WO2019208146A1 - Scribing device and remover provided in scribing device - Google Patents

Abstract

Provided are a scribing device and a remover which are capable of further improving productivity, tool compatibility, and a foolproof function. This scribing device (1) has: a placement means (3) on which a brittle material substrate (2) is placed; a scribing head (7) provided facing the brittle material substrate (2) on the placement means (3); a holder joint (19) provided at the tip of the scribing head (7); a scribing tool (8) detachably attached to the holder joint (19) and provided with a scribing wheel (9) for forming a scribing line in the brittle material substrate (2) on the placement means (3); and a tool change mechanism (30) which detaches a used scribing tool (8) from the holder joint (19) and attaches another scribing tool (8) to the holder joint (19), thereby performing a tool change, wherein the tool change mechanism (30) has a remover (41) for detaching the scribing tool (8) from the holder joint (19).

Description

Scribing device and remover provided in the scribing device

The present invention relates to a scribe device for scribing a brittle material substrate, and more particularly to a remover of a tool change mechanism for exchanging a scribing tool.

Conventionally, in a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process and then divided into a single panel having a predetermined size.
Such fragmentation of a brittle material substrate such as a mother glass substrate includes a scribe process for forming a scribe line (vertical crack) in the substrate and a break process for completely infiltrating the vertical crack. Among them, a scribing device is used in the scribing process.

This scribing device is provided with a scribing tool using a scribing wheel, a diamond point, or the like, and a vertical crack is formed on a brittle material substrate by the scribing tool.
As a technique related to a scribing apparatus for scribing a brittle material substrate, for example, there is one disclosed in Patent Document 1.

Patent Document 1 uses a chip holder (scribing tool) integrated with a chip (scribing wheel or the like), and by holding offset data in the form of a code in the chip holder, for example, the labor of correcting the offset amount Another object of the present invention is to solve problems such as mounting different types of chips by mistake, and variations in scribe line formation positions.

Specifically, the chip is attached to the chip holder in a rotatable manner. The tip holder has a cylindrical shape, and an attachment portion is provided at the tip. An opening is provided in the holder joint, and the chip holder is attracted and attached by a magnet to facilitate attachment and detachment. Also, chip offset data is recorded as a two-dimensional code on the surface of the chip holder. When the tip holder is replaced, the offset data is read and input to the scribe device to cancel the offset. By doing so, it is possible to replace the chip while the apparatus is stopped for a short time by omitting an operation necessary for correction when the chip holder is attached or detached.

Republished Patent 2007-063979

The scribing device disclosed in Patent Document 1 has solved the above-mentioned problems, and has become a popular device that is easy to use for those skilled in the art.
However, demands for scribing devices are increasing year by year.For example, during operation, the scribing tool is automatically replaced to increase the continuous operation time, the automatic replacement time is reduced to a short time, and productivity is increased. Requests such as raising are required.

Specifically, productivity includes shortening the time required for automatic replacement of the scribing tool, shortening the time for setting the cartridge containing the scribing tool, and the continuous operation time of the scribing device when the scribing tool is fully loaded in the cartridge. Improvements to further improve productivity, such as extending the length, are required.
In addition, as tool compatibility, in addition to the scribing tool set as a standard and the scribing head to which the scribing tool is attached, other scribing tools and scribing heads can be used. There is a need for improvements to further improve the compatibility of tools such as

In addition, as a foolproof function (designed in consideration of safety so as not to cause the operator to perform an incorrect operation or to create a dangerous situation if the user performs an incorrect operation), the cartridge is prepared. And, when attaching and detaching the cartridge, ensuring the safety in the scribing device, improving the reliability during the automatic changing operation of the scribing tool, being able to recognize whether the predetermined scribing tool is installed and operate correctly Improvements for further improving the foolproof function such as, are demanded.

Therefore, in view of the above problems, an object of the present invention is to provide a scribing device that can further improve productivity, tool compatibility, and foolproof function, and a remover provided in the scribing device.

In order to achieve the above object, the present invention takes the following technical means.
A scribing apparatus according to the present invention includes a placing means on which a brittle material substrate is placed, a scribe head provided to face the brittle material substrate on the placing means, and a tip of the scribe head. A holder joint provided; a scribing tool that is detachably attached to the holder joint and includes a scribing wheel that forms a scribe line on the brittle material substrate on the placing means; and a scribing tool after use in the holder And a tool change mechanism for exchanging the tool by attaching another scribing tool to the holder joint, and the tool change mechanism has a remover for attaching and detaching the scribing tool from the holder joint. It is characterized by

Preferably, the remover has a pair of gripping arms that grip and hold the scribing tool when the scribing tool is removed from the holder joint.
Preferably, the pair of gripping arms are provided so as to be swingable, the paired gripping arms are attached together and closed, the closed state in which the scribing tool is gripped and held, and the pair of gripping arms are separated. It is good to be the structure which can be changed into an open state.

Preferably, the pair of gripping arms may be movable in the vertical direction by a driving unit via a lifting member.
Preferably, the pair of gripping arms has a holding portion that holds and holds the scribing tool at the tip, and a cushion material that prevents damage to the scribing tool is attached to the holding portion. Good.

Preferably, a cam groove is formed in the grip arm, and a rotary member provided in the elevating member is disposed inside the cam groove, and the grip arm is moved up and down via the rotary member. Move in the direction.
Preferably, an inclined side is formed inside the cam groove, and the pair of gripping arms are in an open state when the rotating member moves along the inclined side.

Preferably, the pair of gripping arms is provided with a spring member along a swinging direction, and the pair of gripping arms are closed by pressing of the spring member.
Preferably, the remover is provided with an accommodating portion for accommodating the another scribing tool.
Preferably, the grip arm may be configured to move up and down within a predetermined range by a stopper.

