JP2015120251A - Scribing wheel for forming hollow hole, and method for forming hollow hole - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing wheel for forming a hollow hole, and a method for forming the hollow hole in which the external force required on hollowing is small, the hollow hole can be formed into a neat state where a fine convex/concave or a break of a shell shape is not generated on an inner peripheral edge, and a horizontal crack is small.SOLUTION: The hollow hole is formed by hollowing after forming a scribe line of a closed curve line shape by using the scribing wheel for forming the hollow hole in which a plurality of grooves are formed with a predetermined interval along a blade tip-ridge line of the scribing wheel of a disc shape, and a bottom part of the groove extends to the direction inclining with a predetermined degree θ1 relative to the blade tip-ridge line in a contact face of the blade tip-ridge line.

Description

  The present invention relates to a scribing wheel for forming various closed-curved hollows such as a circle and an ellipse on a brittle material substrate, and a hollow hole forming method using the scribing wheel.

  For example, when forming a circular hole in a brittle material substrate, even if the scribe line is formed in a circle by using a scribing wheel in which a crack is formed in a direction perpendicular to the surface of the brittle material substrate, the scribe line remains as it is. It is difficult to hollow out the area surrounded by. In such a case, the region surrounded by the scribe line is shrunk by spraying a coolant and cooled, and the periphery of the region surrounded by the scribe line is expanded to expand the crack, thereby extending the scribe line. It is known that the area surrounded by is outlined.

  However, this conventional method requires an extra step of cooling the region surrounded by the scribe line and heating the periphery of the region surrounded by the scribe line. Further, if the contraction or expansion at this time is not sufficient, the region surrounded by the scribe line cannot be extracted.

  In order to solve such problems, Patent Document 1 listed below discloses an angle φ1 of one blade edge surface with respect to a plane perpendicular to the rotation axis of the scribing wheel 80 and the other as shown in FIGS. 12A and 12B. An example is shown in which a circular hollow hole is formed in a brittle material substrate 81 using scribing wheels 80 with different angles φ2 of the cutting edge surfaces (here, φ1 <φ2).

  When the scribe line 82 is formed on the brittle material substrate 81 using the scribing wheel 80, the crack 83 is formed to be inclined toward the edge surface side of the angle φ1. Therefore, when the scribing wheel 80 is formed so that the cutting edge surface side of the angle φ1 faces the outside of the circular scribe line 82, the circular scribe line 82 is formed, as shown in FIGS. 12A and 13A, the crack 83 is circular. It is formed to be inclined outward from the scribe line 82. 13 indicates the tip position of the crack 83 formed in the brittle material substrate 81.

  After that, when the crack 83 is extended by heating the outside of the region surrounded by the scribe line on the surface where the scribe line is formed, the region 84 surrounded by the circular scribe line 82 becomes substantially frustoconical. For this reason, as shown in FIG. 13B, an external force is applied in the vertical direction to the region 84 surrounded by the circular scribe line 82 so that it can be easily hollowed out to form the hollow hole 85. Become.

  In addition, as shown in FIG. 14A to FIG. 14C, the following Patent Document 2 has a shape in which the congruent bottom surfaces 91 of two truncated cones sharing a rotation axis are joined, and the circumferential portion of the bottom surface 91 is A cutting edge ridge line 92 is formed, and a groove 93 inclined at a predetermined angle φ5 with respect to the rotation axis direction is formed in the cutting edge ridge line 92 at a predetermined interval in the circumferential direction, and an inclined surface 94 forming the side surfaces of the two truncated cones. , 95 and the bottom face 91 are shown in an example in which hollow holes are formed in a brittle material substrate using a scribing wheel 90 in which the angles φ3 and φ4 are different from each other (here, φ4> φ3).

  When a scribe line is formed on the surface of the brittle material substrate using the scribing wheel 90, the crack is formed to be inclined toward the inclined surface 94 side. Therefore, when the scribing wheel 90 is formed so that the inclined surface 94 faces the outer side of the circular scribe line, a circular scribe line is formed as in the conventional example shown in FIG. It is formed to be inclined outward. On the other hand, when the scribing wheel 90 of Patent Document 2 is used, it is possible to form a vertical crack that is inclined deep in the thickness direction of the brittle material substrate. Therefore, by applying external force in a direction perpendicular to the region surrounded by the scribe line without heating the surface of the brittle material substrate, the region surrounded by the scribe line is hollowed out to form a hollow hole. Will be able to.

Japanese Patent Application Laid-Open No. 07-223828 International Publication No. 2010/087423

  However, when the scribing wheel 80 disclosed in Patent Document 1 is used, the inclined crack is not formed deep in the thickness direction of the brittle material substrate only by scribing. A process for progress is required. At this time, in some cases, it is formed at a desired inclination angle at a certain depth from the surface of the brittle material substrate, but the crack may be substantially perpendicular to the surface of the brittle substrate deeper than that. Therefore, when the scribing wheel 80 disclosed in Patent Document 1 is used, when the area still surrounded by the scribe line is hollowed out, the facing surface that forms a crack contacts and rubs to form a crack. The opposing surfaces may come into contact with each other and rub against each other, and minute irregularities and shell-shaped chipping may occur on the periphery of the through hole.

