JP2005213116A - Scribing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scribing device in which sticking of dust, such as glass rubbish, generated at the time of scribing on a cutter or the like can be prevented, in relation to a scribing device for cutting out a plurality of plate members from a large substrate by scribing with a cutter so as to obtain glass substrates used in a liquid crystal display or the like. <P>SOLUTION: The scribing device is equipped with a cutter 41 for carving grooves on the surface of the glass substrate, a cutter holder 42 for holding the cutter 41, and an air flow passage through which air to be blown toward the cutter 41 flows. The air flow passage is provided in the cutter holder 42 and has a blow-out port 59 opposing to the cutter 41. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a scribing apparatus for scribing a plurality of plate members from one large substrate by scribing a glass substrate or the like used for a liquid crystal display device or the like with a cutter, and in particular, dust such as glass dust generated during scribing is applied to the cutter or the like. The present invention relates to a scribing device for preventing adhesion.

  As a conventional scribing device of this type, for example, there is a device described in Patent Document 1. Patent Document 1 relates to a manufacturing method of a color filter that cuts and divides individual color filters and end portions from a substrate on which a plurality of color filters are formed, and a scribing device and a break device provided with a member that prevents adhesion of debris. Things are listed. The scribing device described in Patent Document 1 includes a cutting tool that engraves grooves on the surface of a color filter substrate, a blower that blows air toward the cutting blade of the cutting tool, and a cutting blade of the cutting tool. It is characterized in that it is provided with a suction port which is disposed in the vicinity and blocks the fragments of the substrate from scattering and a suction means which is connected to the suction port.

  According to the scribing apparatus having such a configuration, it is possible to efficiently and reliably suck and remove the fragments of the substrate that are scattered during the break processing of the color filter substrate, so that foreign matters are formed on the surface of the color filter. The effect that it can prevent reliably etc. is anticipated.

  Moreover, as another conventional scribing device, for example, there is a device described in Patent Document 2. Patent Document 2 describes a scribing device and a scribing method that can cut a glass substrate or the like used for a liquid crystal display device or the like without adhering dust such as glass dust generated at the time of scribing or scattering the dust to the surroundings. . The scribing device described in Patent Document 2 is a scribing device for scribing a substrate installed on a scribing table with a cutter from one side surface of the substrate, and the other side surface of the substrate and the substrate By inhaling air around the substrate, an airflow flowing in a direction substantially parallel to the substrate surface is formed on the substrate, and a downward airflow sucked around the substrate is formed, so that the scribing by the cutter is performed. By sucking the dust generated at the time, the adhesion of the dust to the substrate and the scattering to the surroundings are suppressed.

  According to the scribing apparatus having such a configuration, it is possible to prevent glass dust generated along with the scribing of the substrate from adhering to the substrate. Furthermore, even if it adheres to the substrate, it can be easily removed. As a result, effects such as reduction in defects of products such as liquid crystal display devices are expected.

  Such a conventional scribing apparatus will be described in more detail with reference to FIG. Reference numeral 1 shown in FIG. 4 is an overarm extending in the lateral direction and is supported at both ends by a bed (not shown). A scribing table on which a glass substrate 2 as a processing object is placed is disposed below the overarm 1 and is also supported by the bed. Further, a saddle 3 is supported on the over arm 1 so as to be movable in the lateral direction, and a cutter slide unit 4 is attached to the saddle 3.

  The cutter slide unit 4 includes a cylinder 5, a coupling 6, a bearing member 7, a holder base 8, a cutter holder 9, a cutter 10, and the like. The cylinder 5 is fixed to the saddle 3 with the sliding shaft 5a protruding in one axial direction facing downward. The bearing member 7 is disposed below the cylinder 5, and the upper end of the rotating shaft 11 penetrating the bearing member 7 in the vertical direction is connected to the lower end of the sliding shaft 5 a by the coupling 6. A holder base 8 is fixed to the lower end of the rotating shaft 11, and the amount of rotation of the holder base 8 is limited within a predetermined angular range by a stopper pin 12 fixed to the bearing member 7.

