JP2017119347A - Holder joint - Google Patents

Holder joint Download PDF

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Publication number
JP2017119347A
JP2017119347A JP2015255603A JP2015255603A JP2017119347A JP 2017119347 A JP2017119347 A JP 2017119347A JP 2015255603 A JP2015255603 A JP 2015255603A JP 2015255603 A JP2015255603 A JP 2015255603A JP 2017119347 A JP2017119347 A JP 2017119347A
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Japan
Prior art keywords
holder
opening hole
holder joint
elastic member
joint
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JP2015255603A
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Japanese (ja)
Inventor
良太 阪口
Ryota Sakaguchi
良太 阪口
正信 曽山
Masanobu Soyama
正信 曽山
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2015255603A priority Critical patent/JP2017119347A/en
Priority to TW105138548A priority patent/TWI649172B/en
Priority to KR1020160169509A priority patent/KR20170077788A/en
Priority to CN201611170072.6A priority patent/CN106914992A/en
Publication of JP2017119347A publication Critical patent/JP2017119347A/en
Priority to KR1020180095304A priority patent/KR20180093861A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D3/00—Dressing mill discs or rollers
    • B28D3/005—Tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D3/00—Cutting work characterised by the nature of the cut made; Apparatus therefor
    • B26D3/08—Making a superficial cut in the surface of the work without removal of material, e.g. scoring, incising
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2614—Means for mounting the cutting member
    • B26D7/2621—Means for mounting the cutting member for circular cutters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a holder joint capable of securely holding a holder, eliminating a play.SOLUTION: A holder joint comprises: an opening hole 3 opening downward and extending vertically; a parallel positioning pin 5 horizontally disposed in the opening hole 3 for contacting an inclined surface 26a of a holder 20 inserted into the opening hole 3; a magnet 4 arranged in a deeply recessed portion of the opening hole 3; and an elastic member 7 disposed on an inner surface of the opening hole 3. The elastic member 7 is configured to elastically press an outer peripheral surface of the holder 20 inserted into the opening hole 3, on an inclined surface 26a side.SELECTED DRAWING: Figure 3

Description

本発明は、下端にカッターホイール（スクライビングホイールともいう）を備えたホルダを保持するためのホルダジョイントに関する。本発明のホルダジョイントは、カッターホイールを基板表面に押し付けながらスクライブすることにより、基板にスクライブライン（分断用の溝）を加工したり、分断（ブレイク）したりする基板加工装置に用いられ、特に曲線のスクライブラインを形成するための基板加工装置に好適に用いられる。   The present invention relates to a holder joint for holding a holder having a cutter wheel (also referred to as a scribing wheel) at a lower end. The holder joint of the present invention is used in a substrate processing apparatus for processing a scribe line (dividing groove) on a substrate or dividing (breaking) the substrate by scribing while pressing the cutter wheel against the substrate surface. It is suitably used for a substrate processing apparatus for forming a curved scribe line.

従来から、ガラス、シリコン、セラミック、半導体等の脆性材料からなる基板や貼り合わせ基板（以下単に「基板」という）の表面に、カッターホイールでスクライブ予定ラインに沿ったスクライブラインを形成したり、あるいは、分断予定ラインから完全分断したりする基板加工装置が知られている（例えば特許文献１、特許文献２参照）。   Conventionally, on a surface of a substrate made of a brittle material such as glass, silicon, ceramic, semiconductor, or a bonded substrate (hereinafter simply referred to as “substrate”), a scribe line is formed along a planned scribe line with a cutter wheel, or There are known substrate processing apparatuses that completely divide a parting line (for example, see Patent Document 1 and Patent Document 2).

図６は、後記特許文献等に開示されている従来の基板加工装置を示す斜視図である。
基板加工装置Ｂは、加工対象となる基板Ｗを載置して保持する水平なテーブル３１を備えている。テーブル３１は、モータを内蔵する回転駆動部３２により水平面内で回動できるようになっており、かつ、水平なレール３３、３３に沿ってＹ方向に移動できるように構成されている。このＹ方向の移動は、モータ３４によって回転するネジ軸３５より行われる。 FIG. 6 is a perspective view showing a conventional substrate processing apparatus disclosed in patent documents and the like described later.
The substrate processing apparatus B includes a horizontal table 31 that places and holds a substrate W to be processed. The table 31 can be rotated in a horizontal plane by a rotation drive unit 32 incorporating a motor, and can be moved in the Y direction along horizontal rails 33 and 33. The movement in the Y direction is performed by a screw shaft 35 that is rotated by a motor 34.

