JP5447994B2 - Holder joint, scribing head and scribing device - Google Patents

Description

  The present invention relates to a holder joint, a scribe head, and a scribe device used for forming a scribe line on a brittle material substrate.

  Conventionally, in a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process and then divided into a single panel having a predetermined size. The cutting of the brittle material substrate such as the mother glass substrate includes a scribe process and a break process, and a scribe device is used in the scribe process.

  FIG. 1 is a perspective view showing a scribing device shown in Patent Document 1. FIG. In the scribing apparatus 100, a moving base 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the top of the scribe device 1.

  In the scribe device 100, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. The scribe head 112 is movable in the x-axis direction along a guide 113 provided on the bridge 110. The motor 114 moves the scribe head 112 along the x-axis direction.

  A chip holder 130 is attached to the scribe head 112 of the scribe device via a holder joint 120. FIG. 2 is a view showing a chip holder according to Patent Document 1, and FIG. 3 is a perspective view thereof. As shown in these drawings, the chip holder 130 is a substantially cylindrical member, and substantially square flat portions 131a and 131b are provided at one end thereof in parallel with the central axis. The chip holder 130 has a notch 132 along the central axis between the flat portions, and a pin groove 133 in a direction perpendicular to the surface of the flat portions 131a and 131b. The scribing wheel (also referred to as “cutter wheel”) 134 has, for example, a disc shape with a wheel diameter of 2.5 mm and a thickness of about 0.5 mm, and the circumferential section is formed in a conical shape with a center. It is a cutter having a through hole, and is simply called a chip. The scribing wheel 134 is rotatably held by passing a pin 135 inserted into the pin groove 133 through a central through hole. After the pin 135 is inserted into the pin groove 133 and the scribing wheel 134 is held, even when the scribing wheel needs to be replaced, the scribing wheel is not removed and replaced with the chip holder. On the other hand, an attachment portion 136 for positioning is provided at the other end of the chip holder 130. The attachment portion 136 is formed by cutting out the chip holder 130 and has an inclined portion 136a and a flat portion 136b. The flat part 136b is parallel to the axis of the chip holder and is perpendicular to the lower flat parts 131a and 131b. The chip holder 130 has an upper mounting portion 136 made of a magnetic metal.

  The scribe head 112 is provided therein with an elevating unit that allows the chip holder 130 to be moved up and down, for example, an air cylinder using air pressure control, an electric elevating unit using a linear motor, and the like. The scribing device presses and rolls the scribing wheel 134 on the surface of the brittle material substrate with an appropriate load by the elevating unit to form a scribe line.

  Next, the holder joint 120 will be described. FIG. 4 is a view showing a conventional holder joint 120, and FIG. 5 is a perspective view showing a state in which a chip holder 130 is inserted into the holder joint 120. As shown in these drawings, the holder joint 120 has bearings 121a and 121b in the upper part, and a lower part is a holding part 122 that holds the chip holder 130. As shown in the figure, a circular opening 123 is formed in the holding portion 122 of the holder joint 120, and a magnet 124 is embedded therein. A parallel pin 125 perpendicular to the central axis is provided in the opening 123 at a position separated from the central axis. The parallel pin 125 is a cylindrical member that positions the chip holder 130 in contact with the inclined portion 136 a of the chip holder 130.

  When the tip holder 130 is attached to the holder joint 120, the tip holder 130 is inserted into the opening 123 of the holder joint from the attachment portion 136 as shown in FIG. If it does so, the front-end | tip part of the chip | tip holder 130 will be attracted | sucked by the magnet 124, and also the inclination part 136a will contact the parallel pin 125, and will be positioned and fixed. FIG. 6 is a partial sectional view showing the attached state, and FIG. 7 is a view showing a part of the scribe head 112 to which the holder joint 120 is attached. Since the chip holder 130 is only attracted by the magnet 124, it is very easy to mount and is fixed at a predetermined position. When replacing, the chip holder 130 is pulled and removed.

Patent International Publication WO2007 / 063979

  A conventional chip holder is attached to a holder joint to form a holder unit 140. When the holder unit 140 is attached to the scribe head 112 for scribing, the scribing wheel is moved while being pressed against the brittle material substrate. At this time, if the scribe line is curved, a twisting force is also applied to the holder joint that holds the chip holder. For this reason, once the curved scribe line is formed, there is a drawback that the position accuracy of the scribe line is lowered even when the straight scribe is performed. Further, the chip holder is difficult to remove because it is difficult to get inside the opening 123 of the holder joint. In particular, when exchanging the chip holder using an automatic tool changer such as a robot, there is a drawback that it is difficult to remove the chip holder.

  The present invention has been made paying attention to such problems, and can be securely held by the holder joint, improve the position accuracy of the scribe line, and can be easily attached and detached, a scribe head, and An object is to provide a scribing device.

