TWI782079B - Tool wheel holder installation structure, tool wheel holder and holder joint - Google Patents

Abstract

The present invention provides a cutter wheel holder mounting structure that prevents the cutter wheel holder from tilting and can form a scribe line correctly at the initial stage of scribing. The pivot 108 of the cutter wheel holder 102 provided with the cutter wheel 106 at the lower end is freely rotatably installed on the marking head 109 of the marking device A through the ball bearing 110, and the outer wheel 110b of the ball bearing 10 is installed on the marking head 109 or with it. The connected parts, ball bearings 110, 111 inner wheels 10a, 111a are installed on the pivot 108, a magnet body 113 is arranged on the top of the pivot 108, and a magnet body 113 is arranged on the top of the pivot 108 by being attracted by the above-mentioned magnet body. The steel ball 118 that the above-mentioned pivot and the inner wheel have been raised together can suppress the instability of the cutter wheel holder mounting structure 101 caused by the internal gap L2 of the ball bearing 110 .

Description

Wheel holder mounting structure, wheel holder and holder joint

The present invention relates to a cutter wheel holder installation structure, a cutter wheel holder, and a holder joint for installing the cutter wheel holder on the scoring head of the scoring device. The cutter wheel (also known as the scoring wheel) used to maintain the scoring line (grooving) for the surface processing and breaking of the material substrate.

In the past, in the processing of dividing brittle material substrates such as glass substrates, the following method is generally known: press the cutter wheel on the surface of the substrate to form a plurality of scribed lines in the X-Y direction orthogonal to each other, and then, along the scribed lines The scribing line applies an external force from the back side to bend the substrate, thereby dividing the substrate into unit substrates, as disclosed in Patent Document 1, for example.

The cutter wheel is used by being mounted on the scribe head of the scribe device via the cutter wheel holder. Figures 6 to 8 show a known cutter wheel holder and the installation structure of the cutter wheel holder and the marking head.

The wheel holder mounting structure 1 ′ includes a wheel holder 2 and a holder joint 3 for holding the wheel holder 2 . The cutter wheel holder 2 has a substantially cylindrical main body 4 , and a cutter wheel 6 is rotatably attached to the lower end of the main body 4 via an axle 5 perpendicular to the axis of the main body 4 .

In addition, on the upper part of the main body part 4, a mounting part 7 for positioning when it is mounted on the holder joint 3 is provided. The attachment part 7 is provided with the flat part 7a and the inclined surface 7b which were formed by cutting away part of the main body part 4. As shown in FIG. The plane portion 7a is parallel to the axis of the main body portion 4 . In addition, the main body portion 4 is provided with a magnetic material such as iron.

The holder joint 3 is equipped with a pivot 8 extending in the vertical direction on the upper part, and the pivot 8 is rotatably installed on the marking device A shown in FIG. 2 via a pair of upper and lower ball bearings 10 and 11. Head 9 on. The ball bearings 10, 11 include a plurality of balls between the inner rings 10a, 11a and the outer rings 10b, 11b. A collar 12 is interposed between the respective inner rings 10a, 11a of the upper and lower ball bearings 10, 11, and the space between the upper and lower ball bearings 10, 11 is tightly filled. In addition, the upper end surface of the pivot shaft 8 is engaged with the upper end surface of the inner ring 11a of the upper ball bearing 11 by means of screws or fittings, thereby preventing the pivot shaft 8 from being withdrawn downward from the ball bearings 10 and 11. . In addition, the outer ring 10b of the lower ball bearing 10 is combined with the marking head 9 by means of screws or fitting.

Furthermore, the substantially circular opening 14 of the holder joint 3 for receiving the cutter wheel holder 2 is formed by opening downward, and a magnet 15 for attracting and holding the cutter wheel holder 2 is installed in its deep part (upper end). In addition, inside the opening 14 , a parallel pin 16 for positioning extending in a direction perpendicular to the axis is provided at a position away from the axis of the opening 14 . Thereby, when the cutter wheel holder 2 is inserted into the opening 14, it is positioned in such a manner that the parallel pin 16 contacts the inclined surface 7b of the cutter wheel holder 2 so that the direction of the cutter wheel 6 becomes fixed, and the cutter wheel 6 The ground contact point of the pivot shaft 8 only deviates L1 to the rear of the cutter wheel traveling direction. This offset is used to exert the so-called "caster effect" that returns to the direction of travel when the cutter wheel travels to promote the straightness of the cutter wheel. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent No. 5210356

