KR101327037B1 - Scribe head and scribe device - Google Patents

Abstract

An object of the present invention is to provide a scribe head and a scribe device capable of forming a good scribe line.
The holder 31 supports the scribing wheel 60 to be rotatable about the first rotating shaft 32a. The holder joint 35 is rotatably supported with respect to the holder mounting block 40 by rotating about the 2nd rotating shaft 38a. Here, the 1st rotating shaft 32a is arrange | positioned shifting along the advancing direction of the scribing wheel 60 from just under the 2nd rotating shaft 38a. And by the press-fit bolt 48, the press input which is substantially parallel with the 2nd rotating shaft 38a is provided, and the holder joint 35 is fixed with respect to the holder mounting block 40. FIG.

Description

Scribe head and scribe device {SCRIBE HEAD AND SCRIBE DEVICE}

The present invention relates to a scribe head and a scribe device using the scribe head.

Background Art Conventionally, a scribing head for forming a scribe line on the surface of a substrate (for example, a glass substrate) by a scribing wheel and a scribing apparatus using the scribing head are known (for example, Patent Document 1).

Moreover, the technique which ensures the straightness of a scribing wheel by the 1st axis which oscillates a scribing wheel, and the 2nd axis | shaft (approximately parallel to a 1st axis) which oscillates a scribing wheel and a 1st axis, It is known conventionally (for example, patent document 1).

International Publication No. 2005/063459

As described above, in the technique of Patent Document 1, the attitude of the scribing wheel is adjusted by two axes (first and second axes). That is, when a scribe line is formed on a substrate, each axis of the scribe head is not fixed.

Thus, depending on the positional relationship between the scribing wheel and the first and second axes, the scribe line is in a direction perpendicular to the advancing direction of the scribing wheel and the first and second axes (hereinafter, simply referred to as “bending Direction ", which is also referred to as" direction ". As a result, in the case of a semiconductor substrate in which a highly precise scribe line is required in comparison with the glass substrate, the swing width of the scribe line in the bending direction (hereinafter, simply referred to as "the scribe line formation width") is an allowable value. The problem of abnormality arises.

Therefore, an object of the present invention is to provide a scribe head and a scribe device capable of forming a good scribe line.

In order to solve the said subject, invention of Claim 1 is a scribe head which forms the scribe line along the advancing direction of a scribing wheel on the said brittle material substrate by advancing with respect to a brittle material board | substrate, and the said advancing direction A holder for rotatably supporting the scribing wheel, a holder mounting block provided above the holder, and the holder mounted on a lower portion of the holder, the first direction being substantially perpendicular to the first axis of rotation; A holder joint which is pivotally supported with respect to the holder mounting block by being rotated about a second rotational axis approximately perpendicular to each of the first rotational axes, wherein the first rotational axis is formed from directly below the second rotational axis. It is arrange | positioned along the advancing direction of the scribing wheel, and is substantially equal to the said 2nd rotating shaft in the said holder mounting block. By generating the clamping force for performing direction characterized in that said holder joint is fixed relative to the holder mounting block.

In addition, the invention of claim 2 is the scribe head according to claim 1, wherein the holder joint has a pivot portion rotatably supported with respect to the holder mounting block, and the holder mounting block is along the second rotation axis. A collet chuck having a hollow cylindrical body extending, a collet ring concentric with the cylindrical body and having an annular wall portion extending from the upper side of the collet chuck toward the collet chuck, and provided above the collet ring. And a press-fitting portion for generating a press-in that presses the collet ring approximately in parallel with the second rotational axis as the fixing force, and the pivot portion of the holder joint is inserted into the holder of the collet chuck in the state. The pressing force from the press-fitting portion is adapted to be rotatable relative to the collet ring. It is given, characterized in that in the surrounding space surrounded by the wall portion wherein the tubular body by contact with the pivot portion and the wall portion, which is fixed in the holder the pivot joint in addition the collet chuck.

In addition, the invention of claim 3 includes, in the scribing head according to claim 1, a fixing part that is responsible for a fixing operation for fixing the holder joint to the holder mounting block, wherein the fixing part generates the fixing force. It is characterized by.

According to a fourth aspect of the present invention, in the scribe head according to claim 3, the holder joint has a pivot portion rotatably supported with respect to the holder mounting block, and the holder mounting block is along the second rotation axis. A collet chuck having a hollow cylindrical body extending, a collet ring concentric with the cylindrical body and having an annular wall portion extending from the upper side of the collet chuck toward the collet chuck, and provided above the collet ring. And a press-fitting portion for press-fitting the collet ring approximately in parallel with the second rotational axis, wherein the pivot portion of the holder joint is rotatable with respect to the holder mounting block in a state of being inserted into the cylinder of the collet chuck. And the fixing portion performs a press-fitting operation on the press-fitting part as the fixing force. A press input for press-fitting the collet ring about parallel with the second rotational axis is generated, and the press input from the press-in portion is applied to the collet ring, whereby the cylinder is formed in the enclosed space surrounded by the wall portion. And the pivot portion of the holder joint is fixed to the collet chuck by contacting with the pivot portion.

In the invention according to claim 5, in the scribe head according to claim 4, a male screw is formed on an outer circumference of the press-fitting portion, and a screw hole corresponding to the male screw is formed on an upper portion of the holder mounting block. The fixed part rotates the press-fit part, and gives the push-in input to the collet ring by screwing the tip of the press-fit part into the holder mounting block.

In addition, the invention of claim 6 further includes a lifting part for applying a pressing force to the brittle material substrate from the scribing wheel supported by the holder in the scribe head according to claim 5 by moving the holder mounting block in the vertical direction. The elevating portion is disposed above the holder mounting block, and is provided between a driving force supply source for supplying a driving force in the vertical direction, and the holder mounting block and the driving force supply source arranged in the vertical direction. And a transmission part for transmitting the driving force to the holder mounting block, and a guide mechanism for guiding the holder mounting block to move along the vertical direction, wherein the fixing part is disposed above the press-fitting part, A first rotating element for rotating the part and a side of the first rotating element And a second rotary element interlocked with the first rotary element, and a rotational force source for applying a rotational force to the first rotary element from the second rotary element by rotating the second rotary element, wherein the transmission unit is It is characterized in that it is provided so as to cross the said press-fit part and the said 1st rotation element arrange | positioned along the said up-down direction.

The invention of claim 7 is the scribe head according to any one of claims 1 to 6, wherein the collet chuck is provided in the lower portion of the cylinder and is in communication with a hollow space in the cylinder near the center. It further has an annular plate in which a hole was formed, The holder mounting block is disposed below the annular plate, and further has a bearing for axially supporting the pivot portion, and the bearing includes: a bottom portion of the holder mounting block; It is characterized by being sandwiched between the annular plate.

In addition, according to the invention of claim 8, the scribe device holds the scribe head according to any one of claims 1 to 6 and the brittle material substrate, and the held brittle material substrate is held relative to the scribe head. And a holding unit for moving to.