そして、テーブル３１を挟んで設けられる一対の支柱３６、３６と、これら支柱３６、３６をつなぐようにＸ方向に水平に延びるガイドバー３７とを備えたブリッジ３８が、テーブル３１上を跨ぐようにして設けられている。ガイドバー３７には、Ｘ方向に水平に延びるガイド３９が設けられ、スクライブヘッド４０がガイド３９に沿ってＸ方向に移動できるように配置されている。スクライブヘッド４０のＸ方向への移動はモータ４１の駆動によって行われる。また、スクライブヘッド４０にはカッターホイール２１を備えたホルダ２０がホルダジョイント１０を介して着脱可能に取り付けられ、スクライブヘッド４０の内部には、ホルダジョイント１０の昇降を可能とする昇降機構（図示略）が組み込まれている。   A bridge 38 having a pair of support columns 36, 36 provided with the table 31 in between and a guide bar 37 extending horizontally in the X direction so as to connect the support columns 36, 36 straddles the table 31. Is provided. The guide bar 37 is provided with a guide 39 extending horizontally in the X direction, and the scribe head 40 is arranged so as to be movable along the guide 39 in the X direction. The scribing head 40 is moved in the X direction by driving a motor 41. Further, the holder 20 having the cutter wheel 21 is detachably attached to the scribe head 40 via the holder joint 10, and an elevating mechanism (not shown) that allows the holder joint 10 to be raised and lowered inside the scribe head 40. ) Is incorporated.

上記の構成により、テーブル３１上に載置した基板Ｗにカッターホイール２１を押し付けながらカッターホイール２１とテーブル３１の一方または双方を移動させることにより、基板ＷをＸ−Ｙ方向にスクライブしてスクライブラインを形成したり、基板Ｗを分断したりすることができるようになっている。   With the above-described configuration, one or both of the cutter wheel 21 and the table 31 are moved while pressing the cutter wheel 21 against the substrate W placed on the table 31, thereby scribing the substrate W in the X-Y direction and the scribe line. Can be formed, or the substrate W can be divided.

図７〜９は、ホルダ２０及びホルダジョイント１０の構成を示すものである。
ホルダ２０は、略円柱状の胴部２２と、胴部２２の下端で胴部２２の軸心に対して平行に形成された一対の平坦面２３、２３とを備え、かつ、これら一対の平坦面２３、２３の間に、当該平坦面２３と平行な切り欠き溝２４が形成されており、この切り欠き溝２４に、水平なホイール軸２５を介してカッターホイール２１が回転自在に取り付けられている。 7 to 9 show the configurations of the holder 20 and the holder joint 10.
The holder 20 includes a substantially cylindrical body portion 22 and a pair of flat surfaces 23 and 23 formed in parallel to the axis of the body portion 22 at the lower end of the body portion 22, and the pair of flat surfaces. A notch groove 24 parallel to the flat surface 23 is formed between the surfaces 23, 23, and the cutter wheel 21 is rotatably attached to the notch groove 24 via a horizontal wheel shaft 25. Yes.

また、胴部２２の上部は、ホルダジョイント１０に位置決めして取り付けるための取付部２６となっている。取付部２６は、円柱状の胴部２２の一部を切り欠いて形成されたフラットな垂直面２６ａと、この垂直面２６ａの下端に連なって形成された傾斜面２６ｂとからなる。傾斜面２６ｂとホイール軸２５とは平行に形成されており、これにより、傾斜面２６ｂと後述する平行ピン１５との接線に対してカッターホイール２１の向きが直交するようになっている。また、胴部２２は鉄等の磁性体金属で構成されている。   Further, the upper portion of the body portion 22 is an attachment portion 26 for positioning and attaching to the holder joint 10. The attachment portion 26 includes a flat vertical surface 26a formed by cutting out a part of the cylindrical body portion 22, and an inclined surface 26b formed continuously to the lower end of the vertical surface 26a. The inclined surface 26b and the wheel shaft 25 are formed in parallel, whereby the direction of the cutter wheel 21 is orthogonal to the tangent line between the inclined surface 26b and a parallel pin 15 described later. The body 22 is made of a magnetic metal such as iron.