[Problem to be solved by the invention]

However, in the above-mentioned cutter wheel holder, when processing the scribed line in the X direction or the Y direction, or when performing "intersection flying scribing", the following situation exists: at the beginning of scribing, as shown in FIG. The prescribed marking line S is moved obliquely. The so-called "intersection flying marking" is the following method: as shown in Figure 10, when the marking line S2 in the Y direction perpendicular to it is processed relative to the marking line S1 in the X direction, in order not to be in the marking line in the X direction Damages such as "chips" or "thinning" are generated at the intersection of the lines S1, and a portion that does not form a scribed line is provided before and after the intersection for scribing.

The aforementioned phenomenon of obliquely shifting and running at the initial stage of scribing is caused by the following aspects. Generally, in a ball bearing that holds a sliding member such as a ball or a roller between the inner ring and the outer ring, there is a clearance (tolerance) between the sliding member, the inner ring, and the outer ring (hereinafter, this clearance is referred to as "internal clearance") ). Therefore, as shown in FIG. 7 , when there is no load (when not marking), the pivot 8 falls only by the internal clearance L2 due to its own weight. On the contrary, when the load is applied (scribing), as shown in FIG. 8 , only the inner gap L2 is raised by the repulsive force caused by the pressing of the cutter wheel 6 to the substrate. Therefore, it is considered that the pivot 8 rotates slightly according to the vertical movement of the pivot 8 caused by the internal gap L2, and the cutter wheel vibrates (shaking phenomenon) at the initial stage of marking and travels obliquely. In this way, if the cutter wheel deviates obliquely at the initial stage of marking, then in the subsequent walking, even if the straight walking is resumed by the effect of the casters, as shown in Figure 9, a predetermined marking line S is formed. It is impossible to obtain high-precision and high-quality products by only shifting the scribed line S3 by the distance Z.

Therefore, an object of the present invention in view of the above-mentioned problems is to provide a wheel holder mounting structure that can accurately form a scribed line by preventing the wheel holder from becoming inclined or shifting from a predetermined line at the initial stage of scribing. [means to solve the problem]

In order to solve the above-mentioned problems, the technical means described below will be described in the present invention. That is, the present invention is a cutter wheel holder installation structure provided with a cutter wheel at the lower end, the pivot shaft of which is freely rotatably mounted to the marking head of the marking device via a ball bearing, and is constituted as follows: The outer wheel of the ball bearing is installed on the above-mentioned marking head or the part connected with it, the inner wheel of the above-mentioned ball bearing is installed on the above-mentioned pivot shaft, a magnet body is installed on the upper part of the above-mentioned revolving shaft, and a magnetic body is arranged above the above-mentioned magnet body, The magnetic body lifts the pivot shaft together with the inner wheel by attracting the pivot shaft together with the inner wheel by the magnet body.

Here, the following structure may also be adopted: the outer wheel of the ball bearing is mounted on the above-mentioned marking head, the inner wheel of the ball bearing is mounted on the pivot of the above-mentioned cutter wheel holder installation structure, and the above-mentioned magnetic body is mounted on the pivot of the above-mentioned pivot. The top is installed on the above-mentioned scoring head. Furthermore, it is also possible to adopt a structure in which the attractive force of the above-mentioned magnet body which lifts the above-mentioned pivot shaft is set within the range which allows the rotation of the above-mentioned pivot shaft. [Effect of Invention]

In the present invention, since the pivot shaft of the mounting structure of the cutter wheel holder is always lifted by the attraction of the magnet body, when there is no load (when not scoring), it is prevented that the internal gap between the ball bearings is lifted by its own weight. Move down. Therefore, the instability caused by the internal gap can be eliminated, and the shaking phenomenon of the cutter wheel at the initial stage of scribing can be prevented when scribing is restarted. Thereby, it is possible to suppress the inclination or positional deviation of the cutter wheel at the initial stage of scribing, and to process the scribing line accurately along the planned scribing line.