  A cutter holder 9 is integrally fixed to the lower part of the holder base 8, and a ring-shaped cutter 10 is rotatably attached to the lower end of the cutter holder 9. A pair of air nozzles 13 and 14 for blowing air toward the cutter 10 are disposed before and after the cutter 10 in the traveling direction. The pair of air nozzles 13, 14 are movably attached to a pair of support arms 15, 16 fixed to both sides of the saddle 3. The air outlets of the air nozzles 13 and 14 are directed to the cutter 10, and the distances L1 and L2 from the air outlets to the cutter 10 can be adjusted by moving in the axial direction and changing the amount of protrusion. Yes.

  However, in the scribing apparatus having such a configuration, since the distances L1 and L2 from the air outlets of the air nozzles 13 and 14 to the cutter 10 are relatively long, the momentum of the air from the air outlet is applied to the cutter 10. In addition to a significant drop before reaching the air, the air blown out from the air nozzles 13 and 14 is diffused, so that there is a problem that the air cannot be efficiently blown to a necessary portion. Further, the front air nozzle 13 disposed on the front side in the traveling direction of the cutter 10 blows air toward the surfaces of the cutter 10 and the glass substrate 2, but the air diffuses to the traveling portion on the glass substrate 2. There was a problem that not only certain glass chips but also surrounding glass chips were scattered together.

Further, since there is a gap between the cutter 10 and the side wall surface of the cutter holder 9 that supports the cutter 10 in order to rotate the cutter 10, glass chips enter the gap. Could not be sprayed, and the glass chips could not be removed. Further, since the air nozzles 13 and 14 are attached by tightening the support arms 15 and 16 and the positioning of the air nozzles 13 and 14 is performed by visual inspection, the same applies when the air nozzles 13 and 14 are replaced. Another problem is that it is difficult to set the distances L1 and L2 to a predetermined value between the machines.
JP 2001-311819 A Japanese Patent Laid-Open No. 11-11966

  The problem to be solved is that the distance from the outlet of the air nozzle to the cutter is relatively long, so the momentum of the air coming out of the outlet will drop greatly before reaching the cutter, and the air nozzle will blow out from the air nozzle. Since air diffuses, it is not possible to efficiently blow air to the required part, and not only glass chips on the running part on the glass substrate but also surrounding glass chips together due to air diffusion. It is said that it will be scattered.

  The scribing device according to claim 1 of the present application includes a cutter that engraves a groove on the surface of a glass substrate, a cutter holder that supports the cutter, and an air passage through which air blown toward the cutter flows. The air flow path is provided in the cutter holder and has a blowout opening facing the cutter.

  In the scribing device according to claims 2 and 5 of the present application, the cutter holder includes a pair of slits in which the cutter is partially protruded to the outside and a support shaft that rotatably supports the cutter. A bearing portion and a blowout opening having one end opened in a slit are provided, and air is blown out from a blowout opening extending in a direction substantially orthogonal to the axial direction of the support shaft and blown to the cutter. To do.

  The scribing device according to claims 3 and 6 of the present application is characterized in that the outlet is provided so as to face between the cutter and the side wall surface of the slit.

  The scribing device according to claim 4 of the present application includes a cutter that engraves a groove on the surface of a glass substrate, a cutter holder that supports the cutter, an air passage through which air blown toward the cutter flows, and a cutter Rotation support means for rotatably supporting the holder in the moving direction of the cutter, and the air flow path is provided in the cutter holder and has a blowout opening facing the cutter.

  In the scribing device according to claim 7 of the present application, the rotation support means is rotatably supported by the main body side member, and a holder base having a passage in which the cutter holder is fixed and communicated with the outlet of the cutter holder. A rotating shaft having an axial hole communicated with the air generation source, and a connecting member having a communicating hole that removably connects the rotating shaft to the holder base and communicates with the passage and the axial hole; The air flow path includes a passage, an axial hole, a communication hole, and a blowout port.

