CN106914994A - Keep tool joint - Google Patents

Keep tool joint Download PDF

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Publication number
CN106914994A
CN106914994A CN201611170308.6A CN201611170308A CN106914994A CN 106914994 A CN106914994 A CN 106914994A CN 201611170308 A CN201611170308 A CN 201611170308A CN 106914994 A CN106914994 A CN 106914994A
Authority
CN
China
Prior art keywords
open pore
tool
holding
tabular surface
tool joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611170308.6A
Other languages
Chinese (zh)
Inventor
阪口良太
佐佐木吉也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN106914994A publication Critical patent/CN106914994A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/24Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2614Means for mounting the cutting member
    • B26D7/2621Means for mounting the cutting member for circular cutters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)

Abstract

The present invention provides a kind of holding rocked and effectively kept to it tool joint that can be eliminated and keep tool.Consist of and possess:Downwardly facing opening and in the open pore (3) for extending up and down, the parallel pin (5) of the position in the axle center being horizontally placed in open pore (3) away from the open pore (3), it is configured at the inner most magnet (4) of open pore (3), and open pore (3) inner face by a pair vertical tabular surfaces (6 symmetrically being formed in the way of being in the shape of the letter V under overlooking visual angle, 6), each tabular surface (6) is distributed in the left and right of the virtual line (L) of the level orthogonal with parallel pin (5) and is formed, and the installation portion side face (27) of holding tool (20) of insertion opening hole (3) is by the pushing of parallel pin (5) and the tabular surface (6 of the left and right, 6) contact.

