JP6668749B2 - Holder joint - Google Patents

Holder joint Download PDF

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Publication number
JP6668749B2
JP6668749B2 JP2015255604A JP2015255604A JP6668749B2 JP 6668749 B2 JP6668749 B2 JP 6668749B2 JP 2015255604 A JP2015255604 A JP 2015255604A JP 2015255604 A JP2015255604 A JP 2015255604A JP 6668749 B2 JP6668749 B2 JP 6668749B2
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Prior art keywords
holder
opening hole
joint
flat surfaces
mounting portion
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JP2017119348A (en
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良太 阪口
良太 阪口
吉也 佐々木
吉也 佐々木
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2015255604A priority Critical patent/JP6668749B2/en
Priority to TW105138549A priority patent/TWI599462B/en
Priority to KR1020160169511A priority patent/KR101895778B1/en
Priority to CN201611170308.6A priority patent/CN106914994A/en
Publication of JP2017119348A publication Critical patent/JP2017119348A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/24—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2614—Means for mounting the cutting member
    • B26D7/2621—Means for mounting the cutting member for circular cutters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Description

本発明は、下端にカッターホイール（スクライビングホイールともいう）を備えたホルダを保持するためのホルダジョイントに関する。本発明のホルダジョイントは、カッターホイールを基板表面に押し付けながらスクライブすることにより、基板にスクライブライン（分断用の溝）を加工したり、分断（ブレイク）したりする基板加工装置に用いられ、特に曲線のスクライブラインを形成するための基板加工装置に好適に用いられる。   The present invention relates to a holder joint for holding a holder having a cutter wheel (also called a scribing wheel) at a lower end. INDUSTRIAL APPLICABILITY The holder joint of the present invention is used in a substrate processing apparatus that processes a scribe line (groove for division) on a substrate or divides (breaks) a substrate by scribing while pressing a cutter wheel against the substrate surface. It is suitably used for a substrate processing apparatus for forming a curved scribe line.

従来から、ガラス、シリコン、セラミック、半導体等の脆性材料からなる基板や貼り合わせ基板（以下単に「基板」という）の表面に、カッターホイールでスクライブ予定ラインに沿ったスクライブラインを形成したり、あるいは、分断予定ラインから完全分断したりする基板加工装置が知られている（例えば特許文献１、特許文献２参照）。   Conventionally, a scribe line is formed along a scheduled scribe line with a cutter wheel on a surface of a substrate made of a brittle material such as glass, silicon, ceramic, or a semiconductor or a bonded substrate (hereinafter, simply referred to as a “substrate”). There is known a substrate processing apparatus that completely cuts from a line to be cut (for example, see Patent Documents 1 and 2).

図７は、後記特許文献等に開示されている従来の基板加工装置を示す斜視図である。
基板加工装置Ｂは、加工対象となる基板Ｗを載置して保持する水平なテーブル３１を備えている。テーブル３１は、モータを内蔵する回転駆動部３２により水平面内で回動できるようになっており、かつ、水平なレール３３、３３に沿ってＹ方向に移動できるように構成されている。このＹ方向の移動は、モータ３４によって回転するネジ軸３５より行われる。 FIG. 7 is a perspective view showing a conventional substrate processing apparatus disclosed in a patent document described below.
The substrate processing apparatus B includes a horizontal table 31 on which a substrate W to be processed is placed and held. The table 31 is configured to be rotatable in a horizontal plane by a rotary drive unit 32 having a built-in motor, and is configured to be movable in the Y direction along horizontal rails 33, 33. This movement in the Y direction is performed by a screw shaft 35 rotated by a motor 34.