In the present invention, the following configuration may be adopted: a covering body is provided to cover the periphery of the pivot of the above-mentioned cutter wheel holder mounting structure together with the above-mentioned ball bearing, the outer ring of the above-mentioned ball bearing is attached to the above-mentioned covering body, the above-mentioned ball bearing The inner wheel is installed on the pivot of the above-mentioned cutter wheel holder installation structure, the above-mentioned magnetic system is installed on the inside of the above-mentioned cover above the above-mentioned pivot, and the above-mentioned cover is installed on the above-mentioned marking head. Thereby, the ball bearing, the magnet body, and the magnetic body are accommodated inside the cover body and integrated with the cutter wheel holder mounting structure, so that the outer casing of the cutter wheel holder mounting structure can be easily formed, and the alignment can be easily performed. Assembling of marking head.

In the present invention, the wheel holder mounting structure may include a wheel holder, and a holder joint for holding the wheel holder, and the holder joint may include the pivot shaft. In addition, the above-mentioned pivot shaft may be integrally formed with the cutter wheel holder.

In addition, the cutter wheel holder of the present invention formed from another point of view is a cutter wheel holder that holds the cutter wheel holder below and has a pivot shaft above. The covering body covered with bearings, the outer wheel of the ball bearing is set on the covering body, the inner wheel of the ball bearing is installed on the pivot shaft, and the magnetic system is installed inside the covering body above the pivot shaft. In addition, the holder joint of the present invention formed from another point of view is a holder joint that has an opening for holding the wheel holder below and a pivot shaft above, and is configured such that the circumference of the above-mentioned pivot shaft and the pivot shaft are provided. A covering body covered with ball bearings, the outer wheel of the ball bearing is installed on the covering body, the inner wheel of the ball bearing is installed on the pivot shaft, and the magnetic system is installed inside the covering body above the pivot shaft. In this way, the ball bearing, the magnet body, and the magnetic body are accommodated inside the cover body and integrated with the cutter wheel holder or the holder joint, so that the exterior of the holder joint can be easily formed, and the marking head can be easily aligned. The assembly work.

Hereinafter, the mounting structure of the cutter wheel holder according to the first embodiment of the present invention will be described in detail. In the mounting structure of the cutter wheel holder according to the first embodiment of the present invention, a part thereof has constituent elements having the same functions as those of the conventional cutter wheel holder mounting structure shown in FIGS. 6 to 8 described above. Therefore, parts having the same functions are given the same symbols for description.

A cutter wheel holder mounting structure 1 according to a first embodiment of the present invention includes a cutter wheel holder 2 and a holder joint 3 for holding the cutter wheel holder 2 as shown in FIG. 1 . The cutter wheel holder 2 has a substantially cylindrical main body 4 , and a cutter wheel 6 is rotatably attached to the lower end portion of the main body 4 via an axle 5 perpendicular to the axis of the main body 4 .

In addition, on the upper part of the main body part 4, a mounting part 7 for positioning when it is mounted on the holder joint 3 is provided. The attachment part 7 is provided with the flat part 7a and the inclined surface 7b which were formed by cutting away part of the main body part 4. As shown in FIG. The plane portion 7a is parallel to the axis of the main body portion 4 . In addition, the main body portion 4 is provided with a magnetic material such as iron.

The holder joint 3 is equipped with a pivot 8 extending in the vertical direction on the upper part, and the pivot 8 is rotatably installed on the marking device A shown in FIG. 2 through a pair of ball bearings 10 and 11. Draw head 9 on. A collar 12 is interposed between the respective inner rings 10a, 11a of the upper and lower ball bearings 10, 11, and the space between the upper and lower ball bearings 10, 11 is tightly filled. In addition, a magnet body 13 is installed on the upper end surface of the pivot shaft 8 . In addition, the outer ring 10b of the lower ball bearing 10 is combined with the marking head 9 by means of screws or fitting.

Furthermore, the substantially circular opening 14 of the holder joint 3 for receiving the cutter wheel holder 2 is formed by opening downward, and a magnet 15 for attracting and holding the cutter wheel holder 2 is installed in its deep part (upper end). In addition, inside the opening 14 , a parallel pin 16 for positioning extending in a direction perpendicular to the axis is provided at a position away from the axis of the opening 14 . Thereby, when the cutter wheel holder 2 is inserted into the opening 14, it is positioned in such a manner that the parallel pin 16 comes into contact with the inclined surface 7b of the cutter wheel holder 2 to fix the direction of the cutter wheel 6, and the direction of the cutter wheel 6 is fixed. The grounding point is only offset by L1 relative to the axis of the pivot 8 to the rear of the cutter wheel traveling direction.

