised.
Next, as shown in FIG. 2C, the wire electrode 5 is moved to the inclined surface 2b on the opposite side of the blade edge 2, and a part of the inclined surface 2b is cut off. As a result, as shown in FIG. 2 (d), the left and right slopes 2a, 2b following the tip portion of the blade edge 2 are partly depressed, and the depressions 3, 3 are formed to narrow the width of the blade tip portion. The cutter wheel 1 is produced.

As shown in the enlarged views of FIGS. 3 and 4, the recess 3 formed in this way has the left and right widths L <b> 2 of the cutting edge tip portion of the cutter wheel 1 left as an obtuse cutting edge angle as a processing target substrate. The notch shape of the recess 3 so that the cutter wheel 1 and the protrusion 13 do not come into contact with each other so as to be smaller than the width L1 of the scribe street planned between the upper adjacent protrusions 13 and 13. And notch dimensions are selected.
For example, when the interval L1 between the protrusions 13 is 0.06 mm and the height H is 0.03 mm, the width L2 of the obtuse tip portion of the cutter wheel 1 is 0.04 mm and is 0 from the edge of the blade edge. The height h at the 0.03 mm position is 0.05 mm. Note that the width L2 of the tip portion of the cutter wheel 1 is in the range of 0.01 mm to 0.05 mm according to the width of the interval L1 between the projections 13 and the height of the tip portion according to the height H of the projection 13. h can be selected in the range of 0.005 mm to 0.06 mm. Moreover, it is preferable to select so that the difference between the widths L1 and L2 is 0.02 mm or more.
Accordingly, as shown in FIG. 4, when the cutting edge 13 of the cutter wheel 1 is positioned within the width L1 of the scribe street between the protrusions 13 and 13 of the substrate to be processed and the scribe line S is processed, the protrusion 13 Can be scribed with a sufficient gap C between them.
In FIG. 4, the scribe street of the substrate to be processed is also covered with the resin layer, but the substrate may be exposed at the scribe street portion.

FIG. 5 shows a cutter wheel machining method by die-sinking electric discharge machining.
In this method, a pair of jig electrodes 6a and 6b having a reversal shape of a portion to be excised are alternately arranged from opposite sides with respect to the blade slopes 2a and 2b of the cutter wheel 1A that is supported by a rotating shaft and rotates. Alternatively, the depression 3 is processed by pressing simultaneously.

Moreover, FIG. 6 shows an example of the other processing method of the cutter wheel by die-sinking electric discharge machining.
In this method, the recessed portion 3 is processed by pressing a jig electrode 7 having a female die 7a having an inverted shape of a portion to be cut off against the blade slopes 2a and 2b of the rotating cutter wheel 1A.

  The wire cut electric discharge machining and the sculpture electric discharge machining described above are performed by immersing the cutter wheel 1A in a liquid such as water or oil as an electric discharge derivative.

  In the above embodiment, the shape of the recess 3 is a perfect circular arc. However, as shown in FIGS. 7A and 7B, the upper side of the slope adjacent to the tip of the obtuse edge 2 is deepened. It can also be formed so that it gradually becomes shallower as it goes down the slope. FIG. 7A shows an example in which the dent of the dent portion 3 is shallow, and FIG. In particular, in a small-diameter cutter wheel, the width of the inclined surface of the cutting edge 2 becomes narrow. In such a case, as shown in FIG. 7C, the recess 3 is completely formed with the side surface 9 of the cutter wheel 1. It may be continuous.

The processed cutter wheel 1 can be narrowed by the width of the tip portion of the blade edge 2 cut away by the recess 3, and as shown in FIG. 4, a scribe street between adjacent protrusions 13 and 13. Even if the width L1 is narrow, it is possible to scribe without contacting the projection edge. Moreover, since the process of the hollow part 3 can be performed by the operation | work which only presses the wire and jig | tool electrode which become an electrode by electrical discharge machining with respect to the cutter wheel 1A which has an obtuse cutting edge angle, a fine part Even this processing can be easily and accurately produced.
In addition, since the portion cut out by electric discharge machining is not a portion that directly contacts the substrate at the time of scribing, post-treatment such as polishing finish is not necessarily required, and the product can be used as it is.
Furthermore, since the tip of the blade tip leaves a blade edge ridge line having a blade edge angle that is an obtuse angle of the original cutter wheel 1A, the strength of the blade edge necessary for scribing can be maintained in the same manner as before, and blade spilling occurs. It is difficult to use for a long time.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified to said embodiment. For example, in the above-described embodiment, an example of using sintered diamond obtained by sintering diamond particles together with a binder such as cobalt at a high temperature and high pressure as a material that can be processed by electric discharge, which is a material of a cutter wheel, is shown. Alternatively, a cemented carbide that is a metal material may be used. In addition, sintered diamond using diamond particles imparted with conductivity by adding impurities, single crystal diamond or polycrystalline diamond imparted with conductivity by adding impurities, and the like can be used. Moreover, in the said Example, although the blade edge | corner angle (alpha) was 105 degree | times, it is possible to implement within the range of 90 degree | times-150 degree | times. Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

  The present invention is applied to a cutter wheel used when processing or dividing a scribe line on a brittle material substrate such as a ceramic substrate or a glass substrate, in particular, a mother substrate having protrusions formed on the substrate surface. The

L1 Spacing between projections on the mother substrate L2 Left and right width S of the tip of the cutter wheel S Scribe line α Cutting edge angle h Depression height 1 Cutter wheel 1A, 1A ′ Cutter wheel 2 before cutting the depression 2 Cutting edges 2a, 2b Cutting edge Left and right slope 3 depression

Claims (6)

In the cutter wheel which is formed of a hard material capable of electric discharge machining, and the edge angle of the edge of the edge formed by the left and right slopes is an obtuse angle,
The tip portion in the vicinity of the edge of the cutting edge is left as an obtuse cutting edge, and a part of the left and right slopes following the tip part is excised by electric discharge machining to form a recessed portion that is recessed in the left and right slopes. Cutter wheel.   The cutter wheel according to claim 1, wherein the blade edge angle is 90 degrees to 150 degrees.   The cutter wheel according to claim 1 or 2, wherein the hard material is cemented carbide, sintered diamond, conductive single crystal diamond or polycrystalline diamond.   The cutter wheel in any one of Claims 1-3 in which the unevenness | corrugation which followed the said blade edge ridgeline was formed. A manufacturing method of a cutter wheel in which a cutting edge ridge line is formed by left and right slopes,
On the outer peripheral surface of a disk-shaped disc body made of a hard material that can be electrodischarge machined, the left and right slopes where the edge angle of the edge of the edge is obtuse by grinding,
Next, leaving the tip part near the edge of the edge of the edge as an obtuse edge, part of the left and right slopes following the tip part is excised by electric discharge machining to form a recessed part recessed in the left and right slopes A method for manufacturing a cutter wheel.   The method for manufacturing a cutter wheel according to claim 5, wherein an angle of the blade edge is 90 degrees to 150 degrees.

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