TW201444629A - Cutter wheel and its manufacturing method thereof - Google Patents

Cutter wheel and its manufacturing method thereof Download PDF

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Publication number
TW201444629A
TW201444629A TW103113380A TW103113380A TW201444629A TW 201444629 A TW201444629 A TW 201444629A TW 103113380 A TW103113380 A TW 103113380A TW 103113380 A TW103113380 A TW 103113380A TW 201444629 A TW201444629 A TW 201444629A
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Taiwan
Prior art keywords
blade
cutter wheel
angle
ridge line
obtuse angle
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TW103113380A
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Chinese (zh)
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TWI571340B (en
Inventor
Hiroyoshi Hayashi
Masakazu Takeda
Jumpei Iida
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Mitsuboshi Diamond Ind Co Ltd
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Publication of TW201444629A publication Critical patent/TW201444629A/en
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Publication of TWI571340B publication Critical patent/TWI571340B/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • C03B33/105Details of cutting or scoring means, e.g. tips
    • C03B33/107Wheel design, e.g. materials, construction, shape
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D3/00Cutting work characterised by the nature of the cut made; Apparatus therefor
    • B26D3/08Making a superficial cut in the surface of the work without removal of material, e.g. scoring, incising
    • B26D3/085On sheet material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Abstract

The present invention provides a cutter wheel and its manufacturing method thereof, whose front end angle of blade is maintained the same obtuse angle as that in the prior art, and which can be inserted into the scribing path with a narrow width to proceed machining and scribing lines. The solution means is: a cutter wheel 1A which can be formed of the hard material that can be machined by discharging, the cutter wheel has a front end 2 of blade. The front end angle of blade is formed to have an obtuse angle on the outer periphery surface by grinding-machining. Near the ridge line of the front end 2 of blade, one portion of the left and right inclined planes 2a, 2b is cut by discharging machining in the state that the front end portion of the front end 2 of blade with the obtuse angle still remains, so as to form the depression part 3.

Description

刀輪及其製造方法 Cutter wheel and manufacturing method thereof

本發明係關於一種使用於對陶瓷基板或玻璃基板等之脆性材料基板進行加工、分斷刻劃線(切槽)時之刀輪(亦稱為刻劃輪)及其製造方法。 The present invention relates to a cutter wheel (also referred to as a scoring wheel) used for processing a brittle material substrate such as a ceramic substrate or a glass substrate, and dividing the scribe line (notched), and a method of manufacturing the same.

在對氧化鋁(alumina)、HTCC、LTCC等之陶瓷基板或玻璃基板等之脆性材料基板進行分斷之加工中,一般已知有例如揭示於專利文獻1之方法,該方法係使用刀輪於基板表面形成刻劃線,之後沿刻劃線從背面側施加外力使基板撓曲,藉此將基板分斷成每個單位。 In the processing of breaking a brittle material substrate such as a ceramic substrate such as alumina, HTCC or LTCC, or a glass substrate, a method disclosed in, for example, Patent Document 1 is known, which uses a cutter wheel. A scribe line is formed on the surface of the substrate, and then an external force is applied from the back side along the scribe line to deflect the substrate, thereby dividing the substrate into each unit.

關於成為加工對象之基板,存在有各種之基板,且其中亦有必須在基板之表面存在凹凸之狀態下進行分斷者。對於如此般之基板,除了於基板本身形成有凹凸之外,例如亦有如於圖8之立體圖、及圖9之一部分放大剖面圖所示般,於基板上固著有突起物者。 Regarding the substrate to be processed, various substrates exist, and in some cases, it is necessary to perform the breakage in the state where the surface of the substrate has irregularities. In the case of such a substrate, in addition to the unevenness formed on the substrate itself, for example, as shown in the perspective view of FIG. 8 and the enlarged cross-sectional view of a portion of FIG. 9, the protrusion is fixed to the substrate.

例如在LED用之陶瓷積層母基板W中,於低溫燒成陶瓷(LTCC)或氧化鋁陶瓷(Al2O3)基板11上,安裝有LED等之元件D,於該等之元件D周圍形成有呈一體地形成有薄片面12與突起部13之矽樹脂製之被覆層14,藉此將元件D(LED本體)密封。在習知之基板中,相互鄰接之突起部13間之間隔L1,約為0.12mm,被覆層14之厚度(高度)H約為0.03mm。 For example, in the ceramic laminated mother substrate W for LEDs, an element D such as an LED is mounted on the low temperature fired ceramic (LTCC) or alumina ceramic (Al 2 O 3 ) substrate 11, and formed around the elements D. The coating layer 14 made of a resin sheet in which the sheet surface 12 and the protrusion portion 13 are integrally formed is formed, whereby the element D (LED body) is sealed. In the conventional substrate, the interval L1 between the adjacent protrusions 13 is about 0.12 mm, and the thickness (height) H of the coating layer 14 is about 0.03 mm.