Furthermore, in the present invention, the steel ball 18 as a magnetic body used to lift the above-mentioned pivot 8 upwards is installed on the marking head 9 above the magnet 13 of the pivot 8 . The steel ball 18 is fixed in the holding hole of the scribe head 9 by pressing, bonding, etc., and a part of it protrudes from the inner wall of the scribe head 9 . As the steel ball 18 is attracted by the magnet body 13, the cutter wheel holder installation structure 1 is formed as shown in FIG. 10a only raises the internal clearance L2 of the ball bearing 10 to eliminate the instability caused by the internal clearance L2. In addition, the adsorption force of the magnet body 13 is to attract the pivot 8 and lift it upwards, but the rotation of the pivot 8 caused by the above-mentioned "caster effect" is within the allowable range of use.

In the manner as described above, the cutter wheel 6 mounted on the scribe head 9 of the scribe device A is lowered to the surface of the substrate W placed on the stage 20, and is pressed against the surface of the substrate W while facing each other. Move linearly to process the scribe line for breaking on the surface of the substrate W (refer to FIGS. 2 and 11 ). When processing one scribe line, the cutter wheel 6 is lifted up from the substrate W, and then moved on the planned scribing line to be processed to perform scribing. At this time, in the "intersection flying scribing", as shown in Fig. 9, when the scribing line S2 in the Y direction perpendicular to the scribing line S1 in the X direction is processed, the marking line in the X direction The part directly in front of the intersection of the marking line S1 makes the cutter wheel 6 rise, and descends again at a position slightly passing the intersection to mark.

In the above structure, the retainer joint 3 is attracted by the magnet body 13 by the steel ball 18, and is lifted together with the pivot 8 and the inner wheel 10a of the ball bearing 10 mounted on the pivot 8, so that When there is no load (unmarked), it will not move downward due to its own weight between the internal clearance L2 of the bearing. Therefore, the instability caused by the internal gap L2 is eliminated, and the shaking phenomenon of the cutter wheel holder 2 at the initial stage of scribing when scribing is resumed can be prevented. Thereby, it is possible to suppress the inclined running at the initial stage of scribing, and it is possible to accurately process a straight scribing line along the planned scribing line.

Fig. 3 shows a second embodiment of the present invention. In this embodiment, the cylindrical covering body 21 which covers the periphery of the pivot shaft 8 of the holder joint 3 together with the ball bearings 10 and 11 is provided. Moreover, the outer wheel 10b of the ball bearing 10 is installed on the cover body 21, the inner wheels 10a, 11a of the ball bearings 10, 11 are installed on the pivot 8 of the holder joint, and the cover body 21 is fixed by means of screws or fitting. Installed on the scoring head 9. In addition, above the pivot 8 and on the lower surface of the top plate of the covering body 21, a steel ball 18 as a magnetic body that is attracted by the magnet body 13 to lift the pivot 8 is provided. Other constitutions are the same as the previous embodiment shown in FIG. 1 above.

In the second embodiment of FIG. 3, similarly to the first embodiment, the shaking phenomenon of the cutter wheel 6 at the initial stage of scribing can be prevented, thereby suppressing the inclined running at the initial stage of scribing, and it is possible to move along the planned scribing line. Correctly machine the score line. Especially in the second embodiment, the ball bearings 10, 11 or the magnet body 13 and the steel ball 18 are accommodated in the cover body 21 and integrated with the holder joint 3, so there are advantages as follows: The exterior can be simplified, and the assembling operation of the marking head 9 can be easily performed.

Fig. 4 shows a third embodiment of the present invention. In the above-mentioned first and second embodiments, the holder joint holding the wheel holder is used as the wheel holder mounting structure, but in the third embodiment, the holder joint is omitted, and the wheel holder and the pivot are formed One.

