CN111376398B

CN111376398B - Holder joint, holder unit, and scribing device

Info

Publication number: CN111376398B
Application number: CN201911388602.8A
Authority: CN
Inventors: 阪口良太; 冈岛康智
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2018-12-27
Filing date: 2019-12-27
Publication date: 2024-03-12
Anticipated expiration: 2039-12-27
Also published as: JP2020104420A; CN111376398A; CN211729756U; JP7357892B2; TW202031607A; KR20200081227A

Abstract

The invention aims to provide a holder joint which keeps the posture of a holder unchanged when a scribing line is formed, a holder unit comprising the holder and the holder joint, and a scribing device with the holder joint. A holder joint (100) for holding a holder (40) provided with a scoring wheel (2) is provided with: a hole (110) for inserting the holder; a magnet (105) provided at the deepest portion (110 a) of the hole; a positioning pin (106) extending in a direction perpendicular to the axial direction of the hole at a position displaced in the radial direction from the central axis (M1) of the hole; and two receiving surfaces (111, 112) which extend in the axial direction of the hole on the opposite side of the positioning pin with respect to the center axis of the hole, are provided at positions separated in the radial direction, and receive the retainer. Recesses (111 c, 112 c) are formed in the receiving surface so as to break the receiving surface in the axial direction of the hole.

Description

Holder joint, holder unit, and scribing device

Technical Field

The present invention relates to a holder joint for holding a holder provided with a scribing wheel for forming a scribing line on a surface of a substrate, a holder unit including the holder joint and the holder, and a scribing apparatus provided with the holder joint.

Background

Conventionally, in breaking a brittle material substrate such as a glass substrate, a cutting edge of a scribing wheel moves along a predetermined route while pressing against a surface of the substrate to form a scribing line. The scoring wheel is equipped with a holder that is held at a holder joint.

When a scribing line is formed on a substrate by a scribing wheel, if a force in a direction different from the scribing direction is applied to a holder from the surface of the substrate, the posture of the holder inside a holder joint, that is, the fixed state such as the contact position and angle of the holder joint with the holder, is changed, and the stability of the holder is deteriorated. As a result, the stability of the scribing wheel is deteriorated, and thus it is difficult to form a good scribing line.

The holder joint of patent document 1 includes an opening hole extending in the vertical direction at the lower end of the holder joint, and a magnet and a positioning member provided in the opening hole. A pair of vertical flat surfaces formed symmetrically in a V-shape in a cross section of the opening when viewed in a direction perpendicular to the surface of the substrate are provided on the inner peripheral surface of the opening. When the retainer is inserted into the open hole, the retainer contacts a pair of perpendicular flat surfaces at two bit lines. In this way, the retainer is strongly held by the retainer joint when the retainer is in line contact with the inner peripheral surface of the retainer joint. Thus, even if the holder receives a force from a direction perpendicular to the scribing direction in the surface of the substrate, the holder does not shake, and the scribing wheel can form the scribing line in a stable state.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2017-119348

The holder joint of patent document 1 does not generate rattle of the holder by the above-described structure. However, for example, when forming a curved score line, the posture of the holder may be slightly changed by applying forces from various directions to the holder. In recent years, a brittle substrate used for a smart phone or the like is desired to have a scribe line of higher quality than a conventional thin substrate. Therefore, it is necessary to prevent a minute change in the posture of the holder which has been allowed without a problem in terms of quality in the past.

Disclosure of Invention

Problems to be solved by the invention

In view of the above problems, an object of the present invention is to provide a holder joint that holds a holder in such a manner that the posture of the holder does not change when a scribe line is formed, a holder unit including the holder and the holder joint, and a scribing device including the holder joint.

Means for solving the problems

The main aspect of the present invention relates to a holder joint for holding a holder provided with a scribing wheel for forming a scribing line on a surface of a substrate. The retainer joint according to the present invention includes: a hole for inserting the retainer; a magnet provided at the deepest portion of the hole; a positioning pin extending in a direction perpendicular to an axial direction of the hole at a position displaced radially from a center axis of the hole to the hole; and two receiving surfaces which extend in the axial direction of the hole on the opposite side to the positioning pin with respect to the center axis of the hole, are provided at positions separated in the radial direction, and receive the retainer. The receiving surface is formed with a recess that breaks the receiving surface in the axial direction of the hole.

According to the retainer joint of the present invention, the receiving surface of the retainer for receiving the insertion hole is formed with a recess that breaks the receiving surface in the axial direction of the hole. That is, the diameter of the both ends in the axial direction of the hole is smaller than the diameter of the recess of the receiving surface, which is the region other than the both ends. Therefore, the retainer does not contact the recess of the receiving surface when the retainer is inserted into the hole. The holders are in contact with the broken areas on the receiving surface, i.e. in the areas at both ends of the receiving surface.

In this way, the contact portions of the retainer and the receiving surface are located in the regions of both ends of the receiving surface. The receiving surfaces are provided at two positions separated in the radial direction. Thus, the contact portions of the two receiving surfaces and the retainer are 4 portions. That is, the holder joint is in contact with the holder at a position located in the direction of separation in the axial direction and the radial direction of the hole. In this way, the contact portion between the holder joint and the holder is arranged in the holder joint with good balance, so that the holder joint can reliably hold the holder.