The remover provided in the scribing apparatus according to the present invention includes a placing means on which a brittle material substrate is placed, a scribe head provided so as to face the brittle material substrate on the placing means, and the scriber. A scribing apparatus comprising: a holder joint provided at a tip of a head; and a scribing tool that is detachably attached to the holder joint and includes a scribing wheel that forms a scribing line on the brittle material substrate on the mounting means. The remover is provided for attaching and detaching a used scribing tool to and from the holder joint. Grab and hold A pair of gripping arms, wherein the pair of gripping arms are arranged so as to be swingable, close the pair of gripping arms together, close the gripping and holding the scribing tool, and The pair of gripping arms can be changed to an open state in which the pair of gripping arms are separated from each other, and the pair of gripping arms can be moved in the vertical direction by a driving unit via an elevating member. Each of the gripping arms is formed with a cam groove, and a rotating member provided on the elevating member is disposed inside the cam groove, and the gripping arm is vertically moved through the rotating member. And the pair of gripping arms are opened and closed, and an inclined side is formed in the cam groove, and the rotating member moves along the inclined side, whereby the pair of gripping arms is formed. Gripping The pair of gripping arms is provided with a spring member along a swinging direction, and the pair of gripping arms are closed by pressing the spring member. It is characterized by being.

According to the present invention, productivity, tool compatibility, and foolproof function can be further improved.

It is the perspective view which showed the outline of the scribing apparatus of this invention typically. It is the side view which looked at the scribe device from the direction of A (y-axis direction). It is BB sectional drawing of a scribe device. It is the side view which showed the outline of the scribe head typically (C section expansion). It is the perspective view which showed typically the outline of the remover which attaches / detaches a scribing tool. FIG. 6 is a plan view, a side view, a DD sectional view, and an EE sectional view of the remover (gripping arm, open state). It is FF sectional drawing of a remover (gripping arm, closed state).

Hereinafter, embodiments of the scribing apparatus 1 according to the present invention and a remover 41 provided in the scribing apparatus 1 will be described with reference to the drawings.
In addition, embodiment described below is an example which actualized this invention, Comprising: The structure of this invention is not limited with the specific example. In addition, in the drawings, some components are not illustrated for easy understanding. Further, the x-axis direction, the y-axis direction, the z-axis direction and the like in the scribe device 1 are as shown in the drawings.

1 to 3 are schematic views of a scribing apparatus 1 according to the present invention.
A scribing apparatus 1 according to the present invention includes a table 3 (mounting means) on which a brittle material substrate 2 is placed, a head unit 4 that forms a scribe line (vertical crack) on the surface of the brittle material substrate 2, and a remover. And the block body 5 on which 41 and the like are provided.
The direction in which the scribe line is formed is the x-axis direction from the left side to the right side in FIG.

The table 3 is supported from below by a support portion (not shown) having a built-in motor. The support part is mounted on the movable table. A movable table (not shown) is held so as to be movable in the y-axis direction along a pair of guide rails (not shown). The moving table is screwed with a ball screw (not shown), and moves in the y-axis direction along the guide rail when the ball screw is rotated by driving the motor.

A motor (not shown) in the support unit is rotated at the xy plane of the table 3 and positioned at a predetermined angle. The brittle material substrate 2 placed on the table 3 is held by a vacuum suction means (not shown) or the like. In addition, a camera 6 that images the alignment mark of the brittle material substrate 2 is provided on the upper portion of the head unit 4.
A beam (not shown) is installed on the scribe device 1 by struts (not shown) along the x-axis direction so as to straddle the moving table and the table 3 on the upper side thereof.

The head unit 4 is movable in the x-axis direction along a guide (not shown) provided on the beam by driving a motor. A scribe head 7 is attached to the tip of the head unit 4. The head unit 4 is also movable in the z-axis direction.
As shown in FIG. 2, the head unit 4 is disposed so as to be tilted slightly with respect to the direction in which the scribe line is formed. In the present embodiment, the head unit 4 is disposed so as to be inclined backward by 2 ° with respect to the direction (traveling direction) in which the scribe line is formed.

The scribing head 7 has a scribing tool 8 that forms a scribing line on the surface of the brittle material substrate 2 and a holder joint 19 that holds the scribing tool 8 in a detachable manner. In addition to the movement of the entire head unit 4 in the z-axis direction, the scribe head 7 can be moved in the z-axis direction only by the scribe head 7.
The scribe head 7 is also arranged so as to be inclined slightly with respect to the direction in which the scribe line is formed (left side → right side in FIG. 2, x-axis direction). In the present embodiment, the scribe head 7 is disposed so as to be inclined backward by 2 ° with respect to the direction in which the scribe line is formed.

Here, the y-axis moving unit that moves the table 3 in the y-axis direction includes a pair of guide rails that guide the moving table, a ball screw that is screwed to the moving table, and a motor that rotates the ball screw.
The x-axis moving unit that moves the head unit 4 in the x-axis direction includes a beam that is installed on the upper portion of the table 3, a column that supports the beam, and a guide that guides the head unit 4. The motor in the support unit is a rotating unit that rotates the table 3.

These y-axis moving unit, x-axis moving unit, and rotating unit constitute a relative moving unit.
Next, the configuration of the scribing tool 8 attached to the holder joint 19 will be described.
FIG. 4 is a diagram showing the scribing tool 8 and its attached state. In the following description, the scribing tool 8 may be simply referred to as a tool.

The tool 8 includes a scribing wheel 9 that forms a scribe line (vertical crack) in the brittle material substrate 2, and a main body 10 that supports the scribing wheel 9.
In the following description, the scribing wheel 9 may be simply referred to as a wheel.

Similarly to the scribe head 7, the tool 8 is inclined so as to be slightly tilted with respect to the direction in which the scribe line is formed (left side → right side in FIG. 2, x-axis direction). In the present embodiment, the tool 8 is disposed so as to be inclined backward by 2 ° with respect to the direction in which the scribe line is formed.
In this way, a desired scribe line can be formed on the surface of the brittle material substrate 2 by arranging the tool 8 (scribe head 7) at an angle. Further, shavings when forming the scribe line can be reduced.