ホルダジョイント１０は、基板加工装置Ｂのスクライブヘッド４０に連結されるベアリング１１を上部に備えており、下部がホルダ２０を保持する保持部１２となっている。保持部１２の内部には、上下方向に延びる断面略円形の開口穴１３が設けられるとともに、内奥部（最上端）に磁石１４が取り付けられている。開口穴１３の内径は、挿入されるホルダ２０の胴部２２の外径より僅かに大きく形成され、ホルダ２０の取付部２６における傾斜面２６ｂの背面側となる取付部周面２７と相対する位置には、開口穴１３の内周面に対し垂直方向に沿った凹状の逃げ加工部１６が設けられている。また、開口穴１３の逃げ加工部１６と対向する内面にも、取付部２６の挿入を容易にするために穴径を大きくした逃げ加工部１７が設けられている。   The holder joint 10 includes a bearing 11 connected to the scribe head 40 of the substrate processing apparatus B at the upper portion, and the lower portion serves as a holding portion 12 that holds the holder 20. Inside the holding part 12, an opening hole 13 having a substantially circular cross section extending in the vertical direction is provided, and a magnet 14 is attached to the inner back part (uppermost end). The inner diameter of the opening hole 13 is formed to be slightly larger than the outer diameter of the body portion 22 of the holder 20 to be inserted, and a position facing the mounting portion circumferential surface 27 on the back side of the inclined surface 26b in the mounting portion 26 of the holder 20. Is provided with a concave relief portion 16 along the direction perpendicular to the inner peripheral surface of the opening hole 13. In addition, a relief processing portion 17 having a large hole diameter is provided on the inner surface of the opening hole 13 facing the relief processing portion 16 in order to facilitate the insertion of the attachment portion 26.

さらに、開口穴１３の内部には、開口穴１３の軸心とは離れた箇所で当該軸心と直交する方向に延びる位置決め用の平行ピン１５が設けられている。この平行ピン１５は、ホルダ２０の取付部２６がホルダジョイント１０の開口穴１３に挿入されたときに、取付部２６の傾斜面２６ｂが接触し、傾斜面２６ｂ背面側の取付部周面２７を開口穴１３の内面に押し付けて、ホルダ２０の方向や姿勢が一定になるように位置決めするものである。   Furthermore, a positioning parallel pin 15 extending in a direction orthogonal to the axial center is provided in the opening hole 13 at a location away from the axial center of the opening hole 13. When the mounting portion 26 of the holder 20 is inserted into the opening hole 13 of the holder joint 10, the parallel pin 15 contacts the inclined surface 26 b of the mounting portion 26, and the mounting portion peripheral surface 27 on the back side of the inclined surface 26 b is used. It is pressed against the inner surface of the opening hole 13 and positioned so that the direction and posture of the holder 20 are constant.

ホルダ２０をホルダジョイント１０に取り付けるときは、ホルダ２０の取付部２６側をホルダジョイント１０の開口穴１３に挿入して取り付ける。取付部２６がホルダジョイント１０の開口穴１３に挿入されると、取付部２６の傾斜面２６ｂに平行ピン１５が接触して位置決めされるとともに、ホルダ２０の上端部が磁石１４に吸引されて保持される。これにより、ホルダ２０の姿勢が自動的に一定方向に向いた状態でホルダジョイント１０に取り付けられる。   When attaching the holder 20 to the holder joint 10, the attachment part 26 side of the holder 20 is inserted into the opening hole 13 of the holder joint 10 and attached. When the mounting portion 26 is inserted into the opening hole 13 of the holder joint 10, the parallel pin 15 comes into contact with the inclined surface 26 b of the mounting portion 26 and is positioned, and the upper end portion of the holder 20 is attracted and held by the magnet 14. Is done. Thereby, the holder 20 is attached to the holder joint 10 in a state where the posture of the holder 20 is automatically oriented in a certain direction.