Therefore, even when a force is applied to the holder from a direction different from the scribing direction at the time of scribing, the movement or rotation of the holder in the holder joint can be suppressed. As a case where the posture of the holder is liable to change, for example, a case where a curved scribing line is liable to be formed by applying a force from the side surface direction of the scribing wheel to the holder can be cited. According to the above configuration, since the fixed state of the holder is hardly changed, the scribing wheel can perform the scribing operation in a stable state even with a curved scribing line.

In this case, the receiving surface is formed as an arcuate curved surface that bulges with respect to the central axis of the hole. The receiving surface may be a flat surface extending in the axial direction of the hole.

According to this configuration, even if the receiving surface is a curved surface or a flat surface having an arc shape, the above-described effect is achieved if the receiving surface is formed as a concave portion. The shape of the receiving surface is determined by considering, for example, the shape of the retainer of the insertion hole, the material of the retainer joint and the retainer, and the type and size of the substrate on which the scribe line is formed, or whether the receiving surface is formed in an arcuate curved surface or a planar surface.

In the retainer joint according to the present invention, the recess is provided at a position opposed to the positioning pin in the axial direction of the hole.

According to this configuration, the retainer is inserted into the hole, and one ends of the receiving surface, the positioning pin, and the other ends of the receiving surface are arranged in this order in the axial direction of the hole when viewed from the scribing direction. Thus, the positioning pin is in contact with the retainer, and the force pressing the retainer is applied to the contact portions between the retainer and both ends of the receiving surface located above and below the positioning pin with good balance. Thereby, the retainer is reliably held by the retainer joint. Therefore, even in the case where a force is applied to the holder from a direction different from the scribing direction, the posture of the holder is hardly changed. Thus, the scribing wheel can form a scribing line in a stable state. The "scribing direction" mentioned above means a traveling direction of the scribing wheel when the scribing line is formed on the substrate, and is a side where the positioning pin is provided.

In the retainer joint according to the present aspect, the receiving surface is formed such that both ends of the receiving surface separated by the recess have the same length in the axial direction of the hole.

According to this structure, since the lengths of the one end and the other end in the axial direction of the hole are equal, the retainer and the retainer joint are in contact with each other with good balance. Thus, in the case where a force is applied to the holder from a direction different from the scribing direction, the posture of the holder is more difficult to change. Thus, the scribing wheel can form the scribing line in a more stable state.

The retainer joint according to the present invention is configured to: when the retainer is inserted into the hole, an angle formed by each line segment connecting a contact point, which is a contact point between the two receiving surfaces and the retainer, and the central axis of the retainer is in a range of 45 to 150 degrees, as viewed from a direction perpendicular to the central axis of the hole.

According to this structure, the two receiving surfaces are disposed more apart in the radial direction. Thus, the retainer is more reliably held to the retainer tab. Thus, even in the case where a force is applied to the holder from a direction different from the scribing direction, the posture of the holder is more difficult to change.

A second aspect of the present invention relates to a holder unit provided with a scribing wheel for forming a scribing line on a surface of a substrate. The holder unit according to the present embodiment includes: a holder for holding a scribing wheel for forming a scribing line on a surface of a substrate; and a retainer joint. The retainer joint is provided with: a hole for inserting the retainer; a magnet provided at the deepest portion of the hole; a positioning pin extending in a direction perpendicular to an axial direction of the hole at a position displaced radially from a center axis of the hole to the hole; and two receiving surfaces which extend in the axial direction of the hole on the opposite side to the positioning pin with respect to the center axis of the hole, are provided at positions separated in the radial direction, and receive the retainer. The receiving surface is formed with a recess that breaks the receiving surface in an axial direction of the hole.

With the structure of this embodiment, the same effect as the retainer joint described above is achieved. Thus, the scribing line can be stably formed.

A third aspect of the present invention relates to a scribing apparatus for forming a scribing line on a surface of a substrate by a scribing wheel. The scribing device according to the present embodiment includes: a retainer joint; and a scoring head that holds the holder joint, the holder joint including: a hole for inserting a holder for holding the scoring wheel; a magnet provided at the deepest portion of the hole; a positioning pin extending in a direction perpendicular to an axial direction of the hole at a position displaced radially from a center axis of the hole to the hole; and two receiving surfaces extending in the axial direction of the hole on the opposite side of the center axis of the hole from the positioning pin and provided at positions separated in the radial direction, for receiving the retainer, the receiving surfaces being formed with recesses for breaking the receiving surfaces in the axial direction of the hole

Effects of the invention

As described above, according to the present invention, it is possible to provide a holder joint that keeps the posture of a holder unchanged when a scribe line is formed, a holder unit including the holder and the holder joint, and a scribing apparatus including the holder joint.

The effects and meaning of the present invention will be further clarified by the following description of the embodiments. However, the embodiment shown below is merely an example of the practice of the present invention, and the present invention is not limited to the description of the embodiment below.

Drawings

Fig. 1 (a) is a diagram schematically showing the structure of a scoring device 1 to which a holder joint according to the embodiment is applied. Fig. 1 (b) is a side view of a holder joint according to an embodiment.

Fig. 2 (a) is a plan view of the joint portion of the retainer joint according to the embodiment when viewed from the negative Z-axis side. Fig. 2 (b) is a perspective view showing the structure of the joint portion of the retainer joint according to the present embodiment.

Fig. 3 (a) is a perspective view of the joint portion of the retainer joint according to the embodiment as viewed from the positive X-axis side. Fig. 3 (b) is a diagram schematically showing a force applied to the receiving surface when the joint portion of the retainer joint according to the embodiment is viewed from the X-axis front side.

