KR20140002485A - Tip holder storage body - Google Patents

Abstract

The task of the present invention is to provide a tip holder storage body provided with a function appropriate for the automatic exchange of tips by using a robot. The tip holder storage body (15) storing a tip holder comprises a main body (15b) provided with a receiving hole (15a) and an elastic stopper (15v) disposed on the periphery of the front side opening of the receiving hole (15a), and stops a flat side (12b), which a code (12i) of the tip holder (12) is disposed on, while being exposed from the receiving hole (15) by contacting a pulling unit (12m) of the tip holder with the elastic stopper (15v) when the tip holder (12) is stored in the receiving hole (15a).

Description

Tip holder enclosure {TIP HOLDER STORAGE BODY}

According to the present invention, a scribe line for dividing is processed on the substrate by scribing while pressing a wheel tip (also called a cutter wheel or a scribing wheel) having a V-shaped blade tip formed with a circumferential ridge on the surface of the substrate loaded on the table. It relates to a housing of the tip holder used in the substrate processing apparatus to break or break (break).

Conventionally, a scribe line (a groove for dividing) along a scheduled scribe line with a wheel tip on the surface of a substrate or a bonded substrate (hereinafter simply referred to as a "substrate") containing brittle materials such as glass, silicon, ceramic, and semiconductor. ) Or a substrate processing apparatus which completely divides from the scheduled dividing line is known (see Patent Document 1 and Patent Document 2, for example).

FIG. 15 is a schematic perspective view showing an example of a conventional substrate processing apparatus disclosed in the patent document and the like. FIG. This substrate processing apparatus B is equipped with the horizontal table 31 which mounts and hold | maintains the board | substrate W used as a process object. The table 31 can be rotated in a horizontal plane by the rotation drive part 32 which incorporates a motor, and is comprised so that it can move to a Y direction along the horizontal rail 33. As shown in FIG. This Y-direction movement is performed by the screw shaft 35 rotating by the motor 34.

The board | substrate processing apparatus B has the bridge 38 provided with a pair of support pillars 36 and 36 and the guide bar 37 extended horizontally in the X direction so that these support pillars 36 and 36 may be connected. Is provided so that the table 31 may be hung. The guide bar 37 is provided with a guide 39 extending horizontally in the X direction, and the scribe head 40 is arranged to be movable in the X direction along the guide 39. The movement of the scribe head 40 in the X direction is performed by the driving of the motor 41. The scribe head 40 is detachably attached to the tip holder 42 having the wheel tip 42e via the holder joint 43. Inside the scribe head 40, a lifting mechanism that enables lifting of the holder joint 43 is incorporated.

Based on such a structure, the board | substrate W is moved by moving one or both of the wheel tip 42e and the table 31, pressing the wheel tip 42e to the board | substrate W mounted on the table 31. As shown in FIG. It is possible to scribe in the XY direction to form or divide a scribe groove.

16 and 17 show the configuration of the conventional tip holder 42 and the holder joint 43. The tip holder 42 is a pair of flat surfaces that are formed in a substantially cylindrical body portion 42a and parallel to and symmetrical with respect to the axis of the body portion 42a at one end (lower end) of the body portion 42a. Notch grooves 42c having 42b and 42b and formed in parallel between the pair of flat surfaces 42b and 42b are formed along the axis of the trunk portion 42a. It is. The wheel tip 42e is rotatably attached to this notch groove 42c via the wheel shaft 42d orthogonal to the axis center of the trunk | drum 42a. On one of the pair of flat surfaces 42b, unique data useful for management, such as the diameter and type of the wheel tip 42e attached to the tip holder 42, and setting information for attaching the wheel tip, is recorded. The code 42i is printed.

Moreover, the attachment part 42f for positioning at the time of attaching to the holder joint 43 is provided in the other end part (upper end part) of the trunk | drum 42a. The attachment portion 42f includes a flat portion 42g and an inclined surface 42h formed by cutting the trunk portion 42a. The flat part 42g is parallel to the axis center of the trunk | drum 42a, and is orthogonal to the pair of flat surface 42b below. The body portion 42a is made of magnetic metal such as iron.