  In addition, when the scribing wheel 90 disclosed in Patent Document 2 is used, grooves are formed in the cutting edge ridge line at a predetermined interval in the circumferential direction. Therefore, the scribing wheel 90 disclosed in Patent Document 1 is used. As compared with the case of using, the permeability of cracks is increased, and inclined cracks are formed deep in the thickness direction of the brittle material substrate. However, even when the scribing wheel 90 disclosed in Patent Document 2 is used, if the thickness of the brittle material substrate is large, the crack inclination angle may be small or the crack depth may not be sufficient. For this reason, when the region surrounded by the scribe line is hollowed out, it may not be possible to hollow out the region with a single scribe. In addition, cracks are also formed on the surface of the brittle material substrate from the corners of the dents on the edge of the cutting edge of the scribing wheel, and this crack becomes larger in the direction opposite to the crack formed in the thickness direction of the brittle material substrate. It may become a crack and the surface of a brittle material substrate may peel off.

  The present invention has been made in view of such a conventional problem, and the inclination angle of a crack is formed when a hollow hole having a closed curve shape such as a circle, an ellipse, or a star is formed on a brittle material substrate. The hole is large and requires a small external force, so that the hole can be formed in a clean state without any minute irregularities or shell-like chipping on the inner periphery of the hole, and along the scribe line. An object of the present invention is to provide a scribing wheel for forming a hollow hole and a method for forming a hollow hole in a brittle material substrate, in which horizontal cracks formed on the surface of the brittle material substrate are small.

  In the scribing wheel for forming a hollow hole of the present invention, a plurality of grooves are formed at predetermined intervals along a cutting edge ridge line of the disc-shaped scribing wheel, and the bottom of the groove is within the contact surface of the cutting edge ridge line, It extends in a direction rotated by a predetermined angle θ1 (θ1 <90 °) with respect to the edge line of the cutting edge.

  When the scribing line is formed on the brittle material substrate using the hollow hole forming scribing wheel of the present invention, the bottom of the groove on the contact surface between the hollow hole forming scribing wheel and the brittle material substrate is based on the edge line of the cutting edge. Cracks inclined in the same direction as the rotation direction (direction where θ1 <90 °) are formed from the surface to the bottom surface of the brittle material substrate. For example, when the bottom of the groove (as viewed from the scribing wheel side) is rotated to the left by θ1 with respect to the edge of the cutting edge on the contact surface between the scribing wheel for forming the hollow hole and the brittle material substrate In this case, a crack inclined to the left side of the scribe line from the surface of the brittle material substrate to the bottom surface is formed. Similarly, when the bottom of the groove is formed so as to rotate to the right by θ1 with respect to the edge of the cutting edge, a crack is formed that is inclined to the right of the scribe line from the surface of the brittle material substrate toward the bottom.

  Therefore, using the scribing wheel for forming a hollow hole of the present invention, the rotation direction of the bottom of the groove with respect to the edge line of the blade is a closed curve on the contact surface between the scribing wheel for forming the hollow hole and the brittle material substrate. When the closed curved scribe line is formed so as to be outside, the horizontal crack is small, and the long crack inclined toward the outer periphery of the closed curved scribe line from the surface to the bottom of the brittle material substrate is closed curved. Formed. Therefore, if the scribing wheel for forming a hollow hole according to the present invention is used, a minute unevenness or a shell-like shape is formed on the inner peripheral edge of the hollow hole along a closed curved crack formed in the brittle material substrate with a small external force. The hollow hole can be formed in a beautiful state where no chipping occurs.

  In addition, as a closed-curved scribe line formed using the scribing wheel for forming a hollow hole of the present invention, only a curved line such as a circle, an ellipse, a semicircle, a crescent, a polygon, a star, etc. In addition, an arbitrary shape such as a curve and a straight line or only a straight line can be adopted.

  In the scribing wheel for forming a hollow hole of the present invention, it is preferable that the angle θ1 is not less than 10 ° and not more than 80 °.

  When θ1 is less than 10 ° and exceeds 80 °, in both cases, the bottom of the groove is substantially formed in the same direction as the rotation axis along the edge of the edge of the disc-shaped scribing wheel (corresponding to θ1 = 90 °). It becomes a form almost equivalent to the case of the made scribing wheel. Therefore, in both cases, a deep crack perpendicular to the bottom surface from the surface of the brittle material substrate is formed, but the inclination of the crack is reduced, so that it is not suitable for forming a hollow hole.