Fig. 4 (a) is a side view of the joint portion of the holder joint according to the embodiment as viewed from the Y-axis front side. Fig. 4 (b) is a diagram schematically showing a force applied to the receiving surface when the joint portion of the retainer joint according to the embodiment is viewed from the Y-axis positive side.

The upper stage of each of fig. 5 (a) and (b) is a perspective view showing the structure of the joint portion of the retainer joint according to the modification, and the lower stage is a plan view when the joint portion of the upper stage is viewed from the Z-axis negative side. In fig. 5 (a), the contact angle is 90 degrees, and in fig. 5 (b), the contact angle is 120 degrees.

Fig. 6 (a) to (d) are graphs each showing a measurement result of a movement amount of the retainer measured using the retainer joint according to the modification. Fig. 6 (a) and (b) show measurement results for the case where the contact angle is 90 degrees, and fig. 6 (c) and (d) show measurement results for the case where the contact angle is 120 degrees.

Fig. 7 (a) and (b) are graphs showing the results of the movement amounts of the retainers measured using the retainer joint according to the comparative example.

Fig. 8 (a) is a graph showing a measurement result of the movement amount of the retainer measured by increasing the force applied to the retainer using the retainer joint according to the modification example. Fig. 8 (b) is a graph showing a measurement result of the movement amount of the retainer measured by increasing the force applied to the retainer using the retainer joint according to the comparative example.

The upper stage of each of fig. 9 (a) and (b) is a perspective view showing the structure of the joint portion of the retainer joint according to another modification, and the lower stage is a plan view when the joint portion of the upper stage is viewed from the Z-axis negative side. In fig. 9 (a), the contact angle is 90 degrees, and in fig. 9 (b), the contact angle α is 120 degrees.

Reference numerals illustrate:

1 … scoring device

2 … scoring wheel

4 … holder unit

10 … scoring head

40 … retainer

100 … retainer joint

105 … magnet

106 … locating pin

110 and … holes

110a … deepest part

111 … bearing surface

111a … end (two ends)

111b … end (two ends)

111c … area (concave portion)

112 … bearing surface

112a … end (two ends)

112b … end (two ends)

112c … area (concave portion)

Central axis of M1 … hole

Central shaft of M2 … retainer

Line segment L1, L2 …

α … contact angle.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, for the sake of low cost, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other. The Z axis shows the upper and lower sides in the vertical direction. Hereinafter, upper and lower refer to the positive Z-axis side and the negative Z-axis side, respectively. In the present embodiment, the scribing wheel 2 travels on the surface of the substrate F to form a scribing line. Then, the traveling direction of the scribing wheel 2 is referred to as a "scribing direction", and in particular, the positive X-axis direction is sometimes referred to as a "front of the scribing direction". In addition, the direction perpendicular to the scribing direction may be referred to as a "direction different from the scribing direction" with respect to the surface of the substrate F.

< Structure of scribing device >

Fig. 1 (a) is a diagram schematically showing the structure of a scoring device 1 to which a holder joint 100 is applied. Fig. 1 (b) is a side view of the holder tab 100.

As shown in fig. 1 (a), the scribing apparatus 1 includes a scribing head 10, a moving mechanism 20, and a supporting mechanism 30. The scribing head 10 forms a scribing line on the substrate F supported by the support mechanism 30. The moving mechanism 20 moves the scribing head 10 in the scribing direction (X-axis positive direction). The support mechanism 30 carries the substrate F on the upper surface and supports the substrate F. The supporting mechanism 30 conveys the supported substrate F in the Y-axis direction at the pitch of the scribe lines.

The substrate F scored by the scoring wheel 2 according to the embodiment is a brittle material substrate such as a glass substrate or a ceramic substrate. Alternatively, a substrate in which a resin such as PET or polyimide resin is laminated on a brittle material substrate may be used. Further, a bonded substrate may be formed by bonding a plurality of brittle material substrates together with an adhesive layer.

The moving mechanism 20 includes a moving member 21, a transfer portion 22, supporting portions 23a and 23b, and a driving mechanism 24. The moving member 21 is formed of a plate-like member and supports the scribing head 10. The transfer unit 22 includes a rail or the like for guiding the moving member 21 in the X-axis direction, and transfers the moving member 21 in the X-axis direction. The support portions 23a and 23b support the transfer portion 22. The driving mechanism 24 is a driving source of the transfer unit 22, and is constituted by a motor.

The support mechanism 30 includes a table 31, guide rails 32a and 32b, and a drive shaft 33. The stage 31 carries a substrate F on the upper surface and supports the substrate F. The guide rails 32a and 32b convey the table 31 in the Y-axis direction. The drive shaft 33 is a shaft having a tooth space on the outer periphery, and is engaged with the tooth space of the hole formed in the table 31. The drive shaft 33 is rotated by a motor, not shown, and thereby drives the table 31 in the Y-axis direction.

The scribing head 10 is provided to the moving member 21 of the moving mechanism 20 in a direction (Z-axis direction) perpendicular to the surface of the substrate F. The scribing head 10 is provided so as to be guided by the moving member 21 to move in the X-axis direction. The scoring head 10 includes a holder joint 100 at a lower end. The holder 40 holding the scoring wheel 2 is mounted to the scoring head 10 via a holder joint 100.