そして、テーブル３１を挟んで設けられる一対の支柱３６、３６と、これら支柱３６、３６をつなぐようにＸ方向に水平に延びるガイドバー３７とを備えたブリッジ３８が、テーブル３１上を跨ぐようにして設けられている。ガイドバー３７には、Ｘ方向に水平に延びるガイド３９が設けられ、スクライブヘッド４０がガイド３９に沿ってＸ方向に移動できるように配置されている。スクライブヘッド４０のＸ方向への移動はモータ４１の駆動によって行われる。また、スクライブヘッド４０にはカッターホイール２１を備えたホルダ２０がホルダジョイント１０を介して着脱可能に取り付けられ、スクライブヘッド４０の内部には、ホルダジョイント１０の昇降を可能とする昇降機構（図示略）が組み込まれている。   Then, a bridge 38 including a pair of columns 36, 36 provided on both sides of the table 31 and a guide bar 37 extending horizontally in the X direction so as to connect the columns 36, 36 so as to straddle the table 31. It is provided. The guide bar 37 is provided with a guide 39 extending horizontally in the X direction, and is arranged so that the scribe head 40 can move in the X direction along the guide 39. The movement of the scribe head 40 in the X direction is performed by driving a motor 41. Further, a holder 20 having a cutter wheel 21 is detachably attached to the scribe head 40 via a holder joint 10, and inside the scribe head 40, an elevating mechanism (not shown in the drawings) that allows the holder joint 10 to move up and down. ) Is incorporated.

上記の構成により、テーブル３１上に載置した基板Ｗにカッターホイール２１を押し付けながらカッターホイール２１とテーブル３１の一方または双方を移動させることにより、基板ＷをＸ−Ｙ方向にスクライブしてスクライブラインを形成したり、基板Ｗを分断したりすることができるようになっている。   According to the above configuration, the cutter wheel 21 and one or both of the table 31 are moved while pressing the cutter wheel 21 against the substrate W placed on the table 31, thereby scribing the substrate W in the X-Y direction and forming a scribe line. And the substrate W can be divided.

図８〜１１は、ホルダ２０及びホルダジョイント１０の構成を示すものである。
ホルダ２０は、略円柱状の胴部２２と、胴部２２の下端で胴部２２の軸心に対して平行に形成された一対の平坦面２３、２３とを備え、かつ、これら一対の平坦面２３、２３の間に、当該平坦面２３と平行な切り欠き溝２４が形成されており、この切り欠き溝２４に、水平なホイール軸２５を介してカッターホイール２１が回転自在に取り付けられている。 8 to 11 show the configuration of the holder 20 and the holder joint 10. FIG.
The holder 20 includes a substantially cylindrical body 22, and a pair of flat surfaces 23, 23 formed at the lower end of the body 22 in parallel with the axis of the body 22. A cutout groove 24 is formed between the surfaces 23, 23 and parallel to the flat surface 23, and the cutter wheel 21 is rotatably attached to the cutout groove 24 via a horizontal wheel shaft 25. I have.

また、胴部２２の上部は、ホルダジョイント１０に位置決めして取り付けるための取付部２６となっている。取付部２６は、円柱状の胴部２２の一部を切り欠いて形成されたフラットな垂直面２６ａと、この垂直面２６ａの下端に連なって形成された傾斜面２６ｂとからなる。傾斜面２６ｂとホイール軸２５とは平行に形成されており、これにより、傾斜面２６ｂと後述する平行ピン１５との接線に対してカッターホイール２１の向きが直交するようになっている。また、胴部２２は鉄等の磁性体金属で構成されている。   The upper part of the body 22 is an attachment part 26 for positioning and attaching to the holder joint 10. The mounting portion 26 is composed of a flat vertical surface 26a formed by cutting out a part of the cylindrical body portion 22, and an inclined surface 26b formed continuously from the lower end of the vertical surface 26a. The inclined surface 26b and the wheel shaft 25 are formed in parallel, so that the direction of the cutter wheel 21 is orthogonal to a tangent between the inclined surface 26b and a parallel pin 15 described later. The body 22 is made of a magnetic metal such as iron.

ホルダジョイント１０は、基板加工装置Ｂのスクライブヘッド４０に連結されるベアリング１１を上部に備えており、下部がホルダ２０を保持する保持部１２となっている。保持部１２の内部には、上下方向に延びる断面略円形の開口穴１３が設けられるとともに、内奥部（最上端）に磁石１４が取り付けられている。開口穴１３の内径は、挿入されるホルダ２０の胴部２２の外径より僅かに大きく形成され、ホルダ２０の取付部２６における傾斜面２６ｂの背面側となる取付部周面２７と相対する位置には、開口穴１３の内周面に対し垂直方向に沿った凹状の逃げ加工部１６が設けられている。また、開口穴１３の逃げ加工部１６と対向する内面にも、取付部２６の挿入を容易にするために穴径を大きくした逃げ加工部１７が設けられている。   The holder joint 10 has a bearing 11 connected to a scribe head 40 of the substrate processing apparatus B at an upper portion, and a lower portion serving as a holding portion 12 for holding the holder 20. An opening 13 extending in the vertical direction and having a substantially circular cross section is provided inside the holding portion 12, and a magnet 14 is attached to an inner deep portion (uppermost end). The inner diameter of the opening hole 13 is formed slightly larger than the outer diameter of the body 22 of the holder 20 to be inserted, and is located at a position opposed to the mounting portion peripheral surface 27 on the rear side of the inclined surface 26 b of the mounting portion 26 of the holder 20. Is provided with a recessed relief portion 16 extending in a direction perpendicular to the inner peripheral surface of the opening hole 13. Also, on the inner surface of the opening 13 facing the relief 16, a relief 17 having a larger hole diameter is provided to facilitate insertion of the mounting part 26.