The holder joint 43 is provided with the bearing 43a in the upper part, and becomes the holding part 43b which hold | maintains the tip holder 42 in the lower part. The holding portion 43b is provided with an opening 43c having a substantially circular cross section opening downward, and a magnet 43j is attached to the inside thereof. Moreover, inside the opening part 43c, the parallel pin 43d for positioning extended in the direction perpendicular | vertical to the said axis center from the axis center of the opening part is provided. The parallel pin 43d is positioned so that when the tip holder 42 is inserted into the opening 43c, it contacts the inclined surface 42h of the tip holder 42 so that the direction or attitude of the tip holder 42 becomes constant. It is.

When attaching the tip holder 42 to the holder joint 43, as shown in Fig. 17, the tip holder 42 is inserted into the opening 43c of the holder joint 43 from the attachment portion 42f. Do it. When the attachment portion 42f is inserted into the opening 43c of the holder joint 43, the parallel pin 43d contacts and positions the inclined surface 42h of the tip holder 42, and at the same time, the tip holder 42 The upper end is attached to and held by the magnet 43j. Thereby, it can attach easily to the holder joint 43 in the state which the attitude | position of the tip holder 42 faces a fixed direction. When changing the wheel tip 42e, the tip holder 42 is removed from the opening 43c of the holder joint 43 against the magnetic force of the magnet and replaced for each tip holder. The tip holder 42 to be newly attached is selected by reading a code 42i that records data specific to the tip printed on the flat surface 42b with a reader provided separately.

International publication number WO2007 / 063979 publication Japanese Patent Laid-Open No. 2011-218815

When the wheel tip reaches a replacement time due to a predetermined traveling distance or when a wheel tip of another specification is required, the tip holder is replaced after the substrate processing apparatus B is stopped. Specifically, after removing the tip holder from the holder joint of the scribe head, the desired tip holder is selected by reading the code with the reader among the stored tip holders, and the selected tip holder is attached to the holder joint. This replacement work takes a lot of hands if the operator performs it manually, and therefore it is suitable to automatically perform it by a robot.

When performing a replacement operation with a robot, a desired tip holder is selected from a plurality of tip holders, and it is necessary to arrange the flat surface of the tip holder with a code so that the reader can easily read it and withdraw it to the robot. . In this case, since the tip holder is provided with a small wheel tip having a diameter of about 2 to 3 mm, for example, it is required to stably load it on a mounting table or the like so that the wheel tip is not damaged while the cord surface is exposed. In addition, in order to select and hold the tip holder with the robot and to carry and mount the holder joint of the scribe head as it is, consideration must be given to the relative assembly of the mounting table and the robot.

However, conventionally, the system configuration suitable for the automatic replacement of the tip holder by such a robot is not disclosed, and it has been unresolved.

Accordingly, an object of the present invention is to provide a housing of a tip holder having a function suitable for automatic replacement by a robot in view of the above problems.

In order to solve the said subject, the following technical means took the following invention. That is, the tip holder storage body of this invention is equipped with the main body which has a storage hole which accommodates a tip holder, and the elastic stopper provided in the vicinity of the front opening part of the said storage hole, The said tip holder is attached to the scribe head of a substrate processing apparatus. A body portion to be attached, a pair of flat surfaces formed at one end of the body portion in parallel to an axis of the body portion, a notch groove formed in parallel with the pair of flat surfaces between the pair of flat surfaces, and A wheel tip attached to the cutout groove, a cord provided on any one of the pair of flat surfaces, and a shoulder portion in contact with the elastic stopper, wherein the shoulder contacts the elastic stopper. It was set as the structure which stopped in the state in which the installed flat part was exposed from the said storage hole.

The elastic stopper is preferably configured to be attached to the main body of the housing in such a manner that the elastic stopper is pressed by the elastic body and protrudes from the inner surface of the housing hole.

According to the present invention, in the case of storing the tip holder in the tip holder housing, the flat part provided with the cord can be allowed to stand in the state exposed from the storage hole, so that the code reading and the tip holder can be easily taken out in the next step. There is an effect such as.