Description

Keep tool joint
Technical field
Keep tool joint the present invention relates to one kind, its holding for being used to possessing lower end cutting wheel (also referred to as stitch marker) have into Row keeps.Of the invention to keep tool joint for base plate processing device as described below, the base plate processing device is by one side in base Plate surface pushes cutting wheel while being rule, and so as to process dividing line (groove for blocking) on substrate, and is blocked (disconnection), the base plate processing device for keeping tool joint to be particularly suited for the dividing line to forming curves of the invention.
Background technology
Conventionally, there is known base plate processing device as described below, it is by the fragile material structure such as glass, silicon, ceramics, semiconductor Into substrate, adhesive substrates (hereinafter referred to as " substrate ") surface, with cutting wheel formed along divide preset lines dividing line, or It is to carry out completely cut off (referring for example to patent document 1, patent document 2) from blocking preset lines.
Fig. 7 is the stereogram for representing the conventional base plate processing device disclosed in following patent documents etc..
Base plate processing device B possesses for loading and keeps the microscope carrier 31 of the level as the substrate W of processing object.Microscope carrier 31 are configured to be rotated in the horizontal plane by being built-in with the rotary driving part 32 of motor, and can be along the track of level 33rd, 33 move in the Y direction.The helical axis 35 for being moved through being rotated by motor 34 in the Y-direction is carried out.
And, bridge 38 is provided with the way of being across on microscope carrier 31, the bridge 38 has a pair set across microscope carrier 31 Pillar 36,36 and to connect these pillars 36,36 in the way of horizontal-extending in the X direction guide rod 37.Set on guide rod 37 There is guide 39 horizontal-extending in the X direction, scribe head 40 is configured to be moved in the X direction along guide 39.Draw The driving of the mobile dependence motor 41 in the X direction of the end of a thread 40 is carried out.In addition, via holding tool joint 10 on scribe head 40 Releasably be provided with possess cutting wheel 21 holding tool 20, and scribe head 40 assembled inside have can make holding have joint 10 The elevating mechanism (omitting diagram) of lifting.
By said structure, cutting wheel 21 is pushed on the substrate W being placed on microscope carrier 31, while making cutting wheel 21 and carrying One party or both sides movement in platform 31, dividing line is formed thereby, it is possible to be rule along X-Y directions on substrate W, and right Substrate W is blocked.
Fig. 8~11 represent the structure for keeping tool 20 and keeping tool joint 10.
Tool 20 is kept to possess generally cylindrical trunk 22 and in the lower end of trunk 22 parallel to trunk 22 Axle center and a pair of tabular surfaces 23,23 for being formed, and this between tabular surface 23,23 to being formed with the grooving parallel with the tabular surface 23 24, in the grooving 24, cutting wheel 21 is rotatably installed via the wheel shaft 25 of level.
In addition, the top of trunk 22 is in the installation portion 26 for keeping tool joint 10 to position and install.Installation portion 26 The flat vertical plane 26a formed by cutting away a part for columned trunk 22 and the lower end with vertical plane 26a The inclined plane 26b for being formed is connected to constitute.Inclined plane 26b is formed parallel to wheel shaft 25, thus, the direction of cutting wheel 21 relative to Inclined plane 26b is orthogonal with the tangent line of following parallel pins 15.In addition, trunk 22 is made up of the magnetic metal such as iron.
Tool joint 10 is kept to possess the bearing 11 linked with the scribe head 40 of base plate processing device B on top, its underpart is For the maintaining part 12 to keeping tool 20 to be kept.Extend in the vertical direction and its section in being internally provided with for maintaining part 12 The generally circular open pore 13 in face, and magnet 14 is installed in its penetralia (the top).The internal diameter of open pore 13 is formed as External diameter than the trunk 22 of the holding tool 20 of insertion is slightly larger, in the back of the body for having the inclined plane 26b on 20 installation portion 26 with holding Surface side, the i.e. relative position of installation portion side face 27, are provided with concavity of the inner peripheral surface relative to open pore 13 along vertical direction Depression processing department (escaping げ processing departments) 16.In addition, in the inner face relative with depression processing department 16 of open pore 13, being also equipped with Make the depression processing department 17 of borehole enlargement to make installation portion 26 easily insert.
Further, in the inside of open pore 13, it is provided with the axle center just in the position in the axle center away from open pore 13 The parallel pin 15 of the positioning that the side of friendship upwardly extends.The opening for keeping tool joint 10 is inserted into the installation portion 26 of tool 20 is kept During hole 13, the parallel pin 15 is contacted with the inclined plane 26b of installation portion 26, by the installation portion side face 27 of inclined plane 26b rear sides to The inner face of open pore 13 is pushed, and is positioned in the mode for making the direction of holding tool 20, posture certain.
When tool 20 will be kept to be installed on holding tool joint 10, the side of installation portion 26 insertion of tool 20 will be kept to keep tool joint 10 Open pore 13 and installed.If by installation portion 26 insert keep tool joint 10 open pore 13 in, parallel pin 15 with While the inclined plane 26b of installation portion 26 is contacted and positioned, the upper end of tool 20 is kept to be attracted and be kept by magnet 14. State thereby, it is possible to be automatically oriented certain orientation with the posture for keeping tool 20 is installed on holding tool joint 10.
Prior art literature
Patent document
Patent document 1:Japanese Patent Publication 2010-000744 publications
Patent document 2:Japanese Patent Publication 2011-218815 publications
The content of the invention
(1) technical problem to be solved