As shown in fig. 1 (b), the holder joint 100 includes a rotation shaft portion 101 and a joint portion 102. In the rotation shaft portion 101, bearings 103a and 103b are disposed on the positive and negative sides of the Z axis, respectively, with a cylindrical spacer 104 interposed therebetween. The holder joint 100 is rotatably held by the scoring head 10.

The joint portion 102 of the holder joint 100 is formed with a hole 110 that opens to the negative Z-axis side. As shown by the one-dot chain line in fig. 1 (b), the hole 110 has a central axis M1 parallel to the Z axis, and the direction of the central axis M1 of the hole 110 will be hereinafter simply referred to as "axial direction". Inside the hole 110, a magnet 105 is provided in the deepest portion 110a of the hole 110. In addition, as a positioning member of the retainer 40, a positioning pin 106 is provided in the hole 110 in a direction perpendicular to the central axis M1 of the hole 110 at a position displaced in the radial direction from the central axis M1 of the hole 110. The positioning pin 106 is located forward in the scribing direction with respect to the scribing wheel 2 at the time of scribing. The retainer 40 is inserted into the hole 110 so as to be mounted to the retainer tab 100. In addition, the inclined surface 40a is formed by cutting the outer side surface of the holder 40.

When the holder 40 is inserted into the hole 110, the upper end of the holder 40 is attracted by the magnet 105. At this time, the inclined surface 40a of the retainer 40 abuts against the positioning pin 106, and the retainer 40 is positioned at an accurate position. Thus, as shown in fig. 1 (b), the retainer 40 is attached to the lower end of the joint 102. That is, the holder 40 is attached to the scoring head 10 via the holder joint 100. As described above, when the retainer 40 is attached to the joint portion 102, the retainer joint 100 is integrated with the retainer 40, and the retainer unit 4 is configured.

Next, the structure of the retainer joint 100, particularly the joint portion 102, will be described in detail with reference to fig. 2 (a) to 4 (b).

Fig. 2 (a) is a plan view of the joint 102 viewed from the negative Z-axis side, and shows a cross section of the hole 110. Fig. 2 (b) is a perspective view showing the structure of the joint portion 102 of the holder joint 100. Fig. 2 (a) is a plan view showing a case where the hole 110 of the joint 102 is viewed from the negative Z-axis side when the holder 40 holding the scribing wheel 2 is attached to the joint 102 as shown in fig. 1 (b). As shown in fig. 1 (b), in the present embodiment, an axis extending in the Z-axis direction, which is a direction perpendicular to the brittle material substrate F, through a contact point between the scribing wheel 2 and the brittle material substrate F is referred to as "central axis M2 of the holder 40", and simply as "central axis M2". The central axis M2 of the retainer 40 and the central axis M1 of the hole 110 do not necessarily coincide.

As shown in fig. 2 (a), the inner peripheral surface of the hole 110 is composed of two receiving surfaces 111, 112 and non-contact surfaces 113, 114. The two receiving surfaces 111 and 112 are surfaces that can be brought into contact with the retainer 40, and are disposed at positions separated from each other in the radial direction of the hole 110 along the axial direction of the hole 110 on the opposite side of the positioning pin 106 with respect to the center axis M1 of the hole. That is, the two receiving surfaces 111, 112 are provided on the negative side and the positive side of the Y axis, respectively, so as to be symmetrical with respect to the X axis. The receiving surfaces 111 and 112 are formed so as to occupy the same area as the hole 110.

The "surfaces 111 and 112 are surfaces that can be brought into contact with the holder 40" means that the surfaces are brought into contact with the holder 40 in the region of the two surfaces 111 and 112.

The non-contact surfaces 113 and 114 are surfaces which do not contact the retainer 40, and are formed so as to extend in the axial direction. The receiving surfaces 111, 112 are curved surfaces having the same radius as the outer diameter of the retainer 40, and are formed to have a diameter larger than the diameter of the non-contact surface 113 and smaller than the diameter of the non-contact surface 114. The non-contact surface 114 on the positive side of the X-axis occupies a larger area of the aperture 110 than the non-contact surface 113 on the negative side of the X-axis occupies the aperture 110. In fig. 2 (a), the curvature of the non-contact surface 114 is shown as being larger than the curvature of the non-contact surface 113, but the curvature may be the same.

The receiving surfaces 111, 112 have regions of different two diameters. As shown in fig. 2 (b), the receiving surface 111 is formed such that the diameter of the region other than the both ends of the receiving surface 111 in the axial direction, i.e., the Z-axis direction, is larger than the diameter of the both ends. That is, the receiving surface 111 is formed with a concave portion in the circumferential direction to disconnect both ends in the axial direction. The positive Z-axis side and the negative Z-axis side of both ends of the receiving surface 111 are referred to as "end 111a" and "end 111b", respectively. In addition, the concave portion is referred to as "region 111c". The region 111c is recessed on the receiving surface 111, so that the retainer 40 is not in contact with the region 111 c. In addition, regarding the boundaries of the end portions 111a, 111b and the non-contact surface 113, the positive Z-axis side is referred to as "boundary 111d", and the negative Z-axis side is referred to as "boundary 111e".

In fig. 2 (b), the receiving surface 112 is not shown, but the receiving surface 112 is also formed with a recess similar to the receiving surface 111, and is composed of end portions 112a, 112b, and a region 112 c. Between the end portions 112a and 112b and the non-contact surface 113, a boundary 112d exists on the positive Z-axis side, and a boundary 112e exists on the negative Z-axis side. These are illustrated in fig. 3 (a). In addition, as with the region 111c, the region 112c is recessed on the receiving surface 112, and therefore the retainer 40 does not contact the region 112 c.