Further, in the present invention, the tip holder housing includes a detachable front cap that covers the front opening of the storage hole, and a detachable rear cap or elastic hook that prevents the tip holder from being detached. It is good to set it as the structure provided in the rear opening part of a storage hole.

As a result, when storing or conveying the tip holder housing containing the tip holder, the wheel tip of the tip holder is protected by the front cap to prevent damage to the tip of the tip. Falling out from the rear opening can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows an example of the substrate processing apparatus provided with the tip holder which concerns on this invention.
2 shows an example of a tip holder according to the present invention;
3 is a perspective view showing a tip holder and a holder joint for attaching the tip holder according to the present invention;
4 is a partial cross-sectional front view showing the tip holder and the holder joint according to the present invention.
5 is an exploded perspective view illustrating an example of a tip holder housing;
6 is a cross-sectional view of the tip holder housing in the tip holder housing;
Fig. 7 is a sectional view showing another embodiment of the tip holder housing.
8 is a sectional view showing yet another embodiment of the tip holder housing;
9 is a perspective view illustrating a robot and a mounting shelf in the substrate processing apparatus shown in FIG. 1.
10 is a perspective view showing another embodiment of the loading shelf.
11 is a perspective view showing another embodiment of a loading shelf.
12 is an explanatory diagram showing a state in which an alignment mark is captured by a CCD camera in the substrate processing apparatus shown in FIG. 1.
FIG. 13 is a block diagram showing a configuration of a control system of the substrate processing apparatus shown in FIG. 1. FIG.
14 is an explanatory diagram of a scribe method of an outer cut and an inner cut;
15 is a perspective view illustrating an example of a conventional substrate processing apparatus.
16 is a perspective view showing a conventional tip holder.
17 is a partial cross-sectional front view showing a conventional tip holder and holder joint.

EMBODIMENT OF THE INVENTION Below, the detail of this invention is demonstrated based on drawing which shows the embodiment.

1 is a schematic perspective view showing an example of a substrate processing apparatus having a tip holder according to the present invention. This substrate processing apparatus A is equipped with the horizontal table 1 which loads and hold | maintains the board | substrate W used as a process object. The table 1 can be rotated in a horizontal plane by the rotation drive part 2 incorporating a motor, and is comprised so that it can move to a Y direction along the horizontal rail 3. This Y-direction movement is performed from the screw shaft 5 rotating by the motor 4.

In the substrate processing apparatus A, the bridge 8 which has a pair of support pillars 6 and 6 and the guide bar 7 extended horizontally in the X direction so that these support pillars 6 and 6 may be connected. Is installed so that the table 1 is exceeded. The guide bar 7 is provided with a guide 9 extending horizontally in the X direction, and the scribe head 10 is arranged to be movable in the X direction along the guide 9. The movement of the scribe head 10 in the X direction is performed by the driving of the motor 11. The scribe head 10 is detachably attached to the tip holder 12 having the wheel tip 12e via the holder joint 13. Inside the scribe head 10, a lifting mechanism that enables lifting of the tip holder 12 is incorporated. Moreover, two CCD cameras 18 and 18 which image the alignment mark of the board | substrate W are provided in the upper part of the bridge 8.

Based on such a structure, the board | substrate W is moved by moving one or both of the wheel tip 12e and the table 1, pressing the wheel tip 12e to the board | substrate W mounted on the table 1, and is. It is possible to scribe in the XY direction to form or divide a scribe groove.

Moreover, in the vicinity of the table 1 of the substrate processing apparatus A, the loading shelf 16 which mounts the some tip holder storage body 15 which accommodates the tip holder 12, and the tip holder 12 tip A robot 17 is provided to remove the tip holder 12 from the holder joint 13 and to attach it to the holder joint 13 of the scribe head 10.