用於在鄰接之突起部13間加工刻劃線S之刀輪,一般而言, 係使用耐磨耗性或研削性等之工具特性優異之材料即超硬合金或燒結鑽石(PCD)製之刀輪。然而,由於被以壓接狀態反覆使用,因此刃前端之使用環境惡劣。因此,若將刀輪前端之刃前端角度過於設成非常銳角,則容易產生刀刃鈍化等使刀刃之使用壽命變短。此外,若將刃前端角度過於設成銳角則在壓接時施加於基板之垂直方向之負載成分變大,使負載控制變困難。尤其是,由於所使用之刀輪之直徑約1mm~7mm、非常地小,因此容易使負載控制變困難。因此,通常被期望係具有鈍角之刃前端角度的刀輪。 a cutter wheel for machining a score line S between adjacent protrusions 13 in general, A cutter wheel made of superhard alloy or sintered diamond (PCD) is used as a material having excellent tool properties such as abrasion resistance or grinding property. However, since it is used repeatedly in a crimped state, the use environment of the tip end is bad. Therefore, if the tip end angle of the tip end of the cutter wheel is set to a very acute angle, it is easy to cause the blade edge passivation or the like to shorten the service life of the blade. Further, when the blade tip end angle is excessively set to an acute angle, the load component applied in the vertical direction of the substrate at the time of pressure bonding becomes large, which makes it difficult to control the load. In particular, since the diameter of the cutter wheel to be used is about 1 mm to 7 mm, which is extremely small, it is easy to make load control difficult. Therefore, it is generally desirable to have a cutter wheel having an obtuse blade tip end angle.

故至此為止,為了使用上述之具有鈍角之刃前端的刀輪,於 母基板W之突起部13、13間進行加工刻劃線S,而將母基板W之被覆層14之圖案中的突起部13、13間的間隔L1,設計成相對於突起部13之高度H約3倍以上。亦即,以利用具有鈍角之刃前端的刀輪進行之刻劃為可行之方式,設計間隔L1或高度H之數值,此外,使用了在如此般之間隔L1或高度H中所容許之刃前端角度之刀輪。 Therefore, in order to use the above-mentioned cutter wheel having the tip end of the obtuse angle, The scribe line S is formed between the protrusions 13 and 13 of the mother substrate W, and the interval L1 between the protrusions 13 and 13 in the pattern of the cladding layer 14 of the mother substrate W is designed to be the height H with respect to the protrusion 13. About 3 times more. That is, the value of the interval L1 or the height H is designed in such a manner that the scribe is performed by the cutter wheel having the tip end of the obtuse angle, and the front end of the blade which is allowed in such a space L1 or height H is used. Angle cutter wheel.

例如,如圖9所示,即使是使用刃前端角度α(例如105度)之刀輪K,亦能夠在刃前端斜面與突起部13之上端緣部之間留有間隙C,使得能夠在刀刃不接觸傷及突起部13之情況下進行加工刻劃線S。 For example, as shown in FIG. 9, even if the cutter wheel K having the blade tip end angle α (for example, 105 degrees) is used, a gap C can be left between the blade leading end inclined surface and the upper end edge portion of the protruding portion 13, so that the cutting edge can be The scribing line S is processed without touching the protrusion 13 .

專利文獻1:日本特許第3787489號 Patent Document 1: Japanese Patent No. 3787489

近年來,由增加從母基板分別切出之單位基板之個數而抑制製品成本之觀點來看,所切出之單位基板之面積,有逐漸小型化之傾向。例如,在製造LED之情形,單位基板之平面尺寸被要求從現狀的2.0mm×1.6mm縮小至1.0mm×0.8mm。進一步地,不僅單位基板之面積,關於用於 形成刻劃線S之區域即刻劃路徑之寬度、亦即突起部13、13間之間隔L1,為了小型化、量產化而亦被要求變小。具體而言,間隔L1在目前的0.12mm係較寬的,有必要縮小至0.06mm以下。 In recent years, from the viewpoint of increasing the number of unit substrates cut out from the mother substrate and suppressing the cost of the product, the area of the unit substrate to be cut tends to be gradually reduced. For example, in the case of manufacturing an LED, the planar size of the unit substrate is required to be reduced from the current 2.0 mm x 1.6 mm to 1.0 mm x 0.8 mm. Further, not only the area of the unit substrate, but also The width of the scribed line, that is, the interval L1 between the protrusions 13 and 13 is also required to be small in size and mass production. Specifically, the interval L1 is wider at the current 0.12 mm, and it is necessary to reduce it to 0.06 mm or less.