The main body portion 10 is a substantially cylindrical member, and a flat side wall surface portion 11 cut vertically is provided on one end (tip) side thereof. A pair of side wall surface portions 11 are provided so as to face each other. On the upper portion of the side wall surface portion 11, a flange portion 12 protruding outward in the radial direction is formed. Note that a two-dimensional code, which will be described later, is printed on any of the side wall surface portions 11.
Between the pair of side wall surface parts 11, a notch 13 parallel to the side wall surface part 11 is provided.

Each of the lower ends of the pair of side wall surface portions 11 is provided with a pin groove 14 in a direction orthogonal to the surfaces. The pair of pin grooves 14 face each other and are provided so as to penetrate the notch portion 13. A scribing wheel 9 is provided in the notch 13.
The wheel 9 is a disk-shaped member, is formed in a triangular shape with a sharp cross section of the circumferential portion, and a through hole is formed at the center. The wheel 9 has a size of, for example, a diameter of about 2.5 mm and a thickness of about 0.5 mm.

The wheel 9 is supported so as to be rotatable about the axis of the pin 15 inserted in a hole portion in which the center of the pin groove 14 and the center of the through hole are aligned.
On the other hand, an attachment portion 16 for positioning is provided on the other end (base end) side of the main body portion 10. The attachment portion 16 is formed by cutting out the main body portion 10 and has a flat surface 17 and an inclined surface 18.

The flat surface 17 is formed at the base end of the main body portion 10 and is a surface in a direction orthogonal to the side wall surface portion 11. The inclined surface 18 is a surface inclined in the radially outward direction from the flat surface 17 downward. The flat surface 17 and the inclined surface 18 are provided continuously.
The main body portion 10 has a shape that tapers upward from a midway portion in the longitudinal direction. In addition, the base end (upper part) of the main-body part 10 is comprised with the magnetic body metal.

Thus, the tool 8 is a combination of the wheel 9 and the main body 10. That is, the tool 8 integrated by inserting the pin 15 into the pin groove 14 and rotatably supporting the wheel 9 is replaced without removing the wheel 9.
The tool 8 provided with the wheel 9 is attached to the scribe head 7 and is moved up and down by a lifting unit provided inside the head unit 4. In addition, as a raising / lowering part, a ball screw etc. are mentioned, for example.

A scribe line is formed by causing the wheel 9 having a pointed portion to press and roll on the surface of the brittle material substrate 2 with an appropriate load by a pressure mechanism different from the elevating part. A cylinder for applying the pressing force of the tool 8 and a means for driving the entire scribe head 7 are provided separately.
Next, the holder joint 19 will be described.

The holder joint 19 is formed of a columnar member at the top and a cylindrical member at the bottom. The holder joint 19 is a cylindrical member whose lower portion is larger than the columnar member at the upper portion thereof.
Similarly to the scribe head 7, the holder joint 19 is inclined so as to be slightly tilted with respect to the direction in which the scribe line is formed (left side → right side in FIG. 2, x-axis direction). In the present embodiment, the holder joint 19 is disposed so as to be inclined backward by 2 ° with respect to the direction in which the scribe line is formed.

The holder joint 19 has a bearing 20 mounted on the upper portion thereof, and is supported by the bearing 20 so as to be rotatable about a substantially vertical axis (see FIG. 3).
A lower portion of the holder joint 19 is a holding portion 21 that holds the tool 8, and a cylindrical opening 22 is formed. A magnet 23 is embedded in the upper end of the opening 22.

Further, a parallel pin 24 in a direction orthogonal to the central axis is provided in the opening 22 at a position away from the central axis. The parallel pin 24 is for positioning the tool 8 by contacting the inclined surface 18 of the tool 8, that is, for setting the direction of the wheel 9 in a correct direction.
When attaching the tool 8 to the holder joint 19, the tool 8 is inserted into the opening 22 of the holder joint 19 from the attachment portion 16 side. Then, the tip (base end) side of the tool 8 made of a magnetic metal is attracted by the magnet 23 and fixed to the holder joint 19.

Further, the flat surface 17 faces the parallel pin 24 side, and the inclined surface 18 contacts the parallel pin 24 and is positioned and fixed. That is, since the flat surface 17 and the inclined surface 18 face only in one direction, the direction of the wheel 9 is set to a predetermined direction.
Since the tool 8 is only attracted by the magnet 23 and fixed to the holder joint 19, it is very easy to attach and detach. That is, when the tool 8 is attached, the tool 8 is fixed at a predetermined position by being sucked, and can be easily removed by simply pulling the tool 8 even when the tool 8 is replaced. The tool 8 can be attached and detached manually.

When the magnet 23 is positioned 3 to 4 mm before the final setting position of the holder joint 19, the tool 8 is pulled.
Now, in the scribing apparatus 1 of the present invention, a tool change mechanism 30 that removes the used scribing tool 8 from the holder joint 19 and attaches another scribing tool 8 to the holder joint 19 to automatically change the tool. And have.

The tool change mechanism 30 includes a cartridge 31 that accommodates the tool 8, a remover 41 that removes the tool 8 from the holder joint 19, a transfer nozzle 81 that moves the tool 8 between the scribe head 7 and the cartridge 31, and a scribe. A 2D code reader 91 that reads the two-dimensional code of the tool 8 attached to the head 7 (holder joint 19).

The present invention is characterized by the remover 41 provided in the scribing apparatus 1.
Hereinafter, the configuration of the remover 41 will be described in detail.
In FIG. 2, the left side of the drawing is the negative side of the x-axis, in other words, the left side along the x-axis. Therefore, in describing the remover 41, it will be referred to as “the left side in the x-axis direction”.