FIG. 2 shows an example of the tip holder 12, FIG. 2A is a front view, FIG. 2B is a side longitudinal cross-sectional view, and FIG. 2C is a perspective view. The tip holder 12 is a pair of flat surfaces formed in a substantially cylindrical body portion 12a and parallel to and symmetrical with respect to the axis of the body portion 12a at one end (lower end) of the body portion 12a. The notch groove 12c provided with 12b, 12b and formed in parallel with the said flat surface 12b between these pair of flat surfaces 12b and 12b is formed along the axis of the trunk | drum 12a. It is. The tip 12e is rotatable to the notch groove 12c via a wheel shaft 12d orthogonal to the shaft center of the trunk portion 12a in a state in which part thereof is exposed from the lower end surface of the trunk portion 12a. Is attached. On one of the flat surfaces 12b, as described later, a cord 12i having recorded therein tip-specific data useful for management, such as the diameter and type of the wheel tip 12e attached to the tip holder 12, is included. It is printed.

Moreover, the attachment part 12f for positioning when attaching to the holder joint 13 is provided in the other end part (upper end part) of the trunk | drum 12a. 12f of attachment parts are provided with the flat part 12g and the inclined surface 12h formed by cutting the trunk | drum 12a. The flat part 12g is parallel to the axis center of the trunk | drum 12a, and is orthogonal to the pair of flat surface 12b below. Moreover, the attachment part 12f is comprised with magnetic metals, such as iron.

Moreover, one pin 12j which protrudes from the flat surface 12b is provided in the lower end part of a pair of flat surface 12b, 12b, respectively. It is preferable that this pin 12j is arrange | positioned at the rotationally symmetrical position or the left-right symmetrical position in the flat surface 12b, 12b. The pin 12j acts as a latch when the tip holder 12 is removed from the tip holder housing 15 by the robot 17 as described later. In addition, although one pin 12j is provided in each flat surface, you may provide multiple pins. In addition, the pin 12j of either of the flat surfaces 12b may be omitted.

A slide groove 12k extending in the axial direction of the trunk portion 12a is provided on the opposite side of the attachment portion 12f from the outer circumferential surface of the trunk portion 12a. The slide groove 12k is fitted to the long protrusion 15s formed on the inner surface of the storage hole of the tip holder housing 15 described later. One end of this slide groove 12k is connected to the notch groove 12c.

As shown in Figs. 3 and 4, the holder joint 13 attached to the scribe head 10 has a bearing portion 13a at the upper portion, and a holding portion for holding the tip holder 12 at the lower portion thereof. (13b). The holding part 13b is provided with the opening part 13c of the substantially circular cross section which opens downward, and the magnet 13e is attached to the inside inside. Moreover, in the opening part 13c, the parallel pin 13d for positioning extended in the direction perpendicular | vertical to the said axis center from the axis center of the opening part 13c is provided. This parallel pin 13d contacts the inclined surface 12h (refer FIG. 2) of the tip holder 12 when the tip holder 12 is inserted into the opening part 13c, and moves the posture of the tip holder 12 in a fixed direction. To position. In the case of the present invention, the rotational running direction of the wheel tip 12e is positioned to coincide with the scribe direction.

When attaching the tip holder 12 to the holder joint 13, as shown in Fig. 3, the tip holder 12 is inserted into the opening 13c of the holder joint 13 from the attachment portion 12f. Do it. When the attachment portion 12f is inserted into the opening 13c of the holder joint 13, the contact portion is positioned in contact with the inclined surface 12h of the tip holder 12, and the upper end portion of the tip holder 12 is positioned at the magnet 13e. It is attached to and held on. Thereby, it can attach easily to the holder joint 13 in the state which the attitude | position of the tip holder 12 toward a fixed direction. When changing the wheel tip 12e, the tip holder 12 is pulled out against the magnetic force of the magnet 13e and replaced for each tip holder.

FIG. 5: is an exploded perspective view which shows an example of the tip holder housing 15 which accommodates the tip holder 12, and FIG. 6 is sectional drawing of the state which accommodated the tip holder 12. As shown in FIG. The tip holder housing 15 has a substantially circular storage hole 15a having a cross section penetrating back and forth, and closes the dome-shaped body 15b having a flat bottom face 15y and the front opening of the storage hole 15a. And a rear cap 15d for closing the rear opening. The storage hole 15a is formed with the shaft center parallel to the bottom face 15y. The dome-shaped main body 15b is provided with a flat jaw portion 15e that extends forward and extends forward to the lower edge of the front opening of the storage hole 15a.