In order to solve this problem, a holder joint of the present invention is a holder joint for attaching a chip holder for providing a scribing wheel for forming a scribe line, and the chip holder is scribed from a side surface of the chip holder. At least one protrusion is projected perpendicularly to the rotation axis of the wheel, and the holder joint includes an opening provided at one end, a magnet embedded inside the opening, and a side of the opening. And one or more notches into which the protrusions are inserted .

  Here, the notch may be formed to have a V-shaped inner tip.

  In order to solve this problem, a scribe head of the present invention is a scribe head used in a scribe device, and has an elevating part that holds the holder joint described above in a vertically movable manner.

  In order to solve this problem, a scribing apparatus of the present invention is a scribing apparatus used for scribing a brittle material substrate, the scribing head described above, and the scribing head as a plane of the brittle material substrate and the brittle material substrate. And a relative movement unit that relatively moves in the direction.

  According to the present invention having such a feature, since the holder joint can stably hold the chip holder by its protrusion, the accuracy when forming the scribe line can be improved. Further, the chip holder can be easily attached and detached from the holder joint. Therefore, the effect that the tip holder can be freely attached and detached using a robot or an automatic tool changer can be obtained.

FIG. 1 is a perspective view showing the entire configuration of a conventional scribing apparatus. FIG. 2 is a diagram showing a configuration of a conventional chip holder. FIG. 3 is a perspective view showing a conventional chip holder. FIG. 4 is a view showing a conventional holder joint. FIG. 5 is a perspective view when a chip holder is inserted into a conventional holder joint. FIG. 6 is a partial cross-sectional view of a holder joint showing a state in which a conventional chip holder is inserted. FIG. 7 is a view showing a state in which a conventional holder joint is attached to a scribe head. FIG. 8 is a perspective view showing the overall configuration of the scribing apparatus according to the embodiment of the present invention. FIG. 9 is a diagram showing a configuration of a chip holder used in the scribing apparatus according to the embodiment of the present invention. FIG. 10 is a view showing a holder joint according to an embodiment of the present invention. FIG. 11A is a partial cross-sectional view showing a state immediately before the tip holder is inserted into the holder joint in the embodiment of the present invention. FIG. 11B is a partial cross-sectional view showing a state in which the tip holder is inserted into the holder joint in the embodiment of the present invention. FIG. 12 is a perspective view showing the scribe head according to the embodiment of the present invention.

  FIG. 8 is a perspective view showing a scribing apparatus using the scribing head according to the embodiment of the present invention. In this scribing apparatus, the same parts as those in the conventional example described above are denoted by the same reference numerals. In the scribing apparatus 1 according to the present embodiment, a movable table 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the top of the scribe device 1.

  In the scribing apparatus 1, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. The scribe head 112 is movable in the x-axis direction along a guide 113 provided on the bridge 110. The motor 114 moves the scribe head 112 along the x-axis direction. A tip holder 10 to be described later is attached to the tip of the scribe head 112 via a holder joint 20. Here, the motor 104, the guide rails 102a and 102b, and the ball screw 103 are moving units that move the table in the y-axis direction, and the bridge 110, the columns 111a and 111b, and the guide 113 are moving units that move the scribe head in the x-axis direction. The motor 105 is a rotating unit that rotates the table, and these constitute a relative moving unit.

  Next, the structure of the holder unit attached to the scribe head will be described. The holder unit 30 includes a holder joint 20 and a chip holder 10. The tip holder is a cylindrical member as shown in FIG. 9, and is provided with substantially square flat portions 11a and 11b at one end thereof in parallel with the central axis. The chip holder 10 has a notch 12 along the central axis between the flat portions, and a pin groove 13 in a direction perpendicular to the surface at the lower ends of the flat portions 11a and 11b. The scribing wheel 14 is, for example, a cutter having a disc shape with a wheel diameter of 2.5 mm and a thickness of about 0.5 mm, a circumferential section formed in a conical shape, and a through hole in the center. Also simply called a chip. The scribing wheel 14 is rotatably held by passing a pin 15 inserted into the pin groove 13 through a central through hole. After the pin 15 is inserted into the pin groove 13 and the scribing wheel 14 is held, even when the scribing wheel needs to be replaced, the scribing wheel is not removed and is replaced together with the chip holder. On the other hand, the circumferential portion at the other end of the chip holder 10 is an attachment portion 16, and at least the attachment portion 16 is made of a magnetic metal. Furthermore, in this embodiment, cylindrical projections 16a and 16b are provided on the side surface of the cylindrical chip holder so as to project symmetrically. The protrusions 16a and 16b are preferably protruded perpendicularly from the axis of the chip holder. Therefore, the protrusions 16a and 16b may be formed by implanting a protrusion member on the side wall of the mounting portion 16 of the chip holder 10, and a through hole is provided in the chip holder 10 so that a single pin is passed through and protrudes left and right. It may be.