特開２０１０−０００７４４号公報JP 2010-000744 A 特開２０１１−２１８８１５号公報JP2011-218815A

上記の構成において、ホルダ２０の取付部周面２７と相対するホルダジョイント１０の開口穴１３の内周面には、垂直方向に沿った凹状の逃げ加工部１６が設けられているので、取付部２６の傾斜面２６ｂが平行ピン１５によって押し付けられると、図１０に示すように、逃げ加工部１６の縁部近傍で開口穴１３の内周面の２箇所Ｐ１、Ｐ２で取付部周面２７が線接触して保持される。このとき、図９（ｂ）に示すように、接触点Ｐ１、Ｐ２を結ぶ線は平行ピン１５と平行であって、接触点Ｐ１、Ｐ２と平行ピン１５の中央接触点Ｐ３を結んだ形状が二等辺三角形となるようにして、平行ピン１５によるホルダ２０への押し付け力が、接触点Ｐ１、Ｐ２で左右にバランスよく負荷されることが理想的である。   In the above-described configuration, the recessed portion 16 along the vertical direction is provided on the inner peripheral surface of the opening hole 13 of the holder joint 10 facing the mounting portion peripheral surface 27 of the holder 20. When the inclined surface 26b of 26 is pressed by the parallel pin 15, as shown in FIG. 10, the mounting portion peripheral surface 27 is formed at two locations P1 and P2 on the inner peripheral surface of the opening hole 13 in the vicinity of the edge of the relief processing portion 16. Holds in line contact. At this time, as shown in FIG. 9B, the line connecting the contact points P1 and P2 is parallel to the parallel pin 15, and the shape connecting the contact points P1 and P2 and the central contact point P3 of the parallel pin 15 is formed. Ideally, the pressing force of the parallel pins 15 against the holder 20 is loaded in a balanced manner at the contact points P1 and P2 so as to form an isosceles triangle.

通常、直線のスクライブラインを加工する場合には、平行ピン１５によるホルダ２０への押し付け力が接触点Ｐ１、Ｐ２で左右にバランスよく負荷される状態が維持される。しかし、曲線のスクライブラインを加工する場合には、カッターホイール２１の進行方向に対して横向きの力がカッターホイール２１を通じてホルダ２０に加わるため、スクライブ後に接触点Ｐ１、Ｐ２が理想のポイントからずれることがある。
このような現象が生じると、ホルダの安定性が悪くなり、カッターホイールの位置及び向きが横にずれたりして、スクライブラインを精度よく加工することが困難になる。 Usually, when a straight scribe line is processed, a state in which the pressing force of the parallel pin 15 against the holder 20 is loaded in a balanced manner at the contact points P1 and P2 is maintained. However, when processing a curved scribe line, since a force transverse to the traveling direction of the cutter wheel 21 is applied to the holder 20 through the cutter wheel 21, the contact points P1 and P2 are displaced from the ideal points after scribing. There is.
When such a phenomenon occurs, the stability of the holder is deteriorated, the position and orientation of the cutter wheel are shifted laterally, and it becomes difficult to process the scribe line with high accuracy.

そこで本発明は、上記課題に鑑み、曲線のスクライブラインを加工する場合にもホルダのガタツキをなくして確実に保持することのできるホルダジョイントを提供することを目的とする。   In view of the above problems, an object of the present invention is to provide a holder joint that can be securely held without rattling of the holder even when a curved scribe line is processed.

上記課題を解決するために、本発明では次のような技術的手段を講じた。すなわち、本発明のホルダジョイントは、カッターホイールを備えたホルダを保持するホルダジョイントであって、下向きに開口して上下に延びる開口穴と、前記開口穴内に設置され、当該開口穴に挿入されたホルダの取付部に接触する位置決め部材と、前記開口穴の内奥部に配置された磁石と、前記開口穴の内面に設けられた弾性部材とからなり、前記弾性部材は、前記開口穴に挿入されたホルダの取付部と位置決め部材の接触する側の外周面を弾力的に押し付けるように形成されている構成とした。   In order to solve the above problems, the present invention takes the following technical means. That is, the holder joint of the present invention is a holder joint that holds a holder equipped with a cutter wheel, and is installed in the opening hole that is open downward and extends vertically, and is inserted into the opening hole. It consists of a positioning member that contacts the mounting portion of the holder, a magnet arranged in the inner part of the opening hole, and an elastic member provided on the inner surface of the opening hole, and the elastic member is inserted into the opening hole It was set as the structure formed so that the outer peripheral surface on the side which the attachment part of the made holder and the positioning member contact might be pressed elastically.

ここで、前記弾性部材は、筒状のケーシングと、このケーシングの先端から周面の一部が突出した状態で前記ケーシングに出没自在に保持されたボールと、このボールを常時突出方向に付勢するスプリングとからなるボールプランジャで形成するのが好ましい。   Here, the elastic member includes a cylindrical casing, a ball that is held in and out of the casing in a state in which a part of the peripheral surface protrudes from the tip of the casing, and constantly urges the ball in a protruding direction. It is preferable to form it with a ball plunger comprising a spring.