Based on the same idea, the right side of FIG. In FIG. 2, the front side of the paper surface is referred to as “y-axis direction front side” and the back side of the paper surface is referred to as “y-axis direction rear side”. Further, in FIG. 2, the upper side of the paper surface is “upper side in the z-axis direction” and the lower side of the paper surface is “lower side in the z-axis direction”.
As shown in FIGS. 1 to 3, the remover 41 removes the tool 8 (old tool 8a) from the holder joint 19 of the scribe head 7, or prepares another tool 8 (new tool 8b) to the holder joint 19. It is a takeout tool (jig) having a function of attaching and detaching the tool 8 automatically.

As shown in FIGS. 5 to 7, the remover 41 is attached to the block body 5. The remover 41 moves toward the scribe head 7 to pick up the old tool 8a, holds and holds the old tool 8a, and removes it from the holder joint 19 by lowering.
The remover 41 is also for attaching the new tool 8 b to the holder joint 19 by moving upward toward the scribe head 7. For the remover 41, a new tool 8b to be attached can be prepared in advance.

The remover 41 is also inclined so as to be slightly tilted with respect to the z axis in accordance with the inclination of the scribe head 7 (tool 8). In the present embodiment, the remover 41 is disposed so as to be inclined backward by 2 ° with respect to the direction (traveling direction) in which the scribe line is formed.
The remover 41 includes a pair of gripping arms 42 having a holding portion 43 that holds the old tool 8a therebetween, a support member 57 that rotatably supports the gripping arms 42, and a lifting member that lifts and lowers the gripping arms 42 in the z-axis direction. 61, a guide member 69 that guides the elevating member 61 in the z-axis direction, a drive unit 72 that generates power to raise and lower the elevating member 61 in the z-axis direction, a grip arm 42, a support member 57, an elevating member 61, a guide And a base 74 to which the drive unit 72 is attached.

The remover 41 is a unit, and a base 74 is attached to the block body 5, and a guide member 69 and a drive unit 72 are attached to the side wall surface of the base 74 on the “right side in the x-axis direction”. A support member 57 and an elevating member 61 are provided on the “right side in the x-axis direction” of the member 69, and a pair of grip arms 42 are provided on the “right side in the x-axis direction” of the elevating member 61.
The gripping arm 42 includes a first gripping arm 44 and a second gripping arm 48, and the first gripping arm 44 is disposed on the “right side in the x-axis direction” of the elevating member 61. A second gripping arm 48 is provided on the “right side in the x-axis direction”.

The first grip arm 44 and the second grip arm 48 are members formed in the same shape.
In other words, the second gripping arm 48 overlaps the first gripping arm 44 so as to be bilaterally symmetric, and claw portions 45 and 49 described later are disposed so as to cross each other.
The pair of gripping arms 42 are supported so as to be swingable around a shaft body 55 provided on the support member 57.

The pair of gripping arms 42 are provided so as to be swingable. The pair of gripping arms 42 are closed with the pair of gripping arms 42 closed, the old tool 8a is gripped and held, and the pair of gripping arms 42 are opened. The configuration can be changed to the state.
A holding portion 43 that holds the old tool 8a is provided at the tip of the grip arm 42.

The first gripping arm 44 is a plate material that is long in the up-down direction (z-axis direction), and the tip side is formed in a crank shape. The first gripping arm 44 has a crank shape bent toward the “rear side in the y-axis direction” (toward the origin side of the scribe head 7).
At the tip of the first gripping arm 44, a first claw portion 45 that constitutes a holding portion 43 that holds the old tool 8a is provided. The first claw portion 45 is provided with a cushion material 52 for preventing the old tool 8a from being damaged when grasped.

The cushion material 52 is provided on a surface facing a second gripping arm 48 described later. As the cushion material 52, for example, a member formed of a material such as hard urethane is preferable.
A substantially rectangular first hole 46 is formed in the middle of the first gripping arm 44 in the longitudinal direction. The first hole 46 is a first cam groove into which a rotation member 62 described later is inserted. Specifically, the first cam groove 46 is formed in the middle in the longitudinal direction, and the axis is directed in the left-right direction (x-axis direction).

The first cam groove 46 has a first inclined side 47a. The first inclined side 47a is formed on the inner peripheral surface of the first cam groove 46 on the “y-axis direction rear side” side (side on the origin side of the scribe head 7) so as to be inclined “y-axis direction front side”. Has been.
The first inclined side 47a is a side along which a rotating member 62 described later moves in the vertical direction, and the vertical movement of the first gripping arm 44, that is, “opening and closing of the gripping arm 42” is performed.

It is very preferable that the first inclined side 47a has a gentle and continuous inclination because the attaching / detaching operation of the tool 8 becomes smoother. That is, the first inclined side 47a smoothly connects the surface (position) where the grip arm 42 is opened and the surface (position) where the grip arm 42 is closed with a continuous surface. A cam curve is desirable.
The first cam groove 46 is formed with a first bottom 47b. The first bottom 47b is brought into contact with a rotating member 62 described later, whereby the first gripping arm 44 is pushed down, that is, “the gripping arm 42 is moved up and down”.

At the base end of the first gripping arm 44, a through-hole 53 whose axis is directed in the left-right direction (x-axis direction) is provided. A bearing 54 is fitted into the through hole 53, and a cylindrical shaft body 55 is inserted into the bearing 54. The shaft body 55 is disposed so as to penetrate a support member 57 described later.
That is, the first gripping arm 44 is swingably supported by the support member 57 around the axis of the shaft body 55 inserted into the through hole 53.

The second gripping arm 48 is a plate material that is long in the vertical direction (z-axis direction), and the tip side is formed in a crank shape. The second gripping arm 48 has a crank shape bent toward the “front side in the y-axis direction” (in a direction away from the origin of the scribe head 7).
Since the pair of gripping arms 42 have the same shape on the left and right and swing symmetrically, detailed description of the second gripping arm 48 is omitted.

A spring member 56 is provided above the pair of cam grooves 46 and 50. The spring member 56 generates a force that pulls the first claw portion 45 and the second claw portion 49 together. That is, the spring member 56 generates a force for gripping the old tool 8 a with respect to the pair of gripping arms 42.
The spring member 56 is arranged so as to span the first cam groove 46 and the second cam groove 50. That is, the pair of gripping arms 42 swings around the axis of the shaft body 55 by the reaction force of the spring member 56.