In said structure, in the open pore 13 for keeping having joint 10 is relative with the installation portion side face 27 for having 20 is kept On side face, be provided with along the concave depression processing department 16 of vertical direction, thus installation portion 26 inclined plane 26b by parallel pin During 15 pushing, as shown in figure 11, near the edge of depression processing department 16, at P1, P2 two of the inner peripheral surface of open pore 13, peace Dress portion side face 27 carries out linear contact lay so as to be kept.Now, ideally, as shown in (b) of Figure 10, link contact point P1, The line of P2 is parallel with parallel pin 15, contact point P1, P2 and being shaped as that the central contact point P3 of parallel pin 15 is connected and is formed Lumbar triangle shape, parallel pin 15 is supported on contact point P1, P2 to the pushing force left-right balance for keeping tool 20 to apply.
Generally, in the case of the dividing line of processing linear, parallel pin 15 can be maintained to the pushing for keeping tool 20 to apply It is supported on the state on contact point P1, P2 power left-right balance.But, in the case of the dividing line of Processing Curve, due to phase Horizontal power for the direct of travel of cutting wheel 21 can be applied on holding tool 20 by cutting wheel 21, therefore is contacted after line Point P1, P2 may deviate preferable point.
In the event of this phenomenon, keeping the stability of tool can deteriorate, and the position of cutting wheel and direction can occur laterally partially From so as to be difficult to accurately process dividing line.
Therefore, the present invention in view of the above problems, its object is to, there is provided it is a kind of in the case of the dividing line of Processing Curve Also the holding rocked and effectively kept to it tool joint for keeping tool can be eliminated.
(2) technical scheme
In order to solve the above problems, this invention takes following technical scheme.That is, holding tool joint of the invention is a kind of Have joint to the holding that the holding tool for possessing cutting wheel is kept, consist of and possess:Downwardly facing opening and up and down extending Open pore, the positioning element being arranged in the open pore, the inner most magnet for being configured at the open pore and described A pair vertical tabular surfaces of the inner face of open pore symmetrically to be formed in the way of being in the shape of the letter V under overlooking visual angle, it is described Left and right tabular surface be distributed in the left and right of the virtual line of the central orthogonal level of the positioning element and formed, and insert The installation portion side face of the holding tool of the open pore is formed as being contacted with the tabular surface of the left and right.
Here, it is preferred that the tabular surface institute angle degree of the left and right is formed in 50~100 degree, is preferably formed in 60 degree.
(3) beneficial effect
In the present invention, due to the inner face in the open pore for keeping tool joint, it is formed with the way of being in the shape of the letter V and bears to protect Hold the tabular surface of the left and right of the installation portion side face of tool, therefore, it is possible to make holding have installation portion side face position accurately with left and right Tabular surface carry out linear contact lay and installed, and carrying out the line processing of curve etc., keep tool to be subject to horizontal power In the case of, it is also possible to holding is had installation portion side face and effectively contacted with the tabular surface of the left and right for keeping tool joint and it is entered Row keeps.Thereby, it is possible to accurately process dividing line.In addition, in the case where the line for carrying out straight line is processed, can also suppress The holding tool triggered because applying sudden forces is keeping the shake in tool joint, therefore, it is possible to make line precision more stablize.
In addition, in the present invention, on the basis of said structure, being preferably configured to, set in the inner face of the open pore Put and will insert the elastomeric element that the holding tool of the open pore is flexibly pushed to the direction of the tabular surface.
Thus, the trunk of the holding tool in insertion opening hole is protected with the state being resiliently urged towards tabular surface all the time Hold, can further improve stability when insertion keeps having.
Brief description of the drawings
Fig. 1 is to represent the stereogram for keeping tool for keeping tool joint and being installed on holding tool joint of the invention.
Fig. 2 is the longitudinal section of the construction of the holding tool joint for representing Fig. 1.
Fig. 3 is the line C-C sectional view in Fig. 2.
Fig. 4 is the longitudinal section of the holding tool installment state of the holding tool joint for representing Fig. 1.
Fig. 5 is the enlarged drawing in the line D-D section in Fig. 4.
Fig. 6 is the longitudinal section and cross-sectional view for representing another embodiment for keeping tool joint of the invention.
Fig. 7 is to represent the stereogram for having used the base plate processing device for keeping tool joint.
Fig. 8 is to represent the stereogram for being installed on the holding tool for keeping tool joint.
Fig. 9 is the upward view of the longitudinal section with maintaining part of the construction of the holding tool joint for representing conventional.
Figure 10 is the amplification of the longitudinal section with E-E lines section of the holding tool installment state of the holding tool joint for representing Fig. 9 Figure.
Figure 11 is the explanatory diagram of the contact point for representing the holding tool that conventional holding has on joint.
Description of reference numerals
A- keeps tool joint;L- virtual lines;1- bearings;2- maintaining parts;3- open pores;4- magnets;5- parallel pins;6- puts down Smooth face;7- elastomeric elements;20- keeps tool;21- cutting wheels;22- trunks;26- installation portions;27- installation portion side faces.
Specific embodiment
By the accompanying drawing based on expression implementation method, the present invention is described in detail below.
Fig. 1~5 show the holding tool 20 for keeping having 20 and above-mentioned Fig. 8 for keeping tool joint A, being attached thereto of the invention It is identical.
Tool joint A is kept to possess bearing 1 on top, bottom is the maintaining part 2 to keeping tool 20 to be kept, holding tool Joint A is rotatably installed on the scribe head 40 of base plate processing device B (reference picture 7) using the part of the bearing 1 on top.Protecting The inside in portion 2 is held, the open pore 3 for extending in the vertical direction is provided with, and magnet 4 is installed in penetralia.