  The scribing apparatus according to claim 8 of the present application supports the connecting member so as to be rotatable with respect to the holder base while preventing movement in the axial direction, and provides a screw shaft portion on the connecting member. A screw hole into which the portion is screwed is provided in the rotating shaft, and the connecting member and the rotating shaft can be attached and detached by screw connection.

  In the scribing device according to claim 9 of the present application, the rotation shaft is integrally provided with an operation knob having the same rotation center, and an opening from which a part of the operation knob projects is provided on the holder base. It is provided.

  The scribing device according to claim 10 of the present application is characterized in that the main body side member is provided with a stopper pin for limiting the rotation amount of the rotation support means.

  In the scribing device according to claim 11 of the present application, the rotating shaft is rotatably supported on the main body side member by two or more ball bearings, and at least one of the two or more ball bearings is rotated. A single-row deep groove ball bearing with a shaft seal device having a rubber seal in contact with the shaft is used.

  According to the scribing device according to claim 1 of the present application, the cutter, the cutter holder, and the air flow path are provided, and the air flow path is configured by providing the cutter holder with the blowout opening. Therefore, strong air is blown onto the cutter. In addition, the blown air can be effectively blown to a necessary part.

  According to the scribing device according to claims 2 and 5 of the present application, the cutter holder is provided with a slit, a pair of bearing portions, and a blowout port, and the blowout port is extended in a direction substantially orthogonal to the axial direction of the support shaft. Since the air is blown out and blown to the cutter, the scribing is capable of blowing strong air to the cutter and effectively blowing the blown air to the required part while having a relatively simple configuration. An apparatus can be provided.

  According to the scribing device described in claims 3 and 6 of the present application, the glass blowout port is made to face between the cutter and the side wall surface of the slit, so that the glass chips can be prevented from entering the gap and enter. The glass chips can be blown out easily.

  According to the scribing device of claim 4 of the present application, since the air flow path is configured by providing the cutter, the cutter holder, the air flow path, and the rotation support means, and providing the air outlet in the cutter holder, the air with strong momentum is provided. Can be blown to the cutter, and the blown air can be effectively blown to a necessary portion, and the cutter can be provided with a caster function so that the cutter can automatically follow the running direction.

  According to the scribing device of claim 7 of the present application, the rotation support means includes the holder base, the rotation shaft, and the communication hole, and includes the air outlet including these and the outlet, The outlet can be set very close to the cutter, and strong air can be blown onto the cutter.

  According to the scribing device of claim 8 of the present application, the connecting member is supported only rotatably on the holder base, and the connecting member and the rotating shaft are connected by screw coupling. Thus, the holder base and the rotating shaft can be easily attached and detached.

  According to the scribing device of claim 9 of the present application, since the operation knob is provided on the rotation shaft and the opening is provided on the holder base, the operation knob partially protruding from the opening is operated to rotate. Thus, the attaching / detaching operation between the holder base and the rotating shaft can be easily performed only by rotating the connecting member.

  According to the scribing device of claim 10 of the present application, since the stopper pin is provided on the main body side member, the rotation amount of the rotation support means is limited to prevent the cutter holder from rotating more than necessary. be able to.

  According to the scribing device of claim 11 of the present application, the rotating shaft is rotatably supported by two or more ball bearings, and at least one is a single row deep groove ball bearing with a shaft seal device. Thus, an air blowing mechanism having no air leakage can be configured by using a ball bearing that is simple in structure and relatively inexpensive.

  A scribing device that can blow strong air to the cutter and can effectively blow the blown air to the necessary part has been realized with a simple structure.

  1 to 3 show an example of an embodiment of the present invention. That is, FIG. 1 is an explanatory view showing a main part of the scribing apparatus of the present invention in cross section, FIG. 2 is an explanatory view showing the main part of FIG. 1 in cross section, and FIG. 3 is an XX line in FIG. It is an expanded sectional view.