  In the scribing wheel for forming a hollow hole of the present invention, the shape of the vertical cross section of the groove in the direction orthogonal to the direction in which the bottom of the groove extends is semicircular, semi-elliptical, V-shaped, inclined and flat. A shape combined with a simple bottom surface or a U-shape may be used.

  According to the scribing wheel for forming the hollow hole of the present invention, by appropriately selecting the shape of the vertical cross section of the groove in the direction orthogonal to the direction in which the bottom of the groove extends, from the above shapes, The inclination and depth of the crack can be adjusted appropriately.

  Further, in the scribing wheel for forming the hollow hole of the present invention, the bottom of the groove is predetermined on the opposite side to the direction rotated by the angle θ1 with respect to the edge of the cutting edge and further with respect to the rotation axis direction of the scribing wheel. It is good also as what extends in the direction which inclines [theta] 2.

  When the scribing line is formed on the brittle material substrate using the hollow hole forming scribing wheel having such a configuration, cracks that are further inclined than those in the case where such a configuration is not provided are formed. Therefore, with a smaller external force, along the closed curved crack formed in the brittle material substrate, a hollow hole is formed in a beautiful state where no minute irregularities or shell-like chipping occurs on the inner peripheral edge of the hollow hole. Will be able to.

  The optimum value of the predetermined angle θ2 varies depending on the edge angle of the scribing wheel for forming the hollow hole, the angle of the inclined surface of the blade with respect to the rotation axis, the shape of the groove cross section, the groove depth, etc. Can be appropriately selected from a range parallel to the angle (θ2 = 0 °) to a range parallel to the inclined surface of the blade.

  Further, in the scribing wheel for forming a hollow hole of the present invention, the angles formed between the surfaces forming the respective blades formed on both sides of the edge of the blade edge and the surfaces formed by the ridge line are different from each other. The direction side rotated by an angle θ1 with respect to the edge of the blade edge may be the side on which the angle formed between the surface forming the blade and the surface formed by the ridge line is large.

  With such a configuration, the crack formed in the brittle material substrate has a small angle formed between the surfaces forming the respective blades formed on both sides of the edge of the blade edge and the surface formed by the ridge line. Therefore, the above-described effect of the present invention can be achieved more favorably. Note that, as the difference between these angles increases, the inclination angle of the crack increases. However, if the difference between these angles becomes 30 ° or more, the permeability of the cracks decreases, so the difference between these angles is 30 °. It is preferable that it is less than.

  Furthermore, the brittle material substrate hollow hole forming method according to the present invention includes the brittle material substrate and the hollow hole in a state in which any one of the above described hollow hole forming scribing wheels is in pressure contact with the surface of the brittle material substrate. At least one of the forming scribing wheels is moved to form a scribe line so as to draw a closed curve, and at that time, a crack inclined toward the outside of the closed curve with respect to the thickness direction of the brittle material substrate is formed. Then, stress is applied to the brittle material substrate to drop out the inside of the closed curve, and the closed curved curved hollow is formed in the brittle material substrate.

  According to the hollow hole forming method of the brittle material substrate of the present invention, with a small external force, along the closed curved crack formed in the brittle material substrate, the inner peripheral edge of the hollow hole has minute irregularities or shell-like shapes. The hollow hole can be formed in a beautiful state where no chipping occurs. In the method for forming a hollow hole in the brittle material substrate according to the present invention, stress is applied to the brittle material substrate even if the crack formed when the scribe line is drawn does not penetrate in the thickness direction of the brittle material substrate. As a result, the crack can be grown up to the back surface of the brittle material substrate, so that a hollow hole having a closed curve shape can be easily formed. Further, the closed curved scribe line in the method for forming a hollow hole in the brittle material substrate of the present invention includes not only a curved line such as a circle, an ellipse, a polygon, and a star, but also a curved line and a straight line. The present invention can be applied to a closed-curved scribe line having an arbitrary shape such as a straight line or a straight line.

  Further, in the method for forming a hollow hole in a brittle material substrate according to the present invention, the brittle material substrate and the hollow hole are formed in a state where a cutting edge ridge line of the scribing wheel for forming the hollow hole is vertically set with respect to the brittle material substrate. What is necessary is just to move at least one of the scribing wheels for hole formation.

  The scribing wheel used in the method for forming a hollow hole in a brittle material substrate according to the present invention naturally scribes from the surface to the bottom surface of the brittle material substrate when the scribing wheel is scribed in a state where the edge of the edge of the brittle material substrate is vertical. An inclined crack is formed. Therefore, according to the method for forming a hollow hole in the brittle material substrate of the present invention, it is possible to efficiently form the hollow hole along the closed curved crack formed in the brittle material substrate.

  Further, in the method for forming a hollow hole in a brittle material substrate according to the present invention, at least one of the brittle material substrate and the hollow hole forming scribing wheel is formed by connecting the hollow hole forming scribing wheel and the brittle material substrate. The contact surface may be moved in a state in which the rotation direction of the bottom of the groove with respect to the edge of the cutting edge is outside the closing curve with respect to the scribing direction to form a closed scribing line.