Accordingly, as described above, the "two receiving surfaces 111, 112 are surfaces that can be brought into contact with the retainer 40" means that the two receiving surfaces 111, 112 are brought into contact with the retainer 40 in the region of the two receiving surfaces 111, 112, but more specifically means that the two receiving surfaces 111 are brought into contact with the retainer 40 in the regions of the end portions 111a, 111b of the receiving surface 111 and the end portions 112a, 112b of the receiving surface 112.

Here, as shown in fig. 1 (b), when the retainer 40 is inserted into the hole 110, the positioning pin 106 contacts the inclined surface 40a of the retainer 40. At this time, a force in the X-axis negative direction, which is a direction opposite to the scribing direction, is applied from the positioning pin 106 to the holder 40, and the receiving surfaces 111, 112 contact the holder 40 so as to sandwich the holder 40. Therefore, the boundaries 111d, 111e and the boundaries 112d, 112e are portions of the receiving surfaces 111, 112 that are easily contacted by the retainer 40. In the present embodiment, as shown in fig. 2 (a), the angle between the line segment L1 and the line segment L2 is set to 54 degrees, the line segment L1 is a line segment connecting the boundary 111e and the central axis M2 of the holder 40, and the line segment L2 is a line segment connecting the boundary 112e and the central axis M2 of the holder 40. The angle formed by the line segment L1 and the line segment L2 is hereinafter referred to as "contact angle α".

Fig. 3 (a) is a perspective view of the joint portion 102 of the holder joint 100 as viewed from the X-axis positive side immediate drawing direction. Fig. 3 (b) is a schematic diagram for explaining the forces applied to the receiving surfaces 111 and 112 when the joint portion 102 of the holder joint 100 is viewed from the X-axis positive side immediate stroke direction. In fig. 3 (b), the retainer 40 is omitted, and the positioning pin 106 is shown with a broken line.

Fig. 3 (a) illustrates the end portions, the regions, and the non-contact surface 113 of the receiving surfaces 111 and 112 described above. The retainer 40 is in contact with the end portions 111a, 111b of the receiving surface 111 and the end portions 112a, 112b of the receiving surface 112 shown in fig. 3 (a). That is, the retainer 40 is in contact with the inner peripheral surface of the hole 110 at 4 locations. The 4-part contact portions are arranged so as to be dispersed in the axial direction and the radial direction of the hole 110. The contact portions of these 4 portions will be described with reference to fig. 3 (b).

As described above, when the holder 40 is inserted into the hole 110, the positioning pin 106 contacts the holder 40, and the positioning pin 106 presses the holder 40 in the X-axis negative direction, which is the rear side in the scribing direction (see fig. 1 (b)). As shown in fig. 3 (b), the force of the positioning pin 106 pressing the retainer 40 is applied to the end portions 111a and 111b of the receiving surface 111 and the end portions 112a and 112b of the receiving surface 112, which are in contact with the retainer 40, in a dispersed manner. Thus, the retainer joint 100 can receive the retainer 40 at 4 positions with good balance. That is, the holder joint 100 can appropriately hold the holder 40.

Fig. 4 (a) is a side view when viewed from the Y-axis front side of the case where the holder 40 is inserted into the joint portion 102 of the holder joint 100. Fig. 4 (b) is a schematic view corresponding to fig. 4 (a) and illustrating the forces applied to the receiving surfaces 111, 112. In fig. 3 (a), the holder 40 is shown by a broken line.

As shown in fig. 4 (a), a region 111c as a recess is provided at a position facing the positioning pin 106 in the axial direction of the hole 110. That is, the positioning pin 106 is disposed between the end portions 111a, 111b of the receiving surface 111 that are separated by the region 111c that is the concave portion. Accordingly, as shown by the arrow in fig. 4 (b), the positioning pin 106 contacts the retainer 40, and the force pressing the retainer 40 is dispersed to the end 111a of the receiving surface 111 located above the positioning pin 106, 111b located below the positioning pin 106, and the retainer 40. In fig. 4 (a), a case is shown in which the retainer 40 is pressed by the positioning pin 106, as in the case of the Y-axis negative side, while the force is applied to the end 112a above the positioning pin 106 and the end 112b below the positioning pin 106 of the receiving surface 112 in a dispersed manner. By disposing the receiving surfaces 111 and 112 and the positioning pin 106 in this way, the posture of the retainer 40 in the retainer joint 100 is easily stabilized, and the retainer joint 100 can reliably hold the retainer 40.

When the end portions 111a and 111b of the receiving surface 111 and the end portions 112a and 112b of the receiving surface 112 are formed to have the same length in the axial direction of the hole 110, the retainer 40 and the retainer joint 100 are in contact with each other more evenly, and the fixed state of the retainer 40 is stabilized. Thus, the holder tab 100 can more reliably hold the holder 40.

In the case of forming a scribing line on the substrate F using the scribing apparatus 1, first, the holder 40 to which the scribing wheel 2 is mounted to the scribing head 10. The scribing device 1 moves the scribing head 10 to a predetermined position, and applies a predetermined load to the scribing wheel 2 to bring it into contact with the substrate F. Thereafter, the scribing apparatus 1 moves the scribing head 10 in the X-axis direction, and presses the scribing wheel 2 to form a scribing line on the substrate F while rotating (turning) in contact with the substrate F. The scribing device 1 rotates or moves the table 31 in the Y-axis direction as necessary.