  FIG. 1 shows a cross section of a cutter slide unit, which is a main part of the scribe device, and the overall configuration of the scribe device is not shown, but the overall configuration is substantially the same as the conventional example shown in FIG. Therefore, the outline of the overall configuration will be briefly described. Although not shown, the scribing apparatus includes a bed having a scribe table on which a glass substrate as a processing target is placed, an overarm spanned between columns erected on both sides of the bed, and an overarm. And a saddle supported slidably on the arm. The saddle is movable in the lateral direction (X-axis direction), and a cutter head that is movable in the vertical direction (Z-axis direction) is attached to the saddle.

  The cutter head includes an air cylinder for maintaining a constant pressing force of the cutter against the glass substrate, and a head base that is moved up and down by the air cylinder, and a cutter slide unit 40 is attached to the head base. . A cutter 41 for attaching (scribing) and breaking (breaking) the surface of the glass substrate is attached to the lower end of the cutter slide unit 40.

  The cutter slide unit 40 has a configuration as shown in FIGS. That is, the cutter slide unit 40 includes a cutter 41, a cutter holder 42, a holder base 43, a connecting member 44, an operation knob 45, a rotating shaft 46, a pair of angular ball bearings 47 and 48, a bearing nut 50, and a single row deep groove ball bearing. 51, a housing 52, an upper lid 55, and the like.

  As shown in FIGS. 1 and 2, the cutter 41 has a shape like an abacus ball having a substantially diamond-shaped cross section, and a support shaft 57 is rotatably inserted into the hole. The cutter 41 is rotatably attached to the lower part of the cutter holder 42 via the support shaft 57. The cutter 41 is preferably a diamond cutter such as electrodeposited diamond or sintered diamond. The surface of the two conical surfaces forming the edge of the blade edge is roughened to form irregularities on the edge of the glass substrate. It is possible to increase the cutting edge biting ability against

  The cutter holder 42 is composed of a block-shaped member in which a pair of bearing portions 42a and 42a are provided at a lower portion of a rectangular parallelepiped. The pair of bearing portions 42a and 42a are tapered convex portions projecting downward, and a slit 58 for accommodating the cutter 41 is formed between the bearing portions 42a and 42a. The support shaft 57 is supported at both ends by the pair of bearing portions 42a and 42a, so that the cutter 41 can freely rotate into the slit 58 with its lower portion protruding downward from the lower ends of the bearing portions 42a and 42a. It is stored.

  Further, the cutter holder 42 is provided with a blow-out port 59 formed of a through hole extending in the vertical direction and having one end opened in the slit 58 and the other end opened in the upper surface. The center line of the outlet 59 is slightly offset so as not to intersect with the axis of the support shaft 57, but the center line and the axis may be configured to intersect with each other. The cutter holder 42 is detachably fastened and fixed to the lower portion of the holder base 43 by fixing means including a fixing screw 61.

  As shown in FIGS. 1 to 3, the holder base 43 is provided with a storage hole 62 in which the connecting member 44 is rotatably stored, and a storage chamber 63 in which the operation knob 45 is rotatably stored. ing. The storage hole 62 is opened on the upper surface of the holder base 43, and a communication hole 64 is provided on the bottom surface of the storage hole 62 extending to the lower surface side. The lower end of the communication hole 64 is opened on the lower surface of the holder base 43, and the lower end opening is provided so as to overlap with the upper end opening of the outlet 59 of the cutter holder 42 in contact with the lower surface.

  The contact surface between the cutter holder 42 and the holder base 43 is formed with increased flatness, surface roughness, etc., and can be brought into close contact by simply overlapping the contact surfaces without using a seal member, thereby obtaining high airtightness. Like that. However, a sealing member may be interposed on the contact surface between the cutter holder 42 and the holder base 43, and the sealing member may be configured to improve airtightness. Further, as shown in FIG. 1, the holder base 43 is provided with a positioning convex portion 43a for positioning the cutter holder 42, and a notch portion 65 for limiting the amount of rotation of the holder base 43 itself. Yes.