  In the scribing wheel used in the method for forming a hollow hole in a brittle material substrate according to the present invention, when a scribe line is formed in the brittle material substrate, the edge of the edge is formed on the contact surface between the scribing wheel for forming the hollow hole and the brittle material substrate. Cracks inclined in the same direction as the rotation direction of the bottom of the groove as a reference (direction in which θ1 <90 °) are formed from the surface to the bottom surface of the brittle material substrate. Therefore, according to the method for forming a hollow hole in a brittle material substrate according to the present invention, any one of the above-described scribing holes for forming a hollow hole is formed with a cutting edge at the contact surface between the scribing wheel for forming a hollow hole and the brittle material substrate. When the closed-curved scribe line is formed so that the rotation direction of the bottom of the groove with respect to the ridge line is outside the closed curve, the outer peripheral side of the closed-curved scribe line from the surface to the bottom of the brittle material substrate A long crack tilted in the direction of a closed curved surface is formed. Thus, according to the method for forming a hollow hole in a brittle material substrate according to the present invention, a small unevenness is formed on the inner peripheral edge of the hollow hole along a closed curved crack formed in the brittle material substrate with a small external force. The hollow hole can be formed in a beautiful state where no shell-like chipping occurs.

It is the schematic of the scribing apparatus used by this invention. 2A is a front view of a holder joint used in the scribing apparatus of FIG. 1, and FIG. 2B is a perspective view of the holder unit. FIG. 3A is a front view of the scribing wheel for forming a hollow hole in the first embodiment, and FIG. 3B is a side view of the same. 4A is a partially enlarged view of FIG. 3A, FIG. 4B is a vertical partial sectional view taken along line IVB-IVB of FIG. 4A, and FIG. 4C is a plan view showing cutting traces formed on the glass substrate. It is sectional drawing of the glass substrate along the VV line of FIG. 4C. FIG. 6A is a front view of a scribing wheel for forming a hollow hole in Modification 1, and FIG. 6B is a side view of the same. FIG. 7A is a front view of a scribing wheel for forming a hollow hole in Modification 2, and FIG. 7B is a side view of the scribing wheel. FIG. 8A is a front view of a scribing wheel for forming a hollow hole in Embodiment 2, and FIG. 8B is a side view of the same. It is a vertical fragmentary sectional view along the IX-IX line of Drawing 8B. FIG. 10A is a partially enlarged photograph of the ridge line portion of the scribing wheel of Embodiment 2, and FIG. 10B is an enlarged view of the surface of the glass substrate when a scribe line is formed on the surface of the glass substrate using this scribing wheel. It is an expanded sectional view in alignment with the XI-XI line of Drawing 10B. It is a figure which shows the formation direction of the crack by the scribing wheel of a prior art example. It is a perspective view which shows the formation process of the hollow hole using the scribing wheel of a prior art example. FIG. 14A is a partially enlarged view of a cutting edge seen from the front of another conventional scribing wheel, FIG. 14B is a partially enlarged view of a ridge line seen from the same side, and FIG. 14C is a XIVC-XIVC line in FIG. 14B. It is a vertical sectional view of a portion along.

  Hereinafter, a scribing wheel and scribing device for forming a hollow hole used in each embodiment of the present invention will be described in detail with reference to the drawings. However, each embodiment shown below shows the example for materializing the technical idea of this invention, and does not intend specifying this invention to these embodiment. The invention is equally applicable to other embodiments within the scope of the claims.

  First, a scribing apparatus 10 that is commonly used in each embodiment will be described with reference to FIGS. 1 and 2. The scribing apparatus 10 includes a moving table 11. The moving table 11 is screwed with the ball screw 13 and is moved in the y-axis direction along the pair of guide rails 12a and 12b when the ball screw 13 is rotated by driving of the motor 14. A motor 15 is installed on the upper surface of the movable table 11. The motor 15 rotates the table 16 positioned at the upper part on the xy plane and positions it at a predetermined angle. A glass substrate 17 as a brittle material substrate is placed on a table 16 and held by a vacuum suction means (not shown).

  The scribing apparatus 10 includes two CCD cameras 18 that image alignment marks formed on the surface of the glass substrate 17 above the glass substrate 17 placed on the table 16. A bridge 19 is installed on the columns 20a and 20b so as to extend along the x-axis direction so as to straddle the movable table 11 and the table 16 on the upper side thereof. A guide 22 is attached to the bridge 19, and the scribe head 21 is installed so as to move in the x-axis direction while being guided by the guide 22. A holder unit 30 is attached to the scribe head 21 via a holder joint 23.

  The scribing device 10 can form a scribe line in a straight or curved shape on the glass substrate 17 by driving at least one of the holder unit 30 and the table. can do. In addition, the closed-curved scribe line is not only a curve, straight line, or straight line, but also a circle, ellipse, semicircle, crescent, polygon, star, etc. Etc. can also be adopted. In the method for forming a hollow hole in a brittle material substrate according to the present invention, the scribing device 10 is used to form a scribe line in a closed curve shape, and the inside of the closed curve is removed to form a glass substrate 17 as a brittle material substrate. A closed curved hole is formed.