That is, by providing the spring member 56 between the pair of gripping arms 42, the spring member 56 is biased so as to be sandwiched in a normal state.
Further, the rotating member 62 described later moves upward along the inclined sides 47a and 51a in the cam grooves 46 and 50, whereby the pair of gripping arms 42 are raised to a predetermined position. When the gripping arm 42 reaches a predetermined position, the first gripping arm 44 and the second gripping arm 48 are swung to be in an open state (see FIG. 6).

That is, when the gripping arm 42 is in the raised position, the rotation member 62 contacts the upper part of the inclined sides 47a and 51a in the cam grooves 46 and 50 while the spring member 56 attempts to close the pair of gripping arms 42. And it is in a state where it is open.
On the other hand, when the rotating member 62 described later moves downward along the inclined sides 47a and 51a in the cam grooves 46 and 50, the first gripping arm 44 and the second gripping arm 48 swing and close. It becomes a state (a state where the old tool 8a is grasped). Then, after the pair of gripping arms 42 is closed, the rotating member 62 comes into contact with the bases 47b and 51b, and the gripping arms 42 are lowered to a predetermined position (see FIG. 7).

That is, the rotary member 62 moves along the inclined sides 47a and 51a in the cam grooves 46 and 50 while the elevating member 61 to be described below is first lowered, thereby closing the pair of gripping arms 42 from the open state. Rotate (oscillate) in the direction.
That is, the raising / lowering operation and the opening / closing operation of the pair of gripping arms 42 are performed completely independently. The pair of gripping arms 42 are lowered after being closed and opened after being lifted.

A support member 57 and a lifting member 61 are disposed on the left side (back side) in the x-axis direction of the pair of gripping arms 42.
The support member 57 is a member that supports the pair of gripping arms 42 so as to be swingable from below and moves them in the vertical direction. The support member 57 is in a state of being pushed upward by a spring member 77 described later.

The support member 57 has a notch 58 that is notched so as to penetrate in the front-rear direction (y-axis direction).
That is, the support member 57 is a U-shaped member with its upper, front end, and rear end open. The base ends of the pair of gripping arms 42 are inserted into the notch 58. The notch 58 is provided with two through holes 59 whose axial centers are directed in the left-right direction (x-axis direction) at a predetermined interval in the front-rear direction.

The through holes 59 of the support members 57 and the through holes 53 provided at the base ends of the pair of gripping arms 42 are attached to each other, and the shaft body 55 is inserted into the attached through holes 53 and 59. As a result, the pair of gripping arms 42 are swingably supported with respect to the support member 57.
A cover member 60 is provided on the “left side in the x-axis direction” (back side) of the support member 57. The cover member 60 is a cylindrical body that is open at the bottom.

A spring member 77 provided on the base 74 is inserted into the cover member 60. The spring member 77 is a member that urges a force that moves the support member 57 upward.
The spring member 77 has a sufficiently strong biasing force than the weight of the structure supported by the support member 57 and the frictional force caused by the rotation member 62 contacting. The support member 57 does not move while the gripping arm 42 opens and closes, that is, descends 10 mm. The spring member 77 is a member for distinguishing between the opening / closing operation of the gripping arm 42 and the lifting / lowering operation of the gripping arm 42.

An elevating member 61 is provided above the support member 57.
The elevating member 61 is a member made of a flat plate material and capable of moving in the vertical direction.
The elevating member 61 is provided with a projecting portion 65 projecting “on the front side in the y-axis direction”. In addition, a through hole 66 whose axial center is directed in the vertical direction is provided at the tip of the protruding portion 65. A shaft body 73 constituting a drive unit 72 described later is inserted into the through hole 66.

Two rotating members 62 are attached in parallel to the side wall surface of the elevating member 61 on the “right side in the x-axis direction”.
The rotating member 62 moves up and down in cam grooves 46 and 50 provided in each of the pair of gripping arms 42. In the present embodiment, a cam follower (bearing 64 to which the shaft 63 is attached) is used as the rotating member 62.

Specifically, the cam follower 62 is attached to the elevating member 61 so that the axis of the shaft 63 faces the left-right direction (x-axis direction). That is, the cam follower 62 is attached so that the shaft 63 protrudes from the elevating member 61 to the “right side in the x-axis direction”.
The cam follower 62 moves in the vertical direction (z-axis direction) while the bearing 64 rotates on the inner wall surface (the inner peripheral surface side of the side having the inclined sides 47a and 51a) in the cam grooves 46 and 50. That is, the cam follower 62 is inserted into the cam grooves 46 and 50, and the bearing 64 moves in the vertical direction along the inclined sides 47a and 51a.

As the cam follower 62 (rotating member) moves upward along the inclined sides 47a and 51a in the cam grooves 46 and 50, the pair of gripping arms 42 rises. Thereafter, the lifting member 61 moves further upward, so that the pair of gripping arms 42 is opened.
On the other hand, the cam follower 62 moves downward along the inclined sides 47a and 51a, and the pair of gripping arms 42 are closed by the reaction force of the spring member 56. Thereafter, when the elevating member 61 moves further downward, the pair of gripping arms 42 is lowered.

In addition, an upper portion of the elevating member 61 is provided with one accommodating portion 67 that can accommodate the new tool 8b.
The accommodating part 67 rises and falls as the elevating member 61 rises and falls. Further, the upper surface of the accommodating portion 67 and the upper surface of the gripping arm 42 are substantially flush with each other (the same plane).
The accommodating portion 67 is formed in a bottomed cylindrical shape, and has an inner peripheral diameter slightly larger than the outer peripheral diameter of the tool 8 (new tool 8b). A stepped portion 68 is provided inside the accommodating portion 67. The stepped portion 68 is a member protruding from the inner peripheral wall, and a pair of the stepped portions 68 are provided so as to face each other.