  Further, the storage chamber 63 of the holder base 43 is formed with a diameter larger than the diameter on the same axis as the storage hole 62, and a part of the storage chamber 63 is formed on the side surface of the holder base 43 as shown in FIG. 4. It is designed to open. The operation knob 45 stored in the storage chamber 63 has a ring shape, and the connecting member 44 is fitted in the center hole thereof. The operation knob 45 is combined with the connecting member 44 by the pin 66 inserted from the side in this fitted state, and is configured integrally. It is preferable to provide a knurling on the outer peripheral surface of the operation knob 45 in order to facilitate the turning operation.

  The connecting member 44 is formed of a cylindrical member that is rotatably fitted in the storage hole 62, and a through hole 67 that penetrates in the axial direction is provided at the center. One end of the connecting member 44 in the axial direction is provided with a screw shaft portion 44a having a screw engraved on the outer peripheral surface, and an annular groove 44b is provided on the opposite side of the screw shaft portion 44a. The annular groove 44b is continuous in the circumferential direction, and an O-ring 68 showing a specific example of the sealing device is attached to prevent air leakage. The axial length of the portion excluding the screw shaft portion 44 a of the connecting member 44 is shorter than the depth of the storage hole 62, thereby forming a chamber having a gap of an appropriate size below the connecting member 44. ing.

  Further, the lower end of the rotation shaft 46 is coupled to the screw shaft portion 44a of the connecting member 44 by screw means so as to be relatively movable. The rotation shaft 46 is formed of a pipe-shaped shaft member having an axial hole 70 penetrated through an axial center portion, and has a large-diameter portion 46a, a medium-diameter portion 46b, a screw portion 46c, and a small-diameter by having four outer diameters. 46d. A screw hole 46e that is screwed into the screw shaft portion 44a of the connecting member 44 is provided at the end of the rotating shaft 46 on the large diameter portion 46a side. A pair of angular ball bearings 47, 48 showing a specific example of a bearing member is mounted on the middle diameter portion 46 b of the rotating shaft 46. An inner sleeve 74 corresponding to the inner ring and an outer sleeve 75 corresponding to the outer ring are interposed between the angular ball bearings 47 and 48, respectively.

  A bearing nut 50 is screwed into the threaded portion 46 c of the rotating shaft 46, and the inner rings and inner sleeves 74 of the angular ball bearings 47 and 48 are fastened by the bearing nut 50. The rotating shaft 46 in which the angular ball bearings 47 and 48 and the inner and outer sleeves 74 and 75 are assembled in this way is supported by the housing 52 so as to be rotatable. The housing 52 includes a bearing cylinder 71 to which the rotating shaft 46 and the like are mounted, and a bearing lid 72 that presses the angular ball bearing 47 that is mounted on the opening side of the bearing cylinder 71 and located on the opening side in the depth direction. It consists of and.

  The bearing cylinder 71 has a large-diameter hole 71a into which the outer rings of the angular ball bearings 47 and 48 and the outer sleeve 75 are fitted, and a small-diameter hole 71b opened substantially at the center of the bottom. An outer ring of a single row deep groove ball bearing 51 showing a specific example of a bearing member is fitted in the small diameter hole 71b of the bearing cylinder 71. The inner ring of the single row deep groove ball bearing 51 is fitted to the small diameter portion 46d of the rotating shaft 46, and the rotating shaft 46 is made into a cutter slide by a total of three ball bearings including two angular ball bearings 47 and 48. It is rotatably supported by the housing 52 of the unit 40. For this reason, the bearing lid 72 is provided with a pressing portion 72 a that presses the outer ring of the angular ball bearing 47 located on the opening side. Correspondingly, the bearing cylinder 71 is provided with a pressure receiving portion 71c for receiving the outer ring of the angular ball bearing 48 located on the back side.