さらに、開口穴１３の内部には、開口穴１３の軸心とは離れた箇所で当該軸心と直交する方向に延びる位置決め用の平行ピン１５が設けられている。この平行ピン１５は、ホルダ２０の取付部２６がホルダジョイント１０の開口穴１３に挿入されたときに、取付部２６の傾斜面２６ｂが接触し、傾斜面２６ｂ背面側の取付部周面２７を開口穴１３の内面に押し付けて、ホルダ２０の方向や姿勢が一定になるように位置決めするものである。   Further, inside the opening 13, a parallel pin 15 for positioning is provided at a location away from the axis of the opening 13 and extending in a direction orthogonal to the axis. When the mounting portion 26 of the holder 20 is inserted into the opening hole 13 of the holder joint 10, the parallel pin 15 makes contact with the inclined surface 26 b of the mounting portion 26, and causes the mounting portion peripheral surface 27 on the back side of the inclined surface 26 b to be in contact. The holder 20 is pressed against the inner surface of the opening hole 13 and positioned so that the direction and the posture of the holder 20 are constant.

ホルダ２０をホルダジョイント１０に取り付けるときは、ホルダ２０の取付部２６側をホルダジョイント１０の開口穴１３に挿入して取り付ける。取付部２６がホルダジョイント１０の開口穴１３に挿入されると、取付部２６の傾斜面２６ｂに平行ピン１５が接触して位置決めされるとともに、ホルダ２０の上端部が磁石１４に吸引されて保持される。これにより、ホルダ２０の姿勢が自動的に一定方向に向いた状態でホルダジョイント１０に取り付けられる。   When mounting the holder 20 to the holder joint 10, the mounting portion 26 side of the holder 20 is inserted into the opening 13 of the holder joint 10 and mounted. When the mounting portion 26 is inserted into the opening 13 of the holder joint 10, the parallel pin 15 contacts the inclined surface 26 b of the mounting portion 26 to be positioned, and the upper end of the holder 20 is attracted to the magnet 14 and held. Is done. Thereby, the holder 20 is attached to the holder joint 10 in a state where the posture of the holder 20 is automatically oriented in a certain direction.

特開２０１０−０００７４４号公報JP 2010-000744 A 特開２０１１−２１８８１５号公報JP 2011-218815 A

上記の構成において、ホルダ２０の取付部周面２７と相対するホルダジョイント１０の開口穴１３の内周面には、垂直方向に沿った凹状の逃げ加工部１６が設けられているので、取付部２６の傾斜面２６ｂが平行ピン１５によって押し付けられると、図１１に示すように、逃げ加工部１６の縁部近傍で開口穴１３の内周面の２箇所Ｐ１、Ｐ２で取付部周面２７が線接触して保持される。このとき、図１０（ｂ）に示すように、接触点Ｐ１、Ｐ２を結ぶ線は平行ピン１５と平行であって、接触点Ｐ１、Ｐ２と平行ピン１５の中央接触点Ｐ３を結んだ形状が二等辺三角形となるようにして、平行ピン１５によるホルダ２０への押し付け力が、接触点Ｐ１、Ｐ２で左右にバランスよく負荷されることが理想的である。   In the above configuration, the recessed relief portion 16 extending in the vertical direction is provided on the inner peripheral surface of the opening 13 of the holder joint 10 facing the mounting portion peripheral surface 27 of the holder 20. When the inclined surface 26b of the hole 26 is pressed by the parallel pin 15, as shown in FIG. 11, the mounting portion peripheral surface 27 at two locations P1 and P2 on the inner peripheral surface of the opening hole 13 near the edge of the relief processing portion 16. It is held in line contact. At this time, as shown in FIG. 10B, the line connecting the contact points P1 and P2 is parallel to the parallel pin 15, and the shape connecting the contact points P1 and P2 and the central contact point P3 of the parallel pin 15 is Ideally, the pressing force of the parallel pin 15 against the holder 20 is applied to the right and left at the contact points P1 and P2 in a balanced manner so as to form an isosceles triangle.