本発明は上記のごとく構成されているので、ホルダジョイントの開口穴に挿入されたホルダは、平行ピンとホルダの傾斜面との接触によって位置決めされるとともに、弾性部材によって傾斜面を設けた側の外周面が弾力的に押し付けられた状態で保持される。これにより、ホルダジョイントのチップホルダを保持する力が増加し、曲線のスクライブ加工を行うなど、カッターホイールがその進行方向に対して横向きの力を受ける場合でも、ホルダジョイントにホルダをガタツキなく確実に保持させることができ、スクライブラインを精度よく加工することができる。また、直線のスクライブ加工を行う場合においても、突発的な力が加わることによるホルダジョイント内でのホルダの揺動が抑制されるため、スクライブ精度をより安定させることができる。   Since the present invention is configured as described above, the holder inserted in the opening hole of the holder joint is positioned by the contact between the parallel pin and the inclined surface of the holder, and the outer periphery on the side where the inclined surface is provided by the elastic member. The surface is held elastically pressed. As a result, the force to hold the tip holder of the holder joint increases, and even when the cutter wheel receives a lateral force with respect to its traveling direction, such as when performing a scribing process of a curve, the holder joint can be securely attached without rattling. The scribe line can be processed with high accuracy. Further, even when performing a linear scribe process, the scribe accuracy can be further stabilized since the swinging of the holder in the holder joint due to the sudden application of force is suppressed.

また本発明では、前記弾性部材が、前記開口穴の開口部近傍で前記位置決め部材とは離れた下方位置に設けられている構成とするのがよい。
これにより、上方の平行ピンと下方の弾性部材との上下２箇所でホルダ胴部を押し付けることができ、ホルダをさらに安定して保持することができる。 Moreover, in this invention, it is good to set it as the structure by which the said elastic member is provided in the downward position away from the said positioning member in the opening part vicinity of the said opening hole.
Thereby, a holder trunk | drum can be pressed in two upper and lower places with an upper parallel pin and a lower elastic member, and a holder can be hold | maintained more stably.

本発明のホルダジョイントとこれに取り付けられるホルダを示す斜視図。The perspective view which shows the holder joint of this invention, and the holder attached to this. 図１のホルダジョイントの構造を示す縦断面図と横断面図。The longitudinal cross-sectional view and cross-sectional view which show the structure of the holder joint of FIG. 図１のホルダジョイントに係るホルダ取付状態を示す縦断面図と横断面図。The longitudinal cross-sectional view and horizontal cross-sectional view which show the holder attachment state concerning the holder joint of FIG. 本発明のホルダジョイントの別実施例を示す横断面図。The cross-sectional view which shows another Example of the holder joint of this invention. 図４のホルダジョイントに係るホルダ取付状態を示す横断面図。The cross-sectional view which shows the holder attachment state which concerns on the holder joint of FIG. ホルダジョイントが用いられる基板加工装置を示す斜視図。The perspective view which shows the board | substrate processing apparatus with which a holder joint is used. ホルダジョイントに取り付けられるホルダを示す断面図。Sectional drawing which shows the holder attached to a holder joint. 従来のホルダジョイントの構造を示す縦断面図と保持部の底面図。The longitudinal cross-sectional view which shows the structure of the conventional holder joint, and the bottom view of a holding | maintenance part. 図８のホルダジョイントに係るホルダ取付状態を示す縦断面図とＣ−Ｃ線断面の拡大図。The longitudinal cross-sectional view which shows the holder attachment state concerning the holder joint of FIG. 8, and the enlarged view of a CC line cross section. 従来のホルダジョイントにおけるホルダの接触点を示す説明図。Explanatory drawing which shows the contact point of the holder in the conventional holder joint.

以下において、本発明の詳細をその実施の形態を示す図面に基づいて説明する。
図１〜３は、本発明に係るホルダジョイントＡを示すものであって、これに接続されるホルダ２０は、前述した図７のホルダ２０と同様のものである。 The details of the present invention will be described below with reference to the drawings showing embodiments thereof.
1 to 3 show a holder joint A according to the present invention, and a holder 20 connected to the holder joint A is the same as the holder 20 of FIG. 7 described above.

ホルダジョイントＡは、上部にベアリング１を備え、下部がホルダ２０を保持する保持部２となっており、上部のベアリング１の部分で基板加工装置Ｂ（図６参照）のスクライブヘッド４０に回動可能に取り付けられる。保持部２の内部には、上下方向に延びる開口穴３が設けられるとともに、内奥部に磁石４が取り付けられている。   The holder joint A is provided with a bearing 1 at the upper part, and the lower part serves as a holding part 2 for holding the holder 20, and the upper part of the bearing 1 rotates to the scribe head 40 of the substrate processing apparatus B (see FIG. 6). Installed as possible. An opening hole 3 extending in the vertical direction is provided inside the holding portion 2, and a magnet 4 is attached to the inner back portion.