The cutter wheel holder mounting structure 101 of the third embodiment includes a cutter wheel holder 102, ball bearings 110, 111, and a cover 121, so that the cutter wheel holder 102 is attached to the scoring device A without passing through the holder joint. The scribe head 109 is formed. The cutter wheel holder 102 has a substantially cylindrical main body 104 , and a cutter wheel 106 is rotatably attached to the lower end of the main body 104 via an axle 105 perpendicular to the axis of the main body 104 . The cutter wheel holder 102 has a pivot shaft 108 extending in the vertical direction on its upper portion, and a magnet body 113 is installed on the upper end of the pivot shaft 108 . Ball bearings 110 and 111 are attached around the pivot shaft 108 , and a cylindrical covering body 121 that covers the periphery of the pivot shaft 8 together with the ball bearings 110 and 111 is provided. Moreover, the outer wheel 110b of the ball bearing 110 is installed on the cover body 121, and the inner wheels 110a, 111a of the ball bearings 110, 111 are installed on the pivot 108 of the cutter wheel holder. The steel ball 118 of the magnetic body that is attracted by the magnet body 113 to lift the pivot shaft 108 all the time.

Also in the third embodiment, like the first and second embodiments, the shaking phenomenon of the cutter wheel 106 at the initial stage of scribing can be prevented, thereby suppressing the inclination at the initial stage of scribing, and it is possible to follow the planned scribing line. And correctly process the scoring line. Especially in the third embodiment, the ball bearings 110, 111, the magnet body 113, and the steel ball 118 are accommodated in the cover body 121 and integrated with the cutter wheel holder 102, so there are advantages as follows: The cutter wheel holder installation structure 101 The exterior decoration becomes simple, and the assembling work of the marking head 9 can be easily performed.

The inventors of the present invention carried out 50 scoring tests using the scribe head using the cutter wheel holder mounting structure of the present invention and the conventional cutter wheel holder mounting structure respectively. The cutter wheel system uses one with a diameter of 2mm. For a glass substrate with a thickness of 0.4mm, it is lowered from above as shown in the figure, and it is moved with a scoring load of 3N. Fig. 5 shows the offset (distance Z shown in Fig. 9) at this time. According to the test results, the maximum deviation of 24 μm and the average of 13 μm were detected for the scribing head using the conventional wheel holder mounting structure, and the instability of the deviation is particularly remarkable. On the other hand, for those who use the mounting structure of the cutter wheel holder according to the present invention, the maximum offset is only half of the conventional amount of 9 μm, and the average is 6 μm. In addition, the instability of the offset is also small, and it exhibits excellent performance. Effect.

As mentioned above, although the typical embodiment of this invention was described, this invention is not necessarily limited to the above-mentioned embodiment. For example, as the ball bearing for rotatably supporting the pivot shaft 8, a ball bearing built in is used in the above-mentioned embodiment, but it may also be a bearing having a roller built in a cone or a cylinder. In addition, it is also possible to increase or decrease the number of bearings. Furthermore, although the steel ball 18 is used as the magnetic body attracted by the magnet body 13, if it is formed by a magnetic raw material in order to be attracted by the magnet body 13, members of other shapes such as cylinders and prisms can also be arranged on the magnetic body. The upper part of the pivot. In addition, in the present invention, appropriate corrections and changes can be made within the scope that achieves the purpose and does not depart from the scope of the application. [Industrial availability]

The present invention can be applied to a cutter wheel holder mounting structure and a holder joint for holding a cutter wheel holding a scribed line for processing and breaking the surface of a brittle material substrate such as glass.

A‧‧‧Scoring device L2‧‧‧Internal clearance of bearing 1, 101‧‧‧Cutter wheel holder installation structure 2,102‧‧‧Knife wheel holder 3‧‧‧Holder connector 6,106‧‧ ‧Cutter wheel 8, 108 ‧‧‧Pivot 9, 109 , 113‧‧‧magnet body 18, 118‧‧‧steel ball 21, 121‧‧‧covering body

Fig. 1 is a sectional view showing the installation structure of the cutter wheel holder of the present invention. Fig. 2 is a schematic front view showing a scribing device. Fig. 3 is a sectional view showing a second embodiment of the present invention. Fig. 4 is a sectional view showing a third embodiment of the present invention. Fig. 5 is a graph showing the amount of deflection when using the cutter wheel holders of the present invention and conventional examples for scoring tests. Figure 6 shows an exploded perspective view of a known cutter wheel holder. Fig. 7 is a cross-sectional view showing a conventional cutter wheel holder installation structure when there is no load (when not scoring). Fig. 8 is a cross-sectional view showing a conventional cutter wheel holder mounting structure under load (scribing). Fig. 9 is a plan view showing a track when a tilt offset occurs during scribing. Fig. 10 is an explanatory diagram showing a method of scatter plotting at intersection points. Fig. 11 is an explanatory view showing the operation during scribing line processing.