According to the invention of Claims 1-8, the 1st rotating shaft of a scribing wheel is shifted along the advancing direction of a scribing wheel from just under the 2nd rotating shaft of a holder joint. This causes a caster effect on the scribing wheel.

Moreover, according to invention of Claim 1 thru | or 8, the holder joint which became rockable with respect to a holder mounting block is fixed with respect to a holder mounting block by providing the fixing force substantially parallel with a 2nd rotating shaft. In this case, the holder joint does not receive as a fixing force a force in a direction substantially the same as the advancing direction of the scribing wheel and a force in a direction substantially the same as the rotation axis direction of the scribing wheel. This fixing invalidates the caster effect at the time of forming the scribe line.

As a result, when it is necessary to swing the holder joint with respect to the holder mounting block, such as adjusting the attitude of the scribing wheel with respect to the brittle material substrate, the caster effect can be generated in the scribing wheel.

On the other hand, when the holder joint is fixed to the holder mounting block and the caster effect is invalidated, the formation width of the scribe line can be made smaller compared with the case where the holder joint is not fixed. In addition, since a pressing force substantially parallel to the second rotational axis is applied as the fixing force, for example, after the posture adjustment is performed, the fixing position of the holder joint is prevented from shifting due to the fixing force. That is, posture adjustment can be completed favorably.

This makes it possible to easily change the rotational position of the holder joint with respect to the holder mounting block at the time of adjusting the attitude of the scribing wheel, and effectively suppress the increase in the width of the formation of the scribe line when the scribe line is formed. Can be.

In particular, according to the invention as set forth in claim 2, the pushing force approximately parallel to the second rotation axis is applied to the collet ring, so that the pivoting portion of the holder joint is fixed to the collet chuck while the cylinder of the collet chuck is inserted into the surrounding space of the collet ring. . That is, the pivot part of the holder joint is fixed well by the collet ring and the collet chuck.

In particular, according to the inventions of claims 3 to 6, the holder joint which is oscillable with respect to the holder mounting block is fixed to the holder mounting block by applying a fixing force substantially parallel to the second rotational axis by the action of the fixing portion. do.

In particular, according to the invention as claimed in claims 4 to 6, the pressing force is applied to the collet ring from the pressing portion by the action of the fixing portion. Thereby, the turning part of a holder joint is fixed to a collet chuck in the state in which the cylinder of a collet chuck was inserted in the surrounding space of a collet ring. That is, the pivot part of the holder joint is fixed well by the collet ring and the collet chuck.

In particular, according to the invention of Claims 5 and 6, when the press-fitting part is rotated and the tip of the press-fitting part is screwed into the holder mounting block, the press-fitting part continues to apply the pushing input to the collet ring. Therefore, the state in which the pressing force is applied to the collet ring can be kept well, and as a result, the state in which the pivot portion of the holder joint is fixed to the collet chuck can be maintained well.

In particular, according to the invention described in claim 6, the transmission portion is provided so as to cross the first rotation element of the fixed portion and the press-fit portion of the holder mounting block. Thereby, the 1st rotating element and the press fitting part can be arrange | positioned so that the pressing force applied to the brittle material board | substrate from a scribing wheel, and the press input which presses the press fitting part downward may operate on substantially the same straight line. As a result, the formation width of the scribe line can be more effectively suppressed while maintaining the state in which the caster effect is invalidated at the time of forming the scribe line.

In particular, according to the invention as set forth in claim 7, when the pushing force is applied to the collet ring, the annular portion of the collet chuck is pressed downward. Thereby, a compressive force is provided to the bearing arrange | positioned between the bottom part of a holder mounting block, and a torus plate, and rotation of a bearing is inhibited. Therefore, a holder joint can be fixed to a holder mounting block more favorably.

BRIEF DESCRIPTION OF THE DRAWINGS The front view which shows an example of the whole structure of the scribing apparatus in embodiment of this invention.
2 is a side view showing an example of the entire configuration of a scribing apparatus according to an embodiment of the present invention.
3 is a front view illustrating an example of a configuration near a scribing wheel;
4 is a side view showing an example of the configuration near the holder mounting block;
5 is a bottom view showing an example of the configuration near the scribing wheel.
6 is a bottom view for explaining the caster effect.
7 is a side view showing the holder joint 35 after being fixed to the holder mounting block 40.
FIG. 8 is a sectional view of the vicinity of the holder mounting block seen from the line VV in FIG. 7. FIG.
The side view which shows an example of a structure of the holder mounting block vicinity.
10 is a side view showing a state after the holder joint 35 is fixed to the holder mounting block 140.
FIG. 11 is a sectional view of the vicinity of the holder mounting block as seen from the line VV in FIG. 10. FIG.
It is a side view which shows an example of a structure of the vicinity of a scribe head.
Fig. 13 is a front view showing an example of the configuration near the scribe head.

≪ First Embodiment >

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail, referring drawings.

 <1. Configuration of Scribe Devices>

1 and 2 are front and side views respectively showing an example of the overall configuration of the scribe device 1. 3 is a front view illustrating an example of a configuration near the scribing wheel 60.

The scribing apparatus 1 has a scribe line (cutting line: longitudinal) on the surface of a substrate (hereinafter simply referred to as a "brittle material substrate") 4 formed of a brittle material, such as a glass substrate or a ceramic substrate. Cracks).

As shown in FIG. 1 and FIG. 2, the scribe device 1 mainly includes a holding unit 10, a scribe unit 20, an imaging unit 70, and a control unit 90. Doing. In addition, in order to make clear the direction relationship, XYZ Cartesian coordinate system which makes a Z axis direction a perpendicular direction, and makes an XY plane a horizontal plane is provided in each drawing of FIG. 1 and subsequent figures suitably as needed.

3, when the scribe line SL is formed on the surface of the brittle material substrate 4 by the scribe device 1, it extends in the vertical direction (Z-axis direction) to the brittle material substrate 4. Vertical crack K occurs (scribe process).

By applying stress to the brittle material substrate 4 on which the vertical crack K has occurred (brake step), the vertical crack K is grown from the main surface on the side where the scribe line SL is formed to the main surface on the opposite side, and the brittle material substrate ( The method of cutting 4) is called "cutting".

On the other hand, only by the scribe process (that is, without executing the brake process), the vertical crack K is advanced from the main surface on the side where the scribe line SL is formed to the main surface on the opposite side to cut the brittle material substrate 4. Division ”.

These cuttings and dividing are diamond cutting saws (or wheels), or diamond dicing, in which cutting chips are essential for cutting, since the essential element for cutting is the extension of the vertical crack, and the cutting chips do not come out. It is a more preferable cutting method than grinding cutting using a saw.