然而,若使間隔L1縮小至0.06mm,將使得如圖10所示般 在習知(參照圖9)般之具有鈍角之刃前端角度α的刀輪K中,刃前端之斜面(位於刃前端稜線兩側之斜面)與突起部13之上端緣部接觸而傷及突起部13,因此不能使用。因此,為了避免接觸,必需將在圖10中以假想線(兩點鏈線)所示般之刃前端角度α’設成90度以下之銳角。然而,在使用銳角之刃前端之情形,如上述般容易產生刀刃鈍化等而使使用壽命變短。此外,若刃前端進一步成為銳角,則於刀輪之素材所使用的碳化鎢或鑽石等之硬質粒子容易脫落,明顯使刃前端之強度降低,研磨加工亦變困難。進一步地,產生如刻劃時之負載控制變困難般之各種課題。 However, if the interval L1 is reduced to 0.06 mm, it will be as shown in FIG. In the cutter wheel K having the tip end angle α of the obtuse angle as in the conventional (refer to FIG. 9), the inclined surface of the tip end of the blade (the inclined surface on both sides of the ridge line at the tip end of the blade) is in contact with the upper edge portion of the protrusion 13 to injure the protrusion. Part 13, so it cannot be used. Therefore, in order to avoid contact, it is necessary to set the blade tip end angle α' as shown by an imaginary line (two-point chain line) to an acute angle of 90 degrees or less in Fig. 10 . However, in the case where the tip end of the sharp-edged blade is used, blade passivation or the like is easily generated as described above to shorten the service life. Further, when the tip end of the blade further becomes an acute angle, the hard particles such as tungsten carbide or diamond used in the material of the cutter wheel are liable to fall off, and the strength of the tip end is remarkably lowered, and the polishing process is also difficult. Further, various problems such as difficulty in load control at the time of scribing are generated.

因此,本發明之目的在於提供一種即使是刃前端角度與習知 相同般維持鈍角、且相鄰接之突起部間之刻劃路徑寬度狹窄(具體而言係0.06mm以下),亦能夠在刃前端不接觸(突起部)之情況下進行刻劃加工的刀輪及其製造方法。 Accordingly, it is an object of the present invention to provide an even front end angle and conventional knowledge. Similarly, the obtuse angle is maintained, and the width of the scribed path between the adjacent protrusions is narrow (specifically, 0.06 mm or less), and the knives can be scribed without the front end of the blade being contacted (protrusion). And its manufacturing method.

為了解決上述課題,在本發明中提出了如以下般之技術性手 段。亦即,本發明之刀輪,係以可放電加工之硬質材料形成,且藉由左右之斜面形成之刃前端稜線之刃前端角度為鈍角,其成為如下之構成:使刃前端稜線附近之前端部分成為鈍角之刃前端並餘留,並且藉由放電加工切除連續於該前端部分之左右之斜面的一部分,於該左右之斜面形成有陷入之窪部。 In order to solve the above problems, in the present invention, a technical hand as follows is proposed. segment. That is, the cutter wheel of the present invention is formed of a hard material that can be electrically processed, and the tip end angle of the edge ridge line formed by the left and right slopes is an obtuse angle, and is configured as follows: the front end near the front end ridge line of the blade A portion of the edge of the obtuse blade is left and left, and a part of the left and right slopes continuous to the front end portion is cut by electric discharge machining, and a trapped portion is formed on the left and right slopes.

此外,本發明之刀輪之製造方法,該刀輪係藉由左右之斜面 形成刃前端稜線,其以如下之方式進行:在由可放電加工之硬質材料所構成之圓盤狀盤體之外周面,藉由研削加工而加工刃前端稜線之刃前端角度成為鈍角之左右之斜面,接著,將刃前端稜線附近之前端部分設成為鈍角之刃前端並餘留,並且藉由放電加工切除連續於該前端部分之左右之斜面的一部分,於該左右之斜面形成陷入之窪部。 In addition, in the method of manufacturing the cutter wheel of the present invention, the cutter wheel is formed by the left and right slopes Forming a blade front end ridge line is performed in such a manner that the outer peripheral surface of the disk-shaped disk body composed of the hard-dischargeable hard material is subjected to grinding processing, and the tip end angle of the blade edge ridge line is formed to be an obtuse angle. a beveled surface, and then the front end portion near the front end ridge line of the blade is set as the front end of the obtuse angle blade and remains, and a part of the left and right inclined faces continuing to the front end portion is cut by electric discharge machining, and the left and right inclined faces are formed into the crotch portion .

此處,刀輪之刃前端角度較佳為90度~150度。藉此,能夠 根據被刻劃之基板的突起部間的間隔及高度,而選擇窪部之形狀或尺寸,且成為不與基板接觸。此外,作為可放電加工之硬質材料,亦可使用超硬合金或燒結鑽石、具有導電性之單結晶鑽石或多結晶鑽石。此外,亦可沿刃前端稜線形成連續之凹凸。 Here, the front end angle of the blade of the cutter wheel is preferably from 90 degrees to 150 degrees. Thereby being able to The shape or size of the crotch portion is selected depending on the interval and height between the projections of the scribed substrate, and is not in contact with the substrate. Further, as the hard material that can be electrically processed, superhard alloy or sintered diamond, conductive single crystal diamond or polycrystalline diamond can also be used. In addition, continuous irregularities may be formed along the ridgeline at the front end of the blade.