When the new tool 8b is accommodated, the flange portion 12 comes into contact with the stepped portion 68, so that the new tool 8b is brought into a floating state in the accommodating portion 67 and the wheel 9 does not come into contact with the bottom portion. 9 damage can be prevented.
The storage portion 67 has a sufficient clearance so that the new tool 8b can be taken out without resistance.

A guide member 69 is provided on the “left side in the x-axis direction” (back side) of the support member 57 and the lifting member 61.
The guide member 69 guides the support member 57 and the elevating member 61 in the vertical direction (z-axis direction). In the present embodiment, a linear guide including a guide rail 70 and a slider 71 is employed as the guide member 69.

The guide rail 70 is arranged so that its axis is directed in the vertical direction. A slider 71 is movably disposed on the guide rail 70. That is, the slider 71 moves up and down on the guide rail 70.
Two sliders 71 are arranged in the vertical direction. A lifting member 61 is attached to the upper slider 71. On the other hand, a support member 57 is attached to the lower slider 71.

In the present embodiment, the case where a linear guide is employed as the guide member 69 is illustrated, but any member that can guide the elevating member 61 and the support member 57 in the vertical direction (z-axis direction) is illustrated. It is not limited to what you did.
A drive unit 72 is attached to the side of the guide member 69 (front side in the y-axis direction).
The drive unit 72 generates power for moving the elevating member 61 up and down. In the present embodiment, an air cylinder is employed as the drive unit 72.

The air cylinder 72 and the elevating member 61 are connected, and when the air cylinder 72 generates elevating power, the elevating member 61 moves up and down.
Specifically, the air cylinder 72 is provided with a rod 73 (shaft body) that can slide in one direction by air pressure. The rod 73 is arranged such that the axis is directed in the vertical direction, and a protruding portion 65 of the elevating member 61 is attached to the tip of the rod 73.

It is characterized in that only one air cylinder (driving means) 72 is used to hold the tool 8 by the pair of holding arms 42 and to move up and down (withdraw the tool 8 from the holder joint 19).
For example, when the stroke of the air cylinder 72 is 20 mm, the stroke used to open and close the grip arm 42 is 10 mm, and the stroke used to lift and lower the grip arm 42 is 10 mm. The support member 57 is in contact with the stopper 78 of the base 74.

When the tool 8 is pulled out from the holder joint 19, the air cylinder 72 extends the rod 73 by 20 mm so as to reach the maximum drawing position of the air cylinder 72 as shown in FIG. ing. That is, the gripping arm 42 is in an open state.
Since the cam follower 62 moves downward along the inclined sides 47a and 51a while pulling the rod 73 downward from the position by 10 mm, the gripping arm 42 is closed. Here, the gripping arm 42 grips the tool 8 of the holder joint 19.

Furthermore, while the rod 73 is pulled downward by 10 mm, the cam follower 62 comes into contact with the bottom sides 47b and 51b, and the grip arm 42 is pushed down. Here, the gripping arm 42 pulls out the tool 8 from the holder joint 19.
That is, when the air cylinder 72 is retracted to the maximum, the gripping arm 42 is lowered and the chucked tool 8 is pulled out from the holder joint 19.

On the other hand, when the tool 8 is attached to the holder joint 19, as shown in FIG. 7, the air cylinder 72 lowers the elevating member 61 to the maximum with the rod 73 at the stroke end position. That is, the gripping arm 42 is in an open state. The spring member 77 is contracted.
From that position, while the rod 73 is extended upward by 10 mm, the cam follower 62 is lifted and the gripping arm 42 is lifted to reach the maximum lift position. Here, the tool 8 is inserted into the holder joint 19 (temporarily attached state).

Further, while the rod 73 is extended upward by 10 mm, the cam follower 62 moves upward along the inclined sides 47a and 51a, and the grip arm 42 is opened. Here, the tool 8 is released from the gripping arm 42 and is completely attached to the holder joint 19.
The remover 41 is drawn straight out and inserted in accordance with the inclination of the holder joint 19. Since the remover 41 has the same inclination as the holder joint 19, it operates in the same direction.

The air cylinder 72 generates a force sufficiently larger than the force of the spring member 77 when the pair of gripping arms 42 are lowered. Moreover, it has more than the force which pulls out the grasped tool 8 from the holder joint 19.
In the present embodiment, the case where an air cylinder (pneumatic device) is employed as the drive unit 72 is exemplified, but any device capable of generating power for raising and lowering the elevating member 61 is exemplified. It is not limited. For example, a hydraulic device may be used.

The base 74 is formed of a flat plate material and is attached to the block body 5. The base 74 is disposed below the scribe head 7.
On the side wall surface of the base 74, a plurality of holes 75 for attaching the guide member 69, the air cylinder 72, and the like are provided. By inserting fasteners 79 and the like into these holes 75, the guide member 69 and the air cylinder 72 and the like are attached to the “right side in the x-axis direction” side wall surface of the base 74.

The base 74 is provided with a stopper 78 that raises the support member 57 to a predetermined range.
Here, the operation mode of the tool change mechanism 30 will be described.
A cartridge 31 containing a plurality of tools 8 is set on a base 32 provided on the side of the table 3 and fixed with a clamp 33.

When the elevating member 61 is raised by the power of the air cylinder 72, the support member 57 is raised, so that the grip arm 42 is also raised. The remover 41 rises toward the scribe head 7.
Thereafter, the cam follower 62 is further lifted and moved upward along the inclined sides 47a and 51a of the cam grooves 46 and 50, whereby the pair of gripping arms 42 are oscillated and opened. The air cylinder 72 is in a state where the rod 73 is extended 20 mm upward.

The scribe head 7 is moved to the position of the remover 41 and lowered to a position where the holding portion 43 of the gripping arm 42 can grip the old tool 8a.
Here, the cam follower 62 descends along the inclined sides 47a and 51a of the cam grooves 46 and 50 while the elevating member 61 pulls the rod 73 of the air cylinder 72 downward by 10 mm, and the pair of claw portions 45, 49 comes closer due to the reaction force of the spring member 56, and the holding portion 43 grips the side wall surface portion 11 of the old tool 8a.