通常、直線のスクライブラインを加工する場合には、平行ピン１５によるホルダ２０への押し付け力が接触点Ｐ１、Ｐ２で左右にバランスよく負荷される状態が維持される。しかし、曲線のスクライブラインを加工する場合には、カッターホイール２１の進行方向に対して横向きの力がカッターホイール２１を通じてホルダ２０に加わるため、スクライブ後に接触点Ｐ１、Ｐ２が理想のポイントからずれることがある。
このような現象が生じると、ホルダの安定性が悪くなり、カッターホイールの位置及び向きが横にずれたりして、スクライブラインを精度よく加工することが困難になる。 Normally, when processing a straight scribe line, a state in which the pressing force of the parallel pin 15 against the holder 20 is applied to the contact points P1 and P2 in a balanced manner on the left and right is maintained. However, when a curved scribe line is machined, a force transverse to the traveling direction of the cutter wheel 21 is applied to the holder 20 through the cutter wheel 21, so that the contact points P1 and P2 deviate from the ideal points after the scribe. There is.
When such a phenomenon occurs, the stability of the holder deteriorates, and the position and direction of the cutter wheel are shifted laterally, making it difficult to accurately process the scribe line.

そこで本発明は、上記課題に鑑み、曲線のスクライブラインを加工する場合にもホルダのガタツキをなくして確実に保持することのできるホルダジョイントを提供することを目的とする。   In view of the above problems, it is an object of the present invention to provide a holder joint that can securely hold a holder without rattling even when a curved scribe line is machined.

上記課題を解決するために、本発明では次のような技術的手段を講じた。すなわち、本発明のホルダジョイントは、カッターホイールを備えたホルダを保持するホルダジョイントであって、下向きに開口して上下に延びる開口穴と、前記開口穴内に設置された位置決め部材と、前記開口穴の内奥部に配置された磁石と、前記開口穴の内面で平面視Ｖ字形をなすように左右対称に形成された一対の垂直な平坦面とを備え、前記左右の平坦面は、前記位置決め部材の中央と直交する水平な仮想直線の左右に振り分けて形成されており、前記左右の平坦面に、前記開口穴に挿入されたホルダの取付部周面が接触するように形成され、前記左右の平坦面のなす角度が５０〜１００度の範囲内で形成されている構成とした。 In order to solve the above problems, the present invention has taken the following technical measures. That is, the holder joint of the present invention is a holder joint for holding a holder provided with a cutter wheel, and includes an opening hole that opens downward and extends vertically, a positioning member installed in the opening hole, and the opening hole. And a pair of vertical flat surfaces formed bilaterally symmetrically so as to form a V-shape in plan view on the inner surface of the opening hole, and the left and right flat surfaces are positioned by the positioning. is formed by distributing the left and right horizontal virtual straight line perpendicular to the central member, the flat surface of the right and left mounting portions circumferential surface of the holder is inserted into the open hole is formed so as to contact the right and left The angle formed by the flat surface is in the range of 50 to 100 degrees .

本発明では、ホルダジョイントの開口穴の内面に、ホルダの取付部周面を受ける左右の平坦面がＶ字形となるように形成されているので、左右の平坦面に対してホルダ取付部周面の位置を精度よく線接触させて取り付けることができるとともに、曲線のスクライブ加工を行うなどホルダが横向きの力を受ける場合でも、ホルダ取付部周面をホルダジョイントの左右の平坦面に確実に接触させて保持することができる。これにより、スクライブラインを精度よく加工することができる。また、直線のスクライブ加工を行う場合においても、突発的な力が加わることによるホルダジョイント内でのホルダの揺動が抑制されるため、スクライブ精度をより安定させることができる。   In the present invention, since the left and right flat surfaces for receiving the mounting portion peripheral surface of the holder are formed in the inner surface of the opening hole of the holder joint so as to form a V-shape, the holder mounting portion peripheral surface with respect to the left and right flat surfaces. Position can be accurately line-contacted, and even when the holder is subjected to a horizontal force, such as when scribing a curve, make sure that the peripheral surface of the holder mounting part is securely in contact with the left and right flat surfaces of the holder joint. Can be held. Thereby, the scribe line can be processed with high accuracy. In addition, even when performing a straight scribe process, the swing of the holder in the holder joint due to the sudden force being applied is suppressed, so that the scribe accuracy can be further stabilized.