In the above embodiment, the scribing apparatus in which the scribing head moves in the X-axis direction and the table 31 moves and rotates in the Y-axis direction is shown, but the scribing head and the table may move relatively in the scribing apparatus. For example, a scribing device in which a scribing head is fixed and a stage is moved in the X-axis and Y-axis directions and rotated may be used.

Verification

Next, when the holder provided with the scribing wheel is attached to the holder joint of the above embodiment and a force is applied to the holder from a direction different from the scribing direction, a change in the fixing state of the holder and the holder joint is verified. In the verification, a holder joint having a joint portion with a contact angle α formed to be 54 degrees was used.

First, the holder joint was fixed by the bench clamp, and the holder was pressed from the side, and a force from the positive and negative Y-axis directions, which are forces transverse to the scribing direction, was applied to the holder by 1N, respectively, to measure the movement amount of the holder. As a result, the holder of the present invention has a movement amount of about several μm, and the fixed state is hardly changed. In addition, it was confirmed that the amount of movement was suppressed to half or less compared to the case where the retainer was held by a conventional retainer tab (i.e., a retainer tab having no recess formed in the receiving surface).

Therefore, in the holder joint according to the present invention, the scribing operation can be performed in a stable state with little variation in the posture and position of the holder. In particular, when forming a scribe line of a curve that applies a lateral force to the holder, a desired scribe line can be formed on the surface of the substrate by using the holder joint of the present invention.

< effects of embodiments >

According to the present embodiment, the following effects are exhibited.

As shown in fig. 2 (a), two receiving surfaces 111 and 112 that can be in contact with the retainer 40 and non-contact surfaces 113 and 114 that do not contact with the retainer 40 are formed on the inner peripheral surface of the hole 110 of the joint portion 102. By providing the area not in contact with the holder 40 in this way, the holder 40 can be easily attached to and detached from the holder joint 100.

As shown in fig. 2 (b) and 3 (a), the receiving surfaces 111 and 112 are provided with regions 111c and 112c which do not contact the retainer 40, and the retainer 40 contacts the end portions 111a and 111b through the region 111c and contacts the end portions 112a and 112b through the region 112 c. Thus, the holder 40 is in contact with the joint 102 at 4 positions. Therefore, the force pressed against the retainer 40 by the positioning pin 106 is well balanced and distributed to the end portions 111a and 111b and the end portions 112a and 112b. Thus, the holder joint 100 can reliably hold the holder 40. Therefore, even in the case where a force is applied to the holder 40 from a direction different from the scribing direction, the posture of the holder 40 is hardly changed. Thus, the scribing wheel 2 can form a scribing line in a stable state.

The retainer 40 and the joint 102 are manufactured within a predetermined tolerance in the manufacturing process, and thus the respective products slightly deviate from each other in actual dimensions. Further, with the lapse of the use period of the holder joint 100 and the holder 40, there are cases where wear and deformation are slightly compared with the use start. Therefore, in the present embodiment, as shown in fig. 2 (b) and 3 (a), the retainer 40 is configured to be in contact with a certain position in the region of the end portions 111a and 111b of the receiving surface 111 and the end portions 112a and 112b of the receiving surface 112. As a result, the retainer 40 reliably contacts the end portions 111a and 111b of the receiving surface 111 and the end portions 112a and 112b of the receiving surface 112, regardless of variations in the dimensions within the tolerance of the retainer joint 100 and the retainer 40, even when the retainer joint 100 and the retainer 40 are slightly deformed due to wear, as described above.

As shown in fig. 2 (b), the end portions 111a and 111b of the receiving surface 111 and the end portions 112a and 112b of the receiving surface 112 are arranged along the axial direction of the hole 110, and are arranged so as to be separated from each other along the radial direction of the hole 110. Thus, the retainer 40 is in contact with the joint 102 at 4 locations, and the contact locations are arranged with good balance. Thus, the holder joint 100 can reliably hold the holder 40. Therefore, even in the case where a force is applied to the holder 40 from a direction different from the scribing direction, the holder 40 is more difficult to shake. Thus, the scribing wheel 2 can form a scribing line in a more stable state.

As shown in fig. 4 (a) and (b), the positioning pin 106 is disposed between the end portions 111a and 111b of the receiving surface 111. The positioning pin 106 is disposed between the end portions 112a, 112b of the receiving surface 112. Therefore, the positioning pin 106 contacts the retainer 40, and the force pressing the retainer 40 is applied to the contact portions of the end portions 111a, 111b of the receiving surface 111 and the retainer 40 with good balance. The same applies to the end portions 112a, 112b of the receiving surface 112. Thereby, the retainer 40 is reliably held by the retainer joint 100. Therefore, even when a force is applied to the holder 40 from a direction different from the scribing direction, the posture of the holder 40 and the fixing state with respect to the holder joint do not change. Thus, the scribing wheel 2 can form a scribing line in a stable state.

As shown in fig. 4 (a) and (b), when the concave portions are formed so that the lengths of the end portions 111a and 111b of the receiving surface 111 in the axial direction of the hole 110 and the lengths of the end portions 112a and 112b of the receiving surface 112 in the axial direction of the hole 110 are equal, the retainer 40 and the retainer joint 100 are in good balance contact. Thus, in the case where a force is applied to the holder 40 from a direction different from the scribing direction, the posture of the holder 40 is more difficult to change. In this case, the length of the end portions 111a, 111b of the receiving surface 111 in the axial direction of the hole 110 is preferably about 2 mm. The same applies to the end portions 112a, 112b of the receiving surface 112. The depth of the regions 111c and 112c is not particularly limited, but is, for example, 15 to 35 μm.