Further, while the rod 73 is pulled downward by 10 mm, the cam follower 62 comes into contact with the bottom sides 47b and 51b, and the gripping arm 42 is lowered. At this time, the gripping arm 42 pulls out the tool 8 from the holder joint 19.
That is, the gripping arm 42 grips the old tool 8a at the holding portion 43 and closes the cam follower 62 as it moves downward along the inclined sides 47a and 51a.

Further, the cam follower 62 descends, comes into contact with the bottom sides 47b and 51b, and the grip arm 42 is pushed down, whereby the gripped old tool 8a is pulled out from the holder joint 19 and completely removed.
In this way, the old tool 8a is removed from the scribe head 7. Thereafter, the scribe head 7 is moved to another position.

Next, the transfer nozzle 81 is moved above the holding portion 43 of the grip arm 42. The transfer nozzle 81 is lowered to approach the old tool 8a. Subsequently, while the rod 73 is extended upward by 10 mm, the gripping arm 42 that holds the old tool 8 a is lifted and inserted into the transfer nozzle 81. The support member 57 hits the stopper 78 and the gripping arm 42 does not rise any further.

Further, while the rod 73 is extended upward by 10 mm, the cam follower 62 rises along the inclined sides 47a and 51a and the pair of claw portions 45 and 49 are opened, so that the old tool 8a is held by the holding portion 43. The old tool 8 a is sucked into the transfer nozzle 81 by the vacuum suction of the transfer nozzle 81.
As a result, the transfer nozzle 81 receives the old tool 8 a from the remover 41. The transfer nozzle 81 holding the old tool 8 a is moved to the cartridge 31. The old tool 8a is accommodated in the cartridge 31.

Next, the transfer nozzle 81 receives the tool 8 (new tool 8b) from the cartridge 31.
Here, the rod 73 of the air cylinder 72 is extended 20 mm upward, and the gripping arm 42 is opened to wait. The transfer nozzle 81 holding the new tool 8 b is moved above the holding portion 43 of the grip arm 42. The transfer nozzle 81 is lowered and the new tool 8 b is moved to the holding portion 43 of the grip arm 42.

Then, while pulling the rod 73 downward by 10 mm, the new tool 8b is gripped and held by the holding portion 43 (closed state).
Further, while pulling the rod 73 downward by 10 mm, the gripping arm 42 is moved downward, and the new tool 8 b is pulled out from the transfer nozzle 81.
As a result, the remover 41 receives the new tool 8 b from the transfer nozzle 81. After the transfer is completed, the transfer nozzle 81 is raised and moved to another position.

The scribe head 7 is moved above the gripping arm 42 (above the new tool 8b) and slightly lowered.
While the rod 73 extends upward by 10 mm, the gripping arm 42 rises and the new tool 8 b is inserted into the holder joint 19.
Further, while the rod 73 extends upward by 10 mm, the cam follower 62 rises along the inclined sides 47a and 51a and the pair of claw portions 45 and 49 are opened, so that the new tool 8b is released from the holding portion 43. Then, the new tool 8 b is attracted to the holder joint 19 by the suction of the magnet 23. The new tool 8b is positioned by the parallel pin 24.

Now, although it is an embodiment different from the above method, the new tool 8 b can be accommodated in the accommodating portion 67 and set in the holder joint 19. In that case, it is as follows.
The removal of the old tool 8a is as described above, and will be omitted.
When the transfer nozzle 81 receives the new tool 8 b with the cartridge 31, the transfer nozzle 81 moves above the housing portion 67. The transfer nozzle 81 is lowered and the new tool 8 b is inserted into the accommodating portion 67. Then, the vacuum suction of the transfer nozzle 81 is released.

Then, the new tool 8 b is accommodated in the accommodating portion 67. At this time, the direction of the new tool 8 b is a direction that can be attached to the holder joint 19.
After the transfer is completed, the transfer nozzle 81 is raised and moved to another position. The scribe head 7 is moved above the accommodating portion 67 (above the new tool 8b) and is lowered slightly.
While the rod 73 extends upward by 10 mm, the accommodating portion 67 rises and the new tool 8 b is inserted into the holder joint 19. Further, when the rod 73 is extended upward by 10 mm, the new tool 8 b is attracted to the holder joint 19 by the attraction of the magnet 23.

That is, in the holder joint 19, the new tool 8 b can be easily set from the housing portion 67 to the scribe head 7 by bringing the new tool 8 b close to a range where the magnet 23 can be attracted.
Note that the holder joint 19 is brought close to the position about 2.5 mm before the final set position with respect to the new tool 8b housed in the housing portion 67. Accordingly, when the rod 73 of the air cylinder 72 is extended and the storage portion 67 is raised, the new tool 8 b is sucked by the magnet 23 and attached to the holder joint 19.

Further, both the storage section 67 and the transfer nozzle 81 are arranged in a straight line with an inclination of 2 degrees.
In this way, the new tool 8b is mounted on the scribe head 7.
The above-described attaching / detaching operation of the tool 8 is a two-step operation including an operation of grasping the tool 8 and an operation of raising and lowering the grasping arm 42, but the first inclined side 47a and the second inclined side 51a are gentle and continuous. Since it is inclined, the attaching / detaching operation is continuously performed.

The two-dimensional code printed on the new tool 8 b is read using a 2D code reader 91. It is confirmed from the read data whether the tool 8 is correct. If correct, move to actual operation.
As described above, according to the present invention, when the scribing tool 8 is removed and replaced, there is no work such as turning the scribing tool 8 upside down in order to protect the cutting edge (wheel 9). Can be extended. In addition, by using the cartridge 31 of the present invention, it is possible to prevent as much as possible a mounting error (artificial error) of the cartridge 31, and further improve the compatibility of the scribing tool 8 and the foolproof function. Is possible.