  As shown in FIG. 2A, the holder joint 23 has a substantially cylindrical shape, and includes a rotation shaft portion 23a and a joint portion 23b. In a state where the holder joint 23 is attached to the scribe head 21, the rotary shaft portion 23a is attached to the two bearings 24a and 24b via the cylindrical spacer 24c, and the holder joint 23 is held rotatably. . The cylindrical joint portion 23b is provided with an internal space 26 having a circular opening 25 on the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. A detachable holder unit 30 is inserted and attached to the internal space 26 by a magnet 27.

  The holder unit 30 includes a holder 31, a scribing wheel for forming a hollow hole of the present invention (hereinafter simply referred to as “scribing wheel”) 40, and a pin (not shown). is there. As shown in FIG. 2B, the holder 31 has a substantially cylindrical shape and is made of a magnetic metal. On the upper portion of the holder 31, a mounting portion 32 for positioning is provided. The attachment portion 32 is formed by cutting out the upper portion of the holder 31 and includes an inclined portion 32a and a flat portion 32b.

  The attachment portion 32 side of the holder 31 is inserted into the internal space 26 through the opening 25. At that time, the upper end side of the holder 31 is attracted by the magnet 27, and the inclined portion 32a of the mounting portion 32 comes into contact with the parallel pin 28 passing through the internal space 26, whereby the holder unit 30 is positioned and fixed with respect to the holder joint 23. . Moreover, when removing the holder unit 30 from the holder joint 23, it can be easily removed by pulling the holder 31 downward.

  The hollow hole forming scribing wheel 40 is a consumable item, and therefore needs to be periodically replaced. According to the holder joint 23 having such a configuration, since the holder unit 30 can be easily attached and detached, the scribing wheel 40 constituting the holder unit 30 is replaced by replacing the holder unit 30 itself. Thus, the scribing wheel 40 can be replaced quickly.

  A holding groove 33 formed by cutting out the holder 31 is provided in the lower portion of the holder 31. Support portions 34 a and 34 b are located below the holder 31 cut out to provide the holding groove 33 with the holding groove 33 interposed therebetween. A scribing wheel 40 is rotatably disposed in the holding groove 33. The support portions 34a and 34b are formed with support holes 35 into which pins (not shown) for holding the scribing wheel 40 rotatably are inserted.

[Embodiment 1]
Next, the details of the scribing wheel 40 for forming the hollow hole in the first embodiment for forming a scribe line in a closed curve shape on the glass substrate 17 as the brittle material substrate will be described with reference to FIGS. 3A is a front view of the scribing wheel for forming the hollow hole in the first embodiment, and FIG. 3B is a right side view of the same. 4A is a partially enlarged view of FIG. 3A, FIG. 4B is a vertical sectional view taken along line VV of FIG. 4A, and FIG. 4C shows cutting traces formed on the brittle material substrate by the scribing wheel of FIG. FIG. FIG. 5 is a vertical sectional view taken along the line VV in FIG. 4C.

  As shown in FIG. 3A, the scribing wheel 40 for forming the hollow hole in the first embodiment has a disk shape, and includes a wheel main body 41, a blade 42, a cutting edge ridge line 43, and a groove 44. In the vicinity of the center of the wheel main body 41, a through hole 45 that penetrates the wheel main body 41 in the rotation axis direction S is formed. By inserting a pin into the through hole 45, the scribing wheel 40 for forming the hollow hole is rotatably held by the holder 31 (see FIG. 2) via this pin.

  The cutting edge ridge line 43 is formed in an annular shape on the outer periphery of the wheel main body 41. As shown in FIGS. 3B, 4A and 4B, the blade 42 is substantially V-shaped when viewed from the front, and the thickness of the blade 42 with respect to the rotation axis direction S gradually decreases toward the cutting edge ridge line 43. ing. The cutting edge ridge line 43 is provided along the outermost periphery of the blade 42. A large number of cutting edge ridge lines 43 and grooves 44 are alternately formed at equal pitches on the outermost peripheral portion of the blade 42.

  Each groove 44 is formed such that each bottom portion 46 extends in parallel in the same direction. As shown in FIGS. 3B and 4A, the extending direction L of the bottom 46 of each groove 44 is set so that the angle between the cutting edge ridge line 43 and the cutting edge ridge line 43 is θ1. . The angle θ1 is an acute angle, and is preferably in the range of 10 ° to 80 °.

  When θ1 is less than 10 ° and exceeds 80 °, in both cases, the bottom 46 of the groove is substantially in the same direction as the rotation axis along the edge edge line 43 of the scribing wheel 40 for forming the hollow hole (θ1 = 90 In both cases, a deep crack is formed perpendicular to the scribing direction, but the inclination of the crack is reduced, so that Not suitable.