  As described above, the rotation shaft 46 is rotatable with respect to the housing 52, but the rotation amount is limited within a predetermined range by the stopper pin 76. The stopper pin 76 is provided so as to protrude downward on the lower surface of the bearing lid 72, and is inserted into the notch 65 of the holder base 43 as shown in FIG. 3. At this time, since the holder base 43 is rotatable about the rotation shaft 46, the holder base 43 is shown in FIG. 1 by the gap between both side surfaces of the notch 65 and the stopper pin 76. It can be rotated in the direction perpendicular to the paper surface.

  As a result, since the center of the cutter 41 is offset by the distance E with respect to the rotation center of the rotation shaft 46, the holder base 43 can have a caster effect. Thereby, when the cutter 41 travels on the glass substrate, the cutter 41 can follow the traveling direction in the range in which the holder base 43 can rotate without being restricted in the rotational direction. it can. Further, by operating the operating knob 45 to rotate the connecting member 44, the connecting member 44 and the holder base 43 are relatively moved in the axial direction of the rotating shaft 46 according to the rotating direction of the operating knob 45. Thus, the connecting member 44 can be attached to and detached from the rotating shaft 46.

  Further, since the general angular ball bearings 47 and 48 are not sealed, if air is flowed by applying pressure in the housing 52, air leakage occurs from the gap between the balls. Therefore, it is preferable to use a contact rubber seal type single row deep groove ball bearing as the single row deep groove ball bearing 51 located on the air supply side. Thereby, the air leakage which flows to the angular ball bearings 47 and 48 side can be prevented or effectively suppressed without giving a large resistance to the rotation of the rotation shaft 46.

  The small diameter portion 71 b of the bearing cylinder 71 of the housing 52 is closed by the upper lid 55. The upper lid 55 is provided with an air supply port 77 having one end facing the small diameter portion 71b. The other end of the air supply port 77 is opened on the side surface of the upper lid 55, and an air supply device (not shown) is connected to the opening. Although not shown, the upper lid 55 having the air supply port 77 is detachably attached to the upper surface of the bearing cylinder 71 by fixing means using fixing screws. The mating surfaces of the upper lid 55 and the bearing cylinder 71 satisfy a shape accuracy (flatness, etc.) and surface roughness higher than those generally used so that a predetermined hermeticity can be obtained simply by joining. Form. However, a sealing member such as an O-ring may be interposed on the joint surface between the upper lid 55 and the bearing cylinder 71, and the sealing member may ensure airtightness.

  The air supply port 77 of the housing 52, the axial hole 70 of the rotating shaft 46, the through hole 67 of the connecting member 44, the gap between the storage holes 62, the communication hole 64 of the holder base 43, and the cutter holder 42 The air outlet 59 constitutes an air flow path for blowing air of a predetermined pressure supplied from the air supply device onto the wall surfaces formed on both surfaces of the cutter 41 and the slit 58.

  According to the scribing apparatus provided with the cutter slide unit 40 having such a configuration, air can be blown from the nearest distance (air blow) to the wall surfaces on both sides of the slit 41 of the cutter 41 and the cutter holder 42 that supports the cutter 41. The glass chips adhering to the wall surfaces of the cutter 41 and the slit 58 can be reliably removed, and the glass chips can be prevented from adhering to the cutter 41 and the like.

  Next, the effect | action which removes the glass chip mentioned above is demonstrated. A glass substrate (not shown) that is a processing object is placed on a scribe table and supplied below the cutter slide unit 40. Then, the cutter slide unit 40 is predetermined by a moving mechanism in the X-axis direction (saddle in this embodiment) and a moving mechanism in the Y-axis direction (for example, a mechanism that moves the scribe table in the Y-axis direction intersecting the X-axis direction). Set to position.