101‧‧‧Cutter holder mounting structure

102‧‧‧Cutter wheel holder

104‧‧‧main part

105‧‧‧Axle

106‧‧‧knife wheel

108‧‧‧pivot

109‧‧‧Marking head

110‧‧‧The lower ball bearing

110a‧‧‧Bearing inner wheel

110b‧‧‧Outer wheel of bearing

111‧‧‧Ball bearing

111a‧‧‧inner wheel

113‧‧‧Magnet body

118‧‧‧Steel ball

121‧‧‧cover body

Claims (10)

A cutter wheel holder installation structure, which is equipped with a cutter wheel at the lower end. The pivot of the cutter wheel holder installation structure is freely rotatable and installed on the marking head of the marking device through a ball bearing. The outer wheel of the above ball bearing is installed on the The above-mentioned marking head or the part connected with it, the above-mentioned inner ring of the ball bearing is installed on the above-mentioned pivot shaft, a magnet body is arranged on the upper part of the above-mentioned pivot shaft, and the above-mentioned pivot shaft and the above-mentioned inner wheel are arranged by being attracted by the above-mentioned magnet body. Also mention the magnetic body. The cutter wheel holder installation structure according to claim 1, wherein the outer ring of the ball bearing is installed on the above-mentioned marking head, the inner ring of the ball bearing is installed on the pivot of the above-mentioned cutter wheel holder installation structure, and the above-mentioned The magnetic body is installed on the above-mentioned marking head above the above-mentioned pivot. The cutter wheel holder mounting structure according to claim 1, wherein a covering body is provided to cover the periphery of the pivot of the cutter wheel holder mounting structure together with the ball bearing, and the outer wheel of the ball bearing is mounted on The above-mentioned cover body, the inner ring of the above-mentioned ball bearing is installed on the pivot shaft of the above-mentioned cutter wheel holder installation structure, the above-mentioned magnetic system is installed inside the above-mentioned cover body above the above-mentioned pivot shaft, and the above-mentioned cover body is installed on the above-mentioned scoring head. In the cutter wheel holder installation structure according to claim 1, the attractive force of the magnet body that attracts the magnetic body to lift the pivot shaft is set within a range that allows the pivot shaft to rotate. In the cutter wheel holder mounting structure according to claim 2, the attractive force of the magnet body that attracts the magnetic body to lift the pivot shaft is set within a range that allows the pivot shaft to rotate. In the cutter wheel holder mounting structure according to claim 3, the attractive force of the magnet body that attracts the magnetic body to lift the pivot shaft is set within a range that allows the pivot shaft to rotate. The cutter wheel holder installation structure according to any one of claims 1 to 6, wherein the cutter wheel holder installation structure includes a cutter wheel holder and a holder joint for holding the cutter wheel holder, and the holder The tool joint has the above-mentioned pivot. The installation structure of the cutter wheel holder according to any one of claims 1 to 6, wherein the above-mentioned pivot system is integrally formed with the cutter wheel holder. A knife wheel holder, which holds the knife wheel at the lower end and has a pivot at the top, and is characterized in that: a cover body is provided to cover the periphery of the pivot shaft together with a ball bearing, and the outer wheel of the ball bearing is installed on the cover The inner wheel of the above-mentioned ball bearing is installed on the above-mentioned pivot, and a magnet body is installed on the upper part of the above-mentioned pivot, and the magnetic system attracting the above-mentioned magnet is installed on the inside of the above-mentioned cover body above the above-mentioned pivot. A holder joint, which has an opening for holding the cutter wheel holder at the bottom and a pivot at the top, characterized in that: a covering body is provided to cover the periphery of the pivot and the ball bearing, and the ball bearing The outer wheel is installed on the above-mentioned cover body, the inner wheel of the above-mentioned ball bearing is installed on the above-mentioned pivot, the magnet body is installed on the upper part of the above-mentioned pivot shaft, and the magnetic system attracting the above-mentioned magnet body is installed on the inside of the above-mentioned cover body above the above-mentioned pivot shaft.

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