根據本發明,由於切除連續於鈍角之前端部分的左右之斜面 的一部分並形成陷入之窪部,因此能夠使刀輪之刃前端之前端部分中的左右寬僅以切除之量設為狹窄,即使相鄰接之突起部間之刻劃路徑寬度狹窄,亦能夠在不接觸突起緣部之情況下進行刻劃。此外,刀輪之窪部之加工,能夠僅以對習知製品(藉由研削加工)即被儲存之具有鈍角之刃前端角度(未形成有窪部)之一般刀輪,藉由放電加工使電極(導線(wire)或治具電極)按壓於刃前端斜面之追加加工而製造,因此即使是微細的部分之加工亦能夠容易且精確地進行製造。此外,藉由放電加工而切除之窪部,並非在刻劃時與應加工之基板接觸並刻劃之部分,因此能夠不必進行研磨精加工等之後處理,維持該狀態作為製品而使用。而且,由於刃前端之前端部分餘留有原本之刀輪的鈍角之刃前端稜線,因此能夠對刻劃以與習知相同般維 持必要之刃前端強度,能夠在不產生刀刃鈍化之情況下長期地使用。進一步地,具有能夠以與習知同等之容易度進行負載控制之效果。 According to the present invention, since the left and right slopes of the end portion continuous to the obtuse angle are cut off The part of the blade is formed into a trapped portion, so that the left and right widths in the front end portion of the front end of the blade edge can be made narrow only by the amount of the cut, even if the width of the scribed path between the adjacent protrusions is narrow, The scoring is performed without contacting the edge of the protrusion. In addition, the machining of the shank of the cutter wheel can be performed by electric discharge machining only by a conventional cutter wheel having a sharp-edged blade tip end angle (not formed with a stern portion) which is stored in a conventional product (by grinding). Since the electrode (wire or jig electrode) is pressed by additional processing on the bevel of the tip end of the blade, it can be easily and accurately manufactured even in the processing of a fine portion. Further, since the crotch portion which is cut by the electric discharge machining is not in contact with the substrate to be processed at the time of scribing and is scribed, it is possible to maintain the state as a product without performing post-processing such as polishing finishing. Moreover, since the front end portion of the front end of the blade retains the front end ridgeline of the obtuse angle of the original cutter wheel, it is possible to scribe the same dimension as the conventional one. With the necessary front end strength, it can be used for a long time without blade passivation. Further, there is an effect that load control can be performed with ease equivalent to the conventional one.

L1‧‧‧母基板之突起部之間隔 L1‧‧‧ spacing of the protrusions of the mother substrate

L2‧‧‧刀輪之前端部分之左右寬度 L2‧‧‧ left and right width of the front end of the cutter wheel

S‧‧‧刻劃線 S‧‧ scribe

α‧‧‧刃前端角度 Α‧‧‧ blade front angle

h‧‧‧窪部之高度 H‧‧‧ height of head

1‧‧‧刀輪 1‧‧‧Cutter wheel

1A、1A’‧‧‧窪部加工前之刀輪 1A, 1A'‧‧‧Cutter wheel before machining

2‧‧‧刃前端 2‧‧‧ blade front end

2a、2b‧‧‧刃前端之左右斜面 2a, 2b‧‧‧ left and right bevels on the front end of the blade

3‧‧‧窪部 3‧‧‧洼

圖1,係表示本發明之刀輪的前視圖。 Figure 1 is a front elevational view of the cutter wheel of the present invention.

圖2,係對刀輪之刃前端以線切割放電加工施作窪部時之圖。 Fig. 2 is a view showing the front end of the blade edge of the cutter wheel as a crotch portion by wire-cut electric discharge machining.

圖3,係刀輪之刃前端部分的放大剖面圖。 Figure 3 is an enlarged cross-sectional view showing the front end portion of the blade of the cutter wheel.

圖4,係表示刀輪之使用狀態的放大圖。 Fig. 4 is an enlarged view showing the state of use of the cutter wheel.

圖5,係對刀輪以形雕放電加工施作窪部時之圖。 Fig. 5 is a view showing a state in which the cutter wheel is applied as a crotch portion by a shape electric discharge machining.

圖6,係表示與圖5同樣之形雕放電加工方法的其他例之圖。 Fig. 6 is a view showing another example of the method of forming a shape electric discharge machining similar to that of Fig. 5.

圖7,係表示窪部之加工形狀之變形例的前視圖。 Fig. 7 is a front view showing a modification of the processed shape of the crotch portion.

圖8,係表示成為加工對象之母基板之一例的立體圖。 Fig. 8 is a perspective view showing an example of a mother substrate to be processed.

圖9,係圖8之一部分放大剖面圖。 Figure 9, is a partially enlarged cross-sectional view of Figure 8.

圖10,係表示將母基板之突起部設定成寬度狹窄之情形的假想例的剖面圖。 FIG. 10 is a cross-sectional view showing a virtual example in which the projection of the mother substrate is set to have a narrow width.

在以下,針對本發明之刀輪及其製造方法依據圖式詳細地進行說明。此處,以對在基板表面具有突起部之母基板之刻劃為最佳之刀輪為例進行說明。 Hereinafter, the cutter wheel of the present invention and a method of manufacturing the same will be described in detail based on the drawings. Here, a case where the scribing of the mother substrate having the protrusion on the surface of the substrate is optimal will be described as an example.