Further, the scribing tool 8 can be accurately gripped without distortion. Positioning of the scribing tool 8 and the holder joint 19 becomes easy. The scribing tool 8 can be attached and detached without applying an extra load to the scribe head 7 such as the holder joint 19.
Therefore, it is possible to solve the problems of the lengthening of the adjustment time when removing and replacing the scribing tool 8 and the carefulness of replacement (it takes time).

The embodiment disclosed this time should be considered as illustrative in all points and not restrictive.
In particular, in the embodiment disclosed this time, matters that are not explicitly described, such as operating conditions and operating conditions, dimensions and weights of components, do not deviate from the range normally practiced by those skilled in the art. If it is a trader, items that can be easily assumed are adopted.

For example, in the case of the present embodiment, the head unit 4 is illustrated as a type in which the head unit 4 is tilted by 2 degrees, but there are other types in which the head unit 4 is mounted in the vertical direction. Even in that case, the technique of the present application is applicable.

1 Scribing device 2 Brittle material substrate 3 Table (mounting means)
4 Head unit 5 Block body 6 Camera 7 Scribe head 8 Scribing tool (tool)
8a Old tool 8b New tool 9 Scribing wheel (wheel)
DESCRIPTION OF SYMBOLS 10 Main body part 11 Side wall surface part 12 Gutter part 13 Notch part 14 Pin groove 15 Pin 16 Mounting part 17 Flat surface 18 Inclined surface 19 Holder joint 20 Bearing 21 Holding part 22 Opening 23 Magnet 24 Parallel pin 30 Tool change mechanism 31 Cartridge 32 Base 33 Clamp 41 Remover 42 Grip arm 43 Holding portion 44 First grip arm 45 First claw portion 46 First cam groove (first hole)
47a First inclined side 47b First bottom side 48 Second grip arm 49 Second claw 50 Second cam groove (second hole)
51a Second inclined side 51b Second bottom side 52 Cushion material 53 Through hole 54 Bearing 55 Shaft body 56 Spring member 57 Support member 58 Notch 59 Through hole 60 Cover member 61 Lifting member 62 Rotating member (cam follower)
63 Shaft 64 Bearing 65 Protruding portion 66 Through-hole 67 Housing portion 68 Step portion 69 Guide member (linear guide)
70 Guide rail 71 Slider 72 Drive unit (air cylinder)
73 Shaft (Rod)
74 Base 75 Hole 77 Spring member 78 Stopper 79 Fastener 81 Transfer nozzle 91 2D code reader

Claims (11)

1. A mounting means on which the brittle material substrate is mounted;
   A scribe head provided to face the brittle material substrate on the placing means;
   A holder joint provided at the tip of the scribe head;
   A scribing tool that is detachably attached to the holder joint and includes a scribing wheel that forms a scribe line on the brittle material substrate on the placement means;
   A tool change mechanism that removes the used scribing tool from the holder joint and attaches another scribing tool to the holder joint to perform tool change, and
   The scribing device, wherein the tool change mechanism has a remover for attaching and detaching the scribing tool from the holder joint.
2. The scribing device according to claim 1, wherein the remover has a pair of gripping arms that grip and hold the scribing tool when the scribing tool is detached from the holder joint.
3. The pair of gripping arms are provided so as to be swingable, and the paired gripping arms are attached together and closed, the closed state in which the scribing tool is gripped and held, and the paired gripping arms separated from each other. The scribing apparatus according to claim 2, wherein the scribing apparatus is configured to be changeable to.
4. The scribing device according to claim 3, wherein the pair of gripping arms is movable in a vertical direction by a driving unit via a lifting member.
5. The pair of gripping arms has a holding portion that grips and holds the scribing tool at the tip,
   The scribing device according to any one of claims 2 to 4, wherein a cushion material that prevents damage to the scribing tool is attached to the holding portion.
6. The grip arm is formed with a cam groove,
   Inside the cam groove, a rotating member provided in the elevating member is provided,
   The scribing device according to any one of claims 2 to 5, wherein the gripping arm moves in the vertical direction via the rotating member.
7. An inclined side is formed inside the cam groove,
   The scribing device according to claim 6, wherein the pair of gripping arms are opened by moving the rotating member along the inclined side.
8. The pair of gripping arms is provided with a spring member along a swinging direction,
   The scribing device according to claim 7, wherein the pair of gripping arms are closed by the pressing of the spring member.
9. The scribing apparatus according to claim 1, wherein the remover is provided with an accommodating portion for accommodating the another scribing tool.
10. The scribing device according to claim 8, wherein the gripping arm is configured to move up and down within a predetermined range by a stopper.
11. Placement means on which the brittle material substrate is placed, a scribe head provided to face the brittle material substrate on the placement means, a holder joint provided at the tip of the scribe head, and the holder A scribing tool that includes a scribing tool that is detachably attached to a joint and includes a scribing wheel that forms a scribing line on the brittle material substrate on the placing means.
    The remover is for attaching and detaching the used scribing tool to the holder joint,
    The remover has a pair of gripping arms for gripping and holding the scribing tool when removing the scribing tool from the holder joint,
    The pair of gripping arms are provided so as to be swingable, and the paired gripping arms are attached together and closed, the closed state in which the scribing tool is gripped and held, and the paired gripping arms in an open state The configuration can be changed to
    The pair of gripping arms can be moved in the vertical direction by a driving unit via an elevating member,
    A cam groove is formed in each of the pair of gripping arms, and a rotating member provided in the elevating member is disposed inside the cam groove, and the gripping arm is interposed via the rotating member. Moving up and down, and opening and closing the pair of gripping arms,
    An inclined side is formed in the cam groove, and the pair of gripping arms are opened by the rotation member moving along the inclined side.
    The pair of gripping arms is provided with a spring member along a swinging direction, and the pair of gripping arms are in a closed state when pressed by the spring member. Remover provided in the scribing device.

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