開口穴３の内部には、位置決め部材として、開口穴３の軸心とは離れた箇所で当該軸心と直交する方向に延びる位置決め用の平行ピン５が設けられている。この平行ピン５は、ホルダ２０が開口穴３に挿入されたときに、ホルダ２０の傾斜面２６ｂが接触して傾斜面２６ｂ背面側の取付部周面２７を、相対する開口穴３の内面に押し付けて、ホルダ２０の方向や姿勢が一定になるように位置決めするものである。
開口穴３の内径は、挿入されるホルダ２０の胴部２２の外径より僅かに大きく形成され、また、ホルダ２０の取付部２６における傾斜面２６ｂの背面側となる取付部周面２７と相対する位置には、開口穴３の内周面に対し垂直方向に沿った凹状の逃げ加工部６が設けられている。また、開口穴３の逃げ加工部６と対向する内面にも、取付部２６の挿入を容易にするために穴径を大きくした逃げ加工部８が設けられている。
以上の構成は、図８で示した従来のホルダジョイントの構成と同じである。 Inside the opening hole 3, a positioning parallel pin 5 is provided as a positioning member that extends in a direction perpendicular to the axis at a position away from the axis of the opening hole 3. When the holder 20 is inserted into the opening hole 3, the parallel pin 5 is brought into contact with the inclined surface 26 b of the holder 20 so that the mounting portion circumferential surface 27 on the back side of the inclined surface 26 b is brought into contact with the inner surface of the opposed opening hole 3. By pressing, the holder 20 is positioned so that the direction and posture of the holder 20 are constant.
The inner diameter of the opening hole 3 is formed to be slightly larger than the outer diameter of the body portion 22 of the holder 20 to be inserted, and is relative to the mounting portion circumferential surface 27 on the back side of the inclined surface 26 b of the mounting portion 26 of the holder 20. A concave relief portion 6 is provided along the direction perpendicular to the inner peripheral surface of the opening hole 3 at the position where the hole 3 is to be formed. In addition, a relief portion 8 having a large hole diameter is provided on the inner surface of the opening hole 3 facing the relief portion 6 so as to facilitate the insertion of the attachment portion 26.
The above configuration is the same as the configuration of the conventional holder joint shown in FIG.

さらに本発明では、上記した構成に加えて、ホルダジョイントＡの開口穴３の内面に、当該開口穴３に挿入されたホルダ２０の胴部２２を逃げ加工部６の方向に向かって弾力的に押し付ける弾性部材７を設けており、本実施例では、弾性部材７として、ボールプランジャを用いて説明する。
弾性部材（ボールプランジャ）７は、筒状のケーシング７ａと、ケーシング７ａの先端から周面の一部が突出した状態でケーシング７ａに出没自在に保持されたボール７ｂと、このボール７ｂを常時突出方向に付勢するスプリング７ｃとからなり、ホルダジョイントＡの開口穴３の開口部近傍で平行ピン５とは離れた下方位置に取り付けられている。 Furthermore, in the present invention, in addition to the above-described configuration, the body portion 22 of the holder 20 inserted into the opening hole 3 is elastically moved toward the relief processing portion 6 on the inner surface of the opening hole 3 of the holder joint A. The elastic member 7 to be pressed is provided. In this embodiment, the elastic member 7 will be described using a ball plunger.
The elastic member (ball plunger) 7 includes a cylindrical casing 7a, a ball 7b that is held in the casing 7a in a state in which a part of the peripheral surface protrudes from the tip of the casing 7a, and the ball 7b always protrudes. The spring 7c is biased in the direction, and is attached at a lower position away from the parallel pin 5 in the vicinity of the opening of the opening hole 3 of the holder joint A.