When storing the tip holder 12 in the storage hole 15a of the tip holder housing 15, the wheel tip 12e is inserted from the rear opening of the storage hole 15a as a head. At the time of insertion, the flat surface 12b on which the cord 12i of the tip holder 12 is installed is parallel to the bottom surface 15y of the dome-shaped main body 15b and is always in an upward position. The long protrusion 15s to which the slide groove 12k is fitted is formed in the inner surface of the storage hole 15a. Since one end of the slide groove 12k of the tip holder 12 is formed after the cut groove 12c, the cut groove 12c guides when the tip holder 12 is inserted into the storage hole 15a. It can be inserted in 15s of long protrusions, and insertion operation becomes easy. In addition, when inserting the tip holder 12 into the storage hole 15a by hand, a thumb is attached to the flat part 12g with the flat part 12g of the attachment part 12f facing up. When the index finger is stuck in the vicinity of the slide groove 12k on the opposite side to 180 °, the tip holder 12 is pinched with both fingers and inserted into the storage hole 15a, the work efficiency is improved.

The front cap 15c is integrally molded using elastic synthetic resin as a material, and has a flat plate portion 15f and a dome body 15b which are in surface contact with the bottom face 15y of the dome body 15b. An arc-shaped upper cover 15g is provided on the top circumferential surface of the upper surface, and the plate portion 15f and the arc-shaped upper cover 15g are connected by a front wall 15h. Coupling protrusions 15q and 15q are provided on the upper end surface of the free end portion of the plate-shaped portion 15f and the lower end portion of the free end portion of the arc-shaped upper cover 15g, respectively. The front cap 15c is detachably attached to the dome-shaped main body 15b by elastic coupling with the parts 15p and 15p. A handle piece 15r for releasing the engagement of the engaging projection 15q is provided on the opposite side to the engaging projection 15q on the upper side, that is, on the upper end surface of the free end of the arc-shaped upper cover 15g.

An elastic stopper 15v is provided in the vicinity of the front opening of the storage hole 15a. In this embodiment, the elastic stopper 15v is domed in such a manner that it is retractable in a state in which it is elastically pushed up by the spring 15w, and the tip portion protrudes slightly from the inner surface of the storage hole 15a. It is attached to the main body 15b. Moreover, the shoulder part 12m which contacts the elastic stopper 15v is provided in the outer edge of the trunk | drum 12a adjacent to the flat surface 12b of the tip holder 12. As shown in FIG.

As shown in FIG. 6, the elastic stopper 15v temporarily moves forward the tip holder 12 at a position where the flat surface 12b of the tip holder 12 is exposed from the front opening of the accommodation hole 15a. Functions as a stopper for restraint. That is, the shoulder 12m of the tip holder 12 contacts the tip of the elastic stopper 15v to restrain the advancement within the range of the elastic force of the elastic stopper 15v. And when the tip holder 12 is pulled strongly in the withdrawal direction from the front opening against the elastic force of the elastic stopper 15v, the elastic stopper 15v is pressed against the spring 15w to allow the tip holder 12 to proceed. Formed. The shoulder 12m is preferably an inclined surface or an arc as shown in FIG. 6, but may be substantially perpendicular as long as the shoulder 12v rides against the elasticity of the spring 15w. Moreover, although the front end part of the elastic stopper 15v is formed in the inclined surface which faced the inclined surface at the shoulder 12m of the tip holder 12, it may be an arc.

The rear cap 15d is integrally formed from elastic synthetic resin, and the projections 15t formed on the upper and lower sides of the cap inner surface are burnt in the engaging groove 15u provided above and below the outer circumferential surface of the dome-shaped main body 15b. It is attached sexually in combination and detachable.