圖1(a)係表示本發明之刀輪1的前視圖,該刀輪1係以具有導電性、可放電加工之硬質材料(例如金屬)製作。具體而言,例如以超硬合金或燒結鑽石、具有導電性之單結晶鑽石或多結晶鑽石製作。在對鑽石賦 予導電性中,已知有在合成時摻雜硼等不純物之方法等。在多結晶鑽石,包含藉由化學氣相成長法合成之鑽石、或不使用結合材而使微細之鑽石粒子燒結合成之鑽石。另外,燒結鑽石一般而言雖藉由包含作為黏合劑之鈷等而具有導電性,但為了能夠進行更精密之放電加工,亦可採用使用有使不純物混入而賦予導電性之鑽石粒子的燒結鑽石。 Fig. 1(a) is a front view showing a cutter wheel 1 of the present invention, which is made of a hard material (e.g., metal) having electrical conductivity and electrical discharge machining. Specifically, it is made, for example, of a super hard alloy or a sintered diamond, a single crystal diamond having conductivity, or a polycrystalline diamond. In the diamond Among the preconducting properties, a method of doping impurities such as boron during synthesis is known. In a polycrystalline diamond, a diamond synthesized by a chemical vapor phase growth method or a diamond obtained by sintering a fine diamond particle without using a binder. In addition, the sintered diamond generally has conductivity by containing cobalt or the like as a binder, but in order to perform more precise electric discharge machining, a sintered diamond using a diamond particle which imparts conductivity by mixing impurities may be used. .

該刀輪1,係利用在圓盤狀盤體之外周面具有以鈍角、例如105度之角度形成刃前端稜線之刃前端角度的刃前端2之如圖1(b)所示般之刀輪1A而製造。亦即,餘留具有鈍角之刃前端角度的刃前端稜線附近之前端部分,並且將連續於前端部分之刃前端2之左右之斜面2a、2b之一部分藉由放電加工切除,於斜面2a、2b形成圖1(a)所示之窪部3。 The cutter wheel 1 is a cutter wheel having a blade tip end 2 which forms a tip end angle of a blade tip end ridge at an obtuse angle, for example, an angle of 105 degrees, on the outer peripheral surface of the disk-shaped disk body, as shown in Fig. 1(b). Manufactured in 1A. That is, the front end portion near the front end ridge line having the tip end angle of the obtuse angle is left, and one of the left and right slopes 2a, 2b of the front end 2 of the front end portion is cut off by the electric discharge machining on the inclined surface 2a, 2b. The crotch portion 3 shown in Fig. 1(a) is formed.

加工窪部3之前的圖1(b)所示之刀輪1A,係以滑順且平坦 之稜線形成刃前端之前端的一般基板刻劃用之刀輪、亦即於刃前端稜線部不具有缺口(凹凸部)之一般的刀輪(normal cutter wheel),藉由研削加工製作刃前端2,且將刃前端表面研磨精加工而成者。另外,以直徑約1.0mm~7.0mm、較佳為1.0mm~3.0mm、厚度約0.4mm~1.1mm之小尺寸形成。該等係在維持該狀態下使用作為刀輪,並作為在庫品而儲存。 The cutter wheel 1A shown in Fig. 1(b) before machining the crotch portion 3 is smooth and flat The ridge line forms a general blade for scribing the front end of the tip end of the blade, that is, a normal cutter wheel having no notch (concave portion) at the ridge line portion of the blade, and the blade tip 2 is formed by grinding. And the front end surface of the blade is ground and finished. Further, it is formed in a small size having a diameter of about 1.0 mm to 7.0 mm, preferably 1.0 mm to 3.0 mm, and a thickness of about 0.4 mm to 1.1 mm. These systems are used as a cutter wheel while maintaining this state, and are stored as a stock.

另外,作為加工窪部3前之刀輪,亦可使用如圖1(c)所示般之沿刃前端稜線設置有連續之小的凹凸(缺口)8的刀輪(具有溝槽之刀輪)1A’。對於該具有溝槽之刀輪1A’,存在有三星鑽石股份有限公司製之Penett(註冊商標)刀輪、APIO(註冊商標)刀輪。本發明之刀輪,可藉由對該等在圖1(b)、(c)所示之刀輪1A、1A’進一步進行追加加工而形成。 Further, as the cutter wheel before the boring portion 3, a cutter wheel having a continuous small unevenness (notch) 8 along the ridge line at the tip end of the blade as shown in Fig. 1(c) may be used (a cutter wheel having a groove) ) 1A'. The Penett (registered trademark) cutter wheel and the APIO (registered trademark) cutter wheel manufactured by Samsung Diamond Co., Ltd. are present in the grooved cutter wheel 1A'. The cutter wheel of the present invention can be formed by further processing the cutter wheels 1A and 1A' shown in Figs. 1 (b) and (c).

接著,於圖2所示之一例,為於刀輪1之刃前端2之斜面 2a、2b,以線切割放電加工進行加工窪部3之方法。 Next, in an example shown in FIG. 2, the bevel of the front end 2 of the blade of the cutter wheel 1 is 2a, 2b, a method of processing the crotch portion 3 by wire-cut electrical discharge machining.