Glass, ceramic, silicon, sapphire, etc. are mentioned as an example of the material of the brittle material board | substrate 4 which can be cut or divided by the scribing method of this embodiment. In particular, in recent years, as a substrate used in high-frequency modules related to communication devices, the transition from HTCC (High Temperature Co-fired Ceramics) to relatively easy to process low temperature co-fired ceramics (LTCC) has been accelerated. As a result, the scribing method of the present embodiment is gradually used effectively.

The holding unit 10 holds the brittle material substrate 4 and simultaneously moves the held brittle material substrate 4 relative to the scribe unit 20. As shown in FIG. 1, the holding unit 10 is provided on the base portion 10a and mainly includes a table 11, a ball screw mechanism 12, and a motor 13. .

Here, the base part 10a is formed of the substantially rectangular parallelepiped stone plate, for example, and the upper surface (surface facing the holding support unit 10) is flat-processed. Thereby, thermal expansion of the base part 10a can be reduced, and the brittle material board | substrate 4 hold | maintained by the holding | maintenance unit 10 can be moved favorably.

The table 11 adsorbs and holds the loaded brittle material substrate 4. In addition, the table 11 advances and holds the held brittle material substrate 4 in the arrow AR1 direction (X axis plus or minus direction: hereinafter, also referred to simply as the "retraction direction"), and the arrow R1 direction ( In the direction of the Z axis). As shown in Figs. 1 and 2, the table 11 mainly has a suction portion 11a, a rotation table 11b, and a moving table 11c.

The suction part 11a is provided above the swivel table 11b. As shown in FIG. 1 and FIG. 2, the brittle material substrate 4 can be stacked on the upper surface of the adsorption portion 11a. A plurality of suction grooves (not shown) are arranged in a lattice pattern on the upper surface of the suction portion 11a. Therefore, in the state where the brittle material substrate 4 is loaded, the atmosphere in each adsorption groove is evacuated (suctioned), so that the brittle material substrate 4 is adsorbed to the adsorption portion 11a.

The rotating table 11b is provided below the adsorption part 11a, and rotates the adsorption part 11a about the rotating shaft 11d substantially parallel to a Z axis. In addition, the movable table 11c is provided below the rotary table 11b and moves the suction unit 11a and the rotary table 11b along the advancing direction.

Therefore, the brittle material substrate 4 adsorbed and held on the table 11 is rotated about the rotating shaft 11d which moves forward and backward in the direction of the arrow AR1 and moves along with the advancing / removing operation of the adsorption portion 11a.

The ball screw mechanism 12 is arrange | positioned under the table 11, and advances the table 11 to arrow AR1 direction. As shown in Figs. 1 and 2, the ball screw mechanism 12 mainly has a feed screw 12a and a nut 12b.

The feed screw 12a is a rod body extending along the advancing direction of the table 11. On the outer circumferential surface of the feed screw 12a, a spiral groove (not shown) is formed. One end of the feed screw 12a is rotatably supported by the support portion 14a and the other end of the feed screw 12a is rotatably supported by the support portion 14b. Moreover, the feed screw 12a is interlocked with the motor 13, and when the motor 13 rotates, it rotates in the rotation direction.

The nut 12b advances and retreats in the arrow AR1 direction by the rolling motion of the ball which is not shown in accordance with the rotation of the feed screw 12a. As shown in Figs. 1 and 2, the nut 12b is fixed to the lower portion of the moving table 11c.

Therefore, when the motor 13 is driven and the rotational force of the motor 13 is transmitted to the feed screw 12a, the nut 12b is advanced in the direction of the arrow AR1. As a result, the table 11 to which the nut 12b is fixed advances and retreats in the arrow AR1 direction similarly to the nut 12b.

The pair of guide rails 15 and 16 regulate the movement of the table 11 in the advancing direction. As shown in FIG. 2, the pair of guide rails 15 and 16 are fixed and spaced apart by a predetermined distance in the direction of the arrow AR2 on the base portion 10a.

The plurality (two in this embodiment) of the sliding parts 17 (17a, 17b) is capable of sliding along the guide rail 15 in the direction of the arrow AR1. As shown in FIG. 1 and FIG. 2, the sliding parts 17 (17a, 17b) are fixed at a lower distance from the moving table 11c in the direction of the arrow AR1 by a predetermined distance.

The plurality of sliding parts 18 (two in this embodiment) can slide along the guide rail 16 in the arrow AR1 direction. However, only the sliding part 18a of the code | symbol 1 is shown in FIG. 2 for the convenience of illustration. Similar to the sliding part 17, the sliding part 18 is fixed to the lower part of the movable stand 11c by being spaced apart by a predetermined distance in the advancing direction.

In the holding unit 10 having such a configuration, when the rotational force of the motor 13 is applied to the ball screw mechanism 12, the table 11 moves along the pair of guide rails 15, 16. . As a result, the straightness of the table 11 in the advancing direction is ensured.

The scribe unit 20 presses and rolls the scribing wheel 60 (refer FIG. 3) with respect to the brittle material substrate 4 held by the holding unit 10, so that the scribe unit 20 A scribe line SL is formed on the surface. As shown in FIG. 1 and FIG. 2, the scribing unit 20 mainly includes a scribing head 30 holding the scribing wheel 60 and a drive unit 50.

The scribe head 30 holds the scribing wheel 60. Moreover, in the scribe head 30, the pressing force at the time of press-contacting the holding scribing wheel 60 on the surface of the brittle material board | substrate 4 by the action of the lifting / pressure mechanism which is not shown in figure (below) , Simply referred to as "scribe load") is adjusted. In addition, the detailed structure of the scribe head 30 is mentioned later.

The drive unit 50 reciprocates the scribe head 30 provided with the scribing wheel 60 in the direction of arrow AR2 (Y-axis plus or minus direction: hereinafter referred to simply as "return direction"). As shown in FIG. 2, the drive part 50 mainly comprises the support pillar 51 (51a, 51b) of plural (two in this embodiment), and the guide rail of plural (two in this embodiment). 52 and the motor 53 are provided.

The support pillars 51 (51a, 51b) extend from the base portion 10a in the vertical direction (Z-axis direction). As shown in FIG. 2, the guide rail 52 is being fixed with respect to these support pillars 51a and 51b in the state fitted between the support pillars 51a and 51b.

The guide rail 52 regulates the movement of the scribe head 30 in the reciprocating direction. As shown in FIG. 2, the guide rail 52 is fixed and spaced apart by a predetermined distance in the up-down direction.

The motor 53 is connected to the transfer mechanism (for example, ball screw mechanism) which is not shown in figure. Thereby, when the motor 53 rotates, the scribe head 30 reciprocates along the guide rail 52 in the direction of arrow AR2.

The scribing wheel 60 is formed by molding a diamond-containing material. Here, examples of the diamond-containing material include sintered diamond (also referred to simply as "PCD"), polycrystalline diamond, natural single crystal diamond and synthetic single crystal diamond.

The imaging unit 70 picks up the brittle material substrate 4 held by the holding unit 10. As shown in FIG. 2, the imaging unit 70 has a plurality of cameras 75 (75a, 75b) in the present embodiment.