The front cap 15c prevents the tip holder 12 from falling off from the front opening when the tip holder 12 is accommodated in the tip holder housing 15 while protecting the blade tip of the wheel tip 12e. The inner surface of the front wall 15h is provided with a recess for fitting the blade tip of the wheel tip 12e (see FIG. 6). In addition, the rear cap 15d is for preventing the tip holder 12 from falling off from the rear opening of the accommodation hole 15a.

Instead of the rear cap 15d, an elastic stopper 15x having the same configuration as the elastic stopper 15v is provided near the rear opening of the storage hole 15a, as shown in FIG. You may prevent the holder 12 from falling out of the rear opening part of the storage hole 15a. The tip end portion of the elastic stopper 15x is also formed with an inclined surface facing the inclined surface in the rear opening portion so that the tip holder 12 can be easily inserted and hardly pulled out, but may be an arc.

In the above-described embodiment, an example in which one tip holder 12 is accommodated in each tip holder housing 15 is shown. However, as shown in FIG. 8, a plurality of tip holders, for example, 5 to 10 tip holders are shown. (12) can also be accommodated. In this case, the tail portion of the tip holder 12 (in FIG. 2), in order to prevent the blade tip from being broken by contacting the tip of the preceding tip holder 12 with the wheel tip 12e of the subsequent tip holder 12. It is good to provide the recessed part 12p which fits the edge of a blade into the upper end surface of the ().

A plurality of the tip holder accommodating bodies 15 are prepared so that the tip holders 12 having the different types of wheel tips 12e are classified into the respective tip holder accommodating bodies 15 so as to be housed in the factory . At the time of use, it arrange | positions and arrange | positions to the loading shelf 16 of the substrate processing apparatus A in the state which removed the front part cap 15c.

FIG. 9 is a perspective view showing a loading shelf 16 for aligning and loading a plurality of, for example, three tip holder housings 15 and a robot 17 provided in the vicinity of the loading shelf.

In the present embodiment, the stacking shelf 16 is provided with three shelves 16a for loading the flat bottom surface 15y of the tip holder housing 15 as a stacking surface. In each shelf board 16a, the flat surface 12b of the tip holder 12 accommodated in the tip holder housing 15 is held so as to protrude from the front end edge 16b of the shelf board 16a. The fence frame 16c is provided at the periphery of the shelf board. Moreover, each shelf board 16a is woven in a staircase shape as seen from the front end 16b side.

The robot 17 has a robot arm 17a having a squeezing hook 17b at its distal end and a code 12i attached to the robot arm 17a to read the cord 12i provided on the flat surface 12b of the tip holder 12. The leader 17c is provided. The robot arm 17a is configured such that the clamping hook 17b at its distal end can grip and pull out a pair of flat surfaces 12b and 12b of the tip holder 12 exposed from the tip holder housing 15. Consists of. At this time, since each shelf board 16a is woven in a staircase shape, it is possible to grasp and pull out a desired tip holder 12 without interfering with other tip holders 12, and at the same time, the cord 12i of each tip holder 12 ) Do not overlap on the plane, the reader 12c can easily and accurately read the cord 12i of each tip holder 12 from above.

In addition, when the pair of flat surfaces 12b and 12b are sandwiched and drawn out by the squeezing claw 17b, the claw claw 17b with respect to the pulling direction of the pins 12j and 12j of each flat surface 12b is pulled out. It becomes a jam and can draw out surely and smoothly. At this time, since the pin 12j is arrange | positioned at each flat surface 12b, 12b, the clamping hook 17b can be caught in balance with respect to the extraction direction, and the tip holder 12 can be taken out smoothly. The same applies to the case where the scribe head is pulled out from the holder joint 13 (see FIG. 3).

As shown in FIG. 10, as for the several shelf board 16a in the loading shelf 16, as for the shelf board 16a which is closer to the robot 17 on the same plane, the front-end edge 16b becomes You may retreat so that it may retreat backwards, respectively. As a result, when the tip holder 12 is pulled out by the squeezing hook 17b of the robot arm 17a, similarly to the embodiment assembled in the step shape, the desired tip is not disturbed. The holder 12 can be grasped and pulled out, and the code 12i of each tip holder 12 can be easily read by the leader 17c of the robot arm 17a from above.