また本発明では、上記の構成に加えて、前記開口穴の内面に、当該開口穴に挿入されたホルダを前記平坦面の方向に向かって弾力的に押し付ける弾性部材を設ける構成とするのがよい。
これにより、開口穴に挿入されたホルダの胴部が平坦面に向かって常時弾力的に押し付けた状態で保持されることになり、ホルダ挿入時の安定性を一層高めることができる。 Further, in the present invention, in addition to the above-described configuration, it is preferable that an elastic member that elastically presses the holder inserted into the opening toward the flat surface is provided on the inner surface of the opening. .
As a result, the body of the holder inserted into the opening is held in a state of being constantly elastically pressed against the flat surface, and the stability when the holder is inserted can be further enhanced.

本発明のホルダジョイントとこれに取り付けられるホルダを示す斜視図。The perspective view which shows the holder joint of this invention, and the holder attached to this. 図１のホルダジョイントの構造を示す縦断面図。FIG. 2 is a longitudinal sectional view showing the structure of the holder joint of FIG. 1. 図２におけるＣ−Ｃ線断面図。FIG. 3 is a sectional view taken along line CC in FIG. 2. 図１のホルダジョイントに係るホルダ取付状態を示す縦断面図。FIG. 2 is a longitudinal sectional view showing a holder mounting state according to the holder joint of FIG. 1. 図４におけるＤ−Ｄ線断面の拡大図。FIG. 5 is an enlarged view of a cross section taken along line DD in FIG. 4. 本発明のホルダジョイントの別実施例を示す縦断面図と横断面図。FIG. 4 is a longitudinal sectional view and a transverse sectional view showing another embodiment of the holder joint of the present invention. ホルダジョイントが用いられる基板加工装置を示す斜視図。FIG. 3 is a perspective view showing a substrate processing apparatus using a holder joint. ホルダジョイントに取り付けられるホルダを示す断面図。Sectional drawing which shows the holder attached to a holder joint. 従来のホルダジョイントの構造を示す縦断面図と保持部の底面図。FIG. 7 is a vertical cross-sectional view showing a structure of a conventional holder joint and a bottom view of a holding unit. 図９のホルダジョイントに係るホルダ取付状態を示す縦断面図とＥ−Ｅ線断面の拡大図。FIG. 10 is a vertical cross-sectional view showing a holder mounting state of the holder joint of FIG. 9 and an enlarged view of a cross section taken along line EE. 従来のホルダジョイントにおけるホルダの接触点を示す説明図。Explanatory drawing which shows the contact point of the holder in the conventional holder joint.

以下において、本発明の詳細をその実施の形態を示す図面に基づいて説明する。
図１〜５は、本発明に係るホルダジョイントＡを示すものであって、これに接続されるホルダ２０は、前述した図８のホルダ２０と同様のものである。 Hereinafter, details of the present invention will be described with reference to the drawings showing the embodiments.
1 to 5 show a holder joint A according to the present invention, and a holder 20 connected to the holder joint A is similar to the holder 20 of FIG. 8 described above.

ホルダジョイントＡは、上部にベアリング１を備え、下部がホルダ２０を保持する保持部２となっており、上部のベアリング１の部分で基板加工装置Ｂ（図７参照）のスクライブヘッド４０に回動可能に取り付けられる。保持部２の内部には、上下方向に延びる開口穴３が設けられるとともに、内奥部に磁石４が取り付けられている。   The holder joint A has a bearing 1 at an upper part, and a lower part is a holding part 2 for holding a holder 20. The upper part of the bearing 1 is rotated by a scribe head 40 of a substrate processing apparatus B (see FIG. 7). Mounted as possible. An opening 3 extending in the up-down direction is provided inside the holding unit 2, and a magnet 4 is attached to an inner back portion.