The cameras 75 (75a, 75b) are disposed above the holding unit 10 as shown in Figs. 1 and 2. The cameras 75 (75a, 75b) capture images of characteristic portions (for example, alignment marks (not shown)) formed on the brittle material substrate 4. And based on the image picked up by the camera 75 (75a, 75b), the position and attitude | position of the brittle material board | substrate 4 are calculated | required.

Here, the "position" of the brittle material substrate 4 shall mean any position on the brittle material substrate 4 in the absolute coordinate system. In addition, the "posture" of the brittle material substrate 4 means the reference line of the brittle material substrate 4 with respect to the reciprocating direction of the scribe head 30 (for example, when the brittle material substrate 4 is a rectangular shape, 1 side of 4 sides] shall be referred to.

When the rectangular brittle material substrate 4 is cut or divided, an alignment mark is formed at two adjacent corners among four corners of the brittle material substrate 4. Each alignment mark is imaged by the corresponding camera 75a, 75b, and the position of each alignment mark in an absolute coordinate system is calculated | required based on these image picked up. The position and attitude of the brittle material substrate 4 are calculated based on the positions of these alignment marks.

The control unit 90 realizes the operation control and data operation of each element of the scribe device 1. As shown in FIG. 1 and FIG. 2, the control unit 90 mainly includes a ROM 91, a RAM 92, and a CPU 93.

The ROM (Read Only Memory) 91 is a so-called nonvolatile storage unit, for example, a program 91a is stored. As the ROM 91, a flash memory that is a nonvolatile memory that can be read and written may be used. The RAM (Random Access Memory) 92 is a volatile storage unit, and for example, data used in the calculation of the CPU 93 is stored.

The CPU (Central Processing Unit) 93 controls the control (retraction / rotation operation of the holding support unit 10 and the reciprocating operation of the scribe head 30 by the drive unit 50 according to the program 91a of the ROM 91. Control] and data processing such as position calculation of the brittle material substrate 4 are executed.

<2. Configuration of the scribe head>

4 is a side view illustrating an example of a configuration near the holder mounting block 40. 5 is a bottom view illustrating an example of a configuration near the scribing wheel 60. 6 is a bottom view for explaining the caster effect. 7 is a side view showing the state after the holder joint 35 is fixed to the holder mounting block 40. FIG. 8 is a sectional view of the vicinity of the holder mounting block 40 seen from the line V-V in FIG.

The scribing head 30 is moved forward and backward with respect to the brittle material substrate 4 so that the scribe line SL (see FIG. 3) along the advancing direction of the scribing wheel 60 (arrow AR2 direction: see FIG. 2) is a brittle material. It is formed on the substrate 4. As shown in FIG. 4, the scribe head 30 mainly includes a holder 31, a holder joint 35, and a holder mounting block 40.

As shown in FIG. 4, the holder 31 rotatably supports the scribing wheel 60 about the first rotational axis 32a substantially perpendicular to the advancing direction of the scribing wheel 60. do. As shown in FIG. 4, the holder 31 is attached to the lower part of the holder joint 35, and as shown in FIG. 3 or FIG. 8, the pin 32 and the support frame 33 are mainly. Have

The pin 32 is a rod body penetrating the scribing wheel 60. By inserting the pin 32 into the through hole 60a (see FIG. 3) of the scribing wheel 60, the pin 32 is fixed relative to the scribing wheel 60. As shown in FIG. 3 and FIG. 5, the through hole 60a extends along the first rotational axis 32a substantially parallel to the X axis.

As shown in FIG. 3, the support frame 33 is a structure arrange | positioned so that both openings (both ends) of the through hole 60a may be covered. The pins 32 protruding from both ends of the through hole 60a are rotatably provided with respect to the support frame 33. Therefore, the scribing wheel 60 is rotatable with respect to the support frame 33.

The holder joint 35 is rotatable about the advancing direction of the scribing wheel 60 and the 2nd rotating shaft 38a which is substantially perpendicular to each of the 1st rotating shaft 32a except the fixing time mentioned later. The holder mounting block 40 is swingably supported. As shown in FIG. 4, the holder joint 35 mainly has the mounting piece 36 and the turning part 38. As shown in FIG.

The mounting piece 36 is a mounting element for attaching the holder 31 to the lower portion of the holder joint 35. As shown in FIG. 4, the mounting piece 36 is provided at the lower end of the holder joint 35, and the shape of the mounting piece 36 is approximately L toward the advancing direction of the scribing wheel 60. It is a child shape (refer FIG. 8).

4, the turning part 38 is inserted in the inner diameter surface of the bearings 46 and 47, and is inserted in the hollow space 44d which the cylinder 44b of the collet chuck 44 forms. have. Thereby, the turning part 38 is rotatably supported with respect to the holder mounting block 40 centering on the 2nd rotating shaft 38a except the fixing time mentioned later.

In addition, as shown in FIG. 5, the position of the rotating shaft 38a of the turning part 38 seen from the lower surface, and the contact position 60c of the scribing wheel 60 in the brittle material board | substrate 4 are Is shifted in the XY plane. That is, as shown in FIG. 5, the 1st rotating shaft 32a of the scribing wheel 60 changes the advancing direction (Y-axis direction) of the scribing wheel 60 from just under the rotating shaft 38a. There is a deviation.

Therefore, except for the fixed time mentioned later, when the advancing direction of the scribing wheel 60 changes to arrow AR4 (solid line) direction from arrow AR3 (two dashed-dotted line) direction, as shown in FIG. By the caster effect, the torque around the rotating shaft 38a acts on the scribing wheel 60. As a result, the scribing wheel 60 rotates in the direction of the arrow R2, and the position of the scribing wheel 60 is changed from the two-dot chain line position to the solid line position.

That is, when the holder joint 35 is not fixed to the holder mounting block 40, the advancing direction of the scribing wheel 60 from the state in which the attitude | position of the scribing wheel 60 and the advancing direction are substantially parallel. Is changed, and even if the attitude of the scribing wheel 60 is shifted by an angle θ1 with respect to the advancing direction, the torque in the direction of the arrow R2 acts, and the scribing wheel 60 is turned to rotate the scribing wheel ( The posture of 60 is again substantially parallel to the advancing direction of the scribing wheel 60.

As shown in FIG. 4, FIG. 7, and FIG. 8, the holder mounting block 40 is provided above the mounting piece 36 of the holder joint 35, and above the holder 31, and is mainly a collet. The ring 42, the collet chuck 44, the bearings 46 and 47, and the press-fit bolts 48 are provided. The press-fit bolt 48, the collet ring 42, the collet chuck 44, and the bearings 46 and 47 are arranged in this order from the Z-axis plus side. The holder mounting block 40 supports the holder joint 35 so as to be able to swing as described above, and as shown below, such as the press-fit bolt 48, the collet ring 42, the collet chuck 44, and the like. By the action, the holder joint 35 is fixed and the caster effect can be canceled.