As shown in FIG. 11, the shelf plate 16a of the above-described loading shelf 16 is preferably formed to be inclined so that the front end edge 16b is downward. Thereby, when pulling out the tip holder 12 from the tip holder housing 15 with the robot arm 17a, it can take out lightly by the sliding effect by self weight. In particular, when the tip holder housing 15 for storing the plurality of tip holders 12 shown in FIG. 9 is mounted on the shelf plate 16a, the inclination angle of the tip holder 12 is advanced by its own weight. It is good to keep it close to the plate 16a. Thereby, when the preceding tip holder 12 is pulled out, the subsequent tip holder 12 can be advanced by its own weight to stand by for the next withdrawal at the stopper position.

In starting scribing by the substrate processing apparatus of FIG. 1, the board | substrate W is first mounted and hold | maintained on the table 1. FIG. The two CCD cameras 18 and 18 provided on the bridge 8 detect the two alignment marks M1 and M2 on the left and right as shown in FIG. 12. When the straight line S connecting the alignment marks at this time is inclined with respect to the reference straight line L connecting the two CCD cameras 18 and 18, the table 1 is rotated by the rotation driving unit 2. To make the tilt angle equal to zero. In addition, the shift of the wheel tip 12e with respect to the preset scribe start position is also detected by the CCD camera 18. If the shift is in the Y direction, the table 1 is moved by the amount corresponding to the shift amount. Moreover, if it shifts in the X direction, the scribe head 10 will be moved in the X direction by the amount corresponding to the shift amount. This misalignment correction in the X-Y direction and the correction of the inclination angle of the substrate are performed by the control unit 20 of the computer 19 that accompanies the block diagram in FIG. 13.

In the block diagram of FIG. 13, outputs from two CCD cameras 18 are provided to the control unit 20 of the computer 19. The controller 20 rotates the table 1 by operating the table rotation driver 2 based on the correction value, and corrects the tilt angle to zero. In addition, misalignment correction in the X-Y direction is also performed by driving the respective driving units 21 and 22. After the completion of the correction, the tip holder elevating drive unit 23 is driven to lower the tip holder 12, and one or both of the wheel tip 12e and the table 1 while pressing the wheel tip 12e against the substrate W. By moving the substrate W, the substrate W is scribed in the XY direction to form a scribe groove. The travel distance of the wheel tip 12e used at this time is recorded in the data holding part 24, and when it is time to replace the wheel tip 12e, it is displayed with an alarm or the like.

The following data is recorded in the cord 12i of the tip holder 12. Although this code may use a one-dimensional code, for example, a barcode, a two-dimensional code that can input a lot of information in a small area is preferable. The two-dimensional code is formed by printing directly, but a label may be attached. The data is input by a computer that is accompanied by a scribing method and a scribe such as "outer cut" and "inner cut" described below, in addition to the wheel tip specific specifications such as the number for identification of the object, the shape and diameter of the blade tip, and the like. The type number corresponding to the recipe is recorded.

The method of scribing the board | substrate W with a wheel tip has the "outer cut" and the "inner cut", and it is selectively used according to the kind and use of a board | substrate. As shown in Fig. 14A, the "outer cutout" of the board | substrate W in the state which lowered the lowest end part of the wheel tip 12e to slightly below the surface (upper surface) of the board | substrate W. It sets in the outer position (scribe start position) of an edge of an edge. Then, the substrate is moved horizontally from the set position, collided with the end of the substrate, lifted up, and then scribed by moving horizontally while pressing at a predetermined scribe pressure. On the other hand, as shown in FIG.15 (b), the wheel tip 12e is lowered from the upper side to the inner side (scribe start position) from the edge of the board | substrate, and it contacts a board | substrate with a predetermined scribe pressure. The scribe is performed by moving horizontally while pressing. Let the distance from the board | substrate edge at the time of this "outer cut" to a scribe start position be made into "+" value, and the distance from the board | substrate edge at the time of "inside cut" to a scribe start position be made into "-" value, Various scribe recipes of "outer cut" and "inner cut" obtained by dividing these numerical values in stages are previously inputted and set in the computer 19, and the recipe selection button 25 can be selected. For example, when the value of "+" is 2 mm in "outer cut", the button of (A1) is set as the button in (A5) when the value of "-" is 2 mm in "inside cut." Allows a recipe to be selected from multiple choices.