In the inside of open pore 3, as positioning element, the position in the axle center away from open pore 3 be provided with the axle The parallel pin 5 of the positioning that the orthogonal side of the heart upwardly extends.Keep tool 20 be inserted into open pore 3 when, the parallel pin 5 with keep The inclined plane 26b contacts of tool 20, the installation portion side face 27 of inclined plane 26b rear sides is pushed to tabular surface 6,6, and so as to is kept The certain mode of the direction of tool 20, posture is positioned.The structure is described in detail below.
Additionally, in the inner face of open pore 3, vertically it is formed with by the way of being in the shape of the letter V under overlooking visual angle or so A pair of the tabular surfaces 6,6 for symmetrically configuring.As shown in figure 3, the tabular surface 6,6 of these left and right is distributed in the center with parallel pin 5 The left and right of the virtual line L of orthogonal level and formed, and be formed as keep tool 20 be inserted into open pore 3 when with keep tool 20 Installation portion side face 27 contact.It is preferred that 6,6 angle degree α of the tabular surface of the left and right are formed in 50~100 degree of scope It is interior.In case of the present embodiment, a diameter of 5mm of the trunk 22 of the holding tool 20 being inserted into, in contrast, the angle of formation It is 60 degree.
In said structure, when tool 20 will be kept to be installed on holding tool joint A, as shown in figure 4, tool 20 will be kept first The insertion of the side of installation portion 26 keeps the open pore 3 of tool joint A and is installed.Thus, in parallel pin 5 and the inclined plane of installation portion 26 While 26b is contacted and positioned, the upper end of tool 20 is kept to be attracted and be kept by magnet 4.At this moment, drawn by magnet 4 Rise and keep tool 20, therefore the inclined plane 26b of installation portion 26 to be pushed by parallel pin 5.That is, as shown in figure 5, inclined plane 26b rear sides The tabular surface 6,6 of installation portion side face 27 and the left and right of the configuration that is in the shape of the letter V pushed to it by linear contact lay so that, to keep tool The state that 20 posture is automatically oriented certain orientation is installed on holding tool joint A.
Additionally, 6,6 angle degree of tabular surface of left and right being set into 60 degree and the holding of a diameter of 5mm being had 20 body In the case that the insertion of cadre 22 keeps the open pore 3 of tool joint A, linear contact lay point P1, P2's and parallel pin 5 on tabular surface 6,6 What central contact point P3 was connected and was formed is generally shaped like equilateral triangle, and each contact point P1~P3 is balanced distribution, can stablize Ground keeps to keeping tool 20.
So, due to the inner face in open pore 3, it is provided with the installation portion side face for bearing to keep tool 20 with being in the shape of the letter V configuration The tabular surface 6,6 of 27 left and right, the position therefore, it is possible to make holding have 20 installation portion side face 27 is accurately entered with tabular surface 6,6 Line is contacted and installed, and is subject to relative to cutting wheel 21 in processing etc. of ruling, the holding tool 20 for carrying out curve In the case of the cross force of direct of travel, it is also possible to installation portion side face 27 is effectively contacted with the tabular surface 6,6 of left and right and is pacified On holding tool joint A.Therefore, be not in cutting wheel transversion malposition or position movement, energy in the line processing of curve It is enough accurately to form neat dividing line.
Fig. 6 represents another embodiment for keeping and having joint of the invention.In this embodiment, on the basis of said structure On, the trunk 22 of the holding tool 20 that will insert the open pore 3 for keeping tool joint A ' is additionally provided with to the direction bullet of tabular surface 6,6 Property ground push elastomeric element 7, as one of the elastomeric element 7, illustrated using bulb stopper.
Elastomeric element (bulb stopper) 7 is housing 7a, the shape that is protruded from the top of housing 7a with a part for side face by tubular The state spring 7c for being freely standing in the ball 7b of housing 7a and being exerted a force to projected direction to ball 7b all the time that haunts is constituted, peace Opening portion loaded on the open pore 3 for keeping tool joint A ' nearby and with the inner face of the opposite side of tabular surface 6,6.
That is, by from elastomeric element 7 by insertion opening hole 3 holding tool 20 trunk 22 to tabular surface 6,6 flexibly Push, thereby, it is possible to further effectively improve stability when keeping tool 20 to insert, so as to effectively eliminate rock.In addition, By the way that the installation site of elastomeric element 7 to be arranged at the opening portion of open pore 3 nearby and away from the lower position of parallel pin 5, by This, the elastomeric element 7 of parallel pin 5 that can be up and lower section this body for keeping tool 20 is pushed to tabular surface 6,6 at upper and lower two Cadre 22, can further improve and tool 20 will be kept to be maintained at stability when keeping tool joint A '.
Additionally, in the above-described embodiments, as elastomeric element 7, having used bulb stopper, but it is also possible to use the elastic material such as leaf spring Material replaces bulb stopper.
In addition, as positioning element, as long as keeping the open pore 13 of tool joint 10 and by magnet 4 keeping tool 20 to be inserted into When drawing high, the installation portion side face 27 of the rear side of installation portion 26 can be pushed to the inner face of open pore 13, ball can be set to Replace parallel pin Deng arbitrary shape.Equally, the shape of installation portion 26 can also be changed according to the shape of positioning element.
Representational embodiment of the invention is illustrated above, but the present invention is not necessarily by specifically for above-mentioned embodiment party Formula, is realizing its purpose and is not departing from the range of claims, can be appropriately modified, change.
Industrial applicibility
The holding tool that the present invention can be used as to keep the holding tool of cutting wheel in following base plate processing device connects Head, the base plate processing device pushes cutting wheel while being rule by one side in substrate surface, so as to be processed on substrate The dividing line for blocking, and block substrate.