The press-fit bolt 48 (press-fit part) is provided above the collet ring 42 as shown in FIG. 4, FIG. 7, and FIG. The press-fit bolt 48 is screwed by the nut 49 in the upper part of the mounting block main body 40a, and adjusts the front-end | tip 48a of the press-fit bolt 48 up and down by changing the screw fixing position. It is possible. When the tip 48a is adjusted to press-contact the upper surface of the collet ring 42, the press-fit bolt 48 presses the push-in force to press the collet ring 42 downward, and the second rotation shaft 38a. ) Is given as a holding force approximately parallel to The screwing of the press-fit bolt 48 is realized by an operator directly or using a certain jig or the like in scribing.

In addition, as shown in FIG. 4, FIG. 7, and FIG. 8, since the front-end | tip 48a of the press-fit bolt 48 is substantially spherical shape, the press-fit bolt 48 has a point with respect to the collet ring 42. FIG. The pressure input can be given in the state of contact. Thereby, the holder joint 35 can be fixed to the holder mounting block 40 more favorably.

The collet ring 42 and the collet chuck 44 are fixing elements for fixing the holder joint 35 with respect to the holder mounting block 40.

As shown in FIG. 4, FIG. 7, and FIG. 8, the collet chuck 44 mainly has the torus plate 44a and the cylinder 44b.

The cylinder 44b is a hollow member extending along the second rotation shaft 38a. As shown in FIG. 4, FIG. 7, and FIG. 8, the cylinder 44b is formed so that it may become concentric with the torus plate 44a. As described above, the swing portion 38 of the holder joint 35 is inserted into the hollow space 44d formed by the cylinder 44b. The cylinder 44b is comprised so that the internal diameter D11 (refer FIG. 8) can be changed, maintaining the same value with respect to a Z-axis direction. On the other hand, the outer diameter D12 (see FIG. 8) of the cylinder 44b gradually becomes wider from the upper side (collet ring 42 side) to the lower side (bearing 46 side), and then to a constant width.

The torus plate 44a is a plate body provided below the cylinder 44b. The through hole 44c which communicates with the hollow space 44d in the cylinder 44b is formed in the vicinity of the center of the torus plate 44a in planar view (as seen from the Z-axis plus side).

4, 7, and 8, the collet ring 42 mainly has the disk body 42a, the outer wall 42b, and the inner wall 42c.

The disk body 42a is a plate body provided in the upper part of the collet ring 42. As shown in FIG. The outer wall 42b is an annular wall portion formed along the outer periphery of the disc 42a. The inner wall 42c is provided inside the outer wall 42b and is an annular wall portion concentric with the cylinder 44b of the collet chuck 44. As shown to FIG. 4, FIG. 7, and FIG. 8, the outer wall 42b and the inner wall 42c extend from the upper side of the collet chuck 44 toward the collet chuck 44. As shown in FIG. Here, the inner diameter D21 of the inner wall 42c gradually becomes narrower from the lower side (collet chuck 44 side) toward the upper side (pressing bolt 48 side), and then becomes constant width thereafter.

The compression spring 45 is a pressing member formed by the elastic member. As shown in FIG. 8, the upper end of the compression spring 45 is fixed to the collet ring 42, and the lower end of the compression spring 45 is fixed to the collet chuck 44, respectively. As a result, the collet ring 42 is pushed downward by the press-fit bolt 48. At this time, the collet ring 42 is pressed upward by the compression spring 45.

As shown in FIG. 4, in a state in which the swing portion 38 is swingable relative to the holder mounting block 40, the pushing force from the press-fit bolt 48 is applied to the collet ring 42 to collet the ring 42. ) Is pushed down, the cylinder 44b of the collet chuck 44 contacts the inner wall 42c in the surrounding space surrounded by the inner wall 42c. Further, by applying the pressing force, the inner diameter D11 of the cylinder 44b gradually decreases in accordance with the shape of the inner wall 42c. In the near future, the turning part 38 of the holder joint 35 contacts the cylinder 44b of the collet chuck 44, as shown to FIG. 7 and FIG. Thereby, the state by which the turning part 38 of the holder joint 35 was fixed by the collet ring 42 and the collet chuck 44 is implement | achieved. That is, by applying a pressing force, the holder joint 35 is fixed with respect to the holder mounting block 40.

When the press input from the press-fit bolt 48 is canceled, the collet ring 42 returns to the initial position above the collet chuck 44 by the pressing force received from the compression spring 45. In addition, depending on the shape of the inner wall 42c of the collet ring 42 and the cylindrical body 44b of the collet chuck 44 (all are tapered) and the material, the collet ring 42 is a compression spring 45. ) May be returned to the initial position above the collet chuck 44. In this case, the compression spring 45 is unnecessary.

The bearing 46 is disposed under the collet chuck 44, and axially supports the pivoting portion 38 of the holder joint 35. On the other hand, the bearing 47 is arrange | positioned under the bearing 46, and axially supports the turning part 38 similarly to the bearing 46. FIG. As shown to FIG. 4, FIG. 7, and FIG. 8, the bearings 46 and 47 are the bottom plate 40b provided in the bottom part of the holder mounting block 40, and the ring plate 44a of the collet chuck 44. As shown in FIG. It is sandwiched between.

When the press input from the press-fit bolt 48 is applied to the collet ring 42, the bearing 46 disposed between the bottom plate 40b of the holder mounting block 40 and the annular plate 44a of the collet chuck 44. , 47) is applied, the rotation of the bearing (46, 47) is inhibited. Thereby, the holder joint 35 can be fixed to the holder mounting block 40 more favorably.

In addition, in this embodiment, although demonstrated as using two bearings 46 and 47, the number of bearings is not limited to this, For example, one may be sufficient and three or more may be sufficient as it.

<3. Advantages of the scribe head and the scribe device of the first embodiment>

As mentioned above, in the scribing head 30 of this embodiment and the scribing apparatus 1 containing this scribe head 30, the 1st rotating shaft 32a of the scribing wheel 60 is a holder joint ( It is set to the position which shifted along the advancing direction of the scribing wheel 60 from the position just under the 2nd rotating shaft 38a of 35). Thereby, in the scribing apparatus 1, the caster effect can be brought about to the scribing wheel 60. FIG.

On the other hand, in the scribing apparatus 1, when the pushing force (fixing force) substantially parallel with the 2nd rotating shaft 38a is given with respect to the collet ring 42, the holder joint which became oscillable with respect to the holder mounting block 40 was carried out. 35 is fixed with respect to the holder mounting block 40. In this case, the caster effect at the time of forming the scribe line SL is invalidated.

In such a scribe device 1, it is necessary to swing the holder joint 35 with respect to the holder mounting block 40, for example, to adjust the attitude of the scribing wheel 60 with respect to the brittle material substrate 4. If there is, it may cause a caster effect on the scribing wheel (60). In addition, in fixing the holder joint 35 in order to complete the posture adjustment, since only a pressing force (fixing force) substantially parallel to the second rotating shaft 38a is applied, the holder joint 35 is caused due to the pressing force. The shift of the fixed position of is suppressed. That is, posture adjustment can be completed favorably.