開口穴３の内部には、位置決め部材として、開口穴３の軸心とは離れた箇所で当該軸心と直交する方向に延びる位置決め用の平行ピン５が設けられている。この平行ピン５は、ホルダ２０が開口穴３に挿入されたときに、ホルダ２０の傾斜面２６ｂが接触して傾斜面２６ｂ背面側の取付部周面２７を平坦面６、６に押し付けて、ホルダ２０の方向や姿勢が一定になるように位置決めするものである。この構成については以下で詳述する。   Inside the opening 3, a positioning parallel pin 5 is provided as a positioning member that extends in a direction perpendicular to the axis of the opening 3 at a location away from the axis of the opening 3. When the holder 20 is inserted into the opening hole 3, the parallel pin 5 comes into contact with the inclined surface 26 b of the holder 20 and presses the mounting portion peripheral surface 27 on the rear side of the inclined surface 26 b against the flat surfaces 6, 6. Positioning is performed so that the direction and posture of the holder 20 are constant. This configuration will be described in detail below.

また、開口穴３の内面には、平面視Ｖ字形をなすように左右対称に配置された一対の平坦面６、６が垂直方向に沿って形成されている。これら左右の平坦面６、６は、図３に示すように、平行ピン５の中央と直交する水平な仮想直線Ｌの左右に振り分けて形成されており、ホルダ２０が開口穴３に挿入されたときにホルダ２０の取付部周面２７が接触するように形成されている。この左右の平坦面６、６がなす角度αは、５０〜１００度の範囲内で形成するのがよい。本実施例の場合、挿入されるホルダ２０の胴部２２の直径５ｍｍに対して６０度の角度で形成されている。   On the inner surface of the opening 3, a pair of flat surfaces 6, 6 symmetrically arranged to form a V-shape in plan view are formed along the vertical direction. As shown in FIG. 3, the left and right flat surfaces 6 are formed on the left and right sides of a horizontal virtual straight line L orthogonal to the center of the parallel pin 5, and the holder 20 is inserted into the opening 3. It is formed so that the mounting portion peripheral surface 27 of the holder 20 sometimes comes into contact. The angle α formed by the left and right flat surfaces 6 is preferably in the range of 50 to 100 degrees. In the case of this embodiment, it is formed at an angle of 60 degrees with respect to the diameter 5 mm of the body 22 of the holder 20 to be inserted.

上記の構成において、ホルダ２０をホルダジョイントＡに取り付けるときは、図４に示すように、まず、ホルダ２０の取付部２６側をホルダジョイントＡの開口穴３に挿入して取り付ける。これにより、取付部２６の傾斜面２６ｂに平行ピン５が接触して位置決めされるとともに、ホルダ２０の上端部が磁石４に吸引されて保持される。このとき、磁石４によってホルダ２０が引き上げられるので、取付部２６の傾斜面２６ｂが平行ピン５に押し付けられる。すなわち、図５に示すように、傾斜面２６ｂ背面側の取付部周面２７がＶ字形に配置された左右の平坦面６、６に線接触で押し付けられ、これにより、ホルダ２０の姿勢が自動的に一定方向に向いた状態でホルダジョイントＡに取り付けられる。   In the above configuration, when the holder 20 is mounted on the holder joint A, first, the mounting portion 26 side of the holder 20 is inserted into the opening 3 of the holder joint A and mounted as shown in FIG. As a result, the parallel pin 5 comes into contact with the inclined surface 26b of the mounting portion 26 to be positioned, and the upper end of the holder 20 is attracted and held by the magnet 4. At this time, since the holder 20 is pulled up by the magnet 4, the inclined surface 26 b of the mounting portion 26 is pressed against the parallel pin 5. That is, as shown in FIG. 5, the mounting portion peripheral surface 27 on the back side of the inclined surface 26b is pressed against the left and right flat surfaces 6, 6 arranged in a V-shape by line contact, whereby the posture of the holder 20 is automatically adjusted. It is attached to the holder joint A in a state where it is oriented in a certain direction.

なお、左右の平坦面６、６のなす角度αを６０度として、直径５ｍｍのホルダ２０の胴部２２をホルダジョイントＡの開口穴３に挿入した場合には、平坦面６、６での線接触点Ｐ１、Ｐ２と平行ピン５の中央接触点Ｐ３を結んだ形状が略正三角形となって各接触点Ｐ１〜Ｐ３がバランスよく配分され、安定してホルダ２０を保持することができる。   When the body part 22 of the holder 20 having a diameter of 5 mm is inserted into the opening hole 3 of the holder joint A with the angle α formed by the left and right flat surfaces 6 and 6 being 60 degrees, the line on the flat surfaces 6 and 6 The shape connecting the contact points P1 and P2 and the central contact point P3 of the parallel pin 5 is a substantially equilateral triangle, and the contact points P1 to P3 are distributed in a well-balanced manner, so that the holder 20 can be stably held.