Claims (3)

1. a kind of to keep tool joint, it is that the holding that the holding tool to possessing cutting wheel is kept has joint, and it possesses:
Downwardly facing opening and the open pore for extending up and down,
Be arranged at positioning element in the open pore,
Be configured at the open pore inner most magnet and
The open pore inner face by the way of being in the shape of the letter V under overlooking visual angle symmetrically formed a pair it is vertical flat Smooth face,
The tabular surface of the left and right is distributed in left and right with the virtual line of the central orthogonal level of the positioning element and shape Into,
And the installation portion side face of the holding tool of the insertion open pore is formed as being contacted with the tabular surface of the left and right.
2. it is according to claim 1 to keep tool joint, it is characterised in that the tabular surface institute angle degree of the left and right is formed In the range of 50~100 degree.
3. it is according to claim 1 and 2 keep tool joint, it is characterised in that the inner face of the open pore be provided with by Insert the elastomeric element that the holding tool of the open pore is flexibly pushed to the direction of the tabular surface.
CN201611170308.6A 2015-12-28 2016-12-16 Keep tool joint Pending CN106914994A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015255604A JP6668749B2 (en) 2015-12-28 2015-12-28 Holder joint
JP2015-255604 2015-12-28

Publications (1)

Publication Number Publication Date
CN106914994A true CN106914994A (en) 2017-07-04

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ID=59271589

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611170308.6A Pending CN106914994A (en) 2015-12-28 2016-12-16 Keep tool joint

Country Status (4)

Country Link
JP (1) JP6668749B2 (en)
KR (1) KR101895778B1 (en)
CN (1) CN106914994A (en)
TW (1) TWI599462B (en)

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CN110405954A (en) * 2018-04-27 2019-11-05 三星钻石工业股份有限公司 Retainer unit and pin
CN111376398A (en) * 2018-12-27 2020-07-07 三星钻石工业股份有限公司 Holder joint, holder unit, and scribing device

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JP2019188649A (en) 2018-04-20 2019-10-31 三星ダイヤモンド工業株式会社 Holder unit
JP7209349B2 (en) 2018-04-27 2023-01-20 三星ダイヤモンド工業株式会社 Holder unit and pin
JP2019209506A (en) 2018-05-31 2019-12-12 三星ダイヤモンド工業株式会社 Holder unit and scribe method

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Publication number Priority date Publication date Assignee Title
CN110405954A (en) * 2018-04-27 2019-11-05 三星钻石工业股份有限公司 Retainer unit and pin
CN111376398A (en) * 2018-12-27 2020-07-07 三星钻石工业股份有限公司 Holder joint, holder unit, and scribing device
CN111376398B (en) * 2018-12-27 2024-03-12 三星钻石工业股份有限公司 Holder joint, holder unit, and scribing device

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JP2017119348A (en) 2017-07-06
TW201722667A (en) 2017-07-01
TWI599462B (en) 2017-09-21
KR20170077789A (en) 2017-07-06
JP6668749B2 (en) 2020-03-18
KR101895778B1 (en) 2018-09-07

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Application publication date: 20170704