In addition, by fixing the holder joint 35 to the holder mounting block 40, when the caster effect is invalidated, the formation width of the scribe line can be made smaller compared with the case where the holder joint 35 is not fixed. Can be. In this case, the holder joint 35 has a force in a direction substantially the same as the advancing direction of the scribing wheel 60 and a force in a direction substantially the same as the direction of the first rotating shaft 32a of the scribing wheel 60. It does not receive as a pushing force (fixing force).

Therefore, according to the scribing apparatus 1 which concerns on this embodiment, the rotation position of the holder joint 35 with respect to the holder mounting block 40 can be easily changed at the time of the attitude adjustment of the scribing wheel 60. In the formation of the scribe line SL, an increase in the formation width of the scribe line can be appropriately suppressed.

&Lt; Second Embodiment >

The configuration for invalidating the caster effect of the scribe wheel 60 provided in the scribe device 1 is not limited to that shown in the first embodiment. In the present embodiment, a configuration different from the first embodiment and a form in which the caster effect of the scribe wheel 60 is invalidated will be described. However, about the component of the scribe apparatus 1 common to 1st Embodiment, the same number is attached | subjected and the description is abbreviate | omitted.

Specifically, this embodiment differs from the first embodiment with respect to the configuration of the scribe head 30.

<4. Configuration of the scribe head>

9 is a side view illustrating an example of a configuration near the holder mounting block 140. 10 is a side view showing a state after the holder joint 35 is fixed to the holder mounting block 140. 11 is a cross-sectional view of the vicinity of the holder mounting block 140 as seen from the line V-V in FIG. 12 and 13 are side and front views showing an example of the configuration of the vicinity of the scribe head 30.

In the present embodiment, the scribe head 30 mainly includes a holder 31, a holder joint 35, a holder mounting block 140, a lifting unit 150, and a fixing unit 155. have. In addition, in FIG. 12, a part (rotary actuator 155a, rotation shaft 156a, and drive side gear 156a) of the fixed part 155 is abbreviate | omitted for the convenience of illustration.

The structure of the holder 31 and the holder joint 35 is the same as that of 1st Embodiment. However, in the present embodiment, the holder joint 35 is supported to be swingable with respect to the holder mounting block 140. Specifically, the revolving part 38 is rotatably supported with respect to the holder mounting block 140 about the 2nd rotating shaft 38a except the fixing time mentioned later.

Also in this embodiment, when the holder joint 35 is not fixed to the holder mounting block 140, as shown in FIG. 6, the attitude | position of the scribing wheel 60 and the advancing direction are substantially parallel From the state, even if the advancing direction of the scribing wheel 60 changes and the attitude | position of the scribing wheel 60 shifted | deviated by the angle (theta) 1 with respect to the advancing direction, the torque of the arrow R2 direction acts, and scribing By turning the wheel 60, the attitude of the scribing wheel 60 is again substantially parallel to the advancing direction of the scribing wheel 60.

9 to 11, the holder mounting block 140 is provided above the mounting piece 36 of the holder joint 35 and above the holder 31, and mainly the collet ring 42. ), Collet chuck 44, bearings 46 and 47, and press-fit bolt 148. The press-fit bolt 148, the collet ring 42, the collet chuck 44, and the bearings 46 and 47 are arrange | positioned in this order from the Z-axis plus side. The holder mounting block 140 supports the holder joint 35 so as to be able to swing as described above, and as shown below, the press-fit bolt 148, the collet ring 42, the collet chuck 44, and the high The holder joint 35 may be fixed by the action of the unit 155 to invalidate the caster effect.

The press-fit bolt 148 (press-in part) is provided above the collet ring 42 as shown in FIGS. 9-11. The press-fit bolt 148 has the disk-shaped rotating plate 148a and the cylindrical body 148b extended downward from the vicinity of the center of the rotating plate 148a.

A male screw is formed on the outer periphery of the cylindrical body 148b, and the screw hole 140b corresponding to a male screw is formed in the upper part of the mounting block main body 140a. And when the rotating plate 148a is rotated in the state in which the cylinder 148b was inserted in the screw hole 140b, the cylinder 148b is screwed in the screw hole 140b. That is, the press-fit bolt 148 is screwed on the upper part of the mounting block main body 140a, and the tip 148c of the press-fit bolt 148 is movable to an up-down direction by changing the degree of screw insertion. It is.

When the cylindrical body 148b of the press-fit bolt 148 is screwed into the holder mounting block main body 140a, and the tip 148c of the press-fit bolt 148 is pressed against the upper surface of the collet ring 42, the press-fit bolt ( 148 imparts a pressing force for pressing the collet ring 42 downward as a fixing force approximately parallel to the second rotation shaft 38a. The screw insertion of the press-fit bolt 148 is realized by the fixing part 155 rotating the press-fit bolt 148. The detail of the fixing part 155 is mentioned later.

9 to 11, the tip 148c of the press-fit bolt 148 has a substantially spherical shape, so the tip 148c of the press-fit bolt 148 is connected to the collet ring 42. Can contact point. Thereby, the holder joint 35 can be fixed to the holder mounting block 140 more favorably.

In this embodiment, the collet ring 42 and the collet chuck 44 are fixing elements which fix the holder joint 35 with respect to the holder mounting block 140.

As shown in FIG. 9, in the state where the swing portion 38 is swingable with respect to the holder mounting block 140, the pushing force from the press-fit bolt 148 is applied to the collet ring 42 to collet the ring 42. ) Is pushed down, the cylinder 44b of the collet chuck 44 contacts the inner wall 42c in the surrounding space surrounded by the inner wall 42c. Further, by applying the pressing force, the inner diameter D11 of the cylinder 44b gradually decreases in accordance with the shape of the inner wall 42c. Before long, the turning part 38 of the holder joint 35 contacts the cylinder 44b of the collet chuck 44, as shown to FIG. 10 and FIG. Thereby, the state by which the turning part 38 of the holder joint 35 was fixed by the collet ring 42 and the collet chuck 44 is implement | achieved. In other words, by applying the pressing force, the holder joint 35 is fixed to the holder mounting block 140.

When the press input from the press-fit bolt 148 is canceled, the collet ring 42 returns to the initial position above the collet chuck 44 by the pressing force received from the compression spring 45.

In addition, as shown to FIG. 9 thru | or 11, in this embodiment, the bearing 46 and 47 are the ring of the bottom plate 140c provided in the bottom part of the holder mounting block 140, and the collet chuck 44. As shown in FIG. It is sandwiched between the plates 44a.