このような構成において、ホルダ２０をホルダジョイントＡに取り付けるときは、図３（ａ）に示すように、まず、ホルダ２０の取付部２６側をホルダジョイントＡの開口穴３に挿入して取り付ける。これにより、取付部２６の傾斜面２６ｂに平行ピン５が接触して位置決めされるとともに、ホルダ２０の上端部が磁石４に吸引されて保持される。このとき、磁石４によってホルダ２０が引き上げられるので、取付部２６の傾斜面２６ｂが平行ピン５に接触して押し付けられ、ホルダ２０の位置や姿勢が一定になるように位置決めされるとともに、図３（ｂ）に示すように、ホルダ２０の取付部周面２７が、逃げ加工部６の縁部近傍で開口穴３の内周面に線接触して保持される。
また同時に、弾性部材７が開口穴３に挿入されたホルダ２０の胴部２２を逃げ加工部６に向かって弾力的に押し付けることにより、曲線のスクライブ加工を行うなど、カッターホイール２１の進行方向に対して横向きの力がホルダ２０に加わった場合でも、ガタツキなく確実にホルダジョイントＡに保持させることができる。 In such a configuration, when the holder 20 is attached to the holder joint A, the attachment portion 26 side of the holder 20 is first inserted into the opening hole 3 of the holder joint A and attached as shown in FIG. As a result, the parallel pin 5 comes into contact with the inclined surface 26 b of the mounting portion 26 and is positioned, and the upper end portion of the holder 20 is attracted and held by the magnet 4. At this time, since the holder 20 is pulled up by the magnet 4, the inclined surface 26b of the mounting portion 26 is pressed against the parallel pin 5, and is positioned so that the position and posture of the holder 20 are constant. As shown in (b), the attachment portion peripheral surface 27 of the holder 20 is held in line contact with the inner peripheral surface of the opening hole 3 in the vicinity of the edge portion of the relief processing portion 6.
At the same time, the elastic member 7 is elastically pressed against the relief processing portion 6 with the body portion 22 of the holder 20 inserted into the opening hole 3 to perform curving scribe processing in the traveling direction of the cutter wheel 21. On the other hand, even when a lateral force is applied to the holder 20, the holder joint A can be securely held without rattling.

また、弾性部材７の取り付け位置を開口穴３の開口部近傍で平行ピン５とは離れた下方位置とすることにより、上方の平行ピン５と下方の弾性部材７との上下の２箇所でホルダ２０の胴部２２を押し付けることができ、ホルダ２０の取り付け時の安定性をより一層高めることができる。   Further, by setting the attachment position of the elastic member 7 to a lower position in the vicinity of the opening portion of the opening hole 3 away from the parallel pin 5, the holder is installed at the upper and lower portions of the upper parallel pin 5 and the lower elastic member 7. The 20 body portions 22 can be pressed, and the stability when the holder 20 is attached can be further enhanced.

図４は、ホルダジョイントの開口穴の形状を若干変更した別実施例を示すものである。当該実施例では、開口穴３’の内面に、平面視Ｖ字形をなすように左右対称に配置された一対の平坦面９、９が垂直方向に沿って形成されている。これら左右の平坦面９、９は、平行ピン５の中央を直交する水平な仮想直線Ｌの左右に振り分けて形成されており、ホルダ２０が開口穴３’に挿入されたときにホルダ２０の取付部周面２７が接触するように形成されている。この左右の平坦面９、９がなす角度αは、５０〜１００度の範囲内、好ましくは６０度の角度で形成するのがよい。
この実施例では、図５に示すように、ホルダ２０を開口穴３’に挿入したときには、弾性部材７並びに平行ピン５による押し付けによって、ホルダ２０の取付部周面２７をＶ字形に配置した左右の平坦面９、９に確実に接触させて保持させることができ、これにより、ホルダ２０を保持したときの安定性をさらに向上させることができる。 FIG. 4 shows another embodiment in which the shape of the opening hole of the holder joint is slightly changed. In this embodiment, a pair of flat surfaces 9 and 9 are formed along the vertical direction on the inner surface of the opening hole 3 'so as to be symmetrically arranged so as to form a V shape in plan view. These left and right flat surfaces 9, 9 are formed by dividing the center of the parallel pin 5 to the left and right of a horizontal imaginary straight line L orthogonal thereto, and the holder 20 is attached when the holder 20 is inserted into the opening hole 3 '. It forms so that the part surrounding surface 27 may contact. The angle α formed by the left and right flat surfaces 9, 9 is preferably in the range of 50 to 100 degrees, preferably 60 degrees.
In this embodiment, as shown in FIG. 5, when the holder 20 is inserted into the opening hole 3 ′, the mounting member peripheral surface 27 of the holder 20 is arranged in a V shape by pressing with the elastic member 7 and the parallel pin 5. The flat surfaces 9 and 9 can be reliably brought into contact with each other and held, whereby the stability when the holder 20 is held can be further improved.