  Moreover, the groove | channel 44 is made into the shape (ellipse in FIG. 3) which can define a major axis direction so that the shape of a front view may not become circular (isotropic shape). This major axis direction corresponds to the extending direction L of the bottom 46 of the groove 44. As a result, the shape of the groove 44 in front view is asymmetrical about the cutting edge ridge line 43, and the bottom 46 of the groove 44 is rotated by the scribing wheel 40 for forming a hollow hole along the planned scribe line. It will be in the state formed diagonally with respect to the direction. The vertical cross section in the direction perpendicular to the extending direction L of the bottom 46 of the groove 44 is substantially semicircular.

  4A and 5 show a state in which the extending direction L of the bottom portion of the groove 44 formed in the hollow hole forming scribing wheel 40 is a direction rotated by an angle θ1 to the right with respect to the cutting edge ridge line 43. Has been. However, the hollow hole forming scribing wheel 40 contacts the glass substrate in a state in which the extending direction L of the bottom portion of the groove 44 is rotated leftward by an angle θ1 with respect to the cutting edge ridge line 43. Therefore, when this scribing wheel 40 is rotated while applying a predetermined scribe load to the surface of the glass substrate 17 as the brittle material substrate to form the scribing line 17a, the shape shown in FIG. A parallelogram-shaped cutting mark 17b having a pair of acute corners and obtuse corners is formed.

  In addition, a crack 17c is formed in the glass substrate 17, and the crack 17c is formed in a state inclined to the left from the direction H perpendicular to the surface of the glass substrate 17, as shown in FIG. The Note that reference numeral 17d in FIGS. 4C and 5 indicates the tip of the crack 17c.

  That is, the crack 17 c is formed on the contact surface between the hollow hole forming scribing wheel 40 and the glass substrate 17 so as to be inclined in the same direction as the rotation direction of the groove bottom 46 with respect to the cutting edge ridge line 43. Therefore, even if the scribing line is formed by rotating the scribing wheel 40 for forming the hollow hole in the direction opposite to the rotation direction shown in FIG. 4A, the cut marks 17b and cracks having the same shape as that shown in FIG. 4C are formed. 17c is formed. 4A and 5, when the bottom 46 of the groove is formed in a state where it is rotated leftward by θ1 with respect to the cutting edge ridge line 43, the extending direction L of the bottom of the groove 44 is the glass substrate. Since the blade abuts against the cutting edge ridge line 43 with the angle θ1 rotated to the right side, a crack inclined to the right side of the scribe line from the surface of the glass substrate toward the bottom surface is formed.

  Therefore, the rotation direction in which the angle θ1 of the groove bottom 46 with respect to the cutting edge ridge line 43 is formed on the contact surface between the scribing wheel 40 for forming the hollow hole and the glass substrate 17 is outside the closed curve. When the closed curved scribe line is formed, a long crack 17c inclined toward the outer peripheral side of the closed curved scribe line from the surface to the bottom surface of the glass substrate 17 is formed, as in the conventional example shown in FIG. It is formed in a closed curved surface, and the horizontal cracks along the scribe line are also smaller than in the conventional example. Thus, if the scribing wheel 40 for forming the hollow hole in the first embodiment is used, the horizontal crack is small with a small external force, and the inner peripheral edge of the hollow hole is formed along the closed curved crack formed in the glass substrate 17. The hollow hole can be formed in a beautiful state in which minute irregularities and shell-shaped chipping do not occur.

[Modifications 1 and 2]
In the scribing wheel 40 for forming the hollow hole of the first embodiment, the shape of the groove 44 is elliptical in plan view, and the vertical cross section in the direction orthogonal to the extending direction L of the bottom 46 of the groove 44 is substantially Shows an example of a semicircle. However, in the present invention, the shape of the vertical cross section of the groove in the direction orthogonal to the direction L in which the bottom 46 of the groove 44 extends is not only a semicircular shape, but also a semi-elliptical shape, a V shape, and a flat slope. A shape combined with a simple bottom surface or a U-shape or other shapes may be used.

  A scribing wheel 40A for forming a hollow hole in Modification 1 in which the shape of the vertical cross section of the groove in the direction orthogonal to the direction L in which the bottom 46 of the groove 44 extends is V-shaped is also shown in FIG. A scribing wheel 40B for forming a hollow hole in Modification 2 having a shape in which a slope and a flat bottom surface are combined will be described with reference to FIG. 6 and 7, components substantially the same as the hollow hole forming scribing wheel 40 of the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted.