< modification example >

(1) The receiving surface being curved

The upper stage of each of fig. 5 (a) and (b) is a perspective view showing the structure of the joint portion 102 of the retainer joint 100 according to the modification. The lower stage is a plan view of the joint 102 of the upper stage as viewed from the negative side of the Z axis, and is a view showing a cross section of the hole 110. In fig. 5 (a), the contact angle α is 90 degrees, and in fig. 5 (b), the contact angle α is 120 degrees.

In the above embodiment, the contact angle α is 54 degrees, but the contact angle α is not limited to the above angle. For example, as shown in fig. 5 (a), the receiving surfaces 111, 112 may be formed in the hole 110 such that the contact angle α is 90 degrees. As shown in fig. 5 (b), the receiving surfaces 111 and 112 may be formed in the hole 110 so that the contact angle α is 120 degrees.

As shown in fig. 5 (a) and (b), when the receiving surfaces 111 and 112 are formed so that the contact angle α is larger than 54 degrees, the intervals between the receiving surfaces 111 and 112 are arranged more apart. Thus, the retainer 40 is more reliably held by the retainer tab 100. Thus, even in the case where a larger force is applied to the holder 40 from a direction different from the scribing direction, in particular, from a direction perpendicular to the scribing direction, the posture of the holder 40 is hard to change. Therefore, the scribing wheel 2 can perform the scribing operation in a more stable state.

[ verification 1]

Next, in the case where the holder having the scribing wheel is attached to the holder joint of the above-described modification, that is, the holder joint having the contact angle of 90 degrees and 120 degrees, respectively, and a force from a direction different from the scribing direction, that is, a left-right direction when viewed from the scribing direction is applied to the holder, a change in the fixing state of the holder is verified.

First, two holder tabs a and B, which are holder tabs having a contact angle of 90 degrees, and three holders a, B, c are prepared. The two holder tabs, i.e. holder tab a and holder tab B, are of the same shape as each other. The holder a was attached to the holder joint a, and a force of 3N was applied to the holder a from a direction different from the scribing direction, that is, the Y-axis positive direction by pressing one side surface of the holder, and the movement amount of the holder a was measured. Next, the holder was pressed from a side surface facing the one side surface of the holder, a force of 3N was applied from a direction different from the scribing direction, that is, a Y-axis negative direction, and the movement amount of the holder a was measured. Then, the total of these amounts of movement is calculated. Five such assays were performed on holder a. This measurement was also performed for holders b and c. The same measurement as described above was also performed for the holder joint B.

Next, two holder tabs, i.e., holder tab C and holder tab D, and holders a, b, C, each having a contact angle of 120 degrees are prepared. The same holders as those used in the above-described verification of 90 degrees in contact angle were used for the three holders a, b, and c. The two holder tabs, i.e. holder tab C and holder tab D, are of the same shape as each other. By using these holder tabs and holders, the amounts of movement of holders a, b, and c are measured in the same manner as described above.

As a comparative example, two retainer tabs E and F, which are retainer tabs having a contact angle of 54 degrees and no recess provided in the receiving surface, and three retainers a, b, and c were prepared. The same holders as those used for the verification of the contact angles of 90 degrees and 120 degrees were used for the three holders a, b, and c. The two holder tabs, i.e., holder tab E and holder tab F, are the same shape as each other. By using these holder tabs and holders, the amounts of movement of holders a, b, and c are measured in the same manner as described above.

Fig. 6 is a graph showing the results of the amounts of movement of the retainers measured using the retainer joint according to the modification example. Fig. 6 (a) and (B) show measurement results when the contact angle is 90 degrees, fig. 6 (a) shows the case of using the holder joint a, and fig. 6 (B) shows the case of using the holder joint B. Fig. 6 (C) and (D) show measurement results when the contact angle is 120 degrees, fig. 6 (C) shows the case of using the holder joint C, and fig. 6 (D) shows the case of using the holder joint D. Fig. 7 (a) and (b) are graphs showing the result of the movement amount of the retainer measured using the retainer joint according to the comparative example, and fig. 7 (a) is a case where the retainer joint E is used and fig. 7 (b) is a case where the retainer joint F is used.

In the graphs of fig. 6 (a) to (d) and the graphs of fig. 7 (a) and (b), the retainer a is shown by a solid line, the retainer b is shown by a broken line, and the retainer c is shown by a one-dot chain line. In fig. 6 (d), the results of the holders a, b, and c are repeated.

As shown in fig. 6 (a) and (b), even when a relatively strong force of 3N is applied to the holders a, b, and c from a direction different from the scribing direction in the holder joint having the contact angle of 90 degrees, the total amount of movement in the case of applying force from the positive and negative directions of the Y axis does not exceed 10 μm in all the combinations of the holder joint and the holder.

As shown in fig. 6 (c) and (d), in the holder joint in which the contact angle is 120 degrees, the total amount of movement of the holders a, b, and c is 0 μm in the plurality of combinations, but 1 μm at the maximum, and the holders a, b, and c hardly move.

On the other hand, as shown in fig. 7 (a) and (b), in the conventional holder joint, the movement amounts of the holders a, b, and c often exceed 10 μm, and the variation caused by the individual holders a, b, and c is large.