以上、本発明の代表的な実施例について説明したが、本発明は必ずしも上記の実施形態に特定されるものではない。例えば、上記の実施例では弾性部材７としてボールプランジャを用いて説明したが、これに代えて板バネ等のような弾性材を用いてもよい。また、位置決め部材としては、ホルダ２０がホルダジョイント１０の開口穴１３に挿入され、磁石４によって引き上げられたときに、取付部２６背面側の取付部周面２７を開口穴１３の内面に押し付けることができればよく、平行ピンに代えて球など任意の形状とすることができる。その場合、取付部２６の形状も位置決め部材の形状に応じて変更可能である。
その他本発明では、その目的を達成し、請求の範囲を逸脱しない範囲内で適宜修正、変更することが可能である。 As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specified to said embodiment. For example, although the ball plunger is used as the elastic member 7 in the above embodiment, an elastic material such as a leaf spring may be used instead. Further, as the positioning member, when the holder 20 is inserted into the opening hole 13 of the holder joint 10 and pulled up by the magnet 4, the mounting portion circumferential surface 27 on the back side of the mounting portion 26 is pressed against the inner surface of the opening hole 13. However, it can be in any shape such as a sphere instead of a parallel pin. In that case, the shape of the mounting portion 26 can also be changed according to the shape of the positioning member.
Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

本発明は、基板の表面にカッターホイールを押し付けながらスクライブすることにより基板に分断用のスクライブラインを加工したり、基板を分断したりする基板加工装置において、カッターホイールのホルダを保持するホルダジョイントに利用することができる。   The present invention provides a holder joint for holding a holder of a cutter wheel in a substrate processing apparatus for processing a scribe line for cutting on a substrate or by dividing the substrate by scribing while pressing the cutter wheel against the surface of the substrate. Can be used.

Ａ ホルダジョイント
１ ベアリング
２ 保持部
３ 開口穴
４ 磁石
５ 平行ピン
７ 弾性部材
７ａ ケーシング
７ｂ ボール
７ｃ スプリング
２０ ホルダ
２１ カッターホイール
２２ 胴部
２６ 取付部
２６ｂ 傾斜面
２７ 取付部周面 A Holder joint 1 Bearing 2 Holding portion 3 Opening hole 4 Magnet 5 Parallel pin 7 Elastic member 7a Casing 7b Ball 7c Spring 20 Holder 21 Cutter wheel 22 Body portion 26 Mounting portion 26b Inclined surface 27 Mounting portion peripheral surface

Claims (3)

カッターホイールを備えたホルダを保持するホルダジョイントであって、
下向きに開口して上下に延びる開口穴と、
前記開口穴内に設置され、当該開口穴に挿入されたホルダの取付部に接触する位置決め部材と、
前記開口穴の内奥部に配置された磁石と、
前記開口穴の内面に設けられた弾性部材とからなり、
前記弾性部材は、前記開口穴に挿入されたホルダの傾斜面を設けた側の外周面を弾力的に押し付けるように形成されているホルダジョイント。 A holder joint for holding a holder with a cutter wheel,
An opening hole that opens downward and extends up and down;
A positioning member that is installed in the opening hole and contacts a mounting portion of the holder inserted in the opening hole;
A magnet disposed in the inner part of the opening hole;
It consists of an elastic member provided on the inner surface of the opening hole,
The elastic member is a holder joint formed so as to elastically press an outer peripheral surface on a side where an inclined surface of the holder inserted into the opening hole is provided. 前記弾性部材が、筒状のケーシングと、このケーシングの先端から周面の一部が突出した状態で前記ケーシングに出没自在に保持されたボールと、このボールを常時突出方向に付勢するスプリングとからなるボールプランジャで形成されている請求項１に記載のホルダジョイント。   The elastic member includes a cylindrical casing, a ball that is held in and out of the casing in a state in which a part of the peripheral surface protrudes from the tip of the casing, and a spring that constantly urges the ball in the protruding direction. The holder joint according to claim 1, wherein the holder joint is formed of a ball plunger. 前記弾性部材が、前記開口穴の開口部近傍で前記位置決め部材とは離れた下方位置に設けられている請求項１または請求項２に記載のホルダジョイント。   The holder joint according to claim 1 or 2, wherein the elastic member is provided at a lower position in the vicinity of the opening of the opening hole and away from the positioning member.
JP2015255603A 2015-12-28 2015-12-28 Holder joint Pending JP2017119347A (en)

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CN201611170072.6A CN106914992A (en) 2015-12-28 2016-12-16 Keep tool joint
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