  As shown in FIG. 6, the scribing wheel 40 </ b> A for forming the hollow hole in the first modification has a shape of the groove 44 in a front view that is a parallelogram that is asymmetric with respect to the cutting edge ridge line 43. The vertical cross section in the direction orthogonal to the extending direction L of the bottom 46A is substantially V-shaped. That is, the extending direction L of the bottom portion of the groove 44A formed in the hollow hole forming scribing wheel 40A is a direction rotated by an angle θ1 to the right with respect to the cutting edge ridge line 43 within the contact surface of the cutting edge ridge line 43. Yes. The modification hole 1 scribing wheel 40A for forming a hollow hole can also have substantially the same effects as the scribing wheel 40 for forming a hollow hole of the first embodiment.

  As shown in FIG. 7, the scribing wheel 40B for forming the hollow hole in the modified example 2 has a parallel hexagonal shape in which the front view is asymmetric with respect to the edge line 43 of the blade, and the groove 44B is flat. The vertical cross section in the direction orthogonal to the extending direction L of the bottom portion 46B has a substantially combined shape of a slope and a flat bottom surface. That is, the extending direction L of the bottom of the flat groove 44B formed in the scribing wheel 40B for hollow hole formation is a direction rotated by an angle θ1 to the right with respect to the cutting edge ridge line 43 within the contact surface of the cutting edge ridge line 43. It has become. Also by the scribing wheel 40B for forming the hollow hole in the modified example 2, it is possible to achieve substantially the same operational effects as the scribing wheel 40 for forming the hollow hole of the first embodiment.

[Embodiment 2]
A scribing wheel 40C for forming a hollow hole in the second embodiment will be described with reference to FIGS. 8 to 11, components substantially the same as the hollow hole forming scribing wheel 40 of Embodiment 1 are given the same reference numerals, and detailed descriptions thereof are omitted.

  The scribing wheel 40C for forming the hollow hole in the second embodiment is the same as the scribing wheel 40 for forming the hollow hole in the first embodiment in which the bottom 46C of the groove 44C is in contact with the cutting edge ridge line 43 within the contact surface of the cutting edge ridge line 43. Not only extending in a direction rotated by a predetermined angle θ1, but further extending in a direction inclined by a predetermined angle θ2 (see FIG. 9) with respect to the rotational axis direction S of the scribing wheel 40C for hollow hole formation It is.

  That is, the blade 42 in the scribing wheel 40C for forming the hollow hole in the second embodiment is substantially V-shaped when viewed from the front, as shown in FIGS. The thickness of 42 gradually decreases toward the cutting edge ridge line 43. The cutting edge ridge line 43 is provided along the outermost periphery of the blade 42. A large number of cutting edge ridge lines 43 and grooves 44 </ b> C are alternately formed at equal pitches on the outermost peripheral portion of the blade 42.

  Each groove 44C is formed such that each bottom 46C extends in parallel in the same direction. As shown in FIGS. 8B and 9A, the extending direction L of the bottom 46C of each groove 44C is on the right side so that the angle between the cutting edge ridge line 43 and the cutting edge ridge line 43 is θ1. In a rotated state and on the opposite side to the direction rotated by the angle θ1 with respect to the cutting edge ridge line 43, that is, on the left side with respect to the cutting edge ridge line 43, further in a direction inclined at a predetermined angle θ2 in the rotation axis direction S Has been extended. The angle θ1 is an acute angle, and is preferably in the range of 10 ° to 80 °. Further, the angle θ2 is also an acute angle, and can be appropriately selected from a range parallel to the rotation axis S (θ2 = 0 °) to a range where no groove is formed on the surface of the inclined surface of the blade 42.

  The extending direction L of the bottom 46C of each groove 44C is the same as the direction rotated by a predetermined angle θ1 with respect to the cutting edge ridge line 43, that is, to the rotation axis direction S on the right side of the cutting edge ridge line 43 in FIG. If the predetermined angle θ2 is inclined, the predetermined effect cannot be achieved. This is because, in the contact surface of the cutting edge ridge line 43, the crack inclination effect by rotating the cutting edge ridge line by a predetermined angle θ1 and the crack inclination by tilting the predetermined angle θ2 with respect to the rotation axis direction S. This is because the effects of the effects cancel each other.

  FIG. 11 shows the occurrence of cracks when a scribe line is formed on a glass substrate using the scribing wheel 40C for forming the hollow hole in the second embodiment. Note that “rib mark depth” in FIG. 11 indicates the deepest position of the rib mark portion formed using the scribing wheel 40C for forming the hollow hole, and “crack end” indicates the position at the deepest portion of the crack. ing.

  As described above, when the extending direction L of the bottom 46 of the groove 44C is also extended in a direction inclined at a predetermined angle θ2 with respect to the rotation axis direction S of the hollow hole forming scribing wheel 40C, It is possible to form cracks that are more inclined than when the scribing line is formed on the brittle material substrate using the scribing wheel 40 for forming the hollow hole in the first embodiment that does not have the configuration. Therefore, with a smaller external force, the horizontal crack is small, and along the closed curved crack formed in the brittle material substrate, a fine unevenness and shell-like chipping does not occur on the inner periphery of the hollow hole. A hollow hole can be formed.