在該方法中,如圖2(a)、(b)所示,於刀輪1A(或1A’)之軸孔4嵌入旋轉軸(未圖示),一邊使刀輪1A旋轉一邊使線電極5於刃前端2之一側之斜面2a移行,而切除斜面2a之一部分。 In this method, as shown in Figs. 2(a) and 2(b), a rotary shaft (not shown) is fitted to the shaft hole 4 of the cutter wheel 1A (or 1A'), and the wire electrode is rotated while the cutter wheel 1A is rotated. 5, the inclined surface 2a on one side of the front end 2 of the blade moves, and a part of the inclined surface 2a is cut.

接著,如圖2(c)所示,使線電極5於刃前端2之另一側之斜面2b移行,而切除斜面2b之一部分。藉此,如圖2(d)所示,製作連續於刃前端2之前端部分的左右之斜面2a、2b的一部分陷入、形成有使刃前端之前端部分的寬度變狹窄之窪部3、3的刀輪1。 Next, as shown in Fig. 2(c), the wire electrode 5 is moved on the inclined surface 2b on the other side of the blade tip end 2, and a part of the slope 2b is cut. As a result, as shown in Fig. 2(d), a part of the left and right inclined faces 2a, 2b which are continuous with the front end portion of the blade tip end 2 are formed, and the crotch portions 3, 3 which narrow the width of the front end portion of the blade tip end are formed. Knife wheel 1.

以如此方式形成之窪部3,如圖3、4之放大圖所示,使維 持鈍角之刃前端角度並餘留之刀輪1之刃前端之前端部分的左右之寬度L2,相對於在加工對象基板上之相鄰接之突起部13、13間所預定之刻劃路徑之寬度L1為較小,以刀輪1與突起部13不相互接觸之方式選擇窪部3之缺口形狀或缺口尺寸。 The crotch portion 3 formed in this manner is shown in an enlarged view of Figs. 3 and 4 The front end angle of the blade of the obtuse angle and the left and right width L2 of the front end portion of the blade end of the cutter wheel 1 are predetermined with respect to the scribed path between the adjacent projections 13 and 13 on the substrate to be processed. The width L1 is small, and the notch shape or the notch size of the crotch portion 3 is selected such that the cutter wheel 1 and the projection portion 13 do not contact each other.

例如,在突起部13之間隔L1為0.06mm、高度H為0.03mm之基板的情形,將刀輪1之鈍角的前端部分之寬度L2設成0.04mm,將從刃前端稜線起0.03mm位置之高度h設成0.05mm。另外,對應突起部13之間隔L1之寬度,刀輪1之前端部分之寬度L2可在0.01mm~0.05mm之範圍進行選擇,此外,對應突起部13之高度H,前端部分之高度h可在0.005mm~0.06mm之範圍進行選擇。此外,較佳為以寬度L1與L2之差為0.02mm以上之方式進行選擇。 For example, in the case of a substrate in which the interval L1 of the protrusions 13 is 0.06 mm and the height H is 0.03 mm, the width L2 of the tip end portion of the obtuse angle of the cutter wheel 1 is set to 0.04 mm, and the position from the edge of the blade edge is 0.03 mm. The height h is set to 0.05 mm. Further, the width L2 of the front end portion of the cutter wheel 1 may be selected in the range of 0.01 mm to 0.05 mm corresponding to the width of the interval L1 of the protrusion portion 13, and the height h of the front end portion may be corresponding to the height H of the protrusion portion 13 Choose from a range of 0.005mm to 0.06mm. Further, it is preferable to select so that the difference between the widths L1 and L2 is 0.02 mm or more.

藉此,如圖4所示,在使刀輪1之刃前端2定位於加工對象基板之突起部13、13間之刻劃路徑之寬度L1內並進行加工刻劃線S時,能夠在與 突起部13之間保持充分的間隙C之狀態下進行刻劃。 As a result, as shown in FIG. 4, when the tip end 2 of the cutter wheel 1 is positioned in the width L1 of the scribed path between the projections 13 and 13 of the substrate to be processed, and the scribe line S is processed, it is possible to The protrusions 13 are scribed in a state in which a sufficient gap C is maintained between them.

另外,在圖4中,雖加工對象基板之刻劃路徑亦以樹脂層被覆,但亦可於刻劃路徑部分露出基板。 In addition, in FIG. 4, although the scribing path of the substrate to be processed is also covered with a resin layer, the substrate may be exposed at the scribed path portion.

圖5,表示利用形雕放電加工進行之刀輪之加工方法。 Fig. 5 shows a method of processing a cutter wheel by means of a shape electric discharge machining.

在該方法中,使具有應切除部分之反轉形狀的一對治具電極6a、6b,對以旋轉軸支撐並進行旋轉之刀輪1A之刃前端斜面2a、2b分別從相反側交互地、或同時地按壓,藉此進行加工窪部3。 In this method, the pair of jig electrodes 6a and 6b having the inverted shape of the portion to be cut are alternately moved from the opposite side to the blade leading end slopes 2a and 2b of the cutter wheel 1A supported by the rotating shaft and rotated. The crucible 3 is processed by pressing at the same time.