When the wheel tip 12e reaches a replacement time by running a predetermined traveling distance or when the wheel tip 12e is replaced with a wheel tip 12e of another specification, the wheel tip ( 12e) is exchanged. The robot 17 removes the tip holder 12 having the wheel tip 12e to be replaced from the holder joint 13, moves it to a separately prepared storage box, and then attaches to the leader 17c attached to the robot arm 17a. By reading the cord 12i of the tip holder 12 stocked in the tip holder housing 15, the appropriate tip holder 12 is selected, taken out, and attached to the holder joint 13.

Since the model number of the wheel tip 12e suitable for each recipe to be selected is registered in the computer 19, only the selection button 25 of the recipe input previously set in the computer 19 is selected, It can be replaced with a suitable tip holder 12. That is, when the recipe is selected by the selection button 25, the tip holder 12 suitable for the selected recipe is determined, and the robot arm 17a is moved to the tip holder housing 15 loaded on the loading shelf 16. The cord 12i of the tip holder 12 is read by the reader 17c to take out the suitable tip holder 12 from the tip holder housing 15. The pulled out tip holder 12 is attached to the holder joint 13 of the scribe head 10, and is automatically scribed according to a recipe preset in the computer. Therefore, each time a recipe is set, the trouble of selecting the tip holder 12 suitable for the recipe can be eliminated.

As mentioned above, although the typical Example of this invention was described, this invention is not necessarily specific to the said embodiment, Comprising: The objective can be achieved and it can correct suitably and change within the range which does not deviate from a claim.

INDUSTRIAL APPLICATION This invention can be used for the board | substrate processing apparatus which processes or divides the scribe line for dividing into a board | substrate by scribing, pressing a wheel tip to the surface of a board | substrate.

A: Substrate Processing Equipment
W: substrate
1: Table
10: scribe head
12: tip holder
12a: fuselage
12b: flat surface
12c: Notch Groove
12d: Wheel Shaft
12e: Wheel Tip
13: holder joint
15: tip holder housing
15a: storage hole
15b: dome shape body
15c: front cap
15d: rear cap
15m: Shoulder
15v: Elastic Stopper
15w: spring
16: loading lathe
17: robot
17b: stenosis hook

Claims (4)

A tip holder housing for storing a tip holder, the tip holder housing includes a main body having a storage hole for storing the tip holder, an elastic stopper provided near the front opening of the storage hole,
The tip holder includes a body portion attached to a scribe head of a substrate processing apparatus, a pair of flat surfaces formed at one end of the body portion in parallel to an axis of the body portion, and the pair of flat surfaces between the pair of flat surfaces. A cutout groove formed in parallel with the flat surface, a wheel tip attached to the cutout groove, a cord provided on any one of the pair of flat surfaces, and a shoulder in contact with the elastic stopper; The tip holder housing body which is comprised so that it may stop in the state which the flat part provided with the said cord was exposed from the said storage hole by contacting a stopper. The tip holder housing according to claim 1, wherein the elastic stopper is pressed by an elastic body and is attached to the main body of the housing so that the tip is protruded from the inner surface of the storage hole. The said tip holder accommodation body is equipped with the detachable front part cap which covers the front opening part of the said accommodation hole, and the detachable rear part cap which covers the rear opening part of the said accommodation hole. Tip holder housing. 3. The tip holder housing according to claim 1 or 2, wherein the tip holder housing has a detachable front portion cap covering the front opening of the storage hole, and an elastic to prevent the tip holder stored near the rear opening of the storage hole from falling off. Tip holder housing provided with a hook.

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