  In the second embodiment, although not shown in the drawings, the shape of the groove is a semicircular shape in a direction perpendicular to the direction in which the bottom of the groove extends, as in the first and second modifications. , Semi-elliptical shape, V shape, a shape combining a slope and a flat bottom surface, or another shape such as a U shape.

  Furthermore, in Embodiments 1 (including modifications) and 2, the angles formed between the surfaces forming the respective blades formed on both sides of the edge of the blade edge and the surfaces formed by the edge of the blade edge are the same. Although the example applied to a thing was shown, it is applicable also to what these angles differ from each other. In this case, if the direction side rotated by an angle θ1 with respect to the edge of the blade edge is the side where the angle between the surface forming the blade and the surface formed by the edge of the blade edge is large, a more inclined crack is formed. Will be able to.

  When a scribe line is formed on a brittle material substrate such as a glass substrate using the scribing wheel of the present invention, the formed crack is formed in a direction inclined from the thickness direction of the brittle material substrate, and further reaches the depth of the brittle material substrate. Thereby, a through-hole can be smoothly formed in a brittle material board | substrate, without generating a galling, a peeling, etc. in a periphery.

DESCRIPTION OF SYMBOLS 10 ... Scribing apparatus 11 ... Moving stand 12a, 12b ... Guide rail 13 ... Ball screw 14 ... Motor 15 ... Motor 16 ... Table 17 ... Glass substrate 17a ... Scribe line 17b ... Cutting mark 17c ... Crack 17d ... Crack tip 18 ... Camera DESCRIPTION OF SYMBOLS 19 ... Bridge 20a, 20b ... Column 21 ... Scribe head 22 ... Guide 23 ... Holder joint 23a ... Rotating shaft part 23b ... Joint part 24a ... Bearing 24c ... Spacer 25 ... Opening 26 ... Internal space 27 ... Magnet 28 ... Parallel pin 30 ... Holder unit 31 ... Holder 32 ... Mounting portion 32a ... Inclined portion 32b ... Flat portion 33 ... Holding groove 34a ... Support portion 35 ... Support hole 40, 40A-40C ... Scribing wheel for hollowing out 41 ... Wheel main body portion 42 ... Blade 43 ... Cutting edge ridge line 44, 44A-44C ... Groove 45 ... Through-hole 46, 46A-46C ... Bottom

Claims (8)

A plurality of grooves are formed at predetermined intervals along the edge of the edge of the disc-shaped scribing wheel,
A scribing wheel for forming a hollow hole, wherein a bottom portion of the groove extends in a direction inclined at a predetermined angle θ1 with respect to the edge of the cutting edge within a contact surface of the edge of the cutting edge.   The scribing wheel for forming a hollow hole according to claim 1, wherein the θ1 is 10 ° or more and 80 ° or less.   The shape of the vertical cross section of the groove in the direction orthogonal to the direction in which the bottom of the groove extends is a semicircular shape, a semi-elliptical shape, a V shape, a shape combining a slope and a flat bottom surface, or a U shape. The scribing wheel for forming a hollow hole according to claim 1 or 2, wherein the scribing wheel is formed.   The bottom of the groove extends in a direction inclined at a predetermined angle θ2 with respect to the rotation axis direction of the scribing wheel on the opposite side to the direction rotated by the angle θ1 with respect to the edge of the cutting edge. The scribing wheel for forming a hollow hole according to any one of claims 1 to 3.   The angles formed between the surfaces forming the respective blades formed on both sides of the cutting edge ridge line and the surfaces formed by the ridge lines are different from each other, and the direction side rotated by an angle θ1 with respect to the cutting edge ridge line is The scribing wheel for forming a hollow hole according to any one of claims 1 to 4, wherein an angle formed between a surface forming the blade and a surface formed by the ridge line is a large side. .   The at least one of the brittle material substrate and the hollow hole forming scribing wheel is moved in a state in which the hollow hole forming scribing wheel according to claim 1 is in pressure contact with the surface of the brittle material substrate. The scribe line is formed so as to draw a closed curve, and at that time, a crack inclined toward the outside of the closed curve with respect to the thickness direction of the brittle material substrate is formed, and then the brittle material substrate is formed. A method of forming a hollow hole in a brittle material substrate, wherein stress is applied to drop out the inside of the closed curve to form the hollow hole in the brittle material substrate.   The at least one of the brittle material substrate and the hollow hole forming scribing wheel is moved in a state where a cutting edge ridge line of the hollow hole forming scribing wheel is vertically set with respect to the brittle material substrate. Item 7. A method for forming a hollow hole in a brittle material substrate according to Item 6.   At least one of the brittle material substrate and the hollow hole forming scribing wheel is moved so that the direction in which the θ1 is an acute angle is on the inner side of the closed curve on the contact surface with the brittle material substrate. A method for forming a hollow hole in a brittle material substrate according to claim 6 or 7.