此外,圖6,係表示利用形雕放電加工進行之刀輪之其他加 工方法的一例。 In addition, FIG. 6 shows the other addition of the cutter wheel by the shape electric discharge machining. An example of a method of work.

在該方法中,使具備具有應切除部分之反轉形狀的母模具(母模)7a之治具電極7,對進行旋轉之刀輪1A之刃前端斜面2a、2b按壓,藉此進行加工窪部3。 In this method, the jig electrode 7 having the mother die (mother die) 7a having the inverted shape of the portion to be cut is pressed by the blade tip end slopes 2a and 2b of the rotating cutter wheel 1A, thereby performing processing. Department 3.

上述之線切割放電加工及形雕放電加工,均為將刀輪1A浸 於作為放電誘導體之水或油等之液體而進行。 The above-mentioned wire cutting electric discharge machining and shape electric discharge machining are all immersing the cutter wheel 1A It is carried out as a liquid such as water or oil as a discharge inducing body.

在上述實施例中,雖以正圓之圓弧形成窪部3之形狀,但亦 可如圖7(a)、(b)所示,以使與鈍角之刃前端2之前端部鄰接之斜面上位側較深,越往斜面之下方而逐漸變淺之方式形成。另外,在圖7(a)中表示較淺地形成窪部3之凹度、在圖7(b)中表示較深地形成之例。此外,尤其是由於在小徑之刀輪中刃前端2之斜面之寬度變狹窄,因此在如此般之情形中,如圖7(c)所示,亦可窪部3與刀輪1之側面9完全連續。 In the above embodiment, although the shape of the crotch portion 3 is formed by a circular arc of a perfect circle, As shown in Figs. 7(a) and 7(b), the side surface on the inclined surface adjacent to the front end portion of the tip end 2 of the obtuse angle blade is formed to be deeper toward the lower side of the inclined surface. Further, in Fig. 7(a), a case where the concavity of the crotch portion 3 is formed shallowly and a case where the concavity is formed deep in Fig. 7(b) is shown. Further, in particular, since the width of the slope of the tip end 2 of the blade in the small-diameter cutter wheel becomes narrow, in such a case, as shown in FIG. 7(c), the side of the jaw portion 3 and the cutter wheel 1 can also be used. 9 is completely continuous.

加工後之刀輪1,刃前端2之前端部分之左右寬度能夠僅以 藉由窪部3所被切除之量而設成較狹窄,如圖4所示般相鄰接之突起部13、 13間之刻劃路徑之寬度L1即使較狹窄,亦能夠在不與突起緣部接觸之情況下進行刻劃。此外,能夠僅以對具有鈍角之刃前端角度之刀輪1A藉由放電加工使成為電極之導線或治具電極按壓於刃前端斜面之作業,進行窪部3之加工,因此即使是微細的部分之加工,亦能夠容易且精確地進行製作。 After the machining of the cutter wheel 1, the width of the front end portion of the front end 2 of the blade can be only By the amount of the crotch portion 3 being cut off, the protrusion portion 13 is adjacently connected as shown in FIG. Even if the width L1 of the scribed path of the 13 is narrow, it can be scored without being in contact with the edge of the protrusion. Further, it is possible to perform the processing of the crotch portion 3 by pressing the wire or the jig electrode serving as the electrode to the bevel of the blade tip by the electric discharge machining of the cutter wheel 1A having the tip end angle of the obtuse angle, so that even the fine portion is processed. The processing can also be easily and accurately produced.

此外,藉由放電加工而經切除之部分,並非於刻劃時直接接觸基板之部分,因此並不一定要進行研磨精加工等之後處理,而可在維持該狀態下作為製品使用。 Further, since the portion which is cut by the electric discharge machining does not directly contact the portion of the substrate at the time of scribing, it is not necessary to perform post-processing such as polishing finishing, and it can be used as a product while maintaining the state.

進一步地,刃前端之前端部,由於餘留有原本之刀輪1A之鈍角即刃前端角度之刃前端稜線,因此能夠與習知相同般維持對刻劃為必要之刃前端強度,且刀刃鈍化等難以產生而能夠長期地使用。 Further, since the front end portion of the front end of the blade retains the obtuse angle of the original cutter wheel 1A, that is, the edge apex of the blade tip end angle, the blade tip end strength necessary for the scribing can be maintained as in the prior art, and the blade edge is passivated. It is difficult to produce and can be used for a long time.