  Next, the cutter slide unit 40 is moved in the Z-axis direction and adjusted to a predetermined height position. Thereafter, the cutter slide unit 40 is moved horizontally to the glass substrate side so that the cutting blade of the cutter 41 bites into the surface of the glass substrate, moves in a predetermined direction as it is (cut), and cuts (cuts) a predetermined portion of the glass substrate. ) In this case, glass cuttings are generated in the cut portion by the cutting (cleaving) action of the cutter 41.

  At the time of this cutting (cleaving), the high-pressure air sent from the air supply device is supplied from the air supply port 77 to the cutter slide unit 40, discharged from the blowout port 59 through the air flow path, and the cutter located below the air supply port 77 The outer peripheral surface of 41 and the wall surface of the slit 58 which is an inner surface of the bearing portions 42a and 42a that support the outer peripheral surface are sprayed. The air blown in this way is blown to the cutter 41 and the like in a strong pressure state without weakening the momentum of the air because the blowout port 59 is set at a position very close to the wall surface of the cutter 41 and the slit 58. Can do.

  Therefore, the glass chips adhering to the wall surfaces of the cutter 41 and the slit 58 can be reliably blown away and the glass chips can be prevented from adhering to the cutter 41 and the like. In this respect, in the conventional apparatus as shown in FIG. 4, since the air nozzle could not be set at the closest distance of the cutter, the force of the air colliding with the glass chips becomes weak, and the glass chips are removed. Inefficient.

  In addition, in this embodiment, since the air outlet 59 is directly provided in the cutter holder 42, the air can be concentrated at a target position and reliably blown to a predetermined position. As a result, in the conventional apparatus shown in FIG. 4, air nozzles are arranged before and after the cutter traveling direction and air blow is aimed at the periphery of the cutter, so that the glass chips on the glass substrate are scattered widely. There was a problem, but by blowing air from above the cutter 41 through the cutter holder 42 as in this embodiment, the amount of glass chips scattered can be reduced, and the range of scattering can be reduced. Can do.

  Further, in the present embodiment, a single row deep groove ball bearing 51 is provided separately from the pair of angular ball bearings 47, 48 to rotatably support the rotation shaft 46, and the single row deep groove ball bearing is a single contact rubber seal type single bearing. Since the row deep groove ball bearing 51 is used, it is possible to effectively prevent air leakage of the air flow path without generating a large resistance force in the rotational movement of the rotational shaft 46. At this time, the contact rubber seal of the single row deep groove ball bearing 51 is arranged on the air supply port 77 side. As a result, it is possible to prevent a problem that air leaks from the air flow path and passes through the angular ball bearings 47 and 48.

  In this embodiment, the cutter holder 42 that supports the cutter 41 is supported on the rotation shaft 46 via the holder base 43, and the rotation center of the cutter 41 is offset from the rotation center of the rotation shaft 46. Since the caster function is provided to the holder base 43, when the cutter 41 travels on the glass substrate, the cutter 41 can follow the traveling direction to smoothly and accurately perform cutting (cleaving). . Further, by rotating the operation knob 45, the holder base 43 can be attached to the rotating shaft 46 or removed from the rotating shaft 46 according to the rotating direction. The holder base 43 can be easily attached to and detached from the holder.

  In addition, in the said Example, although the position of the blower outlet 59 was demonstrated about the example provided in the running direction front side of the cutter 41, this removed the glass chips which generate | occur | produced on a glass substrate, and adhered to the cutter 41. Mainly aimed at removing glass chips. By configuring the outlet 59 and the like in such a relationship, both the glass chips adhering to the cutter 41 and the glass chips on the glass substrate can be efficiently removed. On the other hand, by setting the position of the air outlet 59 directly above the cutter 41, the removal of the glass chips adhering to the wall surface of the bearing portion 42a of the cutter holder 42 and the glass chips adhering to the wall surface. Can be effectively prevented.