When the pressing force from the press-fit bolt 148 is applied to the collet ring 42, the bearing 46 disposed between the bottom plate 140c of the holder mounting block 140 and the annular plate 44a of the collet chuck 44, The compression force is imparted to 47, and rotation of the bearings 46 and 47 is inhibited. Thereby, the holder joint 35 can be fixed to the holder mounting block 140 more favorably.

The lifting unit 150 is the brittle material substrate 4 held by the holding unit 10 from the scribing wheel 60 supported by the holder 31 by moving the holder mounting block 140 in the vertical direction. (See FIG. 1 and FIG. 2) is given a pressing force. As shown in FIG. 12 and FIG. 13, the lifting unit 150 mainly includes a cylinder 151, a transmission unit 152, a guide mechanism 153, and a mounting plate 154.

The cylinder 151 is a driving force supply source for moving the holder mounting block 140 in the vertical direction (Z-axis plus or minus direction). As shown to FIG. 12 and FIG. 13, the cylinder 151 is arrange | positioned above the holder mounting block 140, and mainly has the main-body part 151a and the rod 151b.

The rod 151b is able to move forward and backward with respect to the main body 151a. As shown to FIG. 12 and FIG. 13, the lower end part of the rod 151b opposes the transmission part 152. As shown in FIG. Therefore, the cylinder 151 drives, and the rod 151b advances out of the main body 151a, so that the transmission part 152 is pushed down by the lower end of the rod 151b.

The transmission part 152 is provided between the cylinder 151 and the holder mounting block 140, and transmits the driving force from the cylinder 151 to the holder mounting block 140. As shown to FIG. 12 and FIG. 13, the transmission part 152 mainly has the accommodating member 152a and the door-shaped bracket 152b.

The housing member 152a is provided at a position facing the rod 151b of the cylinder 151. The accommodating member 152a has the disk body 152a1 provided in the upper part, and the rod body 152a2 extended below from the disk body 152a1. 12 and 13, the disk body 152a1 is disposed to face the lower end of the rod 151b. When the rod 151b moves downward, the lower end of the rod 151b is a disk body. In contact with the upper surface of 152a1. In addition, the rod body 152a2 is embedded in the upper part (beam member 152d) of the door-shaped bracket 152b.

The sentence bracket 152b is a crosslinked structure provided on the holder mounting block 140. As shown in FIG. 12 and FIG. 13, the door-shaped bracket 152b includes two support pillar members 152c extending in the vertical direction and beam members 152d arranged on top of both of the support pillar members 152c. Have

As shown in FIG. 13, the guide mechanism 153 mainly has the guide rail 153a and the guide block 153b which made it possible to slide up and down along the guide rail 153a. In addition, the mounting plate 154 is a board | plate material sandwiched between the guide mechanism 153 and the holder mounting block 140. As shown in FIG. The holder mounting block 140 is fixed to the guide block 153b via the mounting plate 154.

By having the above structure, in the elevating part 150, the holder mounting block 140 to which the driving force was imparted from the cylinder 151 through the transmission part 152 is guided by the guide mechanism 153, and moves up and down direction. do. By adjusting the driving force by the cylinder 151, the scribe load of the scribing wheel 60 provided below the holder mounting block 140 is set suitably.

When the fixing part 155 fixes the holder joint 35 with respect to the holder mounting block 140, the press fitting bolt 148 presses the collet ring 42 downward.

As shown in FIG. 13, the fixed part 155 mainly consists of the rotary actuator 155a, the gear 156 (driving side gear 156a), and the passive gear (plural (two in this embodiment)). 156b).

The rotary actuator 155a is a rotational force supply source which rotates the shaft 157a in accordance with the supply state of compressed air. As shown in FIG. 13, the drive side gear 156a (2nd rotation element) is provided in the lower end part of the shaft 157a, and it rotates according to the rotation state of the rotary actuator 155a.

The passive side gear 156b (first rotating element) is disposed above the press-fit bolt 148. As shown in FIG. 12 and FIG. 13, the passive side gear 156b is fixed to the shaft 157b. As shown in FIG. 12, the vicinity of the upper end and the lower end of the shaft 157b are axially supported by the bearings 158a and 158b, respectively. In addition, the bearings 158a and 158b are fixed to the base plate 150c via corresponding upper and lower bearing holders 159a and 159b, respectively.

The passive side gear 156b is interlocked with the driving side gear 156a. Therefore, the rotary actuator 155a rotates the drive gear 156a, thereby providing a rotational force to the passive gear 156b from the drive gear 156a.

12 and 13, a pin 157c is provided between the passive gear 156b and the press-fit bolt 148 to synchronize both rotations. The pin 157c is inserted into a hole formed in each of the passive side gear 156b and the press-fit bolt 148 (more specifically, the rotating plate 148a). As a result, the rotational force received by the manual gear 156b is transmitted to the press-fit bolt 148 via the pin 157c to rotate the press-fit bolt 148.

By having the above structure, in the fixed part 155, it is possible to rotate the press-fit bolt 148 by moving the cylinder 151, and to move the front-end | tip 148c to an up-down direction. By rotating the cylinder 151 so that the press-fit bolt 148 is screwed into the mounting block body 140a, the tip 148c of the press-fit bolt 148 is brought into contact with the upper surface of the collet ring 42 as described above. Furthermore, the pressing force which presses the collet ring 42 downward can be given as a fixing force substantially parallel to the 2nd rotation axis 38a. As a result, the holder joint 35 is fixed to the holder mounting block 140. Naturally, the reverse rotation is applied to the cylinder 151, whereby the pressing force from the pressing bolt 148 acting on the collet ring 42 is released.

In addition, in the scribing apparatus 1 which concerns on this embodiment, the transmission part 152 crosses the passive gear 156b of the fixing part 155, and the press-fit bolt 148 of the holder mounting block 140. It is installed to shout. Then, the passive side gear 156b and the press-fit bolt are operated so that the pressing force applied to the brittle material substrate 4 from the scribing wheel 60 and the press-in input for pressing the press-fit bolt 148 downward act on approximately the same straight line. 148 is disposed. As a result, the formation width of the scribe line can be more effectively suppressed while maintaining the state where the caster effect is invalidated at the time of forming the scribe line SL (see FIG. 3).

<5. Advantages of the scribe head and the scribe device of the second embodiment>

In the scribing apparatus 1 which concerns on this embodiment, when the pressing force (fixing force) substantially parallel with the 2nd rotating shaft 38a is given with respect to the collet ring 42 by the action of the fixing part 155, holder mounting is carried out. The holder joint 35 which is made swingable with respect to the block 140 is fixed with respect to the holder mounting block 140. In this case, the caster effect at the time of forming the scribe line SL is invalidated.

In such a scribe device 1, it is necessary to swing the holder joint 35 with respect to the holder mounting block 140, for example, to adjust the attitude of the scribing wheel 60 with respect to the brittle material substrate 4. If there is, release of the fixing by the action of the fixing unit 155, can generate a caster effect on the scribing wheel (60). In addition, in fixing the holder joint 35 in order to complete the posture adjustment, since only a pressing force (fixing force) substantially parallel to the second rotating shaft 38a is applied, the holder joint 35 is caused due to the pressing force. The shift of the fixed position of is suppressed.