As a result, in the holder joint according to the modification, even if a force in a direction different from the scribing direction is applied to the holder, the holder can be held more reliably and is less likely to be affected by individual differences of the holder.

[ verification 2]

Next, a holder joint having a contact angle of 120 degrees and holders a and b according to the modification are prepared. The holder a was attached to the holder joint, and forces from the positive and negative directions of the Y axis, which are directions different from the scribing direction, were added 1N to 5N each time to the holder a, and the amounts of movement in the positive and negative directions of the Y axis each time the force was added were measured, and the total of the amounts of movement was calculated. This measurement was also performed for holder b.

As a comparative example, a holder joint having a contact angle of 54 degrees and having no recess in the receiving surface, and holders a and b were prepared. The holders a and b were the same as those used in the above-described verification of 120 degrees in contact angle. By using these holder tabs and holders, the amounts of movement of holders a, b are measured in the same manner as described above.

The graph of fig. 8 (a) shows the result of the amount of movement of the retainer measured using the retainer joint according to the modification. The graph of fig. 8 (b) shows the result of the amount of movement of the retainer measured using the retainer joint according to the comparative example.

In the diagrams of fig. 8 (a) and (b), the holder a is shown by a solid line, and the holder b is shown by a broken line.

As shown in fig. 8 (b), in the holder joint according to the comparative example, as the force applied to the holders a, b increases, the movement amount of the holders a, b increases. In contrast, in the holder joint according to the modification, it was confirmed that even if the forces applied to the holders a and b were increased, the amount of movement was hardly increased.

From these results, in the holder joint according to the modification, even when the force applied to the holder in the direction different from the scribing direction increases, the holder can be reliably held. Thus, it is presumed that the variation in the posture of the holder can be suppressed.

(2) The receiving surface being planar

The upper stage of each of fig. 9 (a) and (b) is a perspective view showing the structure of the joint portion 102 of the retainer joint 100 according to the modification. The lower stage is a plan view of the joint 102 of the upper stage as viewed from the negative side of the Z axis, and is a view showing a cross section of the hole 110. In fig. 9 (a), the contact angle α is 90 degrees, and in fig. 9 (b), the contact angle α is 120 degrees.

In the present embodiment and the modification described above, the receiving surfaces 111 and 112 are curved surfaces that are arcuate and bulge in the radial direction with respect to the central axis M1 of the hole 110. In another modification, as shown in fig. 9 (a) and (b), the receiving surfaces 111 and 112 are formed as planes extending along the axial direction of the hole 110.

Even when the receiving surfaces 111 and 112 are configured as shown in fig. 9 (a) and (b), the retainer 40 is properly held by the retainer joint 100 in the same manner as in the above-described embodiment and modification 1. Thus, even in the case where a force is applied to the holder 40 from the Y-axis direction, the posture of the holder 40 is hardly changed. In addition, when the contact angle α is increased, the retainer 40 is more reliably held by the retainer joint 100 as in the modification. Thus, even in the case where a force is applied to the holder 40 from the Y-axis direction, the posture of the holder 40 is more difficult to change. Therefore, the scribing wheel 2 can perform the scribing operation in a more stable state.

The shape of the holder 40, the material of the holder joint 100 and the holder 40, the type and size of the substrate F on which the scribe lines are formed, and the like can be determined by considering whether the receiving surfaces 111 and 112 are curved or planar.

In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical idea shown in the claims.

Claims

1. A holder joint for holding a holder provided with a scribing wheel for forming a scribing line on a surface of a substrate, the holder joint being characterized in that,

The retainer joint is provided with:

a hole for inserting the retainer;

a magnet provided at the deepest portion of the hole;

a positioning pin extending in a direction perpendicular to an axial direction of the hole at a position displaced radially from a center axis of the hole to the hole; and

two receiving surfaces which extend in the axial direction of the hole on the opposite side to the positioning pin with respect to the center axis of the hole, are provided at positions separated in the radial direction, receive the retainer,

a concave portion is formed in the receiving surface to break the receiving surface in the axial direction of the hole,

when the retainer is inserted into the hole, an angle formed by each line segment connecting a contact point with the central axis of the retainer is in the range of 90-150 degrees, when viewed from the direction perpendicular to the central axis of the hole, the contact point is the contact point of the two receiving surfaces with the retainer,

the recess is provided at a position opposed to the positioning pin in the axial direction of the hole.

2. The holder joint according to claim 1, wherein,

the receiving surface is a curved surface having an arcuate shape and bulging with respect to a central axis of the hole.

3. The holder joint according to claim 1, wherein,

the receiving surface is a plane extending along an axial direction of the bore.

4. A holder joint according to any one of claims 1 to 3, characterized in that,

the receiving surface is divided by the recess portion so that the receiving surface has the same length in the axial direction of the hole.

5. A retainer unit, comprising:

a holder for holding a scribing wheel for forming a scribing line on a surface of a substrate; and

the connector of the retainer is provided with a plurality of connecting pins,

the retainer joint is provided with:

a hole for inserting the retainer;

a magnet provided at the deepest portion of the hole;

the receiving surface is formed with a recess portion that breaks the receiving surface in an axial direction of the hole,

6. A scribing apparatus for forming a scribing line on a surface of a substrate by a scribing wheel, the scribing apparatus comprising:

a retainer joint; and

a scoring head holding the holder joint,

the retainer joint is provided with:

a hole for inserting a holder for holding the scoring wheel;

a magnet provided at the deepest portion of the hole;