以上,雖已針對本發明之代表性的實施例進行了說明,但本 發明並不一定要特定於上述之實施形態。例如,在上述之實施例中,作為刀輪之素材即可放電加工之材料,雖表示有使用了使鑽石粒子以鈷等之黏合劑及高溫高壓而燒結成之燒結鑽石的例子,但亦可取代此而使用金屬材料即超硬合金。此外,可採用使用有藉由不純物之添加而賦予導電性之鑽石粒子的燒結鑽石、或藉由不純物之添加而賦予導電性之單結晶鑽石或多結晶鑽石等。此外,在上述實施例中,雖將刃前端角度α設成105度,但可在90度~150度之範圍內實施。在其他之本發明中,在達成其目的、不脫離請求之範圍的範圍內可適當地進行修正、變更。 Hereinabove, the representative embodiments of the present invention have been described, but The invention is not necessarily specific to the embodiments described above. For example, in the above-described embodiment, the material which can be electrically processed as the material of the cutter wheel is an example in which the diamond particles are sintered with cobalt or the like and sintered at high temperature and high pressure. Instead of this, a metal material, that is, a superhard alloy is used. Further, a sintered diamond using a diamond particle imparted with conductivity by addition of an impurity or a single crystal diamond or a polycrystalline diamond to which conductivity is imparted by addition of an impurity may be used. Further, in the above embodiment, the blade tip end angle α is set to 105 degrees, but it can be implemented in the range of 90 degrees to 150 degrees. In the other aspects of the invention, it is possible to appropriately modify and change the scope of the invention without departing from the scope of the claims.

本發明可應用於對在陶瓷基板或玻璃基板等之脆性材料基 板、尤其是基板表面形成有突起部之母基板進行加工、分斷刻劃線時所使用之刀輪。 The invention can be applied to a brittle material base on a ceramic substrate or a glass substrate The plate, in particular, the cutter wheel used for processing and dividing the mother substrate on which the projection portion is formed on the surface of the substrate.

1‧‧‧刀輪 1‧‧‧Cutter wheel

2‧‧‧刃前端 2‧‧‧ blade front end

3‧‧‧窪部 3‧‧‧洼

13‧‧‧突起部 13‧‧‧Protruding

L1‧‧‧母基板之突起部之間隔 L1‧‧‧ spacing of the protrusions of the mother substrate

L2‧‧‧刀輪之前端部分之左右寬度 L2‧‧‧ left and right width of the front end of the cutter wheel

C‧‧‧間隙 C‧‧‧ gap

H‧‧‧突起部之高度 H‧‧‧ Height of the protrusion

S‧‧‧刻劃線 S‧‧ scribe

Claims (7)

一種刀輪,係以可放電加工之硬質材料形成,且藉由左右之斜面形成之刃前端稜線之刃前端角度為鈍角,其特徵在於:使該刃前端稜線附近之前端部分成為鈍角之刃前端並餘留,並且藉由放電加工切除連續於該前端部分之左右之斜面的一部分,於該左右之斜面形成有陷入之窪部。 A cutter wheel is formed by a hard material that can be electrically processed, and an edge of a front end ridge line formed by a left and right inclined surface is an obtuse angle, and the front end portion near the front end ridge line of the blade is an obtuse blade front end. And remaining, and a part of the left and right inclined faces continuing to the front end portion is cut by electric discharge machining, and a trapped portion is formed on the left and right inclined surfaces. 如申請專利範圍第1項之刀輪,其中,該刃前端角度為90度~150度。 For example, the cutter wheel of the first application patent scope, wherein the front end angle of the blade is 90 degrees to 150 degrees. 如申請專利範圍第1或2項之刀輪,其中,該硬質材料,係超硬合金或燒結鑽石、具有導電性之單結晶鑽石或多結晶鑽石。 The cutter wheel of claim 1 or 2, wherein the hard material is a superhard alloy or sintered diamond, a conductive single crystal diamond or a polycrystalline diamond. 如申請專利範圍第1或2項之刀輪,其中,沿該刃前端稜線形成連續之凹凸。 The cutter wheel of claim 1 or 2, wherein the ridge line along the front end of the blade forms a continuous unevenness. 如申請專利範圍第3項之刀輪,其中,沿該刃前端稜線形成連續之凹凸。 The cutter wheel of claim 3, wherein the ridge line along the front end of the blade forms a continuous unevenness. 一種刀輪之製造方法,該刀輪係藉由左右之斜面形成刃前端稜線,其特徵在於:在由可放電加工之硬質材料所構成之圓盤狀盤體之外周面,藉由研削加工而加工刃前端稜線之刃前端角度成為鈍角之左右之斜面;接著,將該刃前端稜線附近之前端部分設成為鈍角之刃前端並餘留,並且藉由放電加工切除連續於該前端部分之左右之斜面的一部分,於該左右之斜面形成陷入之窪部。 A method of manufacturing a cutter wheel, wherein the cutter wheel is formed by a left and right inclined surface to form a blade front end ridge line, wherein the outer peripheral surface of the disc-shaped disc body formed of the hard-dischargeable hard material is subjected to grinding processing The front end angle of the edge of the front edge of the processing edge is a sloped surface of the obtuse angle; then, the front end portion near the front end ridge line of the blade is set as the front end of the obtuse angle blade and remains, and the left and right sides of the front end portion are cut by electric discharge machining. A portion of the slope forms a trapped portion on the left and right slopes. 如申請專利範圍第6項之刀輪之製造方法,其中,該刃前端角度為90度~150度。 The method for manufacturing a cutter wheel according to the sixth aspect of the patent application, wherein the front end angle of the blade is 90 degrees to 150 degrees.
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