  The present invention is not limited to the embodiment described above and shown in the drawings, and various modifications can be made without departing from the scope of the invention. For example, in the above-described embodiment, an example in which a glass substrate is applied as an object to be processed has been described. However, not only glass and quartz but also semiconductor materials such as silicon and gallium arsenide, ceramics such as silicon nitride and Lucalox, and other scribe processing Can be used for various materials.

It is explanatory drawing which cuts and shows the principal part of one Example of the cutter slide unit which concerns on the scribing apparatus of this invention. It is explanatory drawing which expanded the principal part of the cutter slide unit shown in FIG. It is sectional drawing to which the XX line part of FIG. 1 was expanded. It is explanatory drawing which shows the conventional scribe apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 40 ... Cutter slide unit, 41 ... Cutter, 42 ... Cutter holder, 43 ... Holder base, 44 ... Connecting member, 45 ... Operation knob, 46 ... Rotating shaft, 47, 48 ... Angular ball bearing, 50 ... Bearing nut, 51 ... Single row deep groove ball bearings 52 ... Housing 55 ... Top cover 58 ... Slit 59 ... Air outlet 62 ... Storage hole 64 ... Communication hole 68 ... O-ring (seal member) 70 ... Axial hole 77 ... Air supply port

Claims (11)

A cutter for engraving grooves on the surface of the glass substrate;
A cutter holder for supporting the cutter;
An air flow path through which air blown toward the cutter flows,
The air flow path is provided in the cutter holder and has a blowout opening facing the cutter. The cutter holder has a slit in which the cutter is partially protruded and accommodated, a pair of bearing portions that support both ends of a support shaft that rotatably supports the cutter, and one end opened to the slit. And provided with the outlet,
The scribing apparatus according to claim 1, wherein the air is blown out from the blowout port extending in a direction substantially orthogonal to the axial direction of the support shaft and blown onto the cutter.   The scribing apparatus according to claim 2, wherein the blowout port is provided so as to face between the cutter and a side wall surface of the slit. A cutter for engraving grooves on the surface of the glass substrate;
A cutter holder for supporting the cutter;
An air flow path through which air blown toward the cutter flows;
Rotation support means for rotatably supporting the cutter holder in the direction of movement of the cutter,
The air flow path is provided in the cutter holder and has a blowout opening facing the cutter. The cutter holder has a slit in which the cutter is partially protruded and accommodated, a pair of bearing portions that support both ends of a support shaft that rotatably supports the cutter, and one end opened to the slit. And provided with the outlet,
The scribing apparatus according to claim 4, wherein the air is blown out and blown to the cutter from the blowout port extending in a direction substantially orthogonal to the axial direction of the support shaft.   The scribing device according to claim 5, wherein the outlet is provided so as to face between the cutter and a side wall surface of the slit. The rotation support means is fixed to the cutter holder and includes a holder base having a passage communicating with the blowout port of the cutter holder, and is rotatably supported by the body side member and communicates with an air generation source. A pivot shaft having an axial hole, and a connecting member that removably couples the pivot shaft to the holder base and has a communication hole communicating with the passage and the axial hole,
The scribing apparatus according to claim 4, wherein the air flow path includes the passage, the axial hole, the communication hole, and the blowout port. The connection member is supported rotatably with respect to the holder base while preventing movement in the axial direction, and a screw shaft portion is provided on the connection member, and a screw hole into which the screw shaft portion is screwed is provided. Provided on the pivot shaft;
8. The scribing apparatus according to claim 7, wherein the connecting member and the rotation shaft are detachable by screw connection.   8. The rotary shaft is integrally provided with an operation knob having the same rotation center, and an opening through which a part of the operation knob projects is provided in the holder base. The scribing device described.   8. The scribing apparatus according to claim 7, wherein the main body side member is provided with a stopper pin for limiting a rotation amount of the rotation support means.   The rotating shaft is rotatably supported on the main body side member by two or more ball bearings, and has a rubber seal that contacts at least one of the two or more ball bearings with the rotating shaft. The scribing device according to claim 7, wherein the single row deep groove ball bearing with a sealing device is used.

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