  Next, the holder joint 20 of the present embodiment will be described. FIG. 10 is a view showing the holder joint 20. As shown in FIG. 10, the holder joint 20 has bearings 21a and 21b in the upper part, and the lower part is a holding part 22 for holding the chip holder. As shown in the figure, a circular opening 23 is formed in the holding portion 22 of the holder joint 20 so as to be slightly shifted from the center axis, and a magnet 24 is embedded therein. The holder 22 of the holder joint 20 is provided with a pair of left and right notches 25a and 25b on the side of the opening 23 from below. The notches 25a and 25b are provided symmetrically at the center of the opening. The innermost part is preferably V-shaped. The chip holder 10 is positioned by inserting the protrusions 16a and 16b of the chip holder 10 into the notches 25a and 25b.

  After configuring the holder joint 20 in this way, the above-described chip holder 10 is attached to the holder joint 20. At the time of attachment, as shown in FIG. 11A, the chip holder 10 is inserted into the opening 23 of the holder joint so that the protrusions 16a and 16b are aligned with the notches 25a and 25b. When inserted, the chip holder 10 can be fixed by the magnet 24 as shown in FIG. 11B as it enters the V-shaped grooves of the notches 25a and 25b. Since the chip holder 10 is only attracted by the magnet 24, it is very easy to mount and is fixed at a predetermined position.

  FIG. 12 is a perspective view of the scribe head 112. The servo motor 41 of the scribe head 112 is attached to the attachment plate 43 via the mounting plate 42 in an inverted state with the rotating shaft protruding downward. A cylindrical cam 44 is attached to the rotation shaft of the servo motor 41 so as to rotate integrally with the rotation shaft. The lower surface of the cylindrical cam 44 is a cam surface 44a that is inclined with respect to the horizontal state.

  Further, the scribe head 112 has a linear bearing 45 at a lower portion, and a holder member 46 is held on the linear bearing 45 so as to be slidable in the vertical direction. The linear bearing 45 is provided with a cam follower 47 that contacts the cam surface 44 a of the cylindrical cam 44 integrally with the holder member 46. The cam follower 47 has a roller shape that is rotatable. Between the holder member 46 and the mounting plate 43, an elastic body, for example, a coil spring 48, for biasing the holder member 46 upward with respect to the mounting plate 43 is provided. The coil spring 48 presses the holder member 46 upward to press the cam follower 47 against the cam surface 44a. Here, the servo motor 41, the cylindrical cam 44, the linear bearing 45, the holder member 46, the cam follower 47, and the coil spring 48 constitute an elevating unit that elevates and lowers the holder unit 30.

  In the scribing apparatus 1 configured as described above, the scribing wheel 14 is pressed and rolled on the surface of the brittle material substrate with an appropriate load by the lifting unit to form a scribe line. In the present embodiment, since the protrusions 16a and 16b of the chip holder 10 are fixed by the notches 25a and 25b of the holder joint 20, and the tips of the notches 25a and 25b are V-shaped, the holding position can be maintained. Even if a curved scribe line is formed, the mounting position does not move.

  Now, after scribing for a predetermined time, the chip holder 10 needs to be replaced. At this time, the tip holder 10 is pulled downward from the state of FIG. 11B by a robot arm or the like. At this time, since the protrusion of the chip holder is only inserted into the notches 25a and 25b, the chip holder 10 can be easily removed even if a lateral force is applied during scribing. For this reason, the replacement of the chip holder 10 is easy, and an autochanger or the like can be used without any trouble.

  In the present embodiment, the number of protrusions of the chip holder is two, but it may be a single or a plurality of arbitrary numbers. In that case, the number of cutouts is sufficient if it is equal to or greater than the number of protrusions, but it is preferable to set the number to match the number of protrusions.

  The present invention relates to a holder joint and a scribe head that are used in a scribing apparatus that forms a scribe line on a brittle material substrate, and can be easily replaced. The mounting position of a chip holder can be stabilized and the replacement can be automated. be able to. Therefore, it can be widely used for a scribing apparatus.

DESCRIPTION OF SYMBOLS 1 Scribing device 10 Tip holder 11a, 11b Flat part 12 Notch 13 Pin groove 14 Scribing wheel 15 Scribing wheel pin 16a, 16b Protrusion 20 Holder joint 21a, 21b Bearing 22 Holding part 23 Opening 24 Magnet 25a, 25b Notch 112 Scribe head

Claims (4)

A holder joint for attaching a chip holder for providing a scribing wheel for forming a scribe line,
The tip holder is one in which at least one protrusion is projected from the side surface of the tip holder perpendicular to the rotation axis of the scribing wheel,
The holder joint has an opening provided at one end;
A magnet embedded inside the opening;
A holder joint provided on a side of the opening and having one or more notches into which the protrusions are inserted .   The holder joint according to claim 1, wherein the notch has a V-shaped inner tip. A scribing head used in a scribing device,
A scribe head having an elevating part for holding the holder joint according to claim 1 to be movable up and down. A scribing device used for scribing a brittle material substrate,
A scribing head according to claim 3;
A scribing apparatus comprising: a brittle material substrate; and a relative movement unit that relatively moves the brittle material substrate in a planar direction of the brittle material substrate.

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