このように、開口穴３の内面にホルダ２０の取付部周面２７を受ける左右の平坦面６、６がＶ字形に配置して設けられているので、平坦面６、６に対してホルダ２０の取付部周面２７の位置を精度よく線接触させて取り付けることができるとともに、曲線のスクライブ加工を行うなど、カッターホイール２１の進行方向に対して横向きの力がホルダ２０に加わった場合でも、取付部周面２７を左右の平坦面６、６に確実に接触させてホルダジョイントＡに取り付けることができる。したがって、曲線のスクライブ加工中にカッターホイールが横向きにずれたり、位置が移動したりすることがなくなり、きれいなスクライブラインを精度よく形成することができる。   As described above, the left and right flat surfaces 6, 6 for receiving the mounting portion peripheral surface 27 of the holder 20 are provided in the inner surface of the opening hole 3 in a V-shape. The position of the mounting portion peripheral surface 27 can be accurately line-contacted and mounted, and even when a force transverse to the traveling direction of the cutter wheel 21 is applied to the holder 20 such as performing a scribe process of a curve, The mounting portion peripheral surface 27 can be securely attached to the left and right flat surfaces 6 and 6 and can be mounted to the holder joint A. Accordingly, the cutter wheel does not shift laterally or move during the curve scribe processing, and a clean scribe line can be accurately formed.

図６は本発明のホルダジョイントの別実施例を示すものである。当該実施例では、上記した構成に加えて、ホルダジョイントＡ’の開口穴３に挿入されたホルダ２０の胴部２２を、平坦面６、６の方向に向かって弾力的に押し付ける弾性部材７を設けており、この弾性部材７の一例として、ボールプランジャを用いて説明する。
弾性部材（ボールプランジャ）７は、筒状のケーシング７ａと、ケーシング７ａの先端から周面の一部が突出した状態でケーシング７ａに出没自在に保持されたボール７ｂと、このボール７ｂを常時突出方向に付勢するスプリング７ｃとからなり、ホルダジョイントＡ’の開口穴３の開口部近傍で平坦面６、６とは反対側の内面に取り付けられている。 FIG. 6 shows another embodiment of the holder joint of the present invention. In this embodiment, in addition to the above-described configuration, the elastic member 7 that elastically presses the body 22 of the holder 20 inserted into the opening 3 of the holder joint A ′ in the direction of the flat surfaces 6, 6 is provided. The elastic member 7 will be described using a ball plunger as an example.
The elastic member (ball plunger) 7 includes a cylindrical casing 7a, a ball 7b held in the casing 7a so as to freely protrude and retract from the casing 7a with a part of the peripheral surface protruding from the front end of the casing 7a, and the ball 7b is always protruded. And a spring 7c biasing in the direction, and is attached to the inner surface on the opposite side of the flat surfaces 6, 6 near the opening of the opening hole 3 of the holder joint A '.

すなわち、開口穴３に挿入されたホルダ２０の胴部２２を弾性部材７が平坦面６、６に向かって弾力的に押し付けることにより、ホルダ２０の挿入時の安定性をさらに高めてガタツキを確実になくすことができる。また、弾性部材７の取付位置を開口穴３の開口部近傍で平行ピン５とは離れた下方位置とすることにより、上方の平行ピン５と下方の弾性部材７との上下２箇所でホルダ２０の胴部２２を平坦面６、６に向かって押し付けることができ、ホルダ２０をホルダジョイントＡ’に保持させたときの安定性をより一層高めることができる。   That is, the elastic member 7 elastically presses the body portion 22 of the holder 20 inserted into the opening hole 3 toward the flat surfaces 6, 6, thereby further increasing the stability at the time of inserting the holder 20 and ensuring the backlash. Can be eliminated. Further, the mounting position of the elastic member 7 is set to a lower position in the vicinity of the opening of the opening hole 3 and separated from the parallel pin 5, so that the holder 20 can be located at two places above and below the upper parallel pin 5 and the lower elastic member 7. Can be pressed toward the flat surfaces 6, 6, and the stability when the holder 20 is held by the holder joint A 'can be further enhanced.