In addition, when fixing the holder joint 35 with respect to the holder mounting block 140 by the action of the fixing part 155, when the caster effect is invalidated, the holder joint 35 fixes the formation width of a scribe line. It can be made small compared with the case where it is not. In this case, the holder joint 35 has a force in the same direction as the advancing direction of the scribing wheel 60 and a force in the same direction as the direction of the first rotational axis 32a of the scribing wheel 60. It does not receive as a pushing force (fixing force).

Therefore, according to the scribing apparatus 1 which concerns on this embodiment, the rotation position of the holder joint 35 with respect to the holder mounting block 140 can be easily changed at the time of the attitude adjustment of the scribing wheel 60. At the time of forming the scribe line SL, it is possible to effectively suppress the increase in the formation width of the scribe line.

1: scribe device
4: brittle material substrate
10: Holding unit
20: Scribe unit
30: scribe head
31: Holder
32a: first axis of rotation
35: Holder joint
38:
38a: second rotation axis
40: Holder mounting block
42: collet ring
42c: inner wall
44: collet chuck
44a: torus
44b: cylinder
44c: through hole
45: compression spring
46, 47: bearing
48, 148: press-fit bolt (press part)
50:
60: scribing wheel
150: lift
151 cylinder (drive force supply source)
152: transfer unit
153: guide mechanism
155 fixing part
155a: rotary actuator (rotary power supply)
156a: drive side gear (second rotating element)
156b: manual gear (first rotating element)

Claims (8)

It is a scribe head which forms a scribe line along the advancing direction of a scribing wheel on the said brittle material board | substrate by advancing with respect to a brittle material board | substrate,
(a) a holder for rotatably supporting the scribing wheel about a first rotational axis perpendicular to the advancing direction;
(b) a holder mounting block provided above the holder,
(c) a holder joint is mounted on the lower part and is rotated about a second rotational axis perpendicular to the traveling direction and each of the first rotational axis, thereby having a holder joint supported to be swingable with respect to the holder mounting block; ,
The first rotating shaft is arranged to be shifted along the advancing direction of the scribing wheel from directly below the second rotating shaft,
The holder mounting block,
(b-1) a collet chuck having a hollow cylindrical body extending along the second axis of rotation;
(b-2) a collet ring concentric with the cylindrical body and having an annular wall portion extending from the upper side of the collet chuck toward the collet chuck;
(b-3) provided above the collet ring, and having a press-fitting portion for generating a press input for press-fitting the collet ring in parallel with the second rotating shaft;
The holder joint,
(c-1) has a turning part rotatably supported with respect to the holder mounting block,
The pivot portion of the holder joint is made rotatable with respect to the holder mounting block while being inserted into the cylinder of the collet chuck,
The holder joint is brought into contact with the wall portion and the pivot portion in an enclosed space surrounded by the wall portion by applying the press input from the press portion to the collet ring in a direction parallel to the second axis of rotation. And the pivot portion of the scribe head is fixed to the collet chuck. It is a scribe head which forms a scribe line along the advancing direction of a scribing wheel on the said brittle material board | substrate by advancing with respect to a brittle material board | substrate,
(a) a holder for rotatably supporting the scribing wheel about a first rotational axis perpendicular to the advancing direction;
(b) a holder mounting block provided above the holder,
(c) a holder joint mounted on a lower portion thereof and being rotated about a second rotational axis perpendicular to the traveling direction and each of the first rotational shafts, thereby supporting a holder joint that is swingably supported with respect to the holder mounting block;
(d) a fixing part for fixing operation for fixing the holder joint to the holder mounting block,
The first rotating shaft is arranged to be shifted along the advancing direction of the scribing wheel from directly below the second rotating shaft,
The scribing head according to claim 1, wherein the holder joint is fixed to the holder mounting block by generating a fixing force in a direction parallel to the second rotation axis in the holder mounting block. The method of claim 2, wherein the holder joint,
(c-1) has a turning part rotatably supported with respect to the holder mounting block,
The holder mounting block,
(b-1) a collet chuck having a hollow cylindrical body extending along the second axis of rotation;
(b-2) a collet ring concentric with the cylindrical body and having an annular wall portion extending from the upper side of the collet chuck toward the collet chuck;
(b-3) provided above the collet ring, and has a press-fitting part for press-fitting the collet ring in parallel with the second rotation shaft;
The pivot portion of the holder joint is made rotatable with respect to the holder mounting block while being inserted into the cylinder of the collet chuck,
The fixing portion generates a pressing force for pressing the collet ring in parallel with the second rotation axis as the fixing force by causing the pressing portion to press-fit the pressing portion.
The pivoting portion of the holder joint is fixed to the collet chuck by applying the pushing force from the press-fitting portion to the collet ring, so that the cylinder contacts the wall portion and the pivoting portion in an enclosed space surrounded by the wall portion. A scribe head, characterized in that the. The male screw is formed in the outer periphery of the said press-fit part,
In the upper portion of the holder mounting block, a screw hole corresponding to the male screw is formed,
And the fixing portion rotates the press fitting portion, and applies the press input to the collet ring by screwing the tip of the press fitting portion into the holder mounting block. 5. The apparatus of claim 4, further comprising: (e) a lifting unit for applying a pressing force to the brittle material substrate from the scribing wheel supported by the holder by moving the holder mounting block in the vertical direction,
The elevating unit includes:
(e-1) a driving force supply source disposed above the holder mounting block and supplying driving force in the vertical direction;
(e-2) a transmission portion provided between the holder mounting block and the driving force supply source disposed along the vertical direction, and transmitting the driving force to the holder mounting block;
(e-3) having a guide mechanism for guiding the holder mounting block to move along the vertical direction,
The fixing unit includes:
(c-1) a first rotating element disposed above the press-fitting part and rotating the press-fitting part;
(c-2) a second rotating element which is arranged on the side of the first rotating element and connected to the first rotating element,
(c-3) having a rotational force source for imparting rotational force to the first rotating element from the second rotating element by rotating the second rotating element,
The transfer head is provided so as to intersect the press-fit part and the first rotating element arranged along the vertical direction. The collet chuck according to any one of claims 1 to 5, wherein
It is provided in the lower part of the said cylinder, and further has an annular plate in which the through-hole was formed in communication with the hollow space in the said cylinder near the center,
The holder mounting block,
(b-4) it is arrange | positioned under the said torus plate, and has a bearing which supports the said turning part axially,
The scribe head, characterized in that the bearing is sandwiched between the bottom of the holder mounting block and the annular plate. A scribing device comprising the scribe head according to any one of claims 1 to 5, wherein the holding device moves the held brittle material substrate relative to the scribe head while holding the brittle material substrate. A scribing apparatus, comprising a unit. delete

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