なお、上記実施例では弾性部材７としてボールプランジャを用いたが、これに代えて板バネ等のような弾性材を用いてもよい。
また、位置決め部材としては、ホルダ２０がホルダジョイント１０の開口穴１３に挿入され、磁石４によって引き上げられたときに、取付部２６背面側の取付部周面２７を開口穴１３の内面に押し付けることができればよく、平行ピンに代えて球など任意の形状とすることができる。同様に、取付部２６の形状も位置決め部材の形状に応じて変更可能である。 Although the ball plunger is used as the elastic member 7 in the above embodiment, an elastic material such as a leaf spring may be used instead.
Further, as the positioning member, when the holder 20 is inserted into the opening hole 13 of the holder joint 10 and is pulled up by the magnet 4, the mounting portion peripheral surface 27 on the back side of the mounting portion 26 is pressed against the inner surface of the opening hole 13. Any shape such as a sphere can be used instead of the parallel pin. Similarly, the shape of the mounting portion 26 can be changed according to the shape of the positioning member.

以上、本発明の代表的な実施例について説明したが、本発明は必ずしも上記の実施形態に特定されるものではなく、その目的を達成し、請求の範囲を逸脱しない範囲内で適宜修正、変更することが可能である。   As described above, the typical examples of the present invention have been described, but the present invention is not necessarily limited to the above embodiments, and achieves the object and appropriately modifies and changes within the scope of the claims. It is possible to

本発明は、基板の表面にカッターホイールを押し付けながらスクライブすることにより基板に分断用のスクライブラインを加工したり、基板を分断したりする基板加工装置において、カッターホイールのホルダを保持するホルダジョイントに利用することができる。   The present invention provides a substrate processing apparatus for processing a scribe line for cutting a substrate by scribing while pressing a cutter wheel against the surface of the substrate, or for cutting a substrate. Can be used.

Ａ ホルダジョイント
Ｌ 仮想直線
１ ベアリング
２ 保持部
３ 開口穴
４ 磁石
５ 平行ピン
６ 平坦面
７ 弾性部材
２０ ホルダ
２１ カッターホイール
２２ 胴部
２６ 取付部
２７ 取付部周面 Reference Signs List A Holder joint L Virtual straight line 1 Bearing 2 Holder 3 Opening hole 4 Magnet 5 Parallel pin 6 Flat surface 7 Elastic member 20 Holder 21 Cutter wheel 22 Body 26 Mounting portion 27 Peripheral surface of mounting portion

Claims (2)

カッターホイールを備えたホルダを保持するホルダジョイントであって、
下向きに開口して上下に延びる開口穴と、
前記開口穴内に設置された位置決め部材と、
前記開口穴の内奥部に配置された磁石と、
前記開口穴の内面で平面視Ｖ字形をなすように左右対称に形成された一対の垂直な平坦面とを備え、
前記左右の平坦面は、前記位置決め部材の中央と直交する水平な仮想直線の左右に振り分けて形成されており、
前記左右の平坦面に、前記開口穴に挿入されたホルダの取付部周面が接触するように形成され、前記左右の平坦面のなす角度が５０〜１００度の範囲内で形成されているホルダジョイント。 A holder joint for holding a holder having a cutter wheel,
An opening hole that opens downward and extends up and down,
A positioning member installed in the opening hole,
A magnet arranged at the inner back of the opening hole,
A pair of vertical flat surfaces formed symmetrically to form a V-shape in plan view on the inner surface of the opening hole,
The left and right flat surfaces are formed by being distributed to the left and right of a horizontal virtual straight line orthogonal to the center of the positioning member,
A holder formed so that the peripheral surface of the mounting portion of the holder inserted into the opening hole is in contact with the left and right flat surfaces, and the angle between the left and right flat surfaces is formed within a range of 50 to 100 degrees . Joint. 前記開口穴の内面に、当該開口穴に挿入されたホルダを前記平坦面の方向に向かって弾力的に押し付ける弾性部材が設けられている請求項１に記載のホルダジョイント。   The holder joint according to claim 1, wherein an elastic member that elastically presses a holder inserted into the opening hole toward the flat surface is provided on an inner